UA79779C2 - Gas preheater (variants) and method for regulation of gas-reagent distribution in furnace of chemical gas soaking - Google Patents
Gas preheater (variants) and method for regulation of gas-reagent distribution in furnace of chemical gas soaking Download PDFInfo
- Publication number
- UA79779C2 UA79779C2 UA20041109125A UA20041109125A UA79779C2 UA 79779 C2 UA79779 C2 UA 79779C2 UA 20041109125 A UA20041109125 A UA 20041109125A UA 20041109125 A UA20041109125 A UA 20041109125A UA 79779 C2 UA79779 C2 UA 79779C2
- Authority
- UA
- Ukraine
- Prior art keywords
- gas
- ring
- distribution plate
- bottom wall
- current collector
- Prior art date
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 40
- 239000003153 chemical reaction reagent Substances 0.000 title claims description 37
- 239000000126 substance Substances 0.000 title claims description 17
- 238000000034 method Methods 0.000 title claims description 11
- 238000002791 soaking Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000004020 conductor Substances 0.000 claims abstract description 18
- 230000000284 resting effect Effects 0.000 claims abstract description 13
- 238000004891 communication Methods 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 72
- 238000006243 chemical reaction Methods 0.000 claims description 44
- 238000005470 impregnation Methods 0.000 claims description 17
- 238000005056 compaction Methods 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims 1
- 238000000280 densification Methods 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
- 239000002131 composite material Substances 0.000 description 10
- 229910002804 graphite Inorganic materials 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 6
- 239000000543 intermediate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/139,553 US6572371B1 (en) | 2002-05-06 | 2002-05-06 | Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates |
| PCT/EP2003/005259 WO2003093531A1 (en) | 2002-05-06 | 2003-05-05 | Gas preheater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| UA79779C2 true UA79779C2 (en) | 2007-07-25 |
Family
ID=22487231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| UA20041109125A UA79779C2 (en) | 2002-05-06 | 2003-05-05 | Gas preheater (variants) and method for regulation of gas-reagent distribution in furnace of chemical gas soaking |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US6572371B1 (zh) |
| EP (1) | EP1501963B1 (zh) |
| JP (1) | JP4417831B2 (zh) |
| KR (1) | KR101057215B1 (zh) |
| CN (1) | CN100371494C (zh) |
| AU (1) | AU2003242547C1 (zh) |
| BR (1) | BR0304664B1 (zh) |
| CA (1) | CA2484915C (zh) |
| IL (1) | IL164970A (zh) |
| MX (1) | MXPA04011025A (zh) |
| RU (1) | RU2315821C2 (zh) |
| UA (1) | UA79779C2 (zh) |
| WO (1) | WO2003093531A1 (zh) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7476419B2 (en) * | 1998-10-23 | 2009-01-13 | Goodrich Corporation | Method for measurement of weight during a CVI/CVD process |
| US6669988B2 (en) * | 2001-08-20 | 2003-12-30 | Goodrich Corporation | Hardware assembly for CVI/CVD processes |
| EP1256973B1 (en) * | 2001-04-12 | 2004-12-29 | Infineon Technologies SC300 GmbH & Co. KG | Heating system and method for heating a reactor |
| US6758909B2 (en) * | 2001-06-05 | 2004-07-06 | Honeywell International Inc. | Gas port sealing for CVD/CVI furnace hearth plates |
