CN109108841B - Tool cover - Google Patents
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- CN109108841B CN109108841B CN201810593461.2A CN201810593461A CN109108841B CN 109108841 B CN109108841 B CN 109108841B CN 201810593461 A CN201810593461 A CN 201810593461A CN 109108841 B CN109108841 B CN 109108841B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
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Abstract
提供刀具罩，能够抑制切削液泄漏，并能够低价地制造。刀具罩具有提供切削液的切削液提供喷嘴(101)。切削液提供喷嘴具有喷出切削液的管(110)、将管的基端(110c)侧夹紧的第1块(107)、第2块(108)以及夹紧单元(113)。第1块具有：收纳室(119)，其对管的基端侧进行收纳；以及第1半圆柱凹部(123)，其在收纳室的延伸方向上延伸。第2块具有：第2半圆柱凹部(124)，其与第1半圆柱凹部对置，形成有与管的直径相同的内径；以及凸部(133)，其从第2半圆柱凹部的内壁突出。在将管收纳于收纳室并利用夹紧单元通过第1半圆柱凹部和第2半圆柱凹部将管夹紧时，管被凸部压扁而推展，在管的基端侧形成鼓出密封部(S)。
By providing a tool cover, it is possible to suppress leakage of cutting fluid and to manufacture at low cost. The tool cover has a cutting fluid supply nozzle (101) for supplying cutting fluid. The cutting fluid supply nozzle includes a pipe (110) for ejecting cutting fluid, a first block (107), a second block (108), and a clamping unit (113) for clamping the base end (110c) side of the pipe. The first block includes a storage chamber (119) that accommodates the proximal end side of the tube, and a first semi-cylindrical recess (123) that extends in the extending direction of the storage chamber. The second block has: a second semi-cylindrical concave portion (124) opposite to the first semi-cylindrical concave portion and formed with an inner diameter equal to the diameter of the pipe; and a convex portion (133) extending from the inner wall of the second semi-cylindrical concave portion protrude. When the tube is accommodated in the storage chamber and the tube is clamped by the clamping unit through the first semi-cylindrical recessed portion and the second semi-cylindrical recessed portion, the tube is crushed and pushed by the convex portion, and a bulging seal portion is formed on the proximal end side of the tube. (S).
Description
Technical Field
The present invention relates to a tool cover having a cutting fluid supply nozzle for supplying a cutting fluid to a cutting tool.
Background
In a semiconductor device manufacturing process, planned dividing lines are formed in a lattice shape on the front surface of a wafer having a substantially disk shape, and devices and the like are formed in regions partitioned by the planned dividing lines. Then, the wafer is cut along the lines to be divided by the cutting device and is divided into individual semiconductor chips. In cutting processing using a cutting apparatus, a cutting tool rotating at a high speed is caused to cut along a planned dividing line of a wafer. In cutting, a cutting fluid is supplied to a side surface of a cutting tool through a cutting fluid supply nozzle, and cleaning of cutting chips, cooling and lubrication of a machining portion, and the like are performed.
In the cutting apparatus, the cutting fluid supply nozzle is disposed in a blade cover formed to cover the cutting blade, and is disposed parallel to the cutting direction of the cutting blade and parallel to a holding surface of a holding table for holding a wafer by sandwiching the cutting blade between two tubes. The cutting fluid supply nozzle is provided with a plurality of discharge ports for discharging the cutting fluid toward both side surfaces of the cutting tool in a direction perpendicular to the extending direction of the two tubes, and the discharge ports are arranged in a row in the cutting feed direction.
The cutting fluid supply nozzle of the cutting device includes a type in which a tube through which the cutting fluid flows is connected to a tool cover as disclosed in patent document 2, in addition to a type in which the cutting fluid supply nozzle is integrally formed with a block-shaped tool cover as disclosed in patent document 1.
Patent document 1: japanese patent laid-open No. 2010-46726
Patent document 2: japanese patent laid-open publication No. 2011-114220
In the former type of cutting fluid supply nozzle, the cutting fluid supply nozzle is fixed to the tool cover in a good state, but a process of cutting the tool cover and the cutting fluid supply nozzle from a single block is required, which results in high manufacturing cost.
