CN104818469A - Film coating system having tray cooling function - Google Patents
Film coating system having tray cooling function Download PDFInfo
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- CN104818469A CN104818469A CN201510010395.8A CN201510010395A CN104818469A CN 104818469 A CN104818469 A CN 104818469A CN 201510010395 A CN201510010395 A CN 201510010395A CN 104818469 A CN104818469 A CN 104818469A
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- load plate
- phase change
- coating system
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Abstract
The invention discloses a film coating system having a tray cooling function. The system comprises a tray having a tray body and a phase change substance filled in the tray body, a film coating station, a reflowing device and a cooling device. The film coating station comprises an inlet end and an outlet end; and the tray can enter the film coating station from the inlet end to perform a film coating procedure. The reflowing device comprises a conveying unit arranged outside the film coating station. The phase change substance absorbs heat energy accumulated in the film coating procedure from the tray body to serve as latent heat needed for melting at least part of the phase change substance from a solid state to a liquid state; and the melting point of the phase change substance is within 18-95 degrees. The cooling device can absorb the heat energy from the phase change substance to condense at least part of the phase change substance from the liquid state to the solid state. The film coating quality is improved by the improvement of the tray and the latent heat needed for dissolving the phase change substance; and in addition, the cooling device is used for solving the cooling problem in the film coating system.
Description
Technical field
The present invention relates to a kind of coating system, particularly relate to a kind of coating system with load plate refrigerating function.
Background technology
The application of current vacuum coating technology is day by day extensive, such as plating anti electromagnetic wave interference (Electro-magnetic interference on portable 3C electronic product casing, EMI) the 3C industry of plated film, even be the optical mirror slip industry etc. that plating has optical coating (optical film) on transparent glasses lens, all need to use vacuum sputtering equipment; Wherein, with the coating system of continous way Multicarity (multi-chamber), because have, speed is fast, output is high, coating quality is excellent again, and can reduce the advantages such as production cost significantly, has therefore been widely used in the processing procedure of a large amount of plated film.The coating system of general continous way Multicarity sequentially comprises at least three regions: a feed cavity tagma, a plated film cavity district, and a discharging cavity district; Wherein, a thing to be plated is placed on the carrier on a delivery unit, with in above-mentioned cavity district or across the transmission of cavity interval, and is covered with the finished product of a plated film at a plated surface of this thing to be plated by this discharging cavity district output one.
Consult Fig. 1, TaiWan, China M258101 checks and approves notification number utility model patent case and discloses a kind of automation embedded type internal reflux apparatus 1, be applied to a continous way Multicarity coating system 14, lifting device 12 after lifting device 11, before it comprises one, and one is arranged at passback mechanism module 13 under this continous way Multicarity coating system 14.Input terminus 141 and an output terminal 142 of this continous way Multicarity coating system 14 be located at respectively by this front lifting device 11 and this rear lifting device 12; Wherein, this front lifting device 11, this continous way Multicarity coating system 14, this rear lifting device 12, define a loop jointly with this passback mechanism module 13.
After a carrier 10 carrying a thing (not shown) to be plated executes a film-plating process in this continous way Multicarity coating system 14, move on this rear lifting device 12 from the output terminal 142 of this continous way Multicarity coating system 14, and drive this carrier 10 to bottom offset by this rear lifting device 12 by a cylinder pressure after this thing to be plated is removed, this carrier 10 is driven to move towards this front lifting device 11 via this passback mechanism module 13, be located in after this carrier 10 on this front lifting device 11 relays being equipped with a new thing to be plated, this front lifting device 11 makes this carrier 10 to top offset by a cylinder pressure, this carrier 10 is made again to import the input terminus 141 of this continous way Multicarity coating system 14.
