TWI729010B - Fixed abrasive grain wire saw and method for dressing fixed abrasive grain wire - Google Patents

Abstract

The subject of the present invention is to provide a fixed abrasive wire saw and a method for dressing a fixed abrasive wire. The arrangement relationship between a worktable holding a workpiece and a dressing grindstone used for dressing the fixed abrasive wire is considered, except for the consideration of maintainability. In addition to the application surface, a more reasonable design is applied.

The solution is to provide: a fixed abrasive steel wire (2); a workpiece supply table (6) with a workpiece fixing part (15) for fixing the workpiece (W); and a dressing grindstone (41), in the grooved pulley (3) -5) A fixed abrasive steel wire (2) is hung around, forming a steel wire row (30) arranged along the transmission direction of the grooved pulley, so that the dressing grindstone is fixed on the workpiece in the above-mentioned driving direction of the above-mentioned workpiece supply table The position on the upstream side of the part is adjacent to and fixed to the workpiece fixing part.

Description

Fixed abrasive wire saw and trimming method of fixed abrasive wire

The invention relates to a fixed abrasive wire saw for cutting workpieces made of hard and brittle materials such as silicon, glass, ceramics, etc., and a method for trimming a fixed abrasive wire.

In the past, a wire saw (ie, a cutting device using a wire) is known as one of the devices for cutting a workpiece (ie, an ingot) made of a hard and brittle material to produce a plurality of thin plates (wafers). The wire saw is configured to form a spiral steel wire row by laying a piano wire and other core wires side by side between a plurality of grooved pulleys, and pressing the ingot against the high-speed steel wire traveling on the wire row to cut the ingot into Most wafers. The cutting method of the wire saw includes a free abrasive method in which a machining fluid containing free abrasive particles (i.e., mud) is sprayed toward the wire row and cut, and as shown in Patent Document 1, a fixed grinding method is used on the surface of the core wire. The fixed abrasive grain method of wire cutting. The free abrasive method has the problem of disposal of mud. Therefore, in recent years, it has not been necessary to use the above-mentioned mud, and it is compatible with the above-mentioned The fixed abrasive method, which is superior in cutting efficiency compared with the separated abrasive method, has gradually become popular. In addition, the fixed abrasive wire used in the wire saw of the fixed abrasive grain method (ie, the fixed abrasive wire saw) is known as a steel wire in which abrasive grains are fixed to a core wire by metal plating (see Patent Document 2).

However, when using a fixed abrasive wire with metal plating on the core wire to fix the abrasive grains, in order to ensure more excellent cutting efficiency and cutting accuracy, it is better to make the tip of the abrasive grain, that is, the tip often exposed, not to cause clogging due to chips, but Generally, as disclosed in the aforementioned Patent Document 2, in the new product state before the start of use, the tips of the abrasive grains are covered by metal plating, and it is extremely difficult to avoid clogging after the start of use.

For this reason, the wire saw described in Reference 1 presses the dressing grindstone against the wire row to dress and fix the abrasive steel wire. However, from the standpoint of operational aspects such as maintainability of the wire saw, sufficient consideration has not been given to the arrangement relationship between the table for maintaining the ingot and the dressing grindstone, and there is still room for improvement in design.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 11-28654 A

[Patent Document 2] JP 2006-181698 A

[Summary of the invention]

Therefore, the technical problem of the present invention is to provide a more reasonable arrangement relationship between a worktable holding a workpiece and a dressing grindstone for dressing fixed abrasive steel wires. The designed fixed abrasive wire saw and the dressing method of the fixed abrasive wire of such fixed abrasive wire saw.

