TWI737291B - Vertical test device - Google Patents
Vertical test device Download PDFInfo
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- TWI737291B TWI737291B TW109115299A TW109115299A TWI737291B TW I737291 B TWI737291 B TW I737291B TW 109115299 A TW109115299 A TW 109115299A TW 109115299 A TW109115299 A TW 109115299A TW I737291 B TWI737291 B TW I737291B
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- sheet
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- plate unit
- contact portion
- sheet body
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
Description
本發明涉及一種探針頭,尤其涉及一種垂直式測試裝置及其片狀探針。 The invention relates to a probe head, in particular to a vertical testing device and a sheet-shaped probe.
現有的垂直式測試裝置包含多個導板及穿設於上述多個導板的多個導電探針,並且上述每個導電探針會受到位在間隔板相反側的兩個導板單元的錯位所定位、並形變成彎曲段,以提供所述導電探針偵測時所需的行程。據此,現有垂直式測試裝置中的導電探針並不易植針與維護更換,進而使得生產與維修成本難以降低。 The existing vertical testing device includes a plurality of guide plates and a plurality of conductive probes passing through the plurality of guide plates, and each of the conductive probes will be misaligned by two guide plate units located on the opposite side of the spacer plate. It is positioned and formed into a curved section to provide the required travel of the conductive probe during detection. Accordingly, the conductive probes in the existing vertical testing device are not easy to plant and maintain and replace, which makes it difficult to reduce production and maintenance costs.
於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。 Therefore, the inventor believes that the above-mentioned shortcomings can be improved, and with great concentration of research and the application of scientific principles, we finally propose an invention with reasonable design and effective improvement of the above-mentioned shortcomings.
本發明實施例在於提供一種垂直式測試裝置及其片狀探針,能有效地改善現有垂直式測試裝置的導電探針所可能產生的缺陷。 The embodiment of the present invention provides a vertical test device and its sheet probe, which can effectively improve the defects that may be generated by the conductive probe of the existing vertical test device.
本發明實施例公開一種垂直式測試裝置,其包括:一第一導板單元與一第二導板單元,其彼此對應設置;其中,所述第一導板單元包含有兩個第一導板,並且兩個所述第一導板各形成有多個第一長形孔,每個所述第一長形孔平行於一長度方向;其中,任一個所述第一導板的多個所述第一 長形孔沿垂直所述長度方向的一高度方向分別對應於另一個所述第一導板的多個所述第一長形孔;以及多個片狀探針,其兩端分別穿過所述第一導板單元與所述第二導板單元,並且每個所述片狀探針包含有:一片本體,其穿設於分屬不同所述第一導板且彼此對應的兩個所述第一長形孔內、並被兩個所述第一導板所夾持;其中,所述片本體在所述長度方向上具有一長度,所述片本體在垂直所述長度方向與所述高度方向的一厚度方向上具有一厚度,並且所述長度除以所述厚度的一比值介於25~85;一第一接觸部,其自所述片本體的頂緣延伸所形成,並且所述第一接觸部裸露於兩個所述第一導板之外;一行程部,自所述片本體的底緣朝遠離所述片本體的方向彎曲地延伸所形成,並且所述行程部在所述長度方向上的一延伸距離不大於所述長度的兩倍;其中,所述行程部位於所述第一導板單元與所述第二導板單元之間,並且所述行程部能夠受力變形而續有一回彈力;及一第二接觸部,自遠離所述片本體的所述行程部端緣沿所述高度方向延伸所形成,並且所述第二接觸部穿過所述第二導板單元。 The embodiment of the present invention discloses a vertical test device, which comprises: a first guide plate unit and a second guide plate unit, which are arranged corresponding to each other; wherein, the first guide plate unit includes two first guide plates , And each of the two first guide plates is formed with a plurality of first elongated holes, and each of the first elongated holes is parallel to a length direction; wherein, the plurality of holes of any one of the first guide plates The first The elongated holes along a height direction perpendicular to the length direction respectively correspond to the plurality of first elongated holes of the other first guide plate; and a plurality of sheet probes, both ends of which respectively pass through The first guide plate unit and the second guide plate unit, and each of the sheet probes includes: a body, which penetrates two different first guide plates and corresponding to each other. The first elongated hole is clamped by the two first guide plates; wherein, the sheet body has a length in the length direction, and the sheet body is perpendicular to the length direction. The height direction has a thickness in a thickness direction, and a ratio of the length divided by the thickness is between 25 and 85; a first contact portion is formed by extending from the top edge of the sheet body, and The first contact portion is exposed outside the two first guide plates; a stroke portion is formed by bending and extending from the bottom edge of the sheet body in a direction away from the sheet body, and the stroke portion An extension distance in the length direction is not more than twice the length; wherein, the stroke portion is located between the first guide plate unit and the second guide plate unit, and the stroke portion can A resilient force is continued to be deformed by force; and a second contact portion is formed by extending from the end edge of the stroke portion away from the sheet body in the height direction, and the second contact portion passes through the first Two guide plate unit.
