TWI737291B - Vertical test device - Google Patents

Abstract

The present invention provides a vertical test device and a sheet-like probe thereof. The sheet-like probe includes a sheet-like body, a first contact portion, a stroke portion, and a second contact portion. The sheet-like body has a length in a longitudinal direction and a thickness in a thickness direction perpendicular to the longitudinal direction, and a ratio of the length to the thickness is within a range of 25 - 85. The first contact portion is formed by extending from a top edge of the sheet-like body, and the stroke portion is formed by curvedly extending from a bottom edge of the sheet-like body along a direction away from the sheet-like body. The stroke portion is configured to store an elastic force by being forced. The second contact portion is formed by extending from an end of the stroke portion away from the sheet-like body.

Description

Vertical test device

The invention relates to a probe head, in particular to a vertical testing device and a sheet-shaped probe.

The existing vertical testing device includes a plurality of guide plates and a plurality of conductive probes passing through the plurality of guide plates, and each of the conductive probes will be misaligned by two guide plate units located on the opposite side of the spacer plate. It is positioned and formed into a curved section to provide the required travel of the conductive probe during detection. Accordingly, the conductive probes in the existing vertical testing device are not easy to plant and maintain and replace, which makes it difficult to reduce production and maintenance costs.

Therefore, the inventor believes that the above-mentioned shortcomings can be improved, and with great concentration of research and the application of scientific principles, we finally propose an invention with reasonable design and effective improvement of the above-mentioned shortcomings.

The embodiment of the present invention provides a vertical test device and its sheet probe, which can effectively improve the defects that may be generated by the conductive probe of the existing vertical test device.

The embodiment of the present invention discloses a vertical test device, which comprises: a first guide plate unit and a second guide plate unit, which are arranged corresponding to each other; wherein, the first guide plate unit includes two first guide plates , And each of the two first guide plates is formed with a plurality of first elongated holes, and each of the first elongated holes is parallel to a length direction; wherein, the plurality of holes of any one of the first guide plates The first The elongated holes along a height direction perpendicular to the length direction respectively correspond to the plurality of first elongated holes of the other first guide plate; and a plurality of sheet probes, both ends of which respectively pass through The first guide plate unit and the second guide plate unit, and each of the sheet probes includes: a body, which penetrates two different first guide plates and corresponding to each other. The first elongated hole is clamped by the two first guide plates; wherein, the sheet body has a length in the length direction, and the sheet body is perpendicular to the length direction. The height direction has a thickness in a thickness direction, and a ratio of the length divided by the thickness is between 25 and 85; a first contact portion is formed by extending from the top edge of the sheet body, and The first contact portion is exposed outside the two first guide plates; a stroke portion is formed by bending and extending from the bottom edge of the sheet body in a direction away from the sheet body, and the stroke portion An extension distance in the length direction is not more than twice the length; wherein, the stroke portion is located between the first guide plate unit and the second guide plate unit, and the stroke portion can A resilient force is continued to be deformed by force; and a second contact portion is formed by extending from the end edge of the stroke portion away from the sheet body in the height direction, and the second contact portion passes through the first Two guide plate unit.

The embodiment of the present invention also discloses a sheet probe, which includes: a body having a length in a length direction, the sheet body having a thickness in a thickness direction perpendicular to the length direction, and the The ratio of the length divided by the thickness is between 25 and 85; a first contact portion is formed by extending from the top edge of the sheet body; a stroke portion is formed from the bottom edge of the sheet body away from the The sheet body is formed by bending and extending in the direction of the sheet body, and an extension distance of the stroke portion in the length direction is not more than twice the length; wherein the stroke portion can be deformed by force while continuing to have a resilient force; And a second contact portion, which is formed by extending from the end edge of the stroke portion away from the sheet body along the height direction.

In summary, the vertical test device and its sheet probe disclosed in the embodiments of the present invention are positioned on the first guide plate unit through the sheet body, and the stroke portion can be lifted without being misaligned. The stroke required for the sheet probe to detect the force is further facilitated by the vertical testing device for needle planting and maintenance replacement of the sheet probe, and production and maintenance costs are reduced.

