TWI741173B - Glass plate conveying device and glass plate manufacturing method - Google Patents
Glass plate conveying device and glass plate manufacturing method Download PDFInfo
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- TWI741173B TWI741173B TW107113435A TW107113435A TWI741173B TW I741173 B TWI741173 B TW I741173B TW 107113435 A TW107113435 A TW 107113435A TW 107113435 A TW107113435 A TW 107113435A TW I741173 B TWI741173 B TW I741173B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/10—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors movable, or having interchangeable or relatively movable parts; Devices for moving framework or parts thereof
- B65G21/14—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors movable, or having interchangeable or relatively movable parts; Devices for moving framework or parts thereof to allow adjustment of length or configuration of load-carrier or traction element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
- B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Framework For Endless Conveyors (AREA)
- Registering Or Overturning Sheets (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
玻璃板的搬運裝置1包括帶式輸送機2、引導用輥3及定位用輥4。帶式輸送機2以水平姿勢搬入玻璃板G並且以傾斜姿勢P2搬出玻璃板G。引導用輥3自帶式輸送機2接收玻璃板G並沿與搬運方向正交的方向引導所述玻璃板G。定位用輥4抵接於由引導用輥3引導的玻璃板G的端部,對玻璃板G進行定位。經定位的玻璃板G自引導用輥3移交至帶式輸送機2。The conveying device 1 of a glass plate includes a belt conveyor 2, a guide roller 3, and a positioning roller 4. The belt conveyor 2 carries in the glass plate G in a horizontal posture and carries out the glass plate G in an inclined posture P2. The guide roller 3 receives the glass sheet G from the belt conveyor 2 and guides the glass sheet G in a direction orthogonal to the conveying direction. The positioning roller 4 abuts on the end of the glass plate G guided by the guide roller 3, and positions the glass plate G. The positioned glass sheet G is transferred to the belt conveyor 2 from the guide roller 3.
Description
本發明是有關於一種玻璃板的搬運裝置以及玻璃板的製造方法。The invention relates to a glass plate conveying device and a glass plate manufacturing method.
玻璃板的製造步驟中有以水平姿勢搬運玻璃板的步驟及以傾斜姿勢搬運玻璃板的步驟。水平姿勢是玻璃板的主面為水平的姿勢,傾斜姿勢是使玻璃板的主面自水平傾斜的姿勢。若以傾斜姿勢搬運玻璃板,則可使附著於玻璃板上的處理液自玻璃板迅速掉落。In the manufacturing process of the glass plate, there are a step of conveying the glass plate in a horizontal posture and a step of conveying the glass plate in an inclined posture. The horizontal posture is a posture in which the main surface of the glass plate is horizontal, and the inclined posture is a posture in which the main surface of the glass plate is inclined from horizontal. If the glass plate is transported in an inclined posture, the treatment liquid adhering to the glass plate can be quickly dropped from the glass plate.
通常是以水平姿勢搬運玻璃板,因此於存在以傾斜姿勢進行搬運的步驟的情況下,需要於搬運的途中將玻璃板的姿勢於傾斜角度不同的水平姿勢與傾斜姿勢之間進行變更,為此提出了一種裝置(例如參照專利文獻1)。 [現有技術文獻] [專利文獻]The glass plate is usually carried in a horizontal position. Therefore, if there is a step of carrying the glass plate in an inclined position, it is necessary to change the position of the glass plate between the horizontal position and the inclined position with different inclination angles during the transportation. A device is proposed (for example, refer to Patent Document 1). [Prior Art Document] [Patent Document]
[專利文獻1]日本專利特開平9-226916號公報[Patent Document 1] Japanese Patent Laid-Open No. 9-226916
[發明所欲解決之課題] 然而,就穩定地對玻璃板進行處理的觀點而言,期望玻璃板於搬運時,與搬運方向正交的方向(以下,亦稱為「搬運路徑的寬度方向」)的位置一致。但是,將玻璃板的姿勢於水平姿勢與傾斜姿勢之間進行變更時,存在玻璃板的所述位置偏移的可能性,並存在所述位置因每枚玻璃板而不同的可能性。另外,此種問題並不限於於水平姿勢與傾斜姿勢之間對玻璃板的姿勢進行變更的情況,於傾斜角度不同的傾斜姿勢與傾斜姿勢之間對玻璃板的姿勢進行變更時亦有可能發生。[Problems to be Solved by the Invention] However, from the viewpoint of stably handling the glass plate, it is desirable that the glass plate is transported in a direction orthogonal to the transport direction (hereinafter, also referred to as "the width direction of the transport path" ) Are in the same position. However, when the posture of the glass plate is changed between the horizontal posture and the inclined posture, there is a possibility that the position of the glass plate is shifted, and there is a possibility that the position is different for each glass plate. In addition, this problem is not limited to the case where the posture of the glass plate is changed between the horizontal posture and the inclined posture. It may also occur when the posture of the glass plate is changed between the inclined posture and the inclined posture with different inclination angles. .
