US20030127695A1 - Semiconductor device and method for manufacturing the same - Google Patents

Semiconductor device and method for manufacturing the same Download PDF

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Publication number
US20030127695A1
US20030127695A1 US10/337,978 US33797803A US2003127695A1 US 20030127695 A1 US20030127695 A1 US 20030127695A1 US 33797803 A US33797803 A US 33797803A US 2003127695 A1 US2003127695 A1 US 2003127695A1
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gate
source
gate electrode
semiconductor substrate
semiconductor device
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US10/337,978
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Yoshio Ozawa
Masayuki Tanaka
Kiyotaka Miyano
Shigehiko Saida
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Toshiba Corp
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Toshiba Corp
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Assigned to KABUSHIKI KAISHA TOSHIBA reassignment KABUSHIKI KAISHA TOSHIBA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MIYANO, KIYOTAKA, OZAWA, YOSHIO, SAIDA, SHIGEHIKO, TANAKA, MASAYUKI
Publication of US20030127695A1 publication Critical patent/US20030127695A1/en
Priority to US10/916,500 priority Critical patent/US7148158B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/671—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor having lateral variation in doping or structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/258—Source or drain electrodes for field-effect devices characterised by the relative positions of the source or drain electrodes with respect to the gate electrode
    • H10D64/259—Source or drain electrodes being self-aligned with the gate electrode and having bottom surfaces higher than the interface between the channel and the gate dielectric

Definitions

  • the present invention relates to a MOS transistor having an improved sidewall of a gate electrode and a method for manufacturing the same.
  • parasitic capacitance which is inevitably present in an element structure gives rise to a larger problem.
  • the parasitic capacitance which occurs between a gate electrode and a source/drain region which provides a MOS transistor, reduces an operating speed of the transistor and has a larger effect as the elements are patterned finer.
  • FIG. 7A shows part of a gate electrode structure of a conventional MOS transistor.
  • a gate insulation film 112 such as a silicon oxide film, on which a gate electrode 113 is formed.
  • a source/drain region 116 is formed in the semiconductor substrate 111 .
  • Side and upper surfaces of the gate electrode 113 are covered with a gate protecting insulation film (Sidewall Oxide Layer) 114 , and the side surface of the protecting insulation film 114 is covered with a gate sidewall insulation film (Sidewall Spacer) 115 such as a silicon nitride film.
  • the gate protection film 114 and the gate sidewall insulation film 115 are interposed as a dielectric between the gate electrode 113 and the source/drain diffusion region 116 (including a wiring layer thereof), so that there occurs unwanted parasitic capacitance.
  • Parasitic capacitance reduces the operating speed of the transistor. Especially in a fine-patterned transistor having a gate length of 0.2 ⁇ m or less, the parasitic capacitance reduces the operating speed greatly.
  • a MOS transistor having an elevated source/drain configuration shown in FIG. 7B has an elevated source/drain layer 117 which overlies the source/drain region 116 and is in contact with the gate sidewall spacer 115 .
  • This MOS transistor similarly suffers from drastic reduction in operating speed owing to large parasitic capacitance between the gate electrode 113 and the elevated source/drain layer 117 (including the wiring layer thereof) where the gate protection film 114 and the gate sidewall spacer 115 are interposed therebetween.
  • silicon oxide has been used as a material of the gate sidewall spacer conventionally, silicon nitride with high dielectric constant is used recently for a later-described reason. This has made the problem of parasitic capacitance further serious.
  • FIGS. 8 A- 8 D and FIGS. 9 A- 9 C show a method for manufacturing a MOS transistor in a case where a conventional gate sidewall spacer is made of silicon oxide.
  • a gate oxide film 122 is formed on a silicon semiconductor substrate 121 , a polysilicon film is deposited by Chemical Vapor Deposition (CVD) and processed by Reactive Ion Etching (RIE) to form a gate electrode 123 thereof.
  • CVD Chemical Vapor Deposition
  • RIE Reactive Ion Etching
  • an exposed surface of the gate electrode 123 is oxidized to form a gate protecting insulation film 124 .
  • a part 125 of a source/drain diffusion region is formed in the semiconductor substrate 121 by ion implantation.
  • a silicon oxide film is deposited by CVD over the substrate surface and then removed by RIE to form a gate sidewall spacer 126 thereof.
  • the exposed surface of the semiconductor substrate 121 is damaged by ions, so that a roughened exposed surface is formed on the one part 125 of the source/drain region.