On the other hand, in the cutting fluid supply nozzle of the latter type, since the cutter cover is connected to the tubular member, the cutting fluid is likely to leak at the connection portion, although the manufacturing can be easily and inexpensively performed as compared with the former type. Further, adjustment or the like for making the pipe parallel to the cutting feed direction is required, and this operation is complicated and may be a burden.
Disclosure of Invention
The present invention has been made in view of the above problems, and an object of the present invention is to provide a tool cover that can suppress leakage of a cutting fluid and can be manufactured at low cost by omitting an operation of adjusting the tube direction.
A tool cover according to one aspect of the present invention is a tool cover disposed at a distal end of a spindle housing that rotatably supports a spindle, covers a cutting tool attached to the spindle, and includes a cutting fluid supply nozzle that supplies a cutting fluid to both side surfaces of the cutting tool, the cutting fluid supply nozzle extending in a cutting feed direction of the cutting tool and disposed so as to sandwich the cutting tool, the tool cover including: a tube having a plurality of discharge ports for discharging the cutting fluid arranged in the cutting feed direction, the cutting fluid being supplied from one end of the tube, and having a closed portion at the other end; a 1 st block and a 2 nd block which clamp an outer wall of one end side of the pipe; and a clamping unit clamping the tube by a 1 st block and a 2 nd block, the 1 st block having: a cylindrical housing chamber which houses the tube by a predetermined length from one end of the tube and has a bottom formed by an inner diameter larger than a diameter of the tube; a 1 st semi-cylindrical recess formed to extend in the extending direction of the housing chamber; and a supply path for connecting the bottom of the housing chamber to a cutting fluid supply source, the 2 nd block having: a 2 nd semi-cylindrical recess portion which is opposite to the 1 st semi-cylindrical recess portion and is formed according to the same inner diameter as the diameter of the pipe; and a convex portion formed to protrude from an inner wall of the 2 nd semi-cylindrical concave portion, the pipe is accommodated in the accommodating chamber, one end portion of the pipe is in contact with the bottom portion, the pipe is clamped by the 1 st semi-cylindrical concave portion of the 1 st block and the 2 nd semi-cylindrical concave portion of the 2 nd block by the clamping unit, the pipe is pushed and spread by flattening the pipe by the convex portion of the 2 nd semi-cylindrical concave portion, and a bulging seal portion is formed on one end portion side of the pipe accommodated in the accommodating chamber.
According to this structure, since the pipe can be held by being clamped by the two blocks, the manufacturing burden can be reduced and the manufacturing cost can be reduced as compared with the conventional structure in which these are integrally cut. Further, since the tube is clamped by the 1 st block and the 2 nd block, the tube is deformed by the convex portion and the bulging seal portion is formed, the leakage of the cutting fluid at the connecting portion thereof can be suppressed. Further, since the relative position between the pipe and each block can be fixed by clamping the pipe, the work of adjusting the position and direction of the pipe can be omitted, and the work load can be reduced to reduce the manufacturing cost.
In the tool cover of the present invention, the 1 st recess may be formed in the 1 st semi-cylindrical recess, the 2 nd recess may be formed in the 2 nd semi-cylindrical recess, and the 1 st recess and the 2 nd recess may face each other when the 1 st semi-cylindrical recess and the 2 nd semi-cylindrical recess are overlapped.
The tube of the tool cover of the present invention may have a concave portion corresponding to the convex portion.
According to the present invention, since the tube is crushed by the convex portion to form the bulging seal portion, leakage of the cutting fluid can be suppressed, and the adjustment work of the tube forming the cutting fluid supply nozzle and the like can be omitted, and the manufacturing can be performed at low cost.
Drawings
Fig. 1 is a perspective view of a cutting apparatus using a tool cover according to the present embodiment.
Fig. 2 is a schematic perspective view of the tool cover according to the present embodiment.
Fig. 3 is a schematic exploded perspective view showing a main part of the cutting fluid supply nozzle according to the present embodiment.
Fig. 4 is a plan sectional view of a structure in which a pipe is clamped to be deformed.
Fig. 5 is a plan sectional view of a state where a pipe is clamped and deformed.