本發明鑒於所述情況,技術課題在於:於變更玻璃板的姿勢後,使玻璃板於搬運路徑的寬度方向上的位置一致。 [解決課題之手段]In view of the above-mentioned circumstances, the present invention has a technical problem to align the positions of the glass plates in the width direction of the conveyance path after changing the posture of the glass plates. [Means to solve the problem]
為了解決所述課題而首創的本發明的玻璃板的搬運裝置沿規定的搬運方向搬運玻璃板,所述玻璃板的搬運裝置包括:搬運部,具有沿所述搬運方向搬運所述玻璃板的搬運面,以第一姿勢搬入所述玻璃板,並且以相對於水平面的傾斜角度與所述第一姿勢不同的第二姿勢搬出所述玻璃板;引導部,具有引導面,所述引導面自所述搬運面接收所述玻璃板並沿與所述搬運方向正交的方向引導所述玻璃板;定位部,抵接於由所述引導面引導的所述玻璃板的端部,對所述玻璃板進行定位;搬運面角度變更部,變更所述搬運面的傾斜角度;以及位置變更部,為了將所述玻璃板自所述搬運面移交至所述引導面而相對地使所述引導面位於所述搬運面的上方,並且為了將經定位的所述玻璃板自所述引導面移交至所述搬運面而相對地使所述引導面位於所述搬運面的下方。The glass plate conveying device of the present invention pioneered to solve the problem conveys glass plates in a predetermined conveying direction, and the glass plate conveying device includes a conveying section having a conveying unit for conveying the glass plate in the conveying direction Surface, the glass plate is carried in in a first posture, and the glass plate is carried out in a second posture that is different from the first posture at an inclination angle with respect to the horizontal plane; The conveying surface receives the glass plate and guides the glass plate in a direction orthogonal to the conveying direction; a positioning portion abuts against the end of the glass plate guided by the guide surface, and opposes the glass Plate positioning; a conveying surface angle changing part to change the inclination angle of the conveying surface; and a position changing part to relatively position the guide surface in order to transfer the glass plate from the conveying surface to the guide surface Above the conveyance surface, and in order to transfer the positioned glass sheet from the guide surface to the conveyance surface, the guide surface is relatively positioned below the conveyance surface.
於所述構成中,引導部的引導面自搬運面接收玻璃板並沿與搬運方向正交的方向引導所述玻璃板。並且,定位部抵接於由引導面引導的玻璃板的端部,對玻璃板進行定位。所述引導部的引導面對玻璃板的引導方向於俯視時沿著(搬運部的)搬運路徑的寬度方向。因此,於將由引導部的引導面引導並由定位部定位的玻璃板移交至搬運部的搬運面時,玻璃板於搬運路徑的寬度方向上的位置由定位部決定。因此,搬運部將玻璃板以第二姿勢搬出時,玻璃板於搬運路徑的寬度方向上的位置一致。即,根據本發明的玻璃板的搬運裝置,能夠於變更玻璃板的姿勢後,使玻璃板於搬運路徑的寬度方向上的位置一致。除此之外,玻璃板於搬運面與引導面之間的移交藉由不使玻璃板沿搬運方向移動而變更搬運面與引導面於上下方向上的相對位置來進行。因此,可迅速地進行姿勢變更及定位,並且減小裝置的設置空間。In the said structure, the guide surface of a guide part receives a glass plate from a conveyance surface, and guides the said glass plate in the direction orthogonal to a conveyance direction. In addition, the positioning portion abuts on the end of the glass plate guided by the guide surface, and positions the glass plate. The guide direction of the guide surface of the guide part is along the width direction of the conveyance path (of the conveyance part) in a plan view of the guide direction of the glass plate. Therefore, when the glass sheet guided by the guide surface of the guide portion and positioned by the positioning portion is transferred to the conveying surface of the conveying portion, the position of the glass sheet in the width direction of the conveying path is determined by the positioning portion. Therefore, when the conveyance part unloads the glass plate in the second posture, the position of the glass plate in the width direction of the conveyance path coincides. That is, according to the conveyance apparatus of the glass plate of this invention, after changing the posture of a glass plate, the position of the width direction of a conveyance path of a glass plate can be matched. In addition, the transfer of the glass plate between the conveyance surface and the guide surface is performed by changing the relative position of the conveyance surface and the guide surface in the vertical direction without moving the glass plate in the conveyance direction. Therefore, posture changes and positioning can be performed quickly, and the installation space of the device can be reduced.
於所述構成中,亦可包括變更所述引導面的傾斜角度的引導面角度變更部,並且藉由變更所述引導面的傾斜角度,而將所述引導面所接收的所述玻璃板自所述第一姿勢變更為所述第二姿勢。In the above configuration, a guide surface angle changing section for changing the inclination angle of the guide surface may also be included, and by changing the inclination angle of the guide surface, the glass plate received by the guide surface is free from The first posture is changed to the second posture.