But the carrier 10 being placed with this thing to be plated performs in this film-plating process in this continous way Multicarity coating system 14, the electricity slurry environment because of its inside is accumulated a large amount of high temperature heat.Therefore, this loop once this carrier 10 is passed through repeatedly, and repeatedly accumulate a large amount of high temperature heat in this high-temperature electric slurry environment, then easily cause the temperature of this carrier 10 and thing to be plated thereof too high, thus damage coating quality.
Known through above-mentioned explanation, the structure of improvement coating system to solve the heat dissipation problem in coating system, be the person skilled of this technical field a difficult problem to be broken through.
Summary of the invention
The object of the present invention is to provide a kind of coating system with load plate refrigerating function.
The coating system with load plate refrigerating function of the present invention, this coating system with load plate refrigerating function comprises: a load plate, a plated film station, a reflux, and a refrigerating unit.This load plate comprises a dish body and a phase change material, and this dish body interior is formed with the enclosed space that fills this phase change material.This plated film station comprises an inlet end and an exit end, and this load plate can enter to carry out a film-plating process in this plated film station from this inlet end, and shifts out this plated film station by this exit end.This reflux comprises one and is arranged on delivery unit outside this plated film station, and this delivery unit makes this load plate move along an exit end from this plated film station towards the transfer path of this inlet end at this plated film station.This refrigerating unit is arranged on this transfer path of this delivery unit.In the present invention, the heat energy that this phase change substance is accumulated in this film-plating process from this dish bulk absorption one, using as this at least part of phase change material from one solid-state be melt into one liquid time required latent heat (latent heat), and the fusing point of this phase change material is between 18 DEG C to 95 DEG C; This refrigerating unit can, from this this heat energy of phase change material absorbing, become this solid-state to make this at least part of phase change material from this settable liquid.
The coating system with load plate refrigerating function of the present invention, this phase change material is selected from an organic-based material and a mineral-type materials wherein one, and this organic-based material is a hydro carbons, and this hydro carbons is selected from C
16to C
50an alkanes.
The coating system with load plate refrigerating function of the present invention, the enclosed space of this dish body need be more than or equal to the volume that this phase change material occupies when this liquid state.
The coating system with load plate refrigerating function of the present invention, this delivery unit has the transfer assembly that a support and is installed on this support, this transfer assembly has the servomotor that a pair spaced conveyor module and drives described conveyor module, this delivery unit utilizes this to conveyor module support and this load plate mobile, and this refrigerating unit is positioned at this between conveyor module.
The coating system with load plate refrigerating function of the present invention, this is circulating conveying belt to conveyor module.
The coating system with load plate refrigerating function of the present invention, this reflux also comprises a sensing cell, this sensing cell is arranged at the support of this delivery unit, when this load plate be transferred into be positioned at above this refrigerating unit and this sensing cell contiguous time, this sensing cell can produce this servomotor of a signal control and stop operating, and borrows this refrigerating unit to cool the phase change material in this load plate.
The coating system with load plate refrigerating function of the present invention, this refrigerating unit is installed on this support, and there is the actuator that a heating panel and drives this heating panel upper and lower displacement, this heating panel has an entrance, an outlet, and one from this entrance to this outlet extend and with for one cooling fluid flowing cooling channel, when this load plate be transferred into be positioned at above this heating panel time, this actuator drives this heating panel towards top offset to contact this load plate.
The coating system with load plate refrigerating function of the present invention, this refrigerating unit is installed on this support, and has at least one fan.
The coating system with load plate refrigerating function of the present invention, this refrigerating unit is arranged at below this plated film station.
The coating system with load plate refrigerating function of the present invention, this reflux also to comprise before of a front end and the rear end being adjacent to this delivery unit respectively lifting unit after lifting unit and, this front lifting unit is adjacent to the inlet end at this plated film station, and this load plate shifted out from this delivery unit is imported the inlet end at this plated film station, this rear lifting unit is adjacent to the exit end at this plated film station, and this load plate shifted out by the exit end from this plated film station imports this delivery unit.
