TWI747649B - Resin molding method - Google Patents

Resin molding method Download PDF

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TWI747649B
TWI747649B TW109143181A TW109143181A TWI747649B TW I747649 B TWI747649 B TW I747649B TW 109143181 A TW109143181 A TW 109143181A TW 109143181 A TW109143181 A TW 109143181A TW I747649 B TWI747649 B TW I747649B
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release film
mold
resin
film
molding
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TW109143181A
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Chinese (zh)
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TW202112520A (en
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中澤英明
藤澤雅彥
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日商山田尖端科技股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/56Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/68Release sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/50Removing moulded articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/40Removing or ejecting moulded articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561Batch processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Abstract

提供一種能夠削減成形品之製造運轉成本的技術。 To provide a technology that can reduce the manufacturing and operating costs of molded products.

一種樹脂成形方法,具備反覆從薄膜卷切出單片的離型薄膜F並供給至模具20,並以供給到模具20之工件及樹脂進行模製成形的工序之構成,在將離型薄膜F的外周部以保持具82作保持的狀態下向離型薄膜F供給樹脂後,將離型薄膜F與樹脂R連同保持具82供給至模具20,將以保持具82所保持的離型薄膜F使用在複數次模製成形,離型薄膜F每進行複數次使用時,對離型薄膜F重新賦予張力。 A resin molding method is provided with a structure of repeatedly cutting a single release film F from a film roll and supplying it to a mold 20, and molding the workpiece and resin supplied to the mold 20. The release film F After supplying the resin to the release film F in the state held by the holder 82, the release film F and the resin R together with the holder 82 are supplied to the mold 20, and the release film F held by the holder 82 It is used for multiple times of molding, and the release film F is re-applied with tension every time the release film F is used for multiple times.

Description

樹脂成形方法 Resin molding method

本發明係有關一種樹脂成形方法及樹脂成形裝置。 The invention relates to a resin molding method and a resin molding device.

日本特開平08-142105(專利文獻1)中記載了將樹脂填充於被離型薄膜覆蓋之狀態的模穴內以進行樹脂成形的技術。 Japanese Patent Application Laid-Open No. 08-142105 (Patent Document 1) describes a technique in which resin is filled in a mold cavity covered with a release film to perform resin molding.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature]

專利文獻1 日本特開平08-142105 Patent Document 1 Japanese Patent Application Publication No. 08-142105

在樹脂成形後的離型薄膜形成有因伸展或凹凸所致的皺折。當假設在離型薄膜有皺折的狀態下進行樹脂成形時,其皺折會被轉印在成形品而成為成形不良的原因。因此,以每1次的樹脂成形動作被供給無皺折的離型薄膜(未使用部分)而進行樹脂成形者較佳。然而,因為離型薄膜的使用量會影響成形品的製造運轉成本,所以會有使用量一增加就導致成本變高的問題。 The release film after resin molding is formed with wrinkles due to stretching or unevenness. When resin molding is performed in a state where the release film has wrinkles, the wrinkles will be transferred to the molded product and cause poor molding. Therefore, it is preferable to supply a wrinkle-free release film (unused part) for each resin molding operation to perform resin molding. However, because the amount of release film used affects the manufacturing and operating costs of the molded product, there is a problem that the increase in the amount of use leads to higher costs.

本發明之一目的為提供一種能夠削減成形品之製造運轉成本的技術。此外,本發明之一目的及其他目的以及新穎特徵從本說明書的記述及附件圖面應可明瞭。An object of the present invention is to provide a technique capable of reducing the manufacturing and operating costs of molded products. In addition, one object, other objects, and novel features of the present invention should be clear from the description of this specification and the attached drawings.

本發明的一解決手段的樹脂成形方法,其特徵為:具備反覆從薄膜卷切出單片的前述離型薄膜並供給至前述模具,並以供給到前述模具之前述工件及前述樹脂進行模製成形的工序之構成,在將前述離型薄膜的外周部以保持具作保持的狀態下向前述離型薄膜供給樹脂後,將前述離型薄膜與前述樹脂連同前述保持具供給至模具,將以前述保持具所保持的前述離型薄膜使用在複數次模製成形,前述離型薄膜每進行複數次使用時,對前述離型薄膜重新賦予張力。據此,因為藉由將單片薄膜(離型薄膜)作複數次使用而減少在模製成形中之單片薄膜的使用量,故可削減成形品的製造運轉成本。且,可防止單片薄膜產生皺折而可作複數次使用。進而可防止發生因伸長的單片薄膜而發生不良狀況的問題。The resin molding method of one solution of the present invention is characterized in that it comprises repeatedly cutting the release film from a film roll into a single piece and supplying it to the mold, and molding the workpiece and the resin supplied to the mold. The structure of the molding process is to supply resin to the release film while holding the outer peripheral portion of the release film with a holder, and then supply the release film and the resin together with the holder to the mold, and The release film held by the holder is used for multiple times of molding, and every time the release film is used multiple times, the release film is re-applied with tension. Accordingly, by using the single film (release film) multiple times, the amount of the single film used in the molding process can be reduced, so that the manufacturing operation cost of the molded product can be reduced. In addition, the single film can be prevented from being wrinkled and can be used for multiple times. Furthermore, it is possible to prevent the occurrence of defects due to the elongated single-piece film.

本發明之一解決手段的樹脂成形裝置,其特徵為具備:薄膜搬送裝置,其具備將外周部被保持具所保持之單片的離型薄膜進行搬送的搬送治具,前述搬送治具具備:將位在前述保持具的內側之前述離型薄膜按壓的按壓部;保持前述保持具,使前述保持具朝與前述按壓部的按壓方向相反方向移動之可動保持部;及模具。據此,可防止單片薄膜產生皺折。The resin molding apparatus, which is one of the solutions of the present invention, is characterized by having: a film conveying device provided with a conveying jig for conveying a single release film held by the outer peripheral portion by the holder, and the conveying jig is provided with: A pressing part that presses the release film located inside the holder; a movable holding part that holds the holder and moves the holder in a direction opposite to the pressing direction of the pressing part; and a mold. According to this, the single film can be prevented from wrinkling.

簡單說明本案揭示的發明中具代表性者所能獲得之效果如下。可削減成形品的製造運轉成本。A brief description of the effects that can be obtained by a representative of the inventions disclosed in this case is as follows. The manufacturing and operating costs of molded products can be reduced.

在以下的本發明實施形態中,雖在必要的情況會分成複數個部分等作說明,但原則上,其等並非彼此不相干,而係一者是處在另一者的一部份或全部的變形例、詳細等之關係。因此,在所有圖中,對具有同一機能的構件賦予同一符號且省略其重複的說明。又,針對構成要素的數(包含個數、數值、量、範圍等),除非特別明示的情況或原理上清楚限定為特定數的情況等以外,未受其特定數所限定,亦可為特定數以上或以下。又,在提及構成要素等之形狀時,除了特別明示的情況及原理上認為並非如此的情況等以外,係設成包含實質與其形狀等近似或類似者。In the following embodiments of the present invention, although necessary, the description will be divided into plural parts, etc., but in principle, they are not irrelevant to each other, and one is part or all of the other. The relationship between the modification, details, etc. Therefore, in all the drawings, the same reference numerals are given to members having the same function, and repeated descriptions thereof are omitted. In addition, the number of constituent elements (including number, numerical value, amount, range, etc.) is not limited by the specific number, and may be specific unless it is specifically stated or is clearly limited to a specific number in principle. Number above or below. In addition, when referring to the shape of a constituent element and the like, except for the case where it is specifically stated and the case that is not considered to be the case in principle, etc., it is assumed to include those that are substantially similar to or similar to the shape and the like.

(實施形態1) 針對本發明實施形態1的樹脂成形裝置10,參照圖面作說明。圖1及圖2係分別為樹脂成形裝置10的初期狀態及成形後狀態之示意構成圖(部份剖面圖)。樹脂成形裝置10係使用長形的輥狀的離型薄膜F(薄膜卷)的壓縮成形類型,對工件W(例如搭載有零件的基板)使用樹脂R進行樹脂成形(模製成形)。(Embodiment 1) The resin molding apparatus 10 according to the first embodiment of the present invention will be described with reference to the drawings. 1 and 2 are schematic configuration diagrams (partial cross-sectional views) of the initial state and post-molding state of the resin molding apparatus 10, respectively. The resin molding apparatus 10 is a compression molding type using a long roll-shaped release film F (film roll), and resin R is used for resin molding (molding) of a workpiece W (for example, a substrate on which parts are mounted).

樹脂成形裝置10係具備具有成對之上模21及下模22(一及另一模具)的成形模具20。成形模具20係利用公知的壓機機構可開閉模具,使上模21與下模22進行接觸移動或分離移動。又,成形模具20為,上模21具備模穴C(模穴凹部),在開模狀態中模穴C被開放,而在閉模狀態中模穴C被閉塞。又,成形模具20係透過公知的內建加熱器加熱,透過對供給或填充至模穴C的樹脂R施加熱而進行樹脂成形。又,成形模具20係上模21的模具面21a被供給離型薄膜F,下模22的模具面22a被供給工件W。The resin molding apparatus 10 includes a molding die 20 having a pair of upper mold 21 and lower mold 22 (one mold and the other mold). The forming mold 20 is capable of opening and closing the mold using a known press mechanism, so that the upper mold 21 and the lower mold 22 are moved in contact or separated. In addition, in the forming mold 20, the upper mold 21 is provided with a cavity C (cavity recess), the cavity C is opened in the mold opened state, and the cavity C is closed in the mold closed state. In addition, the molding die 20 is heated by a well-known built-in heater, and resin molding is performed by applying heat to the resin R supplied or filled in the cavity C. In addition, the mold surface 21a of the upper mold 21 of the forming mold 20 is supplied with the release film F, and the mold surface 22a of the lower mold 22 is supplied with the workpiece W.

上模21係具備模穴件23、夾持件24及基座25,且將此等模具塊組裝所構成。在夾持件24的厚度方向形成有貫通孔。在此貫通孔有模穴件23插入的狀態下,模穴件23被固定並支持於基座25。藉此,就上模21而言,模穴C是以模穴件23的下表面及夾持件24的內周面所包圍的區域所構成。又,成形模具20具備設置在夾持件24與基座25之間的彈性構件26(例如彈簧)。夾持件24隔著此彈性構件26組裝於基座25且構成為可於模具開閉方向進退移動。The upper mold 21 is composed of a cavity 23, a clamping member 24, and a base 25, and these mold blocks are assembled. A through hole is formed in the thickness direction of the holder 24. In the state where the cavity piece 23 is inserted into the through hole, the cavity piece 23 is fixed and supported by the base 25. Thereby, as for the upper mold 21, the cavity C is constituted by the area surrounded by the lower surface of the cavity member 23 and the inner peripheral surface of the clamping member 24. In addition, the forming mold 20 includes an elastic member 26 (for example, a spring) provided between the holder 24 and the base 25. The clamper 24 is assembled to the base 25 via the elastic member 26 and is configured to be movable forward and backward in the mold opening and closing direction.

