TWI743190B - Cutter - Google Patents

Abstract

For the highly concentrated electroformed cementitious grain layer, such a cutting object will be consumed severely, and the deformation of the cutting edge of the cutting tool can be suppressed and the cutting can be performed well.

The cutting blade (30) has a ring-shaped cutting edge portion (31) formed by an electroformed stone particle layer fixed by plating, and the cutting edge portion is formed by a highly concentrated stone particle layer The central electroformed cementite layer (32), and the outer electroformed cementite layer (33) formed by the concentration of the central electroformed cementite layer is lower than that of the central electroformed cementite layer, and are formed to be machinable for use. Inductor (I) of pressed powder material composed of iron-based metal magnetic particles and organic binder.

Description

Cutter

The present invention relates to a cutter for cutting plate objects.

In semiconductor device engineering, cutting tools suitable for the cutting of semiconductor wafers are used. Generally speaking, the cutting tool has a tendency to reduce consumption as the concentration of the stone layer becomes higher. As a cutting blade, a multilayer blade has been proposed in which a low-concentration electroformed layer in the center of the width direction and a high-concentration electroformed layer on both outer sides of the width direction are laminated (for example, refer to Patent Literature 1). The laminated tool described in Patent Document 1 wears the electroformed layer in the center with low concentration first, and the tool tip becomes a concave shape. This allows cutting chips generated during cutting to hide in the concave shape, and has the function of suppressing the generation of burrs, etc. .

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2002-331464 A

As mentioned above, the electroformed layer with low concentration is easy to be consumed. Therefore, in order to avoid blunt tip deformation, a method of forming the entire cutter with a highly concentrated electroformed layer is adopted. However, depending on the material to be cut, sometimes the electroformed layer with high concentration is more intensively consumed than the electroformed layer with low concentration. For example, when cutting an inductor (inductor) using a powder material composed of metal magnetic particles (iron balls) on an iron base and an organic binder, cutting with a high-concentration cutter will consume a lot of energy. , It will be different from the usual cutting consumption characteristics, and there is a problem of instability in cutting.

The present invention was developed in view of this point, and one of the objectives is to provide a cutting tool, which can severely consume the cutting object for the highly concentrated electroformed cement particle layer, and can suppress the deformation of the tool tip while cutting well.

One aspect of the cutting blade of the present invention is a cutting blade formed by an electroformed cementite layer for cutting a plate. The electroformed cementite layer is a ring-shaped cutting edge portion that coats the cementite The ring-shaped cutting edge is composed of the central electroformed cementite layer and the outer electroformed cementite layer formed on both sides of the central electroformed cementite layer. The outer electroformed cementite layer is formed by It is formed by a layer of iron particles whose concentration is lower than that of the central electroformed iron particles layer.

According to this structure, the concentration of the outer electroformed cementite layer is lower than that of the central electroformed cementite layer. Therefore, when the high-cutting concentration of the cementite layer consumes such a plate, the two outer sides of the cutting edge The outer electroformed cementite layer is more difficult to consume than the central electroformed cementite layer at the center of the cutting blade. Therefore, it is difficult By creating R shapes on both outer sides of the cutting blade, blunt deformation of the cutting blade can be suppressed. In addition, due to the poor concentration of the central electroformed cementite layer and the outer electroformed cementite layer, the integrated consumption of the central electroformed cementite layer and the outer electroformed cementite layer is suppressed, thereby making it difficult to round the cutting edge. Blunt deformation. In this way, it is possible to cut the plate-like object well while suppressing the deformation of the cutting edge portion of the cutting blade.

In one aspect of the cutting blade of the present invention, the plate is an inductor using a powder material composed of iron-based metal magnetic particles and an organic binder.

In one aspect of the cutting tool of the present invention, the outer electroformed cementite layer is formed with a concentration of 5 to 135, and the central electroformed cementite layer has a concentration that is 15 or more higher than that of the outer electroformed cementite layer. Degree to form.

In one aspect of the cutting blade of the present invention, the thickness of the outer electroformed cement particle layer is formed in a thickness of 10 μm to 1/3 of the thickness of the cutting edge portion.

