TWI751347B - Blade cover - Google Patents

Abstract

[Problem] The leakage of cutting fluid can be suppressed, and it can be manufactured inexpensively. [Solution] A blade cover including a cutting liquid supply nozzle (101) for supplying cutting liquid. The cutting fluid supply nozzle is provided with: a pipeline (110) for ejecting the cutting fluid; and a first block (107), a second block (108), and a holding means ( 113). The first block includes: a storage chamber (119) on the proximal end side of the storage conduit; and a first semi-cylindrical recess (123) extending in the extending direction of the storage chamber. The second block includes: a second semi-cylindrical recess (124) facing the first semi-cylindrical recess and having the same inner diameter as the pipe diameter; and a protrusion formed by protruding from the inner wall of the second semi-cylindrical recess Ministry (133). When the storage pipeline is placed in the storage chamber, and the pipeline is clamped by the first semi-cylindrical concave part and the second semi-cylindrical concave part by means of clamping means, the pipeline is deformed by the convex part and the pipeline is squeezed and extended, and the pipeline The base end side of the formed expanded sheet (S).

Description

Blade cover

The present invention relates to a blade cover provided with a cutting liquid supply nozzle for supplying cutting liquid to a cutting blade.

In the manufacturing process of a semiconductor element, a line to be divided is formed in a lattice shape on the surface of a substantially disc-shaped wafer, and an element or the like is formed in a region divided by the line to be divided. Then, the wafer is diced along the planned dividing line by the dicing device, and divided into individual semiconductor wafers. In the dicing process by a dicing device, a dicing blade rotating at a high speed is cut along a line where the wafer is to be divided. In the dicing process, the cutting fluid is supplied to the side surface of the cutting blade through the cutting fluid supply nozzle to clean the cutting debris, cool and lubricate the processed part, and the like.

In the dicing device, the dicing liquid supply nozzle is arranged on the blade cover formed by covering the dicing blade, and is parallel to the dicing direction of the dicing blade with the dicing blade sandwiched therebetween, and is parallel to the holding surface of the holding table holding the wafer. Pipeline configuration. In addition, the cutting liquid supply nozzle has a plurality of jetting ports arranged side by side in the cutting feeding direction, and the plurality of jetting ports jets the cutting liquid toward both side surfaces of the cutting blade in a direction perpendicular to the extending direction of the two pipelines.

As the cutting fluid supply nozzle in the dicing device, in addition to the type disclosed in Patent Document 1, which is integrally molded with a block-shaped blade cover, there is also a type disclosed in Patent Document 2, which circulates the cutting fluid. The type formed by connecting the pipeline to the blade cover. [Prior Art Documents] [Patent Documents]

[Patent Document 1] Japanese Patent Laid-Open No. 2010-46726 [Patent Document 2] Japanese Patent Laid-Open No. 2011-114220

[Problems to be Solved by the Invention] Although the cutting liquid supply nozzle of the former type is well secured to the blade cover, it requires a process for cutting the blade cover and the cutting liquid supply nozzle from a single piece, which increases the manufacturing cost. expensive.

On the other hand, the latter type of cutting fluid supply nozzle, which connects the tubular member to the blade cover, can be manufactured in an inexpensive manner more easily than the former type, but is prone to leakage of cutting fluid from its connection portion. In addition, work such as adjusting the pipeline to be parallel to the cutting feed direction is also required, which is complicated and likely to become a burden.

The present invention has been made in view of the above-mentioned points, and one of its objects is to provide a blade cover which can suppress leakage of cutting fluid and can be manufactured inexpensively without any work for adjusting the piping direction.

