UA14398A1 - Method for group manufacturing microminiaturized strain-gauge converters - Google Patents

Method for group manufacturing microminiaturized strain-gauge converters

Info

Publication number
UA14398A1
UA14398A1 UA4365289A UA4365289A UA14398A1 UA 14398 A1 UA14398 A1 UA 14398A1 UA 4365289 A UA4365289 A UA 4365289A UA 4365289 A UA4365289 A UA 4365289A UA 14398 A1 UA14398 A1 UA 14398A1
Authority
UA
Ukraine
Prior art keywords
strain
microminiaturized
plates
connection
glass layer
Prior art date
Application number
UA4365289A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Ганна Павлівна Решетіло
Анна Павловна Решетников
Володимир Олександрович Сафонов
Владимир Александрович Сафонов
Галина Олександрівна Таран
Галина Александровна Таран
Original Assignee
Спеціальне Конструкторсько-Технологічне Бюро "Елемент"
Специальное конструкторско-технологическое бюро "Элемент"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Спеціальне Конструкторсько-Технологічне Бюро "Елемент", Специальное конструкторско-технологическое бюро "Элемент" filed Critical Спеціальне Конструкторсько-Технологічне Бюро "Елемент"
Priority to UA4365289A priority Critical patent/UA14398A1/en
Publication of UA14398A1 publication Critical patent/UA14398A1/en

Links

Abstract

The method for group manufacturing microminiaturized strain-gauge converters includes oxidation of two silicon wafers, etching the first plate to get membranes, forming diffusion strain gauges and metal wiring, application of alumina-borosilicate glass layer to the second plate, a connection of plates by a glass layer at heating and separation of plates for separate strain-gauge converters. With the purpose of enhancement of fit products the glass layer is applied as a paste made of glass on the organic bonding material only in the field of connection and a metal wiring is formed after connection of plates.
UA4365289A 1988-01-14 1988-01-14 Method for group manufacturing microminiaturized strain-gauge converters UA14398A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA4365289A UA14398A1 (en) 1988-01-14 1988-01-14 Method for group manufacturing microminiaturized strain-gauge converters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA4365289A UA14398A1 (en) 1988-01-14 1988-01-14 Method for group manufacturing microminiaturized strain-gauge converters

Publications (1)

Publication Number Publication Date
UA14398A1 true UA14398A1 (en) 1997-04-25

Family

ID=74550365

Family Applications (1)

Application Number Title Priority Date Filing Date
UA4365289A UA14398A1 (en) 1988-01-14 1988-01-14 Method for group manufacturing microminiaturized strain-gauge converters

Country Status (1)

Country Link
UA (1) UA14398A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2635822C1 (en) * 2016-05-19 2017-11-16 Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" (ПАО АНПП "ТЕМП-АВИА") Method of connecting silicon plates
RU2680263C1 (en) * 2017-12-11 2019-02-19 Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" Method of connecting silicon plates

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2635822C1 (en) * 2016-05-19 2017-11-16 Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" (ПАО АНПП "ТЕМП-АВИА") Method of connecting silicon plates
RU2680263C1 (en) * 2017-12-11 2019-02-19 Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" Method of connecting silicon plates

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