In order to solve the above-mentioned problems, according to the present invention, a fixed abrasive wire saw is provided, which has: a fixed abrasive grain steel wire for fixing abrasive grains on the surface of a core wire by metal plating; a plurality of grooved pulleys with rotating shafts arranged parallel to each other; and a workpiece supply for fixed workpieces Table; and dressing grindstone for dressing the fixed abrasive steel wire, the fixed abrasive steel wire is helically wound between the grooved pulleys, and the steel wires are arranged at predetermined intervals in the drive direction parallel to the rotating shaft. The fixed abrasive wire is made to travel at a high speed in the direction of its core, and the workpieces fixed on the wire row and the workpiece supply table are pressed against each other, thereby cutting the workpiece with the fixed abrasive wire saw, which is characterized by : The workpiece supply table is provided with a workpiece fixing portion for fixing the workpiece, and the dressing grindstone is adjacent to and fixed to the workpiece fixing portion at least upstream of the workpiece fixing portion in the transmission direction.

At this time, it is preferable that the dressing grindstone is composed of first and second dressing grindstones, and in the workpiece supply stand, the first dressing grindstone is on the upstream side of the workpiece fixing part in the transmission direction , Is arranged adjacent to the workpiece fixing part, and the second dressing grindstone is in the workpiece fixing part The downstream side is adjacent to and fixed to the workpiece fixing part.

Furthermore, it is more desirable that the front end surface facing the wire row of the first dressing grindstone protrudes toward the wire row side than the front end surface facing the wire row of the second dressing grindstone.

In addition, according to the present invention, there is provided a fixed abrasive wire saw, which has: a fixed abrasive wire for fixing abrasive grains on the surface of the core wire by metal plating; a plurality of grooved pulleys with rotating shafts arranged parallel to each other; and a workpiece supply table for fixing the workpiece, The fixed abrasive grain steel wire is spirally wound between the grooved pulleys, and steel wire rows arranged at predetermined intervals are formed in the transmission direction parallel to the rotating shaft, so that the fixed abrasive grain steel wire travels at a high speed in the direction of its core. , And press the workpieces fixed on the steel wire row and the workpiece supply table to each other, thereby cutting the workpiece with a fixed abrasive wire saw, characterized in that: the workpiece supply table is provided with: a workpiece for fixing the workpiece The fixing portion and the grindstone fixing portion for fixing the grindstone for fixing the abrasive grain wire, the grindstone fixing portion is at least the upstream side of the workpiece fixing portion in the transmission direction, and is arranged adjacent to the workpiece fixing portion.

In this case, it is preferable that the grindstone fixing portion is composed of first and second grindstone fixing portions, and in the workpiece supply stand, the first grindstone fixing portion is on the upstream side of the workpiece fixing portion in the driving direction , Is arranged adjacent to the work fixing part, and the second grindstone fixing part is arranged on the downstream side of the work fixing part and adjacent to the work fixing part.

In addition, according to the present invention, there is provided a method for dressing a fixed abrasive steel wire, which is characterized in that: the fixed abrasive steel wire for fixing the abrasive grains on the surface of the core wire by metal plating is spirally hung on the rotating shaft and arranged parallel to each other. The step of forming a plurality of grooved pulleys between the grooved pulleys, thereby forming a row of steel wires arranged at predetermined intervals in the transmission direction parallel to the above-mentioned rotating shaft; fixing the workpiece on the workpiece supply table, and in the workpiece supply table than the workpiece The step of making the dressing grindstone abut and fixing the workpiece at a position closer to at least the upstream side of the transmission direction; and making the fixed abrasive steel wire travel at a high speed in the direction of its core, so that the workpiece supply table and the steel wire The rows move in the direction of approaching each other, whereby the fixed abrasive steel wire located on the upstream side of the drive direction than the workpiece is trimmed with the above-mentioned dressing grindstone, and the steel wire formed by the trimmed fixed abrasive steel wire List the steps of cutting the above-mentioned workpiece.

In the above-mentioned dressing method according to the present invention, it is preferable that the front end surface opposed to the wire row of the dressing grindstone fixed to the workpiece supply table is opposite to the wire row of the workpiece fixed to the workpiece supply table The front end surface protrudes further toward the side of the steel wire row.

In addition, it is preferable that the dressing grindstone is composed of first and second dressing grindstones, and the first dressing grindstone is on the upstream side of the workpiece in the driving direction at the workpiece supply stand. The work is adjacent to and fixed, and the second dressing grindstone is on the downstream side of the work, and is adjacent to and fixed to the work.

