JP3769506B2 - Film sticking device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film sticking apparatus, and in particular, sandwiches a film and a substrate with a lamination roll coated with an elastic member on the surface of the roll body, while conveying the film and the substrate as the lamination roll rotates. The present invention relates to a film sticking apparatus that pressurizes and attaches the film to the substrate.
[0002]
[Prior art]
The lamination roll used in this type of film sticking device incorporates an induction heating device consisting of a coil and an iron core inside the roll body, a plurality of heat pipes around the roll body, and a substrate and film on the surface of the roll body. An elastic member such as silicon rubber is coated in order to sufficiently pressurize and improve the adhesion of both.
[0003]
When the substrate and the film are attached, the lamination roll shaft is pressed and rotated with a force stronger than the vertical direction, and the substrate and the film are conveyed and pressurized. The pressurization of the substrate is often repeated at the same position of the lamination roll, and the elastic member in contact with the substrate is fatigued and deformed or turns black due to dirt.
When the deformation becomes large, the lamination roll is removed from the apparatus at the discretion of the operator, and the elastic member is replaced.
In addition, the replacement of the elastic member is based on the number of times of pasting the substrate and the film.
[0004]
[Problems to be solved by the invention]
At the mass production site, each substrate to be transported at an appropriate interval and the film whose length to be pasted are aligned at the tip position and pressurization is started, and the pasting feed amount (in the transport direction) In many cases, when the roll diameter of the lamination roll is reduced due to deformation of the elastic member, the application is stopped. The feed amount is smaller than the design sticking feed amount, and there is a portion that is not attached at the rear end of the film.
[0005]
The longer the sticking feed amount and the larger the rotation amount of the lamination roll, the longer the length of the film rear end that is not pressurized.
The film in the non-pressurized portion comes into contact with the substrate in a state containing air and becomes air bubbles, which causes wrinkles.
In consideration of the fact that the roll diameter of the lamination roll becomes narrower, if the pasting feed amount is longer than the film length, the part without film is also pressed.
As a result, dirt on the surface of the lamination roll adheres to the substrate.
Therefore, an object of the present invention is to provide a film sticking apparatus capable of measuring a change in the roll diameter of a lamination roll.
[0006]
Another object of the present invention is to provide a film sticking apparatus capable of accurately sticking a film to a substrate even when the roll diameter of a lamination roll is changed, thereby preventing generation of bubbles and wrinkles. is there.
[0007]
[Means for Solving the Problems]
A feature of the present invention that achieves the above object is that the film and the substrate are sandwiched by a lamination roll in which the surface of the roll body is coated with an elastic member, and the film and the substrate are brought together with the rotation of the lamination roll. In the film sticking apparatus for sticking the film to the substrate by applying pressure while transporting, means for measuring the deformation state of the elastic member in the radial direction of the lamination roll is provided.
Furthermore, there is provided means for adjusting the rotation amount of the lamination roll based on the deformation state of the elastic member obtained by the measuring means.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a schematic sectional view of a film sticking apparatus according to an embodiment of the present invention.
[0009]
In FIG. 1, K is a film. F Is a substrate to be attached.
[0010]
the film F Is formed of three layers of a cover film, a resist film, and a base film. The film roll 1 is wound from the inside in the order of the cover film, the resist film, and the base film.
[0011]
In order to transport the film F fed out from the film roll 1 to the transport path of the substrate K, there is a guide roll 3 below the film roll 1, and the cover film 2 is peeled off here to change the direction.
[0012]
A take-up roll 4 is adjacent to the film roll 1 and the cover film 2 peeled off by the guide roll 3 is taken up.
[0013]
A driving device (for example, a motor) for the film roll 1 and the take-up roll 4 is provided with a function of adjusting the torque according to the remaining amount of the film so that the film is conveyed with a constant tension.
[0014]
Below the guide roll 3 are a front end holding member 5 and a rear end holding member 6 which hold the front end or rear end of the film F by suction and convey it to the left in the figure.
