US20050104516A1 - Super-thin OLED and method for manufacturing the same - Google Patents
Super-thin OLED and method for manufacturing the same Download PDFInfo
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- US20050104516A1 US20050104516A1 US10/976,807 US97680704A US2005104516A1 US 20050104516 A1 US20050104516 A1 US 20050104516A1 US 97680704 A US97680704 A US 97680704A US 2005104516 A1 US2005104516 A1 US 2005104516A1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/128—Active-matrix OLED [AMOLED] displays comprising two independent displays, e.g. for emitting information from two major sides of the display
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/176—Passive-matrix OLED displays comprising two independent displays, e.g. for emitting information from two major sides of the display
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/90—Assemblies of multiple devices comprising at least one organic light-emitting element
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a super-thin, organic, light-emitting display (OLED) having a super thin glass substrate and a method for manufacturing the same.
- OLED organic, light-emitting display
- Planarized display devices such as an OLED or a thin film transistor liquid crystal display (TFT-LCD) can be formed in super thin and flexible structures.
- a super thin and flexible planarized display device may be produced using a flexible substrate, typically formed of a synthesized resin.
- the thickness of the substrate is maintained in a conventional thickness range because there is significant risk that the synthesized substrate, or thin film layers formed on it, will be deformed during the complicated manufacturing processes.
- Conventional flexible planarized display devices typically bind a highly flexible substrate to a transparent substrate using organic thin films.
- One thin film is formed on one substrate, another on the other substrate.
- the two films are then aligned, placed in contact with each other, and sealed to bond the films together.
- a significant disadvantage associated with producing OLEDs in this manner is that aligning the organic thin films is difficult, not only because the thin films are manufactured separately, but also because it is nearly impossible to tightly adhere thin films that have the same or a similar predetermined pattern.
- each the thickness of the substrate is maintained in a conventional range, which typically exceeds 0.5 mm, because the substrate must have a predetermined strength and temperature resistance to withstand the complicated processes used to from a thin film layers (at least one or more of which may be an organic film) on the substrate.
- Glass materials have been used to form conventional OLED substrates, but the thickness of these substrates could not be reduced to less than 0.5 mm, due to the fabrication constraints described above.
- the present invention provides a flat panel display that includes a glass substrate, an organic light-emitting part, and a sealing part.
- the organic light-emitting part includes one or more organic light-emitting devices (OLED) formed on a surface of the glass substrate, which has a thickness of about 0.05 mm to about 0.5 mm.
- the sealing part seals the organic light-emitting part and protects it from damage during the manufacturing process.
- a method for manufacturing the flat panel display comprises preparing a glass substrate of approximately 0.7 mm thickness or greater; forming a plurality of organic light-emitting devices on a surface of the substrate, wherein the organic light-emitting part comprises a grouping of one or more of the plurality of organic light-emitting devices; sealing each organic light-emitting part; and etching the glass substrate to a predetermined thickness.
- the OLED includes a glass substrate of approximately 0.05 mm to approximately 0.5 mm thickness, an organic light emission layer in contact with a surface of the glass substrate, and a sealing part to seal the organic light emission layer.
- a first electrode is formed on one side of the organic light emission layer, and a second electrode is formed on a second side of the organic light emission layer.
- the sealing part is a stacked film which includes at least a barrier layer and a polymer layer.
- the flat panel display may further include a circular polarized film attached to an outer surface of the sealing part.
- An embodiment of a flat panel display having front and back viewing areas on which the same or different pictures can be displayed substantially simultaneously, together with various methods of manufacture, are also disclosed.
- FIG. 2 is a cross-sectional view of a sealing part shown in FIG. 1 .
- FIG. 3 is a cross-sectional view of an example of an OLED light-emitting part is shown in FIG. 1 .
- FIG. 4 is a cross-sectional view of another example of the OLED light-emitting part in FIG. 1 .
- FIGS. 6 and 7 are cross-sectional views illustrating different embodiments of the manufacturing steps described with reference to FIG. 5D .
- FIG. 8 is a cross-sectional view of an OLED configured in accordance with an embodiment of the present invention.
- FIG. 1 is a cross-sectional view of an OLED configured in accordance with an embodiment of the present invention.
