JP7105039B2 - blade cover - Google Patents

Description

The present invention relates to a blade cover provided with a cutting fluid supply nozzle for supplying cutting fluid to a cutting blade.

In the manufacturing process of a semiconductor device, dividing lines are formed in a grid pattern on the surface of a substantially disk-shaped wafer, and devices and the like are formed in areas defined by the dividing lines. Then, the wafer is cut along the dividing lines by the cutting device to be divided into individual semiconductor chips. In the cutting process using a cutting device, a cutting blade that rotates at high speed cuts along the dividing line of the wafer. During cutting, cutting fluid is supplied to the side surface of the cutting blade through the cutting fluid supply nozzle to wash cutting waste and to cool and lubricate the machined portion.

In the cutting apparatus, the cutting fluid supply nozzle is arranged in a blade cover formed to cover the cutting blade, and is parallel to the cutting direction of the cutting blade with the cutting blade therebetween and on the holding surface of the holding table that holds the wafer. Two pipes are arranged parallel to each other. Also, the cutting fluid supply nozzle has a plurality of ejection ports arranged side by side in the cutting feed direction for ejecting the cutting fluid toward both side surfaces of the cutting blade in a direction orthogonal to the extending direction of the two pipes.

As a cutting fluid supply nozzle in a cutting device, in addition to the type disclosed in Patent Document 1, which is formed integrally with a block-shaped blade cover, as disclosed in Patent Document 2, cutting fluid is supplied to the blade cover. There is a type that is formed by connecting pipes that pass through.

JP 2010-46726 A Japanese Unexamined Patent Application Publication No. 2011-114220

With the former type of cutting fluid supply nozzle, the cutting fluid supply nozzle is well fixed to the blade cover. get expensive.

On the other hand, the latter type of cutting fluid supply nozzle has a pipe-shaped member connected to the blade cover, so it can be manufactured more easily and at a lower cost than the former type, but cutting fluid leakage is likely to occur at the connecting portion. In addition, it is necessary to adjust the pipe so that it is parallel to the cutting feed direction, and the work is complicated and likely to be a burden.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a blade cover that can suppress leakage of cutting fluid and can be manufactured at low cost by eliminating the work of adjusting the direction of the pipe. .

A blade cover according to one aspect of the present invention is disposed at the tip of a spindle housing that rotatably supports a spindle, covers a cutting blade attached to the spindle, extends in the cutting feed direction of the cutting blade, and sandwiches the cutting blade. and a cutting fluid supply nozzle for supplying cutting fluid to both side surfaces of the cutting blade, wherein the cutting fluid supply nozzle has a plurality of ejection ports for ejecting cutting fluid arranged in the cutting feed direction. , a pipe that supplies cutting fluid from one end and has a seal at the other end, and two first and second blocks that clamp the outer wall of the pipe on one end side, and clamping means for clamping the pipe with a second block, the first block being a circle having a bottom formed with an inner diameter greater than the diameter of the pipe containing a predetermined length from one end of the pipe. A columnar storage chamber, a first semi-cylindrical recess extending in the extending direction of the storage chamber and formed with an inner diameter equal to the diameter of the pipe, and a supply path communicating between the bottom of the storage chamber and a cutting fluid supply source. The second block comprises a second semi-cylindrical recess facing the first semi-cylindrical recess and having an inner diameter equal to the diameter of the pipe, and a second block protruding from the inner wall of the second semi-cylindrical recess. a first recess is formed on both sides in a direction orthogonal to the direction in which the pipe is clamped in the first semi-cylindrical recess, and the pipe is clamped in the second semi-cylindrical recess. Second recesses are formed on both sides in the direction perpendicular to the direction, the pipe is housed in the storage chamber, one end of the pipe is brought into contact with the bottom, and clamping means is used to clamp the first semi-cylindrical recess of the first block. The second semi-cylindrical recess of the second block clamps the pipe, and when the first semi-cylindrical recess and the second semi-cylindrical recess are overlapped, the projection of the second semi-cylindrical recess clamps the pipe. The collapsed pipe is pushed and stretched in a direction orthogonal to the clamping direction, and one end side of the pipe stored in the storage chamber is pushed and stretched in the orthogonal direction to face the bulging seal deformed so as to expand in width. It is characterized by being formed in close contact with the first concave portion and the second concave portion .