本發明實施例也公開一種片狀探針,其包括:一片本體,其在一長度方向上具有一長度,所述片本體在垂直所述長度方向的一厚度方向上具有一厚度,並且所述長度除以所述厚度的一比值介於25~85;一第一接觸部,其自所述片本體的頂緣延伸所形成;一行程部,自所述片本體的底緣朝遠離所述片本體的方向彎曲地延伸所形成,並且所述行程部在所述長度方向上的一延伸距離不大於所述長度的兩倍;其中,所述行程部能夠受力變形而續有一回彈力;以及一第二接觸部,自遠離所述片本體的所述行程部端緣沿所述高度方向延伸所形成。 The embodiment of the present invention also discloses a sheet probe, which includes: a body having a length in a length direction, the sheet body having a thickness in a thickness direction perpendicular to the length direction, and the The ratio of the length divided by the thickness is between 25 and 85; a first contact portion is formed by extending from the top edge of the sheet body; a stroke portion is formed from the bottom edge of the sheet body away from the The sheet body is formed by bending and extending in the direction of the sheet body, and an extension distance of the stroke portion in the length direction is not more than twice the length; wherein the stroke portion can be deformed by force while continuing to have a resilient force; And a second contact portion, which is formed by extending from the end edge of the stroke portion away from the sheet body along the height direction.
綜上所述,本發明實施例所公開的垂直式測試裝置及其片狀探針,通過片本體來定位於第一導板單元,而所述行程部無需通過錯位即可提 供所述片狀探針偵測受力所需的行程,進而利於所述垂直式測試裝置進行所述片狀探針的植針與維護更換、並降低生產與維修成本。 In summary, the vertical test device and its sheet probe disclosed in the embodiments of the present invention are positioned on the first guide plate unit through the sheet body, and the stroke portion can be lifted without being misaligned. The stroke required for the sheet probe to detect the force is further facilitated by the vertical testing device for needle planting and maintenance replacement of the sheet probe, and production and maintenance costs are reduced.
為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。 In order to further understand the features and technical content of the present invention, please refer to the following detailed descriptions and drawings about the present invention, but these descriptions and drawings are only used to illustrate the present invention, and do not make any claims about the protection scope of the present invention. limit.
1000:垂直式測試裝置 1000: Vertical test device
100:探針頭 100: Probe head
1:第一導板單元 1: The first guide plate unit
11:第一導板 11: The first guide plate
111:第一長形孔 111: The first elongated hole
112:卡榫 112: Tenon
12:墊高板 12: Raised board
2:第二導板單元 2: The second guide plate unit
21:第二穿孔 21: second piercing
3:墊片 3: Gasket
4:間隔板 4: Spacer
5:片狀探針 5: sheet probe
51:片本體 51: film body
511:卡槽 511: card slot
52:第一接觸部 52: The first contact
53:第二接觸部 53: second contact
54:行程部 54: Stroke Department
541:圓弧段 541: arc segment
200:轉接板 200: adapter board
L:長度方向 L: length direction
H:高度方向 H: height direction
D:厚度方向 D: thickness direction
P:投影區域 P: projection area
L51:長度 L51: Length
D51:厚度 D51: Thickness
L54:延伸距離 L54: Extended distance
圖1為本發明實施例一的垂直式測試裝置的立體示意圖。 FIG. 1 is a three-dimensional schematic diagram of a vertical testing device according to the first embodiment of the present invention.
圖2為本發明實施例一的片狀探針的立體示意圖。 FIG. 2 is a three-dimensional schematic diagram of the sheet probe according to the first embodiment of the present invention.
圖3為本發明實施例一的垂直式測試裝置的剖視示意圖。 3 is a schematic cross-sectional view of a vertical testing device according to the first embodiment of the present invention.
