JP2019005849A - Blade cover - Google Patents

Abstract

To suppress leakage of a cutting liquid, and manufacture at low cost.SOLUTION: A blade cover includes a cutting liquid supply nozzle (101) which supplies a cutting liquid. The cutting liquid supply nozzle includes a pipe (110) which jets the cutting liquid, a first block (107) which clamps a base end (110c) side of the pipe, a second block (108) and clamping means (113). The first block includes a storage chamber (119) which stores the base end side of the pipe, and a first semi-cylindrical concave part (123) which extends in an extension direction of the storage chamber. The second block includes a second semi-cylindrical concave part (124) which is opposite to the first semi-cylindrical concave part and has an inner diameter equal to a diameter of the pipe, and a convex part (133) protruding from an inner wall of the second semi-cylindrical concave part. When the pipe is stored in the storage chamber and the pipe is clamped by the clamping means with the first semi-cylindrical concave part and the second semi-cylindrical concave part, the pipe is crushed and is pressed and extended by the convex part, and the base end side of the pipe forms a bulging seal (S).SELECTED DRAWING: Figure 3

Description

  The present invention relates to a blade cover provided with a cutting fluid supply nozzle for supplying a cutting fluid to a cutting blade.

  In the semiconductor device manufacturing process, division lines are formed in a lattice pattern on the surface of a substantially disk-shaped wafer, and devices and the like are formed in regions partitioned by the division lines. Then, the wafer is cut along the planned dividing line by a cutting device and divided into individual semiconductor chips. In cutting with a cutting device, a cutting blade that rotates at a high speed along a division line of the wafer is cut. During the cutting process, the cutting fluid is supplied to the side surface of the cutting blade via the cutting fluid supply nozzle, and the cutting waste is cleaned and the processing portion is cooled and lubricated.

  In the cutting apparatus, the cutting fluid supply nozzle is disposed on a blade cover formed so as to cover the cutting blade, and is parallel to the cutting direction of the cutting blade with the cutting blade interposed therebetween and on a holding surface of a holding table that holds the wafer. In contrast, two pipes are provided in parallel. Further, the cutting fluid supply nozzle has a plurality of ejection ports for ejecting the cutting fluid toward both side surfaces of the cutting blade in a direction orthogonal to the extending direction of the two pipes arranged side by side in the cutting feed direction.

  As a cutting fluid supply nozzle in the cutting apparatus, a cutting fluid is applied to the blade cover as disclosed in Patent Document 2 as well as a type integrally formed with a block-shaped blade cover as disclosed in Patent Document 1. There is a type formed by connecting pipes that pass through.

JP 2010-46726 A JP 2011-114220 A

  The former type of cutting fluid supply nozzle has a good fixing state of the cutting fluid supply nozzle with respect to the blade cover, but requires a process of scraping the blade cover and the cutting fluid supply nozzle from a single block, which reduces the manufacturing cost. It becomes expensive.

  On the other hand, since the latter type of cutting fluid supply nozzle connects the pipe-shaped member to the blade cover, it can be easily manufactured at a lower cost than the former type, but cutting fluid leakage tends to occur at those connecting portions. Moreover, adjustment etc. which make a pipe parallel to a cutting feed direction are needed, and the operation | work becomes complicated and a possibility that it will become a burden will become high.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a blade cover that can suppress cutting fluid leakage and can be manufactured at low cost without adjusting the pipe orientation. .

  The blade cover according to one aspect of the present invention is disposed at the tip of a spindle housing that rotatably supports the spindle, covers the cutting blade mounted on the spindle, extends in the cutting feed direction of the cutting blade, and sandwiches the cutting blade. The blade cover is provided with a cutting fluid supply nozzle that supplies cutting fluid to both side surfaces of the cutting blade, and the cutting fluid supply nozzle has a plurality of ejection ports for ejecting the cutting fluid arranged in the cutting feed direction. , A pipe that supplies cutting fluid from one end and has a sealing portion at the other end, two first blocks and a second block that clamp an outer wall on one end side of the pipe, and a first block And a clamping means for clamping the pipe with the second block, the first block having an inner diameter larger than the diameter of the pipe accommodating a predetermined length from one end of the pipe. A cylindrical storage chamber having a bottom portion, a first semi-cylindrical recess formed to extend in the extending direction of the storage chamber, a supply path that communicates the bottom portion of the storage chamber and the cutting fluid supply source The second block includes a second semi-cylindrical recess that is opposed to the first semi-cylindrical recess and is formed with the same inner diameter as the diameter of the pipe, and a convex that protrudes from the inner wall of the second semi-cylindrical recess. A first half-cylindrical recess of the first block and a second half-cylinder of the second block by clamping means. The pipe is accommodated in the storage chamber and one end of the pipe is brought into contact with the bottom. The concave portion clamps the pipe, the convex portion of the second semi-cylindrical concave portion crushes the pipe and the pipe is pushed out, and one end side of the pipe stored in the storage chamber swells to form a seal. And

