CN2714582Y - Automation embedded type internal reflux apparatus - Google Patents

Abstract

The utility model relates to an automatic embedded internal reflux apparatus which is provided with a front lifting apparatus and a back lifting apparatus which are positioned on the front end and the back end of a continuous producing apparatus, and at least one feedback mechanism module which extends between the front lifting apparatus and the back lifting apparatus and is positioned below the continuous producing apparatus, wherein two-way operating power sources and a plurality of rollers driven to rotate are arranged on the front lifting apparatus and the back lifting apparatus, and the feedback mechanism module is provided with a one-way operating power source and a plurality of driven rollers. Articles to be operated are placed at the top of the front lifting apparatus, are conveyed to the producing apparatus to be operated and then are conveyed to the back lifting apparatus dropping down to the height of the feedback mechanism module, the articles are conveyed to the front lifting apparatus by the feedback mechanism module to be taken out, and then the articles to be produced are inserted.

Description

Automatization submerged type internal reflux device

Technical field

The utility model relates to a kind of device about conveying object, refers to a kind of automatization submerged type internal reflux device that uses continuous production equipment especially.

Background technology

Because automatic continuous production efficiency of equipment height, therefore widespread is in many industries, vacuum splashing and plating technology with electronic industry, the vacuum plating thin film technique is because have (1) processing procedure precision, stay in grade, (2) adherence of plated film is good, strong adhesion, difficult drop-off, (3) plated film does not produce chemical reaction, no chemical product pollutes, meet environmental regulation, (4) can plate multiple film, the production efficiency height, (5) cost is low and in light weight, production elasticity height, meet current human consumer and choose advantages such as trend, so vacuum coating technology replaces tradition spray electric conduction paint or metallide mode in recent years gradually, can be widely used in manufacture of semiconductor, the anti electromagnetic wave of photoelectricity and 3C industry disturbs (Electro-Magnetic Interference, EMI), plastic cement metal-coated surface (SurfaceDecoration Coating, SDC) and the transparency electrode plated film (Indium-Tin Oxide ITO), becomes important plated film production technology.

Because vacuum coating technology application day is wide, for increasing the industrial competitiveness of relevant plated film product, must reduce the cost of vacuum plating processing procedure, therefore the filming equipment that uses at present mostly is continous way (In-Line) multi-cavity body (multi-chambers) work flow, compare with the conventional batch type (batch type) or wafer formula (wafer type) mode of production, can reduce up to 60% above production cost, and can significantly reduce equipment cost and factory building space, have volume production economic worth and inter-industry competition.

The continuous vacuum coating work flow mainly is divided into following three main region: feed cavity tagma, plated film cavity district and discharging cavity district, operation processing procedure and plated film quality and chamber vacuum cleanliness factor demand in response to different substrate materials (substrate) and plating material (target), can moderately increase basic, normal, high vacuum cavity number, to reach desired vacuum tightness of operation and cleanliness factor standard piecemeal gradually.

Be that base material is placed on the carrier during its operation; make carrier enter each cavity district plated film in regular turn again; yet if will reach real automatization loop circuit (closed loop) continous way job requirements; must between discharging cavity district and feed cavity tagma, additionally set up a reflux; link the transmission of carrier; but based on the special vacuum of vacuum coating technology; high-cleanness, high operating environment demand; its automatization return-flow system must be avoided in transmission course; carrier suffers the external environment contamination by dust or is touched chance by site operation people's hand; otherwise it is deposited on carrier surface contaminant meeting indirect pollution plated film inside cavity; and then cause coated surface to produce abnormal grain or unusual printing opacity, influence plated film qualities such as light transmission or penetration coefficient.

