US20050036152A1 - Vibration-resistant interferometer apparatus - Google Patents

Vibration-resistant interferometer apparatus Download PDF

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Publication number
US20050036152A1
US20050036152A1 US10/902,389 US90238904A US2005036152A1 US 20050036152 A1 US20050036152 A1 US 20050036152A1 US 90238904 A US90238904 A US 90238904A US 2005036152 A1 US2005036152 A1 US 2005036152A1
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Prior art keywords
luminous flux
reference surface
sample
sample surface
reflected
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English (en)
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Nobuaki Ueki
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Fujinon Corp
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Fuji Photo Optical Co Ltd
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Publication of US20050036152A1 publication Critical patent/US20050036152A1/en
Assigned to FUJINON CORPORATION reassignment FUJINON CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: FUJI PHOTO OPTICAL CO., LTD.
Priority to US11/634,897 priority Critical patent/US7466427B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Definitions

  • the present invention relates to an interferometer in which, to carry out interferometry on the surface form or the like of any of various samples using a light source having a short coherence length such as a light emitting diode (LED), a super luminescent diode (SLD), a halogen lamp or the like, a luminous flux emitted from the light source is divided into two luminous fluxes, one of these two luminous fluxes is detoured by a prescribed optical path length relative to the other one, and then the two luminous fluxes are again combined to form an irradiating luminous flux, and in particular relates to a vibration-resistant interferometer apparatus for which the influence on the interferometry of relative movement between a reference surface of the interferometer and the sample surface is reduced.
  • a light source having a short coherence length such as a light emitting diode (LED), a super luminescent diode (SLD), a halogen lamp or the like
  • Fizeau-type interferometers equipped with a light source having a long coherence length such as a laser light source have been widely used as easy-to-use interferometers, this being because a gap corresponding to the coherence length of the light source used can be provided between the reference surface and the sample surface, and hence sufficient workspace can be secured.
  • the non-sample surface of the sample is the surface on the opposite side to the sample surface
  • the coherence length of the light source used is long, along with optical interference from the reference surface and the sample surface, optical interference from the reference surface and the non-sample surface and optical interference from the sample surface and the non-sample surface also arise.
  • interference fringes other than those arising through the optical interference from the reference surface and the sample surface thus become noise, and hence it becomes difficult to measure the form of the sample surface with high precision.
  • a luminous flux emitted from a light source is divided into two luminous fluxes, these two luminous fluxes are made to separately pass along two optical paths having different optical path lengths to one another, and then the two luminous fluxes are again combined, and moreover the optical path length difference between the optical path length for reflected light obtained through reflection from the sample surface of the luminous flux that has passed along the optical path having the shorter optical path length and the optical path length for reflected light obtained through reflection from the reference surface of the luminous flux that has passed along the optical path having the longer optical path length is made to be within the coherence length of the light source, and hence these two reflected lights are made to optically interfere with one another, whereby even if a light source having a
  • the coherence length of the luminous flux emitted from the light source can be less than a prescribed length, it can be made such that interference fringes do not arise for any cases except the case due to the reflected light obtained through reflection from the sample surface of the luminous flux that has passed along the optical path having the shorter optical path length and the reflected light obtained through reflection from the reference surface of the luminous flux that has passed along the optical path having the longer optical path length, and hence it becomes possible to obtain a clear interference fringe image with no noise through a very simple constitution.
  • the main body of the interferometer, the holding means for the reference surface and the main body of the interferometer, and the holding apparatus for the sample surface are all robustly constituted, and moreover the interferometer apparatus holding the reference surface and the holding apparatus for the sample surface are integrated together with a robust construction, and hence changes in the relative position between the reference surface and the sample surface during measurement are suppressed, and moreover the whole of the measurement system is installed in a high-performance vibration-proof apparatus so that the various elements that maintain the relative positional relationship between the reference surface and the sample surface will not be subjected to external forces due to vibrations that would cause a change in the relative positional relationship.
  • vibration-proof apparatus in-process (on-machine) measurement such as interferometry carried out on the processed surface during the processing when processing a metal mirror using a machine tool.
  • thermal changes in the measurement system due to temperature changes in the measurement environment are unavoidable.
  • the influence of the thermal expansion coefficient of the materials used becomes large.
  • the present invention has been devised in view of the circumstances described above; it is an object of the present invention to provide a vibration-resistant interferometer apparatus for which the holding means for the reference surface and the main body of the interferometer, and for which the holding apparatus for the sample surface and the interferometer apparatus holding the reference surface, and so on are not made to be mechanically robust, but rather even if the relative positional relationship between the reference surface and the sample surface changes, changes during measurement in the interference fringes arising through optical interference between the reflected light wavefront from the reference surface and the reflected light wavefront from the sample surface can be suppressed optically.
  • a vibration-resistant interferometer apparatus of the present invention for attaining the above object is a light wave interferometer apparatus in which a luminous flux emitted from a light source is divided into two luminous fluxes by luminous flux dividing means, one of the two luminous fluxes is detoured by a prescribed optical path length relative to the other one, and then the two luminous fluxes are recombined into one luminous flux to form an irradiating luminous flux, and interference fringes produced through optical interference between a luminous flux obtained through the irradiating luminous flux being reflected at a reference surface and a luminous flux obtained through the irradiating luminous flux being transmitted through the reference surface and then reflected at a sample surface are obtained; wherein the light source is a low-coherence light source for which the luminous flux emitted from the light source has a coherence length shorter than twice the optical distance between the reference surface and the sample surface, or a wavelength-modulated light source adjusted such that the coherence length is equivalent to
  • the luminous flux dividing means is the reference surface or the secondary reference surface
  • a luminous flux reflected at the reference surface or the secondary reference surface is taken as the first luminous flux
  • a luminous flux transmitted through the reference surface or the secondary reference surface, reflected at the sample surface or the secondary sample surface, and then transmitted through the reference surface or the secondary reference surface is taken as the second luminous flux
  • the first luminous flux and the second luminous flux are recombined into the one luminous flux at the reference surface or the secondary reference surface to form the irradiating luminous flux.