又,成形模具20具備設置在夾持件24的內周面與模穴件23的外周面之間的密封構件27(例如O環)。又,成形模具20具備以可將成形模具20的外部與內部(包含模穴C在內)連通的方式設置在夾持件24的空氣路徑28、29。在空氣路徑28、29的模具外部側連接未圖示的吸引裝置(例如真空泵)。藉此,在將上模21的模具面21a以離型薄膜F覆蓋之際,可透過空氣路徑28(內周側)、空氣路徑29(外周側)吸附離型薄膜F。In addition, the forming mold 20 includes a sealing member 27 (for example, an O ring) provided between the inner peripheral surface of the holder 24 and the outer peripheral surface of the cavity member 23. In addition, the forming mold 20 is provided with air paths 28 and 29 provided in the holder 24 so that the outside and the inside (including the cavity C) of the forming mold 20 can communicate with each other. An unillustrated suction device (for example, a vacuum pump) is connected to the air paths 28 and 29 on the outside of the mold. Thereby, when the mold surface 21a of the upper mold 21 is covered with the release film F, the release film F can be sucked through the air path 28 (inner peripheral side) and the air path 29 (outer peripheral side).

又,成形模具20具備設置在下模22的模具面22a的密封構件30(例如O環)。又,成形模具20具備以將成形模具20的外部與內部連通的方式設置在下模22的空氣路徑31。在空氣路徑31的模具外部側連接未圖示的吸引裝置(例如真空泵)。藉此,於閉模的狀態,藉由從空氣路徑31對在上模21與下模22之間密封構件30被壓碎而密閉的模具內部進行空氣吸引,可設成減壓(真空)狀態。In addition, the forming mold 20 includes a sealing member 30 (for example, an O ring) provided on the mold surface 22 a of the lower mold 22. In addition, the forming mold 20 includes an air path 31 provided in the lower mold 22 such that the outside and the inside of the forming mold 20 communicate with each other. An unillustrated suction device (for example, a vacuum pump) is connected to the outside of the mold of the air path 31. Thereby, in the closed mold state, by sucking air from the air path 31 into the mold sealed by crushing the sealing member 30 between the upper mold 21 and the lower mold 22, it can be set to a reduced pressure (vacuum) state. .

又,成形模具20具備以可將成形模具20的外部與模具面22a連通之方式設置在下模22的空氣路徑32。在空氣路徑32的模具外部側連接未圖示的吸引裝置(例如真空泵)。藉此,在將工件W安置(供給)在下模22的模具面22a之際,可經由空氣路徑32吸附工件W。In addition, the forming mold 20 includes an air path 32 provided in the lower mold 22 such that the outside of the forming mold 20 and the mold surface 22a can communicate with each other. An unillustrated suction device (for example, a vacuum pump) is connected to the outside of the mold of the air path 32. Thereby, when the workpiece W is placed (supplied) on the mold surface 22 a of the lower mold 22, the workpiece W can be sucked through the air path 32.

又,樹脂成形裝置10具備以位在成形模具20兩側的方式設置且將輥狀的離型薄膜F朝模具內部搬送(供給)之薄膜裝載手臂40(薄膜搬送裝置)。薄膜裝載手臂40係被樹脂成形裝置10所具備的控制部41所控制。控制部41具備CPU及ROM、RAM等之記憶體,且依據記憶體所記錄之控制程式,利用CPU執行控制動作,以控制含有薄膜裝載手臂40的樹脂成形裝置10整體。In addition, the resin molding apparatus 10 includes a film loading arm 40 (film conveying device) that is installed on both sides of the molding die 20 and conveys (supplies) the roll-shaped release film F to the inside of the die. The film loading arm 40 is controlled by the control unit 41 included in the resin molding apparatus 10. The control unit 41 is equipped with memory such as CPU, ROM, RAM, etc., and executes control actions by the CPU according to the control program recorded in the memory to control the entire resin molding apparatus 10 including the film loading arm 40.

本實施形態中,離型薄膜F係於樹脂成形後容易從成形模具20剝離者,且使用由具有耐熱性、柔軟性及伸展性的薄膜材所構成者。作為離型薄膜F,例如適合使用PTFE、ETFE、PET、FEP、氟含浸玻璃布、聚丙烯、聚偏二氯乙烯等。In this embodiment, the release film F is one that is easily peeled from the molding die 20 after resin molding, and is composed of a film material having heat resistance, flexibility, and stretchability. As the release film F, for example, PTFE, ETFE, PET, FEP, fluorine-impregnated glass cloth, polypropylene, polyvinylidene chloride, etc. are suitably used.

又,薄膜裝載手臂40具備捲出部50及捲取部60,且從捲出部50朝捲取部60搬送離型薄膜F。此際,離型薄膜F被供給至配置在捲出部50與捲取部60之間的成形模具20。亦即,如圖1及圖2所示,從捲出部50送出之未使用的離型薄膜F被供給到開模的成形模具20,經過成形模具20且已使用過的離型薄膜F在捲取部60被捲取。此外,在圖1所示的捲取部60中,顯示離型薄膜F未被捲取的狀態(使用前的狀態)。圖2所示的捲取部60而言,係顯示在具有於成形時所形成的凹凸等之皺折的狀態下被捲取的離型薄膜F。In addition, the film loading arm 40 includes an unwinding section 50 and a winding section 60, and conveys the release film F from the unwinding section 50 to the winding section 60. At this time, the release film F is supplied to the forming die 20 arranged between the unwinding part 50 and the winding part 60. That is, as shown in FIGS. 1 and 2, the unused release film F sent out from the unwinding part 50 is supplied to the opened mold 20, and the used release film F passes through the mold 20 in The winding part 60 is wound up. In addition, in the winding part 60 shown in FIG. 1, the state where the release film F was not wound up (the state before use) is shown. The winding part 60 shown in FIG. 2 shows the release film F wound up in a state having wrinkles such as concavities and convexities formed during molding.

捲出部50具備:捲出離型薄膜F的捲出軸51;偵測離型薄膜F的送出量(移送量)之測量輥52;及引導離型薄膜F的導輥53。又,捲取部60係具備捲取離型薄膜F的捲取軸61、運送離型薄膜F的進給輥62、及引導離型薄膜F的導輥63所構成。在薄膜裝載手臂40中,按離型薄膜F的搬送上游到下游之順序設置捲出軸51、測量輥52、導輥53、導輥63、進給輥62及捲取軸61,且在捲出軸51與捲取軸61之間架設有離型薄膜F。在圖1所示的初期狀態中,未使用的離型薄膜F被安裝於捲出軸51,離型薄膜F的前端安裝在捲取軸61。The unwinding part 50 is provided with: the unwinding shaft 51 which winds the release film F; the measuring roller 52 which detects the delivery amount (transfer amount) of the release film F; and the guide roller 53 which guides the release film F. In addition, the winding section 60 includes a winding shaft 61 that winds the release film F, a feed roller 62 that conveys the release film F, and a guide roller 63 that guides the release film F. In the film loading arm 40, the unwinding shaft 51, the measuring roller 52, the guide roller 53, the guide roller 63, the feed roller 62, and the take-up shaft 61 are arranged in the order from the upstream to the downstream of the release film F. A release film F is erected between the output shaft 51 and the take-up shaft 61. In the initial state shown in FIG. 1, the unused release film F is attached to the unwinding shaft 51, and the tip of the release film F is attached to the winding shaft 61.

又,薄膜裝載手臂40具備:設於捲出軸51以使捲出軸51旋轉的捲出伺服馬達54;及設於測量輥52的編碼器55。在捲出伺服馬達54與控制部41之間,進行資料之收發。又,編碼器55係用在測定從捲出軸51經由測量輥52送出之離型薄膜F的送出量(旋轉數)。從編碼器55朝控制部41進行資料之發送。藉此,於薄膜裝載手臂40中,在控制部41的控制下可控制離型薄膜F的搬送狀態。此外,編碼器55係使用與捲出伺服馬達54同樣的伺服馬達,亦可使用內建於其之編碼器。In addition, the film loading arm 40 includes: an unwinding servo motor 54 provided on the unwinding shaft 51 to rotate the unwinding shaft 51; and an encoder 55 provided on the measuring roller 52. Data is sent and received between the unwinding servo motor 54 and the control unit 41. In addition, the encoder 55 is used to measure the amount (the number of revolutions) of the release film F sent from the unwinding shaft 51 via the measuring roller 52. The data is sent from the encoder 55 to the control unit 41. Thereby, in the film loading arm 40, the conveying state of the release film F can be controlled under the control of the control unit 41. In addition, the encoder 55 uses the same servo motor as the unwinding servo motor 54, and an encoder built into it can also be used.

又,薄膜裝載手臂40具備設於捲取軸61以使捲取軸61旋轉的捲取伺服馬達64。在捲取伺服馬達64與控制部41之間,進行資料之收發。又,就薄膜裝載手臂40而言,捲取軸61的轉矩受捲取伺服馬達64所控制。此外,雖利用控制部41控制離型薄膜F的搬送狀態,但在對離型薄膜F施加張力之際,在使捲取軸61停止(固定)的狀態下使捲出軸51逆轉。In addition, the film loading arm 40 includes a winding servo motor 64 provided on the winding shaft 61 to rotate the winding shaft 61. Data is transmitted and received between the winding servo motor 64 and the control unit 41. Furthermore, in the film loading arm 40, the torque of the winding shaft 61 is controlled by the winding servo motor 64. In addition, although the conveying state of the release film F is controlled by the control part 41, when tension is applied to the release film F, the unwinding shaft 51 is reversely rotated in the state which stopped (fixed) the take-up shaft 61. As shown in FIG.

離型薄膜F的送出量可從測量輥52的直徑與測量輥52的旋轉數求出。此外,在薄膜裝載手臂40中,依據在編碼器55測定之送出量,利用捲出伺服馬達54(控制部41)控制捲出軸51的轉矩。例如,即便向捲出軸51施加相同的力(電流值)使之旋轉,由於向離型薄膜F施加張力的轉矩會依離型薄膜F的直徑而異,所以受捲出伺服馬達54(控制部41)所控制。The feeding amount of the release film F can be obtained from the diameter of the measuring roller 52 and the number of rotations of the measuring roller 52. In addition, in the film loading arm 40, the unwinding servo motor 54 (control section 41) controls the torque of the unwinding shaft 51 based on the feeding amount measured by the encoder 55. For example, even if the same force (current value) is applied to the unwinding shaft 51 to rotate it, since the torque for applying tension to the release film F varies depending on the diameter of the release film F, the unwinding servo motor 54 ( Controlled by the control unit 41).

於既定的動作時點之在捲出軸51中的離型薄膜F的直徑,例如可依據未使用的離型薄膜F的外徑與送出之離型薄膜F的總量及離型薄膜F的厚度來算出。具體言之,從初期狀態中之未使用的離型薄膜F的外徑減去已送出之份量的離型薄膜F之厚度,可求出。此處,已送出之份量的離型薄膜F之厚度係從送出之離型薄膜F的總量(距離)與離型薄膜F的厚度求出。此外,本實施形態中例示的各個值的算出等未必要直接算出。因此,例如只要作為在控制的過程之計算式裝入、或在個別的控制之過程實質地利用其思想即可。The diameter of the release film F in the unwinding shaft 51 at a predetermined time of operation can be based on, for example, the outer diameter of the unused release film F and the total amount of the released release film F and the thickness of the release film F To figure it out. Specifically, it can be obtained by subtracting the delivered amount of the thickness of the release film F from the outer diameter of the unused release film F in the initial state. Here, the thickness of the released release film F is calculated from the total amount (distance) of the released release film F and the thickness of the release film F. In addition, it is not necessary to directly calculate the calculation of each value exemplified in this embodiment. Therefore, for example, as long as it is incorporated as a calculation formula in the control process, or the idea is actually used in the individual control process.