圖4為圖2的片狀探針另一種態樣的立體示意圖。 FIG. 4 is a three-dimensional schematic diagram of another aspect of the sheet probe of FIG. 2.
圖5為圖4的片狀探針又一種態樣的立體示意圖。 FIG. 5 is a three-dimensional schematic diagram of another aspect of the sheet probe of FIG. 4.
圖6為本發明實施例二的垂直式測試裝置的剖視示意圖。 6 is a schematic cross-sectional view of a vertical testing device according to the second embodiment of the present invention.
圖7為圖6的垂直式測試裝置的底視示意圖。 Fig. 7 is a schematic bottom view of the vertical testing device of Fig. 6.
圖8為圖6的垂直式測試裝置的植針態樣示意圖。 FIG. 8 is a schematic diagram of the needle planting state of the vertical testing device of FIG. 6.
圖9為本發明實施例三的垂直式測試裝置的立體示意圖。 Fig. 9 is a three-dimensional schematic diagram of a vertical testing device according to the third embodiment of the present invention.
圖10為本發明實施例四的垂直式測試裝置的立體示意圖。 FIG. 10 is a three-dimensional schematic diagram of a vertical testing device according to the fourth embodiment of the present invention.
圖11為圖10的垂直式測試裝置的底視示意圖。 FIG. 11 is a schematic bottom view of the vertical testing device of FIG. 10.
以下是通過特定的具體實施例來說明本發明所公開有關“垂直式測試裝置及其片狀探針”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離 本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。 The following is a specific embodiment to illustrate the implementation of the "vertical testing device and its sheet probe" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be based on different viewpoints and applications, without departing from Various modifications and changes are made under the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual dimensions, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。 It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.
[實施例一] [Example 1]
請參閱圖1至圖5所示,其為本發明的實施例一。本實施例公開一種垂直式測試裝置1000,包括有一探針頭100以及抵接於上述探針頭100(probe head)一側(如:圖1中的探針頭100頂側)的一轉接板200(space transformer),並且所述探針頭100的另一側(圖1中的探針頭100底側)能用來頂抵測試一待測物(device under test,DUT)(圖未繪示,如:半導體晶圓)。
Please refer to FIG. 1 to FIG. 5, which are the first embodiment of the present invention. The present embodiment discloses a
需先說明的是,為了便於理解本實施例,所以圖式僅呈現所述垂直式測試裝置1000的局部構造,以便於清楚地呈現所述垂直式測試裝置1000的各個元件構造與連接關係,但本發明並不以圖式為限。以下將分別介紹所述探針頭100的各個元件構造及其連接關係。
It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only present a partial structure of the
所述探針頭100包含有一第一導板單元1、與所述第一導板單元1間隔地設置的一第二導板單元2、位於所述第一導板單元1與所述第二導板單元2之間的多個墊片3、通過多個所述墊片3而夾持於所述第一導板單元1與所述第二導板單元2之間的一間隔板4、及兩端分別穿過於所述第一導板單元1與所述第二導板單元2的多個片狀探針5。
