JP2003276147A - Film sticking method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film sticking method by which a film can be flatly stuck onto a substrate without generating a stepped part, creases or air bubbles from the leading end to the rear end of the film, and a film sticking device. <P>SOLUTION: The film cut into a desired length is stuck to the surface of the substrate by a pressure bonding roll having a function for sucking the film. The leading end of the film is delivered to the outer peripheral face of the pressure roll from a film leading end retaining member, and the leading end of the film is sucked by the outer peripheral face of the roll. Further, the film is conveyed to the substrate by rotation of the roll to set the leading end of the film to a position for starting the sticking of the film to the substrate and is stuck to the surface of the substrate. After that, the rear end part of the film is delivered to the outer peripheral face of the roll from a film rear end retaining member and sucked by the outer peripheral face of the roll to stick the film to the substrate from the leading end of the film to the rear end thereof by rotation of the roll. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking method and a device therefor, and more particularly to a method and a device for sticking a film obtained by cutting a continuous film into individual sheets onto a substrate surface by a pressure roll.

[0002]

2. Description of the Related Art Conventionally, when a continuous long film is cut in the width direction and separated into sheets and attached to a substrate surface by a pressure roll, the tip of the film is held by a tip holding member such as a vacuum plate. Then, after the tip holding member retracts, the film and substrate are sandwiched by a pair of pressure rolls, and the film is attached to the substrate while transporting the substrate on the transport path by rotating both pressure rolls. At the end of the pasting, the trailing edge of the film is held again by the end holding member such as a film suction member (vacuum bar) so that the trailing edge of the film is pasted onto the substrate. 3-16906).

[0003]

According to the prior art, the case of attaching the front end or the rear end of the film to the substrate and the case of attaching the space between the front end and the rear end of the film to the substrate are used. Since the members are different from each other, a difference in pressing force is likely to occur, and for that reason, there is a step at the leading end portion and the trailing end portion of the attached film, which hinders subsequent processing on the substrate.

Further, the holding member at the rear end is not put in the space between the substrate and the pressure bonding roll, and the holding of the rear end is stopped and released freely before the end position of the sticking so that the rear end is stuck. Were prone to wrinkles and wrinkles and bubbles.

Therefore, an object of the present invention is to provide a film sticking method and a device for sticking a film onto a substrate evenly from the leading end portion to the trailing end portion of the film without generating a step.

Another object of the present invention is to provide a film sticking method and a device for sticking a film from the front end to the rear end of a film on a substrate without generating wrinkles or bubbles.

[0007]

Means for Solving the Problems A feature of the present invention that achieves the above object is that in a film sticking method of sticking a film cut to a desired length on the surface of a substrate by a press roll, the film is used as a press roll. Using the one having a function of adsorbing the film, the tip of the film is transferred from the film tip holding member to the outer peripheral surface of the pressure-bonding roll, the outer peripheral surface of the pressure-bonding roll adsorbs the tip, and the pressure-bonding roll rotates to The film is conveyed to the substrate so that the tip end portion is aligned with the attachment start position of the substrate and the film is attached to the surface of the substrate, and the trailing end portion of the film is the outer periphery of the pressure roll from the film trailing end holding member. The rear end is adsorbed on the outer peripheral surface of the pressure-bonding roll, and the rear end is attached to the substrate by rotation of the pressure-bonding roll.

Further, the present invention which achieves the above object is characterized in that in a film sticking apparatus for sticking a film cut to a desired length onto the surface of a substrate by a press roll, the press roll has a function of adsorbing the film. A film front end holding member that holds the front end of the film and transfers the front end to the outer peripheral surface of the pressure roll, and a rear end of the film that holds the rear end on the outer peripheral surface of the pressure roll. And a film rear end holding member for delivering the film, the crimp roll adsorbs the tip portion on the outer peripheral surface thereof, and the film is conveyed to the substrate by the rotation of the crimp roll, and the tip portion is attached to the substrate. Match the position and stick the film on the surface of the substrate, adsorb the rear end on the outer peripheral surface of the pressure roll, and stick the rear end to the substrate by rotating the pressure roll. In the Rukoto.

