CN106626111B - Fixed abrasive wire saw and method for dressing fixed abrasive wire - Google Patents
Fixed abrasive wire saw and method for dressing fixed abrasive wire Download PDFInfo
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- CN106626111B CN106626111B CN201610970750.0A CN201610970750A CN106626111B CN 106626111 B CN106626111 B CN 106626111B CN 201610970750 A CN201610970750 A CN 201610970750A CN 106626111 B CN106626111 B CN 106626111B
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- fixed abrasive
- stone
- dressing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/08—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with saw-blades of endless cutter-type, e.g. chain saws, i.e. saw chains, strap saws
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
Abstract
The invention provides a fixed abrasive wire saw and a fixed abrasive wire dressing method, which are designed more reasonably in consideration of application aspects such as maintainability and the like with respect to the arrangement relationship of a workpiece table for holding a workpiece and a dressing stone for dressing the fixed abrasive wire. The abrasive grain wire feeding device comprises a fixed abrasive grain wire (2), a workpiece feeding table (6) having a workpiece fixing part (15) for fixing a workpiece (W), and a dressing stone (41), wherein the fixed abrasive grain wire (2) is wound between grooved rollers (3) - (5), so that a wire array (30) arranged along the feeding direction of the grooved rollers is formed, and the dressing stone is fixed at the position on the upstream side of the workpiece fixing part in the feeding direction in the workpiece feeding table in a manner of being adjacent to the workpiece fixing part.
Description
Technical Field
The present invention relates to a fixed abrasive wire saw for cutting a workpiece made of a hard and brittle material such as silicon, glass, or ceramic, and a method for dressing a fixed abrasive wire.
Background
Conventionally, a wire saw (i.e., a cutting device using a wire) has been known as one of devices for cutting a workpiece (i.e., a billet) made of a hard and brittle material to produce a plurality of thin plates (wafers). The wire saw is configured such that a core wire such as a piano wire is laid between a plurality of grooved rollers in parallel to form a spiral wire row, and a billet is cut by pushing the billet against a high-speed wire of the wire row, thereby cutting the billet into a plurality of wafers. As cutting methods of the wire saw, there are a cutting method based on a free abrasive method in which cutting is performed while a processing liquid (i.e., slurry) containing free abrasive grains is sprayed onto the wire row, and a cutting method based on a fixed abrasive method in which cutting is performed using a fixed abrasive wire in which abrasive grains are adhered to the surface of the core wire as shown in patent document 1. The free abrasive grain method has a problem of disposal of the slurry, and therefore, in recent years, a fixed abrasive grain method which does not require the use of the slurry and has an excellent cutting efficiency as compared with the free abrasive grain method has been widely used. As a fixed abrasive wire used in the fixed abrasive wire saw (i.e., fixed abrasive wire saw), a fixed abrasive wire in which abrasive grains are adhered to a core wire by metal plating is known (see patent document 2).
However, in the case of using a fixed abrasive wire in which such abrasive grains are adhered to a core wire by metal plating, in order to ensure more excellent cutting efficiency and cutting accuracy, it is desirable that the tip of the abrasive grain is always exposed and there is no clogging due to cutting chips, but in a new state before the start of use, as in the cutting method disclosed in patent document 2, the tip of the abrasive grain is usually covered by metal plating, and even after the start of use, it is extremely difficult to avoid clogging.
Therefore, in the wire saw described in cited document 1, the fixed abrasive wire is dressed by pushing the dressing stone against the wire row. However, in the wire saw, from the viewpoint of the application such as maintenance, the arrangement relationship between the workpiece table for holding the compact and the dresser stone is not necessarily considered to be sufficient, and there is still room for improvement in design.
Prior art documents
Patent document
Patent document 1: japanese patent laid-open publication No. 11-28654
Patent document 2: japanese patent laid-open publication No. 2006-181698
Disclosure of Invention
Problems to be solved by the invention
Accordingly, an object of the present invention is to provide a fixed abrasive wire saw designed more appropriately in consideration of the operational aspects such as maintainability with respect to the positional relationship between a work table for holding a work and a dressing stone for dressing a fixed abrasive wire, and a method of dressing a fixed abrasive wire in such a fixed abrasive wire saw.