The
需說明的是,所述第一導板單元1與所述第二導板單元2於本實施例中為彼此對應設置,並且所述探針頭100不包含所述第一導板單元1與所述第二導板單元2以外的任何導板單元。再者,所述片狀探針5於本實施例中是以搭配於上述元件(如:第一導板單元1、第二導板單元2)來說明,但所述片狀探針5也可以搭配其他構件或是單獨地應用(如:販賣)。
It should be noted that the first
其中,所述第一導板單元1包含有兩個第一導板11、及夾持於兩個所述第一導板11之間的一墊高板12。兩個所述第一導板11各形成有多個第一長形孔111,每個所述第一長形孔111(的長軸方向)平行於一長度方向L。其中,任一個所述第一導板11的多個所述第一長形孔111沿垂直所述長度方向L的一高度方向H分別對應於另一個所述第一導板11的多個所述第一長形孔111。於本實施例中,任一個所述第一長形孔111的形狀為矩形,但本發明不受限於此。
Wherein, the first
所述墊高板12可以是環形構造、並夾持於兩個所述第一導板11的相對應外圍部位,以使兩個所述第一導板11能夠彼此平行地間隔設置,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,兩個所述第一導板11可以在其相對應外圍部位呈凸出狀並互相抵接,據以取代上述墊高板12。
The
所述第二導板單元2於本實施例中為單個導板、並形成有多個第二穿孔21,多個所述第二穿孔21的位置分別對應於多個所述第一長形孔111(如:每個所述第二穿孔21於本實施例中是位於相對應所述第一長形孔111的正下方,但本發明不受限於此),並且每個所述第一長形孔111的尺寸大於相對應所述第二穿孔21的尺寸。然而,在本發明未繪示的其他實施例中,所述第二導板單元2也可以包含有多個導板及夾持於任兩個相鄰導板之間的一墊高板。
The second
多個所述墊片3分別設置於所述第一導板單元1與所述第二導板單元2彼此相鄰的表面(如:圖3中位於下方的第一導板11的底面、及第二導板單元2的頂面),並且多個所述墊片3分別設置於所述第一導板單元1及所述第二導板單元2的相對應外圍部位。其中,任一個所述墊片3可依據使用者需求而調整,例如:所述墊片3可以被選擇性地抽離。
A plurality of the
再者,所述間隔板4可以是環形構造、並通過多個所述墊片3相對應外圍部位而夾持於所述第一導板單元1與所述第二導板單元2之間(如:所述間隔板4相當於沿著所述探針頭100的邊緣設置),以使所述第一導板單元1與所述第二導板單元2能夠彼此平行地間隔設置,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,所述第一導板單元1及第二導板單元2可以在其外圍部位呈凸出狀並相互抵接,據以取代上述間隔板4。據此,所述探針頭100的所述間隔板4也可以省略或是其他構件取代。由於所述間隔板4與本發明的改良重點的相關性較低,所以下述不詳加說明所述間隔板4的細部構造。
Furthermore, the
多個所述片狀探針5的一端分別穿過於所述第一導板單元1的兩個所述第一導板11的多個所述第一長形孔111,並且多個所述片狀探針5的另一端分別穿過所述第二導板單元2的多個第二穿孔21。進一步地說,每個所述片狀探針5的局部(如:下述行程部54)位於所述第一導板單元1與所述第二導板單元2之間。其中,所述片狀探針5於本實施例中為可導電且一體成形的單件式構造,並且所述片狀探針5可以是由微機電系統(MEMS)技術所製造,但本發明不以此為限。
One ends of the plurality of
需額外說明的是,多個所述片狀探針5於本實施例的圖1中是以沿著所述探針頭100的一邊排成一列來說明,但在本實施例未繪出的部位中,多個所述片狀探針5可以是沿著所述探針頭100的至少兩邊排列,並且沿著所
述探針頭100任一邊排列的多個所述片狀探針5也可以是排成至少兩列。也就是說,多個所述片狀探針5在所述探針頭100中的排列方式可以依據設計需求而加以調整,不以本實施例為限。
It should be additionally noted that, in FIG. 1 of this embodiment, a plurality of the sheet-shaped
由於本實施例所述探針頭100的多個所述片狀探針5構造皆大致相同,所以下述說明是以單個所述片狀探針5為例,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,所述探針頭100的多個所述片狀探針5也可以是具有彼此相異的構造。再者,為便於理解所述片狀探針5構造,下述將以所述探針頭100處於植針位置時的所述片狀探針5進行介紹。
Since the structure of the
所述片狀探針5包含有一片本體51、自所述片本體51的頂緣延伸所形成的一第一接觸部52、自所述片本體51的底緣延伸所形成的一行程部54、及自所述行程部54端緣延伸所形成的一第二接觸部53。詳細地說,所述片本體51穿設於相對應的兩個所述第一長形孔111,所述第二接觸部53穿設於相對應所述第二穿孔21,所述行程部54連接所述片本體51與所述第二接觸部53,所述第一接觸部52裸露於所述第一導板單元1表面。換個角度來看,面向所述第一導板單元1的所述第一接觸部52的一端緣(如:圖3中的第一接觸部52頂緣)於本實施例中依序延伸形成有所述片本體51、所述行程部54、與所述第二接觸部53。
