M258101 捌、新型說明： 【新型所屬之技術領域】 本創作是關於一種輸送物體之裝置，尤指一種運用建 續生產設備的自動化潛入式内部迴流裝置。 【先前技術】 由於自動化連續生產設備之生產效率高，因此普逼 運用於許多產業，以電子產業的真空濺鍍技術而言， 真 空鍍膜薄膜技術因為具有（1)製程精密、品質穩定， 鍍膜的密著性佳、附著力強、不易脫落，（3)鍍膜不產 生化學反應、無化學產物污染，符合環保法規製複， (4)可鑛多重薄膜，生產效率高，（5)成本低與重量輕 生產彈性高，符合當前消費者選購趨勢等優點，因此真 空鍍膜技術近年來已逐漸取代傳統喷導電漆或電解電辦 方式，可廣泛應用於半導體製程、光電和3C產業之R 電磁波干擾（Electro-Magnetic Interference，EMI )、塑 膠表面金屬鑛膜（Surface Decoration Coating,SDC)及 透明電極鍍膜（Indium-Tin Oxide，ITO)，成為重要的錢 膜生產技術。 因應真空鍍膜技術應用層面日廣，為增加相關鍍膜 產品的產業競爭力，必須降低真空鍍膜製程的成本，因 此目前使用之鍍膜設備多為連續式（In-Line )多腔體 (multi-chambers )作業流程，與傳統批次式（batch type )或晶圓式（wafer type )生產方式比較，可以減 少高達60%以上生產成本，並可大幅降低設備成本及廠 房空間，極具量產經濟價值及產業競爭性。 M258101 連續式真空鍍膜作業流程主要分為下列三個主要區 域··進料腔體區、鍍膜腔體區及出料腔體區，因應不同 基材（substrate )及鍵材（target )的作業製程、以及 鍍膜品質與腔體真空潔淨度需求，可適度地^曾Z低、中 、高真空腔體數目，以逐段漸進式地達到作業所要求的 真空度及潔淨度標準。 其作業時係將基材置於承載盤上’再使承載盤依序 進入各腔體區鍍膜，然而若要達到真正的自動化閉迴路 (closed loop )連續式作業需求，必須於出料腔體區與 進料腔體區之間額外增設—迴流裝置，來連結承載盤的 I:二Ϊ基於真空鍍膜技術特殊的真空、高潔淨度作 ? Γ :I : k其自動化迴流系統必須避免在傳輸過程中 機：界環境灰塵污染或被現場操作員手部碰觸 " 、/、沉積於承載盤表面污染物會間接污毕铲膜 腔體内部，進而、生：Μ 曰Η安5木锻腺 ，影響透光性面產生異常顆粒或異常透光 a牙透率寻鍍膜品質。 带置目：：2於連續式多腔體真空鍍膜設備之外部迴流 倉管物料外部：列兩種方式：如第四圖所示是運用-般 ,σ輪迗機構原理，於進料腔體區（6 1 )盥 出料腔體區r 興 d )之間連結一外部迴流梦罟f 7 (Ί、 ，該外部迴流带w 7 n1衣置（7 0 ) 路，於四周邊 Q)係由輸送滾筒排列呈矩形迴 缸（7 2、第：別設有第-氣壓缸（7 1 )、第二氣壓 當承載盤（67 3 )、第四氣壓缸（7 4 )， 面鑛膜後，移送至輸經過體處理，完成表 移承載盤（二：滚同，亚且依序藉由各氣壓缸推 D〇)，將已鍍膜完成的承載盤（6〇)内 6 M258101 的基材回傳至前端進料腔體區（6 1 )，前端操控人員 只需取出承載盤内附有成品的承載基架，不需取出承載 盤’而後再放置附有待鍍膜基材的承載基架於承載盤上 ’準備送入進料腔體區（6 1 )進行下一次鍍膜流程， 其中承載盤可供連續循環使用，此迴流系統只需一位操 作人員即可獨立完成整個鍍膜流程，但存在下列缺點： 1 ·需要較大的廠房空間：M258101 新型 Description of the new type: [Technical field to which the new type belongs] This creation is about a device for conveying objects, especially an automated submerged internal recirculation device using continuous production equipment. [Previous technology] Due to the high production efficiency of automated continuous production equipment, it is commonly used in many industries. For the vacuum sputtering technology of the electronics industry, the vacuum coating film technology has (1) precision process, stable quality, and Good adhesion, strong adhesion, not easy to fall off, (3) the coating film does not produce chemical reaction, no chemical product pollution, conforms to environmental protection regulations, (4) can be multi-layer thin film, high production efficiency, (5) low cost and Light weight, high production flexibility, in line with current consumer purchasing trends and other advantages, so vacuum coating technology has gradually replaced traditional spray paint or electrolytic electricity in recent years. It can be widely used in semiconductor process, optoelectronic and 3C industries. (Electro-Magnetic Interference, EMI), Surface Decoration Coating (SDC), and Indium-Tin Oxide (ITO) have become important money film production technologies. Due to the increasing application of vacuum coating technology, in order to increase the industrial competitiveness of related coating products, the cost of the vacuum coating process must be reduced. Therefore, the coating equipment currently used is mostly in-line multi-chambers Compared with the traditional batch (wafer type) or wafer type (wafer type) production methods, the operation process can reduce production costs by up to 60%, and can significantly reduce equipment costs and plant space. Industry competitiveness. M258101 continuous vacuum coating operation process is mainly divided into the following three main areas: · Feed cavity area, coating cavity area and discharge cavity area, according to different substrates (substrate) and key material (target) operation process As well as coating quality and vacuum requirements of the cavity, the number of low, medium, and high vacuum chambers can be moderately reached to gradually achieve the vacuum and cleanliness standards required by the operation. During the operation, the substrate is placed on the carrier plate, and then the carrier plate is sequentially entered into each cavity area for coating. However, in order to achieve the real continuous closed loop (closed loop) continuous operation requirements, the material must be discharged from the cavity. An additional reflow device is added between the area and the feed cavity area to connect the I: IIΪ vacuum coating technology based on the