[Technical Means for Solving the Problem] A blade cover according to an aspect of the present invention is characterized in that it is disposed at the front end of a main shaft housing that rotatably supports a main shaft, covers a cutting blade attached to the main shaft, and includes a blade cover disposed for cutting A cutting liquid supply nozzle extending in the cutting feed direction of the blade so as to sandwich the cutting blade and supply the cutting liquid to both side surfaces of the cutting blade. In this cutting feed direction, the cutting fluid is supplied from one end portion, and the other end portion is provided with a sealing portion; the two first blocks and the second block sandwich the outer wall of one end side of the pipeline. and clamping means for clamping the pipeline with the first block body and the second block body; wherein the first block body is provided with: a cylindrical storage chamber having a predetermined length accommodated by an end of one side of the pipeline, and a bottom formed by an inner diameter larger than the diameter of the pipeline; a first semi-cylindrical recess extending in the extending direction of the storage chamber; and a supply path connecting the bottom of the storage chamber and the cutting fluid supply source, and the second block It has: a second semi-cylindrical concave part facing the first semi-cylindrical concave part and formed with the same inner diameter as the diameter of the pipeline; a convex part protruding from the inner wall of the second semi-cylindrical concave part, and the pipeline is accommodated in accommodating the chamber, and the end of one side of the pipeline is brought into contact with the bottom. By means of clamping means, the first semi-cylindrical recess of the first block and the second semi-cylindrical recess of the second block clamp the pipeline, and the second semi-cylindrical recess The convex part of the semi-cylindrical concave part deforms the pipe, and the pipe is pressed and extended, and an end part side of one side of the pipe accommodated in the storage chamber forms an expansion sheet.

According to this configuration, the pipeline can be sandwiched and held by the two blocks, and therefore, the manufacturing burden can be reduced compared to the conventional structure in which the blocks are integrally cut and molded, and the manufacturing cost can be reduced. In addition, the first block and the second block clamp the pipeline, so that the pipeline is deformed due to the convex portion, and the expansion sheet is also formed, so that the leakage of the cutting fluid in these connecting parts can be suppressed. In addition, since the relative position of the pipeline and each block can be fixed by clamping the pipeline, the adjustment work of the position and direction of the pipeline can be omitted, and the manufacturing cost can be reduced by reducing the work load.

The blade cover of the present invention may include: a first concave portion is formed in the first semi-cylindrical concave portion, a second concave portion is formed in the second semi-cylindrical concave portion, and when the first semi-cylindrical concave portion and the second semi-cylindrical concave portion are overlapped, the first concave portion is formed. The two concave portions face the first concave portion.

In addition, in the blade cover of the present invention, the pipeline may be provided with a concave portion corresponding to the convex portion.

[Effect of the Invention] According to the present invention, the expansion sheet can be formed by pressing and deforming the pipeline by the convex portion, so that the leakage of the cutting fluid can be suppressed, the pipeline adjustment work for forming the cutting fluid supply nozzle, etc. can be avoided, and the low cost way of manufacturing.

The present embodiment will be described below with reference to the drawings. FIG. 1 is a perspective view of a cutting device using a blade cover according to the present embodiment. In addition, the cutting apparatus concerning this embodiment is not limited to the structure shown in FIG. 1. FIG. The present invention can be applied to any dicing device as long as it is a dicing device capable of dicing a wafer with a dicing blade while supplying a dicing liquid from a blade cover. In addition, in the following figures, the front side in the X direction is referred to as the +X side, and the back side is referred to as the -X side; the front side in the Y direction is referred to as the +Y side, and the back side is referred to as the -Y side; the upper side in the Z direction is referred to as the +Z side , the lower side is called the -Z side.

As shown in FIG. 1 , the dicing apparatus 1 is configured such that the wafer W held by the chuck table 12 and the dicing means 14 are relatively moved, thereby dicing the wafer W. The wafer W is carried into the dicing apparatus 1 in a state supported by the annular frame F through the dicing tape T. Furthermore, the wafer W may be a semiconductor wafer such as silicon or gallium arsenide, or a wafer of optical elements such as ceramics, glass, or sapphire. In addition, the wafer is not limited to a round wafer, but may also be a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate.

The base 11 of the cutting device 1 is provided with a cutting feeding means 13 which cuts and feeds the chuck table 12 in the X direction. The cutting and feeding means 13 includes a pair of guide rails 31 arranged on the base 11 and parallel to the X direction, and a motor-driven X-axis table 32 slidably provided on the pair of guide rails 31 . A nut part, not shown, is formed on the back side of the X-axis base 32 , and the ball screw 33 is screwed to this nut part. Further, the drive motor 34 connected to one end of the ball screw 33 is rotationally driven, whereby the chuck table 12 is cut and fed in the X direction which is the cutting direction of the cutting blade 71 along the pair of guide rails 31 .

