TWM483427U - Vertical type probe device and supporting pillars used in the vertical type probe device - Google Patents

Vertical type probe device and supporting pillars used in the vertical type probe device Download PDF

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Publication number
TWM483427U
TWM483427U TW103205117U TW103205117U TWM483427U TW M483427 U TWM483427 U TW M483427U TW 103205117 U TW103205117 U TW 103205117U TW 103205117 U TW103205117 U TW 103205117U TW M483427 U TWM483427 U TW M483427U
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Taiwan
Prior art keywords
stop surface
longitudinal direction
positioning piece
probe
neck
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TW103205117U
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Chinese (zh)
Inventor
zong-yi Chen
hong-guang Fan
qing-hong Yang
zhong-zhe Li
Jia-Yuan Guo
Tian-Jia Li
Ting-Ru Wu
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Mpi Corp
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Priority to TW103205117U priority Critical patent/TWM483427U/en
Publication of TWM483427U publication Critical patent/TWM483427U/en

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Description

垂直式探針裝置及使用於該垂直式探針裝置之支撐柱Vertical probe device and support column for the vertical probe device

本創作係與探針卡有關,特別是關於一種使用於探針卡之垂直式探針裝置,以及使用於該垂直式探針裝置之支撐柱。This creation is related to probe cards, particularly with respect to a vertical probe device for use with a probe card, and a support column for use with the vertical probe device.

請參閱我國專利編號為I299085之專利案,習用之垂直式探針裝置包含有一由上、下導板或上、中、下導板構成之探針座、一設於上、下導板之間的定位片,以及多數探針,各該探針具有一穿設於上導板及定位片之頭部、一穿設於下導板之尾部,以及一位於上、下導板之間的容置空間之彎曲身部,該等探針之尾部接觸高度不同的待測元件時可上下移動而達到微調針尖高度之效果,該定位片係用以在尚未安裝該上導板時將該等探針之頭部定位,以避免探針歪斜而使上導板難以安裝。Please refer to the patent of the Chinese Patent No. I299085. The conventional vertical probe device comprises a probe base composed of upper and lower guide plates or upper, middle and lower guide plates, and one between the upper and lower guide plates. a positioning piece, and a plurality of probes each having a head disposed on the upper and lower positioning plates, a tail portion disposed on the lower guide plate, and a space between the upper and lower guide plates The curved body of the space, the tail of the probes can be moved up and down when contacting the components to be tested with different heights to achieve the effect of finely adjusting the height of the tip, and the positioning piece is used to detect the upper guide when the upper guide is not installed. Position the needle head to avoid skewing the probe and making the upper guide difficult to install.

習用之一種定位片安裝態樣,係使定位片懸空地設置於該容置空間,然而,當要更換探針而將上導板拆卸時,容易將定位片連同翻起,並可能同時連帶地將探針拔起,如此增加了重新安裝被拔起之探針的時間成本,並可能因此造成探針損壞。A positioning piece mounting aspect of the prior art is such that the positioning piece is suspended in the accommodating space. However, when the upper guide plate is to be removed when the probe is to be replaced, the positioning piece is easily flipped together, and possibly simultaneously Pulling the probe up increases the time cost of reinstalling the pulled probe and can cause damage to the probe.

習用之另一種定位片安裝態樣,係將定位片固定於下導板頂面,如此雖可避免如前述之定位片被翻起的問題,但也因定位片無法在探針受力時稍微位移,造成探針承受較大應力而較易損壞。Another type of positioning piece used in the prior art is to fix the positioning piece on the top surface of the lower guiding plate, so that the problem that the positioning piece is turned up as described above can be avoided, but the positioning piece cannot be slightly pressed when the probe is stressed. The displacement causes the probe to withstand large stresses and is more susceptible to damage.

前述之專利所提供的垂直式探針裝置,係將定位片放置在下導板上,並於上、下導板之間提供一小段距離,使得定位片能稍微位移,此外,該定位片可在必要時利用螺絲而固定於下導板,因此可避免在拆卸上導板時將定位片翻起。然而,該探針裝置之上導板頂面所連接的電路板或空間轉換器可能需要安裝電子元件,在此狀況下,該探針裝置頂部需具有可供容納該電子元件的空間,但設置電子元件的區域常與定位片固定於下導板的區塊相互干涉,因此,前述之專利所提供的垂直式探針裝置難以應用於頂部需容納電子元件的狀況。The vertical probe device provided by the aforementioned patents places the positioning piece on the lower guide plate and provides a small distance between the upper and lower guide plates, so that the positioning piece can be slightly displaced, and in addition, the positioning piece can be If necessary, it is fixed to the lower guide by screws, so that the positioning piece can be prevented from being turned up when the upper guide is removed. However, the circuit board or space converter to which the top surface of the guide plate is connected may require electronic components to be mounted. In this case, the top of the probe device needs to have a space for accommodating the electronic component, but the setting The area of the electronic component often interferes with the block in which the positioning piece is fixed to the lower guide. Therefore, the vertical probe device provided by the aforementioned patent is difficult to apply to the condition in which the top portion needs to accommodate the electronic component.

另,請參閱我國專利公開號為201120452之專利案,該專利係於探針裝置內安裝一維修裝置,以利用該維修裝置固定定位片而避免定位片被翻起,然而,該維修裝置雖然可達成固定定位片之功能,惟構件稍多,以致構造稍微複雜且安裝較為費時。In addition, please refer to the patent of the Japanese Patent Publication No. 201120452, which installs a maintenance device in the probe device to fix the positioning piece by the maintenance device to prevent the positioning piece from being turned up, however, the maintenance device can be The function of fixing the positioning piece is achieved, but the structure is slightly larger, so that the structure is slightly complicated and the installation is time consuming.

有鑑於上述缺失,本創作之主要目的在於提供一種垂直式探針裝置,以及使用於該垂直式探針裝置之支撐柱,其中,該支撐柱能避免該垂直式探針裝置的定位片被翻起,並讓定位片能稍微位移而使探針不易損壞,且該垂直式探針裝置結構簡單、易安裝,並適用於頂部需容納電子元件之狀況。In view of the above-mentioned deficiencies, the main object of the present invention is to provide a vertical probe device and a support column for the vertical probe device, wherein the support column can prevent the positioning piece of the vertical probe device from being turned over. And the positioning piece can be slightly displaced to make the probe difficult to damage, and the vertical probe device is simple in structure, easy to install, and suitable for the condition that the top part needs to accommodate electronic components.