  According to this configuration, since the pipe can be clamped and held by two blocks, the manufacturing burden can be reduced and the manufacturing cost can be reduced as compared with the conventional structure in which these are cut together. Also, by clamping the pipe with the first block and the second block, the pipe is deformed and the bulge seal is formed at the convex portion, so that cutting fluid leakage at those connecting portions is suppressed. Can do. Moreover, since the relative position between the pipe and each block can be fixed by clamping the pipe, the adjustment work of the position and orientation of the pipe can be omitted, and the manufacturing cost can be reduced through the reduction of the work load.

  In the blade cover of the present invention, a first concave portion is formed in the first semi-cylindrical concave portion, a second concave portion is formed in the second semi-cylindrical concave portion, and the first semi-cylindrical concave portion and the second semi-cylindrical concave portion. When the two are overlapped, the second recess may face the first recess.

  In the blade cover of the present invention, the pipe may have a concave portion corresponding to the convex portion.

  According to the present invention, since the bulge seal is formed by crushing the pipe with the convex portion, it is possible to suppress cutting fluid leakage, and it is possible to manufacture at a low cost by eliminating the adjustment work of the pipe forming the cutting fluid supply nozzle. .

It is a perspective view of the cutting device using the blade cover which concerns on this Embodiment. It is a schematic perspective view of the blade cover which concerns on this Embodiment. It is a schematic exploded perspective view which shows the principal part of the cutting fluid supply nozzle of this Embodiment. It is a plane sectional view of the composition which clamps and deforms a pipe. It is a plane sectional view in the state where a pipe was clamped and changed.

  Hereinafter, the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus using a blade cover according to the present embodiment. Note that the cutting apparatus according to the present embodiment is not limited to the configuration shown in FIG. The present invention can be applied to any cutting apparatus as long as it is capable of cutting a wafer with a cutting blade while supplying cutting fluid from a blade cover. In the following figures, the X direction front side is the + X side, the back side is the -X side, the Y direction front is the + Y side, the back side is the -Y side, the Z direction upper side is the + Z side, and the lower side is- It will be called the Z side.

  As shown in FIG. 1, the cutting apparatus 1 is configured to cut the wafer W by relatively moving the wafer W held on the chuck table 12 and the cutting means 14. The wafer W is carried into the cutting device 1 while being supported by the ring frame F via the dicing tape T. The wafer W may be a semiconductor wafer such as silicon or gallium arsenide, or may be a ceramic, glass, or sapphire optical device wafer. In addition to a circular wafer, a rectangular package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) may be used.

  On the base 11 of the cutting apparatus 1, a cutting feed means 13 for cutting and feeding the chuck table 12 in the X direction is provided. The cutting feed means 13 includes a pair of guide rails 31 arranged on the base 11 and parallel to the X direction, and a motor-driven X-axis table 32 slidably installed on the pair of guide rails 31. Yes. A nut portion (not shown) is formed on the back side of the X-axis table 32, and a ball screw 33 is screwed to the nut portion. Then, when the drive motor 34 connected to one end of the ball screw 33 is rotationally driven, the chuck table 12 is cut and fed along the pair of guide rails 31 in the X direction that is the cutting direction of the cutting blade 71. .

  On the top of the X-axis table 32, a chuck table 12 that holds the wafer W is provided so as to be rotatable about the Z-axis. A holding surface is formed on the upper surface of the chuck table 12 by a porous ceramic material, and the wafer W is sucked and held by the negative pressure generated on the holding surface. Around the chuck table 12, four air-driven clamp portions 22 are provided, and the ring frame F around the wafer W is clamped and fixed from four sides by each clamp portion 22. On the upper surface of the base 11, a gate-shaped standing wall portion 81 is provided so as to straddle the movement path of the chuck table 12.

