CN117124355A - 搬运机器人以及机器人系统 - Google Patents

搬运机器人以及机器人系统 Download PDF

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Publication number
CN117124355A
CN117124355A CN202310591697.3A CN202310591697A CN117124355A CN 117124355 A CN117124355 A CN 117124355A CN 202310591697 A CN202310591697 A CN 202310591697A CN 117124355 A CN117124355 A CN 117124355A
Authority
CN
China
Prior art keywords
motor
hand
arm
transfer robot
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310591697.3A
Other languages
English (en)
Chinese (zh)
Inventor
实政泰树
渡边亮介
原田修
小宫路修
柿原正伸
本田祐规
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Publication of CN117124355A publication Critical patent/CN117124355A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B25J19/0041—Means for supplying energy to the end effector arranged within the different robot elements having rotary connection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0084—Program-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1602—Program controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1682—Dual arm manipulator; Coordination of several manipulators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Fuzzy Systems (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
CN202310591697.3A 2022-05-27 2023-05-24 搬运机器人以及机器人系统 Pending CN117124355A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022087041A JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム
JP2022-087041 2022-05-27

Publications (1)

Publication Number Publication Date
CN117124355A true CN117124355A (zh) 2023-11-28

Family

ID=88857109

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310591697.3A Pending CN117124355A (zh) 2022-05-27 2023-05-24 搬运机器人以及机器人系统

Country Status (5)

Country Link
US (1) US12304067B2 (https=)
JP (2) JP7636369B2 (https=)
KR (2) KR102869228B1 (https=)
CN (1) CN117124355A (https=)
TW (2) TWI887663B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7785046B2 (ja) 2023-07-06 2025-12-12 株式会社安川電機 ロボット
TWI911855B (zh) * 2024-08-15 2026-01-11 弘景興業有限公司 運載裝置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07125706A (ja) * 1993-10-28 1995-05-16 Fuji Mach Co Ltd 物品箱詰め装置
JPH1133947A (ja) * 1997-07-23 1999-02-09 Kokusai Electric Co Ltd ２軸回転駆動装置
JP2001332599A (ja) * 2000-05-24 2001-11-30 Daihen Corp 搬送装置
JP2002059386A (ja) * 1999-12-02 2002-02-26 Komatsu Ltd 搬送用ロボット
JP2007016847A (ja) * 2005-07-06 2007-01-25 Ntn Corp インホイールモータの軸受装置
CN107534007A (zh) * 2015-03-03 2018-01-02 川崎重工业株式会社 衬底搬送机器人及衬底处理系统
CN112994364A (zh) * 2019-12-13 2021-06-18 住友重机械工业株式会社 驱动装置
US20220131452A1 (en) * 2020-10-26 2022-04-28 Seiko Epson Corporation Motor And Robot

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2750771B2 (ja) * 1990-03-28 1998-05-13 日本真空技術株式会社 多関節搬送装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2001347477A (ja) 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
US6737826B2 (en) * 2001-07-13 2004-05-18 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US9186799B2 (en) 2011-07-13 2015-11-17 Brooks Automation, Inc. Compact direct drive spindle
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
JP5729319B2 (ja) * 2012-02-01 2015-06-03 株式会社安川電機 ロボット
JP2013158849A (ja) * 2012-02-01 2013-08-19 Yaskawa Electric Corp ロボット
KR101400241B1 (ko) * 2012-07-13 2014-05-28 주식회사 아모텍 고정 마그넷을 갖는 액시얼 갭형 모터
US9742250B2 (en) * 2012-11-30 2017-08-22 Applied Materials, Inc. Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
US10780586B2 (en) * 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
KR102402324B1 (ko) 2014-01-28 2022-05-26 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
US10381257B2 (en) * 2015-08-31 2019-08-13 Kawasaki Jukogyo Kabushiki Kaisha Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US10421196B2 (en) * 2017-07-26 2019-09-24 Daihen Corporation Transfer apparatus
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
US10391640B1 (en) * 2018-09-11 2019-08-27 Kawasaki Jukogyo Kabushiki Kaisha Robot
JP7202902B2 (ja) 2019-01-21 2023-01-12 東京エレクトロン株式会社 搬送装置
KR102166829B1 (ko) 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈
JP2021158751A (ja) 2020-03-26 2021-10-07 セイコーエプソン株式会社 ロボット及びロボットシステム

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07125706A (ja) * 1993-10-28 1995-05-16 Fuji Mach Co Ltd 物品箱詰め装置
JPH1133947A (ja) * 1997-07-23 1999-02-09 Kokusai Electric Co Ltd ２軸回転駆動装置
JP2002059386A (ja) * 1999-12-02 2002-02-26 Komatsu Ltd 搬送用ロボット
JP2001332599A (ja) * 2000-05-24 2001-11-30 Daihen Corp 搬送装置
JP2007016847A (ja) * 2005-07-06 2007-01-25 Ntn Corp インホイールモータの軸受装置
CN107534007A (zh) * 2015-03-03 2018-01-02 川崎重工业株式会社 衬底搬送机器人及衬底处理系统
CN112994364A (zh) * 2019-12-13 2021-06-18 住友重机械工业株式会社 驱动装置
US20220131452A1 (en) * 2020-10-26 2022-04-28 Seiko Epson Corporation Motor And Robot

Also Published As

Publication number Publication date
US20230381948A1 (en) 2023-11-30
JP7636369B2 (ja) 2025-02-26
KR20250152037A (ko) 2025-10-22
JP2023174279A (ja) 2023-12-07
TW202346040A (zh) 2023-12-01
TW202533925A (zh) 2025-09-01
KR20230165698A (ko) 2023-12-05
US12304067B2 (en) 2025-05-20
TWI887663B (zh) 2025-06-21
TWI906182B (zh) 2025-11-21
KR102869228B1 (ko) 2025-10-14
JP2025067944A (ja) 2025-04-24

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