為達成上述目的,本創作所提供之垂直式探針裝置包含有一具有複數卡接孔及複數探針安裝孔的下導板、一具有複數限位孔及複數探針安裝孔的定位片、複數分別穿設於該下導板之探針安裝孔且分別穿設於該定位片之探針安裝孔的探針,以及複數支撐柱,各該支撐柱具有依序連 接之一頭部、一頸部、一身部及一尾部,其中至少一該支撐柱之頭部具有一上擋止面,其餘至少一該支撐柱之身部具有一下擋止面,該等支撐柱之頸部係分別穿設於該定位片之限位孔,各該支撐柱之頸部的長度係大於該定位片的厚度,該定位片係能移動地被限位於該等支撐柱之上擋止面與下擋止面之間,該等支撐柱之尾部係卡接於該下導板之卡接孔。In order to achieve the above object, the vertical probe device provided by the present invention comprises a lower guide plate having a plurality of snap holes and a plurality of probe mounting holes, a positioning piece having a plurality of limit holes and a plurality of probe mounting holes, and a plurality of The probes are respectively disposed on the probe mounting holes of the lower guide plate and respectively pass through the probe mounting holes of the positioning piece, and the plurality of support columns, and the support columns are sequentially connected a head portion, a neck portion, a body portion and a tail portion, wherein at least one of the support column heads has an upper stop surface, and at least one of the remaining support column portions has a lower stop surface, the support The neck portions of the column are respectively disposed in the limiting holes of the positioning piece, and the length of the neck of each of the supporting columns is greater than the thickness of the positioning piece, and the positioning piece is movably limited to the supporting columns. Between the stop surface and the lower stop surface, the tail portions of the support columns are engaged with the engaging holes of the lower guide plate.

藉此,該定位片藉由該等支撐柱而與該下導板保持穩固的連結關係,當使用者要拆卸一固定於該下導板上且受該等探針穿過之上導板時,該等支撐柱能避免該定位片連帶地被掀起。而且,該定位片雖受該等支撐柱限位但仍可在該等支撐柱之上、下擋止面之間稍微位移,因此可避免探針在接觸受測物時因受到過大應力而容易損壞。此外,該垂直式探針裝置結構簡單、易安裝,且該等支撐柱佔據空間小,因此能讓出探針周圍可能需用以容納電子元件的空間。Thereby, the positioning piece maintains a stable connection relationship with the lower guiding plate by the supporting columns, when the user needs to disassemble and fix the lower guiding plate and pass the probe through the upper guiding plate. The support columns can prevent the positioning piece from being picked up in conjunction. Moreover, the positioning piece can be slightly displaced between the support post and the lower stop surface by the support post, so that the probe can be prevented from being subjected to excessive stress when contacting the test object. damage. In addition, the vertical probe device has a simple structure and is easy to install, and the support columns occupy a small space, so that a space around the probe for accommodating electronic components may be required.

有關本創作所提供之垂直式探針裝置及使用於該垂直式探針裝置之支撐柱的詳細構造、特點、組裝或使用方式,將於後續的實施方式詳細說明中予以描述。然而,在本創作領域中具有通常知識者應能瞭解,該等詳細說明以及實施本創作所列舉的特定實施例,僅係用於說明本創作,並非用以限制本創作之專利申請範圍。The detailed construction, features, assembly or use of the vertical probe device provided by the present invention and the support column used in the vertical probe device will be described in the detailed description of the subsequent embodiments. However, those of ordinary skill in the art should understand that the detailed description and specific embodiments of the present invention are merely used to illustrate the present invention and are not intended to limit the scope of the patent application.

10‧‧‧垂直式探針裝置10‧‧‧Vertical probe device

12‧‧‧容置空間12‧‧‧ accommodating space

14‧‧‧探針區14‧‧‧ probe area

20‧‧‧上導板20‧‧‧Upper Guide

22‧‧‧探針安裝孔22‧‧‧ Probe mounting hole

24‧‧‧容置孔24‧‧‧ accommodating holes

30‧‧‧下導板30‧‧‧ lower guide

31‧‧‧上構件31‧‧‧Upper components

32‧‧‧下構件32‧‧‧lower components

34‧‧‧卡接孔34‧‧‧Card hole

36‧‧‧探針安裝孔36‧‧‧Probe mounting holes

40‧‧‧定位片40‧‧‧ Positioning film

42‧‧‧限位孔42‧‧‧Limited holes

422‧‧‧狹長部422‧‧‧Straits

424‧‧‧擴張部424‧‧‧Expanding Department

44‧‧‧探針安裝孔44‧‧‧ Probe mounting hole

442‧‧‧狹長部442‧‧‧Straits

444‧‧‧擴張部444‧‧‧Expansion Department

50‧‧‧探針50‧‧‧ probe

52‧‧‧頭部52‧‧‧ head

54‧‧‧身部54‧‧‧ Body

56‧‧‧尾部56‧‧‧ tail

60A~E‧‧‧支撐柱60A~E‧‧‧Support column

62‧‧‧頭部62‧‧‧ head

622‧‧‧上擋止面622‧‧‧Upper stop surface

64‧‧‧頸部64‧‧‧ neck

66‧‧‧身部66‧‧‧ Body

662‧‧‧下擋止面662‧‧‧ Lower stop surface

664‧‧‧底面664‧‧‧ bottom

666‧‧‧擋止區段666‧‧‧stop section

668‧‧‧延伸區段668‧‧‧Extended section

68‧‧‧尾部68‧‧‧ tail

682‧‧‧末端End of 682‧‧‧

684‧‧‧剖溝684‧‧‧"

