TWI799415B - Semiconductor device manufacturing method and expandable adhesive tape - Google Patents

Semiconductor device manufacturing method and expandable adhesive tape Download PDF

Info

Publication number
TWI799415B
TWI799415B TW107117345A TW107117345A TWI799415B TW I799415 B TWI799415 B TW I799415B TW 107117345 A TW107117345 A TW 107117345A TW 107117345 A TW107117345 A TW 107117345A TW I799415 B TWI799415 B TW I799415B
Authority
TW
Taiwan
Prior art keywords
semiconductor device
adhesive tape
device manufacturing
expandable adhesive
expandable
Prior art date
Application number
TW107117345A
Other languages
Chinese (zh)
Other versions
TW201901775A (en
Inventor
本田一尊
鈴木直也
乃万裕一
Original Assignee
日商昭和電工材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商昭和電工材料股份有限公司 filed Critical 日商昭和電工材料股份有限公司
Publication of TW201901775A publication Critical patent/TW201901775A/en
Application granted granted Critical
Publication of TWI799415B publication Critical patent/TWI799415B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/96Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dicing (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW107117345A 2017-05-22 2018-05-22 Semiconductor device manufacturing method and expandable adhesive tape TWI799415B (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2017101127 2017-05-22
JP2017-101127 2017-05-22
JP2017-101122 2017-05-22
JP2017101120 2017-05-22
JP2017101130 2017-05-22
JP2017101125 2017-05-22
JP2017101122 2017-05-22
JP2017-101120 2017-05-22
JP2017-101130 2017-05-22
JP2017-101125 2017-05-22

Publications (2)

Publication Number Publication Date
TW201901775A TW201901775A (en) 2019-01-01
TWI799415B true TWI799415B (en) 2023-04-21

Family

ID=64395633

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107117345A TWI799415B (en) 2017-05-22 2018-05-22 Semiconductor device manufacturing method and expandable adhesive tape

Country Status (5)

Country Link
JP (1) JP7173000B2 (en)
KR (1) KR102571926B1 (en)
CN (1) CN110637355B (en)
TW (1) TWI799415B (en)
WO (1) WO2018216621A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7438990B2 (en) * 2019-01-31 2024-02-27 リンテック株式会社 Expanding method and semiconductor device manufacturing method
WO2020170366A1 (en) * 2019-02-20 2020-08-27 日立化成株式会社 Manufacturing method for semiconductor device, and expand tape
KR20210019199A (en) * 2019-08-12 2021-02-22 (주)라이타이저 Method for manufacturing display apparatus and display apparatus
KR102203639B1 (en) * 2019-08-26 2021-01-15 (주)라이타이저 Method for manufacturing display apparatus and display apparatus
JP7389331B2 (en) * 2019-10-31 2023-11-30 日亜化学工業株式会社 Manufacturing method of light emitting device
WO2021102877A1 (en) * 2019-11-29 2021-06-03 重庆康佳光电技术研究院有限公司 Mass transfer carrier plate, mass transfer device, and method for same
JP7243606B2 (en) * 2019-12-10 2023-03-22 Jsr株式会社 Method for manufacturing display device, method for transferring chip component, and radiation-sensitive composition
JP7459576B2 (en) * 2020-03-12 2024-04-02 株式会社レゾナック Panel and manufacturing method thereof, panel manufacturing member and manufacturing method thereof, and semiconductor chip
US20230207334A1 (en) * 2020-03-27 2023-06-29 Showa Denko Materials Co., Ltd. Production method for semiconductor packages
JP7415735B2 (en) * 2020-03-27 2024-01-17 株式会社レゾナック Manufacturing method for semiconductor packages
CN113571461A (en) * 2021-07-02 2021-10-29 矽磐微电子(重庆)有限公司 Method for forming chip packaging structure
WO2023032163A1 (en) * 2021-09-03 2023-03-09 株式会社レゾナック Method for producing semiconductor device, provisional fixation material, and application of provisional fixation material for production of semiconductor device
WO2023047592A1 (en) * 2021-09-27 2023-03-30 株式会社レゾナック Method for manufacturing semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014036060A (en) * 2012-08-07 2014-02-24 Sharp Corp Method and apparatus for manufacturing semiconductor device
JP2017076748A (en) * 2015-10-16 2017-04-20 リンテック株式会社 Adhesive sheet, and method for manufacturing semiconductor device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3299601B2 (en) * 1993-07-27 2002-07-08 リンテック株式会社 Adhesive sheet for attaching wafer
JP5582836B2 (en) * 2010-03-26 2014-09-03 古河電気工業株式会社 Dicing die bonding tape
JP5670249B2 (en) * 2011-04-14 2015-02-18 日東電工株式会社 Light emitting element transfer sheet manufacturing method, light emitting device manufacturing method, light emitting element transfer sheet, and light emitting device
CN108807253B (en) * 2012-12-26 2023-05-02 株式会社力森诺科 Expansion method, semiconductor device manufacturing method, and semiconductor device
JP2015177060A (en) * 2014-03-14 2015-10-05 株式会社東芝 Semiconductor manufacturing apparatus and semiconductor device manufacturing method
WO2016031684A1 (en) * 2014-08-29 2016-03-03 住友ベークライト株式会社 Production method for semiconductor device, and semiconductor device
JP6482865B2 (en) * 2014-12-26 2019-03-13 リンテック株式会社 Manufacturing method of semiconductor device
JP2017005160A (en) 2015-06-12 2017-01-05 古河電気工業株式会社 Tape for wafer processing
JP2017045935A (en) * 2015-08-28 2017-03-02 日立化成株式会社 Manufacturing method for semiconductor device using adhesive sheet and dicing tape