At this time, it is more desirable that the front end surface facing the wire row of the first dressing grindstone protrudes toward the wire row side than the front end surface facing the wire row of the second dressing grindstone, and 2 The front end surface of the dressing grindstone and the front end surface of the workpiece are arranged at substantially the same distance from the wire row.

According to the present invention described above, the fixed abrasive steel wire is configured to be trimmed with a dressing grindstone before the workpiece is cut by the wire row of the fixed abrasive steel wire. Therefore, the metal plating layer covering the surface of the abrasive grains of the fixed abrasive grain steel wire can be removed so that the tool spaces of the abrasive grains are exposed and then the workpiece can be cut, which can improve the cutting efficiency of the workpiece. In addition, the structure fixes the above-mentioned workpiece and the dressing grindstone to the same workpiece supply table, which not only avoids the complexity of the structure, but also allows the replacement of the dressing grindstone at the same time as the replacement of the workpiece, etc., and also on the operation surface of maintenance, etc. Excellent results can be achieved.

1‧‧‧Fixed Abrasive Wire Saw

2‧‧‧Fixed abrasive steel wire

3-5‧‧‧Slotted pulley

6‧‧‧Workpiece Supply Table

15‧‧‧Workpiece fixed part

16‧‧‧The first grindstone fixing part

17‧‧‧Second grinding stone fixing part

30‧‧‧Wire Column

41‧‧‧Grinding Stone for 1st Dressing

41a‧‧‧Front face

42‧‧‧2nd dressing grindstone

42a‧‧‧Front face

W‧‧‧Workpiece

W1‧‧‧Front face

Fig. 1 is a schematic diagram showing an embodiment of a fixed abrasive wire saw according to the present invention.

Fig. 2 is a schematic perspective view showing the cutting portion of the fixed abrasive wire saw of Fig. 1.

Fig. 3 is a schematic partial enlarged view schematically showing the state of the workpiece in the cutting portion before cutting.

Fig. 4 is a schematic partial enlarged view schematically showing the state of dressing of the fixed abrasive wire before the start of cutting of the workpiece in the cutting portion.

Fig. 5 is a schematic partial enlarged view schematically showing the state of the above-mentioned cutting portion at the start of cutting of the workpiece.

Fig. 6 is a schematic partial enlarged view schematically showing the state in the middle of the cutting of the workpiece in the cutting section.

Figures 1 to 6 show an embodiment of the fixed abrasive wire saw according to the present invention. The fixed abrasive wire saw 1 of this embodiment is shown in Figs. 1 and 2, and has: a fixed abrasive wire 2 that fixes abrasive grains on the surface of the core wire by metal plating; and a plurality of grooved pulleys 3 whose rotating shafts are arranged parallel to each other. -5; the workpiece supply table 6 for fixing the workpiece W; and the dressing grindstones 41, 42 that are in contact with the fixed abrasive wire 2 to dress the fixed abrasive wire 2 and wind the fixed abrasive wire 2 on the The wire row 30 formed between the grooved pulleys 3-5 presses the workpiece W to form a wafer capable of cutting a large number of sheets. Furthermore, in this embodiment, a silicon ingot formed in a long quadrangular column shape in one direction is used as the above-mentioned workpiece W.

The fixed abrasive steel wire 2 is a core wire formed on a piano wire, etc., for example, hard fine abrasive grains formed by fixing diamond or cubic boron nitride (cBN), etc., are electroplated with a metal such as nickel, and electroplated with a metal such as nickel. Fixing: In the fixed abrasive steel wire 2 in a new state before trimming, the entire surface of the abrasive grains is covered with a metal plating layer. In addition, in this embodiment, a wire diameter of about 0.1 mm is used as the fixed abrasive steel wire 2 to increase the cutting hardness and reduce the cutting cost.