Be applied to the external reflux device of continous way multi-cavity body vacuum coating film equipment at present, mainly contain following dual mode: be the outside transfer mechanism principle of the general storekeeper material of utilization as shown in Figure 4, between feed cavity tagma 61 and discharging cavity district 63, link an external reflux device 70, this external reflux device 70 is to arrange rectangular loop by conveying cylinder, be respectively equipped with first pneumatic cylinder 71 in the surrounding, second pneumatic cylinder 72, the 3rd pneumatic cylinder 73, the 4th pneumatic cylinder 74, the substrate passed cavity piecemeal on carrier 60 is handled, after finishing surface coating, be transferred to conveying cylinder, and pass carrier 60 by each pneumatic cylinder in regular turn, base materials in the carrier 60 that plated film is finished are back to front end feed cavity tagma 61, front end is controlled personnel only need take out the carrier bed frame of having finished product in the carrier, need not take out carrier, then placement has the carrier bed frame of base material to be coated on carrier again, preparation is sent into feed cavity tagma 61 and is carried out plated film flow process next time, wherein carrier can be for recycling continuously, this return-flow system only needs bit manipulation personnel can independently finish whole plated film flow process, but has following shortcoming:

(1) need bigger factory building space:

Because the external reflux system adds to be located at continous way plated film cavity periphery, (ㄇ-type) mode disposes with the ㄇ type, for make the maintenance of equipment personnel that enough spaces be arranged in the future, can keep in repair the equipment such as vacuum pumps, diffusion group Pu and vacuumometer that are positioned at arround the continuous coating equipment, must reserve bigger factory building space and come the configuring external return-flow system, estimate to occupy approximately the space of whole production line more than 1/2, and the length of its extension is at least more than the former continuous coating equipment twice, causes factory building utilization ratio and production capacity significantly limited.

(2) be difficult to keep the externally cleanliness factor in the transmission course of carrier:

Because vacuum coating technology extremely requires the cleanliness factor and the vacuum tightness of substrate surface and inside cavity, otherwise the suspended substance that pollutent produced, to cause plating the material finished surface and have unusual printing opacity or heterogeneous particle situation, influence the product fine rate, but its external reflux system is disposed at the periphery of former continuous coating equipment in ㄇ type mode, cause carrier after coming out in discharging cavity district, just be exposed in the general work environment, Working environment hide many suspended substances and dust, add that the pollution deposit amount is with carrier is exposed to outside atmosphere distance and time are directly proportional, therefore the external reflux line is longer, carrier surface or bottom more can be subjected to the outside atmosphere dust or the dust that is deposited on the external reflux system axis of rolling pollutes, will be in coating process next time attached to the dust on carrier surface, source of pollution are brought in the plated film cavity, and then remote effect plated film quality.

(3) expend higher equipment cost:

In order to set up the external reflux device, must additionally set up peripheral equipments such as transmission board base, the axis of rolling and position sensing device, in addition, can between different working direction, can change smoothly at ㄇ type reflux for making carrier, must add gas (oil) cylinder pressure at each turning, whole group external reflux device needs four groups of above gas (oil) cylinder pressures at least, and mechanism that these are extra and equipment will expend higher equipment cost.

(4) be in the noise Working environment:

In view of conventional external reflux shared space and length ratio very high (more than 1/2), based on saving equipment development and material cost, employing has been widely used in warehouse handling of goods and materials transfer mechanism mostly at present, yet, this type of transfer mechanism is to consider large-scale and heavy duty material transmission basically, therefore its axis of rolling all adopts the steel circular shaft design of long radius, but mostly at the miniaturization and base material, do not need to adopt high-intensity transport sector design like this at continuous vacuum coating equipment.In addition, when carrier after the district's discharging of discharging cavity, can be because of equally by colliding between the steel carrier and the axis of rolling, and many noises of generation in the return-flow system transmission course externally cause the situ production line to be in the noise Working environment.

(5) influence the equipment integral outward appearance:

Need many extra device spaces based on the external reflux system, and must add many transmission lines, supply lead, gas (oil) pressure pipe road and control circuit and finish automatization and carry flow process, if not through scrupulous space planning in advance and hide line related, these circuits all can be exposed to around the external reflux system, cause the whole production equipment appearance to seem huge, complicated and disorderly and unsystematic.