  • the luminous flux dividing means is a beam splitter
  • one of the two luminous fluxes obtained through the dividing by the beam splitter is irradiated onto the reference surface or the secondary reference surface and the reflected luminous flux is taken as the first luminous flux
  • the other one of the two luminous fluxes is irradiated onto the sample surface or the secondary sample surface and the reflected luminous flux is taken as the second luminous flux
  • the first luminous flux and the second luminous flux are recombined into the one luminous flux at the beam splitter to form the irradiating luminous flux.
  • a reflecting surface that reflects the luminous flux emitted from the light source is disposed on a side of the reference surface, from which the irradiating luminous flux is incident, the luminous flux is irradiated substantially perpendicularly onto the reference surface and the sample surface via the reflecting surface, and the first luminous flux which has been reflected at the reference surface and the second luminous flux which has been transmitted through the reference surface and then reflected at the sample surface are combined at the position of the reference surface to form the irradiating luminous flux.
  • the secondary reference surface is disposed substantially in the same plane as the reference surface, and/or the secondary sample surface is disposed substantially in the same plane as the sample surface.
  • the secondary reference surface and/or the secondary sample surface has optical path length adjustment means for moving the secondary reference surface and/or the secondary sample surface in a direction along the axis of the incident luminous flux, and optical axis adjustment means for adjusting the inclination of the axis of the reflected luminous flux relative to the axis of the incident luminous flux.
  • the secondary reference surface or the secondary sample surface can be moved by a piezoelectric element.
  • the prescribed optical path length substantially equals twice the optical distance between the reference surface and the sample surface.
  • the vibration-resistant interferometer apparatus further has light amount changing means for at least one of the two luminous fluxes.
  • the luminous flux emitted from the light source is linearly polarized light having a prescribed oscillation plane, or is made to be linearly polarized light having a prescribed oscillation plane by being transmitted through a prescribed polarizing element.
  • a sample having the sample surface is a transparent thin sheet
  • the coherence length of the luminous flux emitted from the light source is set to be shorter than twice the optical distance of the thickness of the transparent thin sheet.
  • the sample surface is a reference reflecting mirror surface
  • a light-transmitting sample transmitting object is disposed between the reference surface and the reference reflecting mirror surface
  • the irradiating luminous flux and a luminous flux obtained through reflection of the irradiating luminous flux by the reference reflecting mirror surface are transmitted through the sample transmitting object, and phase distribution measurement is carried out on the sample transmitting object.
  • a constitution may be adopted in which a condensing lens is disposed in the second luminous flux, and the condensing point of the second luminous flux by the condensing lens is positioned on the sample surface.
  • the low-coherence light source may be a light emitting diode, a super luminescent diode, or a halogen lamp.
  • a hole may be formed in a central portion of the sample surface, and the secondary sample surface may be disposed inside the hole.
  • the transparent thin sheet may be a film.
  • FIG. 1 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a first embodiment of the present invention
  • FIG. 2 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a second embodiment of the present invention
  • FIG. 3 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a third embodiment of the present invention.
  • FIG. 4 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a fourth embodiment of the present invention.
  • FIG. 5 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a fifth embodiment of the present invention.
  • FIG. 6 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a sixth embodiment of the present invention.
  • FIG. 7 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a seventh embodiment of the present invention.
  • FIG. 8 is a diagram showing the action of a condensing lens shown in FIG. 7 .
  • FIG. 1 is a schematic optical path diagram of a vibration-resistant interferometer apparatus according to a first embodiment of the present invention.
  • the vibration-resistant interferometer apparatus according to the first embodiment shown in FIG. 1 (hereinafter sometimes referred to as the ‘apparatus of the first embodiment’) is a Fizeau-type light wave interferometer apparatus that obtains interference fringes produced through optical interference between a luminous flux obtained through an irradiating luminous flux being reflected at a reference surface 16 a and a luminous flux obtained through the irradiating luminous flux being transmitted through the reference surface 16 a and then reflected at a sample surface 17 a , and comprises a light source 1 that emits a luminous flux having a coherence length shorter than twice the optical distance between the reference surface 16 a and the sample surface 17 a , a half mirror (beam splitter) 4 as luminous flux dividing means for dividing the luminous flux emitted from the light source 1 into two luminous fluxes, a secondary reference plate 6
  • a low-coherence light source having a short coherence length such as an LED, an SLD or a halogen lamp, or a wavelength-modulated light source adjusted such that the coherence length is equivalent to the coherence length possessed by such a low-coherence light source when an image of the interference fringes is captured by the imaging element of an imaging means 19 can be used.
  • Such a wavelength-modulated light source is a light source for which, during a time period shorter than the response time period of the imaging element (the light accumulation time period), the wavelength of the light emitted from the light source (in general a semiconductor laser light source is used) is modulated, and the interference fringes are captured in time-averaged fashion over the response time period of the imaging element, whereby results equivalent to in the case of using a light source that emits light having a broad spectral width and a short coherence length are obtained; for example, a technique of synthesizing coherence functions is shown on pages 75 to 82 of Proceedings of Meeting on Lightwave Sensing Technology, May 1995. Moreover, art in which this technique is improved has been invented by the present applicant.
