CN202390535U - Continuous vacuum plating facility with heating device - Google Patents

Continuous vacuum plating facility with heating device Download PDF

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Publication number
CN202390535U
CN202390535U CN2011205096712U CN201120509671U CN202390535U CN 202390535 U CN202390535 U CN 202390535U CN 2011205096712 U CN2011205096712 U CN 2011205096712U CN 201120509671 U CN201120509671 U CN 201120509671U CN 202390535 U CN202390535 U CN 202390535U
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CN
China
Prior art keywords
chamber
heating
vacuum
continuous
substrate
Prior art date
Application number
CN2011205096712U
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Chinese (zh)
Inventor
龙鹏
李毅
刘志斌
宋光耀
翟宇宁
Original Assignee
深圳市创益科技发展有限公司
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Priority to CN2011205096712U priority Critical patent/CN202390535U/en
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Publication of CN202390535U publication Critical patent/CN202390535U/en

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Abstract

The utility model relates to a vacuum plating facility, in particular relates to a continuous vacuum plating facility with a non vacuum heating device, and belongs to the technical field of solar batteries. The continuous vacuum plating facility solves the technical problems of how to overcome defects of slow heating speed, low heating temperature and the like in vacuum chambers of continuous plating machines, and designs a heating mode and a device of the vacuum plating facility. The technical characteristics include that a non vacuum heating device is arranged at the front end of a substrate inlet chamber of the vacuum continuous plating machine, and the heating device comprises a heating chamber, a heater, a warm keeping layer and a temperature controller, wherein the heater is mounted in the heating chamber, and the warm keeping layer is arranged outside the heating chamber, accordingly, rapid heating is achieved, production rhythm is shortened, and production efficiency is improved.

Description

A kind of continuous vacuum coating equipment with heating unit

Technical field

The utility model relates to a kind of vacuum coating film equipment, particularly with the continuous vacuum coating equipment of antivacuum adding thermic devices, belongs to technical field of solar batteries.

Background technology

In recent years, along with the Rapid Expansion of industry sizes such as LCD, sun power, the vacuum continuous coating machine is as the equipment that has been widely used in these industries; How simply to increase its throughput rapidly, improve coating performance, significant; Because the plated film chamber needs condition of high vacuum degree, so continuous film plating machine generally comprises seven chambers, is respectively into sheet Vakuumkammer, preceding buffer vacuum chamber, preceding transition vacuum chamber, plated film Vakuumkammer, back transition vacuum chamber, back buffer vacuum chamber and slice chamber Vakuumkammer; Substrate gets into these Vakuumkammers successively during plated film; Because substrate needs certain temperature, therefore heating unit can be installed advancing sheet Vakuumkammer, preceding buffer vacuum chamber, preceding transition vacuum chamber, wherein one or more chambers of plated film Vakuumkammer, make the temperature that needs when substrate surface obtains plated film; Chinese patent ZL200920056199.4 " multicell continuous vacuum coating device " discloses such technology; But present, this type of heating exists following problem: (one) heats up slow: owing to be at the Vakuumkammer internal heating, heating mode leans on thermal radiation; Heat-up rate is slow; Therefore the temperature in order need to obtain often adopts the way of hanging down walking speed even stopping heating, and production efficiency is low; (2) to the equipment requirements height: because some film needs deposition at high temperature, so the device in the Vakuumkammer will take into full account thermal expansion and stable on heating problem, the equipment cost height.

Summary of the invention

To the problem that above technology exists, the utility model solves how to overcome technical barriers such as continuous film plating machine Vakuumkammer internal heating speed is slow, Heating temperature is low, designs a kind of heating mode and device of vacuum coating film equipment, realizes rapid heating.

In order to realize above task; The utility model provides a kind of continuous vacuum coating equipment with heating unit; Comprise vacuum continuous coating machine and heating unit; The vacuum continuous coating machine mainly is made up of advance sheet chamber, surge chamber, transition chamber, coating chamber and the slice chamber of vacuum, and its technical characterictic is that the sheet chamber front end that advances of vacuum continuous coating machine is provided with the antivacuum adding thermic devices, and this heating unit comprises heating chamber, well heater, thermal insulation layer and temperature regulator; Well heater is housed in the heating chamber, and heating chamber is provided with thermal insulation layer outward.