vacuum coating technology with a special vacuum and high cleanliness? Γ: I: kThe automatic reflow system must be avoided during transmission Machine in the process: environmental pollution by the environment or touching by the hands of field operators ", /, pollutants deposited on the surface of the carrier disk will indirectly contaminate the interior of the shovel membrane cavity, and then: Gland, which affects the light-transmitting surface to produce abnormal particles or abnormal light-transmitting tooth permeability to find the coating quality. With the item: 2 in the external reflow chamber tube of the continuous multi-cavity vacuum coating equipment. The material is externally arranged in two ways: as shown in the fourth figure, the principle of the sigma-wheel mechanism is applied to the feed cavity. Area (6 1) is connected with an external backflow nightmare f 7 (Ί, ，, the outer backflow belt w 7 n1 clothing (7 0) road, on the four surrounding Q) system. The conveying rollers are arranged in a rectangular return cylinder (2nd, 2nd: the first-pneumatic cylinder (7 1), the second air pressure when the bearing plate (67 3), the fourth air cylinder (7 4), the surface of the mineral film , Transfer to the transporter to complete the surface transfer carrier plate (two: rolling the same, and sequentially push D0 by each pneumatic cylinder), the substrate of 6 M258101 within the coated carrier plate (60) Back to the front feed cavity area (6 1), the front-end operator only needs to take out the carrier base frame with the finished product in the carrier disk, without removing the carrier disk ', and then place the carrier base frame with the substrate to be coated on The carrier plate is ready to be fed into the feeding cavity area (6 1) for the next coating process, wherein the carrier plate can be continuously recycled, and this reflow system Need an independent operating personnel to complete the coating process, but there are the following disadvantages: 1. requires a large floor space:
句>τ。丨义",L π、桃疋加設在運續式鍍腺股體外圍 以门型（门-type )方式配置，為使設備維修人員曰 有足夠的空間，可以維修位於連續式鍍膜設備週遭的 空幫浦、擴散幫浦及真空計等設備，必須預留更大的 房二間來配置外部迴流系統，估計約佔據整個生產 1 /2以上的空間，而且其延伸的長度至少為原連續式 膜設備兩倍以上，導致薇房利用率及產能大幅受限。 2 ·難以維持承載盤在外部傳輸過程中的潔淨户 因為真空錢膜技術極度要求基材表面及月空體内: 潔淨度與真空度，否則九 0, 古貝i 5禾物所產生的懸浮物，將Sentences > τ.丨 Yi ", L π and peach are installed on the periphery of the continuous plated gland stock and configured in a gate-type manner. In order to ensure that the equipment maintenance personnel have enough space, they can maintain the continuous coating equipment. The surrounding air pumps, diffusion pumps, and vacuum gauges and other equipment must reserve a larger room to configure the external return system. It is estimated that it will occupy about 1/2 of the entire production space, and its extended length is at least the original The continuous membrane equipment is more than twice, which leads to a substantial limitation in the utilization rate and production capacity of Weifang. 2 · It is difficult to maintain the cleanliness of the carrier during the external transmission process. The vacuum film technology is extremely demanding on the surface of the substrate and the moon space: cleanliness and vacuum. Otherwise, the suspension caused by Gu Bei i 5 Wo Wu Thing
鍍材成品表面具有異常透光或異質顆粒情況，影燮彦 良率’但其外部迴流系統以门型方式配置於原連^ 膜設備之外圍’導致承載盤自出料腔體區出來後、:： 露力在：般：作環境中’工作環境潛伏許多懸浮物及; 時間成正比，因此外部迴在外部壤境的距離' 愈會X到外部環境灰塵或況積在外部迴流 j底， 的灰塵所污染，附著在承載盤 ^動軸- 膜過程中，將污染源帶入 ^將在下—次哉 胰月工月旦内，進而間接影響袭 7 M258101 膜品質。 •耗費較高的設備成本： 為了架設外部迴流裝置 座、滾動軸及定位感測裝置 使承载盤能在门型迴流裝置 利轉換，必須在每一個轉彎 外部迴流裝置至少需要四組 額外的機構及設備將耗費較 4 ·處於噪音工作環境 鑒於傳統外部迴流裝置 (1 /2以上），基於節省設備 採用已廣泛應用於倉庫物料 輸送機構基本上是考慮大型 其滾動軸皆採大半徑的鋼製 空鍍膜設備大多針對小型輕 如此局強度的傳輪機構設計 料腔體區出料後，會因同樣 碰撞，而在外部迴流系統傳 致現％生產線處於噪音工作 5 ·影響設備整體外觀 基於外部迴流系統需要 須加設許多傳輸線、電源線 路來完成自動化輸送流程， 劃及隱藏相關線路，這些線 四周，導致整個生產設備外 無章。 ’必須額外架設傳輸機台底 等周邊設備，除此之外，為 於不同前進方向之間能夠順 處加設氣（油）壓缸，整組 以上的氣（油）壓缸，這些 高的設備成本。 所彳占的空間及長度比例甚高 開發及材料成本，目前大多 ^理輸送機構，然而，此類 且重負載的物料傳輸，因此 圓軸設計，但針對連續式真 1化基材，根本不需要採用 。除此之外，當承載盤自出 由鋼製承載盤與滾動軸之間 輪過程中產生許多噪音，導 環境内。 許多額外的設備空間，並必 、氣（油）壓管路及控制線 若沒有經過事前審慎空間規 路皆會暴露在外部迴流系統 觀看起來龐大、複雜及雜亂 M258101 基於上述第一種外部迴 空間的主要缺點，對於" "須佔據較大的廠房 需採另-種依賴台車推 廠房而…就必 路裝置，而是在連續六、★、工’、印未設有自動迴 分別派駐-位前端操;广之進料腔體區、出料腔體區 一位後端操作人員位於出料腔體區’以；=;以及 =完成鑛膜之承载基架，並且將空的心==盤 :豐的台車上，當台車滿載後， ；：：於可 車推至前端操作人員處，並彼此交換台車：人貝將台 端操作人員再將待鑛的承載 下來，前 ;:鑛膜流程’不過，目前這種依賴台：;：方Γ下 存在下列缺點·· 坪运方式，亦 1 ·生產線至少需要2位操作人員·· 外部迴流裝置僅需1前端操作人員 整個作業流程’此類依賴台車的傳送方式 至少需要2位操作人員，故需要較多的人 制’即需要多三個人力。 