Beneficial effect of the present invention is, by the improvement of this load plate, utilize the latent heat of fusion that this phase change material itself is required, with from this this heat energy of dish bulk absorption, can take away and in this coating process, be accumulated in high temperature heat on load plate to promote coating quality, utilize this refrigerating unit from this this heat energy of phase change material absorbing in addition, with the heat dissipation problem that will solve in coating system.
Accompanying drawing explanation
Of the present invention other feature and effect, clearly present in reference to graphic embodiment, wherein:
Fig. 1 is a front elevational schematic, illustrates that TaiWan, China M258101 checks and approves a kind of automation embedded type internal reflux apparatus disclosed in notification number;
Fig. 2 is a schematic top plan view, illustrates that the present invention has one first embodiment of the coating system of load plate refrigerating function;
Fig. 3 be one along Fig. 2 a broken line III-III acquired by elevational cross-sectional view, lifting unit before a plated film station of this first embodiment, a reflux, a refrigerating unit, is described, and lifting unit after;
Fig. 4 is a cross-sectional schematic, and a load plate of this first embodiment is described;
Fig. 5 is a schematic top plan view, and a reflux and a refrigerating unit of this first embodiment are described;
Fig. 6 is a front elevational schematic, and using state when this load plate of this first embodiment contacts with this refrigerating unit is described;
Fig. 7 is the graph of a relation of a temperature to the time, illustrates that this load plate of this first embodiment carries out the temperature variation of a process of cooling in this refrigerating unit;
Fig. 8 is a graph of a relation solidifying ratio versus time, and what illustrate that this load plate of this first embodiment carries out this process of cooling in this refrigerating unit solidifies ratio vary;
Fig. 9 is a three-dimensional combination figure, illustrates that the present invention has a reflux and a refrigerating unit of one second embodiment of the coating system of load plate refrigerating function;
Figure 10 is the graph of a relation of a temperature to the time, illustrates that this load plate of this second embodiment carries out the temperature variation of a process of cooling in this refrigerating unit;
Figure 11 is a graph of a relation solidifying ratio versus time, and what illustrate that this load plate of this second embodiment carries out this process of cooling in this refrigerating unit solidifies ratio vary.
Embodiment
Before the present invention is described in detail, should be noted that in the following description content, similar assembly represents with identical numbering.
Consult Fig. 2, Fig. 3 and Fig. 4, the present invention has one first embodiment of the coating system of load plate refrigerating function, comprises load plate 2, plated film station 3, reflux 4, and a refrigerating unit 5.
This load plate 2 comprises dish body 21 and a phase change material 22, and this dish body 21 inside is formed with the enclosed space 20 that fills this phase change material 22.In this first embodiment of the present invention, this dish body 21 is made up of aluminium alloy (Al alloy); This phase change material 22 can absorb the heat energy carrying out accumulating in a film-plating process in this plated film station 3 from this dish body 21, using as this at least part of phase change material 22 from one solid-state be melt into one liquid time required latent heat, and the fusing point of this phase change material 22 is between 18 DEG C to 95 DEG C; In addition, this refrigerating unit 5 can absorb this heat energy from this phase change material 22, becomes this solid-state to make this at least part of phase change material 22 from this settable liquid.
What deserves to be explained is, in order to avoid the volumetric expansion in time melting of this phase change material 22 causes this dish body 21 to be out of shape.Therefore, the enclosed space 20 of this dish body 21 need be more than or equal to the volume that this phase change material 22 occupies when this liquid state.What need supplementary notes herein is, the heat storage capacity of this phase change material 22 in an endothermic process (heat storage capacity), be between 134kJ/kg to 250kJ/kg, and this endothermic process comprise one from this solid-state phase transformation (phase transition) being molten into this liquid state.This phase change material 22 is selected from an organic-based material (organic material) and a mineral-type materials (inorganic material) one of them person.