若為此種構成,則能夠於使引導面的傾斜角度變更的過程中將玻璃板引導至定位部。因此,可同時進行姿勢變更與定位,可進一步縮短玻璃板的姿勢變更及定位所需要的時間。With such a structure, the glass plate can be guided to the positioning part in the process of changing the inclination angle of the guide surface. Therefore, the posture change and positioning can be performed at the same time, and the time required for the posture change and positioning of the glass plate can be further shortened.
於所述構成中,亦可為:所述搬運面角度變更部與所述引導面角度變更部包括共用的角度變更部,所述共用的角度變更部藉由以共用的支撐體對所述搬運部及所述引導部進行支撐,並使所述支撐體傾斜而使所述搬運部及所述引導部傾斜。In the above configuration, it may be that the conveying surface angle changing portion and the guiding surface angle changing portion include a common angle changing portion, and the common angle changing portion is configured to support the conveyance by using a common support. The supporting body is tilted to tilt the conveying part and the guide part to support the guide part.
若為此種構成,則可將用以使搬運部與引導部傾斜的機構共用化,因此可降低製造成本。With such a configuration, the mechanism for tilting the conveying part and the guide part can be shared, and therefore the manufacturing cost can be reduced.
於所述構成中,亦可為:所述引導部包括多根自由輥(free roller)。In the above configuration, it may be that the guide portion includes a plurality of free rollers.
若為此種構成,則可藉由重力的作用來引導傾斜狀態的玻璃板並進行定位。因此,可抑制製造成本而製造引導部並且可降低裝置的運轉成本(running cost)。With this structure, the tilted glass plate can be guided and positioned by the action of gravity. Therefore, the guide portion can be manufactured while suppressing the manufacturing cost, and the running cost of the device can be reduced.
於所述構成中,亦可為:所述第一姿勢為水平姿勢,所述第二姿勢為傾斜姿勢。In the above configuration, the first posture may be a horizontal posture, and the second posture may be an inclined posture.
若為此種構成,則可迅速地進行於玻璃板的端面加工與清洗處理之間進行的玻璃板的姿勢變更及定位。With such a configuration, the posture change and positioning of the glass plate between the end face processing and the cleaning treatment of the glass plate can be quickly performed.
而且,為了解決所述課題而首創的本發明的玻璃板的製造方法包括沿規定的搬運方向搬運玻璃板的步驟,所述玻璃板的製造方法包括如下步驟:藉由具有沿所述搬運方向搬運所述玻璃板的搬運面的搬運部,以第一姿勢搬入所述玻璃板的步驟;藉由相對地使引導部的引導面位於所述搬運面的上方,而以所述引導面自所述搬運面接收所述玻璃板,並由所述引導面沿與所述搬運方向正交的方向引導所述玻璃板的步驟;使由所述引導面引導的所述玻璃板的端部抵接於定位部,對所述玻璃板進行定位的步驟;藉由相對地使所述引導部的引導面位於所述搬運面的下方,而將經定位的所述玻璃板自所述引導面移交至所述搬運面的步驟;以及藉由所述搬運部將移交至所述搬運面的所述玻璃板以相對於水平面的傾斜角度與所述第一姿勢不同的第二姿勢搬出的步驟。Furthermore, the manufacturing method of the glass plate of the present invention, which was pioneered in order to solve the problem, includes the step of conveying the glass plate in a predetermined conveying direction, and the manufacturing method of the glass plate includes the following steps: The conveying section of the conveying surface of the glass plate is a step of loading the glass plate in the first posture; by relatively positioning the guide surface of the guide section above the conveying surface, the guide surface is moved from the The step of receiving the glass plate on a conveying surface and guiding the glass plate by the guide surface in a direction orthogonal to the conveying direction; making the end of the glass plate guided by the guide surface abut against Positioning part, the step of positioning the glass plate; by relatively positioning the guiding surface of the guiding part below the conveying surface, the positioned glass plate is transferred from the guiding surface to the The step of the conveying surface; and the step of transporting the glass plate transferred to the conveying surface by the conveying part in a second posture that has an inclination angle with respect to a horizontal plane that is different from the first posture.
根據所述構成,可獲得與玻璃板的搬運裝置的第一構成實質上相同的作用及效果。 [發明的效果]According to the said structure, the action and effect substantially the same as the 1st structure of the conveyance apparatus of a glass plate can be acquired. [Effects of the invention]
如上所述,根據本發明,可於變更玻璃板的姿勢後使玻璃板於搬運路徑的寬度方向上的位置一致。As described above, according to the present invention, the position of the glass plate in the width direction of the conveyance path can be aligned after changing the posture of the glass plate.
以下,基於圖式對用以實施本發明的形態進行說明。Hereinafter, a mode for implementing the present invention will be described based on the drawings.
