US20050003567A1 - Manufacturing method of organic electroluminescence display device - Google Patents

Manufacturing method of organic electroluminescence display device Download PDF

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Publication number
US20050003567A1
US20050003567A1 US10/852,401 US85240104A US2005003567A1 US 20050003567 A1 US20050003567 A1 US 20050003567A1 US 85240104 A US85240104 A US 85240104A US 2005003567 A1 US2005003567 A1 US 2005003567A1
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Prior art keywords
forming
glass substrate
material solution
anodes
organic
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Abandoned
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US10/852,401
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English (en)
Inventor
Akiko Yasukawa
Shoichi Uchino
Emiko Yamada
Nobuaki Hayashi
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Japan Display Inc
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Hitachi Displays Ltd
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Assigned to HITACHI DISPLAYS, LTD. reassignment HITACHI DISPLAYS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HAYASHI, NOBUAKI, UCHINO, SHOICHI, YAMADA, EMIKO, YASUKAWA, AKIKO
Publication of US20050003567A1 publication Critical patent/US20050003567A1/en
Priority to US11/639,205 priority Critical patent/US7553208B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/842—Containers
    • H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing

Definitions

  • the present invention relates to a method of manufacture of an organic electroluminescence display device using organic electroluminescence, and, more particularly, the invention relates to an image forming method in which a polymer light emitting material solution is held and formed at given pixel center portions while making the formation of partition walls (banks) which define the pixels unnecessary.
  • An organic electroluminescence device which utilizes mainly an organic material as field light emitting elements, is suitable for an application as a planar display; and, hence, an extensive development has been under way and the remarkable progress has been made in fields such as materials, element structures, fabrication techniques for light emission.
  • the following “patent literature 1 ” discloses a structure which can realize a full color display, wherein, by forming banks, organic light emitting layers having respective light emitting colors of red, green and blue can be arbitrarily patterned for every pixel by forming and arranging organic electroluminescence materials whose patterning was considered impossible conventionally using an ink jet method.
  • patent literature 2 discloses a structure which can realize a vivid color display, wherein by using a bank material which is water-repellant and oil-repellant with respect to various inks, it is possible to prevent color mixing of inks between pixels which may occur due to bridging over of a material having a hole injection layer and a light emitting layer between the pixels, thus making fluorescent materials in use emit lights of colors of the fluorescent materials faithfully.
  • patent literature 3 discloses a structure which can prevent thin-film-forming-material ink from flowing out to neighboring pixels and, at the same time, can obtain a uniform film thickness by forming banks, such that a material which exhibits affinity with the ink and a material which exhibits non-affinity with ink are alternately stacked.
  • the non-affinity with the ink is given to the banks by applying a fluorine plasma treatment to the banks.
  • patent literature 4 discloses a method in which, in the manufacture of color filters, energy rays are irradiated to pixel portions on a substrate to make the pixel portions have an affinity with ink, thus reducing the occurrence of defects attributed to a repelling of the ink.
  • patent literature 5 discloses a manufacturing method of manufacture of an organic electroluminescence element in which ultraviolet rays are irradiated to upper surfaces of anodes so as to improve the adhesiveness with an organic material (a hole injection layer) formed on the upper surfaces of the anodes.
  • the method requires a bank forming process using a photolithography method, and, hence, the number of fabrication steps and the manufacturing cost are increased. Further, the use of bank material having a critical surface tension of not more than 30 dyne/cm limits the range of selection of bank materials.
  • the bank structure requires the formation of a bank using a photolithography method, a fluorine plasma treatment process applied to the banks for repelling liquid and the like, and, hence, the number of fabrication steps and the manufacturing cost are increased.
  • the structure which makes the pixel portions on the substrate obtain an affinity to ink by irradiating energy rays to the pixel portions requires a bank forming process using a photolithography method and a process such as the irradiation of energy rays, and, hence, the number of fabrication steps and the manufacturing cost are increased.
  • an organic thin film layer is formed on the upper surfaces of the anodes using an organic material per se by a vapor evaporation method, a sputtering method or a sol-gel method, and, thereafter, the adhesiveness of the organic thin film layer with the organic material layer (hole injection layer) which is formed on the upper surfaces of the anodes is improved in the next step, it is necessary to provide a drying step or the like for drying the formed organic thin film layer, and, hence, the number of fabrication steps is increased and a reduction of the manufacturing cost cannot be realized.
  • the present invention has been made to overcome the above-mentioned conventional drawbacks, and it is an object of the present invention to provide a method of manufacture of an organic electroluminescence display device in which the fabrication steps are simplified, the cost is reduced, and a high productivity.