又,作為含有離型薄膜F的捲出軸51之直徑的算出方法,也可藉由在送出既定量的離型薄膜F之際包含離型薄膜F在內的捲出軸51之旋轉量與測量輥52的旋轉量之比率而算出。在此情況,以此旋轉量之比率的倒數與測量輥52的外徑(固定值)之積,算出包含離型薄膜F在內的捲出軸51之外徑。參照藉由包含此等例示之手法的任意手法所求得之捲出軸51(包含離型薄膜F在內)的外徑大小來控制轉矩。In addition, as a method of calculating the diameter of the unwinding shaft 51 containing the release film F, the rotation amount of the unwinding shaft 51 including the release film F and the amount of The ratio of the amount of rotation of the roller 52 is measured and calculated. In this case, the product of the reciprocal of the ratio of the rotation amount and the outer diameter (fixed value) of the measuring roller 52 is used to calculate the outer diameter of the unwinding shaft 51 including the release film F. The torque is controlled by referring to the size of the outer diameter of the unwinding shaft 51 (including the release film F) obtained by any method including these exemplified methods.

又,薄膜裝載手臂40具備:引導離型薄膜F的導輥53、63;及安裝有此等且同時作動受控制部41所控制的進退機構56、66(例如缸體)。導輥53係設於薄膜搬送上游側(捲出側)的上模21的附近,繞掛有離型薄膜F。另一方面,導輥63係設於薄膜搬送下游側(捲取側)的上模21的附近,繞掛有離型薄膜F。導輥53、63係構成為藉由進退機構56、66可在與上模21的模具面21a正交的方向(同圖的上下方向)進退移動。In addition, the film loading arm 40 includes guide rollers 53 and 63 for guiding the release film F; The guide roller 53 is provided in the vicinity of the upper mold 21 on the upstream side of the film conveyance (unwinding side), and the release film F is wound around it. On the other hand, the guide roller 63 is provided in the vicinity of the upper mold 21 on the downstream side (winding side) of the film conveyance, and the release film F is wound around it. The guide rollers 53 and 63 are configured to be able to advance and retreat in the direction orthogonal to the mold surface 21 a of the upper mold 21 (the vertical direction in the same figure) by the advance and retreat mechanisms 56 and 66.

藉此,進退機構56、66係在薄膜供給工序中使導輥53、63下降,可使離型薄膜F移往與模具面21a分離的位置。另一方面,進退機構56、66係可在模製工序中使導輥53、63上升,使離型薄膜F移往與模具面21a接近的位置。亦即,透過使進退機構56、66連動地作動而進行藉導輥53、63引導之離型薄膜F的上下位置控制。如此,在樹脂成形裝置10中控制離型薄膜F在薄膜裝載手臂40的保持位置。Thereby, the advancing and retreating mechanisms 56 and 66 lower the guide rollers 53, 63 during the film supply process, and can move the release film F to a position separated from the mold surface 21a. On the other hand, the advance and retreat mechanisms 56 and 66 can raise the guide rollers 53, 63 during the molding process to move the release film F to a position close to the mold surface 21a. That is, the vertical position control of the release film F guided by the guide rollers 53, 63 is performed by operating the advance and retreat mechanisms 56, 66 in conjunction. In this way, the holding position of the release film F in the film loading arm 40 is controlled in the resin molding apparatus 10.

其次,針對使用本實施形態的樹脂成形裝置10之樹脂成形方法(動作方法),參照圖面作說明。圖3係樹脂成形裝置10的示意流程圖,圖4係模製工序的示意流程圖。圖5~圖8係樹脂成形工序的說明圖。Next, the resin molding method (operation method) using the resin molding apparatus 10 of this embodiment will be described with reference to the drawings. FIG. 3 is a schematic flowchart of the resin molding apparatus 10, and FIG. 4 is a schematic flowchart of the molding process. 5 to 8 are explanatory diagrams of the resin molding process.

在樹脂成形裝置10中,成形處理是進行將工件W的零件模製成形的模製工序(步驟S100)。在此之前,如圖1所示般,使導輥53、63下降,使受此等所引導之離型薄膜F事先移往與模具面21a分離的位置。接著,使用捲出伺服馬達54及捲取伺服馬達64,將在捲出軸51與捲取軸61之間架設的離型薄膜F之未使用部分事先往開模的成形模具20的內部搬送、供給。In the resin molding apparatus 10, the molding process is a molding process for molding the parts of the workpiece W (step S100). Prior to this, as shown in FIG. 1, the guide rollers 53, 63 are lowered, and the release film F guided by these is moved to a position separated from the mold surface 21a in advance. Next, using the unwinding servo motor 54 and the winding servo motor 64, the unused part of the release film F erected between the unwinding shaft 51 and the winding shaft 61 is transported to the inside of the opened forming mold 20 in advance. supply.

在模製工序中,如圖1所示,於成形模具20開模的狀態中,將工件W安置(set)於下模22的模具面22a(步驟S110)。工件W係透過來自空氣路徑32的吸引而被吸附保持於模具面22a。若預先在工件W上安置樹脂R(例如,液狀樹脂、顆粒樹脂等),則樹脂R亦連同工件W一起被安置(供給)在成形模具20的內部。In the molding process, as shown in FIG. 1, in a state where the forming mold 20 is opened, the workpiece W is set on the mold surface 22a of the lower mold 22 (step S110). The workpiece W is sucked and held on the mold surface 22a by suction from the air path 32. If resin R (for example, liquid resin, pelletized resin, etc.) is placed on the workpiece W in advance, the resin R is also placed (supplied) inside the molding die 20 together with the workpiece W.

接著,如圖5所示,使離型薄膜F吸附在上模21的模具面21a(步驟S120)。此處,使導輥53、63上升,使離型薄膜F事先移往與模具面21a接近的位置。此時,離型薄膜F係藉由來自於空氣路徑28、29之吸引而沿著含有模穴C的內面的模具面21a被吸附保持。亦即,含有模穴C的內面的模具面21a係被離型薄膜F覆蓋。Next, as shown in FIG. 5, the release film F is attracted to the mold surface 21a of the upper mold 21 (step S120). Here, the guide rollers 53 and 63 are raised, and the release film F is moved to a position close to the mold surface 21a in advance. At this time, the release film F is sucked and held along the mold surface 21a including the inner surface of the cavity C by suction from the air paths 28 and 29. That is, the mold surface 21a including the inner surface of the cavity C is covered with the release film F.

接著,進行成形模具20的閉模(步驟S130)。此處,使上模21與下模22逐漸接近,使位在下模22的模具面22a的密封構件30抵接於上模21的模具面21a(密封接觸)。在此之前藉由從空氣路徑31事先吸引,使成形模具20的內部被密閉,同時開始減壓。再者,透過使上模21與下模22逐漸接近,使工件W被上模21及下模22夾持。藉此,模穴C的開口部被工件W閉鎖,在模穴C內收容有工件W的零件及樹脂R。Next, mold closing of the forming mold 20 is performed (step S130). Here, the upper mold 21 and the lower mold 22 are gradually approached, and the sealing member 30 positioned on the mold surface 22a of the lower mold 22 is brought into contact with the mold surface 21a of the upper mold 21 (seal contact). Prior to this, by suction from the air path 31 in advance, the inside of the forming mold 20 was sealed, and the pressure reduction was started at the same time. Furthermore, by gradually approaching the upper mold 21 and the lower mold 22, the workpiece W is clamped by the upper mold 21 and the lower mold 22. Thereby, the opening of the cavity C is closed by the workpiece W, and the parts of the workpiece W and the resin R are accommodated in the cavity C.

接著,如圖6所示,進行模製成形(步驟S140)。此處,再使上模21與下模22接近而逐漸壓縮彈性構件26,在使離型薄膜F吸附於模具面21a的狀態下,使模穴C內的樹脂R填充、壓縮後,加熱既定時間使樹脂R硬化。藉此,工件W的零件被樹脂R(樹脂成形部)模製成形。Next, as shown in FIG. 6, molding is performed (step S140). Here, the upper mold 21 and the lower mold 22 are brought closer to gradually compress the elastic member 26, the release film F is adsorbed on the mold surface 21a, and the resin R in the cavity C is filled and compressed, and then heated Time allows the resin R to harden. Thereby, the parts of the work W are molded by the resin R (resin molded part).

接著,如圖7所示,在將工件W(成形品)脫模之際,解除離型薄膜F的吸附(步驟S150),進行開模(步驟S160)。此處,停止來自空氣路徑28、29的吸引而解除離型薄膜F的吸附,使上模21與下模22逐漸分離。藉由此種吸附狀態的控制,謀求順暢地脫離離型薄膜F,減低離型薄膜F的負擔,可防止破損。又,藉由使導輥53、63事先保持上升,可設成使離型薄膜F與模具面21a接近的狀態。Next, as shown in FIG. 7, when the workpiece W (molded product) is released from the mold, the adsorption of the release film F is released (step S150), and the mold is opened (step S160). Here, the suction from the air paths 28 and 29 is stopped, the suction of the release film F is released, and the upper mold 21 and the lower mold 22 are gradually separated. By controlling the adsorption state of this kind, the release film F is smoothly separated, the burden on the release film F is reduced, and damage can be prevented. In addition, by keeping the guide rollers 53 and 63 raised in advance, it is possible to set the release film F and the mold surface 21a close to each other.

接著,如圖8所示,透過使上模21與下模22進一步分離,完成從工件W剝離離型薄膜F。透過在樹脂成形之際將含有模穴C的內面的模具面21a事先以離型薄膜F覆蓋,可防止樹脂R與模具面21a接觸而促進從模穴C脫模。又,因為使導輥53、63保持著上升,故可設成使自工件W剝離的離型薄膜F與模具面21a接近的狀態。之後,停止來自空氣路徑32的吸引而解除工件W的吸附,工件W被未圖示的工件搬送裝置(卸載機)朝模具外部搬出。Next, as shown in FIG. 8, by further separating the upper mold 21 and the lower mold 22, the release film F from the workpiece W is peeled off. By covering the mold surface 21a containing the inner surface of the cavity C with the release film F in advance during resin molding, it is possible to prevent the resin R from contacting the mold surface 21a and promote mold release from the cavity C. In addition, since the guide rollers 53 and 63 are kept rising, it can be set in a state where the release film F peeled from the workpiece W is close to the mold surface 21a. After that, the suction from the air path 32 is stopped to release the suction of the workpiece W, and the workpiece W is carried out of the mold by a workpiece conveying device (unloader) not shown.