The
進一步地說,所述片本體51穿設於分屬不同所述第一導板11且彼此對應的兩個所述第一長形孔111內、並且被兩個所述第一導板11所夾持。也就是說,所述片本體51相對應設置於兩個所述第一長形孔111,且固定於所述第一導板單元1。據此,兩個所述第一導板11可以通過彼此平移而對所述片本體51產生摩擦力,以穩定地固定所述片狀探針5,進而在所述探針頭100承受移動或是翻轉時,使所述片狀探針5不易掉出。
Furthermore, the
再者,垂直所述高度方向H的所述片本體51的橫剖面大致呈矩
形,所述片本體51在所述長度方向L上具有一長度L51,所述片本體51在垂直所述長度方向L與所述高度方向H的一厚度方向D上具有一厚度D51,並且所述長度L51除以所述厚度D51的一比值是介於25~85。
Furthermore, the cross section of the
於本實施例中,在垂直於所述厚度方向D的所述第一接觸部52側表面大致呈T字形(如:圖1至圖3)或者呈L字形(如:圖4與圖5),並且所述第一接觸部52裸露於兩個所述第一導板11之外,但本發明不以此為限。舉例來說,在本發明未繪示的其他實施例中,所述第一接觸部52可以是矩形的構造。此外,所述探針頭100也可以在圖1所示的多個片狀探針5的配置方式之下,同時採用如圖4和圖5所示的多個片狀探針5,並使其第一接觸部52彼此遠離,據以擴大相鄰兩個所述第一接觸部52的間距,進而影響所述轉接板200的間距設定,並降低製板的難度。
In this embodiment, the side surface of the
也就是說,所述第一接觸部52鄰近於所述片本體51的一端,而所述第一接觸部52於所述長度方向L的長度大於所述片本體51的所述長度L51,據以使所述第一接觸部52能夠設置於所述第一導板單元1頂側(如:圖3中的第一導板單元1上方)。更詳細地說,所述第一接觸部52擋止於遠離所述第二導板單元2的所述第一導板單元1的表面,並且所述第一接觸部52的頂端固定於所述轉接板200。
That is, the
所述行程部54自所述片本體51的底緣朝遠離所述片本體51的方向彎曲地延伸所形成。其中,所述行程部54位於所述第一導板單元1與所述第二導板單元2之間。也就是說,所述行程部54位於所述間隔板4所圍繞的空間內。進一步地說,所述行程部54在所述長度方向L上的延伸距離L54大於所述長度L51。在本實施例中,所述行程部54在所述長度方向L上的所述延伸距離L54較佳為不大於所述長度L51的兩倍,但本發明不受限於此。
The
其中,所述行程部54具有一圓弧段541,並且所述行程部54的圓
弧段541能夠受力變形而續有一回彈力,進而提供所述片狀探針5運作時所需的行程。其中,垂直所述高度方向H的所述圓弧段541的橫剖面大致呈矩形,並且所述圓弧段541的曲率半徑自所述片本體51可以是朝向所述第二接觸部53的方向漸增,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,所述圓弧段541可以是非弧狀的構造(如:波浪狀)。
Wherein, the
所述第二接觸部53自遠離所述片本體51的所述行程部54端緣(如:圖1中的所述行程部54的底緣)沿所述高度方向H延伸所形成,垂直所述高度方向H的所述第二接觸部53的橫剖面大致呈矩形。所述第二接觸部53的部分相對應所述第二穿孔21內,而所述第二接觸部53的其餘部位則是穿出所述第二穿孔21(也就是,位於圖3中第二導板單元2的下方)。所述第二接觸部53用來可分離地頂抵於所述待測物。
The
需額外說明的是,所述片狀探針5的所述第一接觸部52與所述第二接觸部53是分別依據其用途而形成,所以所述第一接觸部52與所述第二接觸部53並不具有相互置換使用的可能性。舉例來說,本實施例的多個所述片狀探針5的所述第一接觸部52皆固定於所述轉接板200,而多個所述片狀探針5的所述第二接觸部53則是用來可分離抵接於待測物,所以上述第二接觸部53與所述第一接觸部52的構造不相同也不具備彼此置換的動機。
It should be additionally noted that the
再者,所述片狀探針5在植入相對的所述第一長形孔111時,每個所述片狀探針5能相對於所述高度方向H以小於45度的一植針角度依序插設於所述第一導板單元1與所述第二導板單元2。所述片本體51能夠固定於相對應的第一長形孔111,所述第二接觸部53部分穿設於所述第二穿孔21、且遠離所述第一接觸部52的所述第二接觸部53一端凸出所述第二導板單元2表面。
Furthermore, when the sheet-shaped
詳細地說,所述片狀探針5的所述第一接觸部52、所述行程部54、及所述第二接觸部53皆位於所述片本體51沿所述長度方向L與所述高度方
向H所虛擬延伸的空間之內,但本發明不受限於此。
In detail, the
當每個所述第二接觸部53頂抵於所述待測物時,透過所述行程部54的所述圓弧段541提供彈性,使得每個所述第二接觸部53確實接觸所述待測物,據以使得所述第二接觸部53與所述待測物的連接能夠更為穩定。
When each of the