According to this configuration, the pipe can be clamped and held by the two blocks, so that the manufacturing burden can be reduced and the manufacturing cost can be reduced as compared with the conventional structure in which they are integrally machined. In addition, by clamping the pipe between the first block and the second block, the pipe is deformed by the projections and a bulging seal is formed, thereby suppressing leakage of cutting fluid at the connecting portion. can be done. Moreover, since the relative positions of the pipes and each block can be fixed by clamping the pipes, it is possible to omit the work of adjusting the positions and orientations of the pipes, thereby reducing the manufacturing cost by reducing the workload.

Further, in the blade cover of the present invention, the pipe preferably has a concave portion corresponding to the convex portion.

According to the present invention, since a bulging seal is formed by crushing the pipe with the convex portion, leakage of cutting fluid can be suppressed, and adjustment work of the pipe forming the cutting fluid supply nozzle can be eliminated, making it possible to manufacture at low cost. .

1 is a perspective view of a cutting device using a blade cover according to this embodiment; FIG. 1 is a schematic perspective view of a blade cover according to this embodiment; FIG. FIG. 2 is a schematic exploded perspective view showing the essential parts of the cutting fluid supply nozzle of the present embodiment; FIG. 4 is a plan cross-sectional view of a configuration for clamping and deforming a pipe; FIG. 4 is a plan cross-sectional view of a state in which the pipe is clamped and deformed;

Hereinafter, this embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus using a blade cover according to this embodiment. In addition, the cutting device according to the present embodiment is not limited to the configuration shown in FIG. The present invention can be applied to any cutting device as long as it can cut a wafer with a cutting blade while supplying cutting fluid from a blade cover. In the following figures, the front side in the X direction is +X side, the back side is -X side, the front side in Y direction is +Y side, the back side is -Y side, the upper side in Z direction is +Z side, and the lower side is -. Let's call it the Z side.

As shown in FIG. 1, the cutting device 1 is configured to cut the wafer W by relatively moving the wafer W held on the chuck table 12 and the cutting means 14 . The wafer W is carried into the cutting device 1 while being supported by the ring frame F with the dicing tape T therebetween. The wafer W may be a semiconductor wafer made of silicon, gallium arsenide, or the like, or an optical device wafer made of ceramic, glass, or sapphire. Moreover, not only circular wafers but also rectangular package substrates such as CSP (Chip Size Package) substrates and QFN (Quad Flat Non-leaded package) may be used.

On the base 11 of the cutting device 1, there is provided a cutting feeding means 13 for cutting and feeding the chuck table 12 in the X direction. The cutting feed means 13 has a pair of guide rails 31 parallel to the X direction arranged on the base 11, and a motor-driven X-axis table 32 slidably installed on the pair of guide rails 31. there is A nut portion (not shown) is formed on the back side of the X-axis table 32, and a ball screw 33 is screwed into this nut portion. A drive motor 34 connected to one end of the ball screw 33 is driven to rotate, so that the chuck table 12 is fed along the pair of guide rails 31 in the X direction, which is the cutting direction of the cutting blade 71 . .

Above the X-axis table 32, the chuck table 12 holding the wafer W is provided rotatably around the Z-axis. A holding surface made of a porous ceramic material is formed on the upper surface of the chuck table 12, and the wafer W is sucked and held by the negative pressure generated on this holding surface. Four air-driven clamps 22 are provided around the chuck table 12 , and the ring frame F around the wafer W is clamped and fixed from all sides by each of the clamps 22 . A gate-shaped vertical wall portion 81 is provided on the upper surface of the base 11 so as to extend over the moving path of the chuck table 12 .

The standing wall portion 81 is provided with an index feeding means 15 for index feeding the cutting means 14 in the Y direction and a cutting feeding means 16 for cutting and feeding the cutting means 14 in the Z direction. The index feeding means 15 has a pair of guide rails 51 arranged in front of the vertical wall portion 81 and parallel to the Y direction, and a Y-axis table 52 slidably installed on the pair of guide rails 51 . The cutting feed means 16 has a pair of guide rails 61 parallel to the Z direction arranged on the Y-axis table 52 and a Z-axis table 62 slidably installed on the pair of guide rails 61 . A cutting means 14 for cutting the wafer W is provided below the Z-axis table 62 .