  • a secondary reference surface holding apparatus that holds the secondary reference plate 6 comprises, for example, a holder that holds the secondary reference plate 6 integrally with the reference plate 16 , and is constituted such as to be able to hold the secondary reference plate 6 such that a secondary reference surface 61 a of the secondary reference plate 6 is positioned substantially in the same plane as the reference surface 16 a , and the relative positional relationship of the secondary reference surface 6 a with the reference surface 16 a does not change.
  • a secondary sample surface holding apparatus that holds the secondary sample 8 comprises, for example, a holder that holds the secondary sample 8 integrally with the sample 17 , and is constituted such as to be able to hold the secondary sample 8 such that a secondary sample surface 8 a of the secondary sample 8 faces in the same direction as the sample surface 17 a and the relative positional relationship of the secondary sample surface 8 a with the sample surface 17 a does not change.
  • the apparatus is constituted such that the luminous flux emitted from the light source 1 is linearly polarized light having a prescribed oscillation plane, or is made to be linearly polarized light having a prescribed oscillation plane by being transmitted through a prescribed polarizing element, and moreover one of the two luminous fluxes obtained through the division by the half mirror 4 is irradiated onto the secondary reference surface 6 a and the reflected luminous flux is taken as a first luminous flux, the other one of the two luminous fluxes is irradiated onto the secondary sample surface 8 a and the reflected luminous flux is taken as a second luminous flux, and these first and second luminous fluxes are recombined into one luminous flux at the half mirror 4 to form the irradiating luminous flux.
  • the secondary sample 8 is disposed on a piezoelectric element 9 , with the constitution being such that the secondary sample surface 8 a can be moved in the up/down direction in the drawing by the piezoelectric element 9 , and light amount changing means 7 is provided in the path from the half mirror 4 to the secondary sample surface 8 a.
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through a polarization beam splitter 2 and a quarter wave plate 3 disposed between the light source 1 and the half mirror 4 , and is converted into circularly polarized light by the quarter wave plate 3 before reaching the half mirror 4 .
  • a first luminous flux of the circularly polarized light transmitted through the half mirror 4 is reflected at a mirror 5 and reaches the secondary reference surface 6 a , is reflected at the secondary reference surface 6 a and returns along the same optical path, and is again reflected at the mirror 5 and transmitted through the half mirror 4 .
  • a second luminous flux of the circularly polarized light that has been reflected at the half-mirrored surface upon reaching the half mirror 4 is transmitted through the light amount changing means 7 and reaches the secondary sample surface 8 a , is reflected at the secondary sample surface 8 a and returns along the same optical path, is transmitted through the light amount changing means 7 and reflected at the half-mirrored surface of the half mirror 4 , and is combined with the first luminous flux to form the irradiating luminous flux.
  • optical path length adjustment means such as a moving stage that is capable of adjusting the position of the secondary sample surface 8 a in the direction of the optical axis is provided on the secondary sample 8 , and it is such that the position of the secondary sample surface 8 a can be set using this optical path length adjustment means.
  • optical path length adjustment means may be provided on the secondary reference plate 6 , so that the position of the secondary reference surface 6 a in the direction of the optical axis can be adjusted.
  • the circularly polarized irradiating luminous flux obtained by combining the first and second luminous fluxes is converted at the quarter wave plate 3 into linearly polarized light having an oscillation plane orthogonal to that when emitted from the light source 1 , and is reflected by the polarization beam splitter 2 and is incident on a half mirror 10 .
  • the linearly polarized light incident on the half mirror 10 is divided at the half-mirrored surface of the half mirror 10 into light that is transmitted through the half mirror 10 and is incident on an alignment monitoring unit 11 , and light that is reflected through 90° at the half mirror 10 and is incident on a magnifying lens 12 .
  • the linearly polarized light that has been transmitted through the half mirror 10 and reached the alignment monitoring unit 11 is used for combining the first luminous flux reflected at the secondary reference surface 6 a and the second luminous flux reflected at the secondary sample surface 8 a in a state in which the axes of the first and second luminous fluxes precisely coincide with one another.
  • At least one of the secondary reference plate 6 and the secondary sample 8 is equipped with optical axis adjustment means (omitted from the drawing) such as an axis-adjusting stage that is capable of adjusting the inclination of the optical axis of the reflected luminous flux relative to the luminous flux incident on the secondary reference plate 6 or the secondary sample 8 ; it is such that while the positions of the axes of the first and second luminous fluxes are being checked by the alignment monitoring unit 11 , these axes can be adjusted such as to precisely coincide with one another using the optical axis adjustment means.
  • optical axis adjustment means such as an axis-adjusting stage that is capable of adjusting the inclination of the optical axis of the reflected luminous flux relative to the luminous flux incident on the secondary reference plate 6 or the secondary sample 8 ; it is such that while the positions of the axes of the first and second luminous fluxes are being checked by the alignment monitoring unit 11 , these axes can be adjusted such as to precisely coincide with one another using the optical axis adjustment
  • the linearly polarized light reflected at the half mirror 10 is diverged by the magnifying lens 12 and reaches a polarization beam splitter 13 , is reflected at the polarization beam splitter 13 and is incident on a quarter wave plate 14 , is converted into a circularly polarized luminous flux by the quarter wave plate 14 and reaches a collimator lens 15 , and is made into parallel light by the collimator lens 15 .