Description of the reference symbols
71: a cutting tool; 72: a main shaft; 75: a spindle housing; 100: a cutter cover; 101: a cutting fluid supply nozzle; 110: a tube; 110 a: an ejection port; 110 b: a closing part; 110 c: a base end (one end); 107: block 1; 108: a 2 nd block; 113: a clamping unit; 118: providing a path; 119: a storage chamber; 119 a: a bottom; 120: a cutting water supply source; 123: 1 st semi-cylindrical recess; 124: a 2 nd semi-cylindrical recess; 131: 1 st recess; 132: a 2 nd recess; 133: a convex portion; s: a bulge sealing part; sa: a recess; sb: a convex portion.
Detailed Description
The present embodiment will be described below with reference to the drawings. Fig. 1 is a perspective view of a cutting apparatus using a tool cover according to the present embodiment. The cutting device of the present embodiment is not limited to the configuration shown in fig. 1. The present invention can be applied to any cutting apparatus as long as it can supply a cutting fluid from a tool cover and cut a wafer with a cutting tool. In the drawings, the X-direction near side is referred to as the + X side, the Y-direction near side is referred to as the + Y side, the Y-direction near side is referred to as the-Y side, the Z-direction upper side is referred to as the + Z side, and the lower side is referred to as the-Z side.
As shown in fig. 1, the cutting apparatus 1 is configured to cut a wafer W held on a chuck table 12 by moving the wafer W relative to a cutting unit 14. The wafer W is carried into the cutting apparatus 1 while being supported by the ring frame F via the dicing tape T. The wafer W may be a semiconductor wafer such as silicon or gallium arsenide, or a wafer of a ceramic, glass or sapphire optical device. The semiconductor device is not limited to a circular wafer, and may be a rectangular Package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package).
A cutting feed unit 13 is provided on the base 11 of the cutting device 1, and the cutting feed unit 13 performs cutting feed in the X direction with respect to the chuck table 12. The cutting feed unit 13 has: a pair of guide rails 31 provided on the base 11 and parallel to the X direction; and a motor-driven X-axis table 32 slidably provided on the pair of guide rails 31. A nut portion, not shown, is formed on the back surface side of the X-axis table 32, and the nut portion is screwed with the ball screw 33. The chuck table 12 is fed along the pair of guide rails 31 in the X direction, which is the cutting direction of the cutting tool 71, by rotating the drive motor 34 coupled to one end of the ball screw 33.
A chuck table 12 for holding the wafer W is provided above the X-axis table 32 so as to be rotatable about the Z-axis. A holding surface is formed of a porous ceramic material on the upper surface of the chuck table 12, and the wafer W is sucked and held by a negative pressure generated in the holding surface. Air-driven 4 chuck units 22 are provided around the chuck table 12, and the ring frame F around the wafer W is held and fixed from all around by the respective chuck units 22. A gate-shaped standing wall portion 81 is provided on the upper surface of the base 11, and the standing wall portion 81 is erected so as to cross the movement path of the chuck table 12.
The standing wall portion 81 is provided with an index feed unit 15 and a cutting feed unit 16, wherein the index feed unit 15 performs index feed of the cutting unit 14 in the Y direction, and the cutting feed unit 16 performs cutting feed of the cutting unit 14 in the Z direction. The index feeding unit 15 includes: a pair of guide rails 51 provided on the front surface of the standing wall portion 81 in parallel with the Y direction; and a Y-axis table 52 slidably provided on the pair of guide rails 51. The incision feeding unit 16 includes: a pair of guide rails 61 disposed on the Y-axis table 52 in parallel with the Z-direction; and a Z-axis table 62 slidably provided on the pair of guide rails 61. A cutting unit 14 for cutting the wafer W is provided below the Z-axis table 62.
Nut portions are formed on the back sides of the Y-axis table 52 and the Z-axis table 62, respectively, and these nut portions are screwed with the ball screws 53, 63. One end portions of the ball screw 53 for the Y-axis table 52 and the ball screw 63 for the Z-axis table 62 are connected to a drive motor 64 (the drive motor for the Y-axis is not shown). The ball screws 53 and 63 are rotationally driven by the drive motor 64, whereby the cutting unit 14 is indexed and fed along the guide rail 51 in the Y direction perpendicular to the X direction, and the cutting unit 14 is plunged and fed along the guide rail 61 in the Z direction approaching and separating from the wafer W.