Nut portions are formed on the rear sides of the Y-axis table 52 and the Z-axis table 62, respectively, and ball screws 53 and 63 are screwed into these nut portions. One end of the ball screw 53 for the Y-axis table 52 and the ball screw 63 for the Z-axis table 62 are each connected to a drive motor 64 (the drive motor for the Y-axis is not shown). By rotating the ball screws 53 and 63 by the drive motor 64 , the cutting means 14 is index-fed along the guide rail 51 in the Y direction orthogonal to the X direction, and the cutting means 14 is moved along the guide rail 61 . Then, the wafer W is cut and fed in the Z direction to approach and separate from it.

The cutting means 14 is configured by attaching a cutting blade 71 to the tip of a spindle 72 (see FIG. 2) projecting from a spindle housing 75 . The spindle housing 75 rotatably supports a spindle 72 as a rotating shaft of the cutting blade 71, and a motor (not shown) for rotating the spindle 72 is installed. A blade cover 100 surrounding the cutting blade 71 is provided on the tip end side of the spindle housing 75 so as to expose the region where the cutting blade 71 cuts into the wafer W. As shown in FIG. The blade cover 100 includes cutting fluid supply nozzles 101 (not shown in FIG. 1, see FIG. 2) for supplying cutting fluid to both side surfaces of the cutting blade 71 in the cutting portion of the wafer W. As shown in FIG.

FIG. 2 is a schematic perspective view of the blade cover according to this embodiment. As shown in FIG. 2, the blade cover 100 has a nozzle support block 103 that supports a pair of peripheral injection nozzles 102 on the -X side. The blade cover 100 also includes a cover body 105 that covers substantially the upper half of the outer circumference of the cutting blade 71, and a pair of cutting fluid supply nozzles 101 are provided from the +X side of the cover body 105 to the bottom. Two cutting fluid supply nozzles 101 are provided with the cutting blade 71 interposed therebetween, and they have a plane-symmetrical structure with the ZX plane as the plane of symmetry. The cutting fluid supply nozzle 101 includes a first block 107 and a second block 108 provided on the +X side of the cover body 105 and an L-shaped pipe 110 supported by these blocks 107 and 108 .

The pipe 110 is made of a metal material such as stainless steel. The pipe 110 extends downward from each of the blocks 107 and 108, bends in the middle, and extends in the cutting feed direction (X direction) of the cutting blade 71 at its tip side. The pipe 110 is provided at a predetermined distance in the Y direction from the side surface of the cutting blade 71 and arranged so that the cutting blade 71 is sandwiched between the pipes 110 of the two cutting fluid supply nozzles 101 . In the pipe 110, a plurality of ejection ports 110a are arranged and formed in a portion extending in the cutting feed direction. The upward base end (one end) of the pipe 110 is connected to a cutting fluid supply source 120 (see FIG. 3) via a connecting portion 111, and the cutting fluid supplied from the cutting fluid supply source 120 to the pipe 110 is supplied to the pipe 110. It is ejected from the ejection port 110a. As a result, the cutting fluid is supplied to both side surfaces of the cutting blade 71 from the ejection port 110a, and the cutting portion can be cooled, cleaned, and the like. Note that the tip (the other end) of the pipe 110 is closed as a sealing portion 110b to prevent leakage of the cutting fluid.

Next, the structure of the cutting fluid supply nozzle 101 will be described with reference to FIG. FIG. 3 is a schematic exploded perspective view showing the essential parts of the cutting fluid supply nozzle of this embodiment. Here, in the following description, of the two cutting fluid supply nozzles 101 arranged in the Y direction, the cutting fluid supply nozzle 101 positioned on the -Y side will be described. The cutting fluid supply nozzle 101 positioned on the +Y side has a plane-symmetrical structure with the cutting fluid supply nozzle 101 positioned on the -Y side, and the description thereof is omitted here.