On the upper part of the X-axis table 32, the chuck table 12 holding the wafer W is provided so as to be rotatable around the Z-axis. The upper surface of the chuck table 12 is formed with a holding surface composed of a porous ceramic material, and the wafer W is attracted and held by the negative pressure generated by the holding surface. Four air-driven clamping parts 22 are provided around the chuck table 12 , and the annular frame F around the wafer W is clamped and fixed in four directions by the clamping parts 22 . The upper surface of the base 11 is provided with a gate-shaped standing wall portion 81 which is installed standing so as to straddle the movement route of the chuck table 12 .

The vertical wall portion 81 is provided with indexing feeding means 15 for indexing and feeding the cutting means 14 in the Y direction, and cutting feeding means 16 for cutting and feeding the cutting means 14 in the Z direction. The index feeding means 15 includes a pair of guide rails 51 arranged on the front surface of the vertical wall portion 81 and parallel to the Y direction, and a Y-axis table 52 slidably provided on the pair of guide rails 51 . The plunge feeding means 16 has a pair of guide rails 61 arranged on the Y-axis table 52 and parallel to the Z direction, and a Z-axis table 62 slidably provided on the pair of guide rails 61 . The dicing means 14 for dicing the wafer W is provided at the lower part of the Z-axis stage 62 .

Nut portions are formed on the rear sides of the Y-axis table 52 and the Z-axis table 62, respectively, and the ball screws 53 and 63 are screwed to these nut portions. A drive motor 64 is connected to one end of the ball screw 53 for the Y-axis stage 52 and the ball screw 63 for the Z-axis stage 62 (the drive motor for the Y-axis is not shown), respectively. The respective ball screws 53 and 63 are driven by the drive motor 64 to rotate, whereby the cutting means 14 is indexed and fed along the guide rail 51 in the Y direction perpendicular to the X direction, and the cutting means 14 approach and move away from the wafer along the guide rail 61. Plunge feed in the Z direction of W.

The cutting means 14 is configured by attaching a cutting blade 71 to the front end of a spindle 72 (refer to FIG. 2 ) protruding from the spindle housing 75 . The spindle housing 75 is provided with a motor (not shown) that rotates the spindle 72 while the spindle 72 serving as the rotation axis of the cutting blade 71 is rotatably supported. In addition, a blade cover 100 surrounding the dicing blade 71 is provided on the front end side of the spindle housing 75 so as to expose a region where the dicing blade 71 cuts into the wafer W. The blade cover 100 is provided with a dicing liquid supply nozzle 101 (omitted in FIG. 1 , please refer to FIG. 2 ), which supplies the dicing liquid to both sides of the dicing blade 71 of the dicing portion of the wafer W.

FIG. 2 is a schematic perspective view of the blade cover in this embodiment. As shown in FIG. 2 , the blade cover 100 includes a nozzle support block 103 that supports a pair of peripheral jet nozzles 102 on the -X side. In addition, the blade cover 100 includes a cover body 105 which covers substantially the upper half of the periphery of the cutting blade 71 and includes a pair of cutting liquid supply nozzles 101 covering the lower part from the +X side of the cover body 105 . Two sets of the cutting liquid supply nozzles 101 are provided so as to sandwich the cutting blades 71 therebetween, and have a plane-symmetric structure with the ZX plane as a plane of symmetry. The cutting fluid supply nozzle 101 includes: a first block 107 and a second block 108, which are arranged on the +X side of the cover body 105; and an L-shaped pipeline 110, which is connected to the first block 107, the second block Block 108 supports.