The cutting unit 14 is configured by attaching a cutting tool 71 to the tip of a spindle 72 (see fig. 2) protruding from a spindle housing 75. The spindle 72 as a rotation shaft of the cutting tool 71 is rotatably supported by a spindle housing 75, and a motor (not shown) for rotating the spindle 72 is provided in the spindle housing 75. Further, a tool cover 100 surrounding the cutting tool 71 is provided on the distal end side of the spindle housing 75 so as to expose a region into which the cutting tool 71 cuts the wafer W. The tool cover 100 has a cutting fluid supply nozzle 101 (omitted in fig. 1, refer to fig. 2), and the cutting fluid supply nozzle 101 supplies cutting water to both side surfaces of the cutting tool 71 in the cutting portion of the wafer W.
Fig. 2 is a schematic perspective view of the tool cover according to the present embodiment. As shown in fig. 2, the tool cover 100 has a nozzle support block 103 supporting the pair of peripheral injection nozzles 102 on the-X side. The tool cover 100 includes a cover body 105, the cover body 105 covers substantially the upper half of the outer periphery of the cutting tool 71, and a pair of cutting fluid supply nozzles 101 are provided in a region from the + X side of the cover body 105 to the lower portion of the cover body 105. The two cutting fluid supply nozzles 101 are provided with the cutting blade 71 interposed therebetween, and are configured to be plane-symmetric with the ZX plane as a symmetric plane. The cutting fluid supply nozzle 101 includes: a 1 st block 107 and a 2 nd block 108, which are provided on the + X side of the cover main body 105; and an L-shaped tube 110 supported by these blocks 107, 108.
The tube 110 is formed of a metal material such as stainless steel. The pipe 110 extends downward from each of the blocks 107 and 108, is partially bent in the middle, and has a distal end extending in the cutting feed direction (X direction) of the cutting tool 71. The pipe 110 is provided at a position spaced apart from the side surface of the cutting tool 71 by a predetermined distance in the Y direction, and is arranged to sandwich the cutting tool 71 between the pipes 110 of the two cutting fluid supply nozzles 101. In the pipe 110, a plurality of ejection ports 110a are formed in a row at a portion extending in the cutting feed direction. The upward base end (one end) of the tube 110 is connected to a cutting fluid supply source 120 (see fig. 3) via a connection portion 111, and the cutting fluid supplied from the cutting fluid supply source 120 to the tube 110 is ejected from an ejection port 110 a. Thereby, the cutting fluid is supplied from the discharge port 110a to both side surfaces of the cutting blade 71, and the cutting portion can be cooled, cleaned, and the like. Further, the tip (the other end) of the tube 110 is closed as a closed portion 110b, and the cutting fluid does not leak.
Next, the structure of the cutting fluid supply nozzle 101 will be described with reference to fig. 3. Fig. 3 is a schematic exploded perspective view showing a main part of the cutting fluid supply nozzle according to the present embodiment. Here, in the following description, the cutting fluid supply nozzle 101 located on the-Y side, of the two cutting fluid supply nozzles 101 arranged in the Y direction, will be described. The cutting fluid supply nozzle 101 located on the + Y side and the cutting fluid supply nozzle 101 located on the-Y side have a plane-symmetric structure, and the description thereof is omitted here.
As shown in fig. 3, the cutting fluid supply nozzle 101 is configured to: the outer wall of the tube 110 on the base end 110c side is clamped (sandwiched) by the clamping unit 113 from both sides in the Y direction through two blocks, i.e., the 1 st block 107 and the 2 nd block 108.
The 1 st block 107 is provided in a shape having a block main body 115 of a rectangular parallelepiped shape and a lower protrusion 116, wherein a coupling portion 111 is provided at an in-plane center portion of an upper surface of the block main body 115, and the lower protrusion 116 protrudes downward from a substantially half area of a + Y side of a lower surface 115a of the block main body 115.