Means for solving the problems
In order to solve the above problem, according to the present invention, there is provided a fixed abrasive wire saw comprising: a fixed abrasive wire in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rollers having rotating shafts arranged in parallel with each other; a workpiece supply table for fixing the workpiece; and a dresser stone for dressing the fixed abrasive wire, wherein the fixed abrasive wire is spirally wound between the grooved rollers, a wire row is formed in a feeding direction parallel to the rotating shaft and arranged at a predetermined pitch interval, and the fixed abrasive wire saw cuts the workpiece by pushing the wire row and the workpiece fixed on the workpiece supply table against each other while the fixed abrasive wire is moved at a high speed in a core line direction of the fixed abrasive wire, wherein the workpiece supply table is provided with a workpiece fixing portion for fixing the workpiece, and the dresser stone is fixed at least on an upstream side in the feeding direction from the workpiece fixing portion so as to be adjacent to the workpiece fixing portion.
In this case, it is preferable that the dresser stone is composed of a 1 st dresser stone and a 2 nd dresser stone, and the 1 st dresser stone is fixed on the workpiece supply table on an upstream side of the workpiece fixing portion in the feeding direction adjacent to the workpiece fixing portion, and the 2 nd dresser stone is fixed on a downstream side of the workpiece fixing portion adjacent to the workpiece fixing portion.
Further, it is more preferable that a tip end surface of the 1 st dresser stone facing the string protrudes toward the string side than a tip end surface of the 2 nd dresser stone facing the string.
Further, according to the present invention, there is provided a fixed abrasive wire saw comprising: a fixed abrasive wire in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rollers having rotating shafts arranged in parallel with each other; and a workpiece supply table for fixing a workpiece, the fixed abrasive wire being spirally wound between the grooved rollers and forming a wire row arranged at a predetermined pitch interval in a feeding direction parallel to the rotation axis, the fixed abrasive wire saw cutting the workpiece by causing the wire row and the workpiece fixed to the workpiece supply table to collide with each other while the fixed abrasive wire is caused to travel at a high speed in a core line direction of the fixed abrasive wire, wherein the workpiece supply table is provided with a workpiece fixing portion for fixing the workpiece and a grindstone fixing portion for fixing a grindstone for dressing the fixed abrasive wire, the grindstone fixing portion being disposed adjacent to the workpiece fixing portion on at least an upstream side in the feeding direction from the workpiece fixing portion.
In this case, it is preferable that the grinding stone fixing portion is composed of a 1 st grinding stone fixing portion and a 2 nd grinding stone fixing portion, and in the work supply table, the 1 st grinding stone fixing portion is disposed on an upstream side of the work fixing portion in the feeding direction adjacent to the work fixing portion, and the 2 nd grinding stone fixing portion is disposed on a downstream side of the work fixing portion adjacent to the work fixing portion.
Further, according to the present invention, there is provided a dressing method for fixing an abrasive wire, comprising the steps of: forming a wire array in which fixed abrasive wire grains, abrasive grains of which are adhered to the surface of a core wire by metal plating, are spirally wound between a plurality of grooved rollers having rotating shafts arranged in parallel with each other, and the wire array is arranged at a predetermined pitch interval in a feeding direction parallel to the rotating shafts; fixing a workpiece on a workpiece supply table, and fixing a dressing stone adjacent to the workpiece at a position at least on an upstream side in the feeding direction of the workpiece in the workpiece supply table; and a step of trimming the fixed abrasive wire on the upstream side in the feeding direction from the workpiece by the trimming stone by moving the workpiece supply table and the wire array in a direction approaching each other while moving the fixed abrasive wire at a high speed in the core line direction thereof, and cutting the workpiece by the wire array formed of the trimmed fixed abrasive wire.
In the dressing method according to the present invention, it is preferable that a tip end surface of the dressing stone fixed to the work supply table, the tip end surface facing the string, be projected toward the string side than a tip end surface of the work fixed to the work supply table, the tip end surface facing the string.
Preferably, the dresser stone is composed of a 1 st dresser stone and a 2 nd dresser stone, and the 1 st dresser stone is fixed on the workpiece supply table adjacent to the workpiece on an upstream side of the workpiece in the feeding direction, and the 2 nd dresser stone is fixed on the workpiece adjacent to the workpiece on a downstream side of the workpiece.
In this case, it is more preferable that the tip end surface of the 1 st dressing stone facing the string protrudes toward the string side than the tip end surface of the 2 nd dressing stone facing the string, and the tip end surface of the 2 nd dressing stone and the tip end surface of the workpiece are disposed at substantially the same distance from the string.
Effects of the invention
According to the present invention described above, the fixed abrasive wire is trimmed by the dressing stone before the workpiece is cut by the wire row of the fixed abrasive wire. Therefore, the workpiece can be cut after the metal plating layer covering the surface of the abrasive grains of the fixed abrasive wire is removed to expose the cutting edge of the abrasive grains, and the cutting efficiency of the workpiece can be improved. Further, since the workpiece and the dresser stone are fixed to the same workpiece supply table, excellent effects are exhibited in terms of operation such as maintenance, and for example, not only complication of the structure can be avoided, but also replacement of the dresser stone and replacement of the workpiece can be performed simultaneously.