[0015]
The tip holding member 5 has a vacuum chamber inside and a suction hole on the upper surface, and the vacuum chamber communicates with a vacuum pump through an intermediate valve, so that the tip of the film F is sucked on the upper surface. Yes.
[0016]
Reference numeral 7 denotes an air cylinder fixed to a movable portion 11 movable in the left-right direction with a ball screw 10 directly connected to the servo motor 9, and the tip holding member 5 is fixed to the movable portion of the air cylinder 7. The front end of F can be accurately conveyed to the vicinity of the lamination roll 13. Similarly to the front end holding member 5, the rear end holding member 6 also has a vacuum chamber inside and an adsorption hole on the upper surface. Further, a groove is provided in the width direction (direction perpendicular to the paper surface in FIG. 1) perpendicular to the conveyance direction (left direction in FIG. 1) of the film F, and when the film F is cut in the width direction with a cutter 8 or the like. Used as a cutter receiver. The rear end holding member 6 is fixed to a connecting member 12 of a rotary actuator provided in the movable portion 11, and the rear end holding member 6 is retracted downward from the film transport surface when the connecting member 12 rotates.
[0017]
The rear end holding member 6 is positioned closer to the lamination roll 13 than the front end holding member 5 when aligned with the front end holding member 5.
[0018]
The cutter 8 is provided above the rear end holding member 6 and moves in the width direction of the film F by a rodless cylinder or the like to cut the film F in the width direction.
Reference numeral 13 denotes a lamination roll, which is disposed above and below a conveyance path constituted by a plurality of conveyance rollers 15 and is arranged so as to be movable so that the conveyance roller 15 sandwiches the substrate K conveyed from the left to the right in the drawing from the vertical direction. is there. The vertical movement is performed by an air cylinder, but the illustration is omitted.
The lamination roll 13 is composed of a roll main body and silicon rubber coated on the outer peripheral surface thereof. There is a heater inside the roll body. An encoder 14 that measures the amount of rotation is attached to the lower lamination roll 13.
An electrode 16 is provided above the upper lamination roll 13 and is connected to a static electricity generator 17. When a high voltage is applied to the electrode 16 from the static electricity generator 17, the film F transported to the lower side of the electrode 16 is charged, and the leading end of the film F adheres to the surface of the upper lamination roll 13 by Coulomb force. A dustproof cover 18 is provided so as to surround the upper lamination roll 13 and the electrode 16. For this reason, dust or the like does not adhere to the film F charged by the electrode 16.
Reference numerals 21 and 22 denote optical sensors attached to the transport path at appropriate intervals in order to detect the front end of the substrate K moving on the transport path constituted by a plurality of transport rollers 15. Reference numeral 23 denotes a control device for controlling the operation of the film sticking device, and a monitor 24 for displaying data such as a sticking length of the film F and a keyboard 25 for inputting data are attached.
The control device 23 includes a counter and a memory for measuring pulses from the encoder 14, a program for operation of each part constituting the film sticking device, particularly a program for controlling the rotation of the lamination roll 13, and optical sensors 21 and 22. A program for calculating the deformation state of the silicon rubber (elastic member) in the radial direction of the lamination roll 13 accompanying the detection of the front end of the substrate, and the rotation amount of the lamination roll 13 is adjusted based on the deformation state of the silicon rubber obtained by the program. Includes programs and programs that warn of silicon rubber replacement.
When the interval between the optical sensors 21 and 22 is, for example, the circumferential length of the lamination roll 13 in an unused state, the lamination roll 13 transports the substrate K while sandwiching the substrate K, and the tip of the substrate K is moved to each optical sensor 21. , 22 measures the number of pulses of the encoder 14 corresponding to the lamination roll rotation amount G detected by the counter 22 in the control device 23 and stores it in a memory (not shown) in the control device 23.