| US6953605B2 (en) * | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
| US7431585B2 (en) * | 2002-01-24 | 2008-10-07 | Applied Materials, Inc. | Apparatus and method for heating substrates |
| US20040253377A1 (en) * | 2002-10-24 | 2004-12-16 | Bok Lowell D. | Batch and continuous CVI densification furnace |
| CN1304912C (zh) * | 2005-02-21 | 2007-03-14 | 西北工业大学 | 碳/碳复合材料热梯度化学气相渗透过程温度自动控制器 |
| US8057855B1 (en) | 2005-05-31 | 2011-11-15 | Goodrich Corporation | Non-pressure gradient single cycle CVI/CVD apparatus and method |
| US7691443B2 (en) * | 2005-05-31 | 2010-04-06 | Goodrich Corporation | Non-pressure gradient single cycle CVI/CVD apparatus and method |
| KR100792396B1 (ko) * | 2005-10-11 | 2008-01-08 | 주식회사 유진테크 | 파티션 구조형 가열유닛과 이를 이용한 히팅장치 |
| US7811085B2 (en) * | 2006-05-04 | 2010-10-12 | Honeywell International Inc. | Gas preheater for chemical vapor processing furnace |
| US7771194B2 (en) * | 2006-05-26 | 2010-08-10 | Honeywell International Inc. | Gas preheater for chemical vapor processing furnace having circuitous passages |
| WO2008052923A2 (en) * | 2006-10-29 | 2008-05-08 | Messier-Bugatti | Method of densifying porous articles |
| IL198123A0 (en) * | 2008-04-18 | 2009-12-24 | Snecma Propulsion Solide | A heat treatment oven with inductive heating |
| JP5730496B2 (ja) * | 2009-05-01 | 2015-06-10 | 株式会社日立国際電気 | 熱処理装置、半導体デバイスの製造方法および基板処理方法 |
| US11326255B2 (en) * | 2013-02-07 | 2022-05-10 | Uchicago Argonne, Llc | ALD reactor for coating porous substrates |
| FR3018526B1 (fr) * | 2014-03-14 | 2021-06-11 | Herakles | Installation de densification cvi comprenant une zone de prechauffage a forte capacite |
| DE102014226138A1 (de) | 2014-12-16 | 2016-06-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer Vorrichtung mit einer dreidimensionalen magnetischen Struktur |
| DE102016215616B4 (de) | 2016-08-19 | 2020-02-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer magnetischen Struktur und Vorrichtung |
| DE102016215617A1 (de) * | 2016-08-19 | 2018-02-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Hohlraums mit poröser Struktur |
| CN108106412B (zh) * | 2017-11-16 | 2019-10-15 | 山东道普安制动材料有限公司 | 一种高效率刹车盘生产设备及应用 |
| CN107779843B (zh) * | 2017-12-11 | 2019-10-08 | 湖南顶立科技有限公司 | 一种化学气相沉积炉 |
| CN108588678B (zh) * | 2018-05-07 | 2020-06-09 | 西安航空制动科技有限公司 | 一种化学气相沉积炉气体预热装置 |
| US10731252B2 (en) * | 2018-05-25 | 2020-08-04 | Rolls-Royce High Temperature Composites | Apparatus and method for coating specimens |
| FR3084672B1 (fr) * | 2018-08-03 | 2020-10-16 | Safran Ceram | Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux |
| FR3084892B1 (fr) | 2018-08-10 | 2020-11-06 | Safran Ceram | Procede de densification par infiltration chimique en phase gazeuse de substrats annulaire poreux |
| CN110699667A (zh) * | 2019-11-25 | 2020-01-17 | 美尔森银河新材料(烟台)有限公司 | 一种炭炭坩埚生产装置 |
| US11111578B1 (en) | 2020-02-13 | 2021-09-07 | Uchicago Argonne, Llc | Atomic layer deposition of fluoride thin films |
| US12000046B1 (en) * | 2021-12-29 | 2024-06-04 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
| US11932941B1 (en) | 2021-12-29 | 2024-03-19 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
| US11912628B1 (en) | 2021-12-29 | 2024-02-27 | Rolls-Royce High Temperature Composites, Inc. | Slurry infiltration fixture |
