TWI717320B - Coating device and dropping method using the device - Google Patents
Coating device and dropping method using the device Download PDFInfo
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- TWI717320B TWI717320B TW104118291A TW104118291A TWI717320B TW I717320 B TWI717320 B TW I717320B TW 104118291 A TW104118291 A TW 104118291A TW 104118291 A TW104118291 A TW 104118291A TW I717320 B TWI717320 B TW I717320B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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Abstract
提供一種塗佈裝置及使用該裝置之滴下方法,於進行複 數點同時塗佈時,能容易變更滴下點間之距離。 A coating device and a dropping method using the device are provided, which can be used for coating When several dots are applied at the same time, the distance between dripping points can be easily changed.
滴下裝置及使用該裝置之方法,該滴下裝置係具備 計量液體材料之計量部、往返移動於計量部內之柱塞、具備複數個具有吐出口之噴嘴之噴嘴部、朝計量部供給液體材料之供給流路、以及對計量部與噴嘴部及計量部與供給流路之連通進行切換之切換閥,其特徵在於:於上述噴嘴部,以使一個噴嘴與鄰接之噴嘴之間隔皆相同之方式配置上述噴嘴,並以使一個噴嘴與垂直線構成之角度θ皆相同之方式傾斜配置上述噴嘴。 The dripping device and the method of using the device, the dripping device is provided with The metering section that measures the liquid material, the plunger that reciprocates in the metering section, the nozzle section with a plurality of nozzles with discharge ports, the supply flow path for supplying the liquid material to the metering section, and the connection between the metering section and the nozzle section and the metering section The switching valve for switching the communication of the supply flow path is characterized in that the nozzles are arranged in the nozzle section so that the intervals between one nozzle and the adjacent nozzles are the same, and the angle θ formed by the one nozzle and the vertical line The above nozzles are arranged obliquely in the same way.
Description
本發明係關於塗佈裝置及使用該裝置之滴下方法,詳細而言,關於可進行能變更滴下點間之距離之複數點同時塗佈之塗佈裝置及使用該裝置之滴下方法。 The present invention relates to a coating device and a dropping method using the device, and in detail, it relates to a coating device capable of simultaneously coating a plurality of points capable of changing the distance between dropping points and a dropping method using the device.
於液晶面板之製造步驟中,作為形成液晶層之方法之一,具有被稱為滴下注入法(ODF)之方法。該方法係於貼合前將液晶材料定量滴下於進行貼合之2片基板之一側之後,於真空中進行貼合之方法。 In the manufacturing steps of the liquid crystal panel, as one of the methods of forming the liquid crystal layer, there is a method called the drop injection method (ODF). This method is a method in which the liquid crystal material is quantitatively dropped on one side of the two substrates to be bonded before bonding, and then bonded in a vacuum.
液晶材料之朝基板71之滴下係採用以下之方式進行,即、將複數個液晶材料之小滴(液滴72)配置成矩陣狀,以使液晶材料收容於為了攔阻液晶材料而形成為矩形框狀之密封材料73之框內(參照圖7)。基本上藉由一台滴下裝置各一滴地滴下,但為了提高處理速度,也可同時滴下複數液滴。例如,作為利用一台裝置同時進行複數滴吐出之吐出裝置,具有如下之裝置。
The dropping of the liquid crystal material onto the
專利文獻1揭示一種噴注式分配器,其具有可連結於液體材料源之分配器本體,分配器本體具備流體通道、與流體通道連通之流體通道出口、及設於流體通道出口附近之閥座,且具有可選擇性地接觸於閥座而可活動地設於流體通道內之閥構件,且具有閥驅動裝置,其能使閥構件動作地結合,選擇性地使閥構件移動而
可使閥構件接觸或脫離閥座,且具有與通道出口相鄰而結合於分配器本體之噴出噴嘴,噴出噴嘴具有噴嘴本體、及設於噴嘴本體且與流體通道出口連通之複數個噴嘴出口,當閥構件與閥座接觸時,對流體通道出口內之液體材料提供能充分使複數個液滴自複數個噴嘴出口同時且迅速地噴出之運動量。
專利文獻2揭示有一種線型噴頭,其特徵在於具有複數個噴頭單元,噴頭單元排列有複數個朝紙張吐出墨水之噴嘴,且在該複數個噴頭單元形成一體化之線型噴頭中,各噴頭單元中之至少一部分之噴嘴具有相對於紙張之法線方向之傾斜,且該傾斜係朝向使自該噴嘴吐出之墨水降落於與鄰接之噴頭單元之邊界附近之方向。
專利文獻1:日本專利特開2007-167844號公報 Patent Document 1: Japanese Patent Laid-Open No. 2007-167844
專利文獻2:日本專利特開2003-25565號公報 Patent Document 2: Japanese Patent Laid-Open No. 2003-25565
習知,於使用具有複數個噴嘴之滴下裝置進行複數滴之同時塗佈之情況下,為了變更滴下點間之距離或塗佈圖案形狀,需要交換配置有噴嘴之噴嘴部本身,但對噴嘴部本身進行交換係屬困難。另一方面,若不交換噴嘴部本身而進行滴下塗佈,會有對品質產生很大之影響之情況。尤其是,於呈矩陣狀地塗佈液晶滴以使液晶材料收容於為了攔阻液晶材料而形成為矩形框狀之密封材料 之框內之情況下,若滴下點間之距離或圖案形狀不能容易進行改變,當密封材料之框之大小有變化時,則無法適宜地保持密封材料與液晶滴之距離,於貼合時恐有對液晶之擴散產生不均之問題。 Conventionally, in the case of simultaneous application of multiple drops using a dripping device with multiple nozzles, in order to change the distance between the dripping points or the shape of the coating pattern, it is necessary to exchange the nozzle itself with the nozzles. The exchange itself is difficult. On the other hand, if the nozzle part itself is not exchanged and the drip coating is performed, the quality may be greatly affected. In particular, the liquid crystal droplets are applied in a matrix to accommodate the liquid crystal material in a sealing material formed in a rectangular frame shape to block the liquid crystal material In the case of the inside of the frame, if the distance between the dripping points or the pattern shape cannot be easily changed, when the size of the frame of the sealing material changes, the distance between the sealing material and the liquid crystal drop cannot be properly maintained, which may cause the lamination There is a problem of uneven diffusion of liquid crystal.