According to the present invention, the outer electroformed cement grain layer is formed by an abrasive grain layer whose concentration is lower than that of the central electroformed cement grain layer. Therefore, the high concentration of cutting of the abrasive grain layer will consume such a plate material severely. , It is possible to cut well while suppressing the deformation of the nose.

Hereinafter, this embodiment will be described with reference to the drawings. Fig. 1 is an exploded perspective view of the cutting means of the embodiment. Fig. 2 is an explanatory diagram of a cutting blade of a comparative example. In addition, in FIG. 1, for convenience of description, the description of the wheel guard covering the outer circumference of the cutter is omitted. In addition, the cutting means is not limited to the structure shown in FIG. 1 as long as it has a structure to which the cutting blade of this embodiment can be assembled.

As shown in Fig. 1, the cutting device is provided with a cutting means 1 for cutting a plate on a chuck platform (not shown). The cutting means 1 is, for example, an air spindle, and supports the rotating spindle 12 in a floating state with respect to the spindle housing 11 via compressed air. The tip portion 13 of the rotating spindle 12 protrudes from the tip portion of the spindle housing 11, and the tip portion 13 of the rotating spindle 12 is provided with a tool holder 21. The tool holder 21 has a cylindrical sleeve portion 22 and an assembly portion 23 that expands from the peripheral surface of the sleeve portion 22 to the outside in the radial direction.