As shown in FIG. 3, the cutting fluid supply nozzle 101 clamps (sandwiches) the outer wall of the pipe 110 on the side of the proximal end 110c of the pipe 110 from both sides in the Y direction with the clamping means 113 between the first block 107 and the second block 108. ) is configured as

The first block 107 includes a rectangular parallelepiped block body 115 having a connection part 111 provided in the center of the upper surface and a lower projecting body 116 projecting downward from a substantially half area on the +Y side of the lower surface 115a of the block body 115. is provided in a shape with

In the block body 115 of the first block 107, a supply path 118 is formed that communicates with the connecting portion 111 and extends downward. is formed. The storage chamber 119 is provided so as to open the lower surface 115a side of the block body 115 . A cutting fluid supply source 120 that supplies cutting fluid via a pump or the like is connected to the connecting portion 111 .

A female thread 118a is formed on the upper end side of the supply path 118, and a male thread 111a formed on the lower end of the connecting portion 111 can be screwed therewith. The supply path 118 is formed by a cylindrical inner wall surface having an inner diameter dimension smaller than the diameter of the pipe 110 . The storage chamber 119 is formed by a cylindrical inner wall surface having an inner diameter slightly larger than the diameter of the pipe 110, and can store a predetermined length of the pipe 110 from the base end 110c side. The supply path 118 and the storage chamber 119 are provided so that their center axes are on the same line, and a step is formed at the boundary between them due to the difference in diameter. A bottom portion (top surface) 119 a is formed as an inner wall surface in the upper portion of the storage chamber 119 by this step. Between the bottom portion 119a of the storage chamber 119 and the proximal end 110c of the pipe 110, an O-ring 121 is arranged to maintain liquid tightness. The supply path 118 communicates the bottom portion 119 a of the storage chamber 119 and the cutting fluid supply source 120 via the connecting portion 111 .

A vertical surface 116a located on the -Y side of the lower projecting body 116 and parallel to the ZX plane is formed with a first semi-cylindrical recess 123 so as to recess the vertical surface 116a toward the +Y side. The first semi-cylindrical concave portion 123 is formed to extend in the extending direction of the storage chamber 119, that is, in the vertical direction. The first semi-cylindrical concave portion 123 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the diameter of the pipe 110, and the central axis position of the semi-circular shape is provided on the same line as the central axis position of the storage chamber 119. .

The second block 108 has a rectangular parallelepiped shape and is sized to fit within the vertical width of the vertical surface 116a of the lower projecting body 116 and the width of the lower surface 115a of the block body 115 in the Y direction. The second block 108 has a vertical surface 108a parallel to the ZX plane on the +Y side, and this vertical surface 108a faces the vertical surface 116a of the lower projection 116. As shown in FIG. The vertical surface 108a of the second block 108 is formed with a second semi-cylindrical recess 124 so as to recess the vertical surface 108a toward the -Y side. The second semi-cylindrical recess 124 is formed by a semi-cylindrical inner wall surface having the same inner diameter as the pipe 110, and is symmetrical with the first semi-cylindrical recess 123 with the ZX plane as the plane of symmetry. Therefore, when the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124 are overlapped and opposed to each other, they form a cylindrical inner wall surface.

The clamp means 113 has two screw members 126 (one is not shown) extending in the Y direction. Screw insertion holes 127 through which screw members 126 are inserted are formed on both sides in the X direction of the second semi-cylindrical concave portion 124 in the second block 108 . The clamping means 113 also has female screw holes 128 at positions where the screw insertion holes 127 face each other on the vertical surface 116a of the lower projecting body 116. As shown in FIG. By inserting the screw member 126 through the screw insertion hole 127 and screwing the tip of the screw member 126 into the female screw hole 128 by the clamp means 113, a force that biases the second block 108 toward the +Y side is exerted. This force clamps the pipe 110 from both sides in the Y direction between the first block 107 and the second block 108 .

In this embodiment, the pipe 110 is attached to the blocks 107 and 108 in a deformed state by clamping the pipe 110 to the first block 107 and the second block 108 . A configuration for deforming the pipe at this time will be described below with reference to FIGS. 4 in addition to FIG.

