TWI718204B - 測量測試氣體進氣口處之壓力的裝置 - Google Patents

測量測試氣體進氣口處之壓力的裝置 Download PDF

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Publication number
TWI718204B
TWI718204B TW105136961A TW105136961A TWI718204B TW I718204 B TWI718204 B TW I718204B TW 105136961 A TW105136961 A TW 105136961A TW 105136961 A TW105136961 A TW 105136961A TW I718204 B TWI718204 B TW I718204B
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TW
Taiwan
Prior art keywords
inlet
vacuum
pressure
gas inlet
test gas
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Application number
TW105136961A
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English (en)
Chinese (zh)
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TW201721119A (zh
Inventor
傑瑪 布朗
魯道夫 傑多
諾博 莫實
官特 史密斯
丹尼爾 維奇格
Original Assignee
德商英飛康股份有限公司
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Publication of TW201721119A publication Critical patent/TW201721119A/zh
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Publication of TWI718204B publication Critical patent/TWI718204B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
TW105136961A 2015-11-11 2016-11-11 測量測試氣體進氣口處之壓力的裝置 TWI718204B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015222213.6A DE102015222213A1 (de) 2015-11-11 2015-11-11 Druckmessung am Prüfgaseinlass
DE102015222213.6 2015-11-11

Publications (2)

Publication Number Publication Date
TW201721119A TW201721119A (zh) 2017-06-16
TWI718204B true TWI718204B (zh) 2021-02-11

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ID=57288406

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105136961A TWI718204B (zh) 2015-11-11 2016-11-11 測量測試氣體進氣口處之壓力的裝置

Country Status (8)

Country Link
US (2) US20180328809A1 (enExample)
EP (1) EP3374746B1 (enExample)
JP (1) JP6883036B2 (enExample)
KR (1) KR102684152B1 (enExample)
CN (1) CN108369151B (enExample)
DE (1) DE102015222213A1 (enExample)
TW (1) TWI718204B (enExample)
WO (1) WO2017081136A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
CN110007013A (zh) * 2019-02-01 2019-07-12 中国石油天然气集团公司 一种输气管道气体组分实时分析系统及实时分析方法
CN111707423B (zh) * 2020-06-18 2022-04-15 苏州镓港半导体有限公司 真空系统测漏方法及用于真空系统的测漏装置
DE102020132896A1 (de) * 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
GB2606392B (en) * 2021-05-07 2024-02-14 Edwards Ltd A fluid routing for a vacuum pumping system
DE102021119256A1 (de) 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102022115562A1 (de) * 2022-06-22 2023-12-28 Inficon Gmbh Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung
GB2632683A (en) * 2023-08-17 2025-02-19 Thermo Fisher Scient Bremen Gmbh Mass spectrometer comprising a vacuum system and a method of operation
WO2025057320A1 (ja) * 2023-09-13 2025-03-20 株式会社島津製作所 試料導入システム
CN118010261A (zh) * 2023-12-27 2024-05-10 北京中科科仪股份有限公司 一种氦质谱检漏仪以及喷氦检漏方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585548A (en) * 1992-08-26 1996-12-17 Leybold Aktiengesellschaft Counterflow leak-detector unit with a high-vacuum pump
US6014892A (en) * 1997-04-03 2000-01-18 Alcatel Tracer gas leak detector
US7254989B2 (en) * 2003-05-30 2007-08-14 Inficon Gmbh Leak detecting device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746074B2 (ja) * 1984-11-27 1995-05-17 日電アネルバ株式会社 真空計
EP0283543B1 (de) 1987-03-27 1991-12-11 Leybold Aktiengesellschaft Lecksuchgerät und Betriebsverfahren dazu
DE4140366A1 (de) 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
DE19735250A1 (de) * 1997-08-14 1999-02-18 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher
CN100529705C (zh) * 2003-06-11 2009-08-19 瓦里安有限公司 用于大泄漏测试的方法和装置
JP4374241B2 (ja) * 2003-12-05 2009-12-02 アディクセン スカンディナビア エービー 対象物の密封性を測定するためのシステム及び方法
DE102006034735A1 (de) * 2006-07-27 2008-01-31 Inficon Gmbh Lecksuchgerät
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
US8661875B2 (en) * 2012-05-07 2014-03-04 Caterpillar Inc. System and method to detect accumulator loss of precharge
CN103207050B (zh) * 2013-04-15 2015-06-03 中国航天科技集团公司第五研究院第五一〇研究所 一种可延长密封器件候检时间的质谱检漏预充氦法
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585548A (en) * 1992-08-26 1996-12-17 Leybold Aktiengesellschaft Counterflow leak-detector unit with a high-vacuum pump
US6014892A (en) * 1997-04-03 2000-01-18 Alcatel Tracer gas leak detector
US7254989B2 (en) * 2003-05-30 2007-08-14 Inficon Gmbh Leak detecting device

Also Published As

Publication number Publication date
KR20180088833A (ko) 2018-08-07
JP6883036B2 (ja) 2021-06-02
CN108369151A (zh) 2018-08-03
DE102015222213A1 (de) 2017-05-11
US20200264066A1 (en) 2020-08-20
EP3374746B1 (de) 2020-07-15
JP2018533736A (ja) 2018-11-15
TW201721119A (zh) 2017-06-16
US20180328809A1 (en) 2018-11-15
CN108369151B (zh) 2021-06-04
EP3374746A1 (de) 2018-09-19
KR102684152B1 (ko) 2024-07-10
WO2017081136A1 (de) 2017-05-18

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