686‧‧‧卡接腳686‧‧‧ card pin

688‧‧‧倒鈎688‧‧‧ Barb

70‧‧‧支撐柱70‧‧‧Support column

72‧‧‧頭部72‧‧‧ head

74‧‧‧頸部74‧‧‧ neck

76‧‧‧身部76‧‧‧ Body

78‧‧‧尾部78‧‧‧ tail

782‧‧‧支撐腳782‧‧‧Support feet

784‧‧‧倒鈎784‧‧‧ Barb

786‧‧‧彈性區段786‧‧‧Flexible section

D1‧‧‧縱長方向D1‧‧‧Longitudinal direction

D2‧‧‧傾斜方向D2‧‧‧ tilt direction

θ‧‧‧夾角Θ‧‧‧ angle

第1圖為本創作一第一較佳實施例所提供之垂直式探針裝置的剖視示意圖;第2圖為第1圖之A部分的局部放大圖; 第3圖概為本創作該第一較佳實施例所提供之垂直式探針裝置的頂視示意圖,惟該垂直式探針裝置之一上導板係被移除以便說明;第4圖及第5圖為本創作該第一較佳實施例所提供之垂直式探針裝置的一定位片、一探針及一支撐柱的立體示意圖,並顯示其安裝方式;第6圖為本創作該第一較佳實施例所提供之支撐柱的立體示意圖;第7圖及第8圖係類同於第3圖,惟顯示本創作所提供之垂直式探針裝置具有複數探針區之二種實施態樣;第9圖至第12圖為本創作第二至第五較佳實施例所提供之支撐柱的立體示意圖;以及第13圖為本創作一第六較佳實施例所提供之垂直式探針裝置的剖視示意圖。1 is a cross-sectional view of a vertical probe device according to a first preferred embodiment of the present invention; and FIG. 2 is a partially enlarged view of a portion A of FIG. 1; FIG. 3 is a schematic top plan view of the vertical probe device provided by the first preferred embodiment, but the upper guide plate of one of the vertical probe devices is removed for explanation; FIG. 4 and FIG. 5 is a perspective view showing a positioning piece, a probe and a supporting column of the vertical probe device provided by the first preferred embodiment, and showing the mounting manner thereof; FIG. 6 is the creation of the present invention. A perspective view of a support column provided by the first preferred embodiment; FIGS. 7 and 8 are similar to FIG. 3, but showing that the vertical probe device provided by the present invention has two kinds of multiple probe regions. Embodiments of the present invention; FIGS. 9 to 12 are perspective views of the support columns provided in the second to fifth preferred embodiments of the present invention; and FIG. 13 is a vertical view of the sixth preferred embodiment of the present invention. A schematic cross-sectional view of a probe device.

申請人首先在此說明,在以下將要介紹之實施例以及圖式中,相同之參考號碼,表示相同或類似之元件或其結構特徵。The Applicant first describes the same or similar elements or structural features thereof in the embodiments and the drawings which will be described below.

請先參閱第1圖至第3圖,本創作一第一較佳實施例所提供之垂直式探針裝置10包含有一上導板20、一下導板30、一定位片40、複數探針50,以及複數支撐柱60A。Please refer to FIG. 1 to FIG. 3 . The vertical probe device 10 provided by the first preferred embodiment includes an upper guide 20 , a lower guide 30 , a positioning piece 40 , and a plurality of probes 50 . And a plurality of support columns 60A.

該上導板20係利用螺絲(圖中未示)鎖固於該下導板30上,且二者之間形成一容置空間12。在本實施例中,該下導板30為二件式設計,包含有藉由螺絲(圖中未示)而相互固定的一上構件31及一下構件32;然而,該下導板30亦可為一件式設計,意即,上、下構件31、32可一體成型。該上導板20具有複數探針安裝孔22,該下導板30具有複數卡接孔34,以及複數探針安裝孔36。The upper guide plate 20 is locked to the lower guide plate 30 by screws (not shown), and an accommodation space 12 is formed therebetween. In this embodiment, the lower guide plate 30 is a two-piece design including an upper member 31 and a lower member 32 fixed to each other by screws (not shown); however, the lower guide plate 30 can also The one-piece design means that the upper and lower members 31, 32 can be integrally formed. The upper guide plate 20 has a plurality of probe mounting holes 22 having a plurality of snap holes 34 and a plurality of probe mounting holes 36.

該定位片40為一具可撓性之絕緣薄片,具有複數限位孔42及複數探針安裝孔44。如第4圖及第5圖所示,各該限位孔42及探針安裝孔44形狀相同,具有一呈狹長矩形的狹長部422、442,以及一位於該狹長部422、442中央且呈圓形的擴張部424、444。The positioning piece 40 is a flexible insulating sheet having a plurality of limiting holes 42 and a plurality of probe mounting holes 44. As shown in FIG. 4 and FIG. 5, each of the limiting hole 42 and the probe mounting hole 44 has the same shape, and has an elongated portion 422, 442 having a narrow rectangular shape, and a central portion of the elongated portion 422, 442. Round flared portions 424, 444.

各該探針50為一種習用之垂直式探針,具有依序連接之一頭部52、一身部54及一尾部56,該頭部52及該尾部56係呈直圓桿狀且相互平行,該身部54係呈彎曲狀而使得位於其二端之該頭部52及該尾部56非位於同一軸線,且該身部54之橫截面係呈狹長矩形(或橢圓形)。Each of the probes 50 is a conventional vertical probe having a head portion 52, a body portion 54 and a tail portion 56. The head portion 52 and the tail portion 56 are straight and parallel to each other. The body portion 54 is curved such that the head portion 52 and the tail portion 56 at the two ends thereof are not located on the same axis, and the body portion 54 has a narrow rectangular (or elliptical) cross section.

請參閱第2圖及第6圖,各該支撐柱60A具有依序連接之一頭部62、一頸部64、一身部66,以及一尾部68。該頭部62為一立方體,其垂直於一縱長方向D1的各剖面係呈狹長矩形,且該頭部62之一實質上垂直於該縱長方向D1之底面為一上擋止面622。該頸部64係自該上擋止面622朝該縱長方向D1延伸而出,且該頸部64之垂直於該縱長方向D1的各剖面係呈邊長概與該上擋止面622之短邊相等的正方形。該身部66係呈彎曲狀並自該頸部64朝一傾斜方向D2延伸而出,該傾斜方向D2與該縱長方向D1有一呈銳角之夾角θ,該身部66之垂直於該縱長方向D1的各剖面係呈狹長矩形,其短邊係概與該上擋止面622之短邊等長,其長邊係小於並垂直於該上擋止面622之長邊,且該身部66之一實質上垂直於該縱長方向D1的頂面為一下擋止面662。該尾部68係自該身部66之一實質上垂直於該縱長方向D1之底面664延伸而出,且其延伸方向係實質上平行於該縱長方向D1,該尾部68之垂直於該縱長方向D1之各剖面係小於該底面664。Referring to FIGS. 2 and 6, each of the support posts 60A has a head 62, a neck portion 64, a body portion 66, and a tail portion 68 in sequence. The head portion 62 is a cube having a slit shape perpendicular to a longitudinal direction D1, and a bottom surface of the head portion 62 substantially perpendicular to the longitudinal direction D1 is an upper stop surface 622. The neck portion 64 extends from the upper stop surface 622 in the longitudinal direction D1, and each of the cross sections perpendicular to the longitudinal direction D1 of the neck portion 64 has a side length and the upper stop surface 622. The square with the short sides being equal. The body portion 66 is curved and extends from the neck portion 64 in an oblique direction D2. The oblique direction D2 has an acute angle θ with the longitudinal direction D1, and the body portion 66 is perpendicular to the longitudinal direction. Each of the sections D1 has a long rectangular shape, and the short side is substantially equal to the short side of the upper stop surface 622, and the long side is smaller than and perpendicular to the long side of the upper stop surface 622, and the body 66 One of the top surfaces substantially perpendicular to the longitudinal direction D1 is a lower stop surface 662. The tail portion 68 extends from a bottom surface 664 of the body portion 66 substantially perpendicular to the longitudinal direction D1, and extends in a direction substantially parallel to the longitudinal direction D1, the tail portion 68 being perpendicular to the longitudinal direction Each of the sections in the longitudinal direction D1 is smaller than the bottom surface 664.

