TWI729631B - Method for measuring impedance - Google Patents
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本發明係關於一種量測方法,特別是關於一種待測元件的阻抗量測方法。The present invention relates to a measurement method, in particular to an impedance measurement method of a component under test.
為了因應待測元件具多腳位及功能越來越複雜的趨勢,測試裝置已經逐漸採用具備更大彈性的多通道量測架構。例如,測試裝置為了支援高同測功能(high parallel test),可以採用任意針腳(any pin)的量測架構。也就是說,不論待測元件如何連接到測試裝置的針腳,測試裝置都可以經由內部的不同量測電路取得電子元件的電壓、電流或者其他的電性參數。藉此,有彈性的多通道量測架構可以增加使用者的操作便利性,並且可以提高產品的競爭力。In order to cope with the trend that the device under test has multiple pins and more and more complex functions, testing devices have gradually adopted a multi-channel measurement architecture with greater flexibility. For example, in order to support the high parallel test function, the test device can adopt any pin measurement structure. In other words, no matter how the device under test is connected to the pins of the test device, the test device can obtain the voltage, current or other electrical parameters of the electronic component through different internal measurement circuits. In this way, the flexible multi-channel measurement architecture can increase the user's operating convenience and can improve the competitiveness of the product.
然而,由不同的量測電路取得電子元件的電壓、電流或者其他的電性參數,實際上會遇到一些問題。舉例來說,量測電路可能因為內部元件的偏差、老化或者環境因素(如溫度與濕度),而產生量測上的誤差。特別是,不同的量測電路在誤差的程度上很有可能並不相同,從而導致誤差無法在計算時被抵銷。因此,業界需要一種新的量測方法,以解決不同量測線路取得的電壓與電流存在誤差的問題。However, obtaining the voltage, current or other electrical parameters of electronic components by different measurement circuits will actually encounter some problems. For example, the measurement circuit may cause measurement errors due to internal component deviation, aging, or environmental factors (such as temperature and humidity). In particular, the degree of error in different measurement circuits is likely to be different, resulting in errors that cannot be offset in calculations. Therefore, the industry needs a new measurement method to solve the problem of errors in voltage and current obtained by different measurement circuits.
本發明提供一種阻抗量測方法,可以從不同方向對待測元件提供電能,再利用不同的量測電路分別量測取得電壓與電流,便可以由計算抵銷不同的量測電路的誤差。The present invention provides an impedance measurement method, which can provide electrical energy from different directions for the component under test, and then use different measurement circuits to measure the voltage and current respectively, so that the errors of different measurement circuits can be offset by calculation.
本發明提出一種阻抗量測方法,應用於量測待測元件,待測元件的第一端電性連接第一測試模組,待測元件的第二端電性連接第二測試模組,所述阻抗量測方法包含下列步驟。於第一模式中,供電給待測元件的第一端。於第一模式中,由第一測試模組量測待測元件的跨電壓以取得第一電壓值,並且由第二測試模組量測流經待測元件的電流以取得第一電流值。於第二模式中,供電給待測元件的第二端。於第二模式中,由第二測試模組量測待測元件的跨電壓以取得第二電壓值,並且由第一測試模組量測流經待測元件的電流以取得第二電流值。依據第一電壓值、第二電壓值、第一電流值以及第二電流值,計算待測元件的真實阻抗值。The present invention provides an impedance measurement method, which is applied to measure the component under test. The first end of the component under test is electrically connected to the first test module, and the second end of the component under test is electrically connected to the second test module. The impedance measurement method includes the following steps. In the first mode, power is supplied to the first terminal of the device under test. In the first mode, the first test module measures the voltage across the device under test to obtain the first voltage value, and the second test module measures the current flowing through the device under test to obtain the first current value. In the second mode, power is supplied to the second end of the device under test. In the second mode, the second test module measures the voltage across the device under test to obtain the second voltage value, and the first test module measures the current flowing through the device under test to obtain the second current value. According to the first voltage value, the second voltage value, the first current value, and the second current value, the true impedance value of the component under test is calculated.