As shown in Figure 1, the fixed abrasive steel wire 2 is wound around a pair of steel wire reels 7, 8 on both ends, respectively. Between the steel wire reels 7, 8 is formed the workpiece W to be cut into The cutting portion 20 of the sheet. In addition, between the pair of wire reels 7 and 8, there are provided a wire walking path 9 on one side of the wire reel 7 and a wire walking path 10 on the other side of the wire reel 8 between which the cutting part 20 is interposed. In addition, the steel wire walking paths 9 and 10 are respectively equipped with: a lateral movement device 11 for laterally moving the fixed abrasive grain steel wire 2; an adjusting roller 12 for imparting a certain tension to the walking steel wire 2; and The adjustment roller 12 guides the aforementioned guide roller 13 for fixing the abrasive grain wire 2 in the front and rear so that the fixed abrasive grain wire 2 is appropriately sent out from the wire reels 7 and 8 and appropriately wound around them.

Motors (not shown) are connected to the above-mentioned steel wire reels 7 and 8, respectively. The motor is driven to thereby send the fixed abrasive steel wire 2 from one wire reel 7 and surround the grooved pulley 3-5 arranged in the cutting part 20, and then collect it to the other wire reel 8. The wire reels 7 and 8 travel at high speed along the direction of their core wires.

In addition, the above-mentioned fixed abrasive steel wire 2 may travel in only one direction along the core wire direction (the direction from one wire reel 7 to the other wire reel 8), or it may travel back and forth. In the case of cutting the workpiece W in the present embodiment, the fixed abrasive steel wire 2 is configured to travel back and forth between the steel wire reels 7 and 8. In addition, the delivery amount of the fixed abrasive steel wire 2 supplied from one of the steel wire reels 7 is longer than the winding amount wound on the steel wire reel 7, and new fixed abrasive steel wires can be sequentially delivered from the steel wire reel 7 to be supplied. To the wire row 30 above. In addition, in this embodiment, the delivery amount is set to about 400 m, and the return amount is set to 397 m, so that the fixed abrasive steel wire 2 that supplies the steel wire row 30 is replaced with a new fixed abrasive steel wire 2 by 3 m each in a round trip.

As shown in Fig. 1 or Fig. 2, the cutting portion 20 is provided with a first grooved pulley 3 on the side of the wire walking path 9 on one side; a second grooved pulley on the side of the wire walking path 10 on the other side. 4; And located in the first and second grooved pulleys 3, 4 below the third grooved pulley 5 constituted by three pulleys. The three grooved pulleys 3-5 have rotating shafts parallel to each other, and are arranged so that each rotating shaft is positioned at the apex of the triangle when displayed from its axial direction.

In addition, a plurality of ring-shaped wire grooves 14 for positioning the fixed abrasive grain steel wire 2 are formed at predetermined intervals on the outer peripheral surface of the grooved pulley 3-5, and the fixed abrasive grain steel wire 2 is engaged with the fixed abrasive grain wires on one side. The steel wire grooves 14 of the grooved pulleys 3-5 are wound in a spiral shape. Thereby, between the first and second grooved pulleys 3 and 4, a steel wire row 30 in which the fixed abrasive steel wires 2 are arranged at predetermined intervals is formed in the transmission direction parallel to the rotating shaft. In addition, in the steel wire row 30 of the present embodiment, a fixed abrasive steel wire 2 having a length of about 800 m is stretched between the grooved pulleys 3-5, and the fixed abrasive steel wire 2 is arranged side by side at a pitch of 0.3 mm in the transmission direction.

In addition, in the cutting portion 20, above the center of the wire row 30 in the stretching direction, the workpiece supply table 6 formed horizontally is arranged along the transmission direction, and the workpiece supply table 6 is formed relative to the wire by a table transmission device not shown in the figure. Column 30 is driven freely up and down. As the workpiece supply table 6 descends toward the wire row 30, the workpiece W fixed under the workpiece supply table 6 is pressed against the wire row 30 to be cut. As a result, the workpiece W is configured to simultaneously cut a large number of thin pieces. Wafer. And, as long as the workpiece W can be pressed relative to the wire row 30, for example, one side holds three grooved pulleys 3-5 With respect to the relative positional relationship, the lifting device that raises and lowers the grooved pulleys 3-5 can be configured to raise the wire row 30 toward the workpiece W fixed to the workpiece supply table 6. Alternatively, one of the workpiece supply table 6 and the wire row 30 may be configured to be movable close to each other.