On the back side of the sleeve portion 22, a fitting hole (not shown) to be fitted to the pushing surface of the tip portion 13 of the rotating spindle 12 is formed. On the surface side of the sleeve portion 22, a circular recessed portion 24 is formed so as to be continuous with the fitting hole. A female thread 14 is formed on the tip end portion 13 of the rotating spindle 12, and the tip end portion 13 of the rotating spindle 12 is exposed from the circular recessed portion 24 in the state of being fitted into the fitting hole. In addition, the fixing screw 15 is inserted into the circular recess 24 of the sleeve portion 22, and the fixing screw 15 is locked to the female thread 14 of the rotating spindle 12 exposed from the side of the circular recess 24, whereby the tool holder 21 is fixed The tip portion 13 of the rotating spindle 12.　　[0016] In addition, the mounting portion 23 is formed with a mounting surface 25 on which the hubless cutter 30 is mounted. The cutting blade 30 is pressed toward the mounting surface 25 of the mounting portion 23 by the ring-shaped fixing plate 26 mounted on the tool holder frame 21. In this state, the tip side of the sleeve portion 22 protrudes from the opening 27 of the fixing plate 26, and the ring-shaped fixing nut 29 is locked to the male thread 28 formed on the outer peripheral surface of the tip side of the sleeve portion 22. In addition, the cutting blade 30 mounted on the rotating spindle 12 rotates at a high speed, and the plate-shaped object is cut by the cutting blade 30, whereby the plate-shaped object is divided into individual wafers.　　[0017] As shown in FIG. 2A, the cutting blade 40 of the comparative example is formed into a thin ring shape formed by cementing diamond particles with an electroforming bond. Generally speaking, when cutting plate objects such as semiconductor wafer W, if the concentration of the stone particles is low, the stone particles will be consumed severely. Therefore, a cutting blade 40 composed of a highly concentrated electroformed stone layer is used. . In addition, in the case of cutting the semiconductor wafer W on the dicing tape T, the dicing tape T is too thin to be able to cut deeply into the semiconductor wafer W with the cutter 40. Therefore, the tip of the cutting blade 40 is mainly used to cut the semiconductor wafer W.　　[0018] However, as shown in FIG. 2B, as a plate-like object to be cut, there is an inductor I using a powder material composed of iron-based metal magnetic particles (iron balls) and an organic binder. This inductor I was cut with the above-mentioned cutting blade 40. As a result, it was clearly a highly concentrated electroformed cementite layer, but the problem of severe consumption of the cutting blade 40 occurred. Here, the applicant investigated the relationship between the concentration of the inductor I and the electroformed cement particle layer, and found that the cutting consumption characteristics are contrary to those of the conventional semiconductor wafer W and other plate objects, that is, compared to the high concentration For high-degree electroformed cementitious layers, the consumption of low-concentration electroformed cementitious layers will be less. [0019] It is speculated that this is because if the concentration of the iron particles is too high, the binder will be reduced and the holding force of each iron particles will be weakened, and the mesh of the metal magnetic particles in the inductor 1 will be blocked. Increased and friction increased. In more detail, it is speculated that if the concentration of the cement particles is high, the retaining force of the cement particles caused by the binder is weak, and the friction force during cutting will increase. The condition where the cutter 40 is pulled out. In this way, depending on the type of plate, using a cutting blade with a low concentration of electroformed cementite layer will reduce the consumption of the cementite and make it difficult to create an R-shape at the cutting edge.　　[0020] Therefore, as shown in FIG. 2C, when cutting a plate-like material such as an inductor 1, it is considered to use a cutting blade 50 of a single-layer structure composed of a low-concentration electroformed grain layer. However, although the consumption of the cutting blade 50 is reduced due to the low concentration of the electroformed abrasive grain layer, the abrasive particles will gradually fall off the cutting blade 50 as the cutting continues. Then, an R shape starts to be formed on the corner side of the cutting blade 50, and the R shape gradually becomes larger, thereby causing the entire cutting edge to be rounded and deformed. If the inductor I is cut with a blunt tip, a skirt shape is formed on the divided wafer, and a stable product processing size cannot be maintained. [0021] In view of this, the cutting blade 30 of this embodiment (refer to FIG. 3) is formed such that the center of the width direction is made of a high concentration of stone particles layer, and the two outer sides of the width direction are made of low concentration. It is a multi-layered structure made up of layers of grains. Even if the inductor I is cut by the cutter 30, the outer stone layers of the cutter 30 in the width direction are difficult to consume. Even if the outer stone layer is consumed, the thickness of the outer stone layer is thin, so the R shape will not Get bigger. In this way, blunt deformation of the cutting edge is suppressed when cutting a plate-like material such as the inductor I, and a skirt shape is not formed on the side surface of the divided wafer, and a stable product processing size can be maintained.　　[0022] Hereinafter, referring to Fig. 3, the cutter of this embodiment will be described. Fig. 3 is a cross-sectional model diagram of the cutting blade of the embodiment. [0023] As shown in FIG. 3A, the cutting edge portion 31 of the cutting blade 30 is formed as a ring-shaped electroformed cementite layer formed by fixing the cementite particles by plating. Inductor I made of powder compact made of metallic magnetic particles and organic binder (refer to FIG. 3B). In addition, as the stone stone of the cutting blade 30, for example, diamond stone or CBN stone of 5 μm to 100 μm is used. The cutting edge portion 31 has a multilayer structure composed of a central electroformed cementite layer 32 in the center of the width direction and an outer electroformed cementite layer 33 on the left and right sides of the central electroformed cementite layer 32, each of which is electroformed on the outside Compared with the central electroformed cementite layer 32, the cementite layer 33 is formed by a cementite layer with a lower degree of concentration. Therefore, during the cutting of the inductor I, the outer electroformed cementite layer 33, which has a lower concentration than the central electroformed cementite layer 32, becomes difficult to consume. [0024] As