於一些實施例中,所述阻抗量測方法於計算待測元件的真實阻抗值的步驟中,更可以包含下列步驟。於第一模式中,可以將第一電壓值除以第一電流值,以取得第一阻抗量測值。並且,於第二模式中,可以將第二電壓值除以第二電流值,以取得第二阻抗量測值,其中真實阻抗值關聯於第一阻抗量測值與第二阻抗量測值。此外,所述阻抗量測方法更可以將第一阻抗量測值與第二阻抗量測值相乘取得第一計算值,並且可以將第一計算值開根號以取得真實阻抗值。另外,第一電壓值與第二電流值可以均包含關聯於第一測試模組的第一電路誤差因子,第二電壓值與第一電流值可以均包含關聯於第二測試模組的第二電路誤差因子。In some embodiments, the impedance measurement method may further include the following steps in the step of calculating the true impedance value of the device under test. In the first mode, the first voltage value can be divided by the first current value to obtain the first impedance measurement value. Also, in the second mode, the second voltage value can be divided by the second current value to obtain the second impedance measurement value, wherein the real impedance value is related to the first impedance measurement value and the second impedance measurement value. In addition, the impedance measurement method can further multiply the first impedance measurement value by the second impedance measurement value to obtain the first calculation value, and can take the root of the first calculation value to obtain the true impedance value. In addition, the first voltage value and the second current value may both include a first circuit error factor associated with the first test module, and the second voltage value and the first current value may both include a second circuit error factor associated with the second test module. Circuit error factor.
於一些實施例中,於供電給待測元件的第一端的步驟中,可以由第一測試模組供電給待測元件的第一端。並且,於供電給待測元件的第二端的步驟中,可以由第二測試模組供電給待測元件的第二端。In some embodiments, in the step of supplying power to the first end of the device under test, the first test module may supply power to the first end of the device under test. Moreover, in the step of supplying power to the second end of the component under test, the second test module can supply power to the second end of the component under test.
綜上所述,本發明提供的阻抗量測方法,可以從待測元件的第一端與第二端對待測元件提供電能,再利用第一測試模組和第二測試模組各自的量測電路分別量測取得電壓與電流。並且,可以將第一測試模組和第二測試模組取得的電壓與電流進行交互運算,藉此經由計算抵銷不同測試模組之間的誤差。In summary, the impedance measurement method provided by the present invention can provide electrical energy from the first end and the second end of the device under test, and then use the respective measurement of the first test module and the second test module. The circuit measures the voltage and current respectively. In addition, the voltage and current obtained by the first test module and the second test module can be interactively calculated, thereby offsetting errors between different test modules through calculation.
下文將進一步揭露本發明之特徵、目的及功能。然而,以下所述者,僅為本發明之實施例,當不能以之限制本發明之範圍,即但凡依本發明申請專利範圍所作之均等變化及修飾,仍將不失為本發明之要意所在,亦不脫離本發明之精神和範圍,故應將視為本發明的進一步實施態樣。The features, objectives and functions of the present invention will be further disclosed below. However, the following are only examples of the present invention, and should not be used to limit the scope of the present invention, that is, all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention will still be the essence of the present invention. Without departing from the spirit and scope of the present invention, it should be regarded as a further implementation aspect of the present invention.