As shown in FIG. 3, the workpiece supply table 6 is provided with a workpiece fixing portion 15 for fixing the workpiece W, and a grindstone fixing portion 16, 17 for fixing the dressing grindstones 41 and 42.

The workpiece fixing portion 15 is provided at approximately the center of the drive direction on the lower side of the workpiece supply table 6 adjacent to the wire row 30 (the lower side in FIG. 1), and is mounted along the workpiece along the drive direction. One side of W in the long direction. In addition, a base such as a spacer is attached to the work fixing portion 15, and the work W is fixed through the base with an adhesive or the like.

The said grindstone fixing parts 16 and 17 are comprised by the 1st grindstone fixing part 16 and the 2nd grindstone fixing part 17, and similarly to the said workpiece|work fixing part 15, they are provided in the lower surface side of the workpiece|work supply table 6, respectively. Specifically, the first grindstone fixing portion 16 is on the more upstream side of the workpiece fixing portion 15 in the aforementioned driving direction, and is arranged adjacent to the workpiece fixing portion 15, and the second grindstone fixing portion 17 is the workpiece in the aforementioned driving direction. On the further downstream side of the fixing portion 15, it is arranged adjacent to the workpiece fixing portion 15.

The two dressing grindstones 41 and 42 are fixed to the grindstone fixing portions 16 and 17 with an adhesive or the like. As shown in FIG. 3, the first dressing grindstone 41 is attached to the first grindstone fixing portion 16, and the second dressing grindstone 42 is attached to the second grindstone fixing portion 17. Take this, as in Chart 2 As shown, in the above-mentioned transmission direction, the first dressing grindstone 41 is arranged on the more upstream side of the workpiece fixing portion 15 to which the workpiece W is fixed, and the second dressing grindstone 42 is arranged on the further downstream side of the workpiece fixing portion 15 constitute. The dressing grindstones 41 and 42 are formed in a substantially rectangular flat plate shape (substantially rectangular body), respectively. With the workpiece W fixed, the side end surfaces in one of the thickness directions are arranged so that the side end faces of the workpiece W are connected to each other. The end faces on each side in the longitudinal direction face each other.

At this time, the front end surface 41a facing the wire row 30 of the first dressing grindstone 41 protrudes toward the wire row 30 side than the front end surface 42a facing the wire row 30 of the second dressing grindstone 42. In the state where the workpiece W is fixed to the workpiece fixing portion 15, the front end surface 41 a of the first dressing grindstone protrudes toward the wire row 30 side than the front end surface W1 of the workpiece W facing the wire row 30. On the other hand, the front end surface 42a of the second dressing grindstone 42 is in a state where the workpiece W is fixed to the workpiece fixing portion 15, and only the front end surface W1 of the workpiece W is separated from the wire row 30 by approximately the same distance, as a result , The two front end surfaces 42a, W1 form substantially the same surface. In addition, the grindstones 41 and 42 for dressing may be fixed to the grindstone fixing parts 16 and 17 through a partition plate.

The first and second dressing grindstones 41 and 42 are arranged in the plurality of fixed abrasive steel wires 2 forming the steel wire row 30, and the fixed abrasive steel wires 2 located on the most upstream side of the above-mentioned transmission direction are located in the same transmission direction. Between the fixed abrasive steel wires 2 on the most downstream side. Thereby, the new (unused) fixed abrasive steel wire 2 located upstream of the workpiece W in the transmission direction is trimmed with the first dressing grindstone 41 to remove the metal plating at the tip of the abrasive grain, and then proceed Before cutting the workpiece W, the tip (tip) of the abrasive grain can be exposed. In addition, with the reciprocating movement of the fixed abrasive wire 2, after the fixed abrasive wire 2 cuts the workpiece W, the dressing grindstone 41 is used for dressing again, thereby suppressing clogging of the cutting layer due to the cutting of the workpiece W. In addition, the second dressing grindstone 42 also performs dressing of the fixed abrasive wire after cutting the workpiece W, and can remove the chips attached to the fixed abrasive wire to suppress the clogging described above.