Drawings
Fig. 1 is a schematic view showing one embodiment of a fixed-abrasive wire saw according to the present invention.
Fig. 2 is a schematic perspective view showing a cutting portion of the fixed abrasive wire saw of fig. 1.
Fig. 3 is a schematic partially enlarged view schematically showing a state before cutting of the workpiece in the cutting portion.
Fig. 4 is a schematic partially enlarged view schematically showing a state of dressing of the fixed abrasive wire performed before the start of cutting the workpiece in the cutting section.
Fig. 5 is a schematic partially enlarged view schematically showing a state at the start of cutting of the workpiece in the cutting portion.
Fig. 6 is a schematic partially enlarged view schematically showing a state in the middle of cutting of the workpiece in the cutting portion.
Description of the reference numerals
1: fixing the abrasive grain wire saw; 2: fixing abrasive grain wires; 3-5: a grooved roll; 6: a work supply table; 15: a workpiece fixing portion; 16: 1 st grindstone fixing part; 17: a 2 nd grindstone fixing section; 30: arranging silk; 1, finishing stone; 41a, a front end face; 42: 2, dressing stone; 42a, a front end face; w is a workpiece; w1: a front end face.
Detailed Description
Fig. 1-6 illustrate one embodiment of a fixed abrasive wire saw of the present invention. As shown in fig. 1 and 2, the fixed abrasive wire saw 1 of the present embodiment includes: a fixed abrasive wire 2 in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rollers 3-5 having rotating shafts arranged in parallel with each other; a workpiece supply table 6 to which a workpiece W is fixed; and dressing stones 41 and 42 for dressing the fixed abrasive wire 2 by contacting the fixed abrasive wire 2, wherein the workpiece W is pressed against the wire array 30 to be sliced into a plurality of wafers, and the wire array 30 is formed by winding the fixed abrasive wire 2 between grooved rollers 3 to 5. In the present embodiment, as shown in fig. 2 or 3, a silicon ingot formed in a rectangular column shape long in one direction is used as the workpiece W.
The fixed abrasive wire 2 is formed by bonding hard fine abrasive grains made of, for example, diamond or cubic boron nitride (cBN) to a core wire made of a piano wire or the like by plating with a metal such as nickel, and the entire surface of the abrasive grains is covered with a metal plating layer in the fixed abrasive wire 2 in a new state before dressing. In the present embodiment, the fixed abrasive wire 2 having an average wire diameter of about 0.1mm is used, and thus cutting accuracy can be improved and the cutting margin can be suppressed.
As shown in fig. 1, both end sides of the fixed abrasive wire 2 are wound around a pair of wire bobbins 7 and 8, respectively, and a cutting portion 20 for slicing the workpiece W is formed between the wire bobbins 7 and 8. Further, between the pair of thread bobbins 7 and 8, the thread running path 9 on the side of one thread bobbin 7 and the thread running path 10 on the side of the other thread bobbin 8 are provided with the cutting portion 20 interposed therebetween. The wire running paths 9 and 10 are provided with: a traverse device 11 for performing a traverse operation of the fixed abrasive wire 2 so as to appropriately pay out the fixed abrasive wire 2 from the wire reels 7, 8 and appropriately wind the wire on the wire running path; a dancer roller 12 for imparting a constant tension to the running yarn 2; and guide rollers 13 for guiding the fixed abrasive wire 2 before and after the adjustment roller 12.
Motors, not shown, are connected to the yarn bobbins 7 and 8, respectively. By driving the motor, the fixed abrasive wire 2 is fed out from one of the wire bobbins 7, is wound around the grooved rollers 3 to 5 disposed in the cutting section 20, is then collected by the other wire bobbin 8, and travels between the wire bobbins 7 and 8 at a high speed in the direction of the core wire.
The fixed abrasive wire 2 may travel only in one direction (a direction from one wire barrel 7 to the other wire barrel 8) in the core line direction thereof, or may travel in a reciprocating manner. In the present embodiment, the fixed abrasive wire 2 is configured to reciprocate between the wire barrels 7 and 8 when the workpiece W is cut. Then, by setting the discharge amount of the fixed abrasive grain yarn 2 supplied from one of the yarn bobbins 7 to be longer than the winding amount of the yarn bobbin 7, new fixed abrasive grain yarns are sequentially discharged from the yarn bobbin 7 and supplied to the yarn row 30. In the present embodiment, the feed amount is set to about 400m, the return amount is set to 397m, and the fixed abrasive wire 2 supplied to the wire row 30 is replaced with a new fixed abrasive wire 2 of 3m for each round.
