US20040223071A1 - Multiple microlens system for image sensors or display units - Google Patents

Multiple microlens system for image sensors or display units Download PDF

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Publication number
US20040223071A1
US20040223071A1 US10/431,379 US43137903A US2004223071A1 US 20040223071 A1 US20040223071 A1 US 20040223071A1 US 43137903 A US43137903 A US 43137903A US 2004223071 A1 US2004223071 A1 US 2004223071A1
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Prior art keywords
lens
regions
region
photosensitive
light
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Abandoned
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US10/431,379
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English (en)
Inventor
David Wells
Ulrich Boettiger
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Micron Technology Inc
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Individual
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Priority to US10/431,379 priority Critical patent/US20040223071A1/en
Assigned to MICRON TECHNOLOGY, INC. reassignment MICRON TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BOETTIGER, ULRICH C., WELLS, DAVID
Priority to CNA200480019193XA priority patent/CN1816915A/zh
Priority to PCT/US2004/013755 priority patent/WO2004102675A2/en
Priority to EP04751243A priority patent/EP1620900A2/en
Priority to JP2006532549A priority patent/JP2007515665A/ja
Priority to KR1020057021191A priority patent/KR20060009310A/ko
Priority to TW093112974A priority patent/TWI264580B/zh
Publication of US20040223071A1 publication Critical patent/US20040223071A1/en
Priority to US12/628,709 priority patent/US7916204B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Definitions

