JP6270796B2 - Fixed abrasive wire saw and fixed abrasive wire dressing method - Google Patents

Description

  The present invention relates to a fixed abrasive wire saw for cutting a work made of a hard and brittle material such as silicon, glass and ceramic, and a fixed abrasive wire dressing method.

  Conventionally, a wire saw (that is, a cutting device that uses a wire) is known as one of devices that manufacture a plurality of thin plates (wafers) by cutting a workpiece (that is, an ingot) made of a hard and brittle material. . The above-mentioned wire saw is formed by spirally extending a core wire such as a piano wire between a plurality of groove rollers to form a spiral wire row, pressing an ingot against the wire that travels at a high speed of the wire row, The ingot is configured to be cut into a large number of wafers. As the cutting method of the wire saw, a free abrasive grain method in which a cutting fluid containing free abrasive grains (that is, slurry) is cut while sprayed on the wire row, and the core wire as shown in Patent Document 1 is used. There is a method based on a fixed abrasive method in which cutting is performed using a fixed abrasive wire having abrasive particles fixed on the surface. Since the loose abrasive method has a problem of disposal of the slurry, etc., in recent years, it is not necessary to use the slurry, and a fixed abrasive method that is superior in cutting efficiency compared to the free abrasive method has become widespread. I am doing. And as a fixed abrasive wire used in the above-mentioned fixed abrasive type wire saw (that is, fixed abrasive wire saw), one in which abrasive grains are fixed to a core wire by metal plating is known (Patent Document 2). reference).

By the way, when using a fixed abrasive wire in which such abrasive grains are fixed to the core wire by metal plating, the tip of the abrasive grains, that is, the cutting edge, is always exposed in order to ensure better cutting efficiency and accuracy. it is not to demand no clogging due swarf Te, but normally, such as those disclosed in Patent Document 2, are coated cutting edge of the abrasive grains by the metal plating in the new state before the start of use, In addition, it is extremely difficult to avoid clogging even after the start of use.
Therefore, in the wire saw described in the cited document 1, the fixed abrasive wire is dressed by pressing the dressing stone against the wire row. However, when this wire saw is viewed from the standpoint of operation such as maintainability, it cannot be said that sufficient consideration has been given to the arrangement relationship between the work table holding the ingot and the dressing stone, and the design is still improved. There is room for.

JP-A-11-28654 JP 2006-181698 A

  Therefore, the technical problem of the present invention is that the arrangement relationship between the work table that holds the work and the dressing stone for dressing the fixed abrasive wire is more rational in consideration of operational aspects such as maintainability. Another object of the present invention is to provide a fixed abrasive wire saw having a special design and a method for dressing a fixed abrasive wire in such a fixed abrasive wire saw.

In order to solve the above-described problems, according to the present invention, a fixed abrasive wire in which abrasive grains are fixed to the surface of a core wire by metal plating, a plurality of groove rollers in which rotation axes are arranged in parallel to each other, and a workpiece are fixed. A workpiece supply table provided with a workpiece fixing portion , and a dressing stone for dressing the fixed abrasive wire is fixed to the workpiece supply table, and the fixed abrasive wire is interposed between the groove rollers. The wire row is wound in a spiral shape to form a wire row that is arranged at a predetermined pitch interval in the feed direction that is parallel to the rotation axis, and while the fixed abrasive wire is traveling at a high speed in the direction of the core wire, by the pressing and the workpiece fixed workpiece and dressing stones feed table together, Doresshi fixed abrasive wire A fixed abrasive wire saw for cutting the workpiece while grayed, and the workpiece supply dressing stones provided in the table and the workpiece securing section are adjacent to each other in the feed direction, the dressing stones, feed What is characterized in that it is arranged at least upstream of the workpiece fixing part in the direction is provided.

At this time, the dressing stone is preferably composed of a first dressing stone and a second dressing stone, and the first dressing stone is upstream of the work fixing portion in the feeding direction on the work supply table. On the side, the second dressing stone is fixed adjacent to the workpiece fixing portion on the downstream side of the workpiece fixing portion while being fixed adjacent to the workpiece fixing portion.
More preferably, the tip surface facing the wire row in the first dressing stone protrudes to the wire row side from the tip surface facing the wire row in the second dressing stone.