When the distance between the optical sensors 21 and 22 is different from the circumferential length of the lamination roll 13, the substrate K is transported by the lamination roll 13 in an unused state, and the optical sensors 21 and 22 are in front of the substrate K. The number of pulses of the encoder 14 corresponding to the lamination roll rotation amount G is detected by the counter in the control device 23 and stored in the memory in the control device 23.
Furthermore, when the lamination roll 13 sandwiches and presses (bonds) the substrate F from above and below, the silicon rubber is elastically deformed by the applied pressure, and the roll diameter of the lamination roll 13 changes, so the lamination roll 13 in an unused state. The number of pulses of the encoder 14 corresponding to the amount of rotation G of the lamination roll while the optical sensors 21 and 22 detect the leading edge of the substrate K is measured for each pressure, and stored in the memory in the control device 23.
In the following description, the number of pulses of the encoder 14 corresponding to the lamination roll rotation amount G corresponding to the interval between the optical sensors 21 and 22 is collectively referred to as the lamination roll rotation amount G.
[0019]
The length of the film F attached to the substrate K having an arbitrary length in the transport direction is determined in advance, and the length is represented by R.
[0020]
The relationship between the length R of the film F to be attached to the substrate K and the amount of rotation G of the lamination roll can be expressed by the following equation where the coefficient is a.
[0021]
R = a · G (1)
The coefficient a becomes a value changed by the pressing force of the lamination roll 13.
The substrate transport amount that the lamination roll 13 transports while sandwiching the substrate K is given by the control device 23 to the drive device of the lamination roll 13 by the rotation amount of the lamination roll 13. Monitoring with.
Next, operation | movement of a film sticking apparatus is demonstrated according to the flow shown in FIG.
First, a film sticking operation preparation in step (hereinafter abbreviated as “S”) 100 is performed.
As shown in FIG. 3, as preparation for performing the film sticking operation, the film F is manually pulled out from the film roll 1 and passed to the guide roll 3, and the cover film 2 is peeled off. The peeled cover film 2 is wound around the take-up roll 4. The film F from which the cover film 2 has been peeled is pulled out to the front end of the rear end holding member 6 and vacuum-adsorbed on the upper surfaces of the front end holding member 5 and the rear end holding member 6.
[0022]
At this time, the film roll 1 and the take-up roll 4 operate a motor (not shown) so that the tension of the film F becomes constant.
[0023]
The cutter 8 is moved in the width direction of the film F while allowing the cutter 8 to pass through the groove portion of the rear end holding member 6, and the film F is cut in the width direction. The vacuum suction of the rear end holding member 6 that has sucked the film F is stopped, and the piece of the film F on the rear end holding member 6 is discarded.
[0024]
At this time, the film is vacuum-adsorbed on the tip holding member 5 with the film protruding about 10 mm.
[0025]
This completes the film sticking operation preparation S100, and then proceeds to the film delivery process S200 of FIG.
[0026]
In the film delivery process S200, as shown in FIG. 4, the ball screw 10 is rotated by the servo motor 9, and the movable part 11 is moved to the lamination roll 13 side. Next, the connecting member 12 provided in the movable portion 11 is rotated to retract the rear end holding member 6 downward.
[0027]
At this time, the lamination roll 13 is open and is heated by the internal heater.
Then, the leading end holding member 5 is moved by the air cylinder 7 so that the leading end of the film F is positioned near the center of the upper surface of the upper lamination roll 13.
Here, a high voltage is applied from the static electricity generator 17 to the electrode 16, the tip portion of the film F that is between the electrode 16 and the lamination roll 13 and protrudes from the tip holding member 5 is charged, and the tip of the film F is charged. When the portion is adsorbed to the grounded lamination roll 13, the high voltage application from the static electricity generator 17 to the electrode 16 is stopped.