  The standing wall portion 81 is provided with an index feeding means 15 for feeding the cutting means 14 in the Y direction and a cutting feed means 16 for cutting and feeding the cutting means 14 in the Z direction. The index feeding means 15 has a pair of guide rails 51 arranged in front of the standing wall portion 81 and parallel to the Y direction, and a Y-axis table 52 slidably installed on the pair of guide rails 51. The cutting feed means 16 has a pair of guide rails 61 arranged on the Y-axis table 52 and parallel to the Z direction, and a Z-axis table 62 slidably installed on the pair of guide rails 61. A cutting means 14 for cutting the wafer W is provided below the Z-axis table 62.

  Nut portions are formed on the back sides of the Y-axis table 52 and the Z-axis table 62, and ball screws 53 and 63 are screwed into these nut portions. A drive motor 64 (a Y-axis drive motor is not shown) is coupled to one end of a ball screw 53 for the Y-axis table 52 and a ball screw 63 for the Z-axis table 62. Each ball screw 53, 63 is rotationally driven by the drive motor 64, so that the cutting means 14 is indexed in the Y direction orthogonal to the X direction along the guide rail 51, and the cutting means 14 is along the guide rail 61. Then, the wafer is cut and fed in the Z direction approaching and leaving the wafer W.

  The cutting means 14 is configured by attaching a cutting blade 71 to the tip of a spindle 72 (see FIG. 2) protruding from the spindle housing 75. In the spindle housing 75, a spindle 72 serving as a rotation shaft of the cutting blade 71 is rotatably supported, and a motor (not shown) for rotating the spindle 72 is installed. Further, a blade cover 100 surrounding the cutting blade 71 is provided on the front end side of the spindle housing 75 so as to expose a region where the cutting blade 71 cuts into the wafer W. The blade cover 100 includes a cutting fluid supply nozzle 101 (omitted in FIG. 1, refer to FIG. 2) for supplying cutting water to both side surfaces of the cutting blade 71 in the cutting portion of the wafer W.

  FIG. 2 is a schematic perspective view of the blade cover according to the present embodiment. As shown in FIG. 2, the blade cover 100 includes a nozzle support block 103 that supports the pair of peripheral injection nozzles 102 on the −X side. The blade cover 100 includes a cover main body 105 that covers substantially the upper half of the outer periphery of the cutting blade 71, and a pair of cutting fluid supply nozzles 101 are provided from the + X side to the lower portion of the cover main body 105. Two cutting fluid supply nozzles 101 are provided with a cutting blade 71 interposed therebetween, and they have a structure that is plane-symmetric with respect to the ZX plane as a symmetry plane. The cutting fluid supply nozzle 101 includes a first block 107 and a second block 108 provided on the + X side of the cover main body 105, and an L-shaped pipe 110 supported by the blocks 107 and 108.

  The pipe 110 is made of a metal material such as stainless steel. The pipe 110 extends downward from each of the blocks 107 and 108, is bent at a middle portion, and the distal end side extends in the cutting feed direction (X direction) of the cutting blade 71. The pipe 110 is provided at a position away from the side surface of the cutting blade 71 by a predetermined distance in the Y direction, and is disposed so that the cutting blade 71 is sandwiched between the pipes 110 of the two cutting fluid supply nozzles 101. In the pipe 110, a plurality of outlets 110a are arranged and formed in a portion extending in the cutting feed direction. The base end (one end) facing upward in the pipe 110 is connected to the cutting fluid supply source 120 (see FIG. 3) via the connecting portion 111, and the cutting fluid supplied from the cutting fluid supply source 120 to the pipe 110 is received. It is ejected from the ejection port 110a. Thereby, the cutting fluid is supplied to the both side surfaces of the cutting blade 71 from the ejection port 110a, and the cutting portion can be cooled and cleaned. In addition, the front-end | tip (other end) of the pipe 110 is obstruct | occluded as the sealing part 110b, and it is made not to produce cutting fluid leak.