圖1是表示配設有本發明的實施形態的玻璃板的搬運裝置1的玻璃板的製造步驟的概略平面圖。搬運裝置1例如配設於端面加工用的搬運路徑R1與清洗處理用的搬運路徑R2之間。如白箭頭所示,玻璃板G按照端面加工用搬運路徑R1、搬運裝置1、清洗用搬運路徑R2的順序被搬運。玻璃板G為矩形狀的平板,以其長邊沿著搬運方向的狀態被搬運。Fig. 1 is a schematic plan view showing a manufacturing process of a glass plate provided with a glass
如圖2A所示,玻璃板G於端面加工用搬運路徑R1中以水平姿勢P1被搬運。另一方面,如圖2C所示,玻璃板G於清洗用搬運路徑R2中以傾斜姿勢P2被搬運。並且,如圖2B所示,玻璃板G的姿勢於搬運裝置1中,自端面加工用搬運路徑R1中的水平姿勢P1(第一姿勢)變更為清洗用搬運路徑R2中的傾斜姿勢P2(第二姿勢)。As shown in FIG. 2A, the glass plate G is conveyed in the horizontal posture P1 in the conveyance path R1 for end surface processing. On the other hand, as shown in FIG. 2C, the glass plate G is conveyed in the inclined posture P2 in the conveyance path R2 for cleaning. And, as shown in FIG. 2B, the posture of the glass plate G in the
端面加工用搬運路徑R1、搬運裝置1及清洗用搬運路徑R2中,玻璃板G的搬運方向沿著水平方向。搬運裝置1及清洗用搬運路徑R2中,傾斜姿勢P2的玻璃板G藉由圍繞與搬運方向平行的軸線旋轉而相對於水平面H傾斜。該傾斜角度α例如為4°~6°。另外,為了便於理解,圖示的記載中傾斜角度α稍大(以下的圖示亦相同)。另外,端面加工用搬運路徑R1及搬運裝置1中,水平姿勢P1的玻璃板G的傾斜角度α為0°。In the conveying path R1 for end surface processing, the
如圖3及圖4所示,搬運裝置1的主要構成部件為:作為搬運部的帶式輸送機2、作為引導部的引導用輥3、作為定位部的定位用輥4、作為支撐體的支撐台5及基礎部6。As shown in Figures 3 and 4, the main components of the
帶式輸送機2具有自下方對玻璃板G的主面進行支撐並且沿水平方向對玻璃板G進行搬運的搬運面Sc。帶式輸送機2將玻璃板G自端面加工用搬運路徑R1搬入至帶式輸送機2上。而且,帶式輸送機2將玻璃板G自帶式輸送機2上搬出至清洗用搬運路徑R2。帶式輸送機2的搬運方向沿著水平方向,於圖3中是自左向右的方向。帶式輸送機2於由帶式輸送機2所形成的玻璃板G的搬運路徑的寬度方向上隔開間隔而配置有多條。帶式輸送機2經由省略圖示的支撐機構而支撐於支撐台5上。The
另外,於以下的說明中,若無特別注釋,則搬運方向是指由帶式輸送機2搬運玻璃板G的方向,搬運路徑是指由帶式輸送機2所形成的玻璃板G的搬運路徑。In addition, in the following description, unless otherwise noted, the conveying direction refers to the direction in which the glass plate G is conveyed by the
引導用輥3具有自搬運面Sc接收玻璃板G並沿與搬運方向正交的方向引導所述玻璃板G的引導面Sg(參照圖7)。引導用輥3對玻璃板G的引導方向於圖3中為自下向上的方向。多個引導用輥3於搬運方向上隔開間隔而固定於旋轉支撐軸3a。多個旋轉支撐軸3a配置於多條帶式輸送機2之間。所有的旋轉支撐軸3a均沿搬運方向配置。各個旋轉支撐軸3a經由第1氣缸(cylinder)機構3b而支撐於支撐台5上。引導用輥3藉由旋轉支撐軸3a旋轉自由地安裝於第1氣缸機構3b,而作為自由輥發揮功能。The
引導用輥3藉由第1氣缸機構3b的伸縮動作,而能夠相對於支撐台5進行升降(沿與搬運面Sc垂直的方向移動)。於帶式輸送機2搬運玻璃板G時,於第1氣缸機構3b為短縮狀態下,引導用輥3下降至不接觸玻璃板G的退避位置。另一方面,於引導用輥3引導玻璃板G時,於第1氣缸機構3b為伸長狀態下,引導用輥3上升至引導用位置。此時,由引導用輥3托起的玻璃板G離開帶式輸送機2。於引導用輥3處於引導用位置時,引導面Sg處於搬運面Sc的上方位置。於引導用輥3處於退避位置時,引導面Sg處於搬運面Sc的下方位置。另外,帶式輸送機2不相對於支撐台5而進行升降。The
所有的第1氣缸機構3b的伸縮動作均同步,因此於引導用輥3上升時,或者下降時,由引導用輥3支撐著的玻璃板G保持著姿勢平行移動。The expansion and contraction operations of all the first
定位用輥4抵接於由引導用輥3的引導面Sg引導的玻璃板G的端部(端面),對玻璃板G的與搬運方向垂直的方向上的位置進行定位。定位用輥4沿搬運方向隔開間隔而配置有多個。安裝有多個定位用輥4的支撐框4a配置有多個,各個支撐框4a安裝有第2氣缸機構4b。定位用輥4旋轉自如地安裝於支撐框4a,作為自由輥而發揮功能。定位用輥4的旋轉軸與搬運面Sc垂直。支撐框4a經由第2氣缸機構4b而支撐於支撐台5上。The
定位用輥4藉由第2氣缸機構4b的伸縮動作而沿搬運路徑的寬度方向移動,從而於處於帶式輸送機2的附近的定位用位置與較定位用位置而更遠離帶式輸送機2的退避位置之間進行切換。所有的第2氣缸機構4b的伸縮動作均同步。定位用輥4於定位用位置抵接於玻璃板G的端部,對玻璃板G進行定位。多個定位用輥4沿搬運方向配置,因此,定位用位置的定位用輥4所抵接的玻璃板G的端部成為沿著搬運方向的配置。The