如專利文獻2,若採用使噴嘴本身之形狀變形之構成,則在各噴嘴間吐出條件相異,恐有對於量及位置無法進行高精度之塗佈之問題。
As in
因此,本發明之目的在於提供一種塗佈裝置及使用該裝置之滴下方法,於進行複數點同時塗佈時,能容易變更滴下點間之距離。 Therefore, the object of the present invention is to provide a coating device and a dropping method using the device, which can easily change the distance between the dropping points when multiple dots are simultaneously coated.
滴下裝置之本發明,係具備計量液體材料之計量部、往返移動於計量部內之柱塞、具備複數個具有吐出口之噴嘴之噴嘴部、朝計量部供給液體材料之供給流路、以及對計量部與噴嘴部及計量部與供給流路之連通進行切換之切換閥者,其特徵在於:於上述噴嘴部,以使一個噴嘴與鄰接之噴嘴之間隔皆相同之方式配置上述噴嘴,並以使一個噴嘴與垂直線構成之角度θ皆相同之方式傾斜配置上述噴嘴。 The present invention of the dripping device is provided with a metering section for measuring liquid materials, a plunger that reciprocally moves in the metering section, a nozzle section with a plurality of nozzles with discharge ports, a supply flow path for supplying liquid materials to the metering section, and a countermeasure A switching valve for switching the communication between the nozzle portion and the metering portion and the supply flow path is characterized in that the nozzle portion is arranged in such a manner that the interval between one nozzle and the adjacent nozzle is the same, and The above-mentioned nozzles are arranged obliquely in the same way as the angle θ formed by one nozzle and the vertical line.
上述滴下裝置中,其特徵亦可為在於:上述噴嘴係包含n2(n為2以上之自然數)個之噴嘴,此外,其特徵亦可為在於:於上述噴嘴部,以使上述噴嘴之吐出口相對於上述噴嘴部之鉛垂方向中心朝向外側之方式,配置上述噴嘴,或者,於上述噴嘴部,以使上述噴嘴之吐出口相對於上述噴嘴部之鉛垂方向中心朝向內側之方式,配置上述噴嘴。 In the above-mentioned dropping device, it may be characterized in that: the nozzle includes n 2 (n is a natural number of 2 or more) nozzles, and in addition, it may be characterized in that: in the nozzle portion, the nozzle The nozzle is arranged in such a manner that the discharge port faces the outer side with respect to the vertical direction center of the nozzle portion, or the nozzle portion is arranged such that the discharge port of the nozzle faces the inner side with respect to the vertical direction center of the nozzle portion, Configure the above nozzles.
上述滴下裝置中,其特徵亦可為在於:上述噴嘴部具備噴嘴塊,該噴嘴塊形成有一個流入流路、及連通流入流路與上述吐出口 之分歧流路,於該噴嘴塊安裝上述噴嘴。 In the above-mentioned dripping device, it may be characterized in that: the nozzle portion is provided with a nozzle block, and the nozzle block is formed with an inflow channel and a communication channel between the inflow channel and the discharge port. For the branch flow path, install the above nozzle in the nozzle block.
塗佈裝置之本發明,其特徵在於具備:上述滴下裝置;工件台,其供載置基板;XYZ驅動裝置,其使上述滴下裝置與工件台相對地移動;及控制部,其具有記憶裝置。 The present invention of the coating device is characterized by comprising: the above-mentioned dripping device; a work stage on which a substrate is placed; an XYZ driving device that relatively moves the dripping device and the work stage; and a control section having a memory device.