如此在模製工序(步驟S100)結束後,由控制部41進行離型薄膜F能否再使用的判斷(步驟S200)。離型薄膜F之再利用的判斷基準可任意地設定,例如,能以離型薄膜F之再利用是否已達既定次數來進行。具體言之,離型薄膜F若係僅被使用於一次的模製工序,則判斷能再使用並進行第二次的模製工序。又,作為離型薄膜F之再利用的判斷方法,亦可拍攝離型薄膜F的表面狀態,於進行畫像處理後算出凹凸的形狀(皺折的量或深度)等、以變位計(例如雷射變位計)進行測定,依據該值來判斷是否適合再使用。又,在離型薄膜F的伸展因應於模製工序的使用次數而增大時,亦能因應於離型薄膜F的伸展量,判斷是否適合再使用。在此情況,亦能因應於為矯正離型薄膜F的伸展所附加的張力之大小或捲取量等,判斷是否適合再使用。In this way, after the molding process (step S100) is completed, the control unit 41 determines whether the release film F can be reused (step S200). The criteria for judging the reuse of the release film F can be arbitrarily set. For example, it can be performed based on whether the reuse of the release film F has reached a predetermined number of times. Specifically, if the release film F is used for only one molding process, it is judged that it can be reused and the second molding process is performed. In addition, as a method of judging the reuse of the release film F, the surface condition of the release film F can also be photographed, and after image processing, the shape of the unevenness (amount or depth of wrinkles), etc., can be calculated as a displacement meter (e.g. Laser displacement meter) to determine whether it is suitable for reuse based on the value. In addition, when the extension of the release film F increases in response to the number of uses in the molding process, it can also be determined whether it is suitable for reuse in accordance with the extension of the release film F. In this case, it is also possible to determine whether it is suitable for reuse in accordance with the amount of tension added to correct the stretching of the release film F or the amount of winding.

在離型薄膜F可再使用的情況,反覆進行下述動作:將照原樣以離型薄膜F覆蓋模具面21a,於閉模並進行樹脂成形後,開模使成形品脫模。在此情況,成為因脫模後的離型薄膜F吸附於模穴C等之凹凸而產生的皺折殘留於該離型薄膜F的狀態。於是,本實施形態中,於離型薄膜F重複使用期間,使導輥53、63以離型薄膜F會接觸模具面21a的方式事先保持上升。藉此,透過模具面21a與離型薄膜F相接,可使此等相對地難以偏離。When the release film F is reusable, the following actions are repeated: the mold surface 21a is covered with the release film F as it is, and after the mold is closed and resin molding is performed, the mold is opened to release the molded product. In this case, wrinkles caused by the release film F after the release from being adsorbed to the unevenness of the cavity C and the like remain in the release film F. Therefore, in this embodiment, during the repeated use of the release film F, the guide rollers 53 and 63 are kept raised in advance so that the release film F will contact the mold surface 21a. Thereby, the mold surface 21a is in contact with the release film F, so that it can be made relatively difficult to deviate.

在此情況,例如在複數次模製成形中模具面21a與離型薄膜F產生偏離時,形成有順應模穴C的形狀之凹凸的離型薄膜F成為被配置在模具面21a中偏離模穴C的位置而有招致麻煩之虞。具體言之,因夾持不平坦的離型薄膜F無法適當地夾持,有產生樹脂R漏洩之虞。且亦可想到在以樹脂R成形的成形部分中被轉印有離型薄膜F的凹凸而成形不良的情況。In this case, for example, when the mold surface 21a deviates from the release film F during multiple times of molding, the release film F formed with unevenness that conforms to the shape of the mold cavity C is arranged in the mold surface 21a to deviate from the cavity. The position of C may cause trouble. Specifically, because the uneven release film F cannot be clamped properly, the resin R may leak. It is also conceivable that the unevenness of the release film F is transferred in the molded part molded with the resin R, and the molding is defective.

圖7中顯示即便是開模的情況使導輥53、63保持上升,離型薄膜F會接觸於模具面21a的端部之狀態。假設使導輥53、63下降且使離型薄膜F整體與模具面21a隔開時,於下一模製工序中再利用離型薄膜F之際會引發偏離。因此,在離型薄膜F作複數次使用的期間,透過保持使導輥53、63上升的狀態,可防止離型薄膜F偏離。FIG. 7 shows a state where the release film F is in contact with the end of the mold surface 21a even if the guide rollers 53 and 63 are kept rising even when the mold is opened. If the guide rollers 53 and 63 are lowered and the release film F as a whole is separated from the mold surface 21a, deviation will occur when the release film F is reused in the next molding process. Therefore, while the release film F is used multiple times, by maintaining the state where the guide rollers 53 and 63 are raised, the release film F can be prevented from deviating.

又,在離型薄膜F進行複數次使用的期間,於將工件W(成形品)脫模後且將離型薄膜F吸附前,利用捲取伺服馬達64固定(停止)捲取軸61。又,利用捲出伺服馬達54以既定轉矩控制捲出軸51,對離型薄膜F賦予既定的張力。此處,關於既定的張力之賦予,透過進行採用含有離型薄膜F的捲出軸51之外徑的轉矩控制,可正確地進行轉矩控制。In addition, while the release film F is used multiple times, after the workpiece W (molded product) is demolded and before the release film F is sucked, the winding shaft 61 is fixed (stopped) by the winding servo motor 64. In addition, the unwinding shaft 51 is controlled by the unwinding servo motor 54 with a predetermined torque, and a predetermined tension is applied to the release film F. Here, regarding the application of a predetermined tension, by performing torque control using the outer diameter of the unwinding shaft 51 containing the release film F, the torque control can be accurately performed.

例如,在假設欲進行使用在捲取軸61中已用過的離型薄膜F的外徑之轉矩控制時,已用過的離型薄膜F係於具有在成形時所形成的皺折之狀態下被捲繞。因此,難以正確地算出將已使用過的離型薄膜F捲取後的捲取軸61之外形,且難以適當地傳達附加於捲取軸61的力。相反地,捲出軸51中之未使用的離型薄膜F的直徑大小係能利用送出量及離型薄膜F的厚度而正確地掌握,再者,可將附加於捲出軸51的力適當地傳達於離型薄膜F。因此,可正確地進行轉矩控制,可對離型薄膜F適當地附加既定的張力。因此,不會有例如因張力過大或過小而導致位置偏離那樣的情況,可確實地防止因離型薄膜F之移動所致的偏離。此外,在離型薄膜F的位置偏離不易發生問題時向離型薄膜F附加張力之際,亦可藉由捲取伺服馬達64來控制捲取軸61的轉矩。又,亦可藉由捲出軸51與捲取軸61雙方來控制轉矩。For example, when it is assumed that torque control using the outer diameter of the used release film F in the take-up shaft 61 is to be performed, the used release film F is due to the wrinkles formed during forming. It is wound in the state. Therefore, it is difficult to accurately calculate the outer shape of the winding shaft 61 after winding the used release film F, and it is difficult to appropriately transmit the force added to the winding shaft 61. Conversely, the diameter of the unused release film F in the unwinding shaft 51 can be accurately grasped by the feeding amount and the thickness of the release film F. Furthermore, the force applied to the unwinding shaft 51 can be appropriately determined. The ground is conveyed to the release film F. Therefore, torque control can be performed accurately, and a predetermined tension can be appropriately applied to the release film F. Therefore, there will be no positional deviation due to, for example, excessive tension or excessively small tension, and the deviation due to the movement of the release film F can be reliably prevented. In addition, when tension is applied to the release film F when the positional deviation of the release film F is unlikely to cause problems, the winding servo motor 64 may also be used to control the torque of the winding shaft 61. In addition, the torque may be controlled by both the winding shaft 51 and the winding shaft 61.

另一方面,在步驟S200的判斷中,反覆進行模製工序,離型薄膜F若係已使用既定次數者,則判斷不適合再使用。在此情況,在依薄膜供給工序(步驟S300,S400,S500)開模後且被供給未使用部分的離型薄膜F後,再開始模製工序。On the other hand, in the judgment of step S200, the molding process is repeated, and if the release film F has been used a predetermined number of times, it is judged that it is not suitable for reuse. In this case, after the mold is opened in the film supply process (steps S300, S400, and S500) and the release film F of the unused portion is supplied, the molding process is restarted.

在供給未使用部分的離型薄膜F時,首先,將離型薄膜F移往進給位置(步驟S300)。具體言之,於開模的狀態中,利用進退機構56、66使導輥53、63下降,使受此等所引導的離型薄膜F移往與模具面21a分離之進給位置。When supplying the unused part of the release film F, first, the release film F is moved to the feeding position (step S300). Specifically, in the mold opened state, the guide rollers 53, 63 are lowered by the advance and retreat mechanisms 56, 66, and the release film F guided by these is moved to a feeding position separated from the mold surface 21a.

接著,進給離型薄膜F(步驟S400),將離型薄膜F移動到吸附位置(步驟S500)。具體言之,藉由捲取伺服馬達64使捲取軸61旋轉以將離型薄膜F捲取於捲取軸61,並藉由捲出伺服馬達54使捲出軸51旋轉以送出離型薄膜F。此時,因為要藉由編碼器55測定送出量,所以能使未使用部分的離型薄膜F移動到與模穴C對向的吸附位置。在被供給未使用部分的離型薄膜F後,再開始模製工序。Next, the release film F is fed (step S400), and the release film F is moved to the suction position (step S500). Specifically, the take-up shaft 61 is rotated by the take-up servo motor 64 to wind the release film F on the take-up shaft 61, and the take-up servo motor 54 is used to rotate the take-up shaft 51 to send out the release film F. At this time, since the delivery amount is measured by the encoder 55, the release film F of the unused part can be moved to the suction position facing the cavity C. After the unused part of the release film F is supplied, the molding process is restarted.

如此,藉由離型薄膜F進行複數次使用而減少模製工序中之離型薄膜F的使用量,故而可削減工件W(成形品)的製造運轉成本。又,在離型薄膜F進行複數次使用的期間,因為不讓導輥53、63下降而在使離型薄膜F接觸模具面21a的位置進行保持,故可防止離型薄膜F偏離。然而,當在未使導輥53、63下降而維持吸附著離型薄膜F的狀態開模且成形品將脫模時,會導致負擔施加於離型薄膜F。於是,藉由在脫模時解除離型薄膜F的吸附,可謀求順暢剝離離型薄膜F,減低負擔並防止離型薄膜F破損。再者,於將成形品脫模後且將離型薄膜F吸附前,藉由將捲取軸61設成固定,將捲出軸51以既定轉矩控制,可確實地防止離型薄膜F偏離。In this way, by using the release film F several times, the amount of the release film F used in the molding process is reduced, so that the manufacturing operation cost of the workpiece W (molded product) can be reduced. In addition, during the multiple use of the release film F, the release film F is held at a position where the release film F contacts the mold surface 21a without lowering the guide rollers 53, 63, so that the release film F can be prevented from deviating. However, when the mold is opened without lowering the guide rolls 53 and 63 and the release film F is maintained adsorbed, and the molded product is about to be released from the mold, a burden is applied to the release film F. Therefore, by releasing the adsorption of the release film F during mold release, the release film F can be peeled off smoothly, reducing the burden and preventing the release film F from breaking. Furthermore, after the molded product is demolded and before the release film F is adsorbed, the take-up shaft 61 is set to be fixed, and the take-up shaft 51 is controlled with a predetermined torque, which can reliably prevent the release film F from deviating. .