Moreover, according to this invention, the fixed abrasive wire by which the abrasive grain was fixed to the surface of the core wire by metal plating, the several groove roller by which the rotating shaft was distribute | arranged mutually parallel, and the workpiece fixing part to which a workpiece | work is fixed And a workpiece supply table provided with a grindstone fixing part to which the dressing stone is fixed, and the fixed abrasive wire is spirally wound between the groove rollers, and the rotating shaft Wires arranged in parallel in the feed direction at a predetermined pitch interval are formed, and the workpiece and the grindstone fixed to the wire row and the workpiece supply table while the fixed abrasive wire is traveling at a high speed in the core wire direction. by pressing the fixed to the fixing portion dressing stone another, for cutting the workpiece while dressing the fixed abrasive wire A fixed abrasive wire saw, and the workpiece grinding wheel fixing portion provided on the feed table and the workpiece securing section, adjacent to each other in the feeding direction, the whetstone fixing portion is at least than the workpiece securing section in the feed direction What is characterized by being arranged upstream is provided.

  In this case, preferably, the grindstone fixing portion is composed of first and second grindstone fixing portions, and the workpiece supply table includes the first grindstone fixing portion in the feed direction. The second grindstone fixing part is disposed adjacent to the work fixing part on the downstream side of the work fixing part.

Furthermore, according to the present invention, the fixed abrasive wire in which the abrasive grains are fixed to the surface of the core wire by metal plating is spirally wound between a plurality of groove rollers having rotational axes arranged in parallel to each other, thereby Forming a wire row arranged at a predetermined pitch interval in the feed direction parallel to the rotation axis, and adjoining the workpiece and the dressing stone in the feed direction, and the dressing stone at least more than the workpiece in the feed direction in a state arranged on the upstream side, a step of fixing the workpiece and dressing stones word over click feed table, while high-speed running of the fixed abrasive wire to the core direction and a and the wire columns the work feed table mutual By moving in the direction closer to the upstream side of the feed direction than the workpiece Dressing a fixed abrasive wire existing with the dressing stone, and cutting the workpiece with a wire array formed of the fixed abrasive wire after the dressing. A method is provided.

In the dressing method according to the present invention, preferably, a front end surface facing the wire row in the dressing stone fixed to the work supply table faces the wire row in the work fixed to the work supply table. It protrudes to the wire row side from the tip surface.
Preferably, the dressing stone is composed of a first dressing stone and a second dressing stone, and the work dressing table has the first dressing stone on the upstream side of the work in the feeding direction. The second dressing stone is fixed adjacent to the workpiece on the downstream side of the workpiece.
In this case, more preferably, the tip surface facing the wire row in the first dressing stone protrudes to the wire row side from the tip surface facing the wire row in the second dressing stone, and The front end surface of the dressing stone 2 and the front end surface of the workpiece facing the wire row are arranged at substantially the same distance from the wire row.

  According to the present invention described above, the fixed abrasive wire is dressed with a dressing stone prior to cutting the workpiece by the wire array of the fixed abrasive wire. Therefore, the workpiece can be cut after removing the metal plating layer covering the surface of the abrasive grains of the fixed abrasive wire to expose the cutting edge of the abrasive grains, and the cutting efficiency of the workpiece can be improved. In addition, since the workpiece and the dressing stone are configured to be fixed to the same workpiece supply table, not only can the structure be complicated, but also the dressing stone can be replaced simultaneously with the workpiece replacement. It is also effective in terms of operation such as maintenance.

It is a mimetic diagram showing one embodiment of a fixed abrasive wire saw concerning the present invention. It is a schematic perspective view which shows the cutting part of the fixed abrasive wire saw of FIG. It is a general | schematic fragmentary enlarged view which shows typically the state before the cutting of the workpiece | work in the said cutting part. In the said cutting part, it is a schematic partial enlarged view which shows typically the dressing state of the fixed abrasive wire performed prior to the start of the cutting of a workpiece | work. It is a general | schematic fragmentary enlarged view which shows typically the state at the time of the cutting start of the workpiece | work in the said cutting part. It is a general | schematic fragmentary enlarged view which shows typically the state in the middle of the cutting of the workpiece | work in the said cutting part.