shown in FIG. 3B, the higher the concentration of the inductor 1, the more the particles will fall off. Therefore, the highly concentrated central electroformed particle layer 32 will be consumed during the cutting of the inductor 1. On the other hand The consumption of the low-concentration outer electroformed cement particle layer 33 can be suppressed. At this time, the corner portion of the cutting blade portion 31 is formed by the outer electroformed cement particle layer 33, and therefore, the corner portion of the cutting blade portion 31 is prevented from being worn out and it is difficult to form an R shape. By repeatedly performing the cutting of the inductor I, the outer electroformed cement particle layer 33 is gradually consumed and begins to form an R shape at the corner of the cutting edge portion 31, but the R shape created by the outer electroformed cement particle layer 33 is not Will become too big. [0025] This is because the outer electroformed cementite layer 33 and the central electroformed cementite layer 32 have poor concentration of the cementites, and the consumption rate of the outside electroformed cementite layer 33 and the central electroformed cementite layer 32 is different. The reason is that they are different but not consumed together. The outer electroformed cementite layer 33 and the central electroformed cementite layer 32 are consumed individually, so even if the outer electroformed cementite layer 33 starts to form an R shape, the R shape is in the thin and wide outer electroformed cementite layer 33 Will also be suppressed. In this way, the laminated structure of the outer electroformed cementite layer 33 and the central electroformed cementite layer 32 creates a speed difference in the consumption rate, thereby suppressing the outer electroformed cementite layer 33 and the central electroformed cementite layer The integrality of 32 is consumed, and the cutting edge portion 31 becomes difficult to be bluntly deformed.　　[0026] In addition, the outer electroformed cement particle layer 33 may be formed so as to be less than or equal to the concentration level based on which the consumption will increase sharply during cutting of the plate. For example, in the case of cutting the inductor I, if the concentration of the electroformed cementite layer exceeds 135, the consumption will increase sharply. Therefore, the outer electroformed cementite layer 33 has a concentration of 5 or more, preferably a concentration of 45. Above, the concentration is 135 or less, preferably 90 or less. In addition, the central electroformed cement particle layer 32 is formed with a concentration higher than that of the outer electroformed cement particle layer 33 in order to avoid being consumed integrally with the outer electroformed cement particle layer 33 when the plate is cut. That's it. [0027] Specifically, if the concentration of the central electroformed cementite layer 32 is too close to the concentration of the outer electroformed cementite layer 33, it is no different from a single-layer knife. Even if it is a multi-layer knife, the cutting edge portion 31 is still Will be blunt and protruding. On the other hand, if the concentration of the central electroformed cement particle layer 32 is much higher than the concentration of the outer electroformed cement particle layer 33, the central electroformed cement particle layer 32 will be excessively consumed and the center of the cutting edge portion 31 will The depression is concave. Therefore, considering the consumption of the corner portion of the cutting blade portion 31 and the consumption of the center portion, the concentration of the central electroformed cement particle layer 32 is formed to the extent that the cutting blade portion 31 will always maintain a slightly flat shape and be consumed. It is higher than the concentration of the outer electroformed cement particle layer 33. [0028] For example, in the case of cutting the inductor 1, if the concentration difference is less than 15, even the multi-layer knife will still be sharply changed into an R shape, so the central electroformed cementite layer 32 is higher than the outer electroformed cementite layer 33 is also formed with a concentration of 15 or more, preferably a concentration of 60 or more. In addition, if the concentration difference exceeds 200, the central electroformed cementite layer 32 will be excessively consumed. Therefore, the concentration difference between the central electroformed cementite layer 32 and the outer electroformed cementite layer 33 is suppressed to 200 or less, preferably concentrated. The degree difference is 150 or less. In this way, the cutting blade 30 is made into a multi-layer structure with different concentration levels, thereby individually adjusting the consumption of the corner portion and the center portion. [0029] In addition, if the thickness of the outer electroformed cementite layer 33 is less than 10 μm, the function of the cementite layer will be lost. If the thickness of the outer electroformed cementite layer 33 exceeds 1/3 of the thickness of the cutting edge portion 31 , The corner R shape of the cutting edge portion 31 becomes too large. Therefore, the thickness of the outer electroformed cement particle layer 33 is formed to be 10 μm or more, preferably 15 μm or more, and the thickness is 1/3 or less of the thickness of the cutting edge portion 31, preferably 1/4 or less. By using the cutting blade 30 with such a multilayer structure, the cutting edge portion 31 is prevented from being rounded and deformed during the cutting of the inductor 1, and it is possible to continuously cut a large number of inductors I well.　　[0030] (Experimental example) 　　 The following describes an experimental example. In the experimental example, as a cutting tool, a diamond stone with an average particle size of 20μm, and the electroformed stone with a concentration of 5, 30, 45, 75, 90, 105, 135, 150 and a thickness of 300μm were prepared. For the layer knife, the amount of knife consumption when cutting the inductor with each cutting knife was measured. In the experiment, a dummy inductor with a length of 140 × a width of 140 × a thickness of 0.9 mm was prepared. For each cutter with different concentration, the spindle rotation speed was 20,000 rpm, the feed speed was 25 mm/sec, and the number of processing lines was 100. Cutting process. In this way, the result shown in Figure 4 is obtained.　　