The lamination roll 13 starts to rotate in the direction of the transport path of the substrate K constituted by the transport rollers 15 and tries to transport the adsorbed film F downward. In this case, by releasing the vacuum suction of the film F by the tip holding member 5, the film F is conveyed downward along with the rotation of the lamination roll 13, and the cover is moved along the unwinding of the film F at the guide roll 3. The film 2 is peeled off.
Whether the leading edge of the film F has reached the center of the lower surface of the upper lamination roll 13 by the rotation of the lamination roll 13 is confirmed by the number of pulses from the encoder 14, and the lamination roll 13 stops rotating when it is confirmed. Next, the process proceeds to the film cut processing S300 in FIG.
As shown in FIG. 5, the tip holding member 5 that has transferred the film F to the lamination roll 13 is returned by the servo motor 9 to an arbitrary position according to the length of the resist film to be attached to the substrate K. Then, the retracted rear end holding member 6 returns to the transport position of the film F so as to be aligned with the front end holding member 5 by the rotation of the connecting member 12.
[0028]
The film F on the upper side of the front end holding member 5 and the rear end holding member 6 is held by vacuum suction, and the film F is cut in the width direction by the cutter 8. At this time, the length of the film F from the tip of the film F located at the center of the lower surface of the upper lamination roll 13 to the position cut by the cutter 8 is a length to be attached to the substrate K.
[0029]
When cutting in the width direction by the cutter 8 of the film F, the rotation of the lamination roll 13 is not stopped, and the cutter 8, the front end holding member 5 and the rear end holding member 6 are moved in synchronization with the conveyance of the film F, and the film May be cut by adsorbing and holding F.
Then, the film sticking process S400 of FIG. 2 is performed.
As shown in FIG. 5, the substrate K moves from the left to the right in FIG. In this case, the movement amount is detected by a sensor (not shown), and the movement is temporarily stopped when the film sticking start position of the leading end coincides with the leading edge of the film F located at the center of the lower surface of the upper lamination roll 13. It has become.
Here, the upper and lower lamination rolls 13 move up and down in the direction of the substrate K, the substrate K is sandwiched (nip) by both lamination rolls 13, and the leading end of the film F is thermocompression bonded to the substrate K. Thereafter, both lamination rolls 13 rotate while sandwiching (nip) the substrate K, and the film F on the upper lamination roll 13 is thermocompression bonded to the substrate K while the substrate K is conveyed in the right direction.
At this time, in synchronization with the rotation of the lamination roll 13, the rear end holding member 6 moves to the upper lamination roll 13 side so that the tension of the film F becomes constant.
When the optical sensor 21 for detecting the leading edge of the substrate F detects the leading edge of the substrate K moving along the conveyance path while the film F is stuck to the substrate K, the counter in the control device 23 measures the number of pulses from the encoder 14. Start.
When the film F is stuck on the substrate K, the substrate K moves in the right direction on the transport path, and when the optical sensor 22 for detecting the substrate tip on the downstream side detects the tip of the substrate K, a counter in the control device 23 is provided. Stops measuring the number of pulses from the encoder 14. Then, the control device 23 converts the number of pulses measured by the counter while the substrate K passes through the optical sensors 21 and 22 into the lamination roll rotation amount Nn and stores it in the memory in the control device 23.
[0030]
As for the rear end of the film F, as shown in FIG. 6, when the rear end holding member 6 reaches the vicinity of the upper lamination roll 13, a high voltage is again applied to the electrode 16 from the static electricity generator 17, and the film F The rear end is charged and adsorbed on the lamination roll.
[0031]
After all the film rear ends are transferred to the upper lamination roll 13, the vacuum suction of the rear end holding member 6 is released, and the connecting member 12 is rotated to retract downward. Then, the tip holding member 5 moves to the vicinity of the upper lamination roll 13 while holding the tip of the next film by vacuum suction, and waits for application to the next substrate K.
[0032]
When the rotation of both lamination rolls 13 progresses and the rear end of the film F is thermocompression bonded to the substrate K, the control unit 23 determines the cumulative number of pulses at the counter based on the measurement of the number of pulses from the encoder 14. Therefore, the lamination rolls 13 are moved up and down to open the film F, and the film sticking process S400 ends.