  1-6 has shown one Embodiment of the fixed abrasive wire saw which concerns on this invention. As shown in FIGS. 1 and 2, the fixed abrasive wire saw 1 of the present embodiment has a fixed abrasive wire 2 in which abrasive grains are fixed to the surface of a core wire by metal plating, and a rotation axis arranged in parallel to each other. A plurality of groove rollers 3-5, a workpiece supply table 6 to which the workpiece W is fixed, and dressing stones 41 and 42 for dressing the fixed abrasive wire 2 by contacting the fixed abrasive wire 2. The workpiece W is configured to be sliced into a large number of wafers by being pressed against a wire row 30 formed by winding the fixed abrasive wire 2 between the groove rollers 3-5. As shown in FIG. 2 or FIG. 3, in this embodiment, a silicon ingot formed in a rectangular column shape that is long in one direction is used as the work W.

  The fixed abrasive wire 2 includes a hard wire made of, for example, diamond or cubic boron nitride (cBN), etc., fixed to a core wire made of a piano wire or the like by metal plating such as nickel. In the new fixed abrasive wire 2, the entire surface of the abrasive grains is covered with a metal plating layer. In the present embodiment, the fixed abrasive wire 2 having an average wire diameter of about 0.1 mm is used, so that the cutting accuracy can be increased and the machining allowance can be suppressed.

  As shown in FIG. 1, the fixed abrasive wire 2 has its both ends wound around a pair of wire reels 7 and 8, and a cutting unit that slices the workpiece W between the wire reels 7 and 8. 20 is formed. Between the pair of wire reels 7 and 8, a wire travel path 9 on one wire reel 7 side and a wire travel path 10 on the other wire reel 8 side are provided with a cutting part 20 interposed therebetween. Yes. And in these wire travel paths 9 and 10, the fixed abrasive wire 2 is traversed so that the fixed abrasive wire 2 is properly fed from the wire reels 7 and 8 and appropriately wound around them. A traverse device 11, a dancer roller 12 for applying a constant tension to the traveling wire 2, and a guide roller 13 for guiding the fixed abrasive wire 2 before and after the dancer roller 12. ing.

  The wire reels 7 and 8 are connected to motors (not shown). By driving this motor, the fixed abrasive wire 2 is fed out from one wire reel 7, circulates around the groove roller 3-5 arranged in the cutting part 20, and then collected on the other wire reel 8. In this manner, the wire reels 7 and 8 travel at a high speed in the direction of the core wire.

  Further, the fixed abrasive wire 2 may run in only one direction along the core line direction (direction from one wire reel 7 to the other wire reel 8), or may reciprocate. . In the present embodiment, when the workpiece W is cut, the fixed abrasive wire 2 is configured to reciprocate between the wire reels 7 and 8. And the fixed abrasive wire 2 supplied from one wire reel 7 is made longer than the winding amount wound back on the wire reel 7, so that new fixed abrasive particles are sequentially added from the wire reel 7. A wire is drawn out and supplied to the wire row 30. In the present embodiment, the feed amount is set to about 400 m, the return amount is set to 397 m, and the fixed abrasive wire 2 supplied to the wire row 30 is new fixed abrasive 3 m at a time. It is configured to be replaced with the wire 2.

As shown in FIG. 1 or FIG. 2, the cutting unit 20 includes a first groove roller 3 located on one wire travel path 9 side and a second groove roller located on the other wire travel path 10 side. 3 and 3 and the 3rd groove roller 5 located under these 1st and 2nd groove rollers 3 and 4 are arrange | positioned. These three groove rollers 3-5 are arranged such that their rotation axes are parallel to each other and each rotation axis is located at the apex of a triangle when viewed from the axial direction.
A plurality of annular wire grooves 14 for positioning the fixed abrasive wire 2 are formed at a predetermined pitch on the outer peripheral surface of the groove roller 3-5, and the fixed abrasive wire 2 is formed by these groove rollers. It is wound helically while being engaged with the wire groove 14 of 3-5. Thereby, the wire row 30 is formed between the first and second groove rollers 3 and 4 in which the fixed abrasive wire 2 is arranged at a predetermined pitch interval in the feeding direction parallel to the rotation axis. . In addition, in the wire row | line 30 of this embodiment, the fixed abrasive wire 2 about 800 m in length is stretched between the groove rollers 3-5, and this fixed abrasive wire 2 goes to the said feed direction. They are juxtaposed at a pitch of 0.3 mm.