According to the present invention, since the pressure-bonding member is not switched only by the pressure-bonding roll for attaching the film to the substrate, steps, wrinkles or bubbles are not generated.

[0010]

1 is a schematic sectional view of a film sticking apparatus according to an embodiment of the present invention.

A guide roll 3 is provided below the film roll 1 in order to convey a continuous long film 2 unrolled from the film roll 1 to the conveyance path side of the substrate 14. Here, the cover film 2a is peeled off to form the film 2b. And change direction. A take-up roll 4 is adjacent to the film roll 1, and the cover film 2a separated by the guide roll 3 is wound up.

The film 2 is formed of three layers of a cover film 2a, a resist film and a base film,
From the inside as the film roll 1, the cover film 2a,
The resist film and the base film are wound in this order. A drive device (for example, a motor) for the film roll 1 and the take-up roll 4 is provided with a function of adjusting the torque according to the remaining amount of the film, and the tension of the film 2 is kept constant for conveyance.

A film leading end holding member (hereinafter abbreviated as leading end holding member) 5 for adsorbingly holding the leading end portion and the trailing end portion of the film 2b under the guide roll 3 and transporting the film 2b leftward in the drawing.
And film trailing edge holding member (hereinafter abbreviated as trailing edge holding member)
There is a film conveying member 11 including a cutter 6 for cutting the film 6 and the film 2b in the width direction.

Inside the tip holding member 5, as shown in FIG. 3, there are several vacuum chambers 5a to 5e arranged side by side in the length direction of the film 2b (the left and right direction of the drawing which is the conveying direction) and the upper surface. Are arranged in the width direction of the film 2b in each of the vacuum chambers 5a to 5e.
Since the vacuum chambers 5a to 5e communicate with a vacuum source via a common intermediate valve (not shown), the upper surface of the vacuum chambers 5a to 5e adsorbs the film 2b. The front end holding member 5 has a trapezoidal cross section in which the lower surface of the front end is cut off and the upper surface extends at a flat acute angle, and the vacuum chamber 5 is provided near the delivery front end in order to suppress the curl of the film 2b.
e and a suction hole are provided.

Further, a pressure sensor for monitoring the vacuum state is provided in the pipe between each of the vacuum chambers 5a-5e and the common intermediate valve,
When the suction position of the film 2b is displaced for some reason and the film 2b is not located on the upper surface of the suction hole, the vacuum pressure is lowered, so that the suction state of the film 2b can be monitored.

Similar to the front end holding member 5, the rear end holding member 6 also has vacuum chambers 6a to 6e inside and suction holes on the upper surface, and the vacuum chambers 6a to 6c on the upstream side and the vacuum chambers 6d and 6e on the downstream side are arranged. Separate valves communicate with a common vacuum source. A pressure sensor for monitoring the vacuum state is provided in each of the pipes between the upstream vacuum chambers 6a to 6c and the individual valves and the pipes between the downstream vacuum chambers 6d and 6e and the individual valves, and the film is attracted by some cause. When the film is misaligned and the film is not located on the upper surface of the suction hole, the vacuum state is lowered so that the suction state of the film can be monitored. The rear end holding member 6 also has a trapezoidal cross section in which the lower surface of the rear end portion is cut off and the upper surface extends at a sharp angle, and a vacuum chamber 6e and a suction hole are provided near the delivery front end and the vacuum chambers 6a to 6c side and piping are connected. The system is separated so that a sufficient tensile force acts on the film 2b until the end of the delivery (the delivery will be described later) of the rear end portion of the film 2b to the pressure bonding roll 13 (FIG. 1).

Further, the rear end holding member 6 has vacuum chambers 6a and 6a.
Grooves are provided in the width direction (direction perpendicular to the paper surface of FIG. 1) orthogonal to the transport direction of the film 2b (left direction of FIG. 1) on the upper surface between b, and the film is cut in the width direction by the cutter 8. It is functioning as a cutter holder when. The cutter 8 has an air cylinder (not shown) attached to the film conveying member 11 so as to be movable in the vertical direction. When the film 2b is not cut (cut in the width direction), the cutter 8 shown in FIG. It has a mechanism that can be retracted to the upper side.