In order to further understand the features and technical content of the present invention, please refer to the following detailed descriptions and drawings about the present invention, but these descriptions and drawings are only used to illustrate the present invention, and do not make any claims about the protection scope of the present invention. limit.

1000: Vertical test device

100: Probe head

1: The first guide plate unit

11: The first guide plate

111: The first elongated hole

112: Tenon

12: Raised board

2: The second guide plate unit

21: second piercing

3: Gasket

4: Spacer

5: sheet probe

51: film body

511: card slot

52: The first contact

53: second contact

54: Stroke Department

541: arc segment

200: adapter board

L: length direction

H: height direction

D: thickness direction

P: projection area

L51: Length

D51: Thickness

L54: Extended distance

FIG. 1 is a three-dimensional schematic diagram of a vertical testing device according to the first embodiment of the present invention.

FIG. 2 is a three-dimensional schematic diagram of the sheet probe according to the first embodiment of the present invention.

3 is a schematic cross-sectional view of a vertical testing device according to the first embodiment of the present invention.

FIG. 4 is a three-dimensional schematic diagram of another aspect of the sheet probe of FIG. 2.

FIG. 5 is a three-dimensional schematic diagram of another aspect of the sheet probe of FIG. 4.

6 is a schematic cross-sectional view of a vertical testing device according to the second embodiment of the present invention.

Fig. 7 is a schematic bottom view of the vertical testing device of Fig. 6.

FIG. 8 is a schematic diagram of the needle planting state of the vertical testing device of FIG. 6.

Fig. 9 is a three-dimensional schematic diagram of a vertical testing device according to the third embodiment of the present invention.

FIG. 10 is a three-dimensional schematic diagram of a vertical testing device according to the fourth embodiment of the present invention.

FIG. 11 is a schematic bottom view of the vertical testing device of FIG. 10.

The following is a specific embodiment to illustrate the implementation of the "vertical testing device and its sheet probe" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be based on different viewpoints and applications, without departing from Various modifications and changes are made under the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual dimensions, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

[Example 1]

Please refer to FIG. 1 to FIG. 5, which are the first embodiment of the present invention. The present embodiment discloses a vertical testing device 1000, which includes a probe head 100 and an adapter abutting on one side of the above-mentioned probe head 100 (for example, the top side of the probe head 100 in FIG. 1) Board 200 (space transformer), and the other side of the probe head 100 (the bottom side of the probe head 100 in FIG. 1) can be used to test a device under test (DUT) (not shown in the figure) Illustrated, such as: semiconductor wafer).

It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only present a partial structure of the vertical test device 1000, so as to clearly show the structure and connection relationship of each component of the vertical test device 1000, but The present invention is not limited to the drawings. The structure of each element of the probe head 100 and its connection relationship will be introduced below.

The probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1 and located between the first guide plate unit 1 and the second guide plate unit 1. A plurality of spacers 3 between the guide plate units 2, a spacer plate 4 clamped between the first guide plate unit 1 and the second guide plate unit 2 by the plurality of spacers 3, And the two ends respectively pass through the plurality of sheet probes 5 of the first guide plate unit 1 and the second guide plate unit 2.

It should be noted that the first guide plate unit 1 and the second guide plate unit 2 are arranged corresponding to each other in this embodiment, and the probe head 100 does not include the first guide plate unit 1 and Any guide plate unit other than the second guide plate unit 2. Furthermore, the sheet probe 5 in this embodiment is described as being matched with the above-mentioned elements (such as the first guide plate unit 1, the second guide plate unit 2), but the sheet probe 5 is also It can be combined with other components or applied separately (such as sales).

Wherein, the first guide plate unit 1 includes two first guide plates 11 and a raised plate 12 clamped between the two first guide plates 11. Each of the two first guide plates 11 is formed with a plurality of first elongated holes 111, and each of the first elongated holes 111 (the direction of the long axis) is parallel to a length direction L. Wherein, the plurality of first elongated holes 111 of any one of the first guide plates 11 along a height direction H perpendicular to the length direction L respectively correspond to the plurality of positions of the other first guide plate 11 The first elongated hole 111. In this embodiment, the shape of any one of the first elongated holes 111 is rectangular, but the present invention is not limited to this.