More particularly, this organic-based material is a hydro carbons (hydrocarbon), and this hydro carbons is selected from C
16to C
50an alkanes (alkane), such as C
30to C
50in the paraffin (wax) of alkanes.Generally speaking, this phase change material (that is, aforementioned C
16to C
50alkanes) 22 be occupy this enclosed space 20 80% to 90% when this is solid-state.
In addition, this mineral-type materials is selected from one containing crystalline hydrate salt (salt hydrates, a M
nh
2and the constituent of an additive, or one melt salt O).Specifically, this crystalline hydrate salt can be Disodium sulfate decahydrate (Na
2sO
410H
2o), sodium acetate trihydrate (C
2h
3naO
23H
2or Monoaluminum monoammonium disulfate Dodecahydrate (NH O),
4al (SO
4)
212H
2o); This melting salt can be nitric acid and receives (NaNO
3) or saltpetre (KNO
3).Need supplementary notes herein, the additive in this constituent reduces the volume change that this crystalline hydrate salt produces in fusion processes.
This plated film station 3 comprises inlet end 301 and an exit end 302, and this load plate 2 carries a thing (not shown) to be plated, and can enter to carry out this film-plating process in this plated film station 3 from this inlet end 301, and shifts out this plated film station 3 by this exit end 302.More specifically, this plated film station 3 sequentially has along an orientation X removal cavity 33 that sputter cavity 32 and that a loading chambers 31, comprising this inlet end 301 performs this film-plating process comprises this exit end 302.
Need to describe in detail, this load plate 2 carries out the high-temperature electric slurry formed in this film-plating process in this sputter cavity 32, can accumulate a large amount of high temperature heat on this thing to be plated and this load plate 2 herein.This high temperature heat be via this dish body 21 pass to this phase change material 22 directly absorb by this phase change material 22, using as this phase change material 22 in the heat needed for this endothermic process.Because this endothermic process comprises this phase change material 22 from this solid-state phase transformation being molten into this liquid state, and the latent heat that this phase change material 22 needs extra absorption a large amount of is to carry out phase transformation, the heat that the heat causing this endothermic process to absorb will suck much larger than this dish body 21.Therefore, the load plate 2 self of this first embodiment of the present invention has had the function of cooling; That is, the high temperature heat of the dish body of this load plate 2 21 itself, absorbed in advance by this phase change material 22, thus makes this dish body 21 itself and this thing to be plated reach the effect of cooling.But, this phase change material 22 needs cooled, and this load plate 2 could circulate to enter in this plated film station 3 again and carry out film-plating process next time, as detailed below.
Consult Fig. 3 again and coordinate and consult Fig. 5 and Fig. 6, this reflux 4 to comprise before delivery unit 41, sensing cell 42, a lifting unit 43 and a lifting unit 44 afterwards.This delivery unit 41 is arranged on outside this plated film station 3, and this load plate 2 is moved along an exit end 302 from this plated film station 3 towards the transfer path of this inlet end 301 at this plated film station 3.This delivery unit 41 has the transfer assembly 412 that a support 411 and is installed on this support 411.This transfer assembly 412 has a pair spaced conveyor module 413, and the servomotor 414 of the described conveyor module 413 of a driving.This delivery unit 41 utilizes this to conveyor module 413 support and this load plate 2 mobile, and this refrigerating unit 5 is positioned at this between conveyor module 413.This sensing cell 42 is arranged at the support 411 of this delivery unit 41.In this first embodiment of the present invention, this is respectively a circulating conveying belt to conveyor module 413; This sensing cell 42 is one to detect and the proximity switch of locating.
