UA14398A1 - Method for group manufacturing microminiaturized strain-gauge converters - Google Patents
Method for group manufacturing microminiaturized strain-gauge convertersInfo
- Publication number
- UA14398A1 UA14398A1 UA4365289A UA4365289A UA14398A1 UA 14398 A1 UA14398 A1 UA 14398A1 UA 4365289 A UA4365289 A UA 4365289A UA 4365289 A UA4365289 A UA 4365289A UA 14398 A1 UA14398 A1 UA 14398A1
- Authority
- UA
- Ukraine
- Prior art keywords
- strain
- microminiaturized
- plates
- connection
- glass layer
- Prior art date
Links
Abstract
The method for group manufacturing microminiaturized strain-gauge converters includes oxidation of two silicon wafers, etching the first plate to get membranes, forming diffusion strain gauges and metal wiring, application of alumina-borosilicate glass layer to the second plate, a connection of plates by a glass layer at heating and separation of plates for separate strain-gauge converters. With the purpose of enhancement of fit products the glass layer is applied as a paste made of glass on the organic bonding material only in the field of connection and a metal wiring is formed after connection of plates.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA4365289A UA14398A1 (en) | 1988-01-14 | 1988-01-14 | Method for group manufacturing microminiaturized strain-gauge converters |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA4365289A UA14398A1 (en) | 1988-01-14 | 1988-01-14 | Method for group manufacturing microminiaturized strain-gauge converters |
Publications (1)
Publication Number | Publication Date |
---|---|
UA14398A1 true UA14398A1 (en) | 1997-04-25 |
Family
ID=74550365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UA4365289A UA14398A1 (en) | 1988-01-14 | 1988-01-14 | Method for group manufacturing microminiaturized strain-gauge converters |
Country Status (1)
Country | Link |
---|---|
UA (1) | UA14398A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2635822C1 (en) * | 2016-05-19 | 2017-11-16 | Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" (ПАО АНПП "ТЕМП-АВИА") | Method of connecting silicon plates |
RU2680263C1 (en) * | 2017-12-11 | 2019-02-19 | Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" | Method of connecting silicon plates |
-
1988
- 1988-01-14 UA UA4365289A patent/UA14398A1/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2635822C1 (en) * | 2016-05-19 | 2017-11-16 | Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" (ПАО АНПП "ТЕМП-АВИА") | Method of connecting silicon plates |
RU2680263C1 (en) * | 2017-12-11 | 2019-02-19 | Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" | Method of connecting silicon plates |
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