The film conveying member 11 further has a ball screw 10 directly connected to the servomotor 9, and the rear end holding member 6 is moved vertically to the conveying path side so that a pair of pressure-bonding rolls 13 sandwich the substrate 14. The air cylinder 12 moves vertically so that it is located at the same position as the outermost position of the outer circumference. Further, if the trailing edge holding member 6 is moved vertically by the air cylinder 12 and the trailing edge holding member 6 is retracted from the front, the leading edge holding member 5 is also moved to the pressure roll 13 side by the air cylinder 7 to move the leading edge of the film 2a. The part is delivered onto the pressure bonding roll 13 (delivery will be described later).

Although not shown, the front end holding member 5 is provided with a stopper member so that the approach position can be adjusted with respect to a pair of pressure rolls opened in a direction away from the transport path side of the substrate 14. .

The pair of pressure-bonding rolls 13 are located above and below the transport path of the substrate 14 constituted by a plurality of transport rollers 15, and each transport roller 15 sandwiches the substrate 14 transported from left to right in the drawing in the vertical direction. It is arranged so that it can be moved. The vertical movement is performed by an air cylinder, but the illustration is omitted.
The pressure bonding roll 13 is composed of a roll body and a silicone rubber coated on the outer peripheral surface thereof. There is a heater inside the roll body.

Conveyor roller 1 on the inlet side of the pressure roll 13
A sensor 26 for detecting the front end of the substrate 14 being conveyed during
Is installed, and when the sensor 26 detects the front end of the substrate 14 being conveyed, the substrate 1 is moved to an arbitrary position below the pressure bonding roll 13.
4 is carried and stopped by the carrying roller 15.

The upper pressure-bonding roll 13 is grounded, an electrode 16 is installed above it, and the electrode 16 is connected to a static electricity generator 17. When a high voltage is applied to the electrode 16 from the static electricity generator 17, the film 2b conveyed to the lower side of the electrode 16 is charged, and the leading end of the film 2b is brought into close contact with the upper pressure-bonding roll 13 surface by Coulomb force. A dustproof cover 18 is provided so as to surround the upper pressure roll 13 and the electrode 16. Therefore, dust or the like does not adhere to the film 2b charged by the electrodes.

Reference numeral 23 is a control device for controlling the operation of the apparatus, which is a monitor screen 24 for displaying data such as a film sticking length and a motor constant for driving the apparatus,
A memory for storing data and programs, and a keyboard 25 for inputting data are attached. It also includes a program for executing the operation steps of the apparatus (described later based on FIG. 2), an operation screen program for setting data on the monitor, and the like.

Next, the operation of the film sticking apparatus will be described according to the flow shown in FIG. First, the film sticking operation preparation in step (hereinafter abbreviated as “S”) 100 is performed.

As a preparation for performing the film sticking operation, the film 2 is manually pulled out from the film roll 1 and transferred to the guide roll 3, and the cover film 2a is peeled off. The peeled cover film 2a is wound around the winding roll 4. The film 2b from which the cover film 2a has been peeled off is pulled out to the tip of the rear end holding member 6 and vacuum-adsorbed on the upper surfaces of the front end holding member 5 and the rear end holding member 6.

At this time, the film roll 1 and the take-up roll 4 operate a motor (drive device) not shown so that the tension of the film 2b becomes constant.

While allowing the cutter 8 to pass through the groove (the groove 6T in FIG. 3) of the rear end holding member 6, the cutter 8 is moved in the width direction of the film 2b to cut the film 2b in the width direction. The rear end holding member 6 that has adsorbed the film 2b
The valve of the piping system is closed to stop the vacuum suction, and the scrap of the film 21 on the rear end holding member 6 is discarded. At this time, the film 2b is vacuum-adsorbed on the front end holding member 5 in a state of protruding by about 10 mm from the front end of the front end holding member 5 (see FIG. 3).

This completes the film sticking operation preparation S100, and then proceeds to the film delivery processing S200 of FIG. In the film delivery process S200, as shown in FIG. 4, the ball screw 10 is rotated by the servo motor 9 so that the film 2b on the tip holding member 5 is made to be the same as the outermost peripheral portion of the upper pressure-bonding roll 13 by the film conveying member 11. Move parallel to maintain height. During this movement, the cylinder 12 provided on the film transport member 11 is driven to retract the trailing edge holding member 6 to the lower side.

