KR102684152B1 - 시험 가스 입구에서의 압력 측정 - Google Patents

시험 가스 입구에서의 압력 측정 Download PDF

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Publication number
KR102684152B1
KR102684152B1 KR1020187016459A KR20187016459A KR102684152B1 KR 102684152 B1 KR102684152 B1 KR 102684152B1 KR 1020187016459 A KR1020187016459 A KR 1020187016459A KR 20187016459 A KR20187016459 A KR 20187016459A KR 102684152 B1 KR102684152 B1 KR 102684152B1
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South Korea
Prior art keywords
inlet
pressure
vacuum
vacuum pump
line
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Korean (ko)
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KR20180088833A (ko
Inventor
할마르 브룬스
루돌프 게르다우
노베르트 모세르
귄터 슈미츠
다니엘 베트지그
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인피콘 게엠베하
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
KR1020187016459A 2015-11-11 2016-11-10 시험 가스 입구에서의 압력 측정 Active KR102684152B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015222213.6A DE102015222213A1 (de) 2015-11-11 2015-11-11 Druckmessung am Prüfgaseinlass
DE102015222213.6 2015-11-11
PCT/EP2016/077242 WO2017081136A1 (de) 2015-11-11 2016-11-10 Druckmessung am prüfgaseinlass

Publications (2)

Publication Number Publication Date
KR20180088833A KR20180088833A (ko) 2018-08-07
KR102684152B1 true KR102684152B1 (ko) 2024-07-10

Family

ID=57288406

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187016459A Active KR102684152B1 (ko) 2015-11-11 2016-11-10 시험 가스 입구에서의 압력 측정

Country Status (8)

Country Link
US (2) US20180328809A1 (enExample)
EP (1) EP3374746B1 (enExample)
JP (1) JP6883036B2 (enExample)
KR (1) KR102684152B1 (enExample)
CN (1) CN108369151B (enExample)
DE (1) DE102015222213A1 (enExample)
TW (1) TWI718204B (enExample)
WO (1) WO2017081136A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
CN110007013A (zh) * 2019-02-01 2019-07-12 中国石油天然气集团公司 一种输气管道气体组分实时分析系统及实时分析方法
CN111707423B (zh) * 2020-06-18 2022-04-15 苏州镓港半导体有限公司 真空系统测漏方法及用于真空系统的测漏装置
DE102020132896A1 (de) * 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
GB2606392B (en) * 2021-05-07 2024-02-14 Edwards Ltd A fluid routing for a vacuum pumping system
DE102021119256A1 (de) 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102022115562A1 (de) * 2022-06-22 2023-12-28 Inficon Gmbh Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung
GB2632683A (en) * 2023-08-17 2025-02-19 Thermo Fisher Scient Bremen Gmbh Mass spectrometer comprising a vacuum system and a method of operation
WO2025057320A1 (ja) * 2023-09-13 2025-03-20 株式会社島津製作所 試料導入システム
CN118010261A (zh) * 2023-12-27 2024-05-10 北京中科科仪股份有限公司 一种氦质谱检漏仪以及喷氦检漏方法

Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2007500352A (ja) * 2003-05-30 2007-01-11 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 漏れ検出装置

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JPH0746074B2 (ja) * 1984-11-27 1995-05-17 日電アネルバ株式会社 真空計
EP0283543B1 (de) 1987-03-27 1991-12-11 Leybold Aktiengesellschaft Lecksuchgerät und Betriebsverfahren dazu
DE4140366A1 (de) 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
DE19735250A1 (de) * 1997-08-14 1999-02-18 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher
CN100529705C (zh) * 2003-06-11 2009-08-19 瓦里安有限公司 用于大泄漏测试的方法和装置
JP4374241B2 (ja) * 2003-12-05 2009-12-02 アディクセン スカンディナビア エービー 対象物の密封性を測定するためのシステム及び方法
DE102006034735A1 (de) * 2006-07-27 2008-01-31 Inficon Gmbh Lecksuchgerät
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
US8661875B2 (en) * 2012-05-07 2014-03-04 Caterpillar Inc. System and method to detect accumulator loss of precharge
CN103207050B (zh) * 2013-04-15 2015-06-03 中国航天科技集团公司第五研究院第五一〇研究所 一种可延长密封器件候检时间的质谱检漏预充氦法
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007500352A (ja) * 2003-05-30 2007-01-11 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 漏れ検出装置

Also Published As

Publication number Publication date
TWI718204B (zh) 2021-02-11
KR20180088833A (ko) 2018-08-07
JP6883036B2 (ja) 2021-06-02
CN108369151A (zh) 2018-08-03
DE102015222213A1 (de) 2017-05-11
US20200264066A1 (en) 2020-08-20
EP3374746B1 (de) 2020-07-15
JP2018533736A (ja) 2018-11-15
TW201721119A (zh) 2017-06-16
US20180328809A1 (en) 2018-11-15
CN108369151B (zh) 2021-06-04
EP3374746A1 (de) 2018-09-19
WO2017081136A1 (de) 2017-05-18

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