Must occupy bigger factory building spatial main drawback based on above-mentioned first kind of external reflux device, for the factory building of some limited space, the just essential another kind dependence chassis that adopts pushes type of transmission, as shown in Figure 5, that is be not provided with the automatic loop device, but in the feed cavity tagma of continous way plated film, discharging cavity district accredits front-end operations personnel respectively and controls charging and schedule of operation, and rear end operator are positioned at discharging cavity district, to be responsible for taking out the carrier bed frame of having finished plated film in the carrier, and the carrier of sky is positioned on the stackable chassis, after chassis is fully loaded, by the rear end operator chassis is pushed into front-end operations personnel place again, and changing carriage each other, next, front-end operations personnel insert carrier bed frame to be plated in the carrier again, wait for plated film flow process next time, but, also there is following shortcoming in present this dependence chassis load mode:

(1) production line needs 2 bit manipulation personnel at least:

The external reflux device only needs front-end operations personnel can independently finish the entire job flow process, and this type of relies on the load mode of chassis, and a production line needs 2 bit manipulation personnel at least, thus need more personnel, if three-shift promptly needs many three manpowers.

(2) be difficult to keep the cleanliness factor of carrier in the chassis transport process:

At carrier in the chassis transport process, cause must be via preceding, the rear end operator are on chassis is got, take off at least twice the action of touching, increase the chance that operator's hand pollutes the carrier surface greatly, add upper supporting disk during chassis is put, also be in the general work environment, dust and suspended substance in the factory building can slowly be deposited on chassis and carrier surface, dust attached to the carrier surface, to follow next coating process to pollute inside cavity, and then influence the plated film quality, the degree of this pollution can must be changed work gloves as can be seen by the site operation personnel every day, at this disappearance, front-end operations personnel must utilize the dust of suction cleaner removing attached to the carrier surface sometimes.

(2) rear end operator working efficiency is not high:

Job requirements according to different plated film qualities, cleaning surfaces processing and vacuum cleanliness factor, continuous vacuum coating equipment needs three above individual cavity to finish whole processing procedure usually, therefore carrier finish coating speed from the feed cavity tagma to discharging cavity district can't be too fast, estimate about 40 seconds/coil to 120 seconds/dish, cause the rear end operator most of the time all to be in and wait for the state of carrier from the district's discharging of discharging cavity, with working efficiency, it is higher that the rear end operator are in idle wait ratio.

Reflux and load mode based on above-mentioned two kinds of existing continuous vacuum coating equipment, except all have carrier at transport process easily by external environmental, and then influence outside plated film quality and the increase cavity scheduled maintenance cleaning time, still have to occupy big factory building space or the high shortcoming of on-the-spot human cost, so the necessity that is improved is arranged.

The utility model content

In order to improve above-mentioned disappearance, main purpose of the present utility model is to provide a kind of original continuously acting production lines space that utilizes, need not occupy extra factory building space or personnel, just can reach loop circuit transmission operation, to improve the continuous vacuum coating submerged type internal reflux device of factory building space availability ratio.

Based on above-mentioned purpose, major technique means of the present utility model are to be provided with two product input terminuss that lay respectively at continuous production equipment, the preceding lifting device of output terminal, back lifting device, before, top one side of back lifting device is provided with a two-way running propulsion source, top and be provided with several and be in the same way the roller that rotates by the bidirectional movement drive power source, the axle center of roller is that the throughput direction with production unit is vertical and arrange along throughput direction and to be provided with, in addition in preceding, back lifting device is provided with height when detecting its lifting respectively, the last sense switch of low dot location, following sense switch, and this end of the contiguous continuous production equipment of lifting device is provided with a sense switch, then is provided with a location sense switch away from this end of production unit; At least one passback mechanism module, be below the continuous production equipment and extend between the forward and backward lifting device, it has a unidirectional running propulsion source, and parallel with the roller of forward and backward lifting device and be in the same way several rollers that rotate by unidirectional running drive power source.

