SG11202007053XA - Manufacturing method for semiconductor device, and adhesive film - Google Patents

Manufacturing method for semiconductor device, and adhesive film

Info

Publication number
SG11202007053XA
SG11202007053XA SG11202007053XA SG11202007053XA SG11202007053XA SG 11202007053X A SG11202007053X A SG 11202007053XA SG 11202007053X A SG11202007053X A SG 11202007053XA SG 11202007053X A SG11202007053X A SG 11202007053XA SG 11202007053X A SG11202007053X A SG 11202007053XA
Authority
SG
Singapore
Prior art keywords
manufacturing
semiconductor device
adhesive film
adhesive
film
Prior art date
Application number
SG11202007053XA
Inventor
Yui KUNITO
Kazuhiro Yamamoto
Kouhei Taniguchi
Original Assignee
Hitachi Chemical Com Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Com Ltd filed Critical Hitachi Chemical Com Ltd
Publication of SG11202007053XA publication Critical patent/SG11202007053XA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83191Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
SG11202007053XA 2018-01-30 2019-01-29 Manufacturing method for semiconductor device, and adhesive film SG11202007053XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018013752A JP6977588B2 (en) 2018-01-30 2018-01-30 Manufacturing method of semiconductor devices and adhesive film
PCT/JP2019/003010 WO2019151260A1 (en) 2018-01-30 2019-01-29 Manufacturing method for semiconductor device, and adhesive film

Publications (1)

Publication Number Publication Date
SG11202007053XA true SG11202007053XA (en) 2020-08-28

Family

ID=67479794

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202007053XA SG11202007053XA (en) 2018-01-30 2019-01-29 Manufacturing method for semiconductor device, and adhesive film

Country Status (6)

Country Link
JP (1) JP6977588B2 (en)
KR (1) KR102602489B1 (en)
CN (1) CN111656500B (en)
SG (1) SG11202007053XA (en)
TW (1) TWI791751B (en)
WO (1) WO2019151260A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7298404B2 (en) * 2019-09-06 2023-06-27 株式会社レゾナック Semiconductor device manufacturing method
JP7427480B2 (en) 2020-03-09 2024-02-05 キオクシア株式会社 semiconductor equipment
JP2022036756A (en) 2020-08-24 2022-03-08 キオクシア株式会社 Semiconductor device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1209948C (en) * 2002-07-17 2005-07-06 威盛电子股份有限公司 Integrated module board with embedded IC chip and passive element and its production method
JP2004217757A (en) * 2003-01-14 2004-08-05 Hitachi Chem Co Ltd Adhesive sheet with cushionable cover film and semiconductor device and method for producing the semiconductor device
US7375370B2 (en) 2004-08-05 2008-05-20 The Trustees Of Princeton University Stacked organic photosensitive devices
US20100112272A1 (en) * 2006-10-06 2010-05-06 Sumitomo Bakelite Co., Ltd. Film for use in manufacturing semiconductor devices, method for producing the film and semiconductor device
JP5003090B2 (en) * 2006-10-06 2012-08-15 住友ベークライト株式会社 Adhesive film and semiconductor device using the same
JP5476673B2 (en) * 2007-04-02 2014-04-23 日立化成株式会社 Adhesive sheet
JP5045745B2 (en) * 2007-04-05 2012-10-10 日立化成工業株式会社 Semiconductor chip manufacturing method, semiconductor adhesive film, and composite sheet using the same
KR20100065185A (en) * 2007-10-09 2010-06-15 히다치 가세고교 가부시끼가이샤 Method for producing semiconductor chip with adhesive film, adhesive film for semiconductor used in the method, and method for producing semiconductor device
JP4994429B2 (en) * 2008-08-04 2012-08-08 日東電工株式会社 Dicing die bond film
JP2010254763A (en) * 2009-04-22 2010-11-11 Hitachi Chem Co Ltd Adhesive composition, method for manufacturing the same, adhesive sheet using this, integrated sheet, method for manufacturing the same, and semiconductor device and method for manufacturing the same
JP2012089630A (en) * 2010-10-18 2012-05-10 Sumitomo Bakelite Co Ltd Film for semiconductor and semiconductor device
JP5736899B2 (en) * 2011-03-28 2015-06-17 日立化成株式会社 Film adhesive, adhesive sheet and semiconductor device
JP5834662B2 (en) * 2011-09-13 2015-12-24 日立化成株式会社 Film adhesive, adhesive sheet, semiconductor device and manufacturing method thereof
CN106024654B (en) * 2012-03-08 2019-07-02 日立化成株式会社 Semiconductor device
JP5924145B2 (en) * 2012-06-12 2016-05-25 日立化成株式会社 Film adhesive, adhesive sheet, and method for manufacturing semiconductor device
JP6322026B2 (en) * 2014-03-31 2018-05-09 日東電工株式会社 Die bond film, die bond film with dicing sheet, semiconductor device, and method for manufacturing semiconductor device
JP6670177B2 (en) * 2016-05-30 2020-03-18 日東電工株式会社 Die bond film, dicing die bond film, and method of manufacturing semiconductor device
JP6222395B1 (en) * 2017-08-07 2017-11-01 日立化成株式会社 Film adhesive and dicing die bonding integrated adhesive sheet

Also Published As

Publication number Publication date
CN111656500A (en) 2020-09-11
JP6977588B2 (en) 2021-12-08
CN111656500B (en) 2023-08-15
WO2019151260A1 (en) 2019-08-08
KR102602489B1 (en) 2023-11-16
TWI791751B (en) 2023-02-11
JP2019134020A (en) 2019-08-08
TW201941314A (en) 2019-10-16
KR20200111703A (en) 2020-09-29

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