  • the method of manufacture of an organic electroluminescence display device comprises a step of patterning a plurality of anodes for each pixel on a light transmitting glass substrate; a step of forming an outer wall layer which surrounds a region where the anodes are formed by applying a polymer organic material to an outer peripheral portion which surrounds the region where the anodes are formed on the light transmitting glass substrate and by heating and drying the polymer organic material; a step of forming affinity regions by irradiating ultraviolet rays to pixel center portions, except for electrode surface peripheral portions of the anodes; a step of forming hole injection layers on the affinity regions by blowing off a conductive polymer material solution to the affinity regions and by heating and drying the conductive polymer material solution; a step of forming light emitting layers on the hole injection layers by blowing off a polymer light emitting material solution to the hole injection layers and by heating and drying the polymer light emitting material solution; a step of forming forming
  • non-affinity regions are formed on surfaces of the anodes by exposing the light transmitting glass substrate under a saturated vapor pressure of an organic solvent, thus adhering organic substances to the surfaces of the anodes, and affinity regions are formed by irradiating ultraviolet rays to pixel center portions, except for electrode surface peripheral portions of the anodes. Accordingly, it is possible to increase the difference between the affinity and the non-affinity for a conductive polymer material solution between the ultra-violet ray irradiated portion and the ultra-violet ray non-irradiated portion.
  • the concentration of the organic black insulation material solution is larger than the concentration of the polymer light emitting material solution.
  • FIG. 1 is a cross-sectional view showing one step in the method of manufacture of an organic electroluminescence display device according to the present invention
  • FIG. 2 is a cross-sectional view showing a next step which follows the step shown in FIG. 1 ;
  • FIG. 3 is a cross-sectional view showing a next step which follows the step shown in FIG. 2 ;
  • FIG. 4A is a plan view showing a next step which follows the step shown in FIG. 3
  • FIG. 4B is a cross-sectional view taken along line A-A′ in FIG. 4A ;
  • FIG. 5 is a cross-sectional view showing a next step which follows the step shown in FIG. 4A ;
  • FIG. 6 is a cross-sectional view showing a next step which follows the step shown in FIG. 5 ;
  • FIG. 7 is a cross-sectional view showing a next step which follows the step shown in FIG. 6 ;
  • FIG. 8 is a cross-sectional view showing a next step which follows the step shown in FIG. 7 ;
  • FIG. 9 is a cross-sectional view showing a next step which follows the step shown in FIG. 8 ;
  • FIG. 10 is a cross-sectional view showing a next step which follows the step shown in FIG. 9 ;
  • FIG. 11 is a cross-sectional view showing a step in an example of a method of manufacture which is compared with a method of manufacture of an organic electroluminescence display device according to the present invention
  • FIG. 12 is a cross-sectional view showing a next step which follows the step shown in FIG. 11 ;
  • FIG. 13 is a cross-sectional view showing a next step which follows the step shown in FIG. 12 ;
  • FIG. 14 is a cross-sectional view showing a next step which follows the step shown in FIG. 13 ;
  • FIG. 15 is a cross-sectional view showing a next step which follows the step shown in FIG. 14 ;
  • FIG. 16 is a cross-sectional view showing a next step which follows the step shown in FIG. 15 ;
  • FIG. 17 is a cross-sectional view showing a next step which follows the step shown in FIG. 16 ;
  • FIG. 18 is a cross-sectional view showing a next step which follows the step shown in FIG. 17 .
  • FIG. 1 to FIG. 10 are cross-sectional views, partially including plan views, of respective steps in the method of manufacture of an organic electroluminescence display device according to the present invention.
  • an ITO film 2 a having a film thickness of approximately 150 nm is formed by a sputtering method, as shown in FIG. 2 .
  • the ITO film 2 a is partially etched by a photolithography method to form a plurality of anodes 2 , which constitute pixel portions and have a size of approximately 150 ⁇ m ⁇ 170 ⁇ m, by patterning for every pixel, as shown in FIG. 3 .
  • an organic material solution (ink) containing polyimide as a main component is formed into a film by a screen printing method such that the organic material solution surrounds a peripheral portion of the glass substrate 1 , as shown in plan view in FIG. 4A ; and, thereafter, baking is performed at a temperature of approximately 350° C. for approximately one hour, thus forming an outer wall layer 3 having a width of approximately 10 ⁇ m and a height of approximately 2 ⁇ m.