Implement after the above-mentioned technology, the utility model can improve existing operation disappearance, and reach useful space utilization, only one man operation get final product, advantage such as working efficiency height.

In addition, reduce pollution in order to make object in transmission course, the utility model further covers with a dustproof housing in the top and the side of passback mechanism module, only keeps the space of passing through for object.

Description of drawings

Fig. 1 is a front-view schematic diagram of the present utility model;

Fig. 2 is a schematic top plan view of the present utility model;

Fig. 3 is a sectional perspective schematic appearance of the present utility model;

Fig. 4 is the existing external reflux device configuration schematic diagram that applies to the continous way plated film;

Fig. 5 is the existing synoptic diagram that cooperates chassis with operator.

Embodiment

See also Fig. 1, shown in 2 the utility model forward sight and vertical view, the utility model is to utilize original continuous vacuum coating production equipment, and form a submerged type internal reflux device, it is provided with the required feed cavity tagma 10 of continuous vacuum coating in regular turn, plated film cavity district 11, discharging cavity district 12, be respectively equipped with a motive power outputting apparatus 13 in each cavity district, rotate to drive one group of conveying roller 14 respectively, and each cavity district is that bearing respectively is in a charging base station 15, one plated film base station 16, on the one discharging base station 17, be provided with a preposition base station 18 that is positioned at charging base station 15 1 sides along the orientation of each base station 15～17, one is positioned at the rearmounted base station 19 of discharging base station 17 1 sides, between three base stations 15～17, be provided with a passback mechanism module 40 again, please consult shown in Figure 3 simultaneously, this passback mechanism module 40 is provided with several and is level roller arranged side by side 41, it is identical with aforementioned conveying roller 14 that it is provided with direction, each roller 41 is seen through as chain by a unidirectional running propulsion source 42, actuated elements such as belt 43 drive and are rotation in the same way, cover with a dust guard 45 covers in returning mechanism module 40 tops and dual-side again, the distance between this dust guard 45 and the roller 41 needs and can pass through for carrier 50.

In preposition base station 18 and rearmounted base station 19, preceding lifting device is set respectively in addition, back lifting device, in the middle of this preferred embodiment, before described, before back lifting device pressure cylinder shaft up extends, back lifting cylinder pressure 20,30, before two, back lifting cylinder pressure 20,30 pressure cylinder shaft top is respectively equipped with a horizontally disposed platform, the contiguous passback of platform mechanism module 40 these sides are provided with sense switch 24,34, differ from passback mechanism module 40 these ends and then be provided with location sense switch 25,35, end face is provided with several parallel rollers arranged side by side 22 on platform, 32, side in platform is provided with a two-way running propulsion source 21 in addition, 31, this bidirectional-movement propulsion source 21,31 output shaft is provided with sprocket wheel, to see through actuated element 23,33 (as chain, belt) drives roller 22,32 rotations, each roller 22, the 32nd, parallel with the roller 41 of the conveying roller 14 in cavity district and passback mechanism module 40, and, when lifting cylinder pressure 20,30 pressure cylinder shaft up ejects or during retraction, roller 22, the 32nd, with the conveying roller 14 in each cavity district, the roller 41 of passback mechanism module 40 is contour, in addition in preceding, back lifting cylinder pressure 20,30 cylinder body one side is provided with summit on the piston that detects cylinder interior, the go to the bottom last sense switch 201 of a position, 301 and following sense switch 202,302.