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014036060A (en) * 2012-08-07 2014-02-24 Sharp Corp Method and apparatus for manufacturing semiconductor device
JP2017076748A (en) * 2015-10-16 2017-04-20 リンテック株式会社 Adhesive sheet, and method for manufacturing semiconductor device

Also Published As

Publication number Publication date
JPWO2018216621A1 (en) 2020-03-26
KR102571926B1 (en) 2023-08-28
WO2018216621A1 (en) 2018-11-29
CN110637355B (en) 2023-12-05
TW201901775A (en) 2019-01-01
KR20200010203A (en) 2020-01-30
CN110637355A (en) 2019-12-31
JP7173000B2 (en) 2022-11-16

Similar Documents

Publication Publication Date Title
TWI799415B (en) Semiconductor device manufacturing method and expandable adhesive tape
DK3760174T3 (en) A WOUND PAD AND AN ADHESIVE ELEMENT COMPRISING A WOUND PAD
KR20180084975A (en) Display device and manufacturing method thereof
SG10201700013VA (en) Semiconductor memory device and method for manufacturing same
EP2985328A4 (en) Protective tape and semiconductor device manufacturing method using same
JP2017199900A5 (en) Method for manufacturing semiconductor device
SG11201601300TA (en) Adhesive film and method for manufacturing semiconductor device
SG11202012961SA (en) Semiconductor processing adhesive tape and method of manufacturing semiconductor device
JP2016027652A5 (en) Semiconductor device and electronic device
JP2017130655A5 (en) Semiconductor devices and electronic equipment
KR101748949B9 (en) semiconductor memory device and method of fabricating the same
TWI800491B (en) Coating device and coating method
GB2573215B (en) Semiconductor manufacturing method and semiconductor manufacturing device
SG10201905840VA (en) Semiconductor device and manufacturing method thereof
HK1252326A1 (en) Semiconductor device and manufacturing method of the same
DK3426934T3 (en) Mounting devices and methods
HK1251718A1 (en) Semiconductor device and manufacturing method thereof
KR20180084950A (en) Flexible display device and method of manufacturing the same
HK1246002A1 (en) Semiconductor device and manufacturing method of the same
GB201717453D0 (en) Thin film transistor array substrate and manufacturing method thereof
TWI799375B (en) Film for manufacturing parts and method for manufacturing parts
SG11202007053XA (en) Manufacturing method for semiconductor device, and adhesive film
TWI799445B (en) Adhesive film for circuit connection, manufacturing method thereof, method of manufacturing circuit connection structure, and adhesive film storage set
TWI800509B (en) Device Wafer Manufacturing Method
TWI799419B (en) Retardation film and manufacturing method