TWI730194B - 玻璃基板之製造方法 - Google Patents

玻璃基板之製造方法 Download PDF

Info

Publication number
TWI730194B
TWI730194B TW106138539A TW106138539A TWI730194B TW I730194 B TWI730194 B TW I730194B TW 106138539 A TW106138539 A TW 106138539A TW 106138539 A TW106138539 A TW 106138539A TW I730194 B TWI730194 B TW I730194B
Authority
TW
Taiwan
Prior art keywords
glass substrate
gas
air supply
processing space
conveying direction
Prior art date
Application number
TW106138539A
Other languages
English (en)
Chinese (zh)
Other versions
TW201825977A (zh
Inventor
山本好晴
中弘樹
大野和宏
伊澤誠一
Original Assignee
日商日本電氣硝子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本電氣硝子股份有限公司 filed Critical 日商日本電氣硝子股份有限公司
Publication of TW201825977A publication Critical patent/TW201825977A/zh
Application granted granted Critical
Publication of TWI730194B publication Critical patent/TWI730194B/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
TW106138539A 2016-11-16 2017-11-08 玻璃基板之製造方法 TWI730194B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-223250 2016-11-16
JP2016223250A JP6700605B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法

Publications (2)

Publication Number Publication Date
TW201825977A TW201825977A (zh) 2018-07-16
TWI730194B true TWI730194B (zh) 2021-06-11

Family

ID=62146297

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106138539A TWI730194B (zh) 2016-11-16 2017-11-08 玻璃基板之製造方法

Country Status (5)

Country Link
JP (1) JP6700605B2 (ko)
KR (1) KR102373643B1 (ko)
CN (1) CN109890772B (ko)
TW (1) TWI730194B (ko)
WO (1) WO2018092557A1 (ko)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
WO2015045405A1 (ja) * 2013-09-30 2015-04-02 日本板硝子株式会社 ガラス板の製造方法
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法
TW201630845A (zh) * 2014-12-19 2016-09-01 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3242145B2 (ja) * 1992-05-18 2001-12-25 ワイエイシイ株式会社 基板搬送装置
US7064089B2 (en) * 2002-12-10 2006-06-20 Semiconductor Energy Laboratory Co., Ltd. Plasma treatment apparatus and method for plasma treatment
JP4558284B2 (ja) * 2003-06-27 2010-10-06 東京エレクトロン株式会社 プラズマ発生方法、クリーニング方法、基板処理方法、およびプラズマ発生装置
JP4312001B2 (ja) * 2003-07-28 2009-08-12 リアライズ・アドバンストテクノロジ株式会社 基板支持装置および基板取り外し方法
JP4398262B2 (ja) * 2004-01-08 2010-01-13 大日本スクリーン製造株式会社 基板処理装置
JP2006128559A (ja) * 2004-11-01 2006-05-18 Tokyo Electron Ltd 基板処理システム
JP4417180B2 (ja) * 2004-06-11 2010-02-17 株式会社フューチャービジョン 基板処理装置
JP4486146B2 (ja) * 2008-09-30 2010-06-23 積水化学工業株式会社 表面処理装置
EP2409313A1 (de) * 2009-03-17 2012-01-25 Roth & Rau AG Substratbearbeitungsanlage und substratbearbeitungsverfahren
US20110265883A1 (en) * 2010-04-30 2011-11-03 Applied Materials, Inc. Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
WO2015045405A1 (ja) * 2013-09-30 2015-04-02 日本板硝子株式会社 ガラス板の製造方法
TW201630845A (zh) * 2014-12-19 2016-09-01 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組
TWI598309B (zh) * 2014-12-19 2017-09-11 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法

Also Published As

Publication number Publication date
KR20190082745A (ko) 2019-07-10
WO2018092557A1 (ja) 2018-05-24
CN109890772A (zh) 2019-06-14
CN109890772B (zh) 2021-11-30
JP6700605B2 (ja) 2020-05-27
TW201825977A (zh) 2018-07-16
KR102373643B1 (ko) 2022-03-14
JP2018080080A (ja) 2018-05-24

Similar Documents

Publication Publication Date Title
JP2009147260A (ja) 基板処理装置
TWI735697B (zh) 玻璃基板之製造方法
TWI741062B (zh) 玻璃基板之製造方法
TWI730194B (zh) 玻璃基板之製造方法
KR100691473B1 (ko) 기판건조용 에어나이프 모듈 및 이를 이용한 기판건조장치
TWI735698B (zh) 玻璃基板之製造方法
JP2009140990A (ja) 基板処理装置
JP2015019935A5 (ko)
JP6641663B2 (ja) ガラス板の製造方法及びその製造装置
TWI821799B (zh) 基板處理裝置
KR102505553B1 (ko) 유리 기판의 제조 방법
KR102557690B1 (ko) 유리 기판의 제조 방법 및 유리 기판의 제조 장치
JP6110111B2 (ja) 除塵装置
JP2006096491A (ja) 基板乾燥装置