即 員 可獨立完成 一條生產線 ’倘若三班 雞以維持承載盤在台車傳送The surface of the plated product has abnormal light transmission or heterogeneous particles. The shadow yield rate is 'but its external reflow system is configured in a gate-type manner on the periphery of the original connection ^ film equipment'. After the carrier tray comes out of the discharge cavity area, :: Luli in: General: In the working environment, 'the working environment lurks many suspended solids and; time is directly proportional, so the distance of the external return to the external soil boundary' will be more X to the external environmental dust or accumulated in the external backflow, Contaminated by dust, attached to the carrier plate ^ moving shaft-membrane process, the source of pollution will be brought into the next-next pancreas month, and then indirectly affect the quality of the 7 M258101 membrane. • High equipment cost: In order to set up the external reflow device holder, rolling shaft and positioning sensing device to enable the carrier plate to be converted in the gate type reflow device, the external reflow device must have at least four additional mechanisms and The equipment will cost more than 4. In a noisy working environment. In view of the traditional external recirculation device (above 1/2), based on saving equipment, it has been widely used in warehouse material conveying mechanisms. It is basically considered that large-scale steel shafts are used for rolling shafts. Most of the coating equipment is designed for the small and light-weighted wheel transfer mechanism. After the material cavity area is discharged, it will cause the same collision, and the external reflow system will cause the current production line to be noisy. 5 · The overall appearance of the equipment is affected by the external reflow system. Many transmission lines and power lines need to be added to complete the automatic transmission process, and related lines are planned and hidden. The surrounding of these lines causes the entire production equipment to become out of order. 'External equipment such as the bottom of the conveyor must be erected. In addition, in order to be able to install gas (oil) cylinders between different forward directions, the entire group of gas (oil) cylinders, these high Equipment costs. The proportion of space and length occupied is very high. Development and material costs currently mostly deal with conveying mechanisms. However, this type of heavy-duty material transmission, therefore, has a round shaft design, but for continuous true substrates, it is not at all Need to adopt. In addition, when the bearing plate comes out of the wheel between the steel bearing plate and the rolling shaft, a lot of noise is generated in the environment and conducted. A lot of extra equipment space, and gas (oil) pressure pipelines and control lines will be exposed to the external return flow system if they have not been carefully spaced beforehand. The system looks huge, complicated and messy. M258101 Based on the first external return space mentioned above. The main disadvantage is that for "quote", which must occupy a larger plant, another type of plant relies on trolleys to push the plant ... it must be a road device, but it will be automatically dispatched in six consecutive days, ★, work, and India. -A front-end operation; Guangzhi's feeding cavity area, discharging cavity area, a back-end operator is located in the discharging cavity area; with; =; and = complete the bearing base frame of the ore membrane, and the empty heart == 盘: Feng's trolley, when the trolley is fully loaded, :: You can push the trolley to the front-end operator, and exchange the trolleys with each other: Renbei will carry the operator at the end of the bench to carry the mine to the front; Membrane flow 'However, at present this kind of reliance station:;: The following disadvantages exist under the square Γ · · Flat transportation method, also 1 · The production line requires at least 2 operators · · The external reflow device requires only 1 front-end operator for the entire operation flow' Such dependencies Car transmission system requires at least two operators, who therefore require more system 'the need three more human. That is, members can complete a production line independently ’If there are three shifts of chicken