  • the present invention relates generally to improved semiconductor imaging devices, and in particular to a multiple microlens system for an imager array or display unit.
  • Solid state imagers including charge.coupled devices (CCD) and CMOS sensors, have been commonly used in photo imaging applications.
  • a solid state imager circuit includes a focal plane array of pixel cells, each one of the cells including either a photogate, photoconductor or a photodiode overlying a doped region of a substrate for accumulating photo-generated charge in the underlying portion of the substrate.
  • Microlenses are commonly placed over imager pixel cells.
  • a microlens is used to focus light onto the initial charge accumulation region.
  • Conventional technology uses a single microlens with a polymer coating, which is patterned into squares or circles provided respectively over the pixels which are then heated during manufacturing to shape and cure the microlens.
  • microlenses significantly improves the photosensitivity of the imaging device by collecting light from a large light collecting area and focusing it on a small photosensitive area of the sensor.
  • the ratio of the overall light collecting area to the photosensitive area of the sensor is known as the pixel's fill factor.
  • Microlenses are formed on planarized regions, which are above the photosensitive area. After passing through the planarization regions, the light is filtered by color filters. Each conventional pixel can have a separate color filter. Alternatively, a pixel's filter regions will be varied by depth in order to filter out undesirable wavelengths.
  • the off-axis light passes through planarization regions and a color filter, misses the intended photosensitive region and instead strikes an adjacent light sensitive region. Consequently, smaller imagers with untuned or nonoptimized microlenses do not achieve optimal color fidelity and signal/noise ratios.
  • Lens structures used with display systems also suffer from a lack of efficient lens systems.
  • active matrix liquid crystal display (LCD) systems have a cross polarizer than can open or block a light path with a voltage signal. The LCD assumes a parallel or perpendicular state to the polarizer angles in question. Light comes through a color filter to be viewed by a user when the light path is open.
  • Current systems do not provide for good viewing angles in both X and Y directions without expensive or complex structures that are needed to disperse the light to provide a good viewing angle.
  • the present invention provides a microlens structure for a pixel array in which the microlens associated with pixel(s) of the array includes a plurality of lens regions, each region having a different optical property.
  • the optical properties of the plurality of lens regions are such that an increased amount of incident light reaches a light detector pixel or is dispersed from a display pixel.
  • FIG. 1 shows a cross sectional view of a portion of a microlens structure constructed in accordance with an exemplary embodiment of the invention
  • FIG. 1A shows a top view of a portion of the FIG. 1 embodiment
  • FIG. 2 shows a top view of a portion of another exemplary embodiment of a pixel array constructed in accordance with another aspect of the invention
  • FIG. 3 shows a cross sectional view of an exemplary embodiment of the FIG. 1 microlens
  • FIG. 4 shows a cross sectional view of another exemplary embodiment of a microlens constructed in accordance with another embodiment of the invention.
  • FIG. 5 shows a top view of a microlens constructed in accordance with an exemplary embodiment of the invention
  • FIG. 6 shows a cross sectional view of the FIG. 5 microlens
  • FIG. 7 shows a block diagram of an imager system constructed in accordance with an exemplary embodiment of the invention.
  • FIG. 8 shows a manufacturing method performed in accordance with an exemplary embodiment of the invention
  • FIG. 9 shows a manufacturing method performed in accordance with another exemplary embodiment of the invention.
  • FIG. 10 shows a manufacturing method performed in accordance with another exemplary embodiment of the invention.
  • FIG. 11 shows a cross sectional view of a lens constructed in accordance with another exemplary embodiment of the invention.
  • the invention provides a new microlens structure for use with optical detectors or display systems.
  • the invention increases the amount of incident light reaching a photosensitive region of a pixel in an imager array.
  • the invention can also be used to diffuse light from a display unit more efficiently.
  • the microlens structure includes a plurality of lens regions having different optical properties to refract or divert light incident to a microlens either to a photosensitive region of a pixel or from a display structure in a more efficient manner.
  • FIGS. 1 and 1A a first exemplary embodiment of an imager array 2 constructed in accordance with the invention is shown in cross sectional and top view, respectively.
  • a plurality of microlens structures is provided, each having an upper lens portion 1 and a lower lens portion 3 .
  • the structures are provided over passivation region 6 , intervening region 4 (e.g., color filter array, metallization region, etc) and an array of imaging pixels 5 .
  • Each pixel 5 has a photosensor for converting photons to electrical charges.
  • the light collection efficiency of each pixel 5 is increased by creating two or more lens layers 1 , 3 in each microlens to focus light more directly onto a light sensitive region of pixel 5 .
  • the lens layers 1 , 3 can be formed into various symmetrical geometric shapes, such as circles, squares, etc., and asymmetrical shapes to provide a path for incident light rays to reach the photo sensitive regions of the pixel 5 .
  • FIG. 1A shows the lens regions 1 , 3 as circular and noncontiguous with other lens structures with lens regions 1 , 3 ; however, it should be understood that a variety of shapes may be used with the invention, as is further discussed below.
  • FIG. 2 shows a top view of a second embodiment of the invention in which a microlens array has a first group of microlenses each having two lens regions 1 , 3 and a second group of microlenses each having a single lens 10 .
  • FIG. 2 illustrates that a microlens array can have different microlens structures respectively associated with different pixels of a pixel array.
  • each microlens structure is based upon the determination of desired combined refractive effects of the two or more lens regions 1 , 3 .
  • a desired combined refractive effect is produced by the combined optical properties of regions 1 , 3 which improves the fill factor for a pixel 5 .
  • Refraction is the bending of the path of a light wave as it passes across the boundary separating two media.
  • the angle at which a light wave encounters a boundary is referred to as the angle of incidence ( ⁇ 1 ).
  • the angle at which the light wave moves in relation to the media boundary after passage is referred to as the angle of refraction ( ⁇ 2 ).
  • N 1 and N 2 refer to the index of refraction associated with two materials that form a boundary between them, which a light wave passes through. Refraction is caused by the change in speed experienced by a light wave when the medium it passes through changes.
  • N 1 ⁇ N 2 ⁇ N 0 is an example of a set of refractive indexes for a microlens having two different regions 1 , 3 .
  • Regions 1 , 3 have dimensions and refractive indexes selected to steer more light into a detector region than would otherwise occur using a single microlens or other conventional microlens structures.
  • N 1 is the refractive index of the first lens region 1 .
  • N 2 is the refractive index of the second lens region 3 and N 0 is the refractive index of a medium outside the first lens region 1 , such as air or other gasses.
  • FIG. 3 illustrates an expanded view of the FIG. 1 embodiment.
  • the light collection efficiency of each pixel 5 is increased by creating more than one lens region 1 , 3 in each microlens to focus light more directly on a photosensitive region of pixel 5 .
  • Lens region materials 1 , 3 are positioned to steer, or direct, incident light 7 to an underlying photosensitive region 5 .
  • Lens regions 1 , 3 can be formed into various symmetrical geometric shapes, such as circles, squares, etc. as well as asymmetrical shapes to provide a path for incident light rays to reach the photosensitive region of pixel 5 .
  • a third embodiment of the invention includes a microlens having more than two lens regions to better selectively adjust the refraction of light onto a photosensitive region.
  • FIG. 4 shows microlens 9 having a first lens region 8 formed over a second lens region 1 which is in turn formed over a third lens region 3 .