  • the circularly polarized luminous flux that has been made into parallel light is incident on the reference plate 16 , and part thereof is reflected at the reference surface 16 a (out of the previously mentioned first luminous flux, the luminous flux reflected at the reference surface 16 a shall be referred to as luminous flux 1 Rr, and out of the previously mentioned second luminous flux, the luminous flux reflected at the reference surface 16 a shall be referred to as luminous flux 2 Rr), and the remainder is transmitted through the reference surface 16 a and reaches the sample surface 17 a of the sample 17 , and is reflected at the sample surface 17 a (out of the previously mentioned first luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reflected at the sample surface 17 a shall be referred to as luminous flux 1 Sr, and out of the previously mentioned second luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reflected at the sample surface 17 a shall be referred to as luminous flux 2 Sr) before returning along the same path, being
  • the combined circularly polarized light is incident on the quarter wave plate 14 while being condensed by the collimator lens 15 , and is converted into linearly polarized light having an oscillation plane orthogonal to that when incident on the quarter wave plate 14 while being diverged by the magnifying lens 12 .
  • This linearly polarized light is transmitted through the polarization beam splitter 13 , and an image of the sample surface 17 a is formed on an imaging element of imaging means (a CCD camera) 19 by a photographic lens 18 .
  • the relationship for the formation of interference fringes is determined by the optical path lengths from the light (luminous flux) incident on the half mirror 4 being divided into the two luminous fluxes at the half-mirrored surface thereof up to the luminous fluxes being combined at the reference surface 16 a of the reference plate 16 .
  • the paths of the luminous fluxes in terms of the reference numerals of the optical elements passed are as follows.
  • the optical path lengths for the four luminous fluxes that follow the different paths described above can be expressed as follows.
  • FIG. 2 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the second embodiment of the present invention. Note that out of the various optical elements in the apparatus of the second embodiment shown in FIG. 2 , ones the same as ones in the apparatus of the first embodiment described earlier are given the same reference numerals as in FIG. 1 , and detailed description thereof will be omitted here. This also applies to the other embodiments described later.
  • the apparatus of the second embodiment shown in FIG. 2 differs to the apparatus of the first embodiment described earlier in that the secondary reference surface 6 a is provided integrally with the half mirror 4 on a left side surface thereof in the diagram. That is, the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before reaching the half mirror 4 .
  • a first luminous flux of the circularly polarized light transmitted through the half-mirrored surface of the half mirror 4 reaches the secondary reference surface 6 a , is reflected at the secondary reference surface 6 a and returns along the same optical path, and is again transmitted through the half-mirrored surface.
  • a second luminous flux of the circularly polarized light that has been reflected at the half-mirrored surface upon reaching the half mirror 4 is transmitted through the light amount changing means 7 and reaches the secondary sample surface 8 a , is reflected at the secondary sample surface 8 a and returns along the same optical path, is transmitted through the light amount changing means 7 and reflected at the half-mirrored surface of the half mirror 4 , and is combined with first luminous flux to form an irradiating luminous flux.
  • the position of the secondary sample surface 8 a is set such that the optical path length difference between the two paths from being divided at the half-mirrored surface up to being recombined at the half-mirrored surface separately traveled by the first and second luminous fluxes is twice the optical path length between the reference surface 16 a and the sample surface 17 a , and also the paths traveled after the first and second luminous fluxes have been combined into the irradiating luminous flux, and so on are as with the apparatus of the first embodiment described earlier.
  • the secondary reference surface 6 a is provided integrally with the half mirror 4 on the above-mentioned side surface thereof, and hence the mirror 5 and the secondary reference plate 6 in the apparatus of the first embodiment become unnecessary, and thus by closing up the space in question the apparatus can be made more compact. Moreover, by driving the piezoelectric element 9 supporting the secondary sample 8 , and hence minutely displacing the position of the secondary sample surface 8 a in the up/down direction in the diagram, fringe scanning measurement or the like can also be carried out.
  • the directions of the normals to the secondary reference surface 6 a and the reference surface 16 a are orthogonal to one another, and hence in response to movement of the reference surface 16 a in the direction of the optical axis the secondary reference surface 6 a will only move orthogonal to this optical axis, and thus movement (vibration) of the reference surface 16 a relative to the main body of the interferometer cannot be canceled out.
  • the main body of the interferometer apparatus and the reference plate must thus be constituted integrally with one another. However, the effect of influence due to movement (vibration) of the sample being mitigated is produced.
  • FIG. 3 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the third embodiment of the present invention.
  • the apparatus of the third embodiment shown in FIG. 3 differs to the apparatuses of the first and second embodiments described earlier in that the secondary reference surface 6 a is disposed in the path from the mirror 5 to the secondary sample surface 8 a such as to face in the same direction as the reference surface 16 a and to be positioned substantially in the same plane as the reference surface 16 a , and the secondary reference surface 6 a constitutes the luminous flux dividing means for dividing the luminous flux emitted from the light source 1 into two luminous fluxes.
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before reaching the mirror 5 .
  • the circularly polarized luminous flux After being reflected at the mirror 5 , the circularly polarized luminous flux reaches the secondary reference surface 6 a , and is divided into a first luminous flux of the circularly polarized light that is reflected at the secondary reference surface 6 a , and a second luminous flux of the circularly polarized light that is transmitted through the secondary reference surface 6 a.
  • the second luminous flux that is transmitted through the secondary reference surface 6 a is transmitted through the light amount changing means 7 and reaches the secondary sample surface 8 a , is reflected at the secondary sample surface 8 a and returns along the same optical path, is transmitted through the light amount changing means 7 and reaches the secondary reference surface 6 a , and is combined with the first luminous flux at the secondary reference surface 6 a to form an irradiating luminous flux.