In this first embodiment of the present invention, this reflux 4 is all arranged at below this plated film station 3 (as shown in Figure 3) with this refrigerating unit 5.This front lifting unit 43 of this reflux 4 and this rear lifting unit 44, be adjacent to a front end and a rear end of this delivery unit 41 respectively.This front lifting unit 43 is adjacent to the inlet end 301 of this loading chambers 31 at this plated film station 3, and this load plate 2 shifted out the front end from this delivery unit 41 imports the inlet end 301 at this plated film station 3.This rear lifting unit 44 is adjacent to the exit end 302 of the removal cavity 33 at this plated film station 3, and this load plate 2 shifted out by the exit end 302 from this plated film station 3 imports the rear end of this delivery unit 41.It should be noted that, this first embodiment of the present invention is all arranged at below this plated film station 3 for this reflux 4 and this refrigerating unit 5 to explain herein; But the person skilled being familiar with this technical field should be known, it is outer that this reflux 4 and this refrigerating unit 5 are all arranged at this plated film station 3, is not limited to device below this plated film station 3.
Consult Fig. 5 and Fig. 6 again, this refrigerating unit 5 is arranged on this transfer path of this delivery unit 41, and is installed on this support 411, and has the actuator 52 of a heating panel 51 and this heating panel 51 upper and lower displacement of driving.This heating panel 51 have one entrance 511, export 512, and one from this entrance 511 to this outlet 512 extend and with for one cooling fluid 54 flow cooling channel 513.This cooling fluid 54 can by pure water, ammoniacal liquor, methyl alcohol, acetone, heptane, or its combination formed.
Consult Fig. 3, Fig. 5 and Fig. 6 again, specifically, the load plate 2 carrying this thing (not shown) to be plated accumulates on this dish body 21 and the high temperature heat on thing to be plated when the sputter cavity 32 at this plated film station 3 carries out this film-plating process, be directly first by this phase change material 22 absorb and make this phase change material 22 be melt into this liquid.After completing this film-plating process, this load plate 2 is orderly sent to the exit end 302 of this removal cavity 33 with on this rear lifting unit 44 by a transporting mechanism 34 of this inside, plated film station 3, is removed to make the thing to be plated on this load plate 2.Surface this load plate 2 after headroom, follow-up is the transfer path being imported into this delivery unit 41 by this rear lifting unit 44 from the rear end of the delivery unit 41 of this reflux 4, is sent to above this refrigerating unit 5 with this transfer assembly 412 continued via this reflux 4.When being also close to this sensing cell 42 above this load plate 2 is transferred into the heating panel 51 being positioned at this refrigerating unit 5, this sensing cell 42 can produce this servomotor 414 of a signal control and stop operating, and the actuator 52 of this refrigerating unit 5 drives this heating panel 51 towards top offset to contact this load plate 2, and borrow this refrigerating unit 5 to carry out a process of cooling to the phase change material 22 in this load plate 2, become this solid-state to make this at least part of phase change material 22 from this settable liquid.After this process of cooling, this actuator 52 drives this heating panel 51 towards bottom offset with away from this load plate 2, and this servomotor 414 rotates to drive this to conveyor module 413 to drive this load plate 2 away from this refrigerating unit 5 again, and make this load plate 2 along on the front end that this transfer path is sequentially transferred into this delivery unit 41 and this front lifting unit 43, to place a new thing (not shown) to be plated on this load plate 2 after headroom after, be imported into this inlet end 301 of this loading chambers 31 at this plated film station 3, retransferred by the transporting mechanism 34 at this plated film station 3 and carry out this film-plating process to this sputter cavity 32.As shown in Figure 2, this transporting mechanism 34 can adopt servomotor 341 to drive multiple roller 342, because this transporting mechanism 34 is known skill and non-this case improvement emphasis, repeats so do not add at this.
The heating panel 51 inventing this refrigerating unit 5 that this first embodiment adopts in order to further proved can make this at least part of phase change material 22 become this solid-state from this settable liquid, this sentence dish body 21 that numerical simulation goes out this load plate 2 and phase change material 22 in this process of cooling temperature variation (see Fig. 7) with solidify ratio vary figure (see Fig. 8).This first embodiment of the present invention is when mimic diagram 7 is with Fig. 8, and this phase change material 22 is with positive 18 alkane (C
18h
38) condition emulate, and initial temperature condition be set as this dish body 21 start when this exit end 302 shifts out calculate.From the analog result of Fig. 7, confirm that this heating panel 51 is also certain and continue to absorb this heat energy with this phase change material 22 from this dish body 21, this dish body 21 is declined gradually with this phase change material 22 temperature.Simulation result shown by Fig. 8, this phase change material 22 becomes this solid-state from this settable liquid gradually, and after about 13 minutes, be frozen into that this is solid-state, so this heating panel 51 produces radiating effect to this load plate 2 really completely.