At this time, the pair of pressure-bonding rolls 13 are open and heated by the internal heater. Then, the leading end holding member 5 is further moved by the air cylinder 7 so that the leading end of the film 2b is located at the uppermost position of the upper pressure roll 13.

Crimping roll 1 in which the tip of film 2b is on the upper side
3 is located at the uppermost position, the high voltage is applied from the static electricity generating device 17 to the electrode 16 installed above the upper pressure-bonding roll 13, and the high-voltage is applied between the electrode 16 and the pressure-bonding roll 13 and the tip holding member 5 The leading end portion of the film 2b having a size of about 10 mm protruding from the outside is charged. After the tip portion of the film 2b is electrostatically adsorbed by the pressure-bonding roll 13 which is grounded, the application of the high voltage from the static electricity generator 17 to the electrode 16 is stopped.

By transporting the film 2b to the pressure-bonding roll 13 side, the leading end of the film 2b can be transferred to the pressure-bonding roll 13 with a uniform suction force without generating wrinkles.

After passing the film 2b, the pressure roll 1
3 starts rotating in the direction of the conveying path of the substrate 14 constituted by the conveying rollers 15 and tries to convey the adsorbed film 2b downward. In this case, the valve in the piping system on the side of the tip holding member 5 is opened to release the vacuum suction of the film 2b, so that the film 2b begins to be conveyed downward as the pressure roll 13 rotates. At the guide roll 3, the cover film 2 is stripped off in accordance with the unwinding of the film 2, and the cover film 2 is wound up by the winding roll 4.

Whether the tip of the film 2b reaches the center of the lower surface of the upper pressure-bonding roll 13 by the rotation of the pressure-bonding roll 13 is confirmed by the number of pulses from the encoder 14, and when it is confirmed, the rotation of the pressure-bonding roll 13 is stopped. To do. Further, after the front end holding member 5 is returned by the air cylinder 7 during the transport of the film 2b, the retracted rear end holding member 6 is raised to be aligned with the front end holding member 5 to the transport position of the film 2b. return.

After that, the film conveying member 11 is moved backward by the servo motor 9 in order to cut the film 2b in the width direction so as to have a desired length. The substrate positioning process S300 is simultaneously performed during the film delivery process S200. The substrate 14 is moved from the left to the right in FIG. In this case, when the sensor 26 detects the front end of the substrate 14 being conveyed, the moving amount of the substrate 14 is calculated from the rotation amount of the conveying roll 15, and the film sticking start position of the front end of the substrate is located at the bottom of the upper pressure-bonding roll 13. Substrate 1
The movement of 4 is temporarily stopped.

Thereafter, the film sticking process S400 shown in FIG. 2 is performed. In the film sticking process S400, as shown in FIG. 1, the upper and lower pressure-bonding rolls 13 move up and down in the direction of the substrate 14 to sandwich (nip) the substrate 14 with both pressure-bonding rolls 13, and the front end of the film 2b is attached to the substrate 14. Thermocompression bonding.
At this time, if sagging occurs in the film 2b due to catenary (note: one form of a curve expressed by a mathematical formula) between the guide roll 3 and the pressure bonding roll 13, the back tension of the film roll 1 is temporarily strengthened, The slack of the film 2b may be eliminated. Next, the film 2b on the upper side of the front end holding member 5 and the rear end holding member 6 is vacuum-sucked and held, and the film conveying member 11 is moved to the upper side press roll 13 side in synchronization with the rotation of the press roll 13. Both pressure bonding rolls 13 rotate while holding the substrate 14 therebetween, and the upper pressure bonding roll 13 thermocompresses the film 2b onto the substrate 14 while conveying the substrate 14 to the right. The thermocompression bonding amount controls the rotation amount of the pressure bonding roll 13 according to the film pasting size.
Control with 3.