  • the position of the secondary sample surface 8 a is set such that the optical path length difference between the two paths from the first and second luminous fluxes being divided at the secondary reference surface 6 a up to being recombined at the secondary reference surface 6 a is twice the optical path length between the reference surface 16 a and the sample surface 17 a , and also the paths traveled after the first and second luminous fluxes have been combined into the irradiating luminous flux, and so on are as with the apparatuses of the first and second embodiments described earlier.
  • the apparatus of the third embodiment even if the reference surface 16 a and the sample surface 17 a each move in the direction of the optical axis with no relationship therebetween through the influence of vibration or the like, no optical path length difference between the two paths that contribute to interference (i.e. between the path of, out of the previously mentioned first luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reaches the sample surface 17 a of the sample 17 , and is then reflected at the sample surface 17 a , and the path of, out of the previously mentioned second luminous flux, the luminous flux that is reflected at the reference surface 16 a ) will arise, and no phase difference will arise between the two interfering luminous fluxes.
  • the secondary reference surface 6 a faces in the same direction as the reference surface 16 a , and is positioned substantially in the same plane as the reference surface 16 a , it is easy to manufacture the holder that supports the reference surface 16 a and the secondary reference surface 6 a integrally with one another.
  • the light amount changing means 7 interposed between the secondary reference surface 6 a and the secondary sample surface 8 a can be omitted, whereby the secondary sample surface 8 a can also be placed in the same plane as the sample surface 17 a.
  • FIG. 4 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the fourth embodiment of the present invention.
  • the apparatus of the fourth embodiment shown in FIG. 4 differs to the apparatus of the first embodiment described earlier in that a secondary reference surface and a secondary sample surface are not provided, in that the reference surface 16 a constitutes the luminous flux dividing means for dividing the luminous flux emitted from the light source 1 into two luminous fluxes, and in that a highly reflective surface (reflecting surface) 20 that reflects the luminous flux emitted from the light source 1 is disposed on the side of the reference surface 16 a from which the irradiating luminous flux is incident, and the apparatus is constituted such that the luminous flux incident on the highly reflective surface 20 is irradiated substantially perpendicularly onto the reference surface 16 a and the sample surface 17 a , the luminous flux reflected at the reference surface 16 a is taken as a first luminous flux, and the luminous flux reflected at the sample surface 17 a after being transmitted through the reference surface 16 a is taken as a second luminous flux, and these first and second luminous fluxes are combined at the
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before being made to be incident on a prism cube 21 .
  • the highly reflective surface 20 is provided approximately in a central portion of a joining surface 21 a of the prism cube 21 , and the circularly polarized luminous flux reflected at the highly reflective surface 20 after being incident on the prism cube 21 reaches the reference surface 16 a , and is divided into a first luminous flux of the circularly polarized light that is reflected at the reference surface 16 a and a second luminous flux of the circularly polarized light that is transmitted through the reference surface 16 a.
  • the second luminous flux that is transmitted through the reference surface 16 a reaches the sample surface 17 a , is reflected at the sample surface 17 a and returns along the same optical path, reaches the reference surface 16 a , and is combined with the first luminous flux at the reference surface 16 a to form the irradiating luminous flux.
  • the combined circularly polarized irradiating luminous flux is reflected at the highly reflective surface 20 , is converted at the quarter wave plate 3 into linearly polarized light having an oscillation plane orthogonal to that when emitted from the light source 1 , and is reflected by the polarization beam splitter 2 and is incident on the half mirror 10 .
  • the linearly polarized light incident on the half mirror 10 is divided at the half-mirrored surface of the half mirror 10 into light that is transmitted through the half mirror 10 and is incident on the alignment monitoring unit 11 , and light that is reflected through 90° at the half mirror 10 and is incident on the magnifying lens 12 .
  • the linearly polarized light that has been transmitted through the half mirror 10 and reached the alignment monitoring unit 11 is used for combining the first luminous flux reflected at the reference surface 16 a and the second luminous flux reflected at the sample surface 17 a in a state in which the axes of the first and second luminous fluxes precisely coincide with one another.
  • the linearly polarized light reflected at the half mirror 10 is diverged by the magnifying lens 12 and reaches the polarization beam splitter 13 , is reflected at the polarization beam splitter 13 and is incident on the quarter wave plate 14 , is converted into a circularly polarized luminous flux by the quarter wave plate 14 and reaches the collimator lens 15 , and is made into parallel light by the collimator lens 15 .
  • the circularly polarized luminous flux that has been made into parallel light is transmitted through the prism cube 21 and is incident on the reference plate 16 , and part thereof is reflected at the reference surface 16 a , and the remainder is transmitted through the reference surface 16 a and reaches the sample surface 17 a of the sample 17 , and is reflected at the sample surface 17 a before returning along the same path, being transmitted through the reference surface 16 a , and being combined with the light that is reflected at the reference surface 16 a.
  • the combined circularly polarized light is incident on the quarter wave plate 14 while being condensed by the collimator lens 15 , and is converted into linearly polarized light having an oscillation plane orthogonal to that when incident on the quarter wave plate 14 while being diverged by the magnifying lens 12 .
  • This linearly polarized light is transmitted through the polarization beam splitter 13 , and an image of the sample surface 17 a is formed on the imaging element of the imaging means 19 by the photographic lens 18 .