  Further, in the cutting unit 20, the work supply table 6 formed in a horizontally long shape is arranged along the feeding direction above the center in the extending direction of the wire row 30, and a table feeding device (not shown) Driven up and down with respect to the wire row 30. As the workpiece supply table 6 descends toward the wire row 30, the workpiece W fixed to the lower surface of the workpiece supply table 6 is pressed against the wire row 30 to be cut, and as a result, a plurality of workpieces W are formed. It is configured to be sliced simultaneously on a single wafer. In addition, if the workpiece | work W is pressed relatively with respect to the wire row | line 30, these groove rollers 3-5 will be raised / lowered, for example, hold | maintaining the relative positional relationship of the three groove rollers 3-5. The wire row 30 may be raised toward the work W fixed to the work supply table 6 by the lifting device. Alternatively, both the workpiece supply table 6 and the wire row 30 may be configured to be movable so as to be close to each other.

As shown in FIG. 3, the work supply table 6 is provided with a work fixing part 15 for fixing the work W and grindstone fixing parts 16 and 17 for fixing the dressing stones 41 and 42. Yes.
The workpiece fixing portion 15 is provided at a substantially central position in the feeding direction on the lower surface side of the workpiece supply table 6 facing the wire row 30 (the lower side in FIG. 1), and the longitudinal direction of the workpiece W along the feeding direction. One side extending in the direction is attached. Note that a base such as a dummy material is attached to the work fixing unit 15, and the work W is fixed through the base with an adhesive or the like.

  The grindstone fixing parts 16, 17 are composed of a first grindstone fixing part 16 and a second grindstone fixing part 17, and are provided on the lower surface side of the work supply table 6, similarly to the work fixing part 15. ing. Specifically, the first grindstone fixing portion 16 is disposed adjacent to the workpiece fixing portion 15 on the upstream side of the workpiece fixing portion 15 in the feeding direction, and the second grindstone fixing portion 17. Is arranged adjacent to the workpiece fixing portion 15 on the downstream side of the workpiece fixing portion 15 in the feeding direction.

  The two dressing stones 41 and 42 are fixed to the grindstone fixing portions 16 and 17 with an adhesive or the like. As shown in FIG. 3, the first dressing stone 41 is attached to the first grindstone fixing part 16, and the second dressing stone 42 is attached to the second grindstone fixing part 17. Thereby, as shown in FIG. 2, in the feeding direction, the first dressing stone 41 is arranged on the upstream side of the workpiece fixing portion 15 to which the workpiece W is fixed, and the second dressing stone 42 is connected to the workpiece fixing portion. It is configured to be arranged on the downstream side of 15. Each of these dressing stones 41 and 42 has a substantially rectangular flat plate shape (substantially rectangular parallelepiped), and in the state where the workpiece W is fixed, one side end surface in the plate thickness direction is the length direction of the workpiece W. It arrange | positions so that it may each oppose to each side end surface.

At this time, the front end surface 41 a facing the wire row 30 in the first dressing stone 41 protrudes to the wire row 30 side from the front end surface 42 a facing the wire row 30 of the second dressing stone 42. Further, in a state where the workpiece W is fixed to the workpiece fixing portion 15 , the tip surface 41 a of the first dressing stone is closer to the wire row 30 than the tip surface W 1 of the workpiece W facing the wire row 30. It is protruding. On the other hand, the front end surface 42a of the second dressing stone 42 is separated from the front end surface W1 of the workpiece W and the wire row 30 by substantially the same distance in a state where the workpiece W is fixed to the workpiece fixing portion 15. As a result, both end faces 42a and W1 are substantially flush. The dressing stones 41 and 42 may also be fixed to the grindstone fixing portions 16 and 17 via a dummy.