又,本發明中將離型薄膜F進行複數次使用的效果為,模具的盤面越大,則效果越高。本實施形態中針對應用所謂的基板作為工件W之情況作了說明,藉由適用於使用盤面比一般基板大的8吋或12吋之類的大尺寸晶圓或載具等之圓形工件的WLP(Wafer Level Package;晶圓級封裝)或將1邊的長度超過300mm那樣的大尺寸面板用作為工件的LPM(Large Panel Molding;大面板模製)等,削減離型薄膜F的使用量之效果大,削減製造運轉成本的效果變高。In addition, in the present invention, the effect of using the release film F multiple times is that the larger the surface of the mold, the higher the effect. In this embodiment, the case where a so-called substrate is used as the workpiece W has been described, and it is applicable to round workpieces such as large-sized wafers or carriers such as 8 inches or 12 inches whose disk surface is larger than a general substrate. WLP (Wafer Level Package; Wafer Level Package) or LPM (Large Panel Molding; Large Panel Molding) that uses a large panel with a side length of more than 300mm as a workpiece, etc., to reduce the amount of release film F used The effect is large, and the effect of reducing manufacturing and operating costs becomes high.

以上,本實施形態中,如圖1等所示般,針對模穴C設於上模21的樹脂成形裝置10之情況作了說明。但不受此所限,也能適用於如圖9所示,在使構成上下顛倒並在下模22設置模穴C,對其供給(吸附保持)離型薄膜F的情況之樹脂成形裝置10A。相對於前述的樹脂成形裝置10,在同圖所示的樹脂成形裝置10A中,在開模的狀態下工件W被吸附並保持於上模21,下模22的模穴C內被供給樹脂R而進行樹脂成形。在樹脂成形裝置10A中,因為同樣地進行其他的成形處理工序(圖3、圖4等),所以具有與樹脂成形裝置10同樣的作用效果。As described above, in the present embodiment, as shown in FIG. 1 and the like, the resin molding apparatus 10 in which the cavity C is provided in the upper mold 21 has been described. However, it is not limited to this, and it can also be applied to the resin molding apparatus 10A in the case where the structure is turned upside down, the cavity C is provided in the lower mold 22, and the release film F is supplied (suction and held) to the resin molding apparatus 10A as shown in FIG. With respect to the aforementioned resin molding apparatus 10, in the resin molding apparatus 10A shown in the same figure, the workpiece W is sucked and held in the upper mold 21 with the mold opened, and the resin R is supplied into the cavity C of the lower mold 22 Instead, resin molding is performed. In the resin molding apparatus 10A, since other molding processing steps (FIG. 3, FIG. 4, etc.) are performed in the same manner, it has the same functions and effects as the resin molding apparatus 10.

又,上述的實施形態中,如圖1等所示般,針對壓縮成形類型的樹脂成形裝置10之情況作了說明。但不受此所限,本發明也能適用於如圖10所示,在具備筒70、柱塞71、澆道72及流道澆口(runner gate)73的轉送模製(transfer moulding)型的樹脂成形裝置10B。在樹脂成形裝置10B中,於開模的狀態下樹脂R被供給至筒70內,工件W被吸附並保持於下模22的模具面22a(安置部)。又,在樹脂成形裝置10B中,以於開模的狀態下覆蓋含有模穴C、澆道72及流道澆口73的上模21的模具面21a之方式供給離型薄膜F並加以吸附保持。然後,在樹脂成形裝置10B中,於閉模的狀態下樹脂R受到筒70內的柱塞71推壓並經由澆道72、流道澆口73朝模穴C供給而進行樹脂成形。在樹脂成形裝置10B中,因為同樣地進行其他的成形處理工序(圖3、圖4等),故具有與樹脂成形裝置10同樣的作用效果。Moreover, in the above-mentioned embodiment, as shown in FIG. 1 etc., the case of the resin molding apparatus 10 of a compression molding type was demonstrated. But not limited to this, the present invention can also be applied to a transfer moulding type (transfer moulding) equipped with a barrel 70, a plunger 71, a runner 72, and a runner gate 73 as shown in FIG. The resin molding device 10B. In the resin molding apparatus 10B, the resin R is supplied into the cylinder 70 in the opened state, and the workpiece W is sucked and held on the mold surface 22a (set portion) of the lower mold 22. In addition, in the resin molding apparatus 10B, the mold surface 21a of the upper mold 21 including the cavity C, the runner 72 and the runner gate 73 is supplied and adsorbed and held by the mold surface 21a of the upper mold 21 in the mold opened state. . Then, in the resin molding apparatus 10B, the resin R is pressed by the plunger 71 in the cylinder 70 in the closed state, and is supplied to the cavity C through the runner 72 and the runner gate 73 to perform resin molding. In the resin molding apparatus 10B, since other molding processing steps (FIG. 3, FIG. 4, etc.) are performed in the same manner, it has the same effect as the resin molding apparatus 10.

(實施形態2) 針對使用具備本發明的實施形態2之薄膜搬送裝置80的樹脂成形裝置10C之樹脂成形方法(動作方法),參照圖面作說明。圖11~圖31係樹脂成形工序的說明圖。前述實施形態1中針對直接使用薄膜卷作為離型薄膜F的情況作了說明,但本實施形態中將針對將長形的薄膜從纏繞的薄膜卷切成例如圓形狀、矩形狀等而準備的單片薄膜於樹脂成形使用複數次的情況作說明。(Embodiment 2) The resin molding method (operation method) using the resin molding apparatus 10C equipped with the film conveying device 80 of the second embodiment of the present invention will be described with reference to the drawings. 11 to 31 are explanatory diagrams of the resin molding process. In the foregoing embodiment 1, the case where the film roll is directly used as the release film F is described, but in this embodiment, the film is prepared for cutting a long film from a wound film roll into, for example, a round shape or a rectangular shape. The case where a single film is used multiple times in resin molding will be described.

如圖11所示,薄膜搬送裝置80具備:工件台81;一對環82(保持具);輥狀的離型薄膜F;及抽出裝置(未圖示)。此處,在工件台81上安置有其中一環82,以通過其上方的方式利用抽出裝置抽出離型薄膜F。以將所抽出的離型薄膜F利用其中另一環82按住的方式,用其中一環及其中另一環82夾住(圖12)。作為此環82,例如,以於藉由切斷所準備之單片離型薄膜F的外周重疊而可將離型薄膜F夾入並保持之方式,構成為包圍單片離型薄膜F的外周區域那樣的圓環狀或矩形環狀等之環狀。As shown in FIG. 11, the film conveyance device 80 is equipped with: a work table 81; a pair of rings 82 (holder); a roll-shaped release film F; and a drawing device (not shown). Here, one of the rings 82 is placed on the work table 81, and the release film F is drawn out by a drawing device so as to pass above it. In such a way that the drawn release film F is held by the other ring 82, one of the rings and the other ring 82 are clamped (FIG. 12). As this ring 82, for example, the outer periphery of the single release film F prepared by cutting is overlapped so that the release film F can be sandwiched and held, and is configured to surround the outer periphery of the single release film F A ring shape such as a circular ring shape or a rectangular ring shape such as a region.

具體言之,如從與圖12所示的離型薄膜F被抽出之側面方向正交的正面方向所見之圖,即圖13所示,較佳為在離型薄膜F的與抽出方向平行的邊(離型薄膜F的帶之緣側的邊),上下的環82構成為可彼此連結並固定。換言之,環82構成為比離型薄膜F的寬度大,以構成為在不夾入離型薄膜F的位置中可將環82彼此連結者較佳。因此,環82相對於離型薄膜F之大小可設為,在離型薄膜F的抽出方向,小於單片離型薄膜F,而在此方向直行的方向上,比單片離型薄膜F大。依據此種構成,係可在環82將離型薄膜F夾住並保持的狀態下作切斷。Specifically, as seen from the front direction orthogonal to the side direction of the release film F shown in FIG. 12, that is, as shown in FIG. 13, it is preferable that the release film F is parallel to the withdrawing direction. On the side (the side on the side of the edge of the release film F), the upper and lower rings 82 are configured to be connectable and fixable to each other. In other words, the ring 82 is configured to be larger than the width of the release film F so as to be configured to be able to connect the rings 82 to each other in a position where the release film F is not sandwiched. Therefore, the size of the ring 82 relative to the release film F can be set to be smaller than the single release film F in the drawing direction of the release film F, and larger than the single release film F in the straight direction in this direction . According to this structure, the release film F can be cut while the ring 82 clamps and holds the release film F.

接著,如圖12所示,利用薄膜搬送裝置80所具備的切斷工具83,在環82的外側切斷離型薄膜F。在將離型薄膜F切斷之際,亦能將環82吸附保持於工件台81。被切斷的離型薄膜F成為單片(單片薄膜)。環82係以離型薄膜F被賦予張力的方式將離型薄膜F的外周部保持。此外,作為保持離型薄膜F的外周部之保持具,不限於使用環82。例如,亦能使用將離型薄膜F的外周部部分地夾住並保持的複數個扣夾(clip)。作為一例,在使用矩形的離型薄膜F之情況,在四邊分別設置各1個或各複數個將其四邊分別從上下夾住的扣夾狀的保持具。Next, as shown in FIG. 12, the release film F is cut outside the ring 82 by the cutting tool 83 included in the film transport device 80. When the release film F is cut, the ring 82 can be sucked and held on the work table 81. The cut release film F becomes a single sheet (single sheet film). The ring 82 holds the outer peripheral part of the release film F in such a way that the release film F is given tension. In addition, as a holder for holding the outer peripheral portion of the release film F, the use of the ring 82 is not limited. For example, a plurality of clips that partially sandwich and hold the outer peripheral portion of the release film F can also be used. As an example, when a rectangular release film F is used, one or a plurality of clip-shaped holders are provided on each of the four sides to sandwich the four sides from the top and bottom.

接著,如圖13所示,為了透過環82將離型薄膜F保持,使薄膜搬送裝置80所具備的搬送治具84移動到工件台81的上方。接著,如圖14所示,以降下的搬送治具84保持環82(離型薄膜F)(圖14)。搬送治具84係具備將位在環82的內側之離型薄膜F按住的按壓部85而構成為中央部貫通的框狀。又,搬送治具84具備將環82保持,且使環82朝向與按壓部85的按壓方向(圖中,下方向)相反的方向(上方向)移動的可動保持部86。例如,可動保持部86構成為將環82包夾而保持的爪部86a(夾盤部)是藉由棘輪機構而移動。此棘輪機構係藉由在一定角度的範圍內構成為僅單方向可旋轉而能以任意的高度進行保持的機構。Next, as shown in FIG. 13, in order to hold the release film F through the ring 82, the transfer jig 84 included in the film transfer device 80 is moved above the work table 81. Next, as shown in FIG. 14, the ring 82 (release film F) is held with the lowered transport jig 84 (FIG. 14). The conveyance jig 84 is provided with the pressing part 85 which presses the release film F located inside the ring 82, and is comprised in the frame shape which penetrates the center part. In addition, the transport jig 84 includes a movable holding portion 86 that holds the ring 82 and moves the ring 82 in a direction (upward direction) opposite to the pressing direction (downward direction in the figure) of the pressing portion 85. For example, the movable holding part 86 is comprised so that the claw part 86a (chuck part) which clamps and holds the ring 82 is moved by a ratchet mechanism. This ratchet mechanism is a mechanism that can be held at an arbitrary height by being configured to be rotatable in only one direction within a certain angle range.