In FIG. 3, the first recess 131 is formed at a predetermined width in the center of the first semi-cylindrical recess 123 in the vertical direction, and the second semi-cylindrical recess 124 faces the first recess 131 at the center in the vertical direction. A second recess 132 is formed at a position where The first recesses 131 are formed on both sides of the first semi-cylindrical recess 123 in the X direction, and are formed by chamfering the intersections of the first semi-cylindrical recess 123 and the vertical surface 116a. The second recesses 132 are formed on both sides of the second semi-cylindrical recess 124 in the X direction, and are formed by chamfering the intersections of the second semi-cylindrical recess 124 and the vertical surface 108a. A convex portion 133 is formed between two second concave portions 132 in the second semi-cylindrical concave portion 124, and the convex portion 133 is formed so as to protrude from the inner wall of the second semi-cylindrical concave portion 124 in the +Y direction. ing.

FIG. 4 is a plan cross-sectional view of a configuration for clamping and deforming a pipe. As shown in FIG. 4, in the second block 108, a convex portion 133 is continuously formed between two second concave portions 132, and these inner wall surfaces form one virtual circle when viewed in cross section in FIG. It is formed in an arc shape along C. Therefore, the tip shape of the +Y direction, which is the projecting direction of the convex portion 133, is formed so as to be recessed in an arc shape. The diameter dimension of the virtual circle C is formed to be larger than the diameter dimension of the second semi-cylindrical concave portion 124 . The center of the virtual circle C is located on the +Y side of the vertical plane 108 a in the Y direction, and the center of the semicircle of the second semi-cylindrical concave portion 124 is the same in the X direction. The most −Y side position of the virtual circle C, that is, the tip position of the projection 133 is on the +Y side of the most −Y side position of the second semi-cylindrical recess 124 .

When the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124 are overlapped and face each other, the first recess 131 and the second recess 132 face each other. At this time, the first recess 131 is formed in a shape that is symmetrical with respect to the second recess 132 with respect to the ZX plane perpendicular to the plane of FIG. Therefore, the inner wall surface of the first concave portion 131 is also formed in an arcuate shape when viewed in cross section.

When connecting the pipe 110 to the cutting fluid supply nozzle 101 of the present embodiment, as shown in FIG. At this time, the O-ring 121 is sandwiched between the base end 110c of the pipe 110 and the bottom portion 119a of the storage chamber 119, and the base end 110c of the pipe 110 is brought into contact with the bottom portion 119a with the O-ring 121 interposed. Then, a jig (not shown) or the like is used to position the horizontal portion of the pipe 110 so as to be parallel to the X direction.

After that, the first block 107 and the second block 108 sandwich the outer wall of the pipe 110 on the proximal end 110c side from both sides in the Y direction, and the screw member 126 inserted through the screw insertion hole 127 is screwed into the female screw hole 128 . As a result, the pipe 110 is clamped between the first semi-cylindrical recess 123 and the second semi-cylindrical recess 124 . By this clamping, as shown in FIG. 5, the convex portion 133 of the second semi-cylindrical concave portion 124 crushes the pipe 110 toward the +Y side, and both sides of the pipe 110 in the X direction form the first concave portion 131 and the second concave portion. It is pushed out to enter the recess 132 . By such crushing and stretching, the pipe 110 is deformed such that the Y-direction width of the pipe 110 is reduced and the X-direction width thereof is expanded, and a bulge seal S is formed in a predetermined region on the proximal end 110c side of the pipe 110 . The bulging seal S is brought into close contact with the first concave portion 131, the second concave portion 132 and the convex portion 133 in each of the semi-cylindrical concave portions 123 and 124, ensuring liquid tightness at their interfaces.

In addition, the bulging seal S is fitted with the first recess 131, the second recess 132 and the projection 133 so that the pipe 110 is fixed to each of the blocks 107 and . Specifically, the rotation of the pipe 110 about the Z-axis is restricted, and the downward withdrawal of the pipe 110 is restricted. Here, in the swelling seal S, a concave portion Sa is formed in a portion crushed (corresponding) by the convex portion 133, and a convex portion Sb is formed in a portion pushed and extended by the first concave portion 131 and the second concave portion 132. It is formed.