The first and second dressing stones 41 and 42 are in the same feed direction as the fixed abrasive wire 2 located on the most upstream side in the feed direction among the plurality of fixed abrasive wire 2 groups forming the wire row 30. It arrange | positions between the fixed abrasive wire 2 located in the most downstream side. By doing so, the first dressing stone 41 is used to dress a new (unused) fixed abrasive wire 2 positioned on the upstream side of the workpiece W in the feeding direction to cover the tip (blade edge) of the abrasive grain. The metal plating to be removed is removed, and the cutting edge of the abrasive grains can be exposed prior to the cutting of the workpiece W. Then, as the fixed abrasive wire 2 reciprocates, the fixed abrasive wire 2 is cut by cutting the workpiece W by dressing again with the dressing stone 41 after cutting the workpiece W. Clogging due to scraps can be suppressed. Furthermore, even the second dressing stone 42, the fixed abrasive wire after cutting the workpiece W is dressed, the clogging is prevented by dropping of cutting wastes adhering to the fixed abrasive wire.

  Further, these dressing stones 41 and 42 are appropriately selected by comprehensively considering the type, grain size, concentration, or metal material of the plating layer of the abrasive grains fixed to the core material of the fixed abrasive wire 2. Things are used. As described above, the first dressing stone 41 is mainly coarser than the second dressing stone 42 because it sharpens the abrasive grains of the fixed abrasive wire 2 prior to the start of cutting. Also good. Moreover, about the plate | board thickness of a dressing stone, it can select suitably according to the wire diameter, feed amount, etc. of the fixed abrasive wire 2. FIG. For example, in the present embodiment, the first dressing stone 41 having a plate thickness of about 30 mm is used, and about 100 fixed abrasive wire 2 groups are dressed while the wire row 30 is in contact. Can be done.

  When cutting the workpiece W, first, as described above, the fixed abrasive wire 2 is mounted on the wire saw 1 and is spirally wound between the groove rollers 3-5 to form the wire row 30. To do. Moreover, while fixing the workpiece | work W to the workpiece | work fixing | fixed part 15 of the said workpiece | work supply table 6, fixing the said 1st dressing stone 41 to the 1st grindstone fixing | fixed part 16 similarly provided in the workpiece | work supply table 6, The second dressing stone 42 is fixed to the second grindstone fixing part 17. In addition, as shown in FIG. 3, in the state which fixed the workpiece | work W and the dressing stones 41 and 42, the said 1st and 2nd dressing stones 41 and 42 have those said one side end surfaces of the said workpiece | work W above. For example, either one of these dressing stones 41 and 42 may be arranged in contact with the workpiece W, or both dressing stones may be arranged in a non-contact state on each side end face. Both 41 and 42 may be arranged so as to contact the workpiece W.

  Then, when a pair of wire reels 7 and 8 are rotated by driving a motor (not shown), the fixed abrasive wire 2 travels at a high speed in the core line direction, and the wire row 30 is sequentially fed in the feed direction. It is done. Then, by gradually lowering the workpiece supply table 6 toward the wire row 30, the fixed abrasive wire 2 on the upstream side and the downstream side in the feeding direction from the workpiece W is dressed by the two dressing stones 41 and 42. However, the workpiece W fixed to the workpiece fixing portion 15 of the workpiece supply table 6 is gradually cut at the pitch interval of the wire row 30 and finally cut into a plurality of wafers at the same time. .

  The dressing method of the fixed abrasive wire 2 will be described more specifically. First, from the state before the work supply table 6 is lowered (FIG. 3), the work supply table 6 is moved downward by a certain distance toward the traveling wire row 30. Then, as shown in FIG. 4, the plurality of fixed abrasive wire 2 groups of the wire row 30 arranged on the upstream side of the workpiece W in the feeding direction are projected to the wire row 30 side from the tip surface of the workpiece W. The first dressing stone 41 (tip surface 41a) is brought into contact. At this time, the wire row 30 is not in contact with the workpiece W. By gradually lowering the workpiece supply table 6 while maintaining this state, the fixed abrasive wire 2 is dressed in the groove 18 of the dressing stone 41 while forming the cut groove 18 in the first dressing stone 41. The metal plating layer covering the surface of the abrasive grains is scraped off to expose the cutting edges of the abrasive grains.

In the dressing performed prior to the start of cutting the workpiece W, the wire 2 is at least about the length spanned over the range where it abuts against the workpiece W during cutting (that is, the first and second dressing stones 41). , dressing over over about passed length) of between 42. By doing so, it becomes possible to start cutting the workpiece W with the fixed abrasive wire 2 from which the cutting edge of the abrasive grain is exposed from the beginning. Further, in this dressing, the fixed abrasive wire 2 may be moved at a high speed on one side without reciprocating, thereby reducing the time taken for dressing.