該定位片40、該等探針50及該等支撐柱60A係於該上導板 20尚未安裝於該下導板上20時先行安裝於該下導板30上,該等探針50之頭部52係分別穿設於該定位片40之探針安裝孔44,該等探針50之尾部56則分別穿設於該下導板30之探針安裝孔36,該等支撐柱60A之頸部64係分別穿設於該定位片40之限位孔42,該等支撐柱60A之尾部68則分別卡接於該下導板30之卡接孔34。The positioning piece 40, the probes 50 and the supporting columns 60A are attached to the upper guiding plate The heads 52 of the probes 50 are respectively inserted through the probe mounting holes 44 of the positioning piece 40, and the probes are respectively mounted on the lower guide plate 20. The tail portions 56 of the 50 are respectively disposed in the probe mounting holes 36 of the lower guide plate 30. The neck portions 64 of the support posts 60A are respectively disposed through the limiting holes 42 of the positioning piece 40, and the support posts 60A. The tail portions 68 are respectively engaged with the latching holes 34 of the lower guide plate 30.

詳而言之,該定位片40之探針安裝孔44及限位孔42係剛好能供該探針50及支撐柱60A之身部54、66穿過,各該探針50及支撐柱60A係依序以其尾部56、68及身部54、66穿過該定位片40之探針安裝孔44及限位孔42,使得各該探針50之頭部52及各該支撐柱60A之頸部64位於該限位孔42及該探針安裝孔44的擴張部424、444,如第4圖所示。該支撐柱60A之頸部64及該探針50之頭部52係能於該限位孔42及該探針安裝孔44的擴張部424、444內轉動,因此各該探針50及支撐柱60可轉動大約90度而呈如第5圖所示之態樣,如此一來,各該探針50及支撐柱60係無法被向上頂推而脫離該定位片40。此外,各該支撐柱60A之頸部64的長度係大於該定位片40的厚度,且各該支撐柱60A之上、下擋止面622、662係隔著該定位片40而相面對,因此,該定位片40係能稍微上下移動地被限位於該等支撐柱60A之上、下擋止面622、662之間。In detail, the probe mounting hole 44 and the limiting hole 42 of the positioning piece 40 are just enough for the probe 50 and the body portions 54, 66 of the support post 60A to pass through, and each of the probe 50 and the support post 60A The probe mounting holes 44 and the limiting holes 42 of the positioning piece 40 are passed through the tail portions 56 and 68 and the body portions 54 and 66, so that the head 52 of each of the probes 50 and each of the supporting columns 60A are The neck portion 64 is located at the limiting hole 42 and the expanded portions 424, 444 of the probe mounting hole 44, as shown in FIG. The neck portion 64 of the support post 60A and the head portion 52 of the probe 50 are rotatable in the limiting hole 42 and the expanding portions 424 and 444 of the probe mounting hole 44. Therefore, each of the probe 50 and the supporting column The 60 can be rotated by about 90 degrees to be in the state shown in FIG. 5, so that the probe 50 and the support post 60 cannot be pushed upward to disengage from the positioning piece 40. In addition, the length of the neck portion 64 of each of the support posts 60A is greater than the thickness of the positioning piece 40, and the upper and lower stop faces 622, 662 of the support post 60A face each other across the positioning piece 40, Therefore, the positioning piece 40 can be restricted between the support posts 60A and the lower stop faces 622, 662 with a slight up and down movement.

當該上導板20安裝於該下導板30上時,該等探針50之頭部52更穿過該上導板20之探針安裝孔22,如此一來,當該垂直式探針裝置10設於一電路板或空間轉換器(圖中未示)底部而組成一探針卡時,該等探針50之頭部52凸出於該上導板20的部分係用以與該電路板或空間轉換器的接點電性連接,該等探針50之尾部56凸出於該下導板30的部分則 係用以點觸受測物之接點。When the upper guide 20 is mounted on the lower guide 30, the head 52 of the probe 50 passes through the probe mounting hole 22 of the upper guide 20, so that when the vertical probe is used When the device 10 is disposed at the bottom of a circuit board or a space converter (not shown) to form a probe card, the portion of the head 52 of the probe 50 protruding from the upper guide 20 is used for The contacts of the circuit board or the space transformer are electrically connected, and the tail portion 56 of the probes 50 protrudes from the portion of the lower guide 30 It is used to touch the contact of the object under test.

當該垂直式探針裝置10需要更換探針時,該上導板20可從該下導板30上被拆卸下來,此時,由於該定位片40係藉由該等支撐柱60A而與該下導板30保持穩固的連結關係,該等支撐柱60A能避免該定位片40在該上導板20被拆卸時連帶地被掀起,同時即可避免各該探針50被不小心拔起。When the vertical probe device 10 needs to be replaced, the upper guide 20 can be detached from the lower guide 30. At this time, since the positioning piece 40 is supported by the support posts 60A, The lower guide plate 30 maintains a stable connection relationship. The support posts 60A can prevent the positioning piece 40 from being picked up in a detached manner when the upper guide plate 20 is detached, and the probes 50 can be prevented from being accidentally pulled up.