A supply passage 118 that communicates with the connection portion 111 and extends downward is formed in the block main body 115 of the 1 st block 107, and a storage chamber 119 is formed between a lower end of the supply passage 118 and a lower surface 115a of the block main body 115. The housing chamber 119 is provided so as to be open on the lower surface 115a side of the block main body 115. The coupling portion 111 is connected to a cutting fluid supply source 120 that supplies a cutting fluid via a pump or the like.
A female screw 118a is formed on the upper end side of the supply passage 118, and a male screw 111a formed on the lower end of the connection portion 111 can be screwed into the female screw 118 a. The supply passage 118 is formed by a cylindrical inner wall surface having an inner diameter smaller than the diameter of the pipe 110. The housing chamber 119 is formed by a cylindrical inner wall surface having an inner diameter slightly larger than the diameter of the tube 110, and can house the tube 110 by a predetermined length from the base end 110c side of the tube 110. The supply passage 118 and the housing chamber 119 are provided on the same line at their central axis positions, and have a step at their boundary position due to their different diameters. By this step, a bottom portion (top surface) 119a is formed as an inner wall surface of an upper portion of the housing chamber 119. An O-ring 121 for maintaining liquid-tightness is disposed between the bottom 119a of the housing chamber 119 and the base end 110c of the tube 110. The supply passage 118 communicates the bottom 119a of the housing chamber 119 with the cutting fluid supply source 120 via the connection portion 111.
A 1 st semi-cylindrical recess 123 is formed in a vertical surface 116a parallel to the ZX surface and located on the-Y side of the lower protrusion 116 so that the vertical surface 116a is recessed to the + Y side. The 1 st semi-cylindrical recess 123 is formed to extend in the vertical direction, which is the extending direction of the housing chamber 119. The 1 st semi-cylindrical recess 123 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110, and the central axis position of the semi-circle is set on the same line as the central axis position of the housing chamber 119.
The 2 nd block 108 is formed in a rectangular parallelepiped shape and has a size falling within the vertical dimension range of the vertical surface 116a of the lower protrusion 116 and the Y-direction dimension range of the lower surface 115a of the block main body 115. A vertical surface 108a parallel to the ZX surface is formed on the + Y side of the 2 nd block 108, and the vertical surface 108a faces a vertical surface 116a of the lower protrusion 116. The 2 nd semi-cylindrical recess 124 is formed in the vertical surface 108a of the 2 nd block 108 so that the vertical surface 108a is recessed on the-Y side. The 2 nd semi-cylindrical recess 124 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110, and is formed in plane symmetry with the 1 st semi-cylindrical recess 123 with the ZX plane as a symmetry plane. Therefore, when the 1 st semi-cylindrical recess 123 and the 2 nd semi-cylindrical recess 124 are overlapped and opposed to each other, a cylindrical inner wall surface is formed by these recesses.
The clamp unit 113 has two screw members 126 (1 screw is omitted from the drawing) extending in the Y direction. Screw insertion holes 127 through which the screw members 126 are inserted are formed on both sides of the 2 nd semi-cylindrical recess 124 of the 2 nd block 108 in the X direction. The clamp unit 113 has female screw holes 128 at positions facing the respective screw insertion holes 127 on the vertical surface 116a of the lower protrusion 116. In the clamp unit 113, the screw member 126 is inserted into the screw insertion hole 127, and the tip of the screw member 126 is screwed into the internal screw hole 128, thereby exerting a force acting on the + Y side of the 2 nd block 108. By this force, the tube 110 is clamped by the 1 st block 107 and the 2 nd block 108 from both sides in the Y direction.
In the present embodiment, the tube 110 is clamped by the 1 st block 107 and the 2 nd block 108, and the tube 110 is attached to the blocks 107 and 108 in a deformed state. The structure for deforming the tube in this case will be described below with reference to fig. 4 in addition to fig. 3.