- the organic light-emitting device includes a transparent glass substrate 1 , an organic light-emitting part 2 , and a sealing part 3 that seals the organic light-emitting part 2 .
- the sealing part 3 can include at least a barrier layer and at least a polymer layer. However, as seen in FIG. 2 , the sealing part 3 can also include a polymer layer 32 inserted between a barrier layers 31 and 33 .
- the barrier layers 31 and 33 that constitute a sealing part 3 can be formed of a transparent blocking material, but are not necessarily limited thereto.
- the barrier layer can be formed of a material selected from a metal oxide, a metal nitride, a metal carbide, a metal oxynitride, and a compound of these materials.
- the metal oxide can be an oxide selected from silica, alumina, titania, indium oxide, tin oxide, indium tin oxide, and a compound of these materials.
- the metal nitride can be an aluminum nitride, a silicon nitride, and a compound of these materials.
- the metal carbide can be a silicon carbide, and the metal oxynitride can be a silicon oxynitride.
- Other inorganic materials, such as silicon, that block penetration of moisture or oxygen can also be used as material for the barrier layer.
- barrier layers can be formed using a chemical or vacuum deposition method. However, when a barrier layer is formed using a vacuum deposition method, pores in the barrier layer can grow. To prevent pores from growing, a polymer layer may be formed on the barrier layer.
- the polymer layer may be formed of a polymer selected from an organic polymer, an inorganic polymer, an organometallic polymer, and a hybrid organic/inorganic polymer.
- sealing part 3 can be formed in a variety of forms other than the structure described above, including a super thin sealing part 3 formed in thin films.
- Other thin films that from a sealing part in a super thin structure may also include a polymer layer and a barrier layer, as described above.
- the organic light-emitting part 2 includes an organic light-emitting device, and can be a region for defining a predetermined image.
- the organic light-emitting device is a pixel.
- the organic light-emitting device can be either a passive matrix organic light-emitting device (PMOLED) or an active matrix organic light-emitting device (AMOLED) having a thin film transistor.
- PMOLED passive matrix organic light-emitting device
- AMOLED active matrix organic light-emitting device having a thin film transistor.
- FIG. 3 shows an example of a PMOLED.
- the PMOLED includes a glass substrate 1 , a stripe-patterned first electrode layer 21 formed on the glass substrate 1 , as well as an organic layer 23 and a second electrode layer 24 sequentially formed on the first electrode layer 21 .
- an insulating layer 22 can further be formed between each pattern line of the first electrode layer 21 .
- the second electrode layer 24 can be formed in a pattern substantially orthogonal to the pattern of the first electrode layer 22 .
- the organic layer 23 can be formed of a polymer or non-polymer organic layer.
- the organic layer 23 can be single-layered or multi-layered.
- An exemplary multi-layered organic layer 23 includes a Hole Injection Layer (HIL), a Hole Transport Layer (HTL), an Emission Layer (EML), an Electron Transport Layer (ETL), and an Electron Injection Layer (EIL).
- Organic materials that may be used are copper phthalocyanine (CuPc), N,N′-Di(naphthalene-1-yl)-N,N′-diphenyl-benzidine (NPB), or tris-8-hydroxyquinoline aluminum (Alq3), but are not limited thereto.
- the non-polymer organic layer can also be formed using a vacuum deposition method.
- the organic layer 23 can be formed of a HTL and an EML.
- the HTL can be formed of PEDOT (poly(3,4-ethylenedioxythiophene)
- the EML can be formed of a Poly-Phenylenevinylene (PPV) and Polyfluorene.
- a screen printing method or an ink jet printing method can be used for forming these layers.
- the first electrode layer 21 performs as an anode
- the second electrode layer 24 performs as a cathode.
- the function of these electrodes can be reversed.
- the organic light-emitting device is a rearward light-emitting device.
- the first electrode layer 21 is an electrode formed of a transparent conductive material such as, but not limited to, indium tin oxide (ITO).
- ITO indium tin oxide
- the second electrode layer 24 is formed by depositing ITO, or similar transparent conductive material, on a semi-transparent thin film made of Magnesium-Silver (Mg—Ag) or similar metal or metal alloy.
- FIG. 4 shows an example of an AMOLED.