Consult Fig. 9, one second embodiment that the present invention has the coating system of load plate refrigerating function is be same as this first embodiment haply, it does not exist together is be, this refrigerating unit 5 has at least one fan 53 being arranged at this support 411, to replace this heating panel 51 and this actuator 52 of this first embodiment.In this second embodiment of the present invention, be explain for six fans 53.
In order to further proved invents the fan 53 of this refrigerating unit 5 that this second embodiment adopts, this at least part of phase change material 22 can be made to become this solid-state from this settable liquid, the dish body 21 also drawing up this load plate 2 with Numerical-Mode herein and phase change material 22 in this process of cooling temperature variation (see Figure 10) with solidify ratio vary figure (see Figure 11).From the analog result of Figure 10, confirm that this fan 53 can continue to absorb this heat energy with this phase change material 22 from this dish body 21 really, this dish body 21 is declined gradually with this phase change material 22 temperature.Simulation result shown by Figure 11, except first 3 ~ 4 minutes these dish bodies 21 due to higher temperatures (about 31 DEG C) continue thermal energy transfer to cause solidifying except ratio decline to make this phase change material 22 continue melting to this phase change material 22, the phase change material 22 of this second embodiment of the present invention is become this solid-state from this settable liquid gradually after 4 minutes in cooling, and after about 22 minutes, be frozen into that this is solid-state, so this fan 53 produces radiating effect to this load plate 2 really completely.
It is worth mentioning that, the coating system that the present invention has load plate refrigerating function can be batch (batch), continous way (inline, index), piece leaf formula (cluster), or volume plating formula (roll).In each coating system, this inlet end 301 and this exit end 302 can arrange for interval or be positioned at same position.With continous way coating system in Fig. 2 and Fig. 3 and this inlet end 301 and this exit end 302 are set to example explains, but not as limit.
In sum, the present invention has the coating system of load plate refrigerating function on the one hand by the improvement of the load plate 2 of each embodiment, utilize required latent heat of fusion of this phase change material 22 itself, to absorb this heat energy from this dish body 21, can take away and be accumulated in thing to be plated with the high temperature heat on dish body 21 to promote coating quality in this coating process; Refrigerating unit 5 on the other hand by described embodiment carries out this process of cooling, to solve the heat dissipation problem in coating system, so really can reach object of the present invention to the phase change material 22 in this dish body 21 of each embodiment and dish body 21 thereof.
As described above, be only embodiments of the invention, and when not limiting scope of the invention process with this, namely all simple equivalences done according to claims of the present invention and description change and modify, and all still belong to scope of the present invention.
Claims (10)
1. there is a coating system for load plate refrigerating function, it is characterized in that: this coating system with load plate refrigerating function comprises:
One load plate, comprise a dish body and a phase change material, this dish body interior is formed with the enclosed space that fills this phase change material;
One plated film station, comprises an inlet end and an exit end, and this load plate can enter to carry out a film-plating process in this plated film station from this inlet end, and shifts out this plated film station by this exit end;
One reflux, comprises one and is arranged on delivery unit outside this plated film station, and this delivery unit makes this load plate move along an exit end from this plated film station towards the transfer path of this inlet end at this plated film station; And
One refrigerating unit, is arranged on this transfer path of this delivery unit;
Wherein, the heat energy that this phase change substance is accumulated in this film-plating process from this dish bulk absorption one, using as this at least part of phase change material from one solid-state be melt into one liquid time required latent heat, and the fusing point of this phase change material is between 18 DEG C to 95 DEG C; And
Wherein, this refrigerating unit can, from this this heat energy of phase change material absorbing, become this solid-state to make this at least part of phase change material from this settable liquid.