The film cutting process S500 shown in FIG. 2 is performed during the movement of the film conveying member 11 to the upper pressure contact 13 side in the film attaching process S400. In the film cutting process S500, in the moving film transport member 11, the film 2b on the upper side of the front end holding member 5 and the rear end holding member 6 is vacuum-sucked and held, and after the cutter 8 is moved to the cutting position, the width is changed. Film 2
Cut b. By this cutting, the film 2b being attached to the substrate 14 is made to have a required length to be attached to the substrate 14.

After cutting the film 2b, as shown in FIG. 5, the rear end holding member 6 is moved by the vertically movable air cylinder 12 to the same height as the outermost periphery of the crimp roll closed, and Crimping roll 1 with conveying member 11
After moving the front end of the rear end holding member 6 to the delivery position at the uppermost outer periphery of 3, the high voltage is applied to the electrode 16 again.

At this time, the rear end of the film 2b is evacuated from the vacuum hole 6 side of the rear end holding member 6 from the suction hole row side communicating with the vacuum chamber 6a.
It is conveyed to the pressure-bonding roll 13 while sliding on each suction hole row in order toward the suction hole row side communicating with e. Each vacuum chamber 6a-
The pressure of 6e gradually approaches the atmospheric pressure because the film 2b opens the row of intake holes as the film is conveyed.

The respective vacuum chambers 6a-6e are vacuum chambers 6a-6c.
And the vacuum chambers 6d, 6e are separated by valves in the piping system, and the vacuum chambers 6d, 6e are closed in order to close the valves on the side of the vacuum chambers 6a-6c that have reached atmospheric pressure by monitoring the degree of vacuum with a pressure sensor. The sides do not become atmospheric pressure together, so that the rear end of the film 2b can be held to the end and transferred to the pressure roll 13, the rear end of the film 2b does not hang down, and the rear end of the film 2b does not hang down. Since it is reliably delivered to the pressure-bonding roll 13 and is transported to the rear end of the substrate 14 by electrostatic attraction after delivery, it is possible to always attach a constant tensile force to the film 2b to be attached. No wrinkles or bubbles. The thermocompression-bonded substrate 14 is rotated by the conveying roller 15 and conveyed to the downstream machine side, and it is confirmed in S600 whether or not the process is completed. If there is a remaining number of the substrate 14 to be processed, the film delivery process S200, Returning to the substrate positioning process S300, the process described above is repeated.

Since the film 2b is attached to the substrate 14 only by the pressure-bonding roller 13, there is no difference in the attaching force depending on the position, and the attached film 2b is not affected.
Is flat and has no step, so that there is no inconvenience in post-processing of the substrate 14.

In order to obtain a stronger tensile force on the film 2b in the rear end holding member 6, the number of rows of suction holes may be increased, or each row of suction holes may be separated by a vacuum chamber.

As shown in FIG. 6, a part of the front end holding member 5 and the rear end holding member 6 are electrostatic adsorption devices 27 and 28 for adsorbing a film in which electrodes are embedded in a plastic composite plate. , By applying a voltage to this, the film may be held and conveyed by combined use of vacuum adsorption and electrostatic adsorption, or the adsorption position can be switched by a switch so that all adsorption is performed by electrostatic adsorption. You can

The adsorption of the front end portion and the rear end portion of the film 2b on the pressure-bonding roll 13 is not limited to electrostatic adsorption and may be adsorption by suction under reduced pressure.

In the embodiment shown in FIG. 1, the cutter 8 is located on the downstream side of the pressure roller 13 in the substrate transport path,
Even if dust is generated when the film 2b is cut by the cutter 8, it can be prevented from falling onto the substrate 14. Therefore, it is not necessary to consider the contamination of the substrate 14, and the tip of the film 2b with respect to the outer peripheral surface of the pressure roll 13 can be considered. If a portion or a rear end is delivered, the delivery position does not have to be the uppermost portion of the pressure roll 13 as long as it is in a direction different from the moving direction of the pressure roll toward the substrate.

[0045]

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a film sticking apparatus which is an embodiment of the present invention.

FIG. 2 is a flowchart illustrating an operation procedure in the film sticking apparatus of FIG.

3 is a diagram showing a rear end holding member and a front end holding member in the film sticking apparatus of FIG. 1 at the time when the preparation for the film sticking operation of FIG. 2 is completed.