  • the apparatus of the fourth embodiment even if the reference surface 16 a and the sample surface 17 a each move in the direction of the optical axis with no relationship therebetween through the influence of vibration or the like, no optical path length difference between the two paths that contribute to interference (i.e. between the path of, out of the previously mentioned first luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reaches the sample surface 17 a of the sample 17 , and is then reflected at the sample surface 17 a , and the path of, out of the previously mentioned second luminous flux, the luminous flux that is reflected at the reference surface 16 a ) will arise, and no phase difference will arise between the two interfering luminous fluxes. Changes in the interference fringes will thus not arise, and hence precise interferometry is possible.
  • the reference surface 16 a constitutes the luminous flux dividing means for dividing the luminous flux emitted from the light source 1 into two luminous fluxes, it becomes easy to make the optical path lengths of the two paths that contribute to interference precisely match one another.
  • the highly reflective surface 20 is an obstacle, and hence there is a region of the sample surface 17 a for which observation is not possible.
  • the highly reflective surface 20 is provided in a place such that the luminous flux reflected at the highly reflective surface 20 is transmitted through the reference surface 16 a at a position close to the edge of the reference surface 16 a , and moreover the reference surface 16 a is made larger than the sample surface 17 a , and it is made to be such that the luminous flux from the highly reflective surface 20 reaches a place outside of the sample surface 17 a and a secondary sample surface is placed here, then measurement can be carried out without a region for which observation is not possible being created.
  • FIG. 5 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the fifth embodiment of the present invention.
  • the apparatus of the fifth embodiment shown in FIG. 5 differs to the apparatus of the fourth embodiment described earlier in that the apparatus is for measuring the form of the sample surface 17 a of a sample 17 having a hole in a central portion thereof such as an optical disk, and a secondary sample 8 supported on a piezoelectric element 9 is disposed inside the hole in the sample 17 .
  • the constitution is such that the secondary sample surface 8 a of the secondary sample 8 can be minutely displaced in the up/down direction in the diagram by the piezoelectric element 9 , and in the state that the piezoelectric element 9 is not driven, the secondary sample surface 8 a is positioned substantially in the same plane as the sample surface 17 a.
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before being made to be incident on the prism cube 21 .
  • the circularly polarized luminous flux incident on the prism cube 21 is reflected at the highly reflective surface 20 and reaches the reference surface 16 a , and is divided into a first luminous flux of the circularly polarized light that is reflected at the reference surface 16 a and a second luminous flux of the circularly polarized light that is transmitted through the reference surface 16 a.
  • the second luminous flux that is transmitted through the reference surface 16 a reaches the secondary sample surface 8 a , is reflected at the secondary sample surface 8 a and returns along the same optical path, reaches the reference surface 16 a , and is combined with the first luminous flux at the reference surface 16 a to form an irradiating luminous flux.
  • the paths traveled after the first and second luminous fluxes have been combined into the irradiating luminous flux and so on are as with the apparatus of the fourth embodiment described earlier.
  • the apparatus of the fifth embodiment even if the reference surface 16 a and the sample surface 17 a each move in the direction of the optical axis with no relationship therebetween through the influence of vibration or the like, no optical path length difference between the two paths that contribute to interference (i.e. between the path of, out of the previously mentioned first luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reaches the secondary sample surface 8 a , and is then reflected at the.secondary sample surface 8 a , and the path of, out of the previously mentioned second luminous flux, the luminous flux that is reflected at the reference surface 16 a ) will arise, and no phase difference will arise between the two interfering luminous fluxes. Changes in the interference fringes will thus not arise, and hence precise interferometry is possible.
  • fringe scanning measurement or the like can also be carried out.
  • the apparatus of the fifth embodiment by adjusting the size of the highly reflective surface 20 , it can be made such that the highly reflective surface 20 is not an obstacle for the imaging means 19 , and hence there is no region for which observation is not possible on the sample surface 17 a.
  • FIG. 6 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the sixth embodiment of the present invention.
  • the apparatus of the sixth embodiment shown in FIG. 6 is constituted such that the sample surface 17 a is taken as a reference reflecting mirror surface, the irradiating luminous flux and a luminous flux obtained through reflection of the irradiating luminous flux from the sample surface 17 a are transmitted through a light-transmitting sample transmitting object 22 such as a film disposed between the reference surface 16 a and the sample surface 17 a , and phase distribution measurement is carried out on the sample transmitting object 22 .
  • the apparatus has a light source 1 that emits a luminous flux having a coherence length shorter than twice the optical distance between the reference surface 16 a and the sample surface 17 a , a half mirror 4 as luminous flux dividing means for dividing the luminous flux emitted from the light source 1 into two luminous fluxes, a secondary reference plate 6 that is held integrally with the reference plate 16 , and a secondary sample 8 that is held integrally with the sample 17 is as with the apparatus of the first embodiment described earlier.
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before reaching the half mirror 4 .
  • a first luminous flux of the circularly polarized light transmitted through the half mirror 4 is reflected at the mirror 5 and reaches the secondary reference surface 6 a , is reflected at the secondary reference surface 6 a and returns along the same optical path, and is again reflected at the mirror 5 and transmitted through the half mirror 4 .
  • a second luminous flux of the circularly polarized light that has been reflected at the half-mirrored surface upon reaching the half mirror 4 is transmitted through the sample transmitting object 22 and the light amount changing means 7 and reaches the secondary sample surface 8 a , is reflected at the secondary sample surface 8 a and returns along the same optical path, is transmitted through the light amount changing means 7 and the sample transmitting object 22 and reflected at the half-mirrored surface of the half mirror 4 , and is combined with the first luminous flux to form the irradiating luminous flux.
  • the position of the secondary sample surface 8 a is set such that the optical path length difference between the two paths from being divided at the half mirror 4 up to being recombined at the half mirror 4 separately traveled by the first and second luminous fluxes is twice the optical path length between the reference surface 16 a and the sample surface 17 a (including the sample transmitting object 22 ).