The antivacuum adding thermic devices of advancing sheet chamber front end of vacuum continuous coating machine, the ir heaters that its well heater is made up of infrared heating pipe and reflector, reflector are installed on the inwall of heating chamber.

The antivacuum adding thermic devices of advancing sheet chamber front end of vacuum continuous coating machine, its temperature regulator comprises temperature control module and detector.

Advancing between the sheet chamber of the heating chamber of antivacuum adding thermic devices and vacuum continuous coating machine is provided with isolating door.

Continuous vacuum coating equipment also comprises substrate delivery mechanism, and the substrate of preheating is delivered to the vacuum continuous coating machine by substrate delivery mechanism in the heating chamber.

Substrate delivery mechanism is the trolley type transporting mechanism.Substrate is placed on the substrate frame.

The heating chamber of antivacuum adding thermic devices is a closed cavity, and its inwall is equipped with reflector and ir heaters, and the bottom surface of heating chamber is equipped with the lifting gantry of band thermal insulation layer.

Transmission roller bearing and the pallet of placing substrate are housed on the lifting gantry of the bottom surface of heating chamber, and this pallet is by the transmission of transmission roller bearing.

The below of heating chamber is provided with the cylinder of control lifting gantry motion.

The positively effect that the utility model produces: owing to adopted the heating chamber and the little ir heaters of thermal inertia that need not vacuumize; The waiting time of utilizing Vakuumkammer to vacuumize heats; Both practiced thrift heat-up time; Avoid the shortcoming that Vakuumkammer internal heating speed is slow, Heating temperature is low again, shortened productive temp, improved production efficiency; And the antivacuum adding hot cell is easy to the design and installation thermal insulation layer; Reduce heat and be dispersed into surrounding working environment; The clean room that is fit to the residing constant temperature of continuous coating device, constant humidity uses; Adopt the little ir heaters of thermal inertia, but plug and play, promptly close the ineffective investment that has promptly stopped, avoided energy, reduced energy consumption; Simultaneously because Vakuumkammer does not need heating; Reduce greatly the resistant to elevated temperatures requirement of components and parts; Reduced cost and the work-ing life that has prolonged components and parts, and the also suitable reconstruction continuous vacuum coating of the both suitable newly-built continuous vacuum coating equipment of the utility model equipment, reconstruct simple and convenient; Cost is low, and speed is fast.

Description of drawings

The layout n. of the continuous vacuum coating equipment of Fig. 1: the utility model embodiment one.

Fig. 2: A-A sectional view among Fig. 1.

The layout n. of the continuous vacuum coating equipment of Fig. 3: the utility model embodiment two.

Fig. 4: B-B sectional view among Fig. 3.

The layout n. of Fig. 5: embodiment three continuous vacuum coating equipment.

Fig. 6: C-C sectional view among Fig. 5.

Among the figure: 1, antivacuum adding thermic devices, 101, heating chamber, 102, thermal insulation layer, 103, reflector; 104, infrared heating pipe, 2, advance sheet Vakuumkammer (abbreviation enters the sheet chamber), 3, preceding buffer vacuum chamber (surge chamber before being called for short), 4, preceding transition vacuum chamber (transition chamber before being called for short); 5, plated film Vakuumkammer (abbreviation coating chamber), 6, back transition vacuum chamber (be called for short back transition chamber), 7, back buffer vacuum chamber (being called for short the back surge chamber), 8, slice chamber Vakuumkammer (being called for short the slice chamber); 9, substrate, 10, roller, 10 ', substrate frame, 11, isolating door; 10 ' ', pallet, 12, lifting gantry, 13, cylinder.

Embodiment

The heating unit of continuous vacuum coating equipment; Comprise heating chamber, well heater, thermal insulation layer and temperature controlling system, heating chamber is positioned at the front end of continuous vacuum coating equipment, and well heater is positioned at heating chamber; Thermal insulation layer is positioned at outside the heating chamber, and heating chamber need not vacuumize.Heating chamber with advance the sheet Vakuumkammer and link to each other, the heating chamber ingress is equipped with the isolating door that can open and close.

Well heater is an ir heaters, comprises infrared heating pipe and reflector, and reflector is installed on the inwall of heating chamber.Temperature controlling system comprises temperature control module and detection system.