4 is a diagram showing a film front end holding member in the film sticking apparatus of FIG. 1 at the time of the film delivery processing of FIG.

5 is a view showing a film trailing edge holding member in the film sticking apparatus of FIG. 1 at the time of the film sticking process of FIG.

6 is a diagram showing a configuration in which an electrostatic adsorption device is used for a part of a film front end holding member and a rear end holding member in the film sticking apparatus of FIG.

[Explanation of symbols]

2,2b ... film 5 ... Tip holding member 6 ... Rear end holding member 7, 12 ... Air cylinder 8 ... Cutter 9 ... Servo motor 10 ... Ball screw 11 ... Film transport member 13 ... Crimping roll 15 ... Conveyor roller 16 ... Electrode 17 ... Static electricity generator 23 ... Control device

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Jun Miura             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Ken Fujii             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Kazuo Takahashi             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries F term (reference) 4F100 AK01A AT00B BA02 BA10A                       BA10B EC032 EJ192 EJ422                       EK06 EK08

Claims (7)

[Claims] 1. A film sticking method for sticking a film cut to a desired length onto a surface of a substrate by a pressure roll, wherein a pressure roll having a function of adsorbing the film is used, and the front end of the film is held. From the member to the outer peripheral surface of the pressure-bonding roll, the outer peripheral surface of the pressure-bonding roll adsorbs the front end portion, and the film is conveyed to the substrate by the rotation of the pressure-bonding roll to place the front end portion at the substrate attachment start position. While aligning and sticking the film to the surface of the substrate, the rear end of the film is transferred from the film rear end holding member to the outer peripheral surface of the pressure roll, and the outer peripheral surface of the pressure roll adsorbs the rear end. A film sticking method, wherein the back end portion is stuck to a substrate by rotation of the pressure roll. 2. The film sticking method according to claim 1, wherein the film front-end holding member holds the film such that the front end of the film projects from the film front-end holding member. How to attach. 3. The film sticking method according to claim 1, wherein pressure bonding rolls are provided at respective upper and lower positions of a conveyance path surface of the substrate, and each pressure bonding roll moves in the direction of the substrate to sandwich the substrate and rotate the substrate. The film is conveyed in the downstream direction while being attached to the substrate, and the film is transferred to at least one pressure-bonding roll in the film front-end holding member and the film rear-end holding member in a direction different from the moving direction to the substrate in each pressure-bonding roll. A film sticking method characterized by carrying out. 4. A film sticking device for sticking a film cut to a required length onto a surface of a substrate by a press roll, wherein a press roll having a function of adsorbing the film and a tip end of the cut film are held. A film front end holding member for delivering the front end portion to the outer peripheral surface of the pressure roll, and a film rear end holding member for retaining the rear end portion of the film and delivering the rear end portion to the outer peripheral surface of the pressure roll. The pressure-bonding roll adsorbs the tip portion on its outer peripheral surface, and the film is conveyed to the substrate by the rotation of the pressure-bonding roll so that the tip portion coincides with the attachment start position of the substrate and the film is attached to the surface of the substrate. A film sticking apparatus, wherein the film is stuck to the substrate, and the rear end is adsorbed by the outer peripheral surface of the pressure roll, and the back end is stuck to the substrate by rotation of the pressure roll. 5. The film sticking apparatus according to claim 4, wherein the pressure-bonding roll adsorbs the film by static electricity or reduced pressure. 6. The film sticking apparatus according to claim 4, wherein the film rear end holding member has a plurality of suction holes in the film holding surface portion, and the suction holes aligned in the width direction of the film are individual valves. A film sticking device, which is connected to a common vacuum source, and each valve is adapted to be closed according to the transport of the film. 7. The film sticking apparatus according to claim 4, wherein the film trailing edge holding member is a pedestal for a blade portion in a cutting means for cutting a continuous film in a width direction into a film having a required length. Further, when the cutting means cuts a continuous film in the width direction, it is located between the film tip holding member and the pressure roll, and the film tip holding member is attached to the pressure roll. A film sticking apparatus, which is adapted to be retracted when the tip portion is delivered.