In addition, these dressing grindstones 41 and 42 may be appropriately used in a comprehensive manner, such as the type, particle size, concentration, and metal material of the plating layer of the abrasive grains fixed to the core material of the fixed abrasive grain steel wire 2. As described above, the first dressing grindstone 41 mainly causes the abrasive grains of the fixed abrasive wire 2 to protrude before the start of cutting, and is relatively thicker than the second dressing grindstone 42. In addition, the plate thickness of the dressing grindstone can be appropriately selected according to the wire diameter of the fixed abrasive steel wire 2, the transmission amount, and the like. For example, in this embodiment, the plate thickness of the first dressing grindstone 41 is about 30 mm, and it is possible to dress about 100 fixed abrasive steel wires 2 groups in a state where the steel wire rows 30 are in contact.

When cutting the workpiece W, first, as described above, the fixed abrasive steel wire 2 is mounted on the wire saw 1 and spirally wound between the grooved pulleys 3-5 to form a wire row 30. And the workpiece W is fixed to the workpiece fixing part 15 of the workpiece supply table 6, and the first grindstone 41 for dressing is fixed to the first grindstone fixing part 16 provided on the workpiece supply table 6 and fixed to the second grindstone. The part 17 fixes the said 2nd grinding stone 42 for dressing. Again, as shown in Figure 3. In the state where the workpiece W and the dressing grindstones 41, 42 are fixed, the first and second dressing grindstones 41, 42 are respectively arranged The one side end surface of the above-mentioned one side end surface and the above-mentioned side end surface of the workpiece W are in a non-contact state, but for example, one of the dressing grindstones 41, 42 may be placed in contact with the workpiece W, or arranged The two dressing grindstones 41 and 42 are brought into contact with the workpiece W.

Subsequently, when a motor (not shown) is driven to rotate the pair of steel wire reels 7, 8, the fixed abrasive grain steel wire 2 travels at a high speed in the direction of its core, and the steel wire row 30 is sequentially driven in the transmission direction. Then, the workpiece supply table 6 is sequentially lowered toward the wire row 30, and the two dressing grindstones 41, 42 are used to dress the fixed abrasive steel wires 2 located on the upstream and downstream sides of the drive direction than the workpiece W. , And the workpiece W fixed to the workpiece fixing portion 15 of the workpiece supply table 6 is slowly cut at intervals of the wire rows 30, and finally a plurality of wafers can be cut at the same time.

The dressing method of the fixed abrasive steel wire 2 is further described in detail. First, from the state before the lowering of the above-mentioned workpiece supply table 6 (Fig. 3), the workpiece supply table 6 is lowered by a certain distance toward the traveling wire row 30. And, as shown in Fig. 4, the plurality of fixed abrasive steel wires 2 arranged on the wire row 30 on the upstream side of the workpiece W in the transmission direction are brought into contact with the first protruding side of the wire row 30 from the front end surface of the workpiece W. Grinding stone 41 for dressing (front end surface 41a). At this time, the steel wire row 30 is in a non-contact state with the workpiece W. While maintaining this state, the workpiece supply table 6 is slowly lowered, whereby the fixed abrasive steel wire 2 forms a cutting groove 18 on the first dressing grindstone 41 and dresses in the groove 18 of the dressing grindstone 41. Remove the metal plating covering the surface of the abrasive particles to expose the tips of the abrasive particles Out.

In addition, the dressing performed before the start of cutting of the workpiece W is to span the wire 2 at least at the length of the range in which the workpiece W is in contact with the workpiece W (that is, to be wound around the first and second dressing mills). The length of the stone 41, 42 is about) to be trimmed. In this way, cutting of the workpiece W can be started from the fixed abrasive steel wire 2 exposed at the tip of the first abrasive. In addition, in this dressing, the fixed abrasive steel wire 2 may not travel back and forth, but may travel at a high speed toward one side, thereby shortening the time taken for dressing.