  Next, the structure of the cutting fluid supply nozzle 101 will be described with reference to FIG. FIG. 3 is a schematic exploded perspective view showing a main part of the cutting fluid supply nozzle of the present embodiment. Here, in the following description, of the two cutting fluid supply nozzles 101 arranged in the Y direction, the cutting fluid supply nozzle 101 located on the −Y side will be described. Note that the cutting fluid supply nozzle 101 located on the + Y side has a plane-symmetric structure with the cutting fluid supply nozzle 101 located on the −Y side, and a description thereof is omitted here.

  As shown in FIG. 3, the cutting fluid supply nozzle 101 clamps (pinches) the outer wall on the base end 110 c side of the pipe 110 from both sides in the Y direction with the two first blocks 107 and second blocks 108. ) Is configured as follows.

  The first block 107 includes a rectangular parallelepiped block main body 115 in which a coupling portion 111 is provided at the center of the upper surface of the upper surface, and a lower protrusion 116 that protrudes downward from a substantially half region on the + Y side of the lower surface 115a of the block main body 115. It is provided in the shape provided with.

  In the block main body 115 of the first block 107, a supply path 118 that communicates with the connecting portion 111 and extends downward is formed, and a storage chamber 119 is formed between the lower end of the supply path 118 and the lower surface 115a of the block main body 115. Is formed. The storage chamber 119 is provided so as to open the lower surface 115 a side of the block main body 115. A cutting fluid supply source 120 that supplies a cutting fluid via a pump or the like is connected to the connecting portion 111.

  A female screw 118 a is formed on the upper end side of the supply path 118, and a male screw 111 a formed on the lower end of the connecting portion 111 can be screwed together. The supply path 118 is formed by a cylindrical inner wall surface having an inner diameter smaller than the diameter of the pipe 110. The storage chamber 119 is formed by a cylindrical inner wall surface having an inner diameter that is slightly larger than the diameter of the pipe 110, and can store a predetermined length from the base end 110 c side of the pipe 110. The supply path 118 and the storage chamber 119 are provided on the same line at the center axis position, and a step is formed at the boundary position due to the difference in diameter. By this step, a bottom (top surface) 119a is formed as an inner wall surface in the upper part of the storage chamber 119. Between the bottom 119a of the storage chamber 119 and the base end 110c of the pipe 110, an O-ring 121 for maintaining liquid tightness is disposed. The supply path 118 communicates the bottom portion 119 a of the storage chamber 119 and the cutting fluid supply source 120 via the connecting portion 111.

  A first semi-cylindrical recess 123 is formed on a vertical surface 116a that is located on the −Y side of the lower protrusion 116 and is parallel to the ZX surface, so that the vertical surface 116a is recessed on the + Y side. The first semi-cylindrical recess 123 is formed to extend in the extending direction of the storage chamber 119, that is, in the vertical direction. The first semi-cylindrical recess 123 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110, and the center axis position of the semicircle is provided on the same line as the center axis position of the storage chamber 119. .

  The second block 108 is formed in a rectangular parallelepiped shape, and is sized to fit within the vertical width of the vertical surface 116 a of the lower protrusion 116 and the Y-direction width of the lower surface 115 a of the block main body 115. The second block 108 is formed with a vertical surface 108 a parallel to the ZX plane on the + Y side, and the vertical surface 108 a faces the vertical surface 116 a of the lower protrusion 116. A second semi-cylindrical recess 124 is formed on the vertical surface 108a of the second block 108 so as to make the vertical surface 108a concave toward the -Y side. The second semi-cylindrical recess 124 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110, and is formed in plane symmetry with the first semi-cylindrical recess 123 with the ZX plane as a symmetry plane. Therefore, when the first semicylindrical recess 123 and the second semicylindrical recess 124 are overlapped and opposed to each other, a cylindrical inner wall surface is formed by them.

  The clamp means 113 includes two screw members 126 (one is not shown) extending in the Y direction. Screw insertion holes 127 through which the screw members 126 are inserted are formed on both sides in the X direction of the second semi-cylindrical recess 124 in the second block 108. In addition, the clamping unit 113 includes a female screw hole 128 at a position where each screw insertion hole 127 is opposed to the vertical surface 116 a of the lower protrusion 116. The clamping means 113 inserts the screw member 126 into the screw insertion hole 127 and screwes the tip of the screw member 126 into the female screw hole 128, thereby exerting a force that urges the second block 108 to the + Y side. This force causes the first block 107 and the second block 108 to clamp the pipe 110 from both sides in the Y direction.