In fig. 3, a 1 st concave portion 131 is formed at a position of a predetermined width at the vertical center of the 1 st semi-cylindrical concave portion 123, and a 2 nd concave portion 132 is formed at a position facing the 1 st concave portion 131 at the vertical center of the 2 nd semi-cylindrical concave portion 124. The 1 st recess 131 is formed on both sides of the 1 st semi-cylindrical recess 123 in the X direction, and is formed by recessing the intersection of the 1 st semi-cylindrical recess 123 and the vertical surface 116a so as to be chamfered. The 2 nd recessed portion 132 is formed on both sides of the 2 nd semi-cylindrical recessed portion 124 in the X direction, and is formed by recessing the intersection portion between the 2 nd semi-cylindrical recessed portion 124 and the vertical surface 108a so as to be chamfered. In the 2 nd semi-cylindrical recess 124, a convex portion 133 is formed between the two 2 nd recess portions 132, and the convex portion 133 is formed so that the inner wall of the 2 nd semi-cylindrical recess portion 124 protrudes in the + Y direction.
Fig. 4 is a plan sectional view of a structure in which a pipe is clamped to be deformed. As shown in fig. 4, in the 2 nd block 108, the convex portion 133 is formed so as to connect between the two 2 nd concave portions 132, and the convex portion 133 and the inner wall surfaces of the two 2 nd concave portions 132 are formed in an arc shape along one imaginary circle C in the sectional view of fig. 4. Therefore, the front end of the convex portion 133 in the + Y direction, which is the protruding direction, is formed in an arc-shaped concave shape. The diameter of the imaginary circle C is formed larger than the diameter of the 2 nd semi-cylindrical recess 124. The position of the center of the virtual circle C in the Y direction is located on the + Y side of the vertical plane 108a, and the position of the center of the virtual circle C in the X direction is the same as the center of the semicircle of the 2 nd semi-cylindrical recess 124. The position closest to the-Y side of the virtual circle C, that is, the front end position of the convex portion 133 is located on the + Y side of the position closest to the-Y side of the 2 nd semi-cylindrical concave portion 124.
When the 1 st and 2 nd semi-cylindrical recesses 123 and 124 are overlapped and opposed to each other, the 1 st and 2 nd recesses 131 and 132 face each other. At this time, the 1 st recessed portion 131 is formed in a surface-symmetric shape with respect to the 2 nd recessed portion 132, with the ZX plane perpendicular to the paper plane of fig. 4 as a symmetric plane. Therefore, the inner wall surface of the 1 st recess 131 is also formed in an arc shape in a cross-sectional view.
In the cutting fluid supply nozzle 101 of the present embodiment, when the tube 110 is connected, the proximal end 110c side of the tube 110 is inserted from below the housing chamber 119 and housed therein as shown in fig. 3. At this time, the O-ring 121 is sandwiched between the base end 110c of the tube 110 and the bottom 119a of the housing chamber 119, and the base end 110c of the tube 110 is brought into contact with the bottom 119a via the O-ring 121. Then, the horizontal portion of the tube 110 is positioned parallel to the X direction using a jig or the like, not shown.
Thereafter, the outer wall of the tube 110 on the base end 110c side is sandwiched from both sides in the Y direction by the 1 st block 107 and the 2 nd block 108, and the screw member 126 inserted through the screw insertion hole 127 is screwed into the female screw hole 128. Thereby, the pipe 110 is clamped by the 1 st semi-cylindrical recess 123 and the 2 nd semi-cylindrical recess 124. By this clamping, as shown in fig. 5, the tube 110 is crushed by the convex portion 133 of the 2 nd semi-cylindrical concave portion 124 toward the + Y side, and both sides of the tube 110 in the X direction are pushed and spread so as to enter the 1 st concave portion 131 and the 2 nd concave portion 132. By this collapsing and pushing-out, the tube 110 is deformed so as to be reduced in width in the Y direction and increased in width in the X direction, and a bulging seal portion S is formed in a predetermined region on the base end 110c side of the tube 110. The bulging seal portion S is in close contact with the 1 st concave portion 131, the 2 nd concave portion 132, and the convex portion 133 of each of the semi-cylindrical concave portions 123, 124, and ensures liquid tightness at these interfaces.