針對承載般在A束值$ W你序肩 m 戰现在口車傳达過程中’因必須經由前 ::ί員自！車取上、取下至少兩次的碰觸動作 夢s ° *作人貝手部污染承載盤表面的機會，加 立於台車置放期間，亦處於一般工作環境内，7 灰塵及懸浮物會慢慢沉積在台車及承載盤表面故房f =皿表面的灰塵’將伴隨下次鍍膜過 ，二影響锻膜品質，此污染的程度可由現場二 y、母天更換工作手套可以看出，針對這項缺失， 9 M258101 操作人員有時必須利用吸塵 灰塵。 為清除附著在 承載盤表面的 ^ ·後立而操作人貝工作效率不高· 依據不同鍍膜品質、表面清潔處理* 作業需求，連續式真空鍍膜〜借 ”工溧淨度的 〆、工煨膜δ又備通常需 腔體來完成整個製程，目此承載 -们以上獨立 腔體區完錢料度並不會太快體區至出料Aiming at the load-bearing value of A in the bundle, $ W, your order of shoulders and m is now in the process of communicating in the mouthcar. Take the car up and down at least twice to touch the action dream s ° * The opportunity for the hand of the human shell to contaminate the surface of the loading tray. It is also added to the normal working environment during the placement of the trolley. 7 Dust and suspended matter will The dust that slowly deposits on the surface of the trolley and the carrier plate, so f = the surface of the dish, will accompany the next coating, which will affect the quality of the forged film. The degree of this pollution can be seen from the second and the second day, when the working gloves are changed. This lack, 9 M258101 Operators sometimes have to use vacuum dust. In order to remove the ^ attached to the surface of the carrier plate, the operator's work efficiency is not high. According to different coating quality, surface cleaning treatment * Continuous vacuum coating ~ borrow "cleanliness", industrial film δ also requires a cavity to complete the entire process. For this purpose, the above-mentioned independent cavity area is not too fast to finish the material.
120秒/盤’造成後端操作人員大部分時門〇私/盤至 載盤自出料腔體區出料的狀態， ：：於專待承 操作人員處於閒置等待比例較高。乍政率而言’後端 基於上述兩種習知連續式真空鑛膜設備的迴流裝置及 傳送方式’除了皆具有承載盤在傳送過程易被外界環境污 染，進而影響鍍膜品質及增加腔體定期維修清潔次數外， 尚有佔據大的廠房空間或現場人力成本高的缺點，故 以改良的必要。 【新型内容】 為了改善上述缺失，本創作的主要目的在於提供一種 利用原有的連續式生產線空間，不需佔據額外的廠房空間 或人員，就可以達成閉迴路傳輸作業，以提高廠房空間利 用率之連續式真空鍍膜潛入式内部迴流裝置。 基於上述目的，本創作之主要技術手段是設有二個 分別位於連續式生產設備的產品輸入端、輸出端的前升 降裝置、後升降裝置，前、後升降裝置的頂部一側設有 一雙向運轉動力源，頂部並且設有數只被雙向運轉動力 源驅動呈同向轉動的滾輪，滾輪的軸心是與生產設備的 10 M258101 輸送方向垂直並且沿著輸送方向排列設置，另於前、後 升降裝置上設有分別偵測其升降時高、低點位置的上感 測開關、下感測開關，而升降裝置鄰近連續生產設備該 端設有一感測開關，遠離生產設備該端則設有一定位感 測開關，至少一回傳機構模組，是位於連續式生產設備 下方並且延伸於前、後升降裝置之間，其具有一單向運 轉動力源，以及與前、後升降裝置的滾輪平行並且被單 向運轉動力源驅動呈同向轉動的數只滾輪。 實施上述技術以後，本創作可以改進現有作業缺失， 而達到有效空間利用、僅一人操作即可、工作效率高等優 點。 減少污染，本創作進 一防塵蓋罩覆，僅保 此外，為了使物件在傳輸過程中 一步於回傳機構模組的頂部及側邊以 留供物件通過的空間。 【貫施方式】 視及俯視圖所示，本創作 產裝置，而形成一潛入式 真空錢膜所需的進料腔體 )、出料腔體區（12， 5又備（1 3 )，以分別驅 而各腔體區是分別承置於 (1 6、一出料基台（工 7之排列方向設有一位於 (1 8、一位於出料基台 又於三基台Γ 1 請參閱第一、二圖本創作前 是利用原有之連續式真空鍍膜生 内部迴流裝置，其依序設有連續 區（10)、鍍膜腔體區（11 各腔體區内分別設有一動力輸出 動一組輸送滾輪（1 4)轉動， 一進料基台（15、一鍍膜基台 7上，沿著各基台（1 5〜（1 進料基台（1 5 —側之前置基台 (1 7 一側之後置基台（1 9， 〇)，請同時參閱第三圖 7之間設有一回傳機構模組（4 M258101 所示，該回傳機構模組（ 輪（4 1 )，n以 ）3又有數個壬水平併列之滾 各滾輪（41;= 輸送滚輪相同， 傳機構二：:：所帶動呈同向旋轉，又於回 覆，該防塵蓋"5 邊以一防塵蓋（“罩 載盤（5 〇 )通過。” 4 1 )之間的距離需可供承 另於前置基台（18及後置美么〇向\ 裝置、後升《置，於本較佳實心9 = f升： 是壓㈣往上延伸之前、後升降壓夂 軸頂端i別:有前::::=!°)、(3。)的壓缸 ,(Λ ^ 十°又置之平台，平台鄰近回傳機椹Μ 、，且（4 0 )該側設有感測開關（2 4 ) 、（ 3 4 田、 :回傳機構模組（4 〇 )該端則設有定位感測開關（= 3 5 ’於平台上頂面設有數個平行併列之滾輪（2 二於::r側設有一雙向運轉動^ π . I d丄），该雙向運動動力源（2 1 ) 、 Γ ? 之輸出軸設有鏈輪，以透過傳動元件（2 3 ) 動滾輪（22)、…）旋轉 网 ） （32)是與腔體區的輸送滾輪 μ及回傳機構模組（4 〇 )的滾輪（4 土）平行，、， 且’當升降壓缸（22) 、丄/ 亚 者縮入時，…” 32)的堡缸軸往上頂出或 滾輪、（32)是與各腔體區的輪送 _ 4 )、回傳機構模組（4 0 )的滾輪（4丄） :有另於前、後升降壓缸（2〇)、（3〇)的缸體—側 °有偵測缸體内部之活塞上俨_ 一 ^ M258101 關（2 Ο 1 )、（ 3 Q工）以及下感測開關（2 Ο 2 ) ( 3 0 2 )。 上述為本創作之構件配置，其實施方式述及如后·· 請復參閱第一圖所示，並且參考圖式中的箭頭方向·· 1 ·當完成鍍膜後，承 放的鍍膜成品（5 2 )及承 區（12)輸出，承載盤（ 關（3 4 )感測到； 2 .感測開關（3 4 ) 1 9内的雙向轉轉動力源（ (3 3)帶動各滾輪（3 2 能繼續前進至定位感測開關 3 ·定位感測開關（3 動力源（3 1 )停止運轉， ◦)向下降，直到觸動下感 時，位於壓缸軸頂部之滾輪 4 0 )之滾輪（4 1 )恰為 4 ·當下定位感測開關 點位置時，即驅動雙向轉動 以及回傳機構模組（4 〇 ) 同向轉動，以便將承載盤（ 機構模組（4 〇 )上，直到 位於回傳機構模組（4 〇 ) 感測開關（4 6為止； 5 ·感測關關（4 6的 基台（1 9内的後升降壓缸 載盤（5 0 )伴隨盤上所置 載基架（5 1)自出料腔體 50)的前端會先被感測開 感測訊號將驅動後置基台（ 3 1 )正轉’措由傳動元件魯 )旋轉，使承載盤（5 〇 ) (3 5為止； 5的感測訊號先使雙向轉動 並同時驅動後升降壓缸（3 測開關（3 0 2 )為止，此 (3 2 )與回傳機構模組（ 等高； (3 5感測到升降壓缸之低 動力源（3 1 )反向驅動， 的單向運轉動力源（4 2 ) 5 0 )依反方向傳送至回傳 承載盤（5 〇 )前端碰觸到 鄰近前置基台（18該端的 感測訊號將驅動前述之後置 (3 0 )向上升，直到上感 13 M258101 測開關（3 Ο 1 )感測到其上升位置，即回歸待命位置 (stand-by position )，以等待下一個承載盤（$ 〇 )自 出料腔體區（12)出來； ，一位於回傳機構 端之感測開關（4 (4 2 )與雙向運 盤（5 0 )在回傳 須先做下列兩項確 免位於前端之前升 上頂點），先由下 知1 (20)是否正 5 0)在前升降壓 故先由於平台兩側 (2 5 )確認滾輪 0 )時，再啟動單 運轉動力源（2 1 元件（4 3 )、（ 2 ，可將承載盤（5 送至前升降壓缸（ 端碰觸到定位感測 6 ·在此同時 前置基台（1 8該 使單向運轉動力源 停止運轉，使承載 前端靜候等待，必 前進：首先，為避 於錯誤位置（譬如 )確認該前升降壓 ’為避免承載盤（ 撞盤或堆疊情況， )、定位感測開關 有任何承載盤（5 2 )運轉以及雙向 或皮帶構成之傳動 1 )、（ 2 2 )轉動 級（4 〇 )繼續傳 承载盤（5 0 )前 模組（4 〇 )鄰近 6的感測訊號將先 轉動力源（3工） 機構模組（4 〇 ) 涊動作，方可繼續 降壓叙（2 〇 )位 感測開關（2 〇 2 位於下底點；其次 缸（2 〇 )處發生 之感測開關（2 4 (2 2 )上是否沒 向運轉動力源（4 )反轉，藉由鏈條 3 )帶動滾輪（4 〇 )自回傳機構模 2 0 )頂部，直到 開關（2 5 )為止 源 使 感 7 ·定位感測開關（2 5 )訊號先使雙向運轉動力 2 2 1 )以及單向運轉動力源（4 2 )停止運^，並 前升降壓缸（2 〇)之壓缸軸往上升，直、/ 、、目丨丨日日0日/。