  In the present embodiment, the pipe 110 is clamped to the first block 107 and the second block 108, so that the pipe 110 is attached to each of the blocks 107 and 108 in a deformed state. A configuration for deforming the pipe at this time will be described below with reference to FIG. 4 in addition to FIG. 3.

  In FIG. 3, a first recess 131 is formed at a predetermined width at the center in the vertical direction of the first semi-cylindrical recess 123, and is opposed to the first recess 131 at the center in the vertical direction of the second semi-cylindrical recess 124. A second concave portion 132 is formed at the position where this occurs. The first recess 131 is formed on both sides in the X direction of the first semi-cylindrical recess 123, and is formed to be chamfered so as to chamfer the intersection between the first semi-cylindrical recess 123 and the vertical surface 116a. The second recess 132 is formed on both sides in the X direction of the second semi-cylindrical recess 124, and is formed to be chamfered so as to chamfer the intersection between the second semi-cylindrical recess 124 and the vertical surface 108a. A convex portion 133 is formed between the two second concave portions 132 in the second semi-cylindrical concave portion 124, and the convex portion 133 is formed so as to protrude in the + Y direction from the inner wall of the second semi-cylindrical concave portion 124. ing.

  FIG. 4 is a plan sectional view of a configuration in which a pipe is clamped and deformed. As shown in FIG. 4, in the second block 108, a convex portion 133 is formed continuously between two second concave portions 132, and these inner wall surfaces are formed as one virtual circle in the sectional view of FIG. It is formed in an arc shape along C. Accordingly, the tip shape in the + Y direction, which is the protruding direction of the convex portion 133, is formed to be recessed in an arc shape. The diameter dimension of the virtual circle C is formed larger than the diameter dimension of the second semi-cylindrical recess 124. Further, the center of the imaginary circle C is the position in the Y direction on the + Y side from the vertical plane 108a, and the position in the X direction is the same as the center of the semicircle of the second semicylindrical recess 124. The position on the most −Y side of the imaginary circle C, that is, the tip position of the convex portion 133 is + Y side from the position on the most −Y side of the second semi-cylindrical concave portion 124.

  When the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124 overlap each other, the first recess 131 and the second recess 132 face each other. At this time, the first recess 131 is formed in a shape that is plane-symmetric with respect to the second recess 132, with the ZX plane orthogonal to the paper surface of FIG. Therefore, the inner wall surface of the first recess 131 is also formed in an arc shape in a sectional view.

  When the pipe 110 is connected by the cutting fluid supply nozzle 101 of the present embodiment, the base end 110c side of the pipe 110 is inserted from below the storage chamber 119 and stored as shown in FIG. At this time, the O-ring 121 is sandwiched between the base end 110c of the pipe 110 and the bottom portion 119a of the storage chamber 119, and the base end 110c of the pipe 110 is brought into contact with the bottom portion 119a with the O-ring 121 interposed therebetween. Then, using a jig or the like (not shown), the horizontal portion of the pipe 110 is positioned so as to be parallel to the X direction.

  Thereafter, the first block 107 and the second block 108 sandwich the outer wall on the base end 110 c side of the pipe 110 from both sides in the Y direction, and screw the screw member 126 inserted into the screw insertion hole 127 into the female screw hole 128. As a result, the pipe 110 is clamped by the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124. With this clamp, as shown in FIG. 5, the convex part 133 of the second semi-cylindrical concave part 124 crushes the pipe 110 toward the + Y side, and both sides of the pipe 110 in the X direction are the first concave part 131 and the second concave part. It is extended so as to enter the recess 132. By such crushing and stretching, the pipe 110 is deformed so that the width in the Y direction decreases and the width in the X direction increases, and a bulge seal S is formed in a predetermined region on the proximal end 110 c side of the pipe 110. The bulge seal S comes into close contact with the first concave portion 131, the second concave portion 132, and the convex portion 133 in each of the semicylindrical concave portions 123 and 124, and the liquid tightness at the interface between them is ensured.