  • a source/drain diffusion region 127 is formed in the semiconductor substrate 121 by ion implantation.
  • the surface of the semiconductor substrate 121 is roughened, variation in the shape of the diffusion regions occurs among the elements, which results in increased fluctuations in operating characteristics thereof.
  • the oxide film is removed from the upper surface of the gate electrode 123 using dilute hydrofluoric acid.
  • the gate protection film 124 and the gate sidewall insulation film 126 are also removed partially.
  • the insulation film 126 of the sidewall spacer is left little by a type of the MOS transistor formed on the semiconductor substrate 121 .
  • a cobalt layer 128 is deposited over the substrate surface by sputtering.
  • a cobalt silicide layer 129 is provided on the gate electrode 123 and the source/drain region 127 by lamp heating. Thereafter, a non-reacted the cobalt layer is removed.
  • the gate electrode 123 and the source/drain region 127 are electrically connected through the cobalt silicide layer 129 , thereby reducing the yield.
  • a silicon nitride film has been used as the gate sidewall spacer as shown in FIGS. 10 A- 10 D and FIGS. 11 A- 11 C.
  • a gate oxide film 132 is formed on a semiconductor substrate 131 such as silicon
  • a gate electrode 133 such as a polysilicon film is formed thereon (FIG. 10A).
  • an exposed surface of the gate electrode 133 is oxidized to form a gate protection insulation film 134 .
  • a part 135 of a source/drain diffusion region is formed in the semiconductor substrate 131 by ion implantation (FIG. 10B).
  • a silicon nitride film is deposited over the substrate surface by CVD and then selectively removed by RIE to provide a gate sidewall insulation spacer 136 on a side surface of the gate protection film 134 .
  • the gate sidewall spacer is not removed during processing by use of dilute hydrofluoric acid, so that as shown in FIG. 11C the gate electrode 133 and the source/drain region 137 are not electrically connected, thereby preventing the yield from being deteriorated.
  • a cobalt layer 138 is deposited over the surface of the semiconductor substrate 131 by sputtering (FIG. 11B). Then, using the lamp heating, a cobalt silicide layer 139 is formed on the gate electrode 133 and the source/drain region 137 (FIG. 11C). A non-reacted cobalt layer is removed.
  • FIGS. 12 A- 12 D show a method for manufacturing a MOS transistor in a case of forming the gate sidewall spacer using the silicon oxide.
  • a gate oxide film 142 is formed on a semiconductor substrate 141 such as silicon
  • a polysilicon film and a silicon nitride film are deposited consecutively by CVD and processed by RIE to form a gate electrode 143 and a silicon nitride film 144 sequentially.
  • a part 146 of a source/drain diffusion region is formed in the silicon substrate by ion implantation.
  • a silicon oxide film is deposited over the surface of the semiconductor substrate 141 by CVD and then removed by RIE to form a gate sidewall spacer 147 .
  • the silicon semiconductor substrate is exposed partially and subjected to impact by ions, thereby providing a roughened surface thereon.
  • an elevated source/drain layer 148 is formed by epitaxial growth of silicon.
  • a gap 150 called a facet is formed between the gate sidewall spacer 147 and the elevated layer 148 .
  • a source/drain diffusion region 149 is formed in the semiconductor substrate 141 by ion implantation. In this case, a diffusion region under the facet is formed deep, so that it is difficult to control a threshold value of the transistor owing to the short-channel effect.
  • FIGS. 13 A- 13 D a manufacturing method using a silicon nitride film is used as shown in FIGS. 13 A- 13 D.
  • a gate oxide film 152 is formed on a semiconductor substrate 151 such as silicon
  • a polysilicon film and a silicon nitride film are deposited consecutively by CVD and processed by RIE to provide a gate electrode 153 and a silicon nitride film 154 sequentially.
  • a part 156 of a source/drain diffusion region is formed in the silicon substrate 151 by ion implantation.
  • a silicon nitride film is deposited over the surface of the semiconductor substrate 151 by CVD and then removed from the flat portion by RIE to form a gate sidewall spacer 157 .
  • the surface of the semiconductor substrate in which the diffusion layer is formed is not roughened and, in addition, a gap called a facet is not formed between the gate sidewall spacer 157 and the elevated layer 158 as shown in FIG. 13D. Therefore, the source/drain diffusion region is formed just as designed, so that the threshold value of the transistors can be controlled easily.
  • the dielectric constant of the gate sidewall spacer is about twice as large as that of a conventional silicon oxide film, so that the parasitic capacitance is also doubled approximately, thus greatly reducing the operating speed of the elements.