The pad 12 may have a ring structure and be clamped at the corresponding peripheral parts of the two first guide plates 11, so that the two first guide plates 11 can be arranged in parallel and spaced apart from each other. The invention is not limited to this. For example, in other embodiments not shown in the present invention, the two first guide plates 11 may protrude and abut each other at the corresponding peripheral portions thereof, so as to replace the above-mentioned bumper plate 12.

The second guide plate unit 2 in this embodiment is a single guide plate and is formed with a plurality of second perforations 21, and the positions of the plurality of second perforations 21 respectively correspond to the plurality of first elongated holes 111 (e.g., each of the second perforations 21 is located directly below the corresponding first elongated hole 111 in this embodiment, but the present invention is not limited to this), and each of the first The size of the elongated hole 111 is larger than the size of the corresponding second through hole 21. However, in other embodiments not shown in the present invention, the second guide plate unit 2 may also include a plurality of guide plates and a raised plate clamped between any two adjacent guide plates.

A plurality of the spacers 3 are respectively arranged on the surfaces of the first guide plate unit 1 and the second guide plate unit 2 adjacent to each other (such as: the bottom surface of the first guide plate 11 located below in FIG. 3, and The top surface of the second guide plate unit 2), and a plurality of the spacers 3 are respectively arranged on the corresponding peripheral parts of the first guide plate unit 1 and the second guide plate unit 2. Wherein, any one of the gaskets 3 can be adjusted according to user requirements, for example, the gasket 3 can be selectively removed.

Furthermore, the spacer plate 4 may have a ring structure and be clamped between the first guide plate unit 1 and the second guide plate unit 2 by a plurality of spacers 3 corresponding to the peripheral parts ( For example, the spacer plate 4 is equivalent to being arranged along the edge of the probe head 100), so that the first guide plate unit 1 and the second guide plate unit 2 can be spaced apart in parallel with each other, but this The invention is not limited to this. For example, in other embodiments not shown in the present invention, the first guide plate unit 1 and the second guide plate unit 2 may protrude and abut each other at their peripheral parts, so as to replace the aforementioned spacing. Board 4. Accordingly, the spacer plate 4 of the probe head 100 can also be omitted or replaced by other components. Since the relevance of the spacer 4 to the improvement focus of the present invention is low, the detailed structure of the spacer 4 will not be described in detail below.

One ends of the plurality of sheet probes 5 respectively pass through the plurality of first elongated holes 111 of the two first guide plates 11 of the first guide plate unit 1, and a plurality of the sheet probes The other end of the shaped probe 5 passes through the plurality of second perforations 21 of the second guide plate unit 2 respectively. Furthermore, a part of each of the sheet-shaped probes 5 (such as the stroke portion 54 described below) is located between the first guide plate unit 1 and the second guide plate unit 2. Wherein, the sheet-shaped probe 5 is a single-piece structure that is conductive and integrally formed in this embodiment, and the sheet-shaped probe 5 may be manufactured by micro-electromechanical system (MEMS) technology, but the present invention Not limited to this.

It should be additionally noted that, in FIG. 1 of this embodiment, a plurality of the sheet-shaped probes 5 are illustrated in a row along one side of the probe head 100, but they are not shown in this embodiment. In the position, a plurality of the sheet-shaped probes 5 may be arranged along at least two sides of the probe head 100 and along the The plurality of sheet probes 5 arranged on either side of the probe head 100 may also be arranged in at least two rows. In other words, the arrangement of the plurality of sheet probes 5 in the probe head 100 can be adjusted according to design requirements, and is not limited to this embodiment.

Since the structure of the multiple sheet probes 5 of the probe head 100 in this embodiment is substantially the same, the following description is based on a single sheet probe 5 as an example, but the present invention is not limited to this . For example, in other embodiments not shown in the present invention, the plurality of sheet probes 5 of the probe head 100 may also have different structures. Furthermore, in order to facilitate the understanding of the structure of the sheet probe 5, the sheet probe 5 when the probe head 100 is in the needle implant position will be introduced below.