- the pixels of the organic light-emitting part 2 of FIG. 1 have the same thin film transistor (TFT) structure and electrode (EL) device (OLED), as depicted in FIG. 4 .
- TFT thin film transistor
- EL electrode
- FIG. 4 shows an example of an AMOLED.
- the TFT configuration of FIG. 4 is not necessarily limited to that shown, but may vary depending on the embodiment.
- a buffer layer 11 formed of SiO 2 is formed on a glass substrate 1 , and a TFT is formed on the buffer layer 11 .
- the TFT has an active layer 12 formed on the buffer layer 11 , a gate insulating film 13 formed on the active layer 12 , and a gate electrode 14 formed on the gate insulating film 13 .
- the active layer 12 can be formed of an amorphous silicon thin film or polycrystalline silicon thin film.
- the active layer 12 has a source region and a drain region heavily doped with an n-type or a p-type dopant, respectively.
- a gate insulating film 13 is formed on the active layer 12 , and a gate electrode 14 formed of a conductive film made of MoW or aluminum/ copper (Al/Cu) is formed on a predetermined region on the gate insulating film 13 .
- the gate electrode 14 is connected to a gate line that applies an on/off signal to the TFT.
- the region for forming the gate electrode 14 corresponds to a region for forming a channel region of the active layer 12 .
- An interinsulating layer 15 is formed on the gate electrode 12 , and a source electrode 16 and a drain electrode 17 are respectively connected through contact holes to the source region and the drain region formed on the active layer 12 .
- a passivation film 18 formed of SiO 2 covers the source electrode 16 and the drain electrode 17 , and a planarized film 19 formed of acryl or polyimide is formed on the passivation film 18 .
- the planarized film 19 covers a portion of a lower electrode 21 .
- the planarized film 19 includes a opening therein, which serves as a via.
- a lower electrode 21 forms the bottom of the opening.
- An organic emission layer 23 is formed within the opening in contact with surfaces of the planarized film 19 which from a sides of the opening, and in contact with an upper surface of the lower electrode 21 .
- An upper electrode 24 is formed on a surface of the planarization film 19 and the organic emission layer 21 .
- the TFT is connected to at least a capacitor (not shown) and to a power source.
- the drain electrode 17 is connected to the first electrode layer (lower electrode) 21 which, in this embodiment, is an anode of the OLED.
- variable current passing between the lower electrode 21 and the upper electrode 24 energizes the organic emission layer 23 , causing it to emit various wavelengths (and colors) of light in approximate proportion to the amount of current received.
- the organic emission layer 23 can emit one of a red (R), green (G), or blue (B) color to display predetermined image information.
- the first electrode layer (lower electrode) 21 is connected to the drain electrode 17 of the TFT and receives a positive power source therefrom.
- the second electrode layer (upper electrode) 24 covers whole pixels and supplies a negative power source.
- the organic layer 23 which emits light in response to current supplied thereto, is disposed between the first electrode 21 and second electrode 24 .
- the first electrode layer 21 can be formed of a transparent conductive material such as, but not limited to indium tin oxide (ITO). If the OLED is a rear light-emitting device, the second electrode layer 24 can be formed such that it emits light toward the glass substrate 1 . In such an embodiment, the second electrode layer 24 can be formed by depositing Al/LiF on the entire surface.
- ITO indium tin oxide
- the layer 24 can be formed by depositing indium tin oxide (ITO) on a semi-transparent thin film formed of Magnesium-Silver (Mg—Ag).
- ITO indium tin oxide
- Mg—Ag Magnesium-Silver
- the second electrode layer 24 need not necessarily be formed by depositing its formation material on the entire surface of the substrate or a layer thereof, but rather can be formed in variety of patterns.
- the first electrode layer 21 and the second electrode layer 24 can be configured to have reverse positions and functions.
- an OLED configured in accordance with an embodiment of the present invention has a thickness of approximately 0.05 mm to approximately 0.5 mm. Because a glass substrate 1 of this approximate thickness is super-thin, there is a risk that deformation of the substrate 1 will occur if the conventional manufacturing processes described above are used. To prevent or reduce deformation, an embodiment of the present invention uses an etching process to from a glass substrate 1 to a super-thin thickness of approximately 0.05 mm to approximately 0.5 mm.
- a transparent glass substrate 10 is prepared.
