TWI799604B - 工件加工方法 - Google Patents
工件加工方法 Download PDFInfo
- Publication number
- TWI799604B TWI799604B TW108121271A TW108121271A TWI799604B TW I799604 B TWI799604 B TW I799604B TW 108121271 A TW108121271 A TW 108121271A TW 108121271 A TW108121271 A TW 108121271A TW I799604 B TWI799604 B TW I799604B
- Authority
- TW
- Taiwan
- Prior art keywords
- processing method
- workpiece processing
- workpiece
- processing
- Prior art date
Links
- 238000003672 processing method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018118692A JP7068064B2 (ja) | 2018-06-22 | 2018-06-22 | 被加工物の加工方法 |
JP2018-118692 | 2018-06-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202002093A TW202002093A (zh) | 2020-01-01 |
TWI799604B true TWI799604B (zh) | 2023-04-21 |
Family
ID=68968867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108121271A TWI799604B (zh) | 2018-06-22 | 2019-06-19 | 工件加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7068064B2 (zh) |
KR (1) | KR20200000337A (zh) |
CN (1) | CN110634736B (zh) |
TW (1) | TWI799604B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111403315B (zh) * | 2020-03-03 | 2022-03-18 | 上海华力集成电路制造有限公司 | 晶圆切边装置和方法 |
USD969050S1 (en) * | 2020-12-03 | 2022-11-08 | Ralph Preston Kirtland | Vehicle bumper brace |
JP2022139624A (ja) | 2021-03-12 | 2022-09-26 | 株式会社ディスコ | 加工装置及び加工方法 |
CN115132568A (zh) * | 2021-03-25 | 2022-09-30 | 三美电机株式会社 | 半导体装置的制造方法 |
CN113510609B (zh) * | 2021-07-12 | 2023-09-08 | 长鑫存储技术有限公司 | 晶圆以及晶圆的处理方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6004405A (en) * | 1997-03-11 | 1999-12-21 | Super Silicon Crystal Research Institute Corp. | Wafer having a laser mark on chamfered edge |
TW200807600A (en) * | 2006-06-09 | 2008-02-01 | Disco Corp | Sensing mechanism for crystal orientation indication mark of semiconductor wafer |
TW200935575A (en) * | 2007-09-04 | 2009-08-16 | Disco Corp | Wafer |
JP2013115187A (ja) * | 2011-11-28 | 2013-06-10 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
TWI496205B (zh) * | 2009-04-15 | 2015-08-11 | Daito Electron Co Ltd | 晶圓斜角加工方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4354769B2 (ja) * | 2003-09-19 | 2009-10-28 | 株式会社ディスコ | ウェーハの研磨方法 |
JP5343400B2 (ja) * | 2008-05-22 | 2013-11-13 | 株式会社Sumco | 半導体ウェーハの製造方法 |
-
2018
- 2018-06-22 JP JP2018118692A patent/JP7068064B2/ja active Active
-
2019
- 2019-05-27 KR KR1020190061724A patent/KR20200000337A/ko active IP Right Grant
- 2019-06-17 CN CN201910519907.1A patent/CN110634736B/zh active Active
- 2019-06-19 TW TW108121271A patent/TWI799604B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6004405A (en) * | 1997-03-11 | 1999-12-21 | Super Silicon Crystal Research Institute Corp. | Wafer having a laser mark on chamfered edge |
TW200807600A (en) * | 2006-06-09 | 2008-02-01 | Disco Corp | Sensing mechanism for crystal orientation indication mark of semiconductor wafer |
TW200935575A (en) * | 2007-09-04 | 2009-08-16 | Disco Corp | Wafer |
TWI496205B (zh) * | 2009-04-15 | 2015-08-11 | Daito Electron Co Ltd | 晶圓斜角加工方法 |
JP2013115187A (ja) * | 2011-11-28 | 2013-06-10 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
Also Published As
Publication number | Publication date |
---|---|
JP7068064B2 (ja) | 2022-05-16 |
CN110634736B (zh) | 2023-08-04 |
KR20200000337A (ko) | 2020-01-02 |
CN110634736A (zh) | 2019-12-31 |
TW202002093A (zh) | 2020-01-01 |
JP2019220632A (ja) | 2019-12-26 |
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