[0033]
The presence or absence of the next substrate K on the transport path is confirmed in S500 of FIG. 2, and if there is, the process returns to the film delivery process S200, and the above-described process is repeated.
[0034]
Next, measuring the deformation state of the silicon rubber (elastic member) in the radial direction of the lamination roll will be described.
[0035]
In the film pasting process S400, the number of pulses measured by the counter while the substrate K passes through the optical sensors 21 and 22 is converted into the lamination roll rotation amount Nn, and the lamination roll rotation amount Nn is stored in the memory in the control device 23. Is saved.
Since the number of lamination roll rotations Nn is stored in the memory in the controller 23 every time the substrate K passes, the number of pasting M times (M number of passing substrates) is set as one set, and lamination is performed up to M times. Roll rotation amount N1, N2, ... Nn ... N _M May be calculated as the lamination roll rotation amount L.
[0036]
The silicon rubber of the lamination roll 13 gradually loses its elasticity when it is repeatedly pressed (thermocompression bonding of the film), and the thickness decreases with time.
Then, the lamination roll 13 has a reduced roll diameter and a reduced circumferential length.
[0037]
If the rotation of the lamination roll 13 is designated by the number of pulses and the rotation angle per pulse is the same, the substrate transport distance per pulse decreases as the roll diameter decreases. Therefore, it takes time for the tip of the substrate K to pass between the optical sensors 21 and 22, that is, the rotation of the lamination roll 13 does not proceed with a larger number of pulses. The tip of K cannot pass.
[0038]
Therefore, as shown in FIG.
(Lamination roll rotation amount N1, N2, ... Nn ... N _M The average value L) gradually increases.
[0039]
When the rotation of the lamination roll 13 is specified by the number of pulses and the predetermined number of pulses is reached, it is assumed that the film sticking process to the substrate K is finished. There is a fear.
[0040]
Therefore, the control device 23 continues the film pasting process if the measured value L is within the allowable dent range, but warns the roll replacement when the measured value L exceeds the roll replacement warning level Ln.
[0041]
Even if the measured value L is equal to or lower than the roll replacement warning level Ln, the conveyance amount of the substrate K by the lamination roll 13 is relatively reduced if it is close, so the rotation amount of the lamination roll with respect to one substrate is corrected. Then, it is preferable that sufficient pasting is performed up to the rear end of the film F.
[0042]
A value obtained by converting the number of pulses measured by the counter while the substrate K passes through the optical sensors 21 and 22 at an arbitrary time into a lamination roll rotation amount is N. This lamination roll rotation amount N has a larger value than the lamination roll rotation amount G when the lamination roll 13 is not used. The product of the coefficient a in the equation (1) and the lamination roll rotation amount N is the film sticking length U of the substrate K. Since the lamination roll rotation amount N is an apparently large value, When the difference UR between the film sticking length R and the calculated film sticking length U of the substrate K is obtained, the difference UR is the amount by which the transport amount of the substrate K is reduced by decreasing the roll diameter. Therefore, when the number of pulses of the lamination roll rotation amount corresponding to the difference UR is increased as a command (adjustment of the rotation amount of the lamination roll), the lamination roll 13 securely moves the substrate K and the film F to the rear end of the film F. Clamp to complete thermocompression bonding. Therefore, the film affixed to the substrate K has no bubbles and no wrinkles.
[0043]
In addition, when the film F that has been rotated by adhering and rotating the upper lamination roll 13 to the conveying path side during the film delivery process is reduced, if the roll diameter of the lamination roll 13 is reduced, the rotation amount of the lamination roll 13 is reduced and the leading edge of the film F is moved. In this case as well, the correction (rotation of the lamination roll) is performed as described above for the rotation amount of the lamination roll 13 (in the embodiment shown in FIG. 1, the half rotation of the lamination roll 13). The amount of the film F can be adjusted) to obtain a reliable alignment between the leading edge of the film F and the sticking tip position of the substrate K.