As shown in fig. 1 or 2, 3 rollers are disposed in the cutting portion 20, and the roller assembly includes: the first grooved roll 3 positioned on one side of the wire running path 9, the second grooved roll 4 positioned on the other side of the wire running path 10, and the 3 rd grooved roll 5 positioned below the first and second grooved rolls 3 and 4. The 3 grooved rolls 3-5 are arranged such that their axes of rotation are parallel to each other, and each axis of rotation is located at the apex of a triangle when viewed from the axial direction.
Further, a plurality of annular wire grooves 14 for positioning the fixed abrasive wire 2 are formed at predetermined pitches on the outer peripheral surface of the grooved rollers 3 to 5, and the fixed abrasive wire 2 is spirally wound while engaging with the wire grooves 14 of the grooved rollers 3 to 5. Thus, the wire rows 30 in which the fixed abrasive wire 2 is arranged at a predetermined pitch interval in the feeding direction parallel to the rotation axis are formed between the 1 st and 2 nd grooved rollers 3 and 4. In the wire row 30 of the present embodiment, the fixed abrasive wire 2 having a length of about 800m is stretched between the grooved rollers 3 to 5, and the fixed abrasive wire 2 is arranged in parallel at a pitch of 0.3mm in the feeding direction.
In the cutting section 20, the work supply table 6 formed to be laterally long is disposed above the center of the wire array 30 in the direction of the feed direction, and is driven to be movable up and down with respect to the wire array 30 by a table feed device, not shown. As the workpiece supply table 6 descends toward the wire row 30, the workpiece W fixed to the lower surface of the workpiece supply table 6 is pressed against the wire row 30 and cut, and as a result, the workpiece W is simultaneously sliced into a plurality of wafers. Further, when the workpiece W is pressed against the wire train 30, the wire train 30 may be raised toward the workpiece W fixed to the workpiece supply table 6 by a lifting and lowering device that raises and lowers the grooved rollers 3 to 5 while maintaining the relative positional relationship of the grooved rollers 3 to 5, for example, 3. Alternatively, the workpiece supply table 6 and the wire row 30 may be configured to be movable close to each other.
As shown in fig. 3, the work supply table 6 is provided with a work fixing portion 15 for fixing the work W and grinding stone fixing portions 16 and 17 for fixing the dressing stones 41 and 42.
The workpiece fixing portion 15 is provided at a substantially central position in the feeding direction on the lower surface side of the workpiece supply table 6 facing the wire row 30 (lower side in fig. 1), and one side surface of the workpiece W extending in the longitudinal direction is attached in the feeding direction. Further, a substrate such as a copying (ダ ミ ー) material is attached to the work fixing portion 15, and the work W is fixed via the substrate by an adhesive or the like.
The grinding wheel fixing portions 16 and 17 are composed of a 1 st grinding wheel fixing portion 16 and a 2 nd grinding wheel fixing portion 17, and are provided on the lower surface side of the workpiece supply table 6, respectively, in the same manner as the workpiece fixing portion 15. Specifically, the 1 st grinding stone fixing portion 16 is disposed adjacent to the workpiece fixing portion 15 on the upstream side of the workpiece fixing portion 15 in the feeding direction, and the 2 nd grinding stone fixing portion 17 is disposed adjacent to the workpiece fixing portion 15 on the downstream side of the workpiece fixing portion 15 in the feeding direction.
The dressing stones 41 and 42 are fixed to the stone fixing portions 16 and 17 with an adhesive or the like. As shown in fig. 3, the 1 st dresser stone 41 is attached to the 1 st grinding stone fixing portion 16, and the 2 nd dresser stone 42 is attached to the 2 nd grinding stone fixing portion 17. Accordingly, as shown in fig. 2, the 1 st dressing stone 41 is disposed on the upstream side of the workpiece fixing portion 15 to which the workpiece W is fixed, and the 2 nd dressing stone 42 is disposed on the downstream side of the workpiece fixing portion 15 in the feeding direction. These dressing stones 41 and 42 are each in the form of a substantially rectangular flat plate (substantially rectangular parallelepiped), and are arranged such that, in a state in which the workpiece W is fixed, one side end surface in the plate thickness direction thereof faces each side end surface in the longitudinal direction of the workpiece W.