  Then, after the dressing of the fixed abrasive wire 2 before the start of cutting is completed by the first dressing stone 41, the tip surface W1 of the workpiece W is brought into contact with a plurality of groups of the fixed abrasive wire 2 to form the workpiece W. Cutting is started (FIG. 5). At this time, as described above, the plurality of fixed abrasive wire 2 groups for cutting the workpiece W are already dressed by the first dressing stone 41, and the tips (blade edges) of the abrasive grains are exposed. Therefore, the sharpness of the fixed abrasive wire 2 at the initial stage of cutting is prevented, chipping generated on the cutting surface of the work W is suppressed, and the work W can be cut stably and with high accuracy. In addition, the fixed abrasive wire 2 constituting the wire row 30 also contacts the second dressing stone 42, and the second dressing stone 42 is cut together with the first dressing stone 41, A plurality of fixed abrasive wires 2 are dressed on the downstream side of the workpiece W as well as the upstream side of the workpiece W. Then, by further lowering the workpiece supply table 6, the fixed abrasive wire 2 is dressed by forming the cut grooves 18 and 19 in the first and second dressing stones 41 and 42 as shown in FIG. However, the workpiece W is gradually cut while the cut groove 50 is formed. When the workpiece W is finally cut and a new workpiece W is to be cut, the cut workpiece W placed on the workpiece supply table 6 and the dressing stones 41 and 42 are new. The workpiece W is cut while dressing the fixed abrasive wire 2 according to the procedure described above.

  As described above, according to the fixed abrasive wire saw 1 of the present embodiment, the first dressing stone 41 is disposed on the upstream side of the workpiece W in the feeding direction of the fixed abrasive wire 2 with respect to the workpiece supply table 6. At a position, with a simple configuration in which the workpiece W is fixed adjacent to the workpiece W, dressing of the fixed abrasive wire 2 can be performed prior to starting the cutting of the workpiece W to sharpen the abrasive grains. Moreover, by providing the dressing stone 41 together with the workpiece W on the same workpiece supply table 6, for example, maintenance work such as replacement of the workpiece W and the dressing stone can be easily performed. Has an effect.

  In the present embodiment, two dressing stones 41 and 42 are provided, but the present invention is not limited to this. For example, if dressing on the downstream side of the wire row 30 is not necessarily required, such as when the workpiece W is a low-viscosity ingot, the second grindstone 42 is not provided and the first grindstone fixing portion 16 is provided. Only the first dressing stone 41 may be provided. As for the shape of the dressing stone, for example, the tip surface facing the wire row 30 has an arc shape, or the shape is tapered (or widened) so as to form an acute angle toward the wire row 30. It is possible to have a shape, and a shape is appropriately selected. Further, when the fixed abrasive wire 2 is reciprocated as in the present embodiment, the reciprocating travel length (feed amount, return amount) of the fixed abrasive wire 2 depends on the length of the workpiece W, the material, and the like. It is set as appropriate. Moreover, although the said workpiece | work W was made into the square columnar thing, if fixed to the workpiece | work fixing | fixed part 15, you may use a cylindrical ingot, for example.

  The fixed abrasive wire saw and the fixed abrasive wire dressing method according to the present invention have been described above, but the present invention is not limited to the above-described embodiment, and does not depart from the spirit of the claims. It goes without saying that various design changes are possible.

DESCRIPTION OF SYMBOLS 1 Fixed abrasive wire saw 2 Fixed abrasive wire 3-5 Groove roller 6 Work supply table 15 Work fixing | fixed part 16 1st whetstone fixing | fixed part 17 2nd whetstone fixing | fixed part 30 Wire row 41 1st dressing stone 41a Front end surface 42 Second dressing stone 42a Tip surface W Work W1 Tip surface

Claims (9)