接著,如圖15所示,對以環82保持的離型薄膜F賦予張力。例如,可動保持部86係藉由薄膜搬送裝置80所具備的缸體90(第1可動部)而可動。此缸體90係設置成可在工件台81周圍升降。因保持環82的爪部86a被此缸體90往上推,環82所保持的離型薄膜F的外周部會被上方向推。此時由於在離型薄膜F的中央部被搬送治具84的按壓部85按住的狀態下離型薄膜F的外周部會被拉緊,所以離型薄膜F被賦予張力。又,依據可動保持部86所具備的棘輪機構,即便按壓部85按住離型薄膜F,亦能將爪部86a的移動限制為僅為上方向(單方向),可對離型薄膜F賦予張力。Next, as shown in FIG. 15, tension is applied to the release film F held by the ring 82. For example, the movable holding portion 86 is movable by the cylinder 90 (first movable portion) included in the film transport device 80. The cylinder 90 is set to be able to move up and down around the work table 81. Since the claw portion 86a of the holding ring 82 is pushed up by the cylinder 90, the outer peripheral portion of the release film F held by the ring 82 is pushed up. At this time, since the outer peripheral portion of the release film F is stretched in a state where the center portion of the release film F is pressed by the pressing portion 85 of the transport jig 84, the release film F is given tension. In addition, according to the ratchet mechanism of the movable holding portion 86, even if the pressing portion 85 presses the release film F, the movement of the claw portion 86a can be restricted to only the upward direction (one direction), and the release film F can be provided tension.

接著,如圖16所示,對被賦予張力的離型薄膜F上供給樹脂R(例如,液狀樹脂、顆粒樹脂等)。因為搬送治具84的中央部貫通,所以可由此對離型薄膜F上供給樹脂R。此際,因為離型薄膜F被賦予張力,故可防止因樹脂R的重量使離型薄膜F撓曲且樹脂R偏向離型薄膜F的中心之情況。Next, as shown in FIG. 16, resin R (for example, liquid resin, pellet resin, etc.) is supplied to the release film F to which tension has been applied. Since the center part of the transfer jig 84 penetrates, the resin R can be supplied to the release film F by this. At this time, since the release film F is given tension, it is possible to prevent the release film F from being deflected due to the weight of the resin R and the resin R deviates to the center of the release film F.

接著,如圖17所示,將離型薄膜F搬入樹脂成形裝置10C所具備的成形模具20的內部。具體言之,在離型薄膜F被賦予張力的狀態下藉由搬送治具84將離型薄膜F與環82一起搬入開模的成形模具20(上模21與下模22分離)的內部。樹脂成形裝置10C的成形模具20係與圖9同樣在下模22設有模穴C。後面將述及,含有模穴C的內面的下模22的模具面22a是被離型薄膜F所覆蓋。又,工件W係透過空氣路徑32被吸附保持於上模21的模具面21a。Next, as shown in FIG. 17, the release film F is carried into the inside of the molding die 20 included in the resin molding apparatus 10C. Specifically, the release film F and the ring 82 are carried into the opened mold 20 (the upper mold 21 and the lower mold 22 are separated) by the transfer jig 84 with the release film F being tensioned. The molding die 20 of the resin molding apparatus 10C is provided with a cavity C in the lower die 22 as in FIG. 9. As will be described later, the mold surface 22a of the lower mold 22 containing the inner surface of the cavity C is covered by the release film F. In addition, the workpiece W is sucked and held on the mold surface 21 a of the upper mold 21 through the air path 32.

如圖18所示,樹脂成形裝置10C係具備設於成形模具20的周圍,使搬送治具84的可動保持部86可動之缸體91(第2可動部)。缸體91係設置成可在成形模具20的下模22周圍升降,與缸體90同樣可將保持環82的爪部86a往上推。利用此種樹脂成形裝置10C,將離型薄膜F安置於下模22的模具面22a(夾持件24的上表面)。具體言之,利用缸體91使搬送治具84的可動保持部86可動並對離型薄膜F附加張力。在此情況,當未附加適當的張力時,離型薄膜F因為被下模22的加熱器加熱而伸展導致鬆弛,造成發生樹脂R偏移。相反地,藉由缸體91之動作對離型薄膜F適當地附加張力,可防止此種問題發生。接著,利用搬送治具84的按壓部85將離型薄膜F推往模具面22a。As shown in FIG. 18, the resin molding apparatus 10C is provided with the cylinder 91 (2nd movable part) which is provided in the periphery of the molding die 20, and makes the movable holding part 86 of the conveyance jig 84 movable. The cylinder 91 is arranged to be able to move up and down around the lower mold 22 of the forming mold 20, and like the cylinder 90, the claw portion 86a of the holding ring 82 can be pushed up. Using this type of resin molding apparatus 10C, the release film F is set on the mold surface 22a of the lower mold 22 (the upper surface of the clamp 24). Specifically, the movable holding portion 86 of the transport jig 84 is made movable by the cylinder 91 and the release film F is applied with tension. In this case, when an appropriate tension is not applied, the release film F is stretched due to being heated by the heater of the lower mold 22 and slack, causing the resin R to deviate. Conversely, by appropriately applying tension to the release film F by the action of the cylinder 91, this problem can be prevented from occurring. Next, the release film F is pushed toward the mold surface 22a by the pressing portion 85 of the transport jig 84.

接著,如圖19(上模21係未圖示)所示,以透過空氣路徑28、29覆蓋含有模穴C的內面的模具面22a之方式吸附離型薄膜F。此時,離型薄膜F係順應模具面22a被吸附,成為在模具面22a中沿著模穴C的內面安置有離型薄膜F。又,因為離型薄膜F上安置有樹脂R,所以成為照這樣在模穴C內安置有樹脂R。Next, as shown in FIG. 19 (the upper mold 21 is not shown), the release film F is sucked so as to cover the mold surface 22a including the inner surface of the cavity C through the air passages 28 and 29. At this time, the release film F is adsorbed in accordance with the mold surface 22a, and the release film F is arranged along the inner surface of the cavity C in the mold surface 22a. In addition, since the resin R is placed on the release film F, the resin R is placed in the cavity C in this manner.

樹脂成形裝置10C的下模22,係具備設於下模22的模具面22a(夾持件24的上表面),用以設置屬於保持具的環82的袋部92(凹陷部)。作為用以設置屬於此保持具的環82之構造,沒必要一定要設於下模22上,亦能在成形模具20的外周設置專用的構件。The lower mold 22 of the resin molding apparatus 10C is provided with a mold surface 22a (upper surface of the clamp 24) provided on the lower mold 22 to provide a pocket 92 (recessed portion) belonging to the ring 82 of the holder. As a structure for installing the ring 82 belonging to this holder, it is not necessary to provide it on the lower mold 22, and a dedicated member may be provided on the outer periphery of the forming mold 20.

又,下模22具備將環82卡止的機構。例如,作為以通過成形模具20的外部與內部的方式設於夾持件24的空氣路徑93,具備將環82卡止的機構。在空氣路徑93的模具外部側連接有未圖示的吸引裝置(例如真空泵)。因此,在吸附離型薄膜F之際,保持離型薄膜F的外周部之環82被收納於袋部92且透過空氣路徑93被吸引,所以被吸附(保持)。此時,藉由解除搬送治具84的可動保持部86之保持,環82被釋放。如此,藉由將保持著離型薄膜F的環82以留在成形模具20的方式搬入,可將離型薄膜F安置在正確的位置。如後述,於樹脂成形後在工件台81重新賦予張力並再度於成形模具20安置離型薄膜F,因為可如此進行對位,所以可防止偏離並可將離型薄膜F在樹脂成形進行複數次使用。In addition, the lower mold 22 has a mechanism for locking the ring 82. For example, as an air path 93 provided in the holder 24 so as to pass through the outside and inside of the molding die 20, a mechanism for locking the ring 82 is provided. An unillustrated suction device (for example, a vacuum pump) is connected to the air path 93 on the outside of the mold. Therefore, when the release film F is sucked, the ring 82 holding the outer peripheral portion of the release film F is accommodated in the bag portion 92 and is sucked through the air path 93, so it is sucked (held). At this time, by releasing the holding of the movable holding portion 86 of the transport jig 84, the ring 82 is released. In this way, by carrying in the ring 82 holding the release film F so as to remain in the forming mold 20, the release film F can be placed in the correct position. As will be described later, after the resin is formed, tension is applied to the work table 81 again and the release film F is placed on the forming die 20 again. Since the alignment can be performed in this way, deviation can be prevented and the release film F can be molded in the resin multiple times use.

此外,作為用以將屬於保持具的環82卡止在成形模具20的機構,不僅是上述的吸附機構,亦能採用其他的機構。例如,亦能使用像搖動的爪狀構件那樣的卡合構造或鍵槽卡合構造之類的其他卡止機構。In addition, as a mechanism for locking the ring 82 belonging to the holder to the forming die 20, not only the above-mentioned suction mechanism, but other mechanisms can also be adopted. For example, it is also possible to use another locking mechanism such as an engaging structure such as a rocking claw-shaped member or a keyway engaging structure.

接著,如圖20所示,使搬送治具84退避。此時,因為環82從搬送治具84的可動保持部86被釋放,所以離型薄膜F維持被吸附保持於下模22的模具面22a。Next, as shown in FIG. 20, the transport jig 84 is evacuated. At this time, because the ring 82 is released from the movable holding portion 86 of the transport jig 84, the release film F is maintained sucked and held on the mold surface 22a of the lower mold 22.

接著,如圖21所示,使上模21與下模22接近而將成形模具20閉模。樹脂成形裝置10C的上模21具備設於模具面21a的脫逃部94(凹陷部)。於閉模之際在上模21藉由脫逃部94收納環82。Next, as shown in FIG. 21, the upper mold 21 and the lower mold 22 are brought close, and the forming mold 20 is closed. The upper mold 21 of the resin molding apparatus 10C includes an escape portion 94 (recessed portion) provided on the mold surface 21a. When the mold is closed, the ring 82 is accommodated in the upper mold 21 by the escape portion 94.

接著,如圖22所示,進行模製成形。此處,進一步使上模21與下模22接近並推壓彈性構件26使之縮小,在壓縮模穴C內的樹脂R後,加熱既定時間使樹脂R硬化。藉此,工件W藉由樹脂R而被模製成形。Next, as shown in Fig. 22, molding is performed. Here, the upper mold 21 and the lower mold 22 are further approached and the elastic member 26 is pressed to shrink it. After the resin R in the cavity C is compressed, the resin R is heated for a predetermined period of time to harden it. Thereby, the workpiece W is molded by the resin R.