  • the structure is exposed under a saturated vapor pressure of propylene glycol monomethyl ether acetate (PGMEA) for approximately one hour so as to make an organic substance adhere to upper surfaces of the anodes 2 , and the organic substance is subjected to a non-affinity treatment to obtain a non-affinity property.
  • PMEA propylene glycol monomethyl ether acetate
  • the upper surfaces of the respective anodes 2 since the upper surfaces of the portions of outer peripheries of the respective anodes 2 to which the ultraviolet rays are not irradiated are not cleaned, the upper surfaces assume a state of non-affinity regions 6 , to which the previous organic substance is adhered.
  • PEDOT/PSS solution BAITRON P, a product of Bayer AG. (Leverkusen, Germany), for example
  • BAITRON P a product of Bayer AG. (Leverkusen, Germany)
  • the structure is heated and dried at a temperature of approximately 120° C. for approximately 10 minutes, thus forming hole injection layers 7 , as shown in FIG. 6 .
  • PEDOT is an abbreviation for poly-ethylenedioxy-thiophene
  • PSS is an abbreviation for poly-styrene sulfonic acid.
  • approximately 60 pl of polyfluorene-based polymer light emitting material solution is blown off from a nozzle by an ink jet method so as to form light emitting material layers 8 a , as shown in FIG. 7 , and, thereafter, the structure is heated and dried at a temperature of approximately 80° C. for approximately 20 minutes, as shown in FIG. 7 , thus forming light emitting layers 8 , as shown in FIG. 8 .
  • a black insulation material solution which is produced by dispersing black CO 3 O 4 and a curing resin into propylene glycol monomethyl ether acetate (PGMEA), is injected to the inside of the glass substrate 1 , which is surrounded by the outer wall layer 3 , using an ink jet method or a nozzle coating method, as shown in FIG. 9 , to an extent that the black insulation material solution is not adhered to upper surfaces of the light emitting layers 8 ; and, thereafter, the structure is baked at a temperature of approximately 100° C. for approximately 20 minutes, thus forming a black insulation layer 9 having a thickness of approximately 200 nm on peripheral portions of respective anodes 2 .
  • PMEA propylene glycol monomethyl ether acetate
  • the black insulation layer 9 while preventing the adhesion of the black insulation material solution to the light emitting layers 8 , it is necessary to increase the solution concentration of the black insulation material solution and to form the thin film using a small quantity of black insulation material solution such that the black insulation material solution does not cover the light emitting layers 8 . Accordingly, it is necessary to refine the solution concentration of the black insulation material solution to be higher than the solution concentration of the polymer light emitting material solution which forms the light emitting layer 8 .
  • a film made of lithium fluoride (LiF) and having a film thickness of approximately 0.5 nm is formed at a vapor evaporation speed of approximately 0.2 nm/sec, thus forming an electron injection layer 10 .
  • a film made of calcium (Ca) and having a film thickness of approximately 100 nm is formed at a vapor evaporation speed of approximately 1 nm/sec, thus forming a cathode 11 .
  • a film made of aluminum (Al) and having a film thickness of approximately 100 nm is formed at a vapor evaporation speed of approximately 1 nm/sec, thus forming a protective film 12 .
  • the glass substrate 1 on which the cathode 11 and the protective film 12 are formed is transferred to a sealing globe box (not shown in the drawing). Then, the glass substrate 1 is arranged to face a glass substrate 15 , which preliminarily has a desiccating agent 14 laminated to the inside thereof, in an opposed manner and is sealed to the glass substrate 15 using, for example, an epoxy-based sealing material 13 , which constitutes an ultraviolet-ray type polymer resin, and the sealing is completed by curing the epoxy-based sealing material 13 with irradiation of ultraviolet rays.
  • an epoxy-based sealing material 13 which constitutes an ultraviolet-ray type polymer resin
  • the organic electroluminescence display device formed in the above-mentioned manner when a given DC voltage is applied between the anodes 2 and the cathode 11 , a green light emission is obtained.
  • a luminance of approximately 1000 cd/cm 2 is obtained with a voltage of approximately 5.5V.
  • the contrast ratio at this time is approximately 150:1, and, hence, a high contrast ratio is obtained.
  • the pixel portions provided for red and blue light emissions are respectively formed at other neighboring anodes 2 in the same manner, it is possible to obtain substantially the same light emission luminance, and, hence, it is possible to obtain substantially the same high contrast ratio.