Above-mentioned is member configuration of the present utility model, and its embodiment is addressed as the back:

Please consult again shown in Figure 1, and with reference to the direction of arrow in graphic:

(1) after finishing plated film, plated film finished product 52 that carrier 50 is followed on the dish to be put and carrier bed frame 51 be 12 outputs from discharging cavity district, and the front end of carrier 50 sensed switch 34 earlier senses;

(2) sense switch 34 sensing signals will drive rearmounted base station 19 interior two-way rotational power sources 31 is just changeing, and drives each roller 32 rotation by actuated element 33, and carrier 50 can be advanced to till the sense switch 35 of location;

(3) the sensing signal of location sense switch 35 makes two-way rotational power source 31 shut down earlier, and drive back lifting cylinder pressure 30 simultaneously to decline, till the sense switch 302, at this moment, the roller 32 that is positioned at the pressure cylinder shaft top is proper for contour with the roller 41 that returns mechanism's module 40 under touching;

(4) locate sense switch 35 instantly when sensing the low dot location of lifting cylinder pressure, promptly drive two-way rotational power source 31 reverse drive, and the unidirectional running propulsion source 42 of passback mechanism module 40 rotates in the same way, so that carrier 50 according to being sent in the other direction on the passback mechanism module 40, is touched till the sense switch 46 that is positioned at passback mechanism module 40 contiguous preposition base station 18 these ends up to carrier 50 front ends;

(5) the sensing signal of sense switch 46 will drive back lifting cylinder pressure 30 in the aforesaid rearmounted base station 19 to rising, sense its hoisting position up to last sense switch 301, promptly return standby position (stand-by position), come out from discharging cavity district 12 to wait for next carrier 50;

(6) at the same time, the one sensing signal that is positioned at the sense switch 46 of passback mechanism module 40 contiguous preposition base station 18 these ends will make unidirectional running propulsion source 42 shut down with bidirectional movement propulsion source 31 earlier, make carrier 50 wait for peacefully wait at passback mechanism module 40 front ends, must do following two earlier and confirm action, can move on: at first, for the preceding lifting cylinder pressure of avoiding being positioned at front end 20 is positioned at errors present (such as going up the summit), whether is sitting at by lifting cylinder pressure 20 before sense switch 202 is confirmed to be somebody's turn to do down earlier and goes to the bottom a little; Secondly, for avoiding carrier 50 to hit dish at preceding lifting cylinder pressure 20 places or piling up situation, so earlier because the sense switch 24 of platform both sides, location sense switch 25 when confirming on the rollers 22 whether without any carrier 50, restart unidirectional running propulsion source 42 runnings and 21 counter-rotatings of bidirectional movement propulsion source, actuated element 43,23 by chain or belt formation drives rollers 41,22 rotations, carrier 50 can be continued to be sent to preceding lifting cylinder pressure 20 tops from returning mechanism's module 40, till carrier 50 front ends touch location sense switch 25;

(7) location sense switch 25 signals make bidirectional movement propulsion source 21 and unidirectional running propulsion source 42 shut down earlier, and the past rising of the pressure cylinder shaft of lifting cylinder pressure 20 before making, till touching sense switch 201 (summit on the lifting cylinder pressure);

(8) go up sense switch 201 signals with Schilling before lifting cylinder pressure 20 be stuck in the summit, wait for peacefully the front-end operations personnel and take out the finished product 52 (containing carrier bed frame 51) that plated film is finished from carrier 50, and put into another again and organize base material (containing carrier bed frame 51) to be plated, in this process, front-end operations personnel need not take out carrier 50, also carrier 50 can be do not touched, the chance that carrier 50 contacts with external environment can be effectively isolated;

(9) when the operator that are positioned at front end by after being written into key (reload), bidirectional movement propulsion source 21 beginning is just changeed, so that carrier 50 is written into feed cavity tagma 10 again, carries out plated film circulation process next time;

(10) enter feed cavity tagma 10 fully when carrier 50, after the existence of sense switch 24 sensings less than carrier 50, lifting cylinder pressure 20 is toward descending before will driving, up to touching down sense switch 202 (the lifting cylinder pressure is gone to the bottom a little), return standby position (stand-byposition) and wait for next from returning the carrier 50 that mechanism's module 40 spreads out of;

(11) do action like this goes round and begins again, and the utility model submerged type internal reflux device is just finished an automatization loop circuit continous way work flow, and the scene only needs bit manipulation personnel independently to finish.