| US11901169B2 (en) | 2022-02-14 | 2024-02-13 | Uchicago Argonne, Llc | Barrier coatings |
| CN114990521A (zh) * | 2022-06-22 | 2022-09-02 | 湖南九华碳素高科有限公司 | 一种卧式装炉沉积炉 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996015285A1 (en) * | 1994-11-16 | 1996-05-23 | The B.F. Goodrich Company | Pressure gradient cvi/cvd apparatus, process and product |
| US5480678A (en) | 1994-11-16 | 1996-01-02 | The B. F. Goodrich Company | Apparatus for use with CVI/CVD processes |
-
2002
- 2002-05-06 US US10/139,553 patent/US6572371B1/en not_active Expired - Lifetime
-
2003
- 2003-05-05 RU RU2004132226/02A patent/RU2315821C2/ru not_active IP Right Cessation
- 2003-05-05 JP JP2004501664A patent/JP4417831B2/ja not_active Expired - Fee Related
- 2003-05-05 AU AU2003242547A patent/AU2003242547C1/en not_active Ceased
- 2003-05-05 UA UA20041109125A patent/UA79779C2/uk unknown
- 2003-05-05 CA CA2484915A patent/CA2484915C/en not_active Expired - Fee Related
- 2003-05-05 CN CNB038101904A patent/CN100371494C/zh not_active Expired - Lifetime
- 2003-05-05 KR KR1020047017890A patent/KR101057215B1/ko active IP Right Grant
- 2003-05-05 WO PCT/EP2003/005259 patent/WO2003093531A1/en active Application Filing
- 2003-05-05 BR BRPI0304664-8B1A patent/BR0304664B1/pt not_active IP Right Cessation
- 2003-05-05 MX MXPA04011025A patent/MXPA04011025A/es active IP Right Grant
- 2003-05-05 EP EP03747459A patent/EP1501963B1/en not_active Expired - Lifetime
-
2004
- 2004-11-01 IL IL164970A patent/IL164970A/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040108781A (ko) | 2004-12-24 |
| AU2003242547C1 (en) | 2009-01-22 |
| AU2003242547A1 (en) | 2003-11-17 |
| KR101057215B1 (ko) | 2011-08-16 |
| BR0304664B1 (pt) | 2013-07-09 |
| CA2484915C (en) | 2010-04-13 |
| JP4417831B2 (ja) | 2010-02-17 |
| AU2003242547B2 (en) | 2008-07-31 |
| JP2005524773A (ja) | 2005-08-18 |
| RU2004132226A (ru) | 2005-06-27 |
| IL164970A0 (en) | 2005-12-18 |
| CN1650042A (zh) | 2005-08-03 |
| CN100371494C (zh) | 2008-02-27 |
| CA2484915A1 (en) | 2003-11-13 |
| MXPA04011025A (es) | 2005-02-14 |
| EP1501963B1 (en) | 2012-08-08 |
| WO2003093531A1 (en) | 2003-11-13 |
| RU2315821C2 (ru) | 2008-01-27 |
| BR0304664A (pt) | 2004-08-03 |
| US6572371B1 (en) | 2003-06-03 |
| IL164970A (en) | 2010-06-16 |
| EP1501963A1 (en) | 2005-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| UA79779C2 (en) | Gas preheater (variants) and method for regulation of gas-reagent distribution in furnace of chemical gas soaking | |
| JP3815796B2 (ja) | 環形状の積重ねで配された多孔性基材を強化するための化学気相浸透法 | |
| JP4426302B2 (ja) | 化学的蒸気浸透によって多孔質基材を緻密化するための方法と装置 | |
| JP4495970B2 (ja) | 化学的蒸気浸透による基材の緻密化方法および装置 | |
| JP4960264B2 (ja) | 化学蒸気浸透により薄い多孔質基体を高密度化する方法、及び当該基体のローディング装置 | |
| JP3759166B2 (ja) | Ｃｖｉ／ｃｖｄプロセスに使用するための装置 | |
| EP1728889A2 (en) | CVI apparatus and method | |
| MX2014003617A (es) | Un dispositivo para cargar sustratos porosos de forma tridimensional a fin de ser densificados mediante infiltracion quimica de vapor en flujo dirigido. | |
| US20210261471A1 (en) | Method for densifying porous annular substrates by chemical vapour infiltration | |
| KR20000049264A (ko) | 증기상의 화학적 침투에 의한 고리형 적층체 내에 넣어진 기질을 온도구배로 고밀도화시키는 방법 | |
| US8133532B2 (en) | Method of densifying porous articles | |
| US11549176B2 (en) | Method for densifying porous annular substrates by chemical vapour infiltration |