該等支撐柱60A除了可避免該定位片40被翻起,並可讓該定位片40在該等支撐柱60A之上、下擋止面622、662之間稍微位移,因此可避免探針50在接觸受測物時因受到過大應力而容易損壞。而且,該垂直式探針裝置10結構簡單且易安裝,只要在安裝該等探針50時利用類似的安裝方式順便安裝該等支撐柱60A即可。此外,該等支撐柱60A可相當貼近於探針50且占據空間小,該定位片40係藉由該等支撐柱60A而懸空於該容置空間12內,且不需延伸至上、下導板20、30相接之處;藉此,當該垂直式探針裝置10頂部設置之電路板或空間轉換器有向下凸出之電子元件時,該上導板20可設有用以容納該電子元件之容置孔24(如第1圖所示之凹孔24,其亦可為穿孔),換言之,本創作之設計可讓出探針50周圍可能需用以容納電子元件的空間,因此可適用於垂直式探針裝置之頂部需容納電子元件的狀況。The support posts 60A can prevent the positioning piece 40 from being turned up, and can slightly displace the positioning piece 40 between the support posts 60A and the lower stop faces 622, 662, thereby avoiding the probe 50. It is easily damaged due to excessive stress when it comes into contact with the test object. Moreover, the vertical probe device 10 is simple in structure and easy to install, as long as the support posts 60A are mounted by a similar mounting method when the probes 50 are mounted. In addition, the support columns 60A can be relatively close to the probe 50 and occupy a small space. The positioning piece 40 is suspended in the accommodating space 12 by the support columns 60A, and does not need to extend to the upper and lower guide plates. Wherein 20, 30 meet; thereby, when the circuit board or space converter disposed at the top of the vertical probe device 10 has downwardly protruding electronic components, the upper guide 20 may be provided to accommodate the electronic The accommodating hole 24 of the component (such as the recess 24 shown in FIG. 1 , which may also be a through hole), in other words, the design of the present invention allows the space around the probe 50 to be used to accommodate the electronic component, so Applicable to the condition of the top of the vertical probe device to accommodate electronic components.

值得一提的是,該垂直式探針裝置10具有一由該等探針50定義而成之探針區14(如第3圖所示),該等支撐柱60A係位於該探針區14外圍,如此之設置方式能相當有效地支撐該定位片40。本創作亦可具有複數探針區14,以應用於能同時對複數受測物(Multi-DUTs)進行點測的探針 卡,例如,第7圖及第8圖所示之垂直式探針裝置具有四探針區14,係用以同時對四受測物(Device Under Test,DUT)進行點測。在第7圖所示之態樣中,該等探針區14共用同一定位片40,且部分之支撐柱60A係位於兩相鄰之探針區14外圍,亦即,兩相鄰之探針區14之間僅需設置一排支撐柱60A,如此之設置方式能減少支撐柱60A數量及其佔據之空間。第8圖所示之態樣係利用四定位片40分別設於該等探針區14,且每兩相鄰之定位片40係部分相疊,在此態樣中亦可使部分之支撐柱60A位於兩相鄰之探針區14外圍,以利用較少的支撐柱60A達到良好的定位片支撐效果,且位於兩相鄰之探針區14外圍之支撐柱60A的頸部64係穿過兩相疊之定位片40。It is worth mentioning that the vertical probe device 10 has a probe region 14 defined by the probes 50 (as shown in FIG. 3), and the support columns 60A are located in the probe region 14 In the periphery, such a manner of arrangement can support the positioning piece 40 quite effectively. The creation may also have a plurality of probe zones 14 for use in probes capable of simultaneously spotting multiple test objects (Multi-DUTs). The card, for example, the vertical probe device shown in Figures 7 and 8 has a four-probe zone 14 for simultaneously spotting four Device Under Tests (DUTs). In the aspect shown in FIG. 7, the probe regions 14 share the same positioning piece 40, and a portion of the support columns 60A are located at the periphery of two adjacent probe regions 14, that is, two adjacent probes. Only one row of support columns 60A need to be provided between the zones 14, in such a manner as to reduce the number of support columns 60A and the space occupied by them. The state shown in FIG. 8 is respectively disposed on the probe regions 14 by using four positioning pieces 40, and each two adjacent positioning pieces 40 are partially overlapped, and in this aspect, a part of the supporting columns can also be made. 60A is located on the periphery of two adjacent probe zones 14 to achieve good locator support with fewer support posts 60A, and the neck 64 of the support post 60A located at the periphery of the two adjacent probe zones 14 is traversed. Two-positioned positioning piece 40.

前述之垂直式探針裝置10亦可採用如第9圖所示之本創作一第二較佳實施例所提供的支撐柱60B,其與前述之支撐柱60A的差異係在於,該支撐柱60B之身部66垂直於該縱長方向D1的剖面形狀係概與該頸部64相同,因而不具有能對該定位片40產生擋止作用之頂面,該支撐柱60B之下擋止面662為該身部66之一自該頸部64朝該傾斜方向D2延伸的側面,該下擋止面662雖未與該上擋止面622平行但仍實質上與該上擋止面622相面對,並可將該定位片40限位於上、下擋止面622、662之間。The vertical probe device 10 can also adopt the support post 60B provided by the second preferred embodiment of the present invention as shown in FIG. 9, which is different from the support post 60A described above in that the support post 60B The cross-sectional shape of the body portion 66 perpendicular to the longitudinal direction D1 is substantially the same as that of the neck portion 64, and thus does not have a top surface capable of blocking the positioning piece 40, and the stop surface 662 below the support post 60B. A side surface of the body portion 66 extending from the neck portion 64 in the oblique direction D2, the lower stop surface 662 is not parallel to the upper stop surface 622 but substantially faces the upper stop surface 622 Yes, the positioning piece 40 can be limited between the upper and lower stop faces 622, 662.

值得一提的是,在該第二較佳實施例及以下將說明之各實施例中,該縱長方向D1之定義係如同前文中所述且如第2圖所示,為該頸部64自該頭部62延伸而出之方向,該傾斜方向D2之定義亦如同前文中所述且如第2圖所示,係與該縱長方向D1有一呈銳角之夾角θ。It should be noted that in the second preferred embodiment and the embodiments to be described below, the longitudinal direction D1 is defined as described above and as shown in FIG. 2, the neck 64 is From the direction in which the head 62 extends, the oblique direction D2 is also defined as described above and as shown in Fig. 2, has an acute angle θ with the longitudinal direction D1.

前述之垂直式探針裝置10亦可採用如第10圖所示之本創作一第三較佳實施例所提供的支撐柱60C,其與前述之支撐柱60A的差異係 在於,該支撐柱60C之身部66係自該頸部64朝該縱長方向D1延伸而出,亦即該身部66並未呈彎曲狀。The vertical probe device 10 can also adopt the support column 60C provided by the third preferred embodiment of the present invention as shown in FIG. 10, which is different from the support column 60A described above. The body portion 66 of the support post 60C extends from the neck portion 64 in the longitudinal direction D1, that is, the body portion 66 is not curved.