The pipeline 110 is formed of a metal material such as stainless steel. The pipeline 110 extends downward from each of the first block 107 and the second block 108 , partially bends in the middle, and extends in the cutting feeding direction (X direction) of the cutting blade 71 at the front end side. The piping 110 is provided at a predetermined distance from the side surface of the cutting blade 71 in the Y direction, and is arranged so that the cutting blade 71 is sandwiched by the piping 110 of the two sets of cutting fluid supply nozzles 101 . In the pipeline 110, a plurality of ejection ports 110a are formed in a row on a portion extending in the cutting and feeding direction. The upward base end (one end) of the pipeline 110 is connected to the cutting fluid supply source 120 (refer to FIG. 3 ) through the connecting portion 111 , and the cutting fluid supplied from the cutting fluid supply source 120 to the pipeline 110 is discharged from the ejection port 110 a squirting. Thereby, the cutting liquid can be supplied to both side surfaces of the cutting blade 71 from the ejection port 110a, and the cutting portion can be cooled, cleaned, and the like. In addition, the front end (the other end) of the pipeline 110 is closed as the sealing portion 110b, thereby preventing the occurrence of leakage of the cutting fluid.

Next, the structure of the cutting liquid supply nozzle 101 will be described with reference to FIG. 3 . FIG. 3 is a schematic exploded perspective view showing a main part of the cutting fluid supply nozzle in the present embodiment. Here, in the following description, among the two sets of cutting liquid supply nozzles 101 arranged in the Y direction, the cutting liquid nozzle 101 located on the -Y side will be described. In addition, the cutting fluid supply nozzle 101 located on the +Y side and the cutting fluid supply nozzle 101 located on the -Y side have a plane-symmetric structure, and the description thereof is omitted here.

As shown in FIG. 3 , the cutting fluid supply nozzle 101 is configured to sandwich the outer wall on the base end 110c side of the pipeline 110 from both sides in the Y direction by the two first blocks 107 and the second block 108 . The holding means 113 is held (clamped).

The first block 107 is provided in a shape including a rectangular parallelepiped block body 115 and a lower protrusion 116 . Among them, the block body 115 in the shape of a rectangular parallelepiped is provided with a connecting portion 111 at the in-plane center portion of the upper surface, and the lower protrusion 116 protrudes downward from a substantially half area on the +Y side of the lower surface 115a of the block body 115 .

In the block body 115 of the first block body 107 , a supply path 118 is formed which communicates with the connecting portion 111 and extends downward. A storage chamber 119 is formed between the lower end of the supply path 118 and the lower surface 115 a of the block body 115 . The housing chamber 119 is provided so as to open the lower surface 115a side of the block body 115 . The connection portion 111 is connected to a cutting fluid supply source 120 that supplies the cutting fluid through a pump or the like.

A female screw 118 a is formed on the upper end side of the supply path 118 so as to be capable of screwing with a male screw 111 a formed at the lower end of the connecting portion 111 . The supply path 118 is formed by a cylindrical inner wall surface whose inner diameter is smaller than the diameter of the pipe 110 . The storage chamber 119 is formed by a cylindrical inner wall surface having an inner diameter slightly larger than the diameter of the pipe 110 , and can accommodate a predetermined length from the base end 110 c side of the pipe 110 . The central axis positions of the supply path 118 and the storage chamber 119 are arranged on the same line, and a level difference is formed at the boundary position between the two due to the difference in diameter. Based on this level difference, a bottom portion (top surface) 119 a that is an inner wall surface in the upper portion of the storage chamber 119 is formed. An O-ring 121 is disposed between the bottom portion 119a of the housing chamber 119 and the base end 110c of the conduit 110 in order to maintain liquid-tightness. The supply path 118 communicates the bottom portion 119 a of the storage chamber 119 with the cutting fluid supply source 120 through the connection portion 111 .

The first semi-cylindrical recess 123 is formed on the vertical surface 116a on the -Y side of the lower protrusion 116 and parallel to the ZX plane so that the vertical surface 116a is recessed toward the +Y side. The first semi-cylindrical concave portion 123 is formed to extend in the extending direction (ie, the vertical direction) of the storage chamber 119 . The first semi-cylindrical recess 123 is formed based on a semi-cylindrical inner wall surface having the same inner diameter as the pipe 110 , and the center axis of the semicircle is set on the same line as the center axis of the storage chamber 119 .