The embodiment of FIG. 1 is a single-wafer type film sticking apparatus that cuts the film F with a cutter 8 in association with each substrate K, but the present invention is applied to a continuous film sticking apparatus that does not cut the film F. The form will be described below.
[0044]
FIG. 8 schematically shows a continuous film sticking apparatus according to another embodiment of the present invention, and the same or equivalent parts as shown in FIG.
[0045]
In this embodiment, the front end holding member 5, the rear end holding member 6, the cutter 8, the electrode 16, the static electricity generating device 17 and the like provided in the embodiment of FIG. 1 are not provided. Instead, the inter-substrate processing cutter 31 and the substrate are provided. A separating cutter 32 is provided.
[0046]
With respect to the length D2 of the region where the resist film of the substrates K1 and K2 that move while moving back and forth on the transport path constituted by the transport roll 15 is not attached, the film is processed by the inter-substrate processing cutter 31 having a pair of disk cutters in advance. The resist film of F is cut in the width direction, and the resist film between the pair of disk cutters is removed by a peeling means (not shown).
[0047]
The film F from which the resist film has been removed is continuous with the base film, and the resist film remaining on the base film is attached to the preceding substrate K1 by the lamination roll 13.
[0048]
After passing through the lamination roll 13, when the film pasting process is performed on the subsequent substrate K2, the base film connecting the preceding substrate K1 and the subsequent substrate K2 is cut in the width direction of the film F by the substrate separating cutter 32. The front and rear substrates K1, K2 are separated.
[0049]
The detection of the tip of the substrate by the optical sensors 21 and 22 and the measurement of the deformation state of the silicon rubber (elastic member) by the control device 23 are performed in the same manner as in the embodiment of FIG.
[0050]
As means for measuring the deformation state of the elastic member in the radial direction of the lamination roll, in addition to those described in the above embodiment, those shown in FIGS. 9 and 10 can be implemented.
[0051]
In FIG. 9, the light projector 41 and the light receiver 42 are divided on the upstream side and the downstream side in the conveyance path of the substrate K with both the lamination rolls 13 interposed therebetween, and are arranged so as to be vertically movable.
[0052]
That is, the light projector 41 and the light receiver 42 can be retracted from the transport path so as not to obstruct the transport of the substrate K as shown by the dotted line during the film pasting process on the substrate K, and the substrate K is not on the transport path. Occasionally, the projector 41 and the light receiver 42 are raised as indicated by solid lines, the lamination roll 13 is nipped, light is projected from the light projector 41 to the nip portion, and light leakage from the nip portion is captured by the light receiver 42.
[0053]
If the elastic member in the lamination roll 13 repeatedly presses the substrate at the same place, the department that repeated the substrate pressing shifts from elastic deformation to plastic deformation, and the thickness decreases, and the lamination roll 13 is partially rolled. The diameter changes.
[0054]
When the trace of the substrate pressurization becomes conspicuous on the elastic member due to the plastic deformation, the light projector 41 and the light receiver 42 are positioned in the conveyance path, the lamination roll 13 is nipped, and the light leakage from the nip portion is measured.
[0055]
When the amount of light leakage exceeds a predetermined level, a warning is given to replace the elastic member.
[0056]
In the embodiment of FIG. 10, a dielectric is used as the elastic member, and the detection coil 52 is provided on the ground line 51 of the heater in the upper lamination roll 13.
[0057]
When the film F is not on the lamination roll 13, a pulsed high voltage is applied from the static electricity generator 17 to the electrode 16, and the pulse current flowing through the ground line 51 in the lamination roll 13 is measured by the detection coil 52.
[0058]
When the elastic member in the lamination roll 13 is deteriorated and thinned, the capacitance of the elastic member changes and the value of the pulse current flowing through the ground line 51 changes. Therefore, the pulse current is detected by the detection coil 52 and insulated.