The sheet probe 5 includes a body 51, a first contact portion 52 extending from the top edge of the sheet body 51, and a stroke portion 54 extending from the bottom edge of the sheet body 51. , And a second contact portion 53 extending from the end edge of the stroke portion 54. In detail, the sheet body 51 penetrates through the two corresponding first elongated holes 111, the second contact portion 53 penetrates through the corresponding second through hole 21, and the stroke portion 54 The sheet body 51 and the second contact portion 53 are connected, and the first contact portion 52 is exposed on the surface of the first guide plate unit 1. From another point of view, one end edge of the first contact portion 52 facing the first guide plate unit 1 (for example, the top edge of the first contact portion 52 in FIG. 3) in this embodiment sequentially extends to form The sheet body 51, the stroke portion 54, and the second contact portion 53.

Furthermore, the sheet body 51 penetrates through the two first elongated holes 111 that belong to different first guide plates 11 and correspond to each other, and is held by the two first guide plates 11. Clamp. In other words, the sheet body 51 is correspondingly disposed in the two first elongated holes 111 and fixed to the first guide plate unit 1. According to this, the two first guide plates 11 can generate a frictional force on the sheet body 51 by translating each other, so as to stably fix the sheet probe 5, and then bear the movement or movement on the probe head 100. When it is turned over, the sheet-shaped probe 5 is not easy to fall out.

Furthermore, the cross section of the sheet body 51 perpendicular to the height direction H is approximately rectangular. The sheet body 51 has a length L51 in the length direction L, and the sheet body 51 has a thickness D51 in a thickness direction D perpendicular to the length direction L and the height direction H, and so A ratio of the length L51 divided by the thickness D51 is between 25 and 85.

In this embodiment, the side surface of the first contact portion 52 perpendicular to the thickness direction D is substantially T-shaped (such as FIGS. 1 to 3) or L-shaped (such as FIGS. 4 and 5) And the first contact portion 52 is exposed outside the two first guide plates 11, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the first contact portion 52 may have a rectangular structure. In addition, the probe head 100 can also use multiple sheet probes 5 as shown in FIG. 4 and FIG. 5 under the configuration of multiple sheet probes 5 shown in FIG. The first contact portions 52 are far away from each other, so as to expand the distance between two adjacent first contact portions 52, thereby affecting the setting of the distance between the adapter board 200 and reducing the difficulty of board manufacturing.

That is, the first contact portion 52 is adjacent to one end of the sheet body 51, and the length of the first contact portion 52 in the longitudinal direction L is greater than the length L51 of the sheet body 51, according to So that the first contact portion 52 can be disposed on the top side of the first guide plate unit 1 (for example, above the first guide plate unit 1 in FIG. 3 ). In more detail, the first contact portion 52 stops on the surface of the first guide plate unit 1 away from the second guide plate unit 2, and the top end of the first contact portion 52 is fixed to the Adapter plate 200.

The stroke portion 54 is formed by bending and extending from the bottom edge of the sheet body 51 in a direction away from the sheet body 51. Wherein, the stroke portion 54 is located between the first guide plate unit 1 and the second guide plate unit 2. In other words, the stroke portion 54 is located in the space surrounded by the partition plate 4. Furthermore, the extension distance L54 of the stroke portion 54 in the longitudinal direction L is greater than the length L51. In this embodiment, the extension distance L54 of the stroke portion 54 in the length direction L is preferably not more than twice the length L51, but the present invention is not limited to this.

Wherein, the stroke portion 54 has an arc segment 541, and the circle of the stroke portion 54 The arc section 541 can be deformed by force and continue to have a resilient force, thereby providing the stroke required by the sheet probe 5 during operation. Wherein, the cross section of the arc segment 541 perpendicular to the height direction H is substantially rectangular, and the radius of curvature of the arc segment 541 may be in the direction from the sheet body 51 toward the second contact portion 53 Increasingly, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the arc segment 541 may have a non-arc structure (such as a wave shape).