The second block 108 is formed in a rectangular parallelepiped shape, and has a size that can be accommodated in the vertical width of the vertical surface 116a of the lower protrusion 116 and the Y-direction width of the lower surface 115a of the block body 115 . The second block 108 is formed on a vertical surface 108 a parallel to the ZX plane on the +Y side, and the vertical surface 108 a is opposite to the vertical surface 116 a of the lower protrusion 116 . The vertical surface 108a of the second block 108 forms the second semi-cylindrical recess 124 so that the vertical surface 108a is recessed toward the -Y side. The second semi-cylindrical concave portion 124 is formed based on a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110 , and is formed in plane symmetry with the first semi-cylindrical concave portion 123 with the ZX plane as a symmetry plane. Therefore, when the first semi-cylindrical concave portion 123 and the second semi-cylindrical concave portion 124 are overlapped to face each other, a cylindrical inner wall surface is formed based on both.

The clamping means 113 includes two screw members 126 (one of which is omitted from illustration) extending in the Y direction. In the second block 108 , on both sides in the X direction of the second semi-cylindrical recess 124 , screw insertion holes 127 through which the screw members 126 are inserted are formed. In addition, the holding means 113 is provided with female screw holes 128 at positions facing the respective screw insertion holes 127 on the vertical surface 116 a of the lower protrusion 116 . In the clamping means 113 , the screw member 126 is inserted through the screw insertion hole 127 , and the front end of the screw member 126 is screwed into the female screw hole 128 , so that the force exerted by the second block 108 on the +Y side can be exerted. With this force, the pipeline 110 is clamped by the first block 107 and the second block 108 on both sides in the Y direction.

In this embodiment, the pipeline 110 is attached to each of the first block 107 and the second block 108 in a deformed state because the pipeline 110 is sandwiched by the first block 107 and the second block 108 . The configuration for deforming the pipeline at this time will be described below with reference to FIG. 3 and FIG. 4 .

In FIG. 3 , a first recess 131 is formed in a predetermined width in the center of the first semi-cylindrical recess 123 in the vertical direction, and a position opposite to the first recess 131 is formed in the center of the second semi-cylindrical recess 124 in the vertical direction. , a second recess 132 is formed. The first recesses 131 are formed on both sides of the first semi-cylindrical recess 123 in the X direction, and are recessed by chamfering the intersection of the first semi-cylindrical recess 123 and the vertical surface 116a. The second recesses 132 are formed on both sides of the second semi-cylindrical recess 124 in the X direction, and are recessed by chamfering the intersecting portion of the second semi-cylindrical recess 124 and the vertical surface 108a. On the second semi-cylindrical concave portion 124, a convex portion 133 is formed between the two second concave portions 132, and the convex portion 133 is formed so that the inner wall of the second semi-cylindrical concave portion 124 protrudes in the +Y direction.

Fig. 4 is a plan cross-sectional view of a structure in which a pipeline is clamped and deformed. As shown in FIG. 4 , in the second block 108 , in the second block 108 , two second concave portions 132 are connected to form a convex portion 133 , and the inner walls of these are formed as one in the cross-sectional view of FIG. 4 . The arc shape along the imaginary circle C. Therefore, the front end shape of the protruding direction +Y direction of the convex portion 133 is formed so as to be recessed in an arc shape. The diameter of the imaginary circle C is formed to be larger than the diameter of the second semi-cylindrical recess 124 . In addition, the position of the center of the virtual circle C in the Y direction is further to the +Y side than the vertical surface 108 a , and the position in the X direction is the same as the center of the semicircle of the second semi-cylindrical recess 124 . The position on the most -Y side of the imaginary circle C, that is, the front end position of the convex portion 133 is further to the +Y side than the position on the most -Y side of the second semi-cylindrical concave portion 124 .

The first semi-cylindrical concave portion 123 and the second semi-cylindrical concave portion 124 are made to overlap and face each other, so that the first concave portion 131 and the second concave portion 132 face each other. At this time, the first concave portion 131 is formed into a plane-symmetric shape with respect to the second concave portion 132 with the ZX plane perpendicular to the plane of FIG. 4 as the plane of symmetry. Therefore, the inner wall surface of the first concave portion 131 is also formed in an arc shape in the cross-sectional view.