[0059]
When the fluctuation of the pulse current value exceeds a predetermined level, the control device 23 warns the replacement of the elastic member.
[0060]
9 can be applied to either the single wafer type of FIG. 1 or the continuous type of FIG. Since the thing of FIG. 10 requires an electrode, what is necessary is just to prepare an electrostatic generator and an electrode in the continuous type of FIG.
[0061]
【The invention's effect】
As described above, according to the present invention, the change in the roll diameter of the lamination roll can be measured, and even if the roll diameter of the lamination roll is changed, the film can be accurately attached to the substrate, so Generation of wrinkles can be prevented.
[0062]
[Brief description of the drawings]
FIG. 1 is a schematic sectional view showing a film sticking apparatus according to an embodiment of the present invention.
FIG. 2 is a flowchart illustrating an operation procedure in the film sticking apparatus of FIG.
FIG. 3 is a diagram for explaining film sticking operation preparation processing in the film sticking apparatus of FIG. 1;
4 is a diagram for explaining film delivery processing in the film sticking apparatus of FIG. 1; FIG.
FIG. 5 is a diagram for explaining a film cutting process in the film sticking apparatus of FIG. 1;
6 is a diagram for explaining a film sticking process in the film sticking apparatus of FIG. 1. FIG.
7 is a diagram for explaining a relationship between a roll diameter in a lamination roll and substrate conveyance in the film sticking apparatus in FIG. 1. FIG.
FIG. 8 is a schematic sectional view showing a film sticking apparatus according to another embodiment of the present invention.
FIG. 9 is a schematic sectional view showing a film sticking apparatus according to another embodiment of the present invention.
FIG. 10 is a schematic sectional view showing a film sticking apparatus according to another embodiment of the present invention.
[Explanation of symbols]
F ... Film
K ... Board
1 ... Film roll
2 ... Cover film
3 ... Guide roll
4 ... Winding roll
5 ... Tip holding member
6 ... Rear end holding member
7 ... Air cylinder
8 ... Cutter
9. Servo motor
10 ... Ball screw
11 ... Moving part
12 ... Connecting material
13 ... Lamination roll
15 ... Conveying roller
16 ... Electrode
17 ... Static generator
18 ... Dust cover
21, 22 ... Optical sensors
23 ... Control device
24 ... Monitor
25 ... Keyboard

Claims (4)

The film and the substrate are sandwiched by a lamination roll coated with an elastic member on the surface of the roll body, and the film and the substrate are pressed while the lamination roll is rotated to apply the film to the substrate by applying pressure. In the film sticking device,
Measurement means for measuring the deformation state of the elastic member in the radial direction of the lamination roll based on a change in the rotation amount of the lamination roll corresponding to conveyance of an arbitrary distance of the substrate by the lamination roll , and obtained by the measurement means And a means for adjusting the rotation amount of the lamination roll for conveying the substrate to the rear end of the film while adhering the film to the substrate by rotation based on the deformation state of the elastic member. apparatus. In the film sticking apparatus according to claim 1, the lamination roll holds the sticking tip of the film and conveys it to the sticking tip of the substrate, and further, the deformation state of the elastic member obtained by the measuring means And a means for adjusting the amount of rotation of the lamination roll that transports the film application tip to the substrate application tip.   The film sticking apparatus according to claim 1, wherein the elastic member is deformed in a radial direction of the lamination roll by projecting light onto the nip portion of the lamination roll instead of the measuring means and receiving light leakage from the nip portion. A film sticking apparatus using a measuring means for measuring the thickness.   The film sticking apparatus according to claim 1, wherein a dielectric is used as the elastic member, and a pulsed high voltage is applied to the lamination roll instead of the measuring means to detect a pulse current flowing through the lamination roll. A film sticking apparatus using a measuring means for measuring a deformation state of the elastic member in a radial direction of the lamination roll.

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