接著,如圖23所示,使上模21與下模22分離並將成形模具20開模而使工件W(成形品)從模穴C脫模。此時,在維持著環82的吸附下進行解除離型薄膜F的吸附。在此情況,即便未設置圖1所示那種薄膜裝載手臂40(具體言之,捲出軸51、捲取軸61),也能將離型薄膜F從成形品順暢地剝下。具體言之,在保持工件W的上模21之相反側的下模22中利用離型薄膜F的外周保持,故與薄膜裝載手臂40同樣地能以下模22的外周拉引離型薄膜F,可如圖7所示將離型薄膜F從成形品剝下。如此,儘管是簡易構成,仍可防止離型薄膜F在貼附於成形品的狀態下被脫模,可謀求離型薄膜F順暢剝離。Next, as shown in FIG. 23, the upper mold 21 and the lower mold 22 are separated, the forming mold 20 is opened, and the workpiece W (molded product) is released from the cavity C. At this time, the adsorption of the release film F is released while the adsorption of the ring 82 is maintained. In this case, even if the film loading arm 40 shown in FIG. 1 (specifically, the unwinding shaft 51 and the winding shaft 61) is not installed, the release film F can be smoothly peeled off from the molded product. Specifically, the lower mold 22 on the opposite side of the upper mold 21 holding the workpiece W is held by the outer periphery of the release film F, so the release film F can be drawn on the outer periphery of the lower mold 22 like the film loading arm 40. The release film F can be peeled off from the molded product as shown in Fig. 7. In this way, despite the simple structure, the release film F can be prevented from being released from the mold while being attached to the molded product, and the release film F can be peeled off smoothly.

接著,如圖24所示,藉由使上模21與下模22進一步分離,完成離型薄膜F從工件W剝離。藉由將含有模穴C的內面的模具面22a以離型薄膜F覆蓋,可防止樹脂R接觸模具面22a並促進從模穴C脫模。然而,從工件W剝離的離型薄膜F被伸展而成為具有皺折的狀態。Next, as shown in FIG. 24, by further separating the upper mold 21 and the lower mold 22, the release film F is peeled from the workpiece W. By covering the mold surface 22a containing the inner surface of the cavity C with the release film F, it is possible to prevent the resin R from contacting the mold surface 22a and promote the release from the cavity C. However, the release film F peeled from the workpiece W is stretched and becomes a wrinkled state.

接著,如圖25所示,往開模的成形模具20的內部搬入搬送治具84。接著,如圖26(上模21係未圖示)所示,以下降的搬送治具84保持環82(離型薄膜F)。接著,如圖27(上模21係未圖示)所示,藉由搬送治具84從開模的成形模具20取出與環82一起使用的離型薄膜F。本實施形態中,因為將在樹脂成形之際保持離型薄膜F的環82留在成形模具20,所以在樹脂成形後藉由搬送治具84可將環82保持並取出。例如,在假設未使用保持離型薄膜F的環82之構成的情況,難以在經加熱變形後的離型薄膜F中的當初保持位置上重新保持。然而,因為以環82保持著離型薄膜F,所以可無關乎離型薄膜F的變形而確實地保持相同位置來進行搬送。Next, as shown in FIG. 25, the transport jig 84 is carried into the inside of the mold 20 with the mold opened. Next, as shown in FIG. 26 (the upper mold 21 system is not shown), the ring 82 (release film F) is held by the lowered transport jig 84. Next, as shown in FIG. 27 (the upper mold 21 is not shown), the release film F used with the ring 82 is taken out from the opened mold 20 by the transport jig 84. In this embodiment, since the ring 82 holding the release film F during resin molding is left in the molding die 20, the ring 82 can be held and taken out by the transport jig 84 after the resin molding. For example, assuming that the configuration of the ring 82 holding the release film F is not used, it is difficult to restore the original holding position in the release film F that has been deformed by heating. However, since the release film F is held by the ring 82, the release film F can be conveyed at the same position without regard to the deformation of the release film F.

接著,如圖28所示,將從成形模具20搬出的搬送治具84往工件台81的上方搬入。接著,如圖29所示,使搬送治具84朝工件台81側下降,將連同環82一起使用的離型薄膜F安置在工件台81。Next, as shown in FIG. 28, the transfer jig 84 carried out from the forming mold 20 is carried in above the work table 81. Next, as shown in FIG. 29, the transfer jig 84 is lowered toward the work table 81 side, and the release film F used with the ring 82 is placed on the work table 81.

接著,如圖30所示,對已使用的離型薄膜F重新賦予張力。具體言之,以比起對參照圖15說明的離型薄膜F賦予張力還強地拉引離型薄膜F。亦即,藉由缸體90將保持環82的爪部86a往上頂到更高的位置,將環82所保持的離型薄膜F的外周部往上頂到更高的位置。藉此,透過對因為在具有凹凸的成形模具20內被加熱加壓而產生伸展的離型薄膜F進行更強地拉伸,例如可將與圖15所示那種狀態同樣的張力賦予離型薄膜F。Next, as shown in FIG. 30, tension is reapplied to the used release film F. Specifically, the release film F is pulled stronger than applying tension to the release film F described with reference to FIG. 15. That is, the claw portion 86a of the holding ring 82 is pushed up to a higher position by the cylinder 90, and the outer peripheral portion of the release film F held by the ring 82 is pushed up to a higher position. Thereby, by further stretching the release film F that is stretched by heating and pressing in the molding die 20 having unevenness, for example, the same tension as the state shown in FIG. 15 can be applied to the release film F. Film F.

接著,如圖31所示,對被重新賦予張力的離型薄膜F上供給樹脂R(例如,液狀樹脂、顆粒樹脂等)。此際,即便是已被使用於1次以上的模製成形之離型薄膜F仍會被適當地賦予張力,故可防止在樹脂R被供給之際的鬆弛,防止樹脂R偏向離型薄膜F的中心。之後,使用已使用的離型薄膜F,將參照圖17~圖31所說明的工序依序反覆進行達既定次數。關於此工序,因為在遍及圖17到圖18所示的薄膜安置的工序中使用以環82(保持具)所保持的離型薄膜F,所以防止離型薄膜F偏離,能以離型薄膜F的相同部分進行複數次模製成形。據此,可防止發生上述那樣的成形問題。Next, as shown in FIG. 31, resin R (for example, liquid resin, pellet resin, etc.) is supplied to the release film F to which tension has been re-applied. At this time, even the release film F that has been used for more than one molding molding is still properly tensioned, so it can prevent slack when the resin R is supplied, and prevent the resin R from deviating to the release film F center of. After that, using the used release film F, the steps described with reference to FIGS. 17 to 31 are repeated sequentially for a predetermined number of times. Regarding this process, since the release film F held by the ring 82 (holder) is used throughout the film placement process shown in FIGS. 17 to 18, the release film F is prevented from deviating, and the release film F can be used The same part is molded several times. Accordingly, it is possible to prevent the occurrence of molding problems as described above.

接著,在將上述工序依序反覆進行達既定次數後,廢棄使用後的離型薄膜F,藉由反覆含有準備圖11以後所示的離型薄膜F在內的工序之工序,可將離型薄膜F使用在複數次的模製成形。如以上說明,於使用單片的離型薄膜F的本實施形態中亦可使用在複數次模製成形,可削減工件W(成形品)的製造運轉成本。Next, after repeating the above steps sequentially for a predetermined number of times, the used release film F is discarded, and the release film F can be removed by repeating the steps including preparing the release film F shown in FIG. 11 and later. The film F is used for multiple times of molding. As explained above, in this embodiment using a single release film F, it can also be used for multiple times of molding, and the manufacturing operation cost of the workpiece W (molded product) can be reduced.

以上,本發明係依實施形態作了具體說明,惟本發明不受上述實施形態所限,當然可在不悖離其要旨的範圍下作各種變更。As mentioned above, the present invention has been specifically described based on the embodiments, but the present invention is not limited to the above-mentioned embodiments, and of course various changes can be made without departing from the scope of the gist.

前述實施形態中針對將離型薄膜作複數次使用的情況作了說明。但不受此所限定,在每1次的樹脂成形動作供給沒有皺折的未使用部分的離型薄膜之情況亦可適用。In the foregoing embodiment, the case where the release film is used multiple times has been described. However, it is not limited to this, and it can also be applied to the case where a release film of an unused portion without wrinkles is supplied per resin molding operation.

此外,亦可作成不使用一對環82那樣的保持具,而是使用單片的離型薄膜F可作複數次模製成形的樹脂成形裝置。在此情況,例如將離型薄膜F與樹脂R向成形模具20供給以將工件W模製成形的樹脂成形裝置亦可作成具備如下之構成:因應於成形模具20的形狀而準備單片的離型薄膜F之薄膜準備部;將所準備之單片的離型薄膜F向成形模具20供給之薄膜供給部;及具備成形模具20且使用所供給之單片的離型薄膜F進行複數次模製成形的壓機部。In addition, it is also possible to make a resin molding device that does not use a holder such as a pair of rings 82, but uses a single release film F that can be molded in multiple times. In this case, for example, the resin molding apparatus that supplies the release film F and the resin R to the molding die 20 to mold the workpiece W may also be configured to have a configuration in which a single piece of release is prepared in accordance with the shape of the molding die 20 The film preparation section of the molded film F; the film supply section that supplies the prepared single release film F to the forming die 20; and the molding die 20 is provided and the supplied single release film F is used for multiple molds Formed press section.

在此情況,作為準備單片的離型薄膜F之裝置(薄膜準備部),如圖12所示,可作成長形的離型薄膜F從纏繞的薄膜卷抽出且藉由切斷工具83切出的構成。此外,單片的離型薄膜F在如同可將該形狀之單片的離型薄膜F作複數重疊地供給之情況,在沒必要切出時等情況未必要切出作準備。In this case, as a device (film preparation section) for preparing a single release film F, as shown in FIG. 12, a long release film F can be drawn out from the wound film roll and cut by a cutting tool 83 Out of the composition. In addition, the single release film F can be supplied in multiple layers in the same shape as the single release film F, and it is not necessary to prepare for cutting out when it is not necessary to cut it out.

又,作為將如此準備之單片的離型薄膜F向成形模具20供給的薄膜供給部,以如圖13所示那種搬送治具84保持單片的離型薄膜F的外周。作為保持離型薄膜F的外周的構成,亦可作成將離型薄膜F的外周從其外側夾住的構成,亦可作成將離型薄膜F的上表面吸附那樣的構成。可作成將此種構成的搬送冶具84以裝載機(IN-LOADER)保持並可搬送的構成。在此情況,將在薄膜準備部所準備之單片的離型薄膜F,以由搬送治具84或裝載機所構成之薄膜供給部向具備成形模具20的壓機部搬送並供給。In addition, as a film supply unit that supplies the single release film F prepared in this way to the forming die 20, the outer periphery of the single release film F is held by a transfer jig 84 as shown in FIG. 13. As the structure for holding the outer periphery of the release film F, the outer periphery of the release film F may be sandwiched from the outside, or the upper surface of the release film F may be adsorbed. The transfer jig 84 having such a structure can be held and transported by a loader (IN-LOADER). In this case, the single release film F prepared in the film preparation section is transported and supplied to the press section provided with the forming die 20 by a film supply section composed of a transport jig 84 or a loader.