請參閱圖1,圖1係繪示依據本發明一實施例之使用阻抗量測方法的電路示意圖。如圖1所示,本發明的阻抗量測方法可以應用於第一測試模組10和第二測試模組12之間,並且第一測試模組10和第二測試模組12可以用來量測同一個待測元件20的電壓、電流與阻抗等元件特性。本實施例在此不特別限制第一測試模組10和第二測試模組12對應到的硬體元件,例如第一測試模組10和第二測試模組12可以是兩張獨立的測試卡,且第一測試模組10和第二測試模組12可以設置於同一個測試裝置(圖未示)中。或者,第一測試模組10和第二測試模組12可以各自為一個獨立的設備,分別電性連接到同一個待測元件20。此外,本實施例也不限制待測元件20的種類,只要待測元件20需要使用第一測試模組10和第二測試模組12來進行電壓、電流與阻抗等元件特性的量測,皆屬於本實施例所稱待測元件20的範疇。以下分別就第一測試模組10和第二測試模組12的內部元件來進行說明。Please refer to FIG. 1. FIG. 1 is a schematic diagram of a circuit using an impedance measurement method according to an embodiment of the present invention. As shown in FIG. 1, the impedance measurement method of the present invention can be applied between the
第一測試模組10可以包含電壓感測單元100、電流感測單元102以及量測電路104,電壓感測單元100與電流感測單元102可以電性連接到待測元件20的第一端200,並且量測電路104可以電性連接到電壓感測單元100與電流感測單元102。在此,雖然圖1的例子中繪示了第一測試模組10包含電源106,且電源106也會電性連接到待測元件20的第一端200,但實務上電源106並非必要元件。舉例來說,電源106也可以設置於第一測試模組10之外,例如可以是外部的電源供應器。換句話說,只要電源106能由第一端200供電給待測元件20,即符合本實施例電源106的範疇。The
同樣地,第二測試模組12可以包含電壓感測單元120、電流感測單元122以及量測電路124,電壓感測單元120與電流感測單元122可以電性連接到待測元件20的第二端202,並且量測電路124可以電性連接到電壓感測單元120與電流感測單元122。如同電源106,電源126也可以設置於第二測試模組12之外,例如同樣可以是外部的電源供應器。為了方便說明,本實施例假設第一測試模組10和第二測試模組12包含電源106和電源126。此外,雖然圖1用兩個訊號輸出入端做為示範,並非用來限制待測元件20的訊號輸出入端的數量。實務上,待測元件20還可以包含更多的訊號輸出入端,而第一端200和第二端202可能只是其中的兩個訊號輸出入端。Similarly, the
以實際的例子來說,第一測試模組10和第二測試模組12可以操作於兩個模式,在此稱為第一模式與第二模式。於第一模式中,電源106可以供電給待測元件20的第一端200,由第一測試模組10量測待測元件20的電壓,並且由第二測試模組12量測待測元件20的電流。實務上,第一測試模組10中的電壓感測單元100可以用來量測待測元件20的跨電壓,並將對應待測元件20跨電壓的資料傳送給量測電路104,由量測電路104換算取得第一電壓值。此外,第二測試模組12中的電流感測單元122用來量測流經待測元件20的電流,並將對應流經待測元件20的電流的資料傳送給量測電路124,由量測電路124換算取得第一電流值。於一個例子中,第一測試模組10和第二測試模組12的共地端(圖未示)可以連接在一起,從而電壓感測單元100可以經由第一端200和共地端取得待測元件20的跨電壓。並且,電流感測單元122可以利用電阻串聯或電流耦合的方式量測流經待測元件20的電流,由於量測電流的手段很多,本實施例並不特別限制。In a practical example, the
為了簡化測試的條件,電源106和電源126可以設定成不同時工作,也就是電源126在第一模式內可以是關閉的狀態。此時,如果將量測電路104換算出的第一電壓值表示為V1,將量測電路124換算出的第一電流值表示為I1,則待測元件20的第一阻抗量測值Z1可以表示為下列算式(1):
Z1 = V1 / I1 (1)
In order to simplify the test conditions, the
於一個例子中,第一阻抗量測值Z1可以由測試裝置的處理器,或外部的電腦來計算,本實施例在此不加以限制。此外,由於第一電壓值V1是經由量測電路104取得,還包含了量測電路104本身的誤差,從而第一電壓值V1並非是待測元件20實際上的跨電壓。同樣地,第一電流值I1由於也是經由量測電路124取得,還包含了量測電路124本身的誤差,從而第一電流值I1並非是實際上流經待測元件20的電流。假設本實施例將量測電路104本身的誤差表示為Gm1,將量測電路124本身的誤差表示為Gm2。實務上,量測電路104和量測電路124存在誤差的原因很多,例如不同電路之間的溫度差異、濕度差異、老化程度差異、內部元件誤差等,本實施例在此不特別限定誤差的原因。承接上述,如果將量測電路104和量測電路124本身的誤差Gm1與Gm2代入算式(1),則可以將算式(1)整理成算式(2):
Z1 = (Vdut × Gm1) / (Idut × Gm2) (2)
In an example, the first impedance measurement value Z1 can be calculated by the processor of the test device or an external computer, which is not limited in this embodiment. In addition, since the first voltage value V1 is obtained through the
其中Vdut為待測元件20實際上的跨電壓,並且Idut為實際上流經待測元件20的電流。換句話說,由於Vdut與Idut分別是待測元件20實際上的跨電壓與電流,將Vdut除以Idut之後,理論上可以得到待測元件20實際上的阻抗值,在此本實施例將待測元件20實際上的阻抗值稱為真實阻抗值,並且表示為Zdut。如果將Vdut/Idut用Zdut表示,則可以將算式(2)整理成算式(3):
Z1 = Zdut × (Gm1/Gm2) (3)
Where Vdut is the actual voltage across the device under