The utility model the continuous vacuum coating machine advance the sheet Vakuumkammer before install the antivacuum adding hot cell additional, utilized the substrate inherent charging waiting time to heat, substrate heating is accomplished the back with high walking speed arrival plated film Vakuumkammer; No longer slow down midway or stop because of heating; Because the object heat radiation is slow in the vacuum, can well heater be installed in the Vakuumkammer, simultaneously; Because can adopt the little infrared heating pipe of thermal inertia to replace the nichrome wire heating in the antivacuum adding hot cell, heating and cooling are rapid.

Embodiment one:

Present embodiment is the former horizontal continuous vacuum coating equipment of repacking, and heating unit 1 comprises heating chamber 101, thermal insulation layer 102, reflector 103, infrared heating pipe 104, and thermal insulation layer 102 wraps in around heating chamber 101 outer walls, and reflector 103 is installed in heating chamber inwall about in the of 101; Infrared heating pipe 104 is in expelling plate 103 fronts, heating chamber 101 with advance sheet Vakuumkammer 2 and link to each other, middlely chamber is separated by isolating door 11; During work, substrate 9 gets in the heating chamber 101 under the drive of roller 10; Substrate 9 presses the signal detection switch of the detection system of temperature controlling system, and isolating door 11 is closed, the Infrared Heating switch opens; Cooperate control through temperature controller with the workpiece temperature detector, superpower infrared heating pipe 104 begins heating, and substrate 9 heats up rapidly; Through actual measurement, the interior glass substrate 9 of 1.5 * 1.7m scope is warming up to preset temperature (120 ℃) in this repacking case, and is consuming time less than 45 s; The inherent latency of substrate 9 in heating chamber 101 is 210s, so substrate 9 can be heated fully, after the isolating door that advances sheet Vakuumkammer 2 11 is opened; Provide induced signal, heating chamber 101 heating stop, and workpiece leaves heating chamber 101; Advance sheet Vakuumkammer 2, afterwards substrate 9 with the fastest walking speed through advancing sheet Vakuumkammer 2, preceding buffer vacuum chamber 3, preceding transition vacuum chamber 4 just reduce to coating process and required after getting into plated film Vakuumkammer 5 walking speed, then through after transition vacuum chamber 6, after buffer vacuum chamber 7, slice chamber Vakuumkammer 8; Accomplish plated film, substrate 9 is seen off through roller 10 again, accomplishes the plated film productive temp according to present embodiment and foreshortens to 4 minutes by original 7 minutes; Enhance productivity greatly, and, see through the observation of for some time because substrate 9 temperature are high; Adhesive force is obviously strengthened, and Vakuumkammer no longer includes well heater, and equipment failure has significantly reduced.

Embodiment two:

The vertical continuous vacuum coating equipment of present embodiment for transforming; Advance sheet Vakuumkammer 2 front ends at original equipment and install heating unit 1 additional, substrate 9 is placed on the substrate frame 10 ', substrate frame 10 ' carry that substrate 9 gets into equally respectively with embodiment one and through heating chamber 101, advance sheet Vakuumkammer 2, preceding buffer vacuum chamber 3, preceding transition vacuum chamber 4, plated film Vakuumkammer 5, back transition vacuum chamber 6, back buffer vacuum chamber 7, slice chamber Vakuumkammer 8; After substrate 9 plated films are accomplished; Take off substrate 9, before substrate frame 10 ' is circulated back to heating chamber 101, put substrate 9 well after; Get into heating chamber 101 again, form loop production.

Embodiment three:

Present embodiment is repacking closed loop horizontal continuous vacuum coating equipment, and different with the open loop of embodiment one to be in present embodiment be closed loop, owing to need pallet 10 ' ' come carrying substrates 9; Therefore need to load the pallet 10 ' of substrate 9 ' closed loop moving that circulates, the closed loop of present embodiment is a up-down structure, the bottom of transmission at vacuum coating film equipment of promptly circulating; Therefore need lifting gantry 12 will load the pallet 10 ' of substrate 9 in the ingress ' rise through cylinder 13, will take off the pallet 10 ' of substrate 9 in the exit ' again by cylinder 13 landing, so the heating chamber 101 of the heating unit 1 of present embodiment is the closed cavity of lower opening; Upper wall is equipped with reflector 103 and infrared heating pipe 104 within it, and the outside is surrounded by thermal insulation layer 102, and lifting gantry 12 seals as its bottom surface; Transmission roller bearing 10 is installed on lifting gantry 12 comes conveying tray 10 ' ', in lifting gantry 12 bottoms thermal insulation layer 102 is installed, therefore do not influence heat insulation effect; During work,, substrate 9 is placed on the pallet 10 ' on the lifting gantry 12 in the lower end of heating chamber 101 ' on; Lifting gantry 12 rises in the heating chamber 101 under cylinder 13 promotes, and begins to start infrared heating pipe 104 and heats, and substrate 9 heats up rapidly; Through actual measurement, the glass substrate 9 of two 0.35 * 1.2m is warming up to preset temperature (120 ℃) in this repacking case, and is consuming time less than 45 s; For the filming equipment in this transformation case, the inherent latency of substrate 9 in heating chamber 101 is 210s, so substrate 9 can be heated fully; After the isolating door that advances sheet Vakuumkammer 2 11 is opened; Provide induced signal, heating chamber 101 heating stop, and workpiece leaves heating chamber 101; Substrate 9 get into equally respectively with embodiment one and through heating chamber 101, advance sheet Vakuumkammer 2, preceding buffer vacuum chamber 3, preceding transition vacuum chamber 4, plated film Vakuumkammer 5, back transition vacuum chamber 6, back buffer vacuum chamber 7, slice chamber Vakuumkammer 8; Substrate 9 plated films are accomplished, and load the pallet 10 ' of substrate 9 ' get into lifting gantry 12, take off substrate 9; Lifting gantry 12 descends under cylinder 13 effects; Through the transmission rolling shaft on the lifting gantry 12 10 with pallet 10 ' ' pass to intermediary transmission rolling shaft 10 again, on the lifting gantry 12 of ingress, accomplish a fabrication cycles.

Claims (10)

1. continuous vacuum coating equipment with heating unit; Comprise vacuum continuous coating machine and heating unit; Said vacuum continuous coating machine mainly is made up of advance sheet chamber, surge chamber, transition chamber, coating chamber and the slice chamber of vacuum, it is characterized in that the sheet chamber front end that advances of said vacuum continuous coating machine is provided with the antivacuum adding thermic devices, and this heating unit comprises heating chamber, well heater, thermal insulation layer and temperature regulator; Well heater is housed in the heating chamber, and heating chamber is provided with thermal insulation layer outward.
2. the continuous vacuum coating equipment of band heating unit as claimed in claim 1; The antivacuum adding thermic devices of advancing sheet chamber front end that it is characterized in that the vacuum continuous coating machine; The ir heaters that its well heater is made up of infrared heating pipe and reflector, reflector are installed on the inwall of heating chamber.
3. the continuous vacuum coating equipment of band heating unit as claimed in claim 1 is characterized in that the antivacuum adding thermic devices of advancing sheet chamber front end of vacuum continuous coating machine, and its temperature regulator comprises temperature control module and detector.
4. the continuous vacuum coating equipment of band heating unit as claimed in claim 1 is characterized in that the heating chamber of said antivacuum adding thermic devices and advancing between the sheet chamber of vacuum continuous coating machine are provided with isolating door.
5. the continuous vacuum coating equipment of band heating unit as claimed in claim 1 is characterized in that said continuous vacuum coating equipment also comprises substrate delivery mechanism, and the substrate of preheating is delivered to the vacuum continuous coating machine by substrate delivery mechanism in the heating chamber.
6. the continuous vacuum coating equipment of band heating unit as claimed in claim 5 is characterized in that said substrate delivery mechanism is the trolley type transporting mechanism.
7. the continuous vacuum coating equipment of band heating unit as claimed in claim 5 is characterized in that said substrate is placed on the substrate frame.
8. the continuous vacuum coating equipment of band heating unit as claimed in claim 5; The heating chamber that it is characterized in that said antivacuum adding thermic devices is a closed cavity; Its inwall is equipped with reflector and ir heaters, and the bottom surface of heating chamber is equipped with the lifting gantry of band thermal insulation layer.
9. the continuous vacuum coating equipment of band heating unit as claimed in claim 8 is characterized in that on the lifting gantry of bottom surface of heating chamber transmission roller bearing and the pallet of placing substrate being housed, and this pallet is by the transmission of transmission roller bearing.
10. the continuous vacuum coating equipment of band heating unit as claimed in claim 9 is characterized in that the below of said heating chamber is provided with the cylinder of control lifting gantry motion.
CN2011205096712U 2011-12-09 2011-12-09 Continuous vacuum plating facility with heating device CN202390535U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011205096712U CN202390535U (en) 2011-12-09 2011-12-09 Continuous vacuum plating facility with heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011205096712U CN202390535U (en) 2011-12-09 2011-12-09 Continuous vacuum plating facility with heating device