  • a silicon nitride film is used as at least part of the gate sidewall spacer of the fine-patterned transistor. Furthermore, in the transistor having the elevated source/drain structure, the sidewall spacer of silicon nitride is used because of the facet formed at the time of the elevated layer formation. In addition, to prevent the semiconductor substrate from being dug at the time of forming the conductor plug connected to the source/drain region, the transistor is covered with a so-called liner film of a silicon nitride film.
  • Such silicon nitride present around these transistors has higher dielectric constant than silicon oxide and so increases the parasitic capacitance, thus greatly reducing the operating speed of the transistors. Furthermore, trapped charge, distortions, hydrogen, etc. present in the silicon nitride film cause fluctuations in characteristics of the transistors, thus reducing device reliabilities.
  • a semiconductor device comprises: a semiconductor substrate; source/drain regions formed in the semiconductor substrate; a gate insulation film formed on the semiconductor substrate; a gate electrode formed on the gate insulation film between the source/drain regions; and a gate sidewall spacer formed on side surfaces of the gate electrode, wherein the gate sidewall spacer is composed of silicon oxide containing 0.1-30 atomic % of chlorine.
  • a semiconductor device comprises: a semiconductor substrate; source/drain regions formed in the semiconductor substrate; a gate insulation film formed on the semiconductor substrate; a gate electrode formed on the gate insulation film between the source/drain regions and covered with a gate protecting insulation film; and a gate sidewall spacer formed on side surfaces of the gate electrode, wherein the gate sidewall spacer is composed of silicon oxide containing 0.1-30 atomic % of chlorine.
  • a method for manufacturing a semiconductor device comprises forming source/drain regions in a semiconductor substrate; forming a gate insulation film on the semiconductor substrate; forming a gate electrode on the gate insulation film between the source/drain regions; forming an insulation film composed of a silicon nitride film containing chlorine on side surfaces of the gate electrode; and converting the silicon nitride film by oxidation reaction processing into silicon oxide film containing 0.1-30 atomic % of chlorine to provide a gate sidewall spacer.
  • FIG. 1 is a plan view of a transistor according to a first embodiment
  • FIGS. 2A and 2B are cross-sectional views of the transistor according to the first embodiment and FIG. 2A is a cross-sectional view taken along line II-II of FIG. 1;
  • FIG. 3 is a graph for explaining a relationship between a concentration of chlorine in a silicon oxide film and a rate of change in dielectric constant of the silicon oxide film;
  • FIGS. 4A to 4 D are cross-sectional views for explaining a transistor manufacturing method according to a second embodiment
  • FIGS. 5A to 5 D are cross-sectional views for explaining the transistor manufacturing method according to the second embodiment
  • FIGS. 6A to 6 D are cross-sectional views for explaining a transistor manufacturing method according to a third embodiment
  • FIGS. 7A to 7 B are cross-sectional views for explaining a conventional transistor manufacturing method
  • FIGS. 8A to 8 D are cross-sectional views for explaining the conventional transistor manufacturing method
  • FIGS. 9A to 9 C are cross-sectional views for explaining the conventional transistor manufacturing method
  • FIGS. 10A to 10 D are cross-sectional views for explaining the conventional transistor manufacturing method
  • FIGS. 11A to 11 C are cross-sectional views for explaining the conventional transistor manufacturing method
  • FIGS. 12A to 12 D are cross-sectional views for explaining the conventional transistor manufacturing method.
  • FIGS. 13A to 13 D are cross-sectional views for explaining the conventional transistor manufacturing method.
  • a gate insulation film 12 of a silicon oxide film on which a gate electrode 13 of polysilicon is provided.
  • Source/drain regions 16 are provided in the semiconductor substrate 11 .
  • Side and upper surfaces of the gate electrode 13 are covered with a gate protection insulation film (sidewall oxide layer) 14 of a silicon oxide film, in addition to which, the side surfaces covered with the protection film 14 are further covered with a gate sidewall insulation film (sidewall spacer) 15 .
  • a gate length L is, for example, 0.2 ⁇ m or less.
  • an elevated source/drain layer 17 made of, for example, monocrystal silicon which is on the source/drain region 16 and in contact with the gate sidewall spacer 15 .
  • the parasitic capacitance occurs between the gate electrode 13 and the elevated source/drain layer 17 (including the wiring layer) where the gate protection film 14 and the gate sidewall spacer 15 are interposed therebetween.