於引導用輥3引導玻璃板G時,第2氣缸機構4b為伸長狀態,定位用輥4處於定位用位置。於帶式輸送機2搬運定位前的玻璃板G時,於第2氣缸機構4b為短縮狀態下,定位用輥4處於退避位置。藉此,可防止於帶式輸送機2搬運定位前的玻璃板G時玻璃板G與定位用輥4產生干擾。另外,於帶式輸送機2搬運定位後的玻璃板G時,定位用輥4既可處於定位用位置亦可處於退避位置。When the
帶式輸送機2、引導用輥3及定位用輥4支撐於共用的支撐台5上。帶式輸送機2、引導用輥3及定位用輥4藉由支撐台5傾斜而傾斜。The
於支撐台5的下側設有用以對支撐台5進行支撐的支撐腿5a。於基礎部6上設有用以對支撐腿5a進行支撐的基礎支撐部6a。支撐腿5a藉由搖動軸5b而搖動自由地安裝於基礎支撐部6a。搖動軸5b與搬運面Sc平行。而且,於支撐台5與基礎部6之間,相對於雙方搖動自如地安裝有第3氣缸機構5c。第3氣缸機構5c相對於支撐台5及基礎部6進行搖動的軸線與搬運面Sc平行。A supporting
支撐台5藉由第3氣缸機構5c的伸縮動作而以搖動軸5b為中心進行搖動(轉動)。於第3氣缸機構5c為短縮狀態時,支撐台5不傾斜而為水平姿勢,由帶式輸送機2或引導用輥3支撐著的玻璃板G為水平姿勢P1。於第3氣缸機構5c為伸長狀態時,支撐台5為傾斜姿勢,由帶式輸送機2或引導用輥3支撐著的玻璃板G為傾斜姿勢P2。The
另外,第1氣缸機構3b是為了將玻璃板G自搬運面Sc移交至引導面Sg而相對地使引導面Sg位於搬運面Sc的上方,並且為了將經定位的玻璃板G自引導面Sg移交至搬運面Sc而相對地使引導面Sg位於搬運面Sc的下方的位置變更部。In addition, the first
而且,支撐台5、支撐腿5a、搖動軸5b、第3氣缸機構5c、基礎部6及基礎支撐部6a為變更搬運面Sc的傾斜角度的搬運面角度變更部及變更引導面Sg的傾斜角度的引導面角度變更部。即,搬運面角度變更部及引導面角度變更部包括共用的角度變更部(支撐台5、支撐腿5a、搖動軸5b、第3氣缸機構5c、基礎部6及基礎支撐部6a)。Furthermore, the
其次,對搬運裝置1的動作進行說明。Next, the operation of the conveying
最初,如圖4所示,支撐台5為水平姿勢(第3氣缸機構5c為短縮狀態),引導用輥3為退避位置(第1氣缸機構3b為短縮狀態),定位用輥4為退避位置(第2氣缸機構4b為短縮狀態)。Initially, as shown in Fig. 4, the
然後,如圖5所示,驅動帶式輸送機2,玻璃板G自端面加工用搬運路徑R1被搬入至帶式輸送機2上。之後,當玻璃板G被搬運至帶式輸送機2上的規定位置後,帶式輸送機2停止。於此狀態下,玻璃板G為水平姿勢P1。Then, as shown in FIG. 5, the
其次,如圖6所示,第1氣缸機構3b成為伸長狀態,引導用輥3上升而成為引導用位置。藉此,玻璃板G被引導用輥3托起(支撐)而離開帶式輸送機2。即,引導用輥3的引導面Sg自帶式輸送機2的搬運面Sc接收玻璃板G。於引導用輥3上升時及處於引導用位置時,玻璃板G保持水平姿勢P1。使第1氣缸機構3b伸長後,第2氣缸機構4b成為伸長狀態(參照圖6的實線箭頭),定位用輥4成為定位用位置。另外,亦可同時進行第1氣缸機構3b與第2氣缸機構4b的伸長。Next, as shown in FIG. 6, the
之後,如圖7所示,第3氣缸機構5c成為伸長狀態,支撐台5傾斜而成為傾斜姿勢。藉此,由引導用輥3支撐著的玻璃板G成為傾斜姿勢P2。即,藉由變更引導面Sg的傾斜角度而將引導面Sg所接收的玻璃板G自水平姿勢P1變更為傾斜姿勢P2。另外,定位用輥4配置於引導面Sg的傾斜下方側。After that, as shown in FIG. 7, the
於是,如圖8所示,玻璃板G藉由重力的作用而一面被引導用輥3引導一面沿搬運路徑的寬度方向於引導用輥3上移動。並且,玻璃板G的端部抵接於定位用輥4,玻璃板G停止。於此狀態下玻璃板G亦為傾斜姿勢P2。Then, as shown in FIG. 8, the glass plate G moves on the
其後,如圖9所示,第1氣缸機構3b成為短縮狀態,引導用輥3下降而成為退避位置。藉此,玻璃板G成為由帶式輸送機2支撐著的狀態。即,經定位的玻璃板G自引導用輥3的引導面Sg被移交至搬運面Sc。即便被移交至搬運面Sc,玻璃板G的端部亦抵接於定位用輥4,玻璃板G為經定位後的狀態。於此狀態下,玻璃板G為傾斜姿勢P2。Thereafter, as shown in FIG. 9, the
然後,如圖10所示,驅動帶式輸送機2,將玻璃板G自帶式輸送機2上搬出至清洗用搬運路徑R2。此時,玻璃板G的端部與定位用輥4滑動,但是因定位用輥4為自由輥,因此摩擦少,可抑制玻璃板G的端部受損。當結束將玻璃板G搬出至清洗用搬運路徑R2後,停止帶式輸送機2。Then, as shown in FIG. 10, the
之後,如圖11所示,第3氣缸機構5c成為短縮狀態,支撐台5恢復水平姿勢。同時,第2氣缸機構4b成為短縮狀態,定位用輥4進行移動而成為退避位置。從而,搬運裝置1的一連串動作結束,搬運裝置1成為最初的狀態。After that, as shown in FIG. 11, the
於如上所述般構成的搬運機構1中可享有以下效果。The following effects can be enjoyed in the