- the thickness T of the transparent glass substrate 10 is sufficiently thick so that the transparent glass substrate 10 has sufficient structural strength to prevent pattern or reduce deformation of the organic light-emitting part during image formation and to prevent or reduce damages or defects during the manufacturing process.
- the thickness T of the transparent glass substrate 10 can be more than 0.7 mm.
- a plurality of organic light-emitting parts 2 are formed on the transparent glass substrate 10 .
- the organic light-emitting parts 2 are identical in configuration and function as the organic light-emitting parts 2 described with reference to FIGS. 1, 2 , 3 and 4 .
- the organic light-emitting parts 2 are sealed by sealing parts 3 .
- the sealing parts 3 can be formed in the thin films as described above.
- the sealing parts 3 After forming the sealing parts 3 , the plurality of organic light-emitting parts 2 are sealed by a sealing glass 50 ( FIG. 5D ). Then a sealing material 51 is applied on edges of the organic light-emitting part region, and the sealing glass 50 is bonded to the sealing material 51 . In this manner, the transparent glass substrate 10 and the sealing glass 50 are bonded and sealed on the edge regions by the sealing material 51 .
- the product is immersed in a basin 52 which contains a predetermined etching solution 53 .
- the etching solution can be fluoric acid, hydrochloric acid, or similar etching material. Over time, the etching solution reduces the thickness T of the transparent glass substrate 10 to a value of approximately 0.05 mm approximately 0.5 mm.
- the sealing glass 50 and the glass substrate 10 are simultaneously, or nearly simultaneously, cut at predetermined cutting points, which may vary, depending on how the organic light-emitting parts 2 were first positioned.
- the sealing glass easily separates from each organic light-emitting part 2 . Thereafter, the sealed edges and pieces of cut sealing glass can be discarded or recycled. In this manner, the organic light-emitting parts can be readily obtained without using an additional separation process because the sealing glass 50 is not bonded to each organic light-emitting part 2 , but only to the edges of each region.
- each piece represents the OLED shown in FIG. 1 .
- a sealing film 54 can be used instead of the sealing glass 50 .
- the sealing film 54 is formed of a material or materials that are insoluble and impermeable to the etching solution 53 .
- the transparent glass 10 can be sealed with a resin material 55 .
- an additional process for removing the sealing resin material 55 after etching is required.
- FIG. 8 is a cross-sectional view of an OLED configured in accordance with another exemplary embodiment of the present invention.
- the basic structure of the OLED of FIG. 8 is the same structure of the OLED described with reference to FIGS. 1, 2 , 3 and 4 .
- a frontal light emission OLED that is, an OLED where the light is emitted toward the sealing part 3 .
- a circular polarized film 6 can be attached on an outer surface of the sealing part 3 to not only block external light from reaching the organic light-emitting devices, but also to give the sealing part 3 an increased predetermined strength.
- the strength of the sealing part 3 can be increased by attaching a glass substrate or film having a thickness of approximately 0.05 mm to approximately 0.3 mm to the sealing part 3 .
- FIG. 9 an OLED configured in accordance with another exemplary embodiment of the present invention is depicted. This is a double-sided OLED formed by combining two OLEDs configured as described above.
- the OLED depicted in FIG. 9 includes a first OLED 40 and a second OLED 40 ′.
- the first OLED 40 includes a display region 4 and a terminal region 8 having an organic light-emitting device formed on the glass substrate 1 .
- the display region 4 is sealed by a sealing part 3 .
- the display region 4 can be considered as a corresponding part to the organic light-emitting part 2 in FIG. 1 , but is not limited thereto.
- the sealing part in this figure is identical to the sealing part 3 previously mentioned.
- the terminal region 8 is not sealed by the sealing part 3 but is exposed to the outside.
- connecting parts 9 such as chip on glass (COG) or flexible printed circuit (FPC) for connecting the external electronic devices are connected to the terminal region 8 .
- the second OLED 40 ′ has the same structure as the first OLED 40 , therefore, a detailed description thereof will be omitted.
- the sealing parts 3 and 3 ′ of the first and the second OLEDs 40 and 40 ′ are bonded contacting each other so that the glass substrates 1 and 1 ′ face outward.