At this time, the tip end surface 41a of the 1 st dresser stone 41 facing the string 30 protrudes toward the string 30 side from the tip end surface 42a of the 2 nd dresser stone 42 facing the string 30. In a state where the workpiece W is fixed to the workpiece fixing portion 15, the front end surface 41a of the 1 st dresser stone is projected toward the wire row 30 side from the front end surface W1 of the workpiece W facing the wire row 30. On the other hand, the tip face 42a of the 2 nd dresser stone 42 is spaced apart from the tip face W1 of the workpiece W and the wire row 30 by substantially the same distance in a state where the workpiece W is fixed to the workpiece fixing portion 15, and as a result, both the tip faces 42a, W1 are substantially flush with each other. The dressing stones 41 and 42 may be fixed to the grinding stone fixing portions 16 and 17 via a contour (ダ ミ ー).
The 1 st and 2 nd dressing stones 41 and 42 are arranged between the fixed abrasive wire 2 positioned on the most upstream side in the feeding direction and the fixed abrasive wire 2 similarly positioned on the most downstream side in the feeding direction among the plurality of groups of fixed abrasive wires 2 forming the wire array 30. In this way, the 1 st truing stone 41 can tru a new (unused) fixed abrasive wire 2 located on the upstream side of the workpiece W in the feeding direction, remove the metal plating covering the tips (cutting edges) of the abrasive grains, and expose the cutting edges of the abrasive grains before cutting the workpiece W. Further, as the fixed abrasive wire 2 reciprocates, the fixed abrasive wire 2 is trimmed again by the truing stone 41 after cutting the workpiece W, and thus clogging of the hole due to the cutting chips caused by cutting the workpiece W can be suppressed. Further, the fixed abrasive wire after cutting the workpiece W is also dressed by the 2 nd dressing stone 42, and chips attached to the fixed abrasive wire are removed to suppress the clogging of the hole.
In addition, the dressing stones 41 and 42 are used as appropriate, taking into consideration the kind, particle diameter, concentration, and metal material of the plating layer of the abrasive grains adhered to the core material of the fixed abrasive wire 2. As described above, since the 1 st dressing stone 41 is mainly a dressing stone for filing the abrasive grains of the fixed abrasive wire 2 before starting cutting, it may be a dressing stone coarser than the 2 nd dressing stone 42. The thickness of the dresser stone can be appropriately selected according to the wire diameter, feed amount, and the like of the fixed abrasive wire 2. For example, in the present embodiment, by using a dressing stone having a thickness of about 30mm for the 1 st dressing stone 41, about 100 fixed abrasive wire 2 groups can be dressed in a state where the wire rows 30 are in contact.
When cutting the workpiece W, first, as described above, the fixed abrasive wire 2 is attached to the wire saw 1 and spirally wound between the grooved rolls 3 to 5, thereby forming the wire row 30. Further, the workpiece W is fixed to the workpiece fixing portion 15 of the workpiece supply table 6, the 1 st dresser stone 41 is fixed to the 1 st grinding stone fixing portion 16 similarly provided to the workpiece supply table 6, and the 2 nd dresser stone 42 is fixed to the 2 nd grinding stone fixing portion 17. Further, as shown in fig. 3, the 1 st and 2 nd dressing stones 41 and 42 are disposed in a state where the workpiece W and the dressing stones 41 and 42 are fixed, respectively, such that the one side end surface thereof is not in contact with the side end surfaces of the workpiece W, but may be disposed in a state where either one of the dressing stones 41 and 42 is in contact with the workpiece W, or both the dressing stones 41 and 42 are in contact with the workpiece W, for example.
When a motor, not shown, is driven to rotate the pair of yarn bobbins 7 and 8, the fixed abrasive wire 2 travels at a high speed in the core line direction thereof, and the wire row 30 is sequentially fed in the feeding direction. Then, the workpiece supply table 6 is gradually lowered toward the wire row 30, and the fixed abrasive wire 2 on the upstream side and the downstream side in the feeding direction of the workpiece W is trimmed by the two trimming stones 41 and 42, so that the workpiece W fixed to the workpiece fixing portion 15 of the workpiece supply table 6 is gradually cut at the pitch interval of the wire row 30, and finally, the workpiece W is cut into a plurality of wafers at the same time.