  • the ultraviolet rays are irradiated to the upper surfaces of the anodes 2 formed for respective pixels at pixel center portions, except for the outer peripheral portions. Accordingly, the change attributed to the difference in wettability between the affinity regions 5 formed of the ultraviolet-ray irradiated region and the non-affinity regions 6 formed of the ultraviolet-ray non-irradiated region with respect to the hole injection layers 7 becomes explicit; and, due to this difference in wettability, the hole injection layers 7 and the light emitting layers 8 are stacked and formed using an organic material solution only on the pixel center portions on the upper surfaces of the anodes 2 , except for the outer peripheral portions.
  • the black insulation layer 9 that separates the anodes 2 which constitute the pixel portions, from each other is formed after forming the films of light emitting layers 8 . Accordingly, it is possible to completely eliminate a so-called creeping phenomenon of a pattern in which the hole injection layers 7 and the light emitting layers 8 creep from the upper surfaces of the anodes 2 to the side wall of the black insulation layer 9 , which phenomenon has been considered unavoidable in the conventionally performed ink jet process, whereby the film-thickness flatness of the hole injection layers 7 and the light emitting layers 8 can be enhanced.
  • the polymer concentration of the organic material solution was approximately 0.2 to 5%, and, hence, to ensure that the organic material solution for forming the hole injection layer and the light emitting layer will have a thickness of several tens nm in the inside of a pixel having an approximately recessed cross section, it is necessary to form an insulation layer having a thickness of approximately 5 ⁇ m.
  • the height of the insulation layer is large, a disconnection attributed to broken steps of the cathode is liable to easily occur due to the stepped portions, thus giving rise to a drawback that the yield rate is lowered.
  • the method of manufacture of an organic electroluminescence display device of the present invention it is possible to lower the height of the insulation layer 9 , that is, so that it is not more than 1 ⁇ m, and, hence, the occurrence of a lowering of the yield rate due to the occurrence of broken steps of the cathode 11 can be totally eliminated, whereby the acquisition of a high productivity and a high reliability can be expected.
  • the organic material solution when the organic material solution is injected into the inside of the non-affinity insulation layer, there may be a case in which the film thickness is large at the center portion of the pixel and small at the peripheral portion of the pixel, thus giving rise to the occurrence of color irregularities and a lowering of reliability.
  • the organic material solution which is blown off to the region where the insulation layer 9 is not formed exhibits a large film thickness at the peripheral portion, the flatness at the center portion is enhanced, and, hence, the occurrence of color irregularities can be eliminated, whereby the reliability of the organic electroluminescence element is enhanced.
  • propylene glycol monomethyl ether acetate is used, for example.
  • an organic solvent for example, propylene glycol monomethyl ether (PGME), ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, N-methylpyrrolidone, tetrahydrofuran, cyclohexane, ethanol, propyl alcohol, isopropyl alcohol, t-butanol, ethyl acetate, methyl acetate, butyl acetate, isoamyl acetate, ethyl lactate, acetone, methyl amyl ketone, methyl ethyl ketone, cyclohexane, cyclopentanone or the like can be used.
  • PGME propylene glycol monomethyl ether
  • ethylene glycol monomethyl ether ethylene glycol dimethyl ether
  • ethylene glycol diethyl ether ethylene glycol diethyl ether
  • N-methylpyrrolidone tetrahydrofuran
  • the polymer which forms the above-mentioned black insulation layer 9 as an organic solvent which does not dissolve the hole injection layers 7 or the light emitting layers 8 , for example, propylene glycol monomethyl ether acetate (PGMEA) is used.
  • PMEA propylene glycol monomethyl ether acetate
  • the pigment which forms the black insulation layer 9 for example, CO 3 O 4 is used.
  • TiO 2 insulation carbon black (carbon black which is covered with resin) or the like can be used.
  • an ITO film 2 a having a thickness of approximately 150 nm is formed by a sputtering method, as shown in FIG. 2 .
  • the ITO film 2 a is partially etched by a photolithography method to form anodes 2 having a size of 150 ⁇ m ⁇ 170 ⁇ m, which constitute pixel portions by patterning, as shown in FIG. 3 .
  • photosensitive polyimide having a thickness of approximately 3 ⁇ m is applied to the whole surface of the light transmitting glass substrate 1 by a spin coating method, and it is partially etched by a photolithography method; and, thereafter, the structure is baked at a temperature of approximately 200° C. for approximately 30 minutes such that an outer wall layer 3 having a width of approximately 10 ⁇ m and a height of approximately 2 ⁇ m, which surrounds a peripheral portion of the glass substrate 1 , is formed, as shown in the plan view of FIG. 4A .