The second contact portion 53 is formed by extending along the height direction H from the end edge of the stroke portion 54 far away from the sheet body 51 (for example, the bottom edge of the stroke portion 54 in FIG. 1), and is formed vertically. The cross section of the second contact portion 53 in the height direction H is substantially rectangular. The part of the second contact portion 53 corresponds to the inside of the second perforation 21, and the rest of the second contact portion 53 penetrates the second perforation 21 (that is, located in the second hole in FIG. 3). Below the guide plate unit 2). The second contact portion 53 is used to detachably abut the object under test.

It should be additionally noted that the first contact portion 52 and the second contact portion 53 of the sheet-shaped probe 5 are respectively formed according to its use, so the first contact portion 52 and the second contact portion 52 The contact portion 53 does not have the possibility of mutual replacement. For example, the first contact portions 52 of the plurality of sheet probes 5 in this embodiment are all fixed to the adapter plate 200, and the second contact portions 52 of the plurality of sheet probes 5 The contact portion 53 is used to detachably abut against the object to be measured, so the second contact portion 53 and the first contact portion 52 have different structures and do not have the motivation to replace each other.

Furthermore, when the sheet-shaped probes 5 are implanted into the opposite first elongated holes 111, each of the sheet-shaped probes 5 can be implanted at a height of less than 45 degrees with respect to the height direction H. The angles are sequentially inserted into the first guide plate unit 1 and the second guide plate unit 2. The sheet body 51 can be fixed to the corresponding first elongated hole 111, and the second contact portion 53 partially penetrates the second through hole 21 and is away from the second contact portion 52. One end of the contact portion 53 protrudes from the surface of the second guide plate unit 2.

In detail, the first contact portion 52, the stroke portion 54, and the second contact portion 53 of the sheet probe 5 are all located on the sheet body 51 along the length direction L and the Height square Within the space virtually extended to H, but the present invention is not limited to this.

When each of the second contact portions 53 abuts against the object to be measured, the arc section 541 of the stroke portion 54 provides elasticity, so that each of the second contact portions 53 does contact the object. The object to be tested, according to which the connection between the second contact portion 53 and the object to be tested can be more stable.

As described above, the sheet probe 5 of the vertical testing device 1000 can be positioned on the first guide plate unit 1 through the sheet body 51, and the stroke portion 54 does not need to be displaced. The stroke required by the sheet-shaped probe 5 to detect the force is provided, thereby providing a vertical testing device 1000 and the sheet-shaped probe 5 that are different from the conventional vertical testing device 1000. Furthermore, since the first guide plate unit 1 and the second guide plate unit 2 do not need to be positioned in a staggered arrangement to position the sheet probe 5, the length of the sheet probe 5 can be effectively shortened , To effectively improve the test performance results.

[Example 2]

Please refer to FIG. 6 to FIG. 8, which are the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities of the two embodiments will not be repeated. The difference in Example 1 is roughly explained as follows: In each of the sheet probes 5 in this embodiment, the stroke portion 54 is located in a projection area formed by the orthographic projection of the sheet body 51 along the height direction H P, so that each of the sheet-shaped probes 5 can be sequentially inserted into the first guide plate unit 1 and the second guide plate unit 2 along the height direction H.

In detail, the first contact portion 52, the stroke portion 54, and the second contact portion 53 of the sheet-shaped probe 5 are also located on the sheet body 51 along the length direction L and the second contact portion 53. Within the space virtually extended by the height direction H, but the present invention is not limited to this.

As described above, the sheet probe 5 of the vertical testing device 1000 may be located in the projection area P formed by the orthographic projection of the sheet body 51 along the height direction H according to the stroke portion 54 , So that each of the sheet-shaped probes 5 can be straight up and down along the height direction H, so that The sheet-shaped probe 5 helps to improve the efficiency of needle implantation or facilitates maintenance and replacement of the sheet-shaped probe 5.

[Example Three]

Please refer to FIG. 9, which is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiment one, the similarities between the two embodiments will not be repeated. The difference is roughly explained as follows: In this embodiment, in the first guide plate unit 1 in the two corresponding first elongated holes 111, one of the two first elongated holes 111 A tenon 112 (substantially rectangular in cross section) is formed in the first elongated hole 111, and the tenon 112 is not formed in the other first elongated hole 111. For example, in other embodiments not shown in the present invention, one of the tenons 112 can be formed in each of the two corresponding first elongated holes 111, but the present invention is not limited to this .