前述之垂直式探針裝置10亦可採用如第11圖所示之本創作一第四較佳實施例所提供的支撐柱60D,其與前述之支撐柱60C的差異係在於,該支撐柱60C之身部66垂直於該縱長方向D1的各剖面係實質上與該下擋止面662形狀相同,而該支撐柱60D之身部66具有一擋止區段666及一延伸區段668,該下擋止面662係位於該擋止區段666,該延伸區段668垂直於該縱長方向D1的各剖面係小於該下擋止面662。The vertical probe device 10 can also adopt the support post 60D provided by the fourth preferred embodiment of the present invention as shown in FIG. 11 , which differs from the support post 60C described above in that the support post 60C The cross-section of the body portion 66 perpendicular to the longitudinal direction D1 is substantially the same shape as the lower stop surface 662, and the body portion 66 of the support post 60D has a blocking portion 666 and an extending portion 668. The lower stop surface 662 is located in the stop portion 666. The cross-section of the extended portion 668 perpendicular to the longitudinal direction D1 is smaller than the lower stop surface 662.

前述之垂直式探針裝置10亦可採用如第12圖所示之本創作一第五較佳實施例所提供的支撐柱60E,其身部66與前述之支撐柱60D的身部66同樣具有截面積較大之擋止區段666及截面積較小之延伸區段668,惟該支撐柱60E之延伸區段668係自該擋止區段666朝該傾斜方向D2延伸而出。The vertical probe device 10 can also adopt the support post 60E provided by the fifth preferred embodiment of the present invention as shown in Fig. 12, and the body portion 66 has the same body 66 as the support post 60D. The blocking section 666 having a larger cross-sectional area and the extending section 668 having a smaller cross-sectional area, but the extending section 668 of the supporting post 60E extends from the blocking section 666 toward the oblique direction D2.

前述之各種支撐柱的尾部68亦可如同第11圖及第12圖中所示之設計,具有一於其末端682呈開放狀之剖溝684,以及由該剖溝684分隔開且可彈性擺動之二卡接腳686;藉此,該尾部68可受使該二卡接腳686相互靠近之外力作用而擠入該下導板30之卡接孔34,以更穩固地卡在卡接孔34內而避免支撐柱轉動。此外,該尾部68可更具有分別位於該二卡接腳686末端之二倒鈎688,以將該下導板30限制於該身部66之底面664與該等倒鈎688之間,使得各該支撐柱之尾部68更不易脫離該下導板30。The tail portions 68 of the various support columns described above can also be designed as shown in Figures 11 and 12, having a split groove 684 that is open at its end 682, and separated by the split groove 684 and elastic. The second latching pin 686 is swung; thereby, the tail portion 68 can be squeezed into the latching hole 34 of the lower guiding plate 30 by the external force of the two latching pins 686, so as to be more firmly stuck in the latching The hole 34 is inside to avoid rotation of the support column. In addition, the tail portion 68 can further have two barbs 688 at the ends of the two card pins 686 to limit the lower guide plate 30 between the bottom surface 664 of the body portion 66 and the barbs 688, such that each The tail portion 68 of the support post is less susceptible to detachment from the lower guide plate 30.

請參閱第13圖,本創作一第六較佳實施例所提供之垂直式探針裝置係採用另一種支撐柱70,該支撐柱70具有依序連接之一頭部72、 一頸部74、一身部76及一尾部78,該頭部72係能彈性壓縮地通過該定位片40之限位孔42,藉以使該頸部74穿設於該限位孔42,並使得該定位片40被限位於該頭部72與該身部76之間。該支撐柱70之尾部78包含有二支撐腳782、分別位於該二支撐腳782末端之二倒鈎784,以及一位於該二支撐腳782之間的彈性區段786,該二倒鈎784係能彈性壓縮地通過該下導板30之二卡接孔34,使得該下導板30被壓抵於該彈性區段786與該二倒鈎784之間。藉此,該支撐柱70亦可達到如同第一較佳實施例中所述該支撐柱60A之功效。Referring to FIG. 13 , a vertical probe device according to a sixth preferred embodiment of the present invention uses another support column 70 having a head 72 connected in sequence. a neck portion 74, a body portion 76 and a tail portion 78, the head portion 72 is elastically and compressibly passed through the limiting hole 42 of the positioning piece 40, so that the neck portion 74 is disposed through the limiting hole 42 and The positioning piece 40 is limited between the head 72 and the body 76. The tail portion 78 of the support column 70 includes two support legs 782, two barbs 784 respectively located at the ends of the two support legs 782, and an elastic section 786 between the two support legs 782. The two barbs 784 are The lower guide plate 30 is pressed between the elastic section 786 and the two barbs 784 by elastically compressively passing through the two engaging holes 34 of the lower guide plate 30. Thereby, the support column 70 can also achieve the effect of the support post 60A as described in the first preferred embodiment.

前述各實施例中,各該支撐柱皆具有實質上隔著該定位片而相面對之上擋止面及下擋止面。然而,各該支撐柱亦可僅有位於該頭部之上擋止面,或者位於該身部之下擋止面,只要部分之支撐柱具有上擋止面以將該定位片限位於該上擋止面下方,且其餘之支撐柱具有下擋止面以將該定位片限位於該下擋止面上方即可。換言之,本創作所提供之支撐柱可不具有該上擋止面,例如可使前述第一至五較佳實施例所提供之支撐柱60A~E的頭部62非呈狹長矩形,而呈截面積較該頸部64小的形狀,或者截面積與該頸部64相同而相接成連續的形狀。或者,本創作所提供之支撐柱可不具有該下擋止面,例如可使前述第四較佳實施例所提供之支撐柱60D的身部66不具有該擋止區段666,使得該延伸區段668與該頸部64相接成連續的形狀。In each of the foregoing embodiments, each of the support columns has a substantially opposite upper and lower stop faces across the positioning piece. However, each of the support columns may have only a stop surface above the head or a stop surface below the body, as long as a part of the support column has an upper stop surface to limit the positioning piece to the upper end. Below the stop surface, and the remaining support columns have a lower stop surface to limit the positioning piece above the lower stop surface. In other words, the support column provided by the present invention may not have the upper stop surface. For example, the head 62 of the support columns 60A-E provided in the first to fifth preferred embodiments may not have a long rectangular shape but a cross-sectional area. The shape is smaller than the neck portion 64, or the cross-sectional area is the same as the neck portion 64 and is in continuous shape. Alternatively, the support column provided by the present invention may not have the lower stop surface. For example, the body portion 66 of the support post 60D provided in the fourth preferred embodiment may not have the stop portion 666, so that the extension region Segment 668 is in continuous shape with the neck 64.