[0031] As shown in Fig. 4, cutting blades with a concentration of 5, 30, 45, 75, 90, 105, and 135 will consume more as the concentration increases, but no significant changes are seen. On the other hand, a cutting tool with a concentration of 150 has a sharp increase in consumption compared to a cutting tool with a concentration of 135 or less. In this way, it is found that when cutting inductors, the consumption of the cutting tool will be suppressed in the electroformed cementitious layer with a concentration of 135 or less, and the consumption of the cutter will be reduced in the electroformed cementitious layer with a concentration of more than 135. increasing. Therefore, for the multi-layer knife, it is preferable to form the two outer sides of electroformed cement particles with a concentration of 135 or less, which is relatively difficult to consume, and form the inner side by electroformed cement particles with a concentration of 150 or more that are relatively easy to consume.　　[0032] Next, using a single-layer knife and a multi-layer knife, the inductor was repeatedly cut, and the cross-sectional shape of the cutting edge was observed. As a single-layer knife, a single-layer knife composed of a layer of electroformed cement particles with high concentration (180 concentration) is used. As a multi-layer knife, a multi-layer knife formed by laminating a pair of outer electroformed cement particles with a low concentration (90 concentration) on both outer sides of a high concentration (concentration 150) central electroformed cement particle layer was used. The total thickness of the single-layer blade and the multi-layer blade are each set to 300 μm, and the thickness of the central electroformed cement particle layer of the multi-layer blade and the pair of outer electroformed cement particle layers are respectively formed to be 200 μm and 50 μm. [0033] As shown in FIG. 5, the single-layer knife has only a slight change in the cross-sectional shape of the cutting edge just after the dress is completed, but after the first inductor is cut, the cross-sectional shape of the cutting edge Obviously blunt. In this way, the single-layer knife only processes the first inductor to create R and become unusable. In addition, here is a high-concentration single-layer knife processing, if a low-concentration single-layer knife processing, the wear of the cutting edge can be suppressed. However, even with a low-concentration single-layer tool, due to repeated cutting, it is expected that it will be blunt and deformed at an early stage. [0034] On the other hand, the multi-layer knife has almost no change in the cross-sectional shape of the cutting edge immediately after the trimming is completed. After the first inductor is cut, the cross-sectional shape of the cutting edge is slightly changed. The cross-sectional shape of the blade has no more blunt changes. In this way, although the cutting edge of the multi-layer knife is slightly deformed, it is difficult to create an R-shape on the cutting edge, and it is possible to cut a plurality of (18 in this experiment) inductors stably and continuously. In addition, the concentration difference between the outer electroformed cementite layer and the central electroformed cementite layer is appropriately adjusted, so that the center of the cutting blade portion is not only deeply worn down but maintains a stable shape. [0035] As described above, according to the cutting blade 30 of the present embodiment, the concentration of the outer electroformed cementite layer 33 is lower than that of the central electroformed cementite layer 32, so the cementite layer with high cutting concentration will be consumed violently. In the case of such an inductor I, the outer electroformed cement particle layer 33 is more difficult to consume than the central electroformed cement particle layer 32. Therefore, it is difficult to form an R shape on both outer sides of the cutting blade portion 31, and blunt deformation of the cutting blade portion 31 is suppressed. In addition, due to the difference in the concentration of the central electroformed cementite layer 32 and the outer electroformed cementite layer 33, the integrated consumption of the central electroformed cementite layer 32 and the outer electroformed cementite layer 33 is suppressed, thereby cutting edges The part 31 is difficult to be bluntly deformed. In this way, it is possible to cut the inductor I satisfactorily while suppressing the deformation of the cutting edge portion of the cutting blade.　　[0036] In this embodiment, the plate-shaped object to be cut is an inductor as an example, but it is not limited to electronic components such as inductors. As long as the plate-like material to be cut is such a matter that the lower the concentration, the harder the stone-stone layer is consumed, and the higher the concentration, the more easily the stone-stone layer becomes consumed.　　[0037] In addition, in the present embodiment, a hubless type washer knife was described as an example of a cutting blade, but it is not limited to this configuration. The cutting knife may also be a hub-shaped knife that fixes the cutting edge to the hub base.　　[0038] In addition, in this embodiment, the cutting blade is formed with a three-layer structure of a central electroformed grain layer and a pair of outer electroformed grain layers, but it is not limited to this structure. The cutting blade may be formed in a multilayer structure including a central electroformed cementite layer and a pair of outer electroformed cementite layers. For example, it may be formed in a central electroformed cementite layer and a pair of outer electroformed cementite layers. There is also a 5-layer structure made of electroformed cementitious layers.　　[0039] In addition, although the present embodiment and modified examples have been described, as other embodiments of the present invention, the above-mentioned embodiments and modified examples may be combined in whole or in part.　　[0040] In addition, the embodiments of the present invention are not limited to the above-mentioned embodiments and modifications, and various changes, substitutions, and modifications can be made without departing from the scope of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in other ways due to technological advances or other derived technologies, this method can also be used to implement it. Therefore, the scope of the patent application includes all the implementation forms that may be included within the scope of the technical idea of the present invention. [0041] In addition, in this embodiment, it is described that the present invention is applied to the configuration of the cutting blade, but it can also be applied to the cutting object such that the highly concentrated electroformed cement grain layer will be consumed severely, and the deformation of the tip of the tool can be suppressed. At the same time, other tools that are processed well. [Industrial Applicability] 　　[0042] As described above, the present invention has the effect of suppressing the deformation of the tip of the cutting tool while cutting well, especially for the highly concentrated electroformed grain layer, which can be used for cutting objects. It is useful for cutting inductors that use powdered materials composed of iron-based metal magnetic particles and organic binders.

