TWI800491B - Coating device and coating method - Google Patents

Coating device and coating method Download PDF

Info

Publication number
TWI800491B
TWI800491B TW106134138A TW106134138A TWI800491B TW I800491 B TWI800491 B TW I800491B TW 106134138 A TW106134138 A TW 106134138A TW 106134138 A TW106134138 A TW 106134138A TW I800491 B TWI800491 B TW I800491B
Authority
TW
Taiwan
Prior art keywords
coating
coating method
coating device
Prior art date
Application number
TW106134138A
Other languages
Chinese (zh)
Other versions
TW201828397A (en
Inventor
有川徹
Original Assignee
日商東京應化工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京應化工業股份有限公司 filed Critical 日商東京應化工業股份有限公司
Publication of TW201828397A publication Critical patent/TW201828397A/en
Application granted granted Critical
Publication of TWI800491B publication Critical patent/TWI800491B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
TW106134138A 2016-12-20 2017-10-03 Coating device and coating method TWI800491B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016246143A JP6809895B2 (en) 2016-12-20 2016-12-20 Coating device and coating method
JP2016-246143 2016-12-20

Publications (2)

Publication Number Publication Date
TW201828397A TW201828397A (en) 2018-08-01
TWI800491B true TWI800491B (en) 2023-05-01

Family

ID=62714451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106134138A TWI800491B (en) 2016-12-20 2017-10-03 Coating device and coating method

Country Status (3)

Country Link
JP (1) JP6809895B2 (en)
KR (1) KR102358070B1 (en)
TW (1) TWI800491B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108972405B (en) * 2018-07-03 2021-11-09 Tcl王牌电器(惠州)有限公司 Positioning device
JP7296536B2 (en) * 2019-05-09 2023-06-23 Ａｉメカテック株式会社 SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE SUPPORTING METHOD
JP7329997B2 (en) * 2019-07-09 2023-08-21 日本特殊陶業株式会社 Electrostatic chuck device
JP7368263B2 (en) * 2020-02-14 2023-10-24 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing equipment and substrate processing method
JP7264857B2 (en) * 2020-09-18 2023-04-25 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE HOLDING DEVICE AND SUBSTRATE HOLDING METHOD
KR102397888B1 (en) * 2021-07-09 2022-05-13 김재우 Electric vehicle battery case powder coating and suction system
CN114873218A (en) * 2022-05-24 2022-08-09 珠海格力智能装备有限公司 Automatic evaporator gluing equipment and method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274148A (en) * 1995-01-30 1996-10-18 Sony Corp Device and method for fixing substrate
JP2013069969A (en) * 2011-09-26 2013-04-18 Dainippon Screen Mfg Co Ltd Coating device
TW201341064A (en) * 2012-02-15 2013-10-16 Tokyo Electron Ltd Substrate processing apparatus and substrate processing method
TW201507058A (en) * 2013-07-18 2015-02-16 Nsk Technology Co Ltd Substrate holding device, abutting exposure device, and proximal exposure device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5977042B2 (en) * 2012-02-27 2016-08-24 株式会社Ｓｃｒｅｅｎホールディングス Coating device, substrate holding device, and substrate holding method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274148A (en) * 1995-01-30 1996-10-18 Sony Corp Device and method for fixing substrate
JP2013069969A (en) * 2011-09-26 2013-04-18 Dainippon Screen Mfg Co Ltd Coating device
TW201341064A (en) * 2012-02-15 2013-10-16 Tokyo Electron Ltd Substrate processing apparatus and substrate processing method
TW201507058A (en) * 2013-07-18 2015-02-16 Nsk Technology Co Ltd Substrate holding device, abutting exposure device, and proximal exposure device

Also Published As

Publication number Publication date
TW201828397A (en) 2018-08-01
KR102358070B1 (en) 2022-02-03
KR20180071938A (en) 2018-06-28
JP6809895B2 (en) 2021-01-06
JP2018101676A (en) 2018-06-28

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