引導用輥3的引導面Sg自搬運面Sc接收玻璃板G並沿與搬運方向正交的方向引導所述玻璃板G。並且,定位用輥4抵接於由引導面Sg引導的玻璃板G的端部,對玻璃板G進行定位。所述定位用輥4的引導面Sg對玻璃板G的引導方向於俯視時沿著搬運路徑的寬度方向。因此,於將由引導用輥3的引導面Sg引導並由定位用輥4定位的玻璃板G移交至帶式輸送機2的搬運面Sc時,玻璃板G於搬運路徑的寬度方向上的位置由定位用輥4決定。因此,帶式輸送機2將玻璃板G以傾斜姿勢P2搬出時,玻璃板G於搬運路徑的寬度方向上的位置一致。即,根據本發明的玻璃板的搬運裝置1,能夠於將玻璃板G的姿勢於水平姿勢P1與傾斜姿勢P2之間進行變更後,使玻璃板G於搬運路徑的寬度方向上的位置一致。除此之外,玻璃板G於搬運面Sc與引導面Sg之間的移交藉由不使玻璃板G沿搬運方向移動而變更搬運面Sc與引導面Sg於上下方向上的相對位置來進行。因此,可迅速地進行姿勢變更及定位,並且減小裝置的設置空間。The guide surface Sg of the
本發明並不限定於所述實施形態,可於其技術思想範圍內進行各種變形。例如,於所述實施形態中,所有帶式輸送機2、所有引導用輥3及所有定位用輥4均由共用的支撐台5支撐,但亦可如圖12A所示,分配給多個支撐台5來支撐。此時,若於將玻璃板G自帶式輸送機2上搬出至清洗用搬運路徑R2的過程中,自對結束玻璃板G的搬運的帶式輸送機2進行支撐的支撐台5起依次使其恢復至水平姿勢,並自端面加工用搬運路徑R1向帶式輸送機2上搬入玻璃板G,則可提高玻璃板G的搬運效率。The present invention is not limited to the above-mentioned embodiment, and various modifications can be made within the scope of its technical idea. For example, in the above-mentioned embodiment, all the
而且,於所述實施形態中,作為搬運部而使用了帶式輸送機2,但並不限定於此,例如,亦可如圖12B所示使用輥式輸送機(roller conveyor)7。於圖示例中,輥式輸送機7於搬運路徑的寬度方向上長,並與引導用輥3由不同的支撐台5支撐。Moreover, in the said embodiment, although the
而且,於所述實施形態中,帶式輸送機2與引導用輥3由共用的支撐台5支撐,藉由支撐台5的傾斜而傾斜,但並不限定於此。例如,亦可如圖12C所示,引導用輥3經由第1氣缸機構3b而支撐於基礎部6上。此時,亦可如圖12C所示,藉由使第1氣缸機構3b的伸長狀態的長度不同而使引導用輥3傾斜。此時,亦可如圖12C所示,引導玻璃板G時的引導面Sg的傾斜角度與移交玻璃板G時的搬運面Sc的傾斜角度不同。In addition, in the above-mentioned embodiment, the
而且,於所述實施形態中,作為定位部而使用能夠移動的定位用輥4,但只要可承接由引導部引導的玻璃板G即可,既可如圖12C所示的定位部8般為不移動者,亦可不為輥。Furthermore, in the above-mentioned embodiment, the
而且,於所述實施形態中,於作為引導部的包含自由輥的引導用輥3傾斜的狀態下,藉由重力作用而將所接收的玻璃板G向傾斜下方引導,但亦可對輥設置驅動機構,於輥不傾斜的狀態下,藉由對輥的驅動而將玻璃板G以水平姿勢朝定位部引導。Moreover, in the above-mentioned embodiment, in the state where the
而且,於所述實施形態中,作為引導部而使用了包括自由輥的引導用輥3,但只要可於傾斜狀態下將所接收的玻璃板G向傾斜下方引導即可,因此,作為引導部,例如亦可使用氣浮(air float)台等。Furthermore, in the above-mentioned embodiment, the
而且,於所述實施形態中,於引導用輥3自帶式輸送機2接收玻璃板G後,支撐台5傾斜,但亦可於支撐台5傾斜後由引導用輥3自帶式輸送機2接收玻璃板G。Furthermore, in the above-mentioned embodiment, after the
而且,於所述實施形態中,於搬運裝置1中,自水平姿勢P1變更為傾斜姿勢P2,但亦可自傾斜姿勢P2變更為水平姿勢P1。彼時,較佳為配設有按壓部,所述按壓部於定位用輥4承接有玻璃板G的狀態下,將玻璃板G按壓至定位用輥4。藉由所述按壓部,可更切實地抑制將玻璃板G的姿勢變更為水平姿勢P1時玻璃板G向定位用輥4的相反側偏移。Furthermore, in the above-mentioned embodiment, in the conveying
而且,於所述實施形態中,於搬運裝置1中,自水平姿勢P1變更為傾斜姿勢P2,但可於搬運裝置1中,將玻璃板G的姿勢變更為與搬運方向正交的面內中相對於水平方向的角度不同的傾斜姿勢與傾斜姿勢。Furthermore, in the above-mentioned embodiment, in the conveying
而且,於所述實施形態中,玻璃板G的形狀為矩形狀的平板,但並不限定於此,例如既可為圓形狀的玻璃板亦可為彎曲的玻璃板。Moreover, in the said embodiment, the shape of the glass plate G is a rectangular flat plate, but it is not limited to this, For example, it may be a round glass plate or a curved glass plate.