  • the circularly polarized irradiating luminous flux obtained by combining the first and second luminous fluxes is converted at the quarter wave plate 3 into linearly polarized light having an oscillation plane orthogonal to that when emitted from the light source 1 , and is reflected by the polarization beam splitter 2 and is incident on the half mirror 10 .
  • the linearly polarized light incident on the half mirror 10 is divided at the half-mirrored surface of the half mirror 10 into light that is transmitted through the half mirror 10 and is incident on the alignment monitoring unit 11 , and light that is reflected through 90° at the half mirror 10 and is incident on the magnifying lens 12 .
  • the linearly polarized light that has been transmitted through the half mirror 10 and reached the alignment monitoring unit 11 is used for combining the first luminous flux reflected at the secondary reference surface 6 a and the second luminous flux reflected at the secondary sample surface 8 a in a state in which the axes of the first and second luminous fluxes precisely coincide with one another.
  • the linearly polarized light reflected at the half mirror 10 is diverged by the magnifying lens 12 and reaches the polarization beam splitter 13 , is reflected at the polarization beam splitter 13 and is incident on the quarter wave plate 14 , is converted into a circularly polarized luminous flux by the quarter wave plate 14 and reaches the collimator lens 15 , and is made into parallel light by the collimator lens 15 .
  • the circularly polarized luminous flux that has been made into parallel light is incident on the reference plate 16 , and part thereof is reflected at the reference surface 16 a , and the remainder is transmitted through the reference surface 16 a and the sample transmitting object 22 and reaches the sample surface 17 a , and is reflected at the sample surface 17 a , before returning along the same path, being transmitted through the sample transmitting object 22 and the reference surface 16 a , and being combined with the light that is reflected at the reference surface 16 a.
  • the combined circularly polarized light is incident on the quarter wave plate 14 while being condensed by the collimator lens 15 , and is converted into linearly polarized light having an oscillation plane orthogonal to that when incident on the quarter wave plate 14 while being diverged by the magnifying lens 12 .
  • This linearly polarized light is transmitted through the polarization beam splitter 13 , and an image of interference fringes carrying phase distribution information for the sample transmitting object 22 is formed on the imaging element of the imaging means 19 by the photographic lens 18 .
  • fringe scanning measurement or the like can also be carried out.
  • the optical path length between the reference surface 16 a and the sample surface 17 a is lengthened, but if it is made to be such that the sample transmitting object 22 also enters into the second luminous flux between the half mirror 4 and the secondary sample surface 8 a , then there is no need to adjust the secondary reference surface or the secondary sample surface, and hence measurement can easily be carried out on a large film or the like.
  • FIG. 7 is a schematic optical path diagram of the vibration-resistant interferometer apparatus according to the seventh embodiment of the present invention
  • FIG. 8 is a diagram showing the action of a condensing lens 23 shown in FIG. 7 .
  • the apparatus of the seventh embodiment shown in FIG. 7 is for measuring the form of the sample surface 17 a of a transparent thin sheet-like sample 17 such as a transparent glass sheet or film, and the coherence length of the luminous flux emitted from the light source 1 is set to be shorter than twice the optical distance of the thickness of the sample 17 .
  • the apparatus differs to the apparatuses of the other embodiments in that the apparatus has a secondary reference plate 6 having a secondary reference surface 6 a , which is held on a piezoelectric element 9 , but does not have a secondary sample surface 8 a , and has a condensing lens 23 that condenses the second luminous flux obtained through the dividing by the half mirror 4 onto the sample surface 17 a.
  • the linearly polarized luminous flux emitted from the light source 1 is transmitted through the polarization beam splitter 2 and the quarter wave plate 3 , and is converted into circularly polarized light by the quarter wave plate 3 before reaching the half mirror 4 .
  • a first luminous flux of the circularly polarized light transmitted through the half mirror 4 is reflected at the mirror 5 and reaches the secondary reference surface 6 a , is reflected at the secondary reference surface 6 a and returns along the same optical path, and is again reflected at the mirror 5 and transmitted through the half mirror 4 .
  • a second luminous flux of the circularly polarized light that has been reflected at the half-mirrored surface upon reaching the half mirror 4 is transmitted through the light amount changing means 7 and is incident on the condensing lens 23 .
  • the condensing lens 23 is disposed such that the condensing point of the second luminous flux incident on the condensing lens 23 is positioned on the sample surface 17 a . As shown in FIG.
  • part of the second luminous flux incident on the condensing lens 23 is reflected at the sample surface 17 a and returns along the same optical path, is transmitted through the condensing lens 23 and the light amount changing means 7 and reflected at the half-mirrored surface of the half mirror 4 , and is combined with the first luminous flux to form the irradiating luminous flux.
  • the position of the secondary reference surface 6 a is set such that the optical path length difference between the two paths from being divided at the half mirror 4 up to being recombined at the half mirror 4 separately traveled by the first and second luminous fluxes is twice the optical path length between the reference surface 16 a and the sample surface 17 a.
  • the circularly polarized irradiating luminous flux obtained by combining the first and second luminous fluxes is converted at the quarter wave plate 3 into linearly polarized light having an oscillation plane orthogonal to that when emitted from the light source 1 , and is reflected by the polarization beam splitter 2 and is incident on the half mirror 10 .
  • the linearly polarized light incident on the half mirror 10 is divided at the half-mirrored surface of the half mirror 10 into light that is transmitted through the half mirror 10 and is incident on the alignment monitoring unit 11 , and light that is reflected through 90 ° at the half mirror 10 and is incident on the magnifying lens 12 .