最後,必須再次說明,本創作於前揭實施例中所揭露的構成元件,僅為舉例說明,並非用來限制本案之範圍,其他等效元件的替代或變化,亦應為本案之申請專利範圍所涵蓋。Finally, it must be explained again that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention. Alternatives or variations of other equivalent elements should also be the scope of patent application of the present application. Covered.

10‧‧‧垂直式探針裝置10‧‧‧Vertical probe device

12‧‧‧容置空間12‧‧‧ accommodating space

20‧‧‧上導板20‧‧‧Upper Guide

22‧‧‧探針安裝孔22‧‧‧ Probe mounting hole

24‧‧‧容置孔24‧‧‧ accommodating holes

30‧‧‧下導板30‧‧‧ lower guide

31‧‧‧上構件31‧‧‧Upper components

32‧‧‧下構件32‧‧‧lower components

34‧‧‧卡接孔34‧‧‧Card hole

36‧‧‧探針安裝孔36‧‧‧Probe mounting holes

40‧‧‧定位片40‧‧‧ Positioning film

50‧‧‧探針50‧‧‧ probe

52‧‧‧頭部52‧‧‧ head

54‧‧‧身部54‧‧‧ Body

56‧‧‧尾部56‧‧‧ tail

60A‧‧‧支撐柱60A‧‧‧Support column

62‧‧‧頭部62‧‧‧ head

66‧‧‧身部66‧‧‧ Body

68‧‧‧尾部68‧‧‧ tail

Claims (19)