2. there is the coating system of load plate refrigerating function as claimed in claim 1, it is characterized in that: this phase change material is selected from an organic-based material and a mineral-type materials wherein one, and this organic-based material is a hydro carbons, and this hydro carbons is selected from C
16to C
50an alkanes.
3. there is the coating system of load plate refrigerating function as claimed in claim 1, it is characterized in that: the enclosed space of this dish body need be more than or equal to the volume that this phase change material occupies when this liquid state.
4. there is the coating system of load plate refrigerating function as claimed in claim 1, it is characterized in that: this delivery unit has the transfer assembly that a support and is installed on this support, this transfer assembly has the servomotor that a pair spaced conveyor module and drives described conveyor module, this delivery unit utilizes this to conveyor module support and this load plate mobile, and this refrigerating unit is positioned at this between conveyor module.
5. there is the coating system of load plate refrigerating function as claimed in claim 4, it is characterized in that: this is circulating conveying belt to conveyor module.
6. there is the coating system of load plate refrigerating function as claimed in claim 4, it is characterized in that: this reflux also comprises a sensing cell, this sensing cell is arranged at the support of this delivery unit, when this load plate be transferred into be positioned at above this refrigerating unit and this sensing cell contiguous time, this sensing cell can produce this servomotor of a signal control and stop operating, and borrows this refrigerating unit to cool the phase change material in this load plate.
7. there is the coating system of load plate refrigerating function as claimed in claim 6, it is characterized in that: this refrigerating unit is installed on this support, and there is the actuator that a heating panel and drives this heating panel upper and lower displacement, this heating panel has an entrance, an outlet, and one from this entrance to this outlet extend and with for one cooling fluid flowing cooling channel, when this load plate be transferred into be positioned at above this heating panel time, this actuator drives this heating panel towards top offset to contact this load plate.
8. there is the coating system of load plate refrigerating function as claimed in claim 6, it is characterized in that: this refrigerating unit is installed on this support, and there is at least one fan.
9. the coating system with load plate refrigerating function as described in claim arbitrary in claim 1 to 8, is characterized in that: this refrigerating unit is arranged at below this plated film station.
10. there is the coating system of load plate refrigerating function as claimed in claim 9, it is characterized in that: this reflux also to comprise before of a front end and the rear end being adjacent to this delivery unit respectively lifting unit after lifting unit and, this front lifting unit is adjacent to the inlet end at this plated film station, and this load plate shifted out from this delivery unit is imported the inlet end at this plated film station, this rear lifting unit is adjacent to the exit end at this plated film station, and this load plate shifted out by the exit end from this plated film station imports this delivery unit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510010395.8A CN104818469A (en) | 2015-01-09 | 2015-01-09 | Film coating system having tray cooling function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510010395.8A CN104818469A (en) | 2015-01-09 | 2015-01-09 | Film coating system having tray cooling function |
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|---|---|
| CN104818469A true CN104818469A (en) | 2015-08-05 |
Family
ID=53728946
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|---|---|---|---|
| CN201510010395.8A Pending CN104818469A (en) | 2015-01-09 | 2015-01-09 | Film coating system having tray cooling function |
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| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
| CN114411108A (en) * | 2020-10-28 | 2022-04-29 | 凌嘉科技股份有限公司 | Cooling plate, cooling module and process system |
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| CN110344018B (en) * | 2018-04-08 | 2020-09-08 | 北京七星华创集成电路装备有限公司 | Multi-cathode continuous coating chamber |
| CN114411108A (en) * | 2020-10-28 | 2022-04-29 | 凌嘉科技股份有限公司 | Cooling plate, cooling module and process system |
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
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Application publication date: 20150805 |