- the terminal regions 8 and 8 ′ are bonded to face in opposite directions. This bonding configuration of the terminal regions 8 and 8 ′ permits the later connection of external devices to the connecting parts 9 and 9 ′. In this manner, a super-thin, double-sided OLED can be constructed.
- the circular polarized films 6 and 6 ′ can be applied on each external surface of the substrates 1 and 1 ′ (or sealing parts 3 and 3 ′) to block external light and increase the strength of is the substrate 1 and 1 ′ (or sealing parts 3 and 3 ′).
- embodiments of the present invention permit a super-thin OLED to be manufactured to have a super-thin glass substrate that is not damaged during the manufacturing process. Moreover, adding a circularly polarized film to an outer surface of a sealing part increases the strength of a super thin OLED and blocks light from reaching and interfering with the organic light-emitting devices.
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US11/745,815 US7828618B2 (en) | 2003-11-14 | 2007-05-08 | Super-thin OLED and method for manufacturing the same |
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KR1020030080539A KR100563057B1 (ko) | 2003-11-14 | 2003-11-14 | 초박형 유기 전계 발광 표시장치 및 그 제조방법 |
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US11/745,815 Active 2025-11-14 US7828618B2 (en) | 2003-11-14 | 2007-05-08 | Super-thin OLED and method for manufacturing the same |
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EP (1) | EP1531502B1 (ja) |
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CN (1) | CN1617641B (ja) |
Cited By (14)
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US20060017154A1 (en) * | 2004-07-26 | 2006-01-26 | Toshimasa Eguchi | Semiconductor device and method for manufacturing same |
US20070126354A1 (en) * | 2005-12-02 | 2007-06-07 | Ching-Ian Chao | Encapsulation structure of double sided organic light emitting device and method of fabricating the same |
US20080078991A1 (en) * | 2006-09-28 | 2008-04-03 | Jongyun Kim | Organic light emitting display and fabricating method thereof and moving device therefor |
CN101937285A (zh) * | 2010-09-29 | 2011-01-05 | 彩虹集团公司 | 一种触摸面板与显示屏集成的oled显示器件 |
WO2012109038A2 (en) * | 2011-02-08 | 2012-08-16 | Applied Materials, Inc. | Method for hybrid encapsulation of an organic light emitting diode |
US20140021499A1 (en) * | 2012-07-19 | 2014-01-23 | Samsung Display Co., Ltd. | Flexible display apparatus and method of fabricating the same |
US20140098005A1 (en) * | 2012-10-09 | 2014-04-10 | Samsung Display Co., Ltd. | Array substrate for flexible display device |
US20140235003A1 (en) * | 2013-02-18 | 2014-08-21 | Samsung Display Co., Ltd. | Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same |
US9147859B2 (en) | 2010-12-03 | 2015-09-29 | Lg Display Co., Ltd. | Organic light emitting display device and method for manufacturing the same |
US9397318B2 (en) | 2012-09-04 | 2016-07-19 | Applied Materials, Inc. | Method for hybrid encapsulation of an organic light emitting diode |
US9437829B2 (en) | 2012-03-22 | 2016-09-06 | Samsung Display Co., Ltd. | Organic light emitting display device and method of manufacturing the same |
US20160285033A1 (en) * | 2015-03-26 | 2016-09-29 | Samsung Display Co., Ltd. | Organic light-emitting display device |
US20170047386A1 (en) * | 2015-10-30 | 2017-02-16 | Lg Display Co., Ltd. | Organic light emitting display device and method of manufacturing the same |
CN107833978A (zh) * | 2017-10-31 | 2018-03-23 | 昆山国显光电有限公司 | 一种显示器件 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
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Also Published As
Publication number | Publication date |
---|---|
EP1531502B1 (en) | 2014-02-26 |
US20070207696A1 (en) | 2007-09-06 |
CN1617641A (zh) | 2005-05-18 |
EP1531502A2 (en) | 2005-05-18 |
KR20050046922A (ko) | 2005-05-19 |
US7828618B2 (en) | 2010-11-09 |
JP4391301B2 (ja) | 2009-12-24 |
KR100563057B1 (ko) | 2006-03-24 |
EP1531502A3 (en) | 2007-08-01 |
JP2005150076A (ja) | 2005-06-09 |
CN1617641B (zh) | 2010-09-08 |
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