  In addition, the bulge seal S is fitted to the first concave portion 131, the second concave portion 132, and the convex portion 133, and the pipe 110 is fixed to each of the blocks 107 and 108. Specifically, the rotation of the pipe 110 around the Z axis is restricted, and the pipe 110 is restricted from coming out downward. Here, in the bulge seal S, a concave portion Sa is formed in a portion crushed by (corresponding to) the convex portion 133, and the convex portion Sb is formed in a portion extended to the first concave portion 131 and the second concave portion 132. It is formed.

  As described above, in the blade cover 100 of the present embodiment, the pipe 110 is clamped and connected by the first block 107 and the second block 108, so that it is easier than the conventional structure in which they are cut together. Manufacturing cost can be reduced because it can be manufactured.

  Further, the bulge seal S can favorably prevent cutting fluid leakage at the connecting portion of the pipe 110. Furthermore, by positioning and clamping the pipe 110 with a jig or the like to form the bulge seal S, the direction and position of the pipe 110 can be fixed at a predetermined position. As a result, the adjustment work of making the pipe 110 parallel to the X direction and making the ejection port 110a face the side surface of the cutting blade 71 can be omitted, which also facilitates the manufacture and reduces the manufacturing cost. it can. Also, when replacing the pipe 110, the work burden can be reduced by omitting the adjustment work.

  Note that the shapes and positions of the first recess 131, the second recess 132, and the protrusion 133 are changed to other shapes and positions as long as the bulge seal S that functions in the same manner as in the above embodiment can be formed. May be.

  The embodiments of the present invention are not limited to the above-described embodiments and modifications, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by technological advancement or another derived technique, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.

  As described above, the present invention has an effect that the cutting fluid leakage can be suppressed and can be manufactured at a low cost, and in particular, the cutting device that cuts the wafer with the cutting blade while supplying the cutting fluid from the blade cover. Useful for.

71 Cutting blade 72 Spindle 75 Spindle housing 100 Blade cover 101 Cutting fluid supply nozzle 110 Pipe 110a Spout 110b Sealing portion 110c Base end (one end)
107 First block 108 Second block 113 Clamping means 118 Supply path 119 Storage chamber 119a Bottom 120 Cutting water supply source 123 First semi-cylindrical recess 124 Second semi-cylindrical recess 131 First recess 132 Second recess 133 Convex part S Swelling seal Sa Concave part Sb Convex part

Claims (3)

The cutting blade is disposed at the tip of a spindle housing that rotatably supports the spindle, covers the cutting blade mounted on the spindle, extends in the cutting feed direction of the cutting blade, and is disposed with the cutting blade interposed therebetween. A blade cover provided with a cutting fluid supply nozzle for supplying a cutting fluid to both side surfaces of
The cutting fluid supply nozzle is
A pipe having a plurality of jet nozzles for ejecting the cutting fluid arranged in the cutting feed direction, supplying the cutting fluid from one end, and having a sealing portion at the other end,
Two first blocks and a second block for clamping the outer wall on one end side of the pipe;
Clamping means for clamping the pipe with the first block and the second block;
The first block includes a cylindrical storage chamber having a bottom formed with an inner diameter larger than the diameter of the pipe that stores a predetermined length from one end of the pipe, and an extending direction of the storage chamber. A first semi-cylindrical recess formed to extend, and a supply path that communicates the bottom of the storage chamber and the cutting fluid supply source,
The second block is formed so as to face the first semi-cylindrical recess and to protrude from the inner wall of the second semi-cylindrical recess, with a second semi-cylindrical recess formed with the same inner diameter as the diameter of the pipe. A convex portion,
Storing the pipe in the storage chamber and bringing one end of the pipe into contact with the bottom;
The first semi-cylindrical recess of the first block and the second semi-cylindrical recess of the second block clamp the pipe by the clamping means, and the convex portion of the second semi-cylindrical recess. A blade cover in which the pipe is crushed and the pipe is stretched, and one end of the pipe accommodated in the storage chamber swells to form a seal. A first recess is formed in the first semi-cylindrical recess, and a second recess is formed in the second semi-cylindrical recess;
The blade cover according to claim 1, wherein when the first semi-cylindrical recess and the second semi-cylindrical recess are overlapped, the second recess faces the first recess. The blade cover according to claim 1, wherein the pipe includes a concave portion corresponding to the convex portion.

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