When the pipe 110 is connected to the cutting fluid supply nozzle 101 of the present embodiment, as shown in FIG. At this time, through the pipeline The O-ring 121 is sandwiched between the base end 110c of the 110 and the bottom 119a of the housing chamber 119, and the O-ring 121 is inserted so that the base end 110c of the pipeline 110 contacts the bottom 119a. In addition, the horizontal part of the pipeline 110 may be aligned parallel to the X direction using a jig or the like not shown.

Then, the outer wall on the base end 110c side of the pipeline 110 is clamped by both sides in the Y direction by the first block 107 and the second block 108, and the screw member 126 inserted through the screw insertion hole 127 is screwed in. Female screw hole 128. Thereby, the pipeline 110 is clamped by the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124 . By this clamping, as shown in FIG. 5 , the convex part 133 of the second semi-cylindrical concave part 124 squeezes and deforms the pipeline 110 toward the +Y side, and the two sides of the pipeline 110 in the X direction are extruded and extended to enter The first concave portion 131 and the second concave portion 132 . Based on the aforementioned extrusion deformation and extrusion extension, the Y-direction width of the pipeline 110 is reduced and the X-direction width is expanded, and the expansion sheet S is formed in a predetermined area on the base end 110c side of the pipeline 110 . The expansion sheet S is in close contact with the first concave portion 131 , the second concave portion 132 and the convex portion 133 in each of the first semi-cylindrical concave portion 123 , the second semi-cylindrical concave portion 124 , to ensure the liquid-tightness of the interface of these components.

In addition, the expansion sheet S is fitted into the first concave portion 131 , the second concave portion 132 , and the convex portion 133 , so that the pipeline 110 is fixed relative to each of the first block 107 and the second block 108 . Specifically, the rotation of the pipeline 110 around the Z-axis is restricted, and further, the extraction of the pipeline 110 in the downward direction is restricted. Here, in the expansion sheet S, the portion pressed and deformed by the convex portion 133 (corresponding to) forms the concave portion Sa, and the portion pressed and extended by the first concave portion 131 and the second concave portion 132 forms the convex portion Sb.

As described above, in the blade cover 100 of the present embodiment, since the first block 107 and the second block 108 are used to clamp the pipeline 110 for connection, compared with the existing structure in which these blocks are integrally cut and formed It is also easy to manufacture, and the manufacturing cost can be reduced.

In addition, by the expansion sheet S, the leakage of the cutting fluid at the connecting portion of the pipeline 110 can be well prevented. In addition, the pipeline 110 is aligned and clamped by a jig or the like, and the expansion sheet S is formed, thereby the direction or position of the pipeline 110 can be fixed to a predetermined position. Thereby, the adjustment work of making the piping 110 parallel to the X direction or making the discharge port 110a face the side surface of the dicing blade 71 can be omitted, simplification of manufacture, and reduction of manufacturing costs can also be achieved. In addition, when the pipeline 110 is replaced, the burden of the work can also be reduced by omitting the adjustment work.

In addition, the shapes and formation positions of the first concave portion 131 , the second concave portion 132 , and the convex portion 133 may be changed to other shapes and formed on the premise that the expansion sheet S with the same function as the above-described embodiment can be formed. Location.

Further, the embodiments of the present invention are not limited to the above-described embodiments and modifications, and various changes, replacements, and modifications can be made without departing from the technical idea of the present invention. In addition, if the technical idea of the present invention can be realized in other ways according to the advancement of technology or other derived technologies, the method can also be used to implement it. Therefore, the scope of the patent application covers all embodiments that can be included within the scope of the technical idea of the present invention.

[Industrial Applicability] As described above, the present invention has the effect of suppressing the leakage of dicing liquid and being able to manufacture inexpensively, especially for dicing in which a wafer is diced with a dicing blade while supplying dicing liquid from a blade cover. The device is useful.