As described above, in the blade cover 100 of the present embodiment, the pipe 110 is clamped and connected by the first block 107 and the second block 108. Therefore, compared to the conventional structure in which these are integrally machined, the blade cover 100 can be easily Manufacturing cost can be reduced as it is manufacturable.

In addition, the bulging seal S can effectively prevent cutting fluid from leaking from the connecting portion of the pipe 110 . Furthermore, by positioning and clamping the pipe 110 with a jig or the like to form the swelling seal S, the direction and position of the pipe 110 can be fixed at a predetermined position. As a result, it is possible to omit adjustment work such as making the pipe 110 parallel to the X direction and making the ejection port 110a face the side surface of the cutting blade 71, thereby facilitating manufacturing and reducing the manufacturing cost. can. Also, when exchanging the pipe 110, the work load can be reduced by omitting the adjustment work.

The shape and formation position of the first concave portion 131, the second concave portion 132, and the convex portion 133 are changed to other shapes and formation positions as long as the bulging seal S that functions in the same manner as in the above embodiment can be formed. You may

Moreover, the embodiments of the present invention are not limited to the above-described embodiments and modifications, and may be changed, replaced, and modified in various ways without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by advances in technology or another derived technology, the method may be used for implementation. Therefore, the claims cover all embodiments that can be included within the scope of the technical concept of the present invention.

INDUSTRIAL APPLICABILITY As described above, the present invention has the effect of being able to suppress cutting fluid leakage and to be manufactured at low cost. useful for

71 cutting blade 72 spindle 75 spindle housing 100 blade cover 101 cutting fluid supply nozzle 110 pipe 110a spout 110b sealing portion 110c proximal end (one end)
107 first block 108 second block 113 clamping means 118 supply channel 119 storage chamber 119a bottom 120 cutting water supply source 123 first semi-cylindrical recess 124 second semi-cylindrical recess 131 first recess 132 second recess 133 Convex portion S Bulging seal Sa Concave portion Sb Convex portion

Claims (2)

It is arranged at the tip of a spindle housing that rotatably supports a spindle, covers a cutting blade mounted on the spindle, extends in the cutting feed direction of the cutting blade, and is arranged to sandwich the cutting blade. A blade cover comprising cutting fluid supply nozzles for supplying cutting fluid to both sides of the
The cutting fluid supply nozzle is
a pipe having a plurality of ejection ports for ejecting the cutting fluid arranged in the cutting feed direction, supplying the cutting fluid from one end thereof, and having a sealing portion at the other end thereof;
two first and second blocks clamping the outer wall of one end of the pipe;
clamping means for clamping the pipe between the first block and the second block;
The first block includes a cylindrical storage chamber having a bottom formed with an inner diameter larger than the diameter of the pipe that stores a predetermined length from one end of the pipe; a first semi-cylindrical recess extending and formed with an inner diameter equal to the diameter of the pipe;
The second block comprises a second semi-cylindrical recess formed opposite the first semi-cylindrical recess and having an inner diameter equal to the diameter of the pipe, and protruding from the inner wall of the second semi-cylindrical recess. a convex portion;
First recesses are formed on both sides in a direction perpendicular to the direction in which the pipe is clamped in the first semi-cylindrical recess, and the pipe is clamped in the second semi-cylindrical recess. second recesses are formed on both sides in the orthogonal direction,
housing the pipe in the housing chamber and bringing one end of the pipe into contact with the bottom;
said clamping means with said first semi-cylindrical recess in said first block and said second semi-cylindrical recess in said second block clamping said pipe;When the first semi-cylindrical recess and the second semi-cylindrical recess are overlapped,The convex portion of the second semi-cylindrical recess crushes the pipe and pushes and stretches it in a direction orthogonal to the direction in which the pipe is clamped, so that one end of the pipe stored in the storage chamber is perpendicular to the clamping direction. in the directionstretched outA bulge seal that deforms so that the width expandsAdhering to the facing first recess and the second recessForming blade cover. 2. The blade cover according to claim 1 , wherein said pipe has recesses corresponding to said protrusions.

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