The dressing method of the fixed abrasive wire 2 will be described more specifically. First, the work supply table 6 is lowered a predetermined distance from the state before the work supply table 6 is lowered (fig. 3) toward the running wire row 30. As shown in fig. 4, the group of the plurality of fixed abrasive wires 2 arranged in the wire array 30 on the upstream side of the workpiece W in the feeding direction is brought into contact with the 1 st dresser stone 41 (the front end surface 4la) protruding toward the wire array 30 from the front end surface of the workpiece W. At this time, the wire array 30 is in a non-contact state with respect to the workpiece W. By gradually lowering the workpiece supply table 6 while maintaining this state, the fixed abrasive wire 2 cuts into the 1 st dressing stone 41 to form the groove 18, and is dressed in the groove 18 of the dressing stone 41, whereby the metal plating layer covering the surface of the abrasive grains is cut off, and the cutting edge of the abrasive grains is exposed.
In the dressing performed before the start of cutting the workpiece W, the wire 2 is dressed at least to the extent of the length thereof that is caught in the range of contact with the workpiece W at the time of cutting (i.e., to the extent of the length thereof that is caught between the 1 st and 2 nd dressing stones 41 and 42). Thus, the cutting of the workpiece W can be started from the fixed abrasive wire 2 in which the edge of the first starting abrasive is exposed. In addition, in the dressing, the fixed abrasive wire 2 may be moved at a high speed to one side without reciprocating, thereby reducing the time taken for dressing.
After finishing the dressing of the fixed abrasive wire 2 by the 1 st dressing stone 41 before starting the cutting, the cutting of the workpiece W is started by bringing the distal end surface W1 of the workpiece W into contact with the plurality of groups of fixed abrasive wires 2 (fig. 5). At this time, as described above, the group of the plurality of fixed abrasive wires 2 cutting the workpiece W has been dressed by the 1 st dressing stone 41, and the tips (cutting edges) of the abrasive grains are exposed. Therefore, the fixed abrasive wire 2 can be prevented from being insufficiently sharpened at the initial stage of cutting, generation of chips generated on the cut surface of the workpiece W can be suppressed, and the workpiece W can be cut stably and with high accuracy. Further, the fixed abrasive wire 2 constituting the wire array 30 is also brought into contact with the 2 nd dressing stone 42, and the 2 nd dressing stone 42 is cut into the workpiece together with the 1 st dressing stone 41, whereby a plurality of groups of the fixed abrasive wires 2 are dressed also on the downstream side of the workpiece W, as on the upstream side of the workpiece W. Then, by further lowering the work supply table 6, as shown in fig. 6, the fixed abrasive wire 2 is cut into the 1 st and 2 nd dressing stones 41 and 42 to form the grooves 18 and 19 for dressing, and is cut into the work W to form the groove 50 for gradual cutting. When the cutting of the workpiece W is finally completed and a new cutting of the workpiece W is performed, the workpiece W after the cutting process carried on the workpiece supply table 6 and the dresser stones 41 and 42 are replaced with new ones, and the workpiece W is cut while dressing with the abrasive wire 2 fixed is performed according to the above-described procedure.
As described above, according to the fixed abrasive wire saw 1 of the present embodiment, the 1 st dressing stone 41 can be fixed to the workpiece supply table 6 so as to be adjacent to the workpiece W at the upstream side of the workpiece W in the feeding direction of the fixed abrasive wire 2, and the fixed abrasive wire 2 can be dressed and the abrasive grains can be filed before the workpiece W starts to be cut with a simple configuration. Further, by providing the dresser stone 41 on the same workpiece supply table 6 together with the workpiece W, maintenance work such as replacement of the workpiece W and the dresser stone can be easily performed, and excellent effects are exhibited in terms of operation.
In the present embodiment, two finishing stones 41 and 42 are provided, but the present invention is not limited to this. For example, when the workpiece W is a low-viscosity block, if it is not necessary to perform dressing on the downstream side of the string 30, the 2 nd dressing stone 42 may not be provided, and only the 1 st dressing stone 41 may be provided on the 1 st grinding stone fixing portion 16. The shape of the dresser stone may be, for example, a dresser stone having an arc shape facing the tip end surface of the string row 30, or a dresser stone having a sharp (or wide) shape such as an acute angle shape facing the string row 30, and an appropriate shape may be selected. In the case where the fixed abrasive wire 2 is reciprocated as in the present embodiment, the reciprocating length (feed amount, return amount) of the fixed abrasive wire 2 is appropriately set in accordance with the length of the workpiece W, the material, and the like. Although the workpiece W is a square-columnar workpiece, a columnar block, for example, may be used when it is fixed to the workpiece fixing portion 15.
Although the fixed abrasive wire saw and the method of dressing a fixed abrasive wire according to the present invention have been described above, the present invention is not limited to the above-described embodiments, and it is needless to say that various design changes may be made without departing from the scope of the claims.