The bulging seal portion S is fitted into the 1 st concave portion 131, the 2 nd concave portion 132, and the convex portion 133 to fix the pipe 110 to the blocks 107 and 108. Specifically, the rotation of the tube 110 about the Z-axis is restricted, and the downward pulling-out of the tube 110 is restricted. Here, in the bulge sealing portion S, a concave portion Sa is formed in a portion crushed (corresponding) by the convex portion 133, and a convex portion Sb is formed in a portion pushed out by the 1 st concave portion 131 and the 2 nd concave portion 132.
As described above, in the tool cover 100 of the present embodiment, since the pipe 110 is clamped and connected by the 1 st block 107 and the 2 nd block 108, the manufacturing can be easily performed and the manufacturing cost can be reduced as compared with the conventional structure in which these are integrally cut.
Further, the sealing portion S is bulged, so that the leakage of the cutting fluid at the connection portion of the pipe 110 can be prevented well. Further, the direction and position of the pipe 110 can be fixed at a predetermined position by positioning the pipe 110 with a jig or the like and clamping the pipe 110 to form the bulging seal portion S. This eliminates the adjustment work of making the pipe 110 parallel to the X direction or making the discharge port 110a face the side surface of the cutting tool 71, thereby facilitating the manufacturing and reducing the manufacturing cost. Further, even when the tube 110 is replaced, the adjustment work can be omitted to reduce the work load.
The shape and formation position of the 1 st concave portion 131, the 2 nd concave portion 132, and the convex portion 133 may be changed to other shapes and formation positions as long as the bulging seal portion S functioning similarly to the above embodiment can be formed.
The embodiment of the present invention is not limited to the above-described embodiments and modifications, and various changes, substitutions, and alterations can be made without departing from the spirit and scope of the technical idea of the present invention. Further, if the technical idea of the present invention can be realized by other methods due to the progress of the technology or other derived technologies, the method can also be used for implementation. Therefore, the claims cover all the embodiments that can be included in the scope of the technical idea of the present invention.
As described above, the present invention has an effect that leakage of the cutting fluid can be suppressed and the manufacturing can be performed at low cost, and is particularly useful for a cutting apparatus that cuts a wafer by a cutting tool while supplying the cutting fluid from a tool cover.
Claims (3)
1. A tool cover disposed at the front end of a spindle housing supporting a spindle in a rotatable manner, covering a cutting tool attached to the spindle, and having a cutting fluid supply nozzle for supplying a cutting fluid to both side surfaces of the cutting tool, the cutting fluid supply nozzle extending in a cutting feed direction of the cutting tool and disposed so as to sandwich the cutting tool,
the cutting fluid supply nozzle has:
a tube having a plurality of ejection ports for ejecting the cutting fluid arranged in the cutting feed direction, the cutting fluid being supplied from one end portion of the tube, and a closed portion at the other end portion;
a 1 st block and a 2 nd block which clamp an outer wall of one end side of the pipe; and
a clamping unit clamping the pipe by the 1 st block and the 2 nd block,
the 1 st block has:
a cylindrical housing chamber housing one end of the tube and having a bottom formed with an inner diameter larger than a diameter of the tube;
a 1 st semi-cylindrical recess formed to extend in the extending direction of the housing chamber; and
a supply path for communicating the bottom of the housing chamber with a cutting fluid supply source,
the 2 nd block has:
a 2 nd semi-cylindrical recess portion facing the 1 st semi-cylindrical recess portion and formed with an inner diameter equal to the diameter of the pipe; and
a convex portion formed to protrude from an inner wall of the 2 nd semi-cylindrical concave portion,
receiving the tube in the receiving chamber with one end of the tube in contact with the bottom,
the clamp unit clamps the pipe by the 1 st semi-cylindrical recess of the 1 st block and the 2 nd semi-cylindrical recess of the 2 nd block, and the convex portion of the 2 nd semi-cylindrical recess presses the pipe flat to spread the pipe, thereby forming a bulging seal portion on one end side of the pipe accommodated in the accommodation chamber.
2. The cutter guard of claim 1,
a 1 st concave part is formed on the 1 st semi-cylindrical concave part, a 2 nd concave part is formed on the 2 nd semi-cylindrical concave part,
when the 1 st semi-cylindrical recess and the 2 nd semi-cylindrical recess are overlapped, the 1 st recess and the 2 nd recess face each other.