71‧‧‧Cutting blade 72‧‧‧Spindle 75‧‧‧Spindle housing 100‧‧‧Blade cover 101‧‧‧Cutting fluid supply nozzle 110‧‧‧Pipeline 110a‧‧‧Ejection port 110b‧‧‧Sealing part 110c ‧‧‧Base end (end of one side) 107‧‧‧First block body 108‧‧‧Second block body 113‧‧‧Clamping means 118‧‧‧Supply path 119‧‧‧Storage chamber 119a‧‧‧ Bottom 120‧‧‧Cutting fluid supply source 123‧‧‧First semi-cylindrical concave part 124‧‧‧Second semi-cylindrical concave part 131‧‧‧First concave part 132‧‧‧Second concave part 133‧‧‧Protruding part S‧‧ ‧Expansion sheet Sa‧‧‧Concave part Sb‧‧‧Protruding part

FIG. 1 is a perspective view of a cutting device using a blade cover according to the present embodiment. FIG. 2 is a schematic perspective view of the blade cover in the present embodiment. FIG. 3 is a schematic exploded perspective view showing a main part of the cutting fluid supply nozzle in the present embodiment. Fig. 4 is a plan cross-sectional view of a structure in which a pipeline is clamped and deformed. Fig. 5 is a plan sectional view of a state in which the pipe is clamped and deformed.

101‧‧‧Cutting fluid supply nozzle

107‧‧‧First block

108‧‧‧Second block

108a‧‧‧Plumb face

110‧‧‧Piping

110c‧‧‧Base end (end of one side)

111‧‧‧Connections

111a‧‧‧Male thread

113‧‧‧Clamping Means

115‧‧‧Block body

115a‧‧‧Lower surface

116‧‧‧Lower protrusion

116a‧‧‧Plumb face

118‧‧‧Supply Path

118a‧‧‧Female thread

119‧‧‧Storage Room

119a‧‧‧Bottom

120‧‧‧Cutting fluid supply source

121‧‧‧O-ring

123‧‧‧First semi-cylindrical recess

124‧‧‧Second semi-cylindrical recess

126‧‧‧Screw components

127‧‧‧Screw through hole

128‧‧‧Female screw holes

131‧‧‧First recess

132‧‧‧Second recess

133‧‧‧Protrusion

S‧‧‧Expanded sheet

Sa‧‧‧recess

Sb‧‧‧ convex

+X, -X, +Y, -Y, +Z, -Z‧‧‧ directions

Claims (3)

A blade cover, which is arranged at the front end of a main shaft housing that rotatably supports a main shaft, covers a cutting blade mounted on the main shaft, and is configured to extend in the cutting feed direction of the cutting blade and sandwich the cutting blade. , and supply the cutting liquid to the cutting liquid supply nozzles on both sides of the cutting blade, the cutting liquid supply nozzle is provided with: a pipeline, which arranges a plurality of ejection ports for ejecting the cutting liquid in the cutting feeding direction, and is connected by one side The end portion is supplied with cutting fluid, and the end portion of the other side is provided with a sealing portion; two first blocks and second blocks sandwich the outer wall of one end side of the pipeline; A block and the second block sandwich the pipeline; wherein, the first block includes: a cylindrical storage chamber having a predetermined length accommodated by an end of one side of the pipeline, and is larger than the pipeline The bottom formed by the inner diameter with a larger diameter; the first semi-cylindrical concave part, extending in the extending direction of the storage chamber; The body is provided with: a second semi-cylindrical concave portion facing the first semi-cylindrical concave portion and formed with the same inner diameter as the diameter of the pipeline; and a convex portion protruding from the inner wall of the second semi-cylindrical concave portion, the The pipeline is accommodated in the storage chamber, and the end of one side of the pipeline is contacted to the bottom. By the clamping means, the first semi-cylindrical recess of the first block is connected to the second block. The second semi-cylindrical concave portion clamps the pipeline, the convex portion of the second semi-cylindrical concave portion deforms the pipeline and the pipeline is squeezed and extended, and is accommodated at an end of one side of the pipeline in the storage chamber The sides form expanded sheets. The blade cover of claim 1, wherein a first recess is formed in the first semi-cylindrical recess, a second recess is formed in the second semi-cylindrical recess, and the first semi-cylindrical recess is When overlapping with the second semi-cylindrical recess, the second recess faces the first recess. The blade cover according to claim 1 or claim 2, wherein the conduit is provided with a concave portion corresponding to the convex portion.

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