Claims (9)
1. A fixed abrasive wire saw, the fixed abrasive wire saw comprising: a fixed abrasive wire in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rollers having rotating shafts arranged in parallel with each other; and a workpiece supply table provided with a workpiece fixing portion for fixing a workpiece, wherein a dressing stone for dressing the fixed abrasive wire is fixed to the workpiece supply table,
the fixed abrasive wire is spirally wound between the grooved rollers, and a wire row is formed in which the fixed abrasive wire is arranged at a predetermined pitch interval in a feeding direction parallel to the rotary shaft, and the fixed abrasive wire saw cuts the workpiece while dressing the fixed abrasive wire by pushing the wire row against the workpiece and a dressing stone fixed to the workpiece supply table while the fixed abrasive wire is moved at a high speed in a core line direction of the fixed abrasive wire,
it is characterized in that the preparation method is characterized in that,
the dressing stone and the workpiece fixing portion provided on the workpiece supply table are adjacent to each other in the feeding direction, and the dressing stone is disposed at least on an upstream side in the feeding direction from the workpiece fixing portion.
2. The fixed abrasive wire saw of claim 1,
the dresser stone is composed of a 1 st dresser stone and a 2 nd dresser stone, and the 1 st dresser stone is fixed on the upstream side of the workpiece fixing portion in the feeding direction adjacent to the workpiece fixing portion, and the 2 nd dresser stone is fixed on the downstream side of the workpiece fixing portion adjacent to the workpiece fixing portion.
3. The fixed abrasive wire saw of claim 2,
the tip end surface of the 1 st dresser stone facing the string projects toward the string side more than the tip end surface of the 2 nd dresser stone facing the string.
4. A fixed abrasive wire saw, the fixed abrasive wire saw comprising: a fixed abrasive wire in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rollers having rotating shafts arranged in parallel with each other; and a workpiece supply table provided with a workpiece fixing portion for fixing a workpiece and a grindstone fixing portion for fixing a dresser, the fixed abrasive wire being spirally wound between the grooved rollers to form a wire row arranged at a predetermined pitch in a feeding direction parallel to the rotary shaft, the fixed abrasive wire saw being configured to cut the workpiece while dressing the fixed abrasive wire by pushing the wire row against the workpiece fixed to the workpiece supply table and the dresser fixed to the grindstone fixing portion while moving the fixed abrasive wire at a high speed in a core line direction of the fixed abrasive wire,
it is characterized in that the preparation method is characterized in that,
the grinding wheel fixing portion and the workpiece fixing portion provided on the workpiece supply table are adjacent to each other in the feeding direction, and the grinding wheel fixing portion is disposed at least on an upstream side in the feeding direction from the workpiece fixing portion.
5. The fixed abrasive wire saw of claim 4,
the grinding stone fixing portion is composed of a 1 st grinding stone fixing portion and a 2 nd grinding stone fixing portion, and in the work supply table, the 1 st grinding stone fixing portion is disposed on an upstream side of the work fixing portion in the feeding direction adjacent to the work fixing portion, and the 2 nd grinding stone fixing portion is disposed on a downstream side of the work fixing portion adjacent to the work fixing portion.
6. A dressing method for fixing abrasive wires is characterized by comprising the following steps:
forming a wire array in which fixed abrasive wire grains, abrasive grains of which are adhered to the surface of a core wire by metal plating, are spirally wound between a plurality of grooved rollers having rotating shafts arranged in parallel with each other, and the wire array is arranged at a predetermined pitch interval in a feeding direction parallel to the rotating shafts;
fixing the workpiece and the dressing stone to the workpiece supply table in a state where the workpiece and the dressing stone are adjacent to each other in the feeding direction and the dressing stone is arranged at least on an upstream side in the feeding direction from the workpiece;
and a step of trimming the fixed abrasive wire on the upstream side in the feeding direction from the workpiece by the trimming stone by moving the workpiece supply table and the wire array in a direction approaching each other while moving the fixed abrasive wire at a high speed in the core line direction thereof, and cutting the workpiece by the wire array formed of the trimmed fixed abrasive wire.
7. The method of dressing a fixed abrasive wire according to claim 6,
the end face of the dresser stone fixed to the work supply table, which faces the string, protrudes toward the string side than the end face of the work fixed to the work supply table, which faces the string.
8. The method of dressing a fixed abrasive wire according to claim 6 or 7,
the dressing stone is composed of a 1 st dressing stone and a 2 nd dressing stone, and on the workpiece supply table, the 1 st dressing stone is fixed on an upstream side of the workpiece in the feeding direction adjacent to the workpiece, and the 2 nd dressing stone is fixed on a downstream side of the workpiece adjacent to the workpiece.