  • the lens regions are formed with different refractive indexes of N 3 , N 2 and N 1 .
  • the regions refractive indexes and lens sizes and shapes are selected to provide, in combination with other intervening layer refractive properties, a desired fill factor for photosensitive regions of the pixel 5 below the exemplary microlens 9 .
  • each lens' regions 8 , 1 , 3 may also be chosen based on the optical properties of the underlying regions, e.g., planarization layer 6 or other layers 4 , which may also affect the fill factor.
  • incident light is refracted by the multiple regions 8 , 1 , 3 so that a desired portion of the light is directed onto the photosensitive region 5 .
  • a topmost one of the lens regions, e.g., 8 may be formed as segmented lens regions or a single lens region 8 over the entire pixel array.
  • the microlens 9 may be formed over each of the pixels in an imager array or a portion of the pixels in the array.
  • FIGS. 5 and 6 respectively illustrate a top view and cross sectional view of a fourth exemplary embodiment of the invention.
  • a lower lens ring 13 deflects light from an outer peripheral portion of a lens region 11 towards a photosensitive region of a pixel 5 .
  • the lens region 13 refracts only a portion of the light refracted by lens region 11 in order to selectively adjust the fill factor for a particular photosensitive region 5 .
  • One or more additional lens regions may be provided above lens region 11 to further direct light towards the photosensitive region of pixel 5 .
  • a curved microlens region 11 is formed above another microlens region 13 .
  • the two microlens regions 11 , 13 can be reversed; in which case, lens region 13 will be formed on lens region 11 to selectively refract light towards the photosensitive region of pixel 5 .
  • lens region 13 As shown in FIG. 6, light 17 entering lens region 11 is refracted into the lower lens region 13 .
  • Lens region 13 further refracts the light 17 near the peripheral edge at a sharp angle onto the photosensitive region of the pixel 5 .
  • the refractive indexes of the plurality of lens regions can be chosen based upon consideration of the light refractive properties of the layers between the microlens region and photosensitive region to maximize light transmission to the photosensitive regions of a pixel 5 .
  • a microlens array in accordance with the invention can include different microlens structures in different portions of the pixel array. Light which is incident on pixels at the center of a pixel array can be very different from light which is incident on pixels at the outer edges of the pixel array. Accordingly, one microlens structure can be provided over pixels in the middle of the array and another different microlens structure can be used for incident light transmission in other peripheral pixels of the array.
  • FIG. 7 shows an image processing system that incorporates a processor 31 , memory 33 , an input/output system 35 , a storage unit 37 and an imager 39 .
  • a bus 30 couples the image processing system components.
  • the imager 39 contains an array of pixels having an associated microlens structure in accordance with the invention.
  • Pixel arrays having a microlens constructed in accordance with the invention, and described with reference to examples in FIGS. 1-7, may be employed in a CMOS, CCD, or other imagers.
  • the microlens structures of the invention may be used as a single microlens for a pixel or as an array of microlenses for respective pixels.
  • FIG. 8 shows one method of manufacturing the microlens structures illustrated in FIGS. 1, 1A and 3 .
  • the method utilizes a substrate, which contains a pixel array, peripheral circuits, contacts and wiring.
  • One or more protective layers e.g., BPSG, BSG, PSG, silicon dioxide or silicon nitride or other transparent material, are formed over the pixel array and planarized.
  • a spacing layer may be formed over the protective layers. Construction of the microlens structure then begins.
  • a first lens region e.g., region 3 (FIG. 3) is formed with a material and thickness that will, in combination with other lens regions, increase incident light passing onto a photosensitive region of pixel 5 .
  • the first lens region 3 may be applied using a process such as spin coating and be formed of a transparent or polymeric material.
  • Other lens forming materials may also be used including optical thermoplastic such as polymethylmethacrylate, polycarbonate, polyolefin, cellulose acetate butyrate, or polystyrene, a polymide, a thermoset resin such as an epoxy resin, a photosensitive gelatin or a radiation curable resin such as acrylate, methacrylate, urethane acrylate, epoxy acrylate, or polyester acrylate.
  • the first lens region is patterned to form individual microlens region 3 . Patterning can be accomplished using standard photolithography equipment and techniques.
  • individualized microlens region 3 is shaped into a desired configuration, such as asymmetric circular, by lens processing such as baking.
  • the first lens region 3 is overcoated with a second lens region 1 and formed with a material and to a thickness which, in combination with other lens regions through which incident light travels, increases fill factor, or intensity of incident light, for photosensitive region of pixel 5 .
  • the second region 1 is patterned.
  • second lens region 1 is shaped (e.g., flowed) by baking at S 61 .
  • FIG. 9 shows an exemplary manufacturing method for forming the microlens structures of FIG. 4.
  • a lens region 3 is formed over pixels of the pixel array.
  • lens region 3 is patterned to produce individually shaped microlens region 3 .
  • Region 3 may be patterned into circular, rectangular or other shapes at processing segment S 73 .
  • patterned lens region 3 is shaped into a light focusing lens configuration by baking. If desired, another lens region, e.g., 1 (FIG. 4), is formed above the previous lens region 3 at processing segment S 79 .
  • Processing segments S 73 , S 75 are repeated for each new applied layer.
  • a determination is made on whether or not to apply another lens region. If another lens region is not to be applied, processing terminates. If another lens region is to be formed, processing segments S 79 , S 73 and S 75 are repeated.
  • FIG. 10 shows another exemplary manufacturing method for forming an exemplary microlens array containing multiple lens regions in accordance with the invention. All microlens layers are formed over pixels 5 at steps S 91 -S 93 . The layers are patterned at S 95 and shaped at S 97 .
  • the lens regions (e.g., 1 , 3 ) are collectively shaped by means such as flowing the lens regions by baking. Steps S 91 -S 97 are performed such that the resulting multiple lens regions in an exemplary microlens provides for maximized light refraction to respective photosensitive regions (e.g., 5 ).
  • the shape of the patterned individualized microlenses may be circular, lenticular, ovoid, rectangular, hexagonal or any other suitable shape.
  • Shaping of lens regions can be accomplished by heat treatment to form refractive lens regions from the applied and patterned lens forming regions.
  • the shaping process used to form the refractive lens regions depends on the material used to form the lens regions. If the material of the lens forming regions may be heat treated, then heat treatment processes such as baking may be used. If the material is extremely photosensitive, then special light exposure techniques may be used.
  • the invention can also be used with light projection systems as well as light detection systems. The same principles apply if the light is coming out of the substrate as when the light is going in. While the structural parameters might change for optimal performance with display systems as compared with imager systems, the invention still provides an improved structure for light distribution.
  • a lens structure is formed over a display region 131 .
  • the display region 131 can be a display pixel or a light emitting unit. Multiple lens structures can be formed over the same display region 131 in a lens ensemble in order to further increase light dispersion and improve viewing angle from display region 131 .
  • Light is emitted from display region 131 and enters a layer 129 , which can be a top glass or other display layer (e.g., top glass layer in a LCD system) and then the light enters polarizer 127 and is refracted according to polarizer operation. Light then enters the first lens region 125 with refractive index N 2 where light is refracted into second lens region 123 having a refractive index N 1 .
  • the display lens structure of FIG. 11 incorporates regions 123 and 125 are formed in the same manner and of the same material as the corresponding lens regions in other embodiments of the invention.