依上所述,所述垂直式測試裝置1000的所述片狀探針5可以通過所述片本體51來定位於所述第一導板單元1,而所述行程部54無需通過錯位即可提供所述片狀探針5偵測受力所需的行程,,進而提供一種有別於以往的所述垂直式測試裝置1000及其所述片狀探針5。再者,由於所述第一導板單元1與所述第二導板單元2無須以錯位設置來定位所述片狀探針5,所以所述片狀探針5的長度能夠被有效地縮短,據以有效地提升測試效能結果。
As described above, the
[實施例二] [Example 2]
請參閱圖6至圖8所示,其為本發明的實施例二,由於本實施例類似於上述實施例一,所以兩個實施例的相同處不再加以贅述,而本實施例與上述實施例一的差異大致說明如下:於本實施例中的每個所述片狀探針5中,所述行程部54位於所述片本體51沿所述高度方向H正投影所形成的一投影區域P內,以使每個所述片狀探針5能沿所述高度方向H依序插設於所述第一導板單元1與所述第二導板單元2。
Please refer to FIG. 6 to FIG. 8, which are the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities of the two embodiments will not be repeated. The difference in Example 1 is roughly explained as follows: In each of the sheet probes 5 in this embodiment, the
詳細地說,所述片狀探針5的所述第一接觸部52、所述行程部54、及所述第二接觸部53也皆位於所述片本體51沿所述長度方向L與所述高度方向H所虛擬延伸的空間之內,但本發明不受限於此。
In detail, the
依上所述,所述垂直式測試裝置1000的所述片狀探針5可以依照所述行程部54位於所述片本體51沿所述高度方向H正投影所形成的所述投影區域P內,以使得每個所述片狀探針5能夠沿所述高度方向H直上直下,據以使
所述片狀探針5有助於提升植針效率或便於維護更換所述片狀探針5。
As described above, the
[實施例三] [Example Three]
請參閱圖9所示,其為本發明的實施例三,由於本實施例類似於上述實施例一,所以兩個實施例的相同處不再加以贅述,而本實施例與上述實施例一的差異大致說明如下:於本實施例中,在所述第一導板單元1在相對應的兩個所述第一長形孔111中,兩個所述第一長形孔111其中一個所述第一長形孔111內形成有一卡榫112(截面大致呈矩形),另一個所述第一長形孔111內未形成有所述卡榫112。舉例來說,在本發明未繪示的其他實施例中,在相對應的兩個所述第一長形孔111,各自能形成有一個所述卡榫112,但本發明不受限於此。
Please refer to FIG. 9, which is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiment one, the similarities between the two embodiments will not be repeated. The difference is roughly explained as follows: In this embodiment, in the first
每個所述片本體51於相對應的兩個所述第一長形孔111中,所述片本體51在垂直所述厚度方向D的一表面上凹設形成有一卡槽511。每個所述卡槽511相對應於所述卡榫112設置,且所述卡槽511貫穿所述片本體51兩側。舉例來說,在本發明未繪示的其他實施例中,所述卡槽511也可以同時容置兩個所述卡榫112,但本發明不受限於此。
Each of the sheet
再者,兩個所述第一導板11於所述厚度方向D上彼此位移,以使每個所述卡榫112插設於相對應的所述片狀探針5的所述卡槽511,以使所述片本體51能夠更為穩定固定於所述第一導板單元1。
Furthermore, the two
依上所述,所述垂直式測試裝置1000的所述片狀探針5能夠透過所述卡槽511相對應設置於所述第一長形孔111中的所述卡榫112,據以使得所述片狀探針5更能穩定固定於所述第一導板單元1,避免所述片狀探針5自所述第一導板單元1鬆脫。
As described above, the sheet-shaped
[實施例四] [Example Four]
請參閱圖10與圖11所示,其為本發明的實施例四,由於本實施
例類似於上述實施例一,所以兩個實施例的相同處不再加以贅述,而本實施例與上述實施例一的差異大致說明如下:於本實施例中,多個所述片狀探針5穿設於所述第一導板單元1與所述第二導板單元2之間,多個所述第二接觸部53沿所述厚度方向D排成一列,而多個所述片本體51則交錯地分布於該列所述第二接觸部53的相反兩側。據此,所述垂直式測試裝置1000的多個所述片狀探針5藉由上述分布,據以使所述第一接觸部52能夠配合不同的轉接板200,進而增加所述片狀探針5的適用範圍。再者,所述探針頭100通過如圖10中的多個所述第一接觸部52的配置,而能有效地擴大相鄰兩個所述第一接觸部52的間距,據以影響所述轉接板200的間距設定。舉例來說,如圖10所示的所述探針頭100僅需進一步搭配電路板,以利於提升電性品質與降低製造成本。
Please refer to FIG. 10 and FIG. 11, which is the fourth embodiment of the present invention.
