TWI906182B - 搬運機器人 - Google Patents

搬運機器人

Info

Publication number
TWI906182B
TWI906182B TW114119029A TW114119029A TWI906182B TW I906182 B TWI906182 B TW I906182B TW 114119029 A TW114119029 A TW 114119029A TW 114119029 A TW114119029 A TW 114119029A TW I906182 B TWI906182 B TW I906182B
Authority
TW
Taiwan
Prior art keywords
motor
arm
hand
shaft
hollow shaft
Prior art date
Application number
TW114119029A
Other languages
English (en)
Chinese (zh)
Other versions
TW202533925A (zh
Inventor
實政泰樹
渡邉亮介
原田修
小宮路修
柿原正伸
本田祐規
Original Assignee
日商安川電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商安川電機股份有限公司 filed Critical 日商安川電機股份有限公司
Publication of TW202533925A publication Critical patent/TW202533925A/zh
Application granted granted Critical
Publication of TWI906182B publication Critical patent/TWI906182B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B25J19/0041—Means for supplying energy to the end effector arranged within the different robot elements having rotary connection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0084—Program-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1602—Program controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1682—Dual arm manipulator; Coordination of several manipulators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Fuzzy Systems (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
TW114119029A 2022-05-27 2023-05-26 搬運機器人 TWI906182B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-087041 2022-05-27
JP2022087041A JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム

Publications (2)

Publication Number Publication Date
TW202533925A TW202533925A (zh) 2025-09-01
TWI906182B true TWI906182B (zh) 2025-11-21

Family

ID=88857109

Family Applications (2)

Application Number Title Priority Date Filing Date
TW114119029A TWI906182B (zh) 2022-05-27 2023-05-26 搬運機器人
TW112119765A TWI887663B (zh) 2022-05-27 2023-05-26 搬運機器人以及機器人系統

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW112119765A TWI887663B (zh) 2022-05-27 2023-05-26 搬運機器人以及機器人系統

Country Status (5)

Country Link
US (1) US12304067B2 (https=)
JP (2) JP7636369B2 (https=)
KR (2) KR102869228B1 (https=)
CN (1) CN117124355A (https=)
TW (2) TWI906182B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7785046B2 (ja) 2023-07-06 2025-12-12 株式会社安川電機 ロボット
TWI911855B (zh) * 2024-08-15 2026-01-11 弘景興業有限公司 運載裝置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9202733B2 (en) * 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
US20200230819A1 (en) * 2019-01-21 2020-07-23 Tokyo Electron Limited Transfer apparatus
CN113442162A (zh) * 2020-03-26 2021-09-28 精工爱普生株式会社 机器人及机器人系统

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2750771B2 (ja) * 1990-03-28 1998-05-13 日本真空技術株式会社 多関節搬送装置
JP2690450B2 (ja) * 1993-10-28 1997-12-10 株式会社フジキカイ 物品箱詰め装置
JPH1133947A (ja) * 1997-07-23 1999-02-09 Kokusai Electric Co Ltd ２軸回転駆動装置
JP4456725B2 (ja) * 2000-05-24 2010-04-28 株式会社ダイヘン 搬送装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP4227298B2 (ja) * 1999-12-02 2009-02-18 ローツェ株式会社 搬送用ロボット
JP2001347477A (ja) 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
AU2002327249A1 (en) * 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2007016847A (ja) * 2005-07-06 2007-01-25 Ntn Corp インホイールモータの軸受装置
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US9186799B2 (en) 2011-07-13 2015-11-17 Brooks Automation, Inc. Compact direct drive spindle
JP2013158849A (ja) * 2012-02-01 2013-08-19 Yaskawa Electric Corp ロボット
JP5729319B2 (ja) * 2012-02-01 2015-06-03 株式会社安川電機 ロボット
KR101400241B1 (ko) * 2012-07-13 2014-05-28 주식회사 아모텍 고정 마그넷을 갖는 액시얼 갭형 모터
WO2014085479A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
US10780586B2 (en) * 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
CN106463438B (zh) 2014-01-28 2019-09-10 布鲁克斯自动化公司 基板运输设备
JP6559976B2 (ja) 2015-03-03 2019-08-14 川崎重工業株式会社 基板搬送ロボットおよび基板処理システム
US10381257B2 (en) * 2015-08-31 2019-08-13 Kawasaki Jukogyo Kabushiki Kaisha Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US10421196B2 (en) * 2017-07-26 2019-09-24 Daihen Corporation Transfer apparatus
JP7078479B2 (ja) * 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
US10391640B1 (en) * 2018-09-11 2019-08-27 Kawasaki Jukogyo Kabushiki Kaisha Robot
KR102166829B1 (ko) 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈
JP7349894B2 (ja) * 2019-12-13 2023-09-25 住友重機械工業株式会社 駆動装置
JP2022069822A (ja) * 2020-10-26 2022-05-12 セイコーエプソン株式会社 モーター及びロボット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9202733B2 (en) * 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
US20200230819A1 (en) * 2019-01-21 2020-07-23 Tokyo Electron Limited Transfer apparatus
CN113442162A (zh) * 2020-03-26 2021-09-28 精工爱普生株式会社 机器人及机器人系统

Also Published As

Publication number Publication date
JP2025067944A (ja) 2025-04-24
US12304067B2 (en) 2025-05-20
TW202346040A (zh) 2023-12-01
CN117124355A (zh) 2023-11-28
KR20250152037A (ko) 2025-10-22
JP7636369B2 (ja) 2025-02-26
TW202533925A (zh) 2025-09-01
KR102869228B1 (ko) 2025-10-14
US20230381948A1 (en) 2023-11-30
JP2023174279A (ja) 2023-12-07
KR20230165698A (ko) 2023-12-05
TWI887663B (zh) 2025-06-21

Similar Documents

Publication Publication Date Title
TWI906182B (zh) 搬運機器人
CN104812534B (zh) 马达模块、多轴马达驱动组件、多轴机械手设备及电子装置制造系统与方法
CN110712195A (zh) 运送机器人和机器人系统
KR101850214B1 (ko) 반송 시스템 및 반송 방법
CN104810314A (zh) 工业用机器人
JPH10233424A (ja) ハンドリング用ロボット
CN116061200A (zh) 基于直接驱动马达的晶片传递机器人设备
JP7272075B2 (ja) エンコーダー、モーター及びロボット
JP2022113696A (ja) 搬送ロボットおよびロボットシステム
TWI512869B (zh) 具有一體形成於室壁之馬達之基板處理裝置
JP2017213636A (ja) 多関節ロボット
US20250175052A1 (en) Axial gap motor, robot, and robot system
US20250175045A1 (en) Axial gap motor, robot, and robot system
JPWO2015001602A1 (ja) ロボット、ロボットのアーム構造および駆動装置
KR102120791B1 (ko) 로봇 암의 하박 구조체
JP2001009770A (ja) 同芯軸型モータによるｄｄロボット
JP2021103925A (ja) ギヤドモータ
JP2008167569A (ja) トルクモータ部材の位置決め用実装構造
JP2005096076A (ja) ハンドリング用ロボット