且巧石亚觸到上 ^、開關（2 0 1 )為止（升降壓缸上頂點）； 8 ·上感測開關f 9 η 1 、# &必+ 14 M258101 (20)停滞在上頂點，靜候 50)取出已鍍膜+ 、乍人貝自承载盤（ 1)，並再放入另 （$承載基架5 在此過程令，前# p 載基杀5 1 )， 女八 而知作人貝並不需取出承《般Γ ς η、 ，亦不會碰觸到承載盤（5 0 載-(5 〇) 5 〇 )與外界環境接觸的機會； 相離承載盤（ 9田位於前端之操作人員按載入鍅r , ，雙向運轉動力调f 9 ，建（reioad )後 5 0 )重新： 1 )開始正轉，以便將承载盤（ 5 〇 )重新載入進料腔體區（ 戰-( 循環流程； 進仃下一次鍍膜 ·當承載盤（5〇) &八4 〇 )，璣測pi的,〇 70王進入進料腔體區（1 饮叫開關（2 4 )感測不到承载般 在後，將驅動前升降壓q2Q)^；： (5Q)的存 下感測開關（2 D 9 W < 牛，直到石亚觸到 置（Standb ·)(升降壓缸下底點），回歸待命位 直、stand-by poslti ) # 4 〇 )偉屮& 7 4 )寻待下一個自回傳機構模組（ 4 U J得出的承載盤（5 〇 ); 11 ·如此循環動作，週而復始，本創作观入^ & 部迴流裝置便穿赤一 * & 則作/曰入式内 且現η卜 動化閉迴路連續式作業流程，而 且現％僅需—位操作人員即可獨立完成。 t上：本創作之動作流程’本創作具有數項特點： 僅需要一位操作人員即可獨立完成作業。 除塵U覆於回傳機構模組上的透明防塵蓋除了具有 λ、此，更可透視内部回傳機構模組運作狀能_ 加故障檢修及障礙排除的簡易性。 狀心θ ^ ·#者’為避免承載盤在回傳機構模組上，因為 Ή /袞輪之間麾棒六又 手掠力不足，而產生滑動及傳動不確實，本 15 M258101 創作可在滾動軸外側包覆具有吸震及減噪功能材質 此不僅可以增加承載盤與回傳機構模滾輪之間的摩 ，提升傳動的確實性，同時大幅降低回傳過程中的 上述簡單實施例是以三個獨立腔體作業流程做 二不過獨立腔體的數目可依鍍膜品質要求、種類及 潔淨度要求不同而做適度的擴充，例如增加低、中 : 脸紅區最尚可增加至十個以上的獨立腔體連 :備T此擴充狀況’只要增加回傳機構模組的組 可疋為了避免發生承載盤在回傳過程中在某一 :機構模組區域發生撞盤或堆疊情況，控制程序中 2下一個回傳機構模組是處於無承載盤之等待 個回傳機構模組方可使承載盤繼續向前傳送 又上述本創作是實施於連續式真空鍍膜的設備 八亦可以實施於其他連續生產設備。 【圖式簡單說明】 (一）圖式部分 $ 一圖係本創作的前視示意圖。 $二圖係本創作的俯視示意圖。 j二圖係本創作的局部立體外觀示意圖。 =四圖係現有利於連續錢膜的外部迴流裝置配置 第五圖係現有以操作人員配合台 、二）元件代表符號 (1 〇)進料腔體 （1 (1 2 )出料腔體區 車的示意圖。 1 )鍍膜腔體區 3 )動力輸出設備 ，如 擦力 噪音 說明 真空 、高 續式 數即 個回 必需 狀態 〇 上， 不意 M258101 (1 4 )輸送滾輪 （1 (16)鍍膜基台 （1 (1 8 )前置基台 （1 (20) 前升降壓缸 （2 (2 0 2 )下感測開關 (21) 雙向運動動力源 （2 (2 3 )傳動元件 （2 (2 5 )定位感測開關 （3 (3 0 1 )感測開關 （3 (31)雙向運動動力源 （3 (3 3 )滾輪 （3 (3 5 )定位感測開關 (4 0 )回傳機構模組 （4 (42)單向運轉動力源 （4 (4 5 )防塵蓋 （4 (50)承載盤 （5 (5 2 )鍍膜成品 （6 (6 1 )進料腔體區 （6 (7 0 )外部迴流裝置 （7 (7 2 )第二氣壓缸 （7 (74)第四氣壓缸 )進料基台 )出料基台 )後置基台 1 )上感測開關 )滚輪 )感測開關 )後升降壓缸 2 )下感測開關 _ )滚輪 )感測開關 )滾輪 )傳動元件 )感測開關 )承載基架 )承載盤 · )出料腔體區 )第一氣壓缸 )第三氣壓缸 17120 seconds / disc ’causes most of the back-end operators to go from private / disc to loading the disc from the discharge cavity area. The ratio of waiting for operators is idle. At first glance, 'the back end is based on the above two conventional continuous vacuum ore film equipment's reflow device and conveying method', in addition to having a carrier tray during the conveying process, it is easy to be polluted by the external environment, which will affect the coating quality and increase the regularity of the cavity. In addition to the frequency of maintenance and cleaning, there are still disadvantages of occupying large plant space or high labor costs on site, so it is necessary to improve. [New content] In order to improve the above-mentioned shortcomings, the main purpose of this creation is to provide a closed-loop transmission operation that utilizes the original continuous production line space without occupying additional plant space or personnel, so as to improve plant space utilization. Continuous vacuum coating submerged internal reflow device. Based on the above purpose, the main technical means of this creation is to provide two front lifting devices and rear lifting devices respectively located at the input end and the output end of the continuous production equipment. The top side of the front and rear lifting devices is provided with a two-way running power. The top of the source is equipped with several rollers that rotate in the same direction driven by a bi-directional power source. The axis of the rollers is perpendicular to the 10 M258101 conveying direction of the production equipment and is arranged along the conveying direction. It is also installed on the front and rear lifting devices. There are upper and lower sensing switches that detect the high and low positions of the lifting device, respectively. The lifting device is provided with a sensor switch at the end adjacent to the continuous