The example is similar to the first embodiment above, so the similarities of the two embodiments will not be repeated. The difference between this embodiment and the above first embodiment is roughly explained as follows: In this embodiment, a plurality of the sheet-shaped
[本發明實施例的技術效果] [Technical Effects of Embodiments of the Invention]
綜上所述,本發明實施例所公開的垂直式測試裝置及其片狀探針,通過片本體來定位於第一導板單元,而所述行程部54無需通過錯位即可提供所述片狀探針5偵測受力所需的行程,進而利於所述垂直式測試裝置進行所述片狀探針的植針與維護更換、並降低生產與維修成本。
In summary, the vertical test device and its sheet probe disclosed in the embodiment of the present invention are positioned on the first guide plate unit through the sheet body, and the
再者,由於所述第一導板單元與第二導板單元不再需要以錯位設置來定位所述片狀探針,所以片狀探針的長度能夠被有效地縮短,以有效地提升測試效能。另,每個片狀探針能夠沿高度方向直上直下,據以使片狀探針有助於提升植針效率或便於維護更換片狀探針。 Furthermore, since the first guide plate unit and the second guide plate unit no longer need to be positioned in a staggered arrangement to position the sheet probes, the length of the sheet probes can be effectively shortened to effectively improve the test efficacy. In addition, each sheet probe can be straight up and down along the height direction, so that the sheet probe helps to improve the needle implantation efficiency or facilitate maintenance and replacement of the sheet probe.
另,本發明實施例所公開的垂直式測試裝置,能夠以片狀探針的卡槽相對應設置於第一導板單元上的第一長形孔中的卡榫,據以使得片狀探針有效地固定於第一導板單元,且不易自第一導板單元鬆脫。 In addition, the vertical test device disclosed in the embodiment of the present invention can correspond to the tenon provided in the first elongated hole on the first guide plate with the slot of the sheet probe, so that the sheet probe The needle is effectively fixed to the first guide plate unit, and is not easy to loosen from the first guide plate unit.
此外,本發明實施例所公開的垂直式測試裝置中,多個片本體 可以交錯地分布於該列第二接觸部的相反兩側,以使第一接觸部能夠達到交叉設置效果,進而令第一接觸部能夠配合於不同的轉接板。 In addition, in the vertical testing device disclosed in the embodiment of the present invention, a plurality of chip bodies It can be staggeredly distributed on the opposite sides of the second contact part in the row, so that the first contact part can achieve the effect of cross arrangement, so that the first contact part can be matched with different adapter boards.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。 The content disclosed above is only the preferred and feasible embodiments of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. Inside.
5:片狀探針 5: sheet probe
51:片本體 51: film body
52:第一接觸部 52: The first contact
53:第二接觸部 53: second contact
54:行程部 54: Stroke Department
541:圓弧段 541: arc segment
L:長度方向 L: length direction
H:高度方向 H: height direction
D:厚度方向 D: thickness direction
L51:長度 L51: Length
D51:厚度 D51: Thickness
Claims (9)
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TW109115299A TWI737291B (en) | 2020-05-08 | 2020-05-08 | Vertical test device |
JP2020129095A JP7001773B2 (en) | 2020-05-08 | 2020-07-30 | Vertical test equipment and its sheet probe |
KR1020200104054A KR102387109B1 (en) | 2020-05-08 | 2020-08-19 | Vertical test device |
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Also Published As
Publication number | Publication date |
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TW202142871A (en) | 2021-11-16 |
KR102387109B1 (en) | 2022-04-14 |
KR20210137364A (en) | 2021-11-17 |
JP2021177160A (en) | 2021-11-11 |
JP7001773B2 (en) | 2022-02-10 |
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