In addition, with the first dressing grindstone 41, after finishing the dressing of the fixed abrasive steel wire 2 before the start of cutting, the tip surface W1 of the workpiece W is brought into contact with the plural fixed abrasive steel wires 2 groups to start the work of the workpiece W Cutting (Figure 5). At this time, as described above, the plural fixed abrasive steel wires 2 for cutting the workpiece W have been trimmed by the first dressing grindstone 41, and the tips (tips) of the abrasive grains are exposed. For this reason, the insufficient sharpness of the fixed abrasive steel wire 2 in the early stage of cutting is prevented, the generation of chips generated on the cutting surface of the workpiece W is suppressed, and the workpiece W can be cut stably and with high precision. In addition, the fixed abrasive steel wire 2 constituting the steel wire row 30 is also in contact with the second dressing grindstone 42 and is cut into the second dressing grindstone 42 together with the first dressing grindstone 41, thereby forming a contact with the workpiece W The upstream side also performs dressing of the plural fixed abrasive steel wires 2 on the downstream side of the workpiece W. Furthermore, the workpiece supply table 6 is further lowered. As shown in Fig. 6, the fixed abrasive steel wire 2 is trimmed while forming the cutting grooves 18, 19 on the first and second dressing grindstones 41, 42, and the workpiece W The cut-in groove 50 is formed and the cutting is gradually performed. And, finally, the cutting of the workpiece W is completed, and a new work is being carried out. In the case of cutting the workpiece W, replace the cut workpiece W and the dressing grindstones 41, 42 placed on the workpiece supply table 6 with new ones, and perform the dressing of the fixed abrasive wire 2 in the above order. The workpiece W is cut.

As described above, according to the fixed abrasive wire saw 1 of this embodiment, the first dressing grindstone 41 can be positioned upstream of the workpiece W in the above-mentioned driving direction of the fixed abrasive wire 2 with respect to the workpiece supply table 6. With a simple structure fixed adjacent to the workpiece W, the fixed abrasive steel wire 2 is trimmed and the abrasive grains are exposed before the cutting of the workpiece W starts. In addition, the dressing grindstone 41 and the work W are set together on the same workpiece supply table 6, so that, for example, maintenance work such as replacement of the work W and the dressing grindstone can be easily performed, and the operation surface can also be excellent. Effect.

In addition, in this embodiment, although two dressing grindstones 41 and 42 are provided, it is not limited to this. For example, when the above-mentioned workpiece W is an ingot with low viscosity, etc., when dressing on the downstream side of the wire row 30 is not necessary, the second dressing grindstone 42 may not be provided, and only the first grindstone fixing portion 16 needs to be provided. The grinding stone 41 for dressing is sufficient. In addition, as for the shape of the dressing grindstone, for example, the front end surface adjacent to the wire row 30 may be formed in a circular arc shape, or an acute-angled shape with a thin tip (or a wide tip) toward the wire row 30, and an appropriate shape may be selected. . In addition, as in the present embodiment, when the fixed abrasive wire 2 reciprocates, the reciprocating length (transmission amount, return amount) of the fixed abrasive wire 2 can be appropriately set according to the length of the workpiece W, the raw material, and the like. In addition, although the above-mentioned workpiece W has a quadrangular prism shape, as long as it can be fixed to the workpiece fixing portion 15, for example, a cylindrical cast can also be used. ingot.

Above, the fixed abrasive wire saw and the finishing method of the fixed abrasive wire related to the present invention have been described, but the present invention is not limited to the above-mentioned embodiment, of course, various design changes can be made without departing from the scope of the patent application. .

2‧‧‧Fixed abrasive steel wire

3‧‧‧Slotted pulley

4‧‧‧Slotted pulley

5‧‧‧Slotted pulley

6‧‧‧Workpiece Supply Table

14‧‧‧Steel Groove

20‧‧‧Cutting part

30‧‧‧Wire Column

41‧‧‧Grinding Stone for 1st Dressing

42‧‧‧2nd dressing grindstone

W‧‧‧Workpiece

Claims (5)