  • the gate sidewall spacer 15 used in the semiconductor device shown in FIGS. 2 A- 2 B is composed of silicon oxide containing chlorine.
  • a silicon oxide film containing chlorine can be formed by plasma CVD using a silicon source gas containing chlorine such as a dichlorosilane (SiH 2 Cl 2 ) gas or a tetrachlorosilane (SiCl 4 ) gas and an oxygen source gas such as a dinitrogen monoxide (N 2 O) gas or SiO 2 CVD with a chlorine (Cl 2 ) gas or a hydrogen chloride (HCl) gas as an additional source gas.
  • a silicon source gas containing chlorine such as a dichlorosilane (SiH 2 Cl 2 ) gas or a tetrachlorosilane (SiCl 4 ) gas
  • an oxygen source gas such as a dinitrogen monoxide (N 2 O) gas or SiO 2 CVD with a chlorine (Cl 2 ) gas or a hydrogen chloride (
  • FIG. 3 is a graph for explaining dependency of a rate of change in dielectric constant of a silicon oxide film containing chlorine on a chlorine concentration.
  • a vertical axis represents the rate of change in the dielectric constant and a horizontal axis, a concentration of chlorine (atomic %) in the silicon oxide film.
  • FIG. 3 shows a relationship between the rate of change in the dielectric constant of the silicon oxide film containing chlorine and the chlorine concentration shown in Table 1. If the chlorine concentration of the silicon oxide film containing chlorine is set to 0.1 atomic % or higher, the dielectric constant of this silicon oxide film decreases essentially, thus enabling essentially reducing parasitic capacitance between the gate electrode 13 and the source/drain diffusion region 16 including the wiring layer (not shown) and that between the gate electrode 13 and the elevated source/drain layer 17 (including the wiring layer).
  • the chlorine concentration is set to 1 atomic % or more, the parasitic capacitance can be reduced by 5% or more, so that a remarkable advantage will be obtained especially in a fine-patterned transistor having a gate length of 0.2 ⁇ m or less.
  • the parasitic capacitance can be reduced, so that the thickness of the gate sidewall spacer can be decreased, thus further promoting fine patterning of the elements. Furthermore, by containing chlorine in the silicon oxide film providing the gate protection film which covers an exposed portion of the gate electrode, the parasitic capacitance can be reduced between the gate electrode and the source/drain region or the elevated source/drain layer.
  • fluorine can be introduced into the silicon oxide.
  • Fluorine has an adverse effect such as promotion of diffusion of boron on a fine-patterned transistor, so that it cannot suitably be used in place of chlorine and preferably be used appropriately together with chlorine as occasion demands.
  • a gate oxide film 22 by oxidation processing.
  • a polysilicon layer is deposited by CVD and processed by RIE to form a gate electrode 23 .
  • an exposed surface of the gate electrode 23 is oxidized to form a gate protection film 24 .
  • a part 25 of a source/drain diffusion region is formed in the semiconductor substrate 21 by ion implantation. As shown in FIG. 4A, on a surface of a semiconductor substrate 21 such as silicon is formed a gate oxide film 22 by oxidation processing. Then, a polysilicon layer is deposited by CVD and processed by RIE to form a gate electrode 23 . Thereafter, as shown in FIG. 4B, an exposed surface of the gate electrode 23 is oxidized to form a gate protection film 24 . Then, a part 25 of a source/drain diffusion region is formed in the semiconductor substrate 21 by ion implantation. As shown in FIG.
  • a silicon nitride film is deposited over the substrate surface by low-pressure CVD using a hexachlorodisilane (Si 2 Cl 6 ) gas and an ammonia (NH 3 ) gas.
  • the film forming condition is, for example, a temperature of 400° C., a hexachlorodisilane gas flow rate of 1000 sccm, an ammonia gas flow rate of 10 sccm, and a pressure of 180 Pa. It has been confirmed by secondary-ion mass spectroscopy that this silicon nitride film contains about 10 atomic % of chlorine and hydrogen.
  • the silicon nitride film is selectively removed by RIE to provide a gate sidewall nitride film 26 .
  • the RIE rate of the gate oxide film 22 lower than that of the gate sidewall nitride film 26 , the surface of the semiconductor substrate can be prevented from being roughened.
  • a source/drain diffusion region 27 is formed in the semiconductor substrate 21 by ion implantation.
  • the surface of the semiconductor substrate is prevented from being roughened, it is possible to suppress the shape of the diffusion region from being varied from one another. This results in elimination of fluctuations in operating characteristics of the elements.