由此可知,傳統上如果用不同的測試模組量測同一個待測元件時,量測到待測元件的阻抗值是包含了兩個測試模組各自的誤差項的,很有可能與待測元件實際上的阻抗值不相同。據此,本實施例在第一模式之後,更還會進入第二模式,再次量測一次待測元件20的阻抗值。於第二模式中,電源106可以是關閉的狀態,改由電源126可以供電給待測元件20的第二端202。接著,由第二測試模組12量測待測元件20的電壓,並且由第一測試模組10量測待測元件20的電流。與第一模式相類似地,第二測試模組12中的電壓感測單元120可以用來量測待測元件20的跨電壓,並將對應待測元件20跨電壓的資料傳送給量測電路124,由量測電路124換算取得第二電壓值。此外,第一測試模組10中的電流感測單元102用來量測流經待測元件20的電流,並將對應流經待測元件20的電流的資料傳送給量測電路104,由量測電路104換算取得第二電流值。It can be seen that, traditionally, if different test modules are used to measure the same component under test, the measured impedance value of the component under test contains the respective error items of the two test modules, which is likely to be different from that of the component under test. The actual impedance value of the test element is not the same. Accordingly, this embodiment will enter the second mode after the first mode, and measure the impedance value of the device under
此時,如果將量測電路124換算出的第二電壓值表示為V2,將量測電路104換算出的第二電流值表示為I2,則待測元件20的第二阻抗量測值Z2可以表示為下列算式(4):
Z2 = V2 / I2 (4)
At this time, if the second voltage value converted by the
與第一模式相類似地,第二阻抗量測值Z2同樣可以由測試裝置的處理器,或外部的電腦來計算,本實施例在此不加以限制。此外,由於第二模式中的第二電壓值V2是經由量測電路124取得,還包含了量測電路124本身的誤差,從而第二電壓值V2也不是待測元件20實際上的跨電壓。同樣地,第二電流值I2由於也是經由量測電路104取得,還包含了量測電路104本身的誤差,從而第二電流值I2也不是實際上流經待測元件20的電流。如果將前述量測電路104和量測電路124本身的誤差Gm1與Gm2代入算式(4),則可以將算式(4)整理成算式(5):
Z2 = (Vdut × Gm2) / (Idut × Gm1) (5)
Similar to the first mode, the second impedance measurement value Z2 can also be calculated by the processor of the test device or an external computer, and this embodiment is not limited herein. In addition, since the second voltage value V2 in the second mode is obtained through the measuring
接著,待測元件20實際上的跨電壓與電流Vdut與Idut相除,得到待測元件20的真實阻抗值Zdut。如果將Vdut/Idut用Zdut表示,則可以將算式(5)整理成算式(6):
Z2 = Zdut × (Gm2/Gm1) (6)
Next, the actual cross-voltage and current Vdut and Idut of the component under
於一個例子中,為了要求得待測元件20的真實阻抗值Zdut,可以由測試裝置的處理器,或外部的電腦來將算式(3)與算式(6)相乘,計算得出算式(7):
Z1 × Z2 = Zdut
2× [(Gm1×Gm2)/(Gm2×Gm1)] (7)
In one example, in order to obtain the true impedance value Zdut of the component under
由於算式(7)中的「(Gm1×Gm2)/(Gm2×Gm1)」可以相銷成1,從而可以看出真實阻抗值Zdut會直接關聯於第一阻抗量測值Z1與第二阻抗量測值Z2的乘積。換句話說,真實阻抗值Zdut可以由下列算式(8)計算而得: Zdut= (8) Since "(Gm1×Gm2)/(Gm2×Gm1)" in equation (7) can be pinned to 1, it can be seen that the real impedance value Zdut will be directly related to the first impedance measurement value Z1 and the second impedance value The product of the measured value Z2. In other words, the true impedance value Zdut can be calculated by the following formula (8): Zdut= (8)
另一方面,從算式(1)和算式(4)可知,由於第一阻抗量測值Z1是直接關聯於第一電壓值V1和第一電流值I1,第二阻抗量測值Z2是直接關聯於第二電壓值V2和第二電流值I2,因此算式(8)也可以表示為算式(9): Zdut= (9) On the other hand, from equation (1) and equation (4), since the first impedance measurement value Z1 is directly related to the first voltage value V1 and the first current value I1, the second impedance measurement value Z2 is directly related Based on the second voltage value V2 and the second current value I2, the equation (8) can also be expressed as the equation (9): Zdut= (9)
可以看出,待測元件的真實阻抗值Zdut是依據第一電壓值V1、第二電壓值V2、第一電流值I1以及第二電流值I2計算出來的。值得一提的是,本實施例在此不限制第一模式和第二模式的先後順序,例如第二模式也可以先於第一模式。此外,本實施例也不限制真實阻抗值Zdut必須由算式(8)或算式(9)算出,所屬技術領域具有通常知識者應可以理解,實際電路的不理想因素很多,本實施例只是將不理想因素歸納成量測電路104和量測電路124本身的誤差Gm1與Gm2,並不用來限制計算真實阻抗值Zdut的方法。例如,第一電壓值V1帶有偏移量(offset),則可能還需要經過校正的步驟。因此,本實施例僅說明待測元件的真實阻抗值Zdut關聯於第一電壓值V1、第二電壓值V2、第一電流值I1以及第二電流值I2,但不以此為限。