By above-mentioned motion flow of the present utility model, the utlity model has several characteristics:

1. only need bit manipulation personnel independently to fulfil assignment.

2. cover is overlying on transparent dust guard on the passback mechanism module except having dedusting function, more can have an X-rayed inner passback mechanism module operating state, increases the simplification of trouble shooting and removal of obstacle.

Moreover, for avoiding carrier on passback mechanism module, because and frictional force deficiency between the roller, and generation is slided and transmission is uncertain, the utility model can coat in the axis of rolling outside has shock-absorbing and noise reduction function material, so not only can increase the frictional force between carrier and the passback mechanism module roller, promote the certainty of transmission, significantly reduce the noise in the passback process simultaneously.

Above-mentioned simple embodiment does explanation with three individual cavity work flows, but the number of individual cavity can be according to the plated film quality requirements, kind and vacuum cleanliness factor require different and do appropriate expansion, for example increase low, in, high vacuum cavity district, the highest individual cavity continuous equipment that increases to more than ten, to this expansion situation, as long as increase the group number of passback mechanism module, just in the passback process, hit and coil or pile up situation in some passbacks mechanism module zone for fear of carrier takes place, must confirm earlier in the sequence of control that next one passback mechanism module is the waiting status that is in no carrier, a last passback mechanism module can make carrier continue to forward.

Above-mentioned again the utility model is performed on the equipment of continuous vacuum coating, and it can also be implemented on other continuous production equipment.

Claims (8)

1. an automatization submerged type internal reflux device is to cooperate continuous production equipment, it is characterized in that: comprising:

Lay respectively at the product input terminus of continuous production equipment, one preceding lifting device of output terminal, one back lifting device, before, top one side of back lifting device is provided with a two-way running propulsion source, top and be provided with several and be in the same way the roller that rotates by the bidirectional movement drive power source, the axle center of roller is that the throughput direction with production unit is vertical and arrange along throughput direction and to be provided with, in addition in preceding, back lifting device is provided with height when detecting its lifting respectively, the last sense switch of low dot location, following sense switch, and this end of the contiguous continuous production equipment of lifting device is provided with a sense switch, then is provided with a location sense switch away from this end of production unit;

At least one passback mechanism module, be below the continuous production equipment and extend between the forward and backward lifting device, it has a unidirectional running propulsion source, and parallel with the roller of forward and backward lifting device and be in the same way several rollers that rotate by unidirectional running drive power source.

2. automatization submerged type internal reflux device according to claim 1 is characterized in that: contiguous preceding this end of lifting device of described passback mechanism's module is provided with a sense switch.

3. automatization submerged type internal reflux device according to claim 1 is characterized in that: top and side in passback mechanism module cover with a dustproof housing, have the space of passing through for object between dust guard top and the passback mechanism module.

4. automatization submerged type internal reflux device according to claim 1, it is characterized in that: this forward and backward lifting device is the cylinder pressure that up extends for pressure cylinder shaft, its pressure cylinder shaft top is provided with a platform, described bidirectional movement propulsion source is to be positioned at platform one side, and each roller then is to be located at table top.

5. automatization submerged type internal reflux device according to claim 3 is characterized in that: described dust guard is to be a transparent cover body.

6. according to claim 1 a described automatization submerged type internal reflux device, it is characterized in that: the roller surface of described passback mechanism module is coated by the material of tool shock-absorbing and noise reduction function.

7. automatization submerged type internal reflux device according to claim 1 is characterized in that: between the output shaft and roller of described unidirectional running propulsion source, and be to link with chain to drive between bidirectional movement propulsion source and the roller.

8. automatization submerged type internal reflux device according to claim 1 is characterized in that: between the output shaft and roller of described unidirectional running propulsion source, and be to link with belt to drive between bidirectional movement propulsion source and the roller.

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