  • the gate oxide film is removed from both the upper surface of the gate electrode 23 and the surface of the source/drain region 27 using dilute hydrofluoric acid.
  • the gate sidewall spacer 26 remains in a desired shape on all of the elements.
  • a cobalt layer 28 is deposited over the substrate surface by sputtering. Then, as shown in FIG. 5C, a cobalt silicide layer 29 is formed by the lamp heating on the upper surface of the gate electrode 23 and the surface of the source/drain region 27 .
  • the gate sidewall spacer 26 of the nitride film can be annealed in a water vapor atmosphere to be converted into a silicon oxide film containing chlorine, which is provided as the gate sidewall insulation film 26 ′.
  • the annealing condition is given by, for example, a temperature of 150° C. and a pressure of 2 atmospheres. It has been confirmed by secondary-ion mass spectroscopy that this silicon oxide film contains of the order of 1 atomic % of chlorine and hydrogen.
  • an interlevel insulation film, a wiring layer, etc. are formed on the semiconductor substrate by a known method, thus completing the MOS transistor.
  • the parasitic capacitance is reduced between the gate electrode 23 and the source/drain diffusion region 27 including the wiring layer, thus avoiding a decrease in operating speed of the elements.
  • the silicon nitride film is converted into the silicon oxide film with annealing in the water vapor atmosphere.
  • an oxidizing atmosphere of oxygen, ozone, etc., or an atmosphere of a mixture may be also used.
  • a water vapor atmosphere is suitable because the silicon nitride film is converted into the silicon oxide film even at a low temperature.
  • annealing may be conducted at a pressure of 1 atmosphere or less but preferably be conducted at a pressure higher than 1 atmosphere.
  • a gate insulation film 32 such as a silicon oxide film.
  • a polysilicon layer and a silicon nitride film 34 which serves as a mask for RIE processing are deposited by CVD consecutively, and the polysilicon is processed by RIE to form a gate electrode 33 .
  • an exposed surface of the gate electrode 33 is oxidized to form a gate protecting insulation film 35 .
  • a part 36 of a source/drain diffusion region is formed in the semiconductor substrate 31 by ion implantation.
  • a silicon nitride film is deposited over the substrate surface by low-pressure CVD using a hexachlorodisilane (Si 2 Cl 6 ) gas and an ammonia (NH 3 ) gas.
  • a film forming condition is given by, for example, a temperature of 400° C., a hexachlorodisilane gas flow rate of 1000 sccm, an ammonia gas flow rate of 10 sccm, and a pressure of 180 Pa.
  • the silicon nitride film is removed by RIE to provide a gate sidewall nitride film 37 .
  • the RIE rate of the gate oxide film 32 lower than that of the gate sidewall nitride film 37 , the surface of the semiconductor substrate 31 is prevented from being roughened.
  • an elevated source/drain layer 38 is formed by epitaxial growth of silicon.
  • the forming condition is given by, for example, a temperature of 600° C., a dichlorosilane (SiH 2 Cl 2 ) gas flow rate of 300 sccm, a germane (GeH 4 ) gas flow rate of 10 sccm, an hydrogen chloride gas flow rate of 100 sccm, a hydrogen gas flow rate of 1500 sccm, and a pressure of 2 kPa.
  • a temperature of 600° C. a dichlorosilane (SiH 2 Cl 2 ) gas flow rate of 300 sccm, a germane (GeH 4 ) gas flow rate of 10 sccm, an hydrogen chloride gas flow rate of 100 sccm, a hydrogen gas flow rate of 1500 sccm, and a pressure of 2 kPa.
  • a gap called the facet is not formed. The reason for use of the germane gas is to
  • the silicon nitride film is densified and cannot be easily converted into the silicon oxide film later.
  • a source/drain diffusion region 39 is formed in the silicon substrate by ion implantation. In this case, the unwanted facet is prevented from being formed, so that it is possible to suppress the variation in the shape of the diffusion regions. Therefore, the threshold values of the transistors can be controlled easily.
  • the sidewall nitride film 37 by annealing the sidewall nitride film 37 in a water vapor atmosphere, it is converted into the silicon oxide film containing chlorine, thereby providing the gate sidewall spacer 37 ′.
  • the annealing condition is given by, for example, a temperature of 400° C. and a pressure of 1 atmosphere. It has been confirmed by secondary-ion mass spectroscopy that this silicon oxide film contains about 0.1 atom % of chlorine and hydrogen.

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US20050014354A1 (en) 2005-01-20

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