亦可在此單片的離型薄膜F搭載樹脂R並將單片的離型薄膜F搬入壓機部的成形模具20。又,亦可在未搭載樹脂R下僅將單片的離型薄膜F搬往壓機部的成形模具20。在此情況,每次使用1片的單片的離型薄膜F進行複數次模製成形,有必要將樹脂R搬入成形模具20。It is also possible to mount the resin R on the single release film F and carry the single release film F into the molding die 20 of the press section. In addition, it is also possible to carry only the single release film F to the molding die 20 of the press section without the resin R being mounted. In this case, it is necessary to carry the resin R into the molding die 20 by using a single release film F of one sheet at a time to perform molding multiple times.

一方面,在壓機部中,具備例如圖17所示那種成形模具20,藉由開閉設有上模21及下模22的一對台板以進行模製成形。在此情況,亦可因應於是否適用上述那種樹脂R的搬入手法的任一者,並在1片單片的離型薄膜F被安置於上模21及下模22任一者後依序供給樹脂R,亦可在壓機部的外部將樹脂R搭載於單片的離型薄膜F上,再按各模製成形進行搬入。而且,透過供給樹脂R及工件W並將成形模具20閉模而進行模製成形。On the one hand, the press section is provided with a molding die 20 such as shown in FIG. 17, and a pair of platens provided with an upper die 21 and a lower die 22 are opened and closed to perform molding. In this case, it is also possible to apply any one of the above-mentioned loading methods of resin R, and after a single release film F is placed on any one of the upper mold 21 and the lower mold 22 in order To supply the resin R, it is also possible to mount the resin R on a single release film F outside the press section, and then carry it in according to each mold. Then, molding is performed by supplying the resin R and the workpiece W and closing the molding die 20.

依據此種構成,可在不使用像一對環82那樣的保持具下使用單片的離型薄膜F進行複數次的模製成形。藉此,例如,雖無法獲得上述的實施形態中使用保持具所產生的效果,但變得無需管理保持具而能簡化構成。又,在離型薄膜F的皺折對成形上不造成問題的情況能以簡易構成進行有效率的成形。According to this structure, a single release film F can be used for molding multiple times without using a holder such as a pair of rings 82. Thereby, for example, although the effect produced by using the holder in the above-mentioned embodiment cannot be obtained, it becomes unnecessary to manage a holder, and the structure can be simplified. In addition, when the wrinkles of the release film F do not cause problems in molding, efficient molding can be performed with a simple configuration.

10:樹脂成形裝置 20:成形模具 21:上模 22:下模 21a,22a:模具面 23:模穴件 24:夾持件 25:基座 26:彈性構件 27:密封構件 28,29:空氣路徑 30:密封構件 31:空氣路徑 32:空氣路徑 40:薄膜裝載手臂 41:控制部 50:捲出部 51:捲出軸 52:測量輥 53,63:導輥 54:捲出伺服馬達 55:編碼器 56,66:進退機構 60:捲取部 61:捲取軸 62:進給輥 64:捲取伺服馬達 C:模穴 F:離型薄膜 R:樹脂 W:工件10: Resin molding device 20: Forming mold 21: upper die 22: Lower die 21a, 22a: mold surface 23: Mould parts 24: Clamping parts 25: Pedestal 26: Elastic member 27: Sealing member 28, 29: air path 30: Sealing member 31: Air Path 32: Air path 40: Film loading arm 41: Control Department 50: Roll out part 51: Roll out the reel 52: Measuring roller 53,63: guide roller 54: Roll out servo motor 55: encoder 56,66: advance and retreat mechanism 60: Coiling section 61: take-up shaft 62: Feed roller 64: Take-up servo motor C: Mould cavity F: Release film R: Resin W: Workpiece

圖1係本發明實施形態1的樹脂成形裝置(上模模穴、壓縮成形類型)的初期狀態之示意構成圖。 圖2係圖1所示的樹脂成形裝置的成形後狀態之示意構成圖。 圖3係圖1所示的樹脂成形裝置的動作之示意流程圖。 圖4係圖3所示的模製工序的示意流程圖。 圖5係接續圖1之後的樹脂成形工序中之薄膜吸附的說明圖。 圖6係接續圖5之後的模製成形之說明圖。 圖7係接續圖6之後的開模之說明圖。 圖8係接續圖7之後的完成薄膜剝離之說明圖。 圖9係本發明實施形態1的樹脂成形裝置的一變形例(下模模穴、壓縮成形類型)之示意說明圖。 圖10係本發明實施形態1的樹脂成形裝置的其他變形例(上模模穴、轉送模製類型)之示意說明圖。 圖11係本發明實施形態2的樹脂成形工序中的薄膜抽出之說明圖。 圖12係接續圖11之後的薄膜切斷之說明圖。 圖13係接續圖12之後的藉由搬送治具進行薄膜保持前之說明圖。 圖14係接續圖13之後的藉由搬送治具進行薄膜保持後之說明圖。 圖15係接續圖14之後的薄膜張力賦予之說明圖。 圖16係接續圖15之後的樹脂供給之說明圖。 圖17係接續圖16之後的朝成形模具搬入薄膜之說明圖。 圖18係接續圖17之後的薄膜安置之說明圖。 圖19係接續圖18之後的樹脂安置之說明圖。 圖20係接續圖19之後的搬送治具之退避的說明圖。 圖21係接續圖20之後的閉模之說明圖。 圖22係接續圖21之後的模製成形之說明圖。 圖23係接續圖22之後的開模之說明圖。 圖24係接續圖23之後的完成薄膜剝離之說明圖。 圖25係接續圖24之後的朝成形模具搬入搬送治具之說明圖。 圖26係接續圖25之後的藉由搬送治具進行薄膜保持之說明圖。 圖27係接續圖26之後的藉由搬送治具進行薄膜取出之說明圖。 圖28係接續圖27之後的朝工件台搬入搬送治具之說明圖。 圖29係接續圖28之後的搬送治具安置之說明圖。 圖30係接續圖29之後的重新賦予薄膜張力之說明圖。 圖31係接續圖30之後的樹脂供給之說明圖。Fig. 1 is a schematic configuration diagram of an initial state of a resin molding apparatus (upper mold cavity, compression molding type) according to Embodiment 1 of the present invention. Fig. 2 is a schematic configuration diagram of the state after molding of the resin molding apparatus shown in Fig. 1. Fig. 3 is a schematic flow chart of the operation of the resin molding apparatus shown in Fig. 1. Fig. 4 is a schematic flow chart of the molding process shown in Fig. 3. Fig. 5 is an explanatory diagram of film adsorption in the resin molding process following Fig. 1; Fig. 6 is an explanatory diagram of molding after Fig. 5; Fig. 7 is an explanatory diagram of mold opening following Fig. 6. FIG. 8 is an explanatory diagram of the completion of film peeling after FIG. 7 is continued. Fig. 9 is a schematic explanatory view of a modification (lower mold cavity, compression molding type) of the resin molding apparatus according to the first embodiment of the present invention. Fig. 10 is a schematic explanatory view of another modification (upper mold cavity, transfer mold type) of the resin molding apparatus according to the first embodiment of the present invention. Fig. 11 is an explanatory diagram of film extraction in the resin molding step of the second embodiment of the present invention. Fig. 12 is an explanatory diagram of film cutting following Fig. 11. Fig. 13 is an explanatory diagram after Fig. 12 before film holding by means of a transport jig. Fig. 14 is an explanatory diagram after Fig. 13 is continued after the film is held by a transport jig. Fig. 15 is an explanatory diagram of film tension application following Fig. 14. Fig. 16 is an explanatory diagram of resin supply following Fig. 15. Fig. 17 is an explanatory diagram of loading the film into the forming die following Fig. 16. Fig. 18 is an explanatory diagram of film placement following Fig. 17. Fig. 19 is an explanatory diagram of the resin placement following Fig. 18. Fig. 20 is an explanatory diagram of the evacuation of the transport jig following Fig. 19; FIG. 21 is an explanatory diagram of mold closing following FIG. 20. Fig. 22 is an explanatory diagram of molding after Fig. 21; Figure 23 is an explanatory diagram of mold opening following Figure 22. FIG. 24 is an explanatory diagram of the completion of film peeling after FIG. 23 is continued. Fig. 25 is an explanatory diagram of the transfer of the jig into the forming mold after continuation of Fig. 24. Fig. 26 is an explanatory diagram of film holding by means of a transport jig following Fig. 25; Fig. 27 is an explanatory diagram of film removal by transporting a jig following Fig. 26; Fig. 28 is an explanatory diagram of loading and transporting the jig to the work stage after continuation of Fig. 27. Fig. 29 is an explanatory diagram of the placement of the transport jig after Fig. 28 is continued. Fig. 30 is an explanatory diagram of re-applying film tension after Fig. 29 is continued. Fig. 31 is an explanatory diagram of resin supply following Fig. 30;

10C:樹脂成形裝置 10C: Resin molding device

20:成形模具 20: Forming mold

21:上模 21: upper die

22:下模 22: Lower die

21a,22a:模具面 21a, 22a: mold surface

23:模穴件 23: Mould parts

24:夾持件 24: Clamping parts

25:基座 25: Pedestal

26:彈性構件 26: Elastic member

27:密封構件 27: Sealing member

28,29:空氣路徑 28, 29: air path

32:空氣路徑 32: Air path

80:薄膜搬送裝置 80: Film conveying device

82:環 82: Ring

84:搬送治具 84: Transport fixture

85:按壓部 85: pressing part

86:可動保持部 86: Movable holding part

86a:爪部(夾盤部) 86a: Claw part (chuck part)

91:缸體 91: Cylinder

92:袋部(凹陷部) 92: pocket part (depressed part)

93:空氣路徑 93: Air Path

94:脫逃部(凹陷部) 94: escape part (depressed part)

C:模穴 C: Mould cavity

F:離型薄膜 F: Release film

R:樹脂 R: Resin

W:工件 W: Workpiece

Claims (1)

一種樹脂成形方法,係將離型薄膜與樹脂供給至模具而將工件模製成形,其特徵為具備反覆從薄膜卷切出單片的前述離型薄膜並供給至前述模具,並以供給到前述模具之前述工件及前述樹脂進行模製成形的工序之構成,在將前述離型薄膜的外周部以保持具作保持的狀態下向前述離型薄膜供給前述樹脂後,將前述離型薄膜與前述樹脂連同前述保持具供給至前述模具,將以前述保持具所保持的前述離型薄膜使用在複數次模製成形,前述離型薄膜每進行複數次使用時,對前述離型薄膜重新賦予張力。 A resin molding method that supplies a release film and resin to a mold to mold a workpiece. The method is characterized by repeatedly cutting the release film from a film roll into a single piece and supplying the release film to the mold and then supplying it to the mold. The composition of the process of molding the workpiece and the resin of the mold, after supplying the resin to the release film while holding the outer peripheral part of the release film with a holder, the release film and the The resin is supplied to the mold together with the holder, and the release film held by the holder is used for multiple times of molding. Each time the release film is used multiple times, the release film is re-tensioned.
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