3. The cutter cover according to claim 1 or 2,
the tube has a concave portion corresponding to the convex portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017123799A JP7105039B2 (en) | 2017-06-26 | 2017-06-26 | blade cover |
| JP2017-123799 | 2017-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109108841A CN109108841A (en) | 2019-01-01 |
| CN109108841B true CN109108841B (en) | 2021-09-24 |
Family
ID=64822773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810593461.2A Active CN109108841B (en) | 2017-06-26 | 2018-06-11 | Tool cover |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7105039B2 (en) |
| KR (1) | KR102439063B1 (en) |
| CN (1) | CN109108841B (en) |
| TW (1) | TWI751347B (en) |
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| JP2025103759A (en) * | 2023-12-27 | 2025-07-09 | Ｆｓテクニカル株式会社 | Cutting wheel mounting structure |
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| US2439642A (en) * | 1945-07-28 | 1948-04-13 | Mayfield C White | Adjustable hose holder |
| CN101590655A (en) * | 2008-05-28 | 2009-12-02 | 株式会社迪思科 | cutting device |
| CN202622468U (en) * | 2012-04-11 | 2012-12-26 | 东营信盛车桥有限公司 | Lubricating device of automatic pin shaft machining tool |
| CA2784109A1 (en) * | 2012-07-27 | 2014-01-27 | Nex Flow Air Products Corp. | Apparatus and method for cooling and lubrication |
| CN104791554A (en) * | 2015-04-17 | 2015-07-22 | 燕山大学 | Gas spring-type vibration reducing pipe clamp |
| CN105190148A (en) * | 2013-05-08 | 2015-12-23 | 日本皮拉工业株式会社 | Pipe connecting device |
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| JPH07248082A (en) * | 1994-03-10 | 1995-09-26 | Fujii Gokin Seisakusho:Kk | Pipe connection method and pipe connection device for implementing the same |
| JP4740488B2 (en) | 2001-08-20 | 2011-08-03 | 株式会社ディスコ | Dicing machine |
| JP5399662B2 (en) | 2008-08-19 | 2014-01-29 | 株式会社ディスコ | Cutting equipment |
| JP5437034B2 (en) | 2009-11-27 | 2014-03-12 | 株式会社ディスコ | Cutting equipment |
| JP5762189B2 (en) | 2011-07-14 | 2015-08-12 | 株式会社ディスコ | Cutting equipment |
| JP2013033802A (en) | 2011-08-01 | 2013-02-14 | Disco Abrasive Syst Ltd | Cutting device |
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2017
- 2017-06-26 JP JP2017123799A patent/JP7105039B2/en active Active
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2018
- 2018-06-08 KR KR1020180065903A patent/KR102439063B1/en active Active
- 2018-06-11 CN CN201810593461.2A patent/CN109108841B/en active Active
- 2018-06-22 TW TW107121470A patent/TWI751347B/en active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US2439642A (en) * | 1945-07-28 | 1948-04-13 | Mayfield C White | Adjustable hose holder |
| CN101590655A (en) * | 2008-05-28 | 2009-12-02 | 株式会社迪思科 | cutting device |
| CN202622468U (en) * | 2012-04-11 | 2012-12-26 | 东营信盛车桥有限公司 | Lubricating device of automatic pin shaft machining tool |
| CA2784109A1 (en) * | 2012-07-27 | 2014-01-27 | Nex Flow Air Products Corp. | Apparatus and method for cooling and lubrication |
| CN105190148A (en) * | 2013-05-08 | 2015-12-23 | 日本皮拉工业株式会社 | Pipe connecting device |
| CN104791554A (en) * | 2015-04-17 | 2015-07-22 | 燕山大学 | Gas spring-type vibration reducing pipe clamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2019005849A (en) | 2019-01-17 |
| KR20190001511A (en) | 2019-01-04 |
| TW201905994A (en) | 2019-02-01 |
| TWI751347B (en) | 2022-01-01 |
| JP7105039B2 (en) | 2022-07-22 |
| KR102439063B1 (en) | 2022-08-31 |
| CN109108841A (en) | 2019-01-01 |
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