Each of the sheet main bodies 51 has two corresponding first elongated holes 111, and the sheet main body 51 is recessed and formed with a groove 511 on a surface perpendicular to the thickness direction D. Each of the locking grooves 511 is corresponding to the locking tenon 112, and the locking grooves 511 penetrate both sides of the sheet body 51. For example, in other embodiments not shown in the present invention, the slot 511 can also accommodate two tenons 112 at the same time, but the present invention is not limited to this.

Furthermore, the two first guide plates 11 are displaced from each other in the thickness direction D, so that each of the tenons 112 is inserted into the corresponding groove 511 of the sheet-shaped probe 5 , So that the sheet body 51 can be more stably fixed to the first guide plate unit 1.

As described above, the sheet-shaped probe 5 of the vertical testing device 1000 can penetrate the latching groove 511 corresponding to the latch 112 provided in the first elongated hole 111, so that The sheet probe 5 can be more stably fixed to the first guide plate unit 1 to prevent the sheet probe 5 from loosening from the first guide plate unit 1.

[Example Four]

Please refer to FIG. 10 and FIG. 11, which is the fourth embodiment of the present invention. The example is similar to the first embodiment above, so the similarities of the two embodiments will not be repeated. The difference between this embodiment and the above first embodiment is roughly explained as follows: In this embodiment, a plurality of the sheet-shaped probes 5 is inserted between the first guide plate unit 1 and the second guide plate unit 2, a plurality of the second contact portions 53 are arranged in a row along the thickness direction D, and a plurality of the sheet bodies 51 are alternately distributed on opposite sides of the second contact portion 53 in the row. Accordingly, the plurality of sheet-shaped probes 5 of the vertical testing device 1000 are distributed as described above, so that the first contact portion 52 can be matched with different adapter plates 200, thereby increasing the sheet-shaped probes. The scope of application of probe 5. Furthermore, the probe head 100 can effectively expand the distance between two adjacent first contact portions 52 through the arrangement of a plurality of the first contact portions 52 as shown in FIG. The spacing setting of the adapter plate 200 is described. For example, the probe head 100 as shown in FIG. 10 only needs to be further equipped with a circuit board, so as to improve the electrical quality and reduce the manufacturing cost.

[Technical Effects of Embodiments of the Invention]

In summary, the vertical test device and its sheet probe disclosed in the embodiment of the present invention are positioned on the first guide plate unit through the sheet body, and the stroke portion 54 can provide the sheet without being misaligned. The shaped probe 5 detects the stroke required by the force, thereby facilitating the vertical testing device to perform the needle planting, maintenance and replacement of the sheet-shaped probe, and reduce production and maintenance costs.

Furthermore, since the first guide plate unit and the second guide plate unit no longer need to be positioned in a staggered arrangement to position the sheet probes, the length of the sheet probes can be effectively shortened to effectively improve the test efficacy. In addition, each sheet probe can be straight up and down along the height direction, so that the sheet probe helps to improve the needle implantation efficiency or facilitate maintenance and replacement of the sheet probe.

In addition, the vertical test device disclosed in the embodiment of the present invention can correspond to the tenon provided in the first elongated hole on the first guide plate with the slot of the sheet probe, so that the sheet probe The needle is effectively fixed to the first guide plate unit, and is not easy to loosen from the first guide plate unit.

In addition, in the vertical testing device disclosed in the embodiment of the present invention, a plurality of chip bodies It can be staggeredly distributed on the opposite sides of the second contact part in the row, so that the first contact part can achieve the effect of cross arrangement, so that the first contact part can be matched with different adapter boards.

The content disclosed above is only the preferred and feasible embodiments of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. Inside.

