TWI726060B - 透明板表面檢查裝置、透明板表面檢查方法、及玻璃板之製造方法 - Google Patents

透明板表面檢查裝置、透明板表面檢查方法、及玻璃板之製造方法 Download PDF

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Publication number
TWI726060B
TWI726060B TW106107004A TW106107004A TWI726060B TW I726060 B TWI726060 B TW I726060B TW 106107004 A TW106107004 A TW 106107004A TW 106107004 A TW106107004 A TW 106107004A TW I726060 B TWI726060 B TW I726060B
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Taiwan
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main surface
stripe pattern
light source
transparent board
inspection
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TW106107004A
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English (en)
Chinese (zh)
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TW201738551A (zh
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木村友紀
有田祐介
池野田稔
東山明弘
北山大介
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日商Ａｇｃ股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/898—Irregularities in textured or patterned surfaces, e.g. textiles, wood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Wood Science & Technology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW106107004A 2016-04-13 2017-03-03 透明板表面檢查裝置、透明板表面檢查方法、及玻璃板之製造方法 TWI726060B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP??2016-080332 2016-04-13
JP2016080332A JP6642223B2 (ja) 2016-04-13 2016-04-13 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法

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TW201738551A TW201738551A (zh) 2017-11-01
TWI726060B true TWI726060B (zh) 2021-05-01

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TW106107004A TWI726060B (zh) 2016-04-13 2017-03-03 透明板表面檢查裝置、透明板表面檢查方法、及玻璃板之製造方法

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JP (1) JP6642223B2 (ko)
KR (1) KR102238388B1 (ko)
CN (1) CN107289878B (ko)
TW (1) TWI726060B (ko)

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* Cited by examiner, † Cited by third party
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WO2020016991A1 (ja) * 2018-07-19 2020-01-23 株式会社Ｆｕｊｉ 検査設定装置および検査設定方法
CN110849912B (zh) * 2019-11-25 2021-03-02 厦门大学 玻璃缺陷显影装置和玻璃缺陷检测设备
CN112098426B (zh) * 2020-11-17 2021-06-29 北京领邦智能装备股份公司 高精度的成像系统、方法、图像采集装置及检测设备
CN112759230B (zh) * 2020-12-31 2021-11-12 广州广钢气体能源股份有限公司 一种玻璃窑炉及具有其的玻璃制品生产装置
CN112880737B (zh) * 2021-01-14 2023-05-30 四川雅吉芯电子科技有限公司 一种单晶硅外延片检测用集成系统

Citations (2)

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CN101051619A (zh) * 2006-04-03 2007-10-10 三星电子株式会社 基板检查装置及使用其的基板检查方法
CN102445168A (zh) * 2010-09-30 2012-05-09 旭硝子株式会社 表面形状的检查方法及检查装置

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JP3348133B2 (ja) * 1995-01-26 2002-11-20 株式会社リコー ディスク外観検査方法及びその装置
WO2002018980A2 (en) * 2000-09-01 2002-03-07 Applied Process Technologies Optical system for imaging distortions in moving reflective sheets
JP4633245B2 (ja) * 2000-11-06 2011-02-16 住友化学株式会社 表面検査装置及び表面検査方法
US6630996B2 (en) * 2000-11-15 2003-10-07 Real Time Metrology, Inc. Optical method and apparatus for inspecting large area planar objects
JP2004109106A (ja) * 2002-07-22 2004-04-08 Fujitsu Ltd 表面欠陥検査方法および表面欠陥検査装置
JP4645068B2 (ja) * 2004-06-04 2011-03-09 旭硝子株式会社 表面形状の検査方法および検査装置
US20100028567A1 (en) * 2006-12-14 2010-02-04 Hidemi Suizu Glass sheet defect detection device, glass sheet manufacturing method, glass sheet, glass sheet quality judging device, and glass sheet inspection method
JP5034891B2 (ja) 2007-11-21 2012-09-26 旭硝子株式会社 透明板状体の形状測定装置及び板ガラスの製造方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
CN201611253U (zh) * 2010-01-18 2010-10-20 聊城大学 一种残币面积检测系统
JP2012021781A (ja) * 2010-07-12 2012-02-02 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
JP2012127675A (ja) * 2010-12-13 2012-07-05 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
JP2016085034A (ja) * 2013-02-19 2016-05-19 旭硝子株式会社 透明板状体表面検査用撮像システム
KR102263507B1 (ko) * 2013-12-27 2021-06-11 에이지씨 가부시키가이샤 형상 측정 장치, 형상 측정 방법 및 유리판의 제조 방법
CN103913468B (zh) * 2014-03-31 2016-05-04 湖南大学 生产线上大尺寸lcd玻璃基板的多视觉缺陷检测设备及方法

Patent Citations (2)

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CN101051619A (zh) * 2006-04-03 2007-10-10 三星电子株式会社 基板检查装置及使用其的基板检查方法
CN102445168A (zh) * 2010-09-30 2012-05-09 旭硝子株式会社 表面形状的检查方法及检查装置

Also Published As

Publication number Publication date
JP6642223B2 (ja) 2020-02-05
KR102238388B1 (ko) 2021-04-09
CN107289878A (zh) 2017-10-24
CN107289878B (zh) 2021-06-11
KR20170117313A (ko) 2017-10-23
JP2017191003A (ja) 2017-10-19
TW201738551A (zh) 2017-11-01

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