production equipment, and a positioning sensor is provided at the end away from the production equipment. The switch, at least one return mechanism module, is located below the continuous production equipment and extends between the front and rear lifting devices. It has a unidirectional running power source and is parallel to the rollers of the front and rear lifting devices and is unidirectional. The running power source drives several wheels rotating in the same direction. After the implementation of the above technology, this creation can improve the lack of existing jobs, and achieve the advantages of effective space utilization, only one person to operate, and high work efficiency. In order to reduce pollution, a dust-proof cover is included in this work, only to ensure that, in order to keep the objects in the transmission process, they are placed on the top and sides of the return mechanism module to leave space for the objects to pass through. [Implementation method] As shown in the plan view, the production device is created to form a submerged vacuum money film (feeding cavity required), and a discharging cavity area (12, 5 and (1 3)). Each cavity area is respectively housed in (16, a discharge abutment (the arrangement direction of Worker 7 is located at (18, one is located at the discharge abutment and three abutment Γ 1) Figures 1 and 2 Prior to the creation of this book, the original continuous vacuum coating internal reflow device was used. It has a continuous area (10), a coating cavity area (11 each of the cavity areas. The group of conveying rollers (1 4) rotates, a feeding base (15, a coating base 7), along each base (1 5 ~ (1 1 7 Abutment (19, 0) is placed on one side, please refer to the third figure. There is a return mechanism module (shown in 4 M258101, the return mechanism module (wheel (4 1), n to) 3 There are several horizontally parallel rollers (41; = the same as the conveying roller, transmission mechanism 2: :: driven by the same rotation, and in response, the dust cover & quo t; 5 The distance between the sides is covered by a dust cover ("Cover the tray (50)." 4 1) The distance between the front abutment (18 and the rear Meimei 0 direction \ device, rear Liters "set, in the best solid 9 = f liters: it is the pressure cylinder before and after the pressure is extended upward and downward to press the top of the shaft i do not have: the front :: ::: =! °), (3.) of the pressure cylinder, (Λ ^ 10 ° and another platform, the platform is adjacent to the returning machine 椹 Μ, and (40) the side is provided with a sensing switch (2 4), (34),: the returning mechanism module (4 〇 ) The end is provided with a position sensing switch (= 3 5 'on the top surface of the platform is provided with a number of parallel side-by-side rollers (2 2: :: r side is provided with a two-way movement ^ π. I d 丄), the two-way Sprockets are provided on the output shaft of the motion power source (2 1) and Γ? To rotate the roller (22) through the transmission element (2 3). (32) is the conveying roller μ and the cavity area. The rollers (4 soil) of the return mechanism module (40) are parallel, and, 'When the lifting cylinder (22), 丄 / 丄 are retracted, ...' 32) the cylinder shaft of the fortress is ejected upward or Roller, (32) is the carousel with each cavity area _ 4), return mechanism Roller (4 丄) of group (40): there are cylinders at the front and rear lifting and lowering cylinders (20), (30)-side ° there is a piston on the inside of the detection cylinder 一 _ ^ M258101 Off (2 Ο 1), (3 Q workers) and the lower sensing switch (2 Ο 2) (3 0 2). The above is the component configuration of the creation, and its implementation is described later. Please refer to the first As shown in the figure, and with reference to the direction of the arrow in the diagram ... 