一種垂直式探針裝置,包含有:一下導板,具有複數卡接孔,以及複數探針安裝孔;一定位片,具有複數限位孔,以及複數探針安裝孔;複數探針,係分別穿設於該下導板之探針安裝孔,且分別穿設於該定位片之探針安裝孔;以及複數支撐柱,各該支撐柱具有依序連接之一頭部、一頸部、一身部及一尾部,其中至少一該支撐柱之頭部具有一上擋止面,其餘至少一該支撐柱之身部具有一下擋止面,該等支撐柱之頸部係分別穿設於該定位片之限位孔,各該支撐柱之頸部的長度係大於該定位片的厚度,該定位片係能移動地被限位於該等支撐柱之上擋止面與下擋止面之間,該等支撐柱之尾部係卡接於該下導板之卡接孔。A vertical probe device comprises: a lower guide plate having a plurality of card connection holes and a plurality of probe mounting holes; a positioning piece having a plurality of limit holes and a plurality of probe mounting holes; and a plurality of probes respectively a probe mounting hole disposed in the lower guide plate, and respectively disposed through the probe mounting hole of the positioning piece; and a plurality of support columns, each of the support columns having a head, a neck, and a body in sequence And a tail portion, wherein at least one of the support columns has an upper stop surface, and at least one of the support columns has a lower stop surface, and the neck portions of the support columns are respectively disposed at the positioning portion a limiting hole of the sheet, wherein a length of the neck of each of the supporting columns is greater than a thickness of the positioning piece, and the positioning piece is movably disposed between the blocking surface and the lower stop surface of the supporting column; The tail portions of the support columns are engaged with the engaging holes of the lower guide plate. 如申請專利範圍第1項所述之垂直式探針裝置,其中各該支撐柱皆具有該上擋止面及該下擋止面,各該支撐柱之上擋止面與下擋止面係實質上隔著該定位片而相面對。The vertical probe device of claim 1, wherein each of the support columns has the upper stop surface and the lower stop surface, and each of the support columns has a stop surface and a lower stop surface. It faces substantially across the positioning piece. 如申請專利範圍第1項所述之垂直式探針裝置,其中各該限位孔具有一能供該支撐柱之身部通過的狹長部,以及一位於該狹長部中央的擴張部,該等支撐柱之頸部係能旋轉地設於該等限位孔的擴張部。The vertical probe device of claim 1, wherein each of the limiting holes has an elongated portion through which the body portion of the support column passes, and an expansion portion located at a center of the elongated portion. The neck of the support column is rotatably disposed at the expansion of the limit holes. 如申請專利範圍第1項所述之垂直式探針裝置,具有至少一由該等探針定義而成之探針區,該等支撐柱係位於該探針區外圍。The vertical probe device of claim 1, having at least one probe region defined by the probes, the support columns being located at the periphery of the probe region. 如申請專利範圍第4項所述之垂直式探針裝置,具有複數該探針區,部分之支撐柱係位於兩相鄰之探針區外圍。The vertical probe device of claim 4, having a plurality of the probe regions, a portion of the support columns being located at the periphery of the two adjacent probe regions. 如申請專利範圍第5項所述之垂直式探針裝置,包含有分別位於該等探針區之複數該定位片,每兩相鄰之定位片係部分相疊,位於兩相鄰之探針區外圍之支撐柱的頸部係穿過兩相疊之定位片。The vertical probe device of claim 5, comprising a plurality of the positioning pieces respectively located in the probe areas, each of the two adjacent positioning pieces being partially overlapped and located at two adjacent probes The neck of the support column at the periphery of the zone passes through the two spaced apart positioning tabs. 如申請專利範圍第1項所述之垂直式探針裝置,更包含有一固定於該下導板上且受該等探針穿過之上導板,該上導板設有一用以容納一電子元件之容置孔。The vertical probe device of claim 1, further comprising a fixed to the lower guide plate and passing the probe through the upper guide plate, wherein the upper guide plate is provided with an electronic device for receiving an electronic device The accommodating hole of the component. 一種支撐柱,係用以設於一包含有一下導板及一定位片之垂直式探針裝置中,用以將該定位片懸空地支撐於該下導板之上方;該支撐柱具有依序連接之一頭部、一用以穿設於該定位片之一限位孔且長度大於該定位片之厚度的頸部、一身部以及一用以卡接於該下導板之一卡接孔的尾部;該支撐柱更包含有一位於該頭部之上擋止面、一位於該身部之下擋止面以及一位於該頭部之上擋止面且一位於該身部並實質上面對該上擋止面之下擋止面這三者其中之一,用以將該定位片能移動地限位於該頸部。A support column is disposed in a vertical probe device including a lower guide plate and a positioning piece for supporting the positioning piece suspended above the lower guide plate; the support column has a sequence Connecting a head portion, a neck portion for inserting a limiting hole in the positioning piece and having a length greater than a thickness of the positioning piece, a body portion, and a locking hole for engaging with one of the lower guiding plates The support post further includes a stop surface above the head, a stop surface below the body, and a stop surface above the head and a substantially planar surface One of the three blocking surfaces below the upper stop surface is configured to movably limit the positioning piece to the neck portion. 如申請專利範圍第8項所述之支撐柱,其中該頸部係自該頭部朝一縱長方向延伸而出,該身部係自該頸部朝一傾斜方向延伸而出,該傾斜方向與該縱長方向有一呈銳角之夾角,該支撐柱具有該下擋止面且該下擋止面為該身部之一實質上垂直於該縱長方向的頂面。The support column of claim 8, wherein the neck portion extends from the head toward a longitudinal direction, the body extending from the neck toward an oblique direction, the tilting direction and the The longitudinal direction has an angle of an acute angle, the support post has the lower stop surface and the lower stop surface is a top surface of the body substantially perpendicular to the longitudinal direction. 如申請專利範圍第8項所述之支撐柱,其中該頸部係自該頭部朝一縱長方向延伸而出,該身部係自該頸部朝一傾斜方向延伸而出,該傾斜方向與該縱長方向有一呈銳角之夾角,該支撐柱具有該下擋止面且該下擋止面為該身部之一自該頸部朝該傾斜方向延伸的側面。The support column of claim 8, wherein the neck portion extends from the head toward a longitudinal direction, the body extending from the neck toward an oblique direction, the tilting direction and the The longitudinal direction has an angle of an acute angle, the support post has the lower stop surface and the lower stop surface is a side of the body extending from the neck toward the oblique direction. 如申請專利範圍第8項所述之支撐柱,其中該頸部係自該頭部朝一縱長方向延伸而出,該身部係自該頸部朝該縱長方向延伸而出。The support column of claim 8, wherein the neck portion extends from the head in a longitudinal direction, the body extending from the neck portion in the longitudinal direction. 如申請專利範圍第11項所述之支撐柱,具有該下擋止面且該下擋止面為該身部之一實質上垂直於該縱長方向的頂面,該身部之垂直於該縱長方向的各剖面係實質上與該下擋止面形狀相同。The support post according to claim 11, having the lower stop surface and the lower stop surface being a top surface of the body substantially perpendicular to the longitudinal direction, the body being perpendicular to the Each cross section in the longitudinal direction is substantially the same shape as the lower stop surface. 如申請專利範圍第11項所述之支撐柱,其中該身部具有一擋止區段及一延伸區段,該支撐柱具有該下擋止面且該下擋止面係位於該擋止區段,該延伸區段之垂直於該縱長方向的各剖面係實質上小於該下擋止面。The support column of claim 11, wherein the body has a stop portion and an extended portion, the support post has the lower stop surface and the lower stop surface is located in the stop region And a section of the extension section perpendicular to the longitudinal direction is substantially smaller than the lower stop surface. 如申請專利範圍第8項所述之支撐柱,其中該頸部係自該頭部朝一縱長方向延伸而出,該身部具有一與該頸部連接之擋止區段,以及一自該擋止區段朝一傾斜方向延伸而出之延伸區段,該傾斜方向與該縱長方向有一呈銳角之夾角,該支撐柱具有該下擋止面,該下擋止面係位於該擋止區段且為該身部之一實質上垂直於該縱長方向的頂面,該延伸區段之垂直於該縱長方向的各剖面係實質上小於該下擋止面。The support column of claim 8, wherein the neck portion extends from the head toward a longitudinal direction, the body portion has a stop portion connected to the neck portion, and a An extending portion extending from the blocking portion in an oblique direction, the inclined direction having an acute angle with the longitudinal direction, the supporting column having the lower stopping surface, wherein the lower stopping surface is located in the blocking region The segment is a top surface of the body that is substantially perpendicular to the longitudinal direction, and each of the sections of the extending section perpendicular to the longitudinal direction is substantially smaller than the lower stop surface. 如申請專利範圍第9至14項中任一項所述之支撐柱,具有該上擋止面,且該頸部係自該上擋止面朝該縱長方向延伸而出。The support post according to any one of claims 9 to 14, which has the upper stop surface, and the neck portion extends from the upper stop surface in the longitudinal direction. 如申請專利範圍第9至14項中任一項所述之支撐柱,其中該身部具有一實質上垂直於該縱長方向且用以抵接於該下導板之底面,該尾部係自該底面實質上平行於該縱長方向地延伸而出。The support column according to any one of claims 9 to 14, wherein the body has a substantially perpendicular direction to the longitudinal direction and abuts against a bottom surface of the lower guide, the tail is The bottom surface extends substantially parallel to the longitudinal direction. 如申請專利範圍第9至14項中任一項所述之支撐柱,其中該尾部具有一末端、一於該末端呈開放狀之剖溝,以及由該剖溝分隔開且可彈性擺動之二卡接腳。The support column according to any one of claims 9 to 14, wherein the tail portion has an end, an open groove at the end, and is separated by the split groove and elastically swingable. Two card pins. 如申請專利範圍第17項所述之支撐柱,其中該尾部更具有分別位於該二卡接腳之二倒鈎。The support column of claim 17, wherein the tail portion has two barbs respectively located on the two card pins. 如申請專利範圍第8項所述之支撐柱,其中該頭部係能彈性壓縮地通過該定位片之限位孔,該尾部包含有二支撐腳、分別位於該二支撐腳末端之二倒鈎,以及一位於該二支撐腳之間的彈性區段,該二倒鈎係能彈性壓縮地通過該下導板之二該卡接孔,使得該下導板被壓抵於該彈性區段與該二倒鈎之間。The support column of claim 8, wherein the head portion is elastically compressively passed through the limiting hole of the positioning piece, the tail portion comprising two supporting legs and two barbs respectively located at the ends of the two supporting legs And an elastic section between the two supporting legs, the two barbs elastically compressively pass through the two engaging holes of the lower guiding plate, so that the lower guiding plate is pressed against the elastic section and Between the two barbs.
TW103205117U 2014-03-25 2014-03-25 Vertical type probe device and supporting pillars used in the vertical type probe device TWM483427U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9658250B2 (en) 2014-12-24 2017-05-23 Mpi Corporation Vertical probe device having positioning film
TWI712802B (en) * 2020-01-21 2020-12-11 中華精測科技股份有限公司 Probe card device and neck-like probe thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9658250B2 (en) 2014-12-24 2017-05-23 Mpi Corporation Vertical probe device having positioning film
TWI712802B (en) * 2020-01-21 2020-12-11 中華精測科技股份有限公司 Probe card device and neck-like probe thereof

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