  • the linearly polarized light that has been transmitted through the half mirror 10 and reached the alignment monitoring unit 11 is used for combining the first luminous flux reflected at the secondary reference surface 6 a and the second luminous flux reflected at the sample surface 17 a in a state in which the axes of the first and second luminous fluxes precisely coincide with one another.
  • the linearly polarized light reflected at the half mirror 10 is diverged by the magnifying lens 12 and reaches the polarization beam splitter 13 , is reflected at the polarization beam splitter 13 and is incident on the quarter wave plate 14 , is converted into a circularly polarized luminous flux by the quarter wave plate 14 and reaches the collimator lens 15 , and is made into parallel light by the collimator lens 15 .
  • the circularly polarized luminous flux that has been made into parallel light is incident on the reference plate 16 , and part thereof is reflected at the reference surface 16 a , and the remainder is transmitted through the reference surface 16 a and reaches the sample surface 17 a , and is reflected at the sample surface 17 a before returning along the same path, being transmitted through the reference surface 16 a , and being combined with the light that is reflected at the reference surface 16 a.
  • the combined circularly polarized light is incident on the quarter wave plate 14 while being condensed by the collimator lens 15 , and is converted into linearly polarized light having an oscillation plane orthogonal to that when incident on the quarter wave plate 14 while being diverged by the magnifying lens 12 .
  • This linearly polarized light is transmitted through the polarization beam splitter 13 , and an image of the sample surface 17 a is formed on the imaging element of the imaging means 19 by the photographic lens 18 .
  • the apparatus of the seventh embodiment even if the reference surface 16 a and the sample surface 17 a each move in the direction of the optical axis with no relationship therebetween through the influence of vibration or the like, no optical path length difference between the two paths that contribute to interference (i.e. between the path of, out of the previously mentioned first luminous flux, the luminous flux that is transmitted through the reference surface 16 a and reaches the sample surface 17 a , and is then reflected at the sample surface 17 a , and the path of, out of the previously mentioned second luminous flux, the luminous flux that is reflected at the reference surface 16 a ) will arise, and no phase difference will arise between the two interfering luminous fluxes.
  • the coherence length of the luminous flux emitted from the light source 1 is set to be shorter than twice the optical distance of the thickness of the sample 17 , interference due to the luminous flux reflected from the sample surface 17 a and the luminous flux reflected from a rear surface 171 b of the sample 17 does not occur, and hence measurement of the form of the sample surface 17 a can be carried out with high precision.
  • the apparatus of the seventh embodiment through having the condensing lens 23 , the S/N ratio for the interference fringes formed can be improved.
  • the action of the condensing lens 23 is as follows.
  • the part of the luminous flux reflected at the rear surface 17 b of the sample 17 becomes just like a luminous flux emitted from a virtual point light source P positioned more distant than the focal point of the condensing lens 23 ; part of this luminous flux reaches a place within the effective diameter of the condensing lens 23 , but the remainder does not return within the effective diameter of the condensing lens 23 .
  • this luminous flux does not exit the condensing lens 23 in the same state (convergent or divergent) as the luminous flux that has returned from the condensing point on the sample surface 17 a , but rather exits from the condensing lens 23 as a convergent luminous flux.
  • This luminous flux goes through a focal point while traveling along the optical path, and subsequently becomes divergent light. The amount of this luminous flux that is superimposed on the luminous flux reflected from the sample surface 17 a is thus very low. Because the amount of this unnecessary light can be reduced, the S/N ratio for the interference fringes formed can be improved.
  • the present invention is not limited to the above embodiments.
  • the luminous flux emitted from the light source in the apparatus of each of the above embodiments is made to be linearly polarized light having a prescribed oscillation plane, but a light source that emits a luminous flux that is not linearly polarized can also be used.
  • the constitution is such that the optical path length difference between the two optical paths from being divided into the first and second luminous fluxes by the luminous flux dividing means up to the first and second luminous fluxes being recombined is substantially equal to twice the optical distance between the reference surface and the sample surface, but except in the case of measuring the surface form of a transparent thin sheet, the optical path length difference between the two optical paths may be set to coincide with approximately twice the optical distance between the reference surface and the sample surface, in which the approximately twice is within the range of the coherence length of the luminous flux emitted from the light source, in other words, the difference between the optical path length difference between the two optical paths and the optical distance between the reference surface and the sample surface is shorter than the maximum optical path difference for which the two luminous fluxes divided off from the light source can interfere with one another.
  • the apparatus of each of the above embodiments is a Fizeau-type interferometer, but the present invention can also be applied to another interferometer apparatus such as an Abramson-type grazing incidence interferometer.
  • the vibration-resistant interferometer apparatus of the present invention Due to having the constitution described above, according to the vibration-resistant interferometer apparatus of the present invention, even if the sample surface moves in the direction of the optical axis through vibration, changing of the optical path length difference between the two paths that contribute to interference can be suppressed optically, and hence it becomes possible to carry out precise interferometry that is not prone to being influenced by vibration; this is particularly effective for in-process measurement.

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ITBO20130403A1 (it) * 2013-07-26 2015-01-27 Marposs Spa Metodo e apparecchiatura per il controllo ottico mediante interferometria dello spessore di un oggetto in lavorazione
CN104764593B (zh) * 2015-04-20 2018-08-14 成都太科光电技术有限责任公司 卧式双端口平面斐索干涉测试装置
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US7466427B2 (en) 2008-12-16
JP4223349B2 (ja) 2009-02-12

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