A fixed abrasive wire in which abrasive grains are fixed to the surface of the core wire by metal plating , a plurality of groove rollers in which rotation axes are arranged in parallel to each other, and a workpiece supply table provided with a workpiece fixing portion to which a workpiece is fixed; A dressing stone for dressing the fixed abrasive wire is fixed to the workpiece supply table,
The fixed abrasive wire is spirally wound between the groove rollers to form a wire row arranged at a predetermined pitch interval in a feed direction parallel to the rotation axis, and the fixed abrasive wire is While cutting at a high speed in the direction of the core wire, the workpieces and dressing stones fixed to the workpiece supply table are pressed against each other to cut the workpiece while dressing the fixed abrasive wire . A fixed abrasive wire saw,
The dressing stone provided on the workpiece supply table and the workpiece fixing portion are adjacent to each other in the feeding direction, and the dressing stone is arranged at least upstream of the workpiece fixing portion in the feeding direction. thing. In the fixed abrasive wire saw according to claim 1,
The dressing stone is composed of a first dressing stone and a second dressing stone, and the workpiece is fixed on the workpiece supply table on the upstream side of the workpiece fixing portion in the feeding direction. The second dressing stone is fixed adjacent to the workpiece fixing portion on the downstream side of the workpiece fixing portion. In the fixed abrasive wire saw according to claim 2,
A tip surface of the first dressing stone that faces the wire row protrudes more toward the wire row than a tip surface of the second dressing stone that faces the wire row. A fixed abrasive wire with abrasive grains fixed to the surface of the core wire by metal plating , a plurality of groove rollers whose rotation axes are arranged in parallel to each other, a workpiece fixing portion to which the workpiece is fixed, and a dressing stone are fixed A workpiece supply table provided with a grindstone fixing portion , and the fixed abrasive wire is spirally wound between the groove rollers, and has a predetermined direction in a feed direction parallel to the rotation axis. A wire row arranged at pitch intervals, and the fixed abrasive wire traveling at high speed in the direction of the core wire, while the workpiece fixed to the wire row and the workpiece supply table and the dressing stone fixed to the grindstone fixing portion by applying press and another, fixed abrasive wire saw for cutting the workpiece while dressing the fixed abrasive wire There,
The grindstone fixing part and the work fixing part provided on the work supply table are adjacent to each other in the feeding direction, and the grindstone fixing part is arranged at least upstream of the work fixing part in the feeding direction. Features In the fixed abrasive wire saw according to claim 4,
The grindstone fixing part is composed of first and second grindstone fixing parts, and the work supply table includes the first grindstone fixing part on the upstream side of the work fixing part in the feeding direction. The second grindstone fixing portion is disposed adjacent to the workpiece fixing portion on the downstream side of the workpiece fixing portion while being disposed adjacent to the workpiece fixing portion. A feed direction in which a fixed abrasive wire in which abrasive grains are fixed to the surface of the core wire is spirally wound between a plurality of groove rollers having rotational axes arranged in parallel to each other to be parallel to the rotational axis. Forming a row of wires lined up at a predetermined pitch interval;
The workpiece and the dressing stone causes adjacent to each other in the feed direction, the dressing stone, in a state which arranged at least on the upstream side of the workpiece in the feed direction, a step of fixing the workpiece and dressing stones word over click feed table ,
While moving the fixed abrasive wire at a high speed in the direction of the core wire, the workpiece supply table and the wire row are moved in directions close to each other, thereby fixing the workpiece on the upstream side of the feeding direction from the workpiece. Dressing an abrasive wire with the dressing stone, and cutting the workpiece with a wire array formed of the fixed abrasive wire after the dressing. In the dressing method of the fixed abrasive wire of Claim 6,
The tip surface facing the wire row in the dressing stone fixed to the work supply table protrudes to the wire row side from the tip surface facing the wire row in the work fixed to the work supply table. It is characterized by. In the dressing method of the fixed abrasive wire according to claim 6 or 7,
The dressing stone is composed of first and second dressing stones, and the first dressing stone is adjacent to the workpiece on the upstream side of the workpiece in the feeding direction on the workpiece supply table. And the second dressing stone is fixed adjacent to the workpiece on the downstream side of the workpiece. In the fixed abrasive wire dressing method according to claim 8,
The tip surface of the first dressing stone that faces the wire row protrudes more toward the wire row than the tip surface of the second dressing stone that faces the wire row, and the tip of the second dressing stone The surface and the tip surface facing the wire row in the workpiece are arranged at substantially the same distance from the wire row.

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