1‧‧‧玻璃板的搬運裝置2‧‧‧帶式輸送機(搬運部)3‧‧‧引導用輥(引導部)3a‧‧‧旋轉支撐軸3b‧‧‧第1氣缸機構(位置變更部)4‧‧‧定位用輥(定位部)4a‧‧‧支撐框4b‧‧‧第2氣缸機構5‧‧‧支撐台(支撐體、搬運面角度變更部、引導面角度變更部)5a‧‧‧支撐腿(搬運面角度變更部、引導面角度變更部)5b‧‧‧搖動軸(搬運面角度變更部、引導面角度變更部)5c‧‧‧第3氣缸機構(搬運面角度變更部、引導面角度變更部)6‧‧‧基礎部(搬運面角度變更部、引導面角度變更部)6a‧‧‧基礎支撐部(搬運面角度變更部、引導面角度變更部)7‧‧‧輥式輸送機(搬運部)8‧‧‧定位部G‧‧‧玻璃板H‧‧‧水平面P1‧‧‧水平姿勢(第一姿勢)P2‧‧‧傾斜姿勢(第二姿勢)R1‧‧‧端面加工用搬運路徑(端面加工用的搬運路徑)R2‧‧‧清洗用搬運路徑(清洗處理用的搬運路徑)Sc‧‧‧搬運面Sg‧‧‧引導面α‧‧‧傾斜角度1‧‧‧Glass plate conveying device 2.‧‧‧Belt conveyor (conveying part) 3.‧‧‧Guide roller (guide part) 3a‧‧‧Rotating support shaft 3b‧‧‧First cylinder mechanism (position change Part) 4‧‧‧Positioning roller (positioning part) 4a‧‧‧Support frame 4b‧‧‧Second cylinder mechanism 5‧‧‧Support table (support body, conveying surface angle changing part, guide surface angle changing part) 5a ‧‧‧Support leg (conveyor surface angle changer, guide surface angle changer) 5b‧‧‧Swing shaft (conveyor surface angle changer, guide surface angle changer) 5c‧‧‧Cylinder mechanism (conveyor surface angle change) Section, guide surface angle change section) 6‧‧‧Basic section (transport surface angle change section, guide surface angle change section) 6a‧‧‧Basic support section (transport surface angle change section, guide surface angle change section) 7‧‧ ‧Roller conveyor (conveying part) 8.‧‧‧Positioning part G‧‧‧Glass plate H‧‧‧Horizontal plane P1‧‧‧Horizontal posture (first posture) P2‧‧‧Tilt posture (second posture) R1‧ ‧‧Conveyor path for end surface processing (conveyor path for end surface processing) R2‧‧‧Conveyor path for cleaning (conveyor path for cleaning) Sc‧‧‧Conveyance surface Sg‧‧‧Guide surface α‧‧‧Inclination angle
圖1是表示配設有本發明的實施形態的玻璃板的搬運裝置的玻璃板的製造步驟的概略平面圖。 圖2A是圖1的X-X線矢視剖面圖。 圖2B是圖1的Y-Y線矢視剖面圖。 圖2C是圖1的Z-Z線矢視剖面圖。 圖3是表示本發明的實施形態的玻璃板的搬運裝置的概略平面圖。 圖4是表示本發明的實施形態的玻璃板的搬運裝置的概略側面圖。 圖5是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖6是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖7是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖8是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖9是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖10是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖11是用以說明玻璃板的搬運裝置的動作的概略側面圖。 圖12A是表示玻璃板的搬運裝置的變形例的概略平面圖。 圖12B是表示玻璃板的搬運裝置的變形例的概略平面圖。 圖12C是表示玻璃板的搬運裝置的變形例的概略側面圖。Fig. 1 is a schematic plan view showing a manufacturing process of a glass plate provided with a glass plate conveying device according to an embodiment of the present invention. Fig. 2A is a sagittal cross-sectional view taken along the line X-X of Fig. 1. Fig. 2B is a sagittal cross-sectional view taken along the line Y-Y in Fig. 1. Fig. 2C is a sagittal cross-sectional view taken along the line Z-Z in Fig. 1. Fig. 3 is a schematic plan view showing a glass plate conveying device according to an embodiment of the present invention. Fig. 4 is a