1 · After the coating is completed, the finished coated product (5 2) and the receiving area (12) are output, and the bearing plate (off (3 4)) is sensed; 2. The bidirectional rotation of the power source (3 3) in the sense switch (3 3) drives the wheels (3 2 can continue to the position sensing switch 3 · the position sensing switch (3 power source (3 1 ) Stop running, ◦) Descend until the bottom of the cylinder is touched, the roller (4 1) on the top of the cylinder shaft 4) is exactly 4 · When the position of the sensor switch is positioned, it will drive the two-way rotation and return The transmission mechanism module (40) is rotated in the same direction so as to place the carrier plate (the mechanism module (40)) until it is located on the return mechanism module (4.0) and the sensor switch (46). 5 · The front end of the sensing base (4 6 of the abutment (the rear lifting and lowering cylinder carrier plate (50) in 19 is accompanied by the carrier base (5 1) from the discharge cavity 50) placed on the plate. The sensed open sensing signal will drive the rear abutment (31) to rotate forward, and the measure is rotated by the transmission element Lu), so that the bearing plate (50) (up to 35); the sensing signal of 5 first makes two-way rotation and At the same time, the rear lifting cylinder (3 measuring switch (3 0 2)) is driven at the same time. This (3 2) is the same as the return mechanism module (3 5). The low power source (3 1) of the lifting cylinder is detected. The one-way running power source (4 2) 50 0) is transmitted to the return carrier disk (50) in the opposite direction and the front end touches the adjacent front abutment (18. The sensing signal at the end will drive the aforementioned (3 0) ascend until the upper sense 13 M258101 detection switch (3 〇 1) senses its rising position, that is, returns to the standby position (stand-by position), waiting for the next load plate ($ 〇) to self-discharge The cavity area (12) comes out; a sensor switch (4 (4 2)) and a two-way disk (50) at the end of the return mechanism must do the following two to ensure that it is not in front of the front end (Top vertex), first know whether 1 (20) is positive 5 0) before lifting up and down, so first confirm the roller 0 due to the two sides of the platform (2 5), then start the single-run power source (2 1 element (4 3 ), (2, can send the bearing plate (5 to the front lifting cylinder (end touches the positioning sensor 6) At the same time, the front abutment (18 should stop the one-way power source to stop, and make the front end of the bearing Waiting, you must move forward: first, to avoid the wrong position (for example) to confirm that the front lifting and lowering 'to avoid the carrier disc (collision or stacking situation), any positioning disc (5 2) operation of the positioning sensor switch, and Two-way or belt-driven transmission 1), (2 2) rotating stage (4 0) continue to transmit the sensing signal of the front module (4 0) of the front plate (4 0) near 6 will rotate the force source (3 workers) mechanism The module (4 〇) can only be operated in order to continue the step-down (2 〇) position sensing switch (2 〇2 is located at the bottom point; secondly, the sensing switch occurring at the cylinder (2 〇) (2 4 (2 2 ) Is not reversed to the running power source (4), and the chain (3) is used to drive the roller (4) to the self-return mechanism 2) Until the switch (2 5), the source sensor 7 • The positioning sensor switch (2 5) first stops the two-way running power 2 2 1) and the one-way running power source (4 2), and then raises and lowers the pressure cylinder ( 2 〇) the cylinder axis rises upwards, straight, / ,, head 丨 丨 day 0 day /. And Qiao Shiya touches the upper ^, the switch (2 0 1) (the upper vertex of the booster cylinder); 8 · the upper sensing switch f 9 η 1, # & will + 14 M258101 (20) stagnates at the upper vertex, Wait 50) Take out the coated +, Zareto self-supporting tray (1), and then put it in another ($ Loading base frame 5 In this process order, the former # p 载 基 杀 5 1), the female is known as Ren Bei does not need to take out the bearing "General Γ ι η ， ， and it will not touch the bearing plate (50 years-(50) 5)) and the opportunity of contact with the external environment; away from the bearing plate (9 田 at the front end The operator presses the load, r, and the bidirectional running power is adjusted to f9. After the reioad is built, 50) is re-started: 1) The forward rotation is started in order to reload the loading tray (50) into the feeding cavity area ( Battle- (cyclic flow; enter the next coating · when the carrier plate (50) & 8 4 〇), guess pi, 〇70 king enters the feed cavity area (1 drink call switch (2 4)) After the load is not detected, the drive will be driven up and down q2Q) ^ ;: (5Q) store the sensor switch (2 D 9 W < cattle until Shiya touches the home (Standb ·) (boost pressure cylinder Bottom point), return to standby position straight, stand-by poslti) # 4 〇) Wei 屮 & 7 4) Looking for the next auto-return mechanism module (4 UJ bearing tray (50 〇); 11 · This cycle of action, cycle by cycle, this creative concept Into the ^ & backflow device will wear a red one * & is made in the / in the type, and now the closed closed-loop continuous operation process, and now only requires an operator to complete independently. T 上: The action flow of this creation 'This creation has several features: Only one operator is required to complete the work independently. The dust-repellent U transparent dust cover on the return mechanism module has λ, which can also see the interior. The performance status of the return mechanism module _ plus the easiness of troubleshooting and obstacle elimination. The center of gravity θ ^ · # 者 'is to avoid the load plate on the return mechanism module, because the Ή / 衮 wheels are not connected. Insufficient hand-grabbing force, resulting in inaccurate sliding and transmission, this 15 M258101 creation can be covered with a material with shock absorption and noise reduction on the outside of the rolling shaft. This can not only increase the friction between the carrier disk and the die roller of the return mechanism, and improve the transmission. Reliability while significantly reducing postbacks The above simple embodiment of the process is based on the operation process of three independent cavities. However, the number of independent cavities can be appropriately expanded according to different coating quality requirements, types and cleanliness requirements, such as adding low and medium: blush The area can still be increased to more than ten independent chambers: prepared for this expansion status' As long as the group of return mechanism modules is added, in order to avoid the occurrence of the carrier disk in the return process in a certain: mechanism module area In the event of a collision or stacking, the next return mechanism module in the control program is waiting for a return mechanism module without a load plate to allow the load plate to continue to move forward. The above creation is implemented in a continuous vacuum. The coating equipment eight can also be implemented in other continuous production equipment. [Schematic description] (1) Schematic section $ A diagram is a front view of this creation. $ 二 图 is a schematic plan view of this creation. The second figure is a partial three-dimensional appearance diagram of this creation. = The fourth picture is the existing external reflow device configuration that is conducive to continuous money film. The fifth picture is the existing operator's cooperation table, and two) the component representative symbol (1 0) the feeding cavity (1 (1 2) the discharging cavity area Schematic diagram of a car. 1) Coating cavity area 3) Power output equipment, such as friction noise, vacuum, high-continuous number is a necessary state. On the M258101 (1 4) conveyor roller (1 (16) coating base Table (1 (1 8)) Front abutment (1 (20) Front lift cylinder (2 (2 0 2)) Lower sensing switch (21) Bi-directional motion power source (2 (2 3)) Transmission element (2 (2 5) Positioning sensing switch (3 (3 0 1)) sensing switch (3 (31) bidirectional motion power source (3 (3 3)) roller (3 (3 5) positioning sensing switch (4 0)) Group (4 (42) one-way running power source (4 (4 5)) dust cover (4 (50) carrier plate (5 (5 2)) coated finished product (6 (6 1)) feed cavity area (6 (7 0 ) External recirculation device (7 (7 2) 2nd pneumatic cylinder (7 (74) 4th pneumatic cylinder) Feed abutment) Discharge abutment) Rear abutment 1) Upper sensing switch) Roller) Sensing switch ) Rear lift cylinder 2) Down sensing switch _) Wheel) Sensor switch) Wheel) Transmission element) Sensor switch) Load base frame) Load plate ·) Outlet cavity area) First pneumatic cylinder) Third pneumatic cylinder 17