A fixed abrasive grain wire saw, comprising: a fixed abrasive grain steel wire that fixes abrasive grains on the surface of a core wire by metal plating; a plurality of grooved pulleys whose rotating shafts are arranged parallel to each other; and a workpiece supply table provided with a workpiece fixing part for fixing the workpiece; The workpiece supply table is fixed with a dressing grindstone for dressing the fixed abrasive steel wire. The fixed abrasive steel wire is helically wound between the grooved pulleys, and is formed at a predetermined pitch in a driving direction parallel to the rotating shaft. The steel wire rows arranged at intervals allow the fixed abrasive steel wire to travel at a high speed in the direction of its core, and the workpiece fixed on the steel wire row and the workpiece supply table and the dressing grindstone are pressed against each other, thereby performing the fixing The fixed abrasive wire saw for cutting the workpiece while dressing the abrasive wire is characterized in that the dressing grindstone is composed of the first and second dressing grindstones, and the first dressing grindstone is on the workpiece supply stand. The grindstone is on the more upstream side of the workpiece fixing part in the transmission direction, and is adjacent to and fixed to the workpiece fixing part, and the second dressing grindstone is on the downstream side of the workpiece fixing part and is connected to the workpiece fixing part. Adjacent and fixed. The fixed abrasive wire saw according to claim 1, wherein the front end surface opposed to the wire row of the first dressing grindstone faces the front end surface facing the wire row of the second dressing grindstone The steel wire column side protrudes. A fixed abrasive grain wire saw, which has: a fixed abrasive grain steel wire for fixing the abrasive grains on the surface of the core wire by metal plating; the rotating shafts are arranged parallel to each other A plurality of grooved pulleys; and a workpiece supply table provided with a workpiece fixing part for fixing the workpiece and a grindstone fixing part for fixing the dressing grindstone, the fixed abrasive steel wire is spirally wound between the grooved pulleys , Forming steel wire rows arranged at predetermined intervals in the transmission direction parallel to the above-mentioned rotating shaft, so that the fixed abrasive steel wire travels at a high speed on one side of its core wire direction, and fixes the workpieces and the workpieces fixed on the wire row and the workpiece supply table. The grindstones for dressing fixed to the grindstone fixing portion are pressed against each other, whereby the fixed abrasive wire saw for cutting the workpiece while trimming the fixed abrasive wire is characterized in that: the grindstone fixing portion is made of The first and second grindstone fixing parts are constituted. In the work supply stand, the first grindstone fixing part is on the upstream side of the work fixing part in the transmission direction, and is arranged adjacent to the work fixing part, and the second The grindstone fixing portion is located on the downstream side of the workpiece fixing portion, and is arranged adjacent to the workpiece fixing portion. A method for trimming a fixed abrasive steel wire, which is characterized in that: the fixed abrasive steel wire for fixing the abrasive grains on the surface of the core wire by metal plating is spirally hung between a plurality of grooved pulleys arranged parallel to each other on a rotating shaft, thereby forming The step of arranging the steel wire rows in the transmission direction parallel to the above-mentioned rotating shaft at predetermined intervals; making the workpiece, the first dressing grindstone and the second dressing grindstone adjacent to each other in the aforementioned transmission direction, and in order to connect the first 1 The dressing grindstone is arranged on the upstream side of the workpiece in the above-mentioned driving direction, and the second dressing grindstone is arranged on the downstream side of the workpiece in the above-mentioned driving direction. State, the step of fixing the workpiece and the first and second dressing grindstones to the workpiece supply table; and making the fixed abrasive steel wire travel at a high speed in the direction of its core, and make the workpiece supply table and the wire row face Move in the direction of approaching each other, thereby trimming the fixed abrasive steel wire that is located on the upstream side of the transmission direction than the workpiece with the first dressing grindstone, and the steel wire formed by the trimmed fixed abrasive steel wire List the steps of cutting the above-mentioned workpiece. The method for dressing a fixed abrasive steel wire according to claim 4, wherein the front end face of the first dressing grindstone facing the wire row is made to face the wire row of the second dressing grindstone The front end surface of the second dressing grindstone protrudes further toward the wire row side, and the front end surface of the second dressing grindstone and the front end surface of the workpiece facing the wire row are arranged at substantially the same distance from the wire row.

Images