schematic side view showing the glass plate conveying device according to the embodiment of the present invention. It is a schematic side view for demonstrating the operation|movement of the conveyance apparatus of a glass plate. It is a schematic side view for demonstrating the operation|movement of the conveyance apparatus of a glass plate. It is a schematic side view for demonstrating the operation|movement of the conveyance apparatus of a glass plate. It is a schematic side view for demonstrating the operation|movement of the conveying apparatus of a glass plate. It is a schematic side view for demonstrating the operation|movement of the conveying apparatus of a glass plate. Fig. 10 is a schematic side view for explaining the operation of the glass plate conveying device. It is a schematic side view for demonstrating the operation|movement of the conveyance apparatus of a glass plate. Fig. 12A is a schematic plan view showing a modification of the glass plate conveying device. It is a schematic plan view which shows the modification of the conveyance apparatus of a glass plate. It is a schematic side view which shows the modification of the conveyance apparatus of a glass plate.
1‧‧‧玻璃板的搬運裝置 1‧‧‧Glass plate handling device
G‧‧‧玻璃板 G‧‧‧Glass plate
P1‧‧‧水平姿勢(第一姿勢) P1‧‧‧Horizontal posture (first posture)
P2‧‧‧傾斜姿勢(第二姿勢) P2‧‧‧Tilt posture (second posture)
R1‧‧‧端面加工用搬運路徑(端面加工用的搬運路徑) R1‧‧‧Conveyor path for end surface processing (Conveyor path for end surface processing)
R2‧‧‧清洗用搬運路徑(清洗處理用的搬運路徑) R2‧‧‧Cleaning conveying path (conveying path for cleaning processing)
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123016A (en) * | 1988-10-31 | 1990-05-10 | Onoda Autoclaved Light Weight Concrete Co Ltd | Positioning device for work to be carried |
TW200623231A (en) * | 2004-07-19 | 2006-07-01 | Samsung Electronics Co Ltd | Substrate treating apparatus and substrate treating method using the same |
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JP3597627B2 (en) | 1996-02-27 | 2004-12-08 | 大日本スクリーン製造株式会社 | Board posture changing device and board posture changing method |
JP4022288B2 (en) * | 1997-09-02 | 2007-12-12 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123016A (en) * | 1988-10-31 | 1990-05-10 | Onoda Autoclaved Light Weight Concrete Co Ltd | Positioning device for work to be carried |
TW200623231A (en) * | 2004-07-19 | 2006-07-01 | Samsung Electronics Co Ltd | Substrate treating apparatus and substrate treating method using the same |
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