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US10/431,379 2003-05-08 2003-05-08 Multiple microlens system for image sensors or display units Abandoned US20040223071A1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
US10/431,379 US20040223071A1 (en) 2003-05-08 2003-05-08 Multiple microlens system for image sensors or display units
CNA200480019193XA CN1816915A (zh) 2003-05-08 2004-05-05 用于图像传感器或显示单元的多微透镜系统
PCT/US2004/013755 WO2004102675A2 (en) 2003-05-08 2004-05-05 Multiple microlens system for image sensors or display units
EP04751243A EP1620900A2 (en) 2003-05-08 2004-05-05 Multiple microlens system for image sensors or display units
JP2006532549A JP2007515665A (ja) 2003-05-08 2004-05-05 イメージ・センサまたはディスプレイ・ユニットのための多重マイクロレンズ・システム
KR1020057021191A KR20060009310A (ko) 2003-05-08 2004-05-05 이미지 센서 또는 디스플레이 유닛용 다중 마이크로렌즈시스템
TW093112974A TWI264580B (en) 2003-05-08 2004-05-07 Multiple microlens system for image sensors or display units
US12/628,709 US7916204B2 (en) 2003-05-08 2009-12-01 Multiple microlens system for image sensors or display

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US12/628,709 Expired - Lifetime US7916204B2 (en) 2003-05-08 2009-12-01 Multiple microlens system for image sensors or display

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EP (1) EP1620900A2 (zh)
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CN (1) CN1816915A (zh)
TW (1) TWI264580B (zh)
WO (1) WO2004102675A2 (zh)

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US7916204B2 (en) 2011-03-29
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