  • the structure is exposed to a saturated vapor pressure of propylene glycol monomethyl ether acetate (PGMEA) for approximately 1 hour so as to make the upper surfaces of the anodes 2 achieve non-affinity.
  • PMEA propylene glycol monomethyl ether acetate
  • this non-affinity processing on the upper surfaces of the anodes 2 which makes the organic substances adhere to the upper surfaces of the anodes 2 , is not specifically necessary.
  • the organic electroluminescence display device is completed through processes similar to the processes employed in the above-mentioned embodiment.
  • the non-affinity imparting step which makes organic substances adhere to the upper surfaces of the anodes 2 as a next step, can be omitted, and, hence, exactly the same effects as those achieved in the above-mentioned embodiments can be obtained even when the steps are shortened.
  • FIG. 11 to FIG. 18 are cross-sectional views showing respective steps in a comparative example of a method of manufacture of the organic electroluminescence display device according to the present invention.
  • the same symbols are used to identify parts that are identical to the parts shown in the above-mentioned drawings, and repeated explanations thereof are omitted.
  • an ITO film 2 a having a thickness of approximately 150 nm is formed by a sputtering method, as shown in FIG. 12 .
  • the ITO film 2 a is partially etched by a photolithography method, as shown in FIG. 13 , to form anodes 2 of an ITO film 2 a having sizes of 150 ⁇ m ⁇ 170 ⁇ m, which constitute pixel portions, by patterning.
  • an acrylic polymer resin is applied, such that the polymer resin surrounds the anodes 2 which constitute the pixel portions, and banks 20 having a film thickness of approximately 4 ⁇ m are formed by etching using a photolithography method. Thereafter, a fluorine plasma treatment is performed, and non-affinity is imparted to the banks 20 .
  • a fluorine plasma treatment is performed, and non-affinity is imparted to the banks 20 .
  • residual organic components on the upper surfaces of the anodes 2 are removed.
  • PEDOT/PSS aqueous solution for example, Baytron P, a product of Bayer AG.
  • the structure is heated and dried at a temperature of approximately 120° C. for approximately 10 minutes, thus forming hole injection layers 7 , as shown in FIG. 15 .
  • a poly-fluorine-based polymer light emitting material is blown off from a nozzle using an ink jet method so as to form light emitting material layers.
  • the structure is heated and dried at a temperature of approximately 80° C. for approximately 20 minutes so as to form a light emitting layer 8 having a thickness of approximately 40 nm.
  • an electron injection layer 10 is formed.
  • a film made of calcium (Ca) having a thickness of approximately 100 nm is formed with a vapor deposition speed of 1 nm/sec so as to form a cathode 11 .
  • a film made of aluminum (Al) having a thickness of approximately 100 nm is formed with a vapor deposition speed of 1 nm/sec so as to form a protective film 12 .
  • the glass substrate 1 on which the cathode 11 and the protective film 12 are formed is moved to a sealing globe box (not shown in the drawing).
  • a polymer-resin-based sealing material 13 of an ultraviolet-ray-curing type the glass substrate 1 is arranged to face the glass substrate 15 , thereby causing a drying agent 14 to be preliminarily adhered to the inside thereof, and it is sealed to the glass substrate 15 .
  • the sealing of the glass substrate 1 to the glass substrate 15 is completed by irradiating ultraviolet rays to the polymer-resin-based sealing material 13 so as to cure the sealing material 13 .
  • the organic electroluminescence display device which is formed in such a manner, when a given DC voltage is applied between the anodes 2 and the cathode 11 , a green light emission is obtained. Then, when the voltage-luminance characteristic is measured, a luminance of approximately 1000 cd/cm 2 is obtained at approximately a voltage of 5.5V. The contrast ratio here is approximately 80:1.
  • the present invention is not limited to this case, and the present invention is applicable to the formation of a polymer-based organic electroluminescence element, a color filter or an organic thin film transistor or the like which is used for a flat light source, a flat display or the like and is manufactured by an ink jet method.
  • an organic electroluminescence display device According to the manufacturing method of manufacture an organic electroluminescence display device according to the present invention, it is possible to obtain extremely advantageous effects. That is, it is possible to easily realize a reduction of the manufacturing cost attributed to simplification of the manufacturing steps, an enhancement of the productivity attributed to an enhancement of the yield rate, an enhancement of the reliability attributed to a high contrast ratio, and an enhancement of the display quality in which no color irregularities or the like are generated, whereby it is possible to obtain an organic electroluminescence display device of high productivity, high quality and high reliability.
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