5: sheet probe

51: film body

52: The first contact

53: second contact

54: Stroke Department

541: arc segment

L: length direction

H: height direction

D: thickness direction

L51: Length

D51: Thickness

Claims (9)

A vertical testing device, comprising: a first guide plate unit and a second guide plate unit, which are arranged corresponding to each other; wherein, the first guide plate unit includes two first guide plates, and two Each of the first guide plates is formed with a plurality of first elongated holes, and each of the first elongated holes is parallel to a length direction; wherein, a plurality of the first elongated holes of any one of the first guide plates A height direction perpendicular to the length direction of the holes respectively corresponds to the plurality of first elongated holes of the other first guide plate; and a plurality of sheet-shaped probes, both ends of which respectively pass through the first A guide plate unit and the second guide plate unit, and each of the sheet-shaped probes includes: a body, which penetrates the two first guide plates that belong to different first guide plates and correspond to each other. In a long hole and clamped by the two first guide plates; wherein, the sheet body has a length in the length direction, and the sheet body is perpendicular to the length direction and the height A thickness direction of the direction has a thickness, and a ratio of the length divided by the thickness is between 25 and 85; a first contact portion formed by extending from the top edge of the sheet body, and The first contact portion is exposed outside the two first guide plates; a stroke portion is formed by bending and extending from the bottom edge of the sheet body in a direction away from the sheet body, and the stroke portion is formed at the An extension distance in the length direction is not greater than twice the length; wherein, the stroke portion is located between the first guide plate unit and the second guide plate unit, and the stroke portion can receive force Deformed to continue to have a resilient force; and a second contact portion formed by extending from the end edge of the stroke portion away from the sheet body in the height direction, and the second contact portion passes through the second guide Board unit. The vertical testing device according to claim 1, wherein, in each of the sheet-shaped probes and the corresponding two of the first elongated holes, the sheet body is positioned perpendicular to the thickness direction. A card slot is concavely formed on the surface, and the first guide plate unit is formed with a tenon in at least one of the two corresponding first elongated holes; wherein, two of the first guide plates Displace each other in the thickness direction, so that each of the tenons is inserted into the corresponding groove of the sheet-shaped probe. The vertical testing device according to claim 1, wherein, in each of the sheet-shaped probes, and a ratio of the length divided by the thickness is between 5 and 7, and the first contact portion , The stroke portion and the second contact portion are all located in a space virtually extended by the sheet body along the length direction and the height direction. The vertical test device according to claim 1, wherein, in each of the sheet-shaped probes, the stroke portion has a circular arc section, and the radius of curvature of the circular arc section faces from the sheet body The direction of the second contact portion gradually increases, and the arc shape can be deformed under force to continue the resilience. The vertical test device according to claim 1, wherein the extension distance of the stroke portion of each of the sheet-shaped probes in the length direction is greater than the length, and each of the sheet-shaped probes The probe can be inserted into the first guide plate unit and the second guide plate unit in sequence at a needle implantation angle of less than 45 degrees with respect to the height direction; wherein, a plurality of the second contact portions are arranged along the The thickness direction is arranged in a row, and a plurality of the sheet bodies are staggeredly distributed on opposite sides of the second contact portion of the row. The vertical testing device according to claim 1, wherein, in each of the sheet-shaped probes, the stroke portion is located in a projection area formed by the orthographic projection of the sheet body along the height direction to Each of the sheet-shaped probes can be sequentially inserted into the first guide plate unit and the second guide plate unit along the height direction. The vertical test device according to claim 1, wherein, in each of the sheet-shaped probes, the first contact portion is T-shaped or L-shaped, and the first contact portion is blocked away from the The surface of the first guide plate unit of the second guide plate unit. The vertical test device according to claim 1, wherein the vertical test device further includes an adapter plate, and the first contact portion of each of the sheet-shaped probes is fixed to the adapter plate , And the second contact portion of each of the sheet-shaped probes is used to detachably abut an object to be tested. The vertical test device according to claim 1, wherein the vertical test device further includes: a plurality of spacers, which are respectively arranged on the first guide plate unit and the second guide plate unit adjacent to each other A spacer plate, clamped between the first guide plate unit and the second guide plate unit by a plurality of the spacers; and a cushion plate, clamped between the two first Between a guide plate; wherein any one of the gaskets can be selectively drawn away from the vertical testing device.

Images