It can be seen that the true impedance value Zdut of the component under test is calculated based on the first voltage value V1, the second voltage value V2, the first current value I1, and the second current value I2. It is worth mentioning that this embodiment does not limit the sequence of the first mode and the second mode. For example, the second mode may also precede the first mode. In addition, this embodiment does not limit that the true impedance value Zdut must be calculated by formula (8) or formula (9). Those with ordinary knowledge in the technical field should understand that there are many undesirable factors in the actual circuit. This embodiment just does not The ideal factors are summarized into the errors Gm1 and Gm2 of the
為了說明本實施例的阻抗量測方法,以下搭配圖1的電路架構進行說明。請一併參閱圖1與圖2,圖2係繪示依據本發明一實施例之阻抗量測方法的步驟流程圖。如圖所示,於步驟S30中,示範了於第一模式中,電源106可以供電給待測元件20的第一端200。於步驟S32中,示範了於第一模式中,由第一測試模組10中的電壓感測單元100量測待測元件20的跨電壓,並將對應待測元件20跨電壓的資料傳送給量測電路104,再由量測電路104換算取得第一電壓值V1。並且,由第二測試模組12中的電流感測單元122量測流經待測元件20的電流,並將對應流經待測元件20的電流的資料傳送給量測電路124,再由量測電路124換算取得第一電流值I1。In order to illustrate the impedance measurement method of this embodiment, the following description will be made with the circuit structure of FIG. 1. Please refer to FIG. 1 and FIG. 2 together. FIG. 2 is a flowchart illustrating the steps of an impedance measurement method according to an embodiment of the present invention. As shown in the figure, in step S30, it is demonstrated that in the first mode, the
接著於步驟S34中,示範了於第二模式中,電源126可以供電給待測元件20的第二端202。於步驟S36中,示範了於第二模式中,由第二測試模組12中的電壓感測單元120量測待測元件20的跨電壓,並將對應待測元件20跨電壓的資料傳送給量測電路124,再由量測電路124換算取得第二電壓值V2。並且,由第一測試模組10中的電流感測單元102量測流經待測元件20的電流,並將對應流經待測元件20的電流的資料傳送給量測電路104,再由量測電路104換算取得第二電流值I2。最後,於步驟S38中,可以由測試裝置的處理器,或外部的電腦依據第一電壓值V1、第二電壓值V2、第一電流值I1以及第二電流值I2,計算待測元件20的真實阻抗值Zdut。本實施例所述阻抗量測方法的其餘細節,皆已於前一實施例說明過,本實施例在此不予贅述。Next, in step S34, it is demonstrated that in the second mode, the
綜上所述,本發明提供的阻抗量測方法,可以從待測元件的第一端與第二端對待測元件提供電能,再利用第一測試模組和第二測試模組各自的量測電路分別量測取得電壓與電流。並且,可以將第一測試模組和第二測試模組取得的電壓與電流進行交互運算,藉此經由計算抵銷不同測試模組之間的誤差。In summary, the impedance measurement method provided by the present invention can provide electrical energy from the first end and the second end of the device under test, and then use the respective measurement of the first test module and the second test module. The circuit measures the voltage and current respectively. In addition, the voltage and current obtained by the first test module and the second test module can be interactively calculated, thereby offsetting errors between different test modules through calculation.
10:第一測試模組 100:電壓感測單元 102:電流感測單元 104:量測電路 106:電源 12:第一測試模組 120:電壓感測單元 122:電流感測單元 124:量測電路 126:電源 20:待測元件 200:第一端 202:第二端 S30~S38:步驟流程10: The first test module 100: Voltage sensing unit 102: current sensing unit 104: Measuring circuit 106: Power 12: The first test module 120: Voltage sensing unit 122: current sensing unit 124: measurement circuit 126: Power 20: component under test 200: first end 202: second end S30~S38: Step flow
圖1係繪示依據本發明一實施例之使用阻抗量測方法的電路示意圖。FIG. 1 is a schematic diagram of a circuit using an impedance measurement method according to an embodiment of the present invention.
圖2係繪示依據本發明一實施例之阻抗量測方法的步驟流程圖。FIG. 2 is a flowchart showing the steps of an impedance measurement method according to an embodiment of the present invention.
無no
S30~S38:步驟流程 S30~S38: Step flow
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