[0043] 30‧‧‧Cutter 31‧‧‧Cutting edge portion 32‧‧‧Central electroformed stone layer 33‧‧‧Outer electroformed stone layer I‧‧‧Inductor (plate)

[Fig. 1] An exploded perspective view of the cutting means of this embodiment.

[Fig. 2A~2C] The explanatory diagram of the cutting tool of the comparative example.

[Figures 3A~3B] Cross-sectional model diagrams of the cutting blade of this embodiment.

[Figure 4] Schematic diagram of the relationship between concentration and consumption.

[Fig. 5] A schematic view of the change in the cross-sectional shape of the cutting edge portion of the cutting blade.

31: Cutting edge

32: Central electroformed stone layer

33: Outer electroformed stone layer

I: Inductor (plate)

T: Cutting tape

Claims (3)

A cutting knife is a cutting knife formed by an electroformed cementitious layer used to cut a plate. The electroformed cementitious layer is formed by fixing the cementitious particles by plating with a ring-shaped cutting edge portion, wherein , The ring-shaped cutting edge portion is composed of a central electroformed cementite layer and an outer electroformed cementite layer formed on both sides of the central electroformed cementite layer. The outer electroformed cementite layer is formed by focusing A stone layer with a lower degree than the central electroformed stone layer is formed, and the outer electroformed stone layer and the central electroformed stone layer use common stone particles of 5 μm to 100 μm. The cutting tool described in item 1 of the scope of patent application, wherein the outer electroformed cementite layer is formed with a concentration of 5 to 135, and the central electroformed cementite layer is smaller than the outer electroformed cementite layer It is formed with a concentration of 15 or more. The cutting blade described in the first item of the scope of patent application, wherein the thickness of the outer electroformed cement particle layer is formed in a thickness of 10 μm to 1/3 of the thickness of the cutting edge portion.

Images