9. The method of dressing a fixed abrasive wire according to claim 8,
the tip end surface of the 1 st dressing stone facing the string protrudes toward the string side than the tip end surface of the 2 nd dressing stone facing the string, and the tip end surface of the 2 nd dressing stone and the tip end surface of the workpiece facing the string are arranged at substantially the same distance from the string.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015212079A JP6270796B2 (en) | 2015-10-28 | 2015-10-28 | Fixed abrasive wire saw and fixed abrasive wire dressing method |
| JP2015-212079 | 2015-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106626111A CN106626111A (en) | 2017-05-10 |
| CN106626111B true CN106626111B (en) | 2020-01-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610970750.0A Active CN106626111B (en) | 2015-10-28 | 2016-10-28 | Fixed abrasive wire saw and method for dressing fixed abrasive wire |
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| Country | Link |
|---|---|
| JP (1) | JP6270796B2 (en) |
| KR (1) | KR20170049411A (en) |
| CN (1) | CN106626111B (en) |
| MY (1) | MY177757A (en) |
| TW (1) | TWI729010B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6693460B2 (en) * | 2017-04-04 | 2020-05-13 | 信越半導体株式会社 | Work cutting method |
| CN107457452A (en) * | 2017-09-28 | 2017-12-12 | 张家港天工机械制造有限公司 | One kind is put the first edge on a knife or a pair of scissors rewinding machine edging device |
| JP6819621B2 (en) * | 2018-01-25 | 2021-01-27 | 信越半導体株式会社 | Work cutting method and wire saw |
| CN110421213A (en) * | 2019-07-03 | 2019-11-08 | 苏州锦美川自动化科技有限公司 | Put the first edge on a knife or a pair of scissors at a high speed rewinding machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1128654A (en) * | 1997-07-04 | 1999-02-02 | Tokyo Seimitsu Co Ltd | Dressing method and device of fixed abrasive grain wire saw |
| JP2011031386A (en) * | 2009-07-10 | 2011-02-17 | Mitsubishi Chemicals Corp | Electro-deposition fixed abrasive grain wire and crystal slicing method using the same |
| KR20140090906A (en) * | 2013-01-10 | 2014-07-18 | 주식회사 엘지실트론 | Wire saw and method for slicing ingot using the same |
| JP2015009346A (en) * | 2013-07-02 | 2015-01-19 | パナソニック株式会社 | Electrolytic dressing method and electrolytic dressing device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2343155B1 (en) * | 2003-10-27 | 2014-08-20 | Mitsubishi Denki Kabushiki Kaisha | Multi-wire saw |
| JP4411062B2 (en) * | 2003-12-25 | 2010-02-10 | 株式会社アライドマテリアル | Super abrasive wire saw winding structure, super abrasive wire saw cutting device, and super abrasive wire saw winding method |
| JPWO2013172353A1 (en) * | 2012-05-15 | 2016-01-12 | 電気化学工業株式会社 | Laminate processing apparatus and processing method |
-
2015
- 2015-10-28 JP JP2015212079A patent/JP6270796B2/en active Active
-
2016
- 2016-10-07 TW TW105132579A patent/TWI729010B/en active
- 2016-10-21 MY MYPI2016703868A patent/MY177757A/en unknown
- 2016-10-25 KR KR1020160138958A patent/KR20170049411A/en not_active Application Discontinuation
- 2016-10-28 CN CN201610970750.0A patent/CN106626111B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1128654A (en) * | 1997-07-04 | 1999-02-02 | Tokyo Seimitsu Co Ltd | Dressing method and device of fixed abrasive grain wire saw |
| JP2011031386A (en) * | 2009-07-10 | 2011-02-17 | Mitsubishi Chemicals Corp | Electro-deposition fixed abrasive grain wire and crystal slicing method using the same |
| KR20140090906A (en) * | 2013-01-10 | 2014-07-18 | 주식회사 엘지실트론 | Wire saw and method for slicing ingot using the same |
| JP2015009346A (en) * | 2013-07-02 | 2015-01-19 | パナソニック株式会社 | Electrolytic dressing method and electrolytic dressing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6270796B2 (en) | 2018-01-31 |
| KR20170049411A (en) | 2017-05-10 |
| MY177757A (en) | 2020-09-23 |
| TW201726323A (en) | 2017-08-01 |
| CN106626111A (en) | 2017-05-10 |
| JP2017080849A (en) | 2017-05-18 |
| TWI729010B (en) | 2021-06-01 |
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