Publications (1)

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CN202390535U true CN202390535U (en) 2012-08-22

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103469160A (en) * 2013-08-26 2013-12-25 莫儒就 Special production equipment for far infrared energy heating tube
CN103469159A (en) * 2013-08-26 2013-12-25 莫儒就 Special production equipment for far infrared energy heating panel
CN103774107A (en) * 2014-01-25 2014-05-07 江西沃格光电股份有限公司 Sputter coating method
CN106119803A (en) * 2016-08-24 2016-11-16 肇庆市前沿真空设备有限公司 A kind of vacuum coating equipment
CN106244996A (en) * 2016-09-22 2016-12-21 铜陵市铜创电子科技有限公司 A kind of metallized film processing is with thickening coating apparatus
CN107043916A (en) * 2017-04-27 2017-08-15 柳州豪祥特科技有限公司 It is easy to the magnetron sputtering of maintaining to prepare the system of ito thin film
CN107043915A (en) * 2017-04-27 2017-08-15 柳州豪祥特科技有限公司 The system that magnetron sputtering prepares ito thin film
CN107142452A (en) * 2017-04-27 2017-09-08 柳州豪祥特科技有限公司 The magnetron sputtering that quality of forming film can be improved prepares the system of ito thin film
CN108660428A (en) * 2018-06-22 2018-10-16 广东腾胜真空技术工程有限公司 Annular automatic film coating production equipment with air heating module
CN109207966A (en) * 2018-10-23 2019-01-15 杭州海莱德智能科技有限公司 A kind of building block system panel PECVD coating system

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103469160A (en) * 2013-08-26 2013-12-25 莫儒就 Special production equipment for far infrared energy heating tube
CN103469159A (en) * 2013-08-26 2013-12-25 莫儒就 Special production equipment for far infrared energy heating panel
CN103469159B (en) * 2013-08-26 2015-07-08 广东太阳之约健康科技有限公司 Special production equipment for far infrared energy heating panel
CN103774107A (en) * 2014-01-25 2014-05-07 江西沃格光电股份有限公司 Sputter coating method
CN106119803A (en) * 2016-08-24 2016-11-16 肇庆市前沿真空设备有限公司 A kind of vacuum coating equipment
CN106244996A (en) * 2016-09-22 2016-12-21 铜陵市铜创电子科技有限公司 A kind of metallized film processing is with thickening coating apparatus
CN106244996B (en) * 2016-09-22 2018-09-21 铜陵市铜创电子科技有限公司 A kind of metallized film processing thickening coating apparatus
CN107043915A (en) * 2017-04-27 2017-08-15 柳州豪祥特科技有限公司 The system that magnetron sputtering prepares ito thin film
CN107142452A (en) * 2017-04-27 2017-09-08 柳州豪祥特科技有限公司 The magnetron sputtering that quality of forming film can be improved prepares the system of ito thin film
CN107043916A (en) * 2017-04-27 2017-08-15 柳州豪祥特科技有限公司 It is easy to the magnetron sputtering of maintaining to prepare the system of ito thin film
CN107142452B (en) * 2017-04-27 2019-07-23 柳州豪祥特科技有限公司 The magnetron sputtering that can be improved quality of forming film prepares the system of ito thin film
CN107043916B (en) * 2017-04-27 2019-08-02 柳州豪祥特科技有限公司 The system that the magnetron sputtering of maintenance convenient for safeguarding prepares ito thin film
CN108660428A (en) * 2018-06-22 2018-10-16 广东腾胜真空技术工程有限公司 Annular automatic film coating production equipment with air heating module
CN109207966A (en) * 2018-10-23 2019-01-15 杭州海莱德智能科技有限公司 A kind of building block system panel PECVD coating system

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