於上述塗佈裝置中,其特徵亦可為在於:具備複數個上述滴下裝置,一個滴下裝置之噴嘴數、噴嘴之間隔或噴嘴之角度θ,係與其他滴下裝置之噴嘴之間隔或噴嘴之角度θ不同,或者,其特徵亦可為在於,具備複數個上述滴下裝置,全部之滴下裝置之噴嘴數、噴嘴之間隔及噴嘴之角度θ相同。 In the above-mentioned coating device, it may also be characterized in that: a plurality of the above-mentioned dripping devices are provided, the number of nozzles of one dripping device, the interval between nozzles, or the angle θ of nozzles, is the interval or the angle between nozzles of other dripping devices θ is different, or it may be characterized in that a plurality of the above-mentioned dripping devices are provided, and the number of nozzles of all the dripping devices, the interval between nozzles, and the angle θ of the nozzles are the same.
滴下方法之本發明,係使用上述塗佈裝置之滴下方法,其特徵在於:基於輸入值調節上述工件台與上述滴下裝置之垂直距離,藉此對自上述噴嘴吐出之液滴之滴下點間距離(L1、L2)進行調節,在將上述工件台與上述滴下裝置之垂直距離保持一定之狀態下,一面使上述滴下裝置與上述工件台於水平方向相對移動,一面將液體材料滴下於工件。 The present invention of the dripping method is a dripping method using the above-mentioned coating device, and is characterized in that the vertical distance between the workpiece table and the dripping device is adjusted based on an input value, thereby adjusting the distance between the dripping points of the droplets discharged from the nozzle (L1, L2) Adjust to drop the liquid material on the workpiece while keeping the vertical distance between the workpiece table and the dripping device constant, while the dripping device and the workpiece table are relatively moved in the horizontal direction.
上述滴下方法中,其特徵亦可為在於:於上述控制部之記憶裝置記憶有複數個上述工件台及上述滴下裝置之垂直距離與液滴之滴下點間距離(L1、L2)之相關關係模式,上述輸入值係上述相關關係模式之選擇值。 In the above-mentioned dropping method, it may also be characterized in that: a plurality of correlation patterns between the vertical distance between the workpiece stage and the dropping device and the distance between the dropping points (L1, L2) of the droplet are stored in the memory device of the control unit , The above input value is the selected value of the above correlation model.
自其他之觀點之滴下方法之本發明,係使用塗佈裝置之滴下方法,該塗佈裝置之特徵在於:具備複數個上述滴下裝置,全部之滴下裝置之噴嘴數、噴嘴之間隔及噴嘴之角度θ相同,該滴下方法之特徵在於:利用上述複數個滴下裝置之所有滴下裝置進行相同之滴下塗佈,藉以進行多面裁切。在此,其特徵亦可為在於:上述工件 係液晶面板基板,上述液體材料係液晶。 The present invention of the dripping method from other viewpoints is a dripping method using a coating device. The coating device is characterized by having a plurality of the above-mentioned dripping devices, the number of nozzles of all the dripping devices, the interval between the nozzles and the angle of the nozzles The θ is the same, and the dropping method is characterized in that all the dropping devices of the plurality of dropping devices are used to perform the same dropping and coating, thereby performing multi-sided cutting. Here, it can also be characterized by: the above-mentioned workpiece It is a liquid crystal panel substrate, and the liquid material is liquid crystal.
根據本發明,在進行複數點同時塗佈時,可容易變更滴下點間之距離。 According to the present invention, when multiple dots are simultaneously coated, the distance between the dripping points can be easily changed.
1‧‧‧滴下裝置 1‧‧‧Drip device
2‧‧‧計量部 2‧‧‧Measurement Department
3‧‧‧柱塞 3‧‧‧Plunger
4‧‧‧噴嘴 4‧‧‧Nozzle
5‧‧‧吐出口 5‧‧‧Exit
6‧‧‧噴嘴部 6‧‧‧Nozzle
7‧‧‧切換閥 7‧‧‧Switching valve
8‧‧‧大徑部 8‧‧‧Dajing Department
9‧‧‧本體 9‧‧‧Ontology
10‧‧‧柱塞驅動構件 10‧‧‧Plunger drive component
11‧‧‧柱塞移動方向 11‧‧‧Plunger movement direction
12‧‧‧流路A 12‧‧‧Flow Path A
13‧‧‧流路B 13‧‧‧Flow Path B
14‧‧‧流路C 14‧‧‧Flow Path C
15‧‧‧供給流路 15‧‧‧Supply flow path
16‧‧‧延伸構件 16‧‧‧Extension member
17‧‧‧容器 17‧‧‧Container
18‧‧‧液體配管 18‧‧‧Liquid piping
19‧‧‧液體 19‧‧‧Liquid
20‧‧‧氣泡除去機構 20‧‧‧Bubble removal mechanism
21‧‧‧液體之液流 21‧‧‧Liquid flow
22‧‧‧氣體之氣流 22‧‧‧Flow of Gas
23‧‧‧作動氣體供給配管 23‧‧‧ Actuating gas supply piping
24‧‧‧容器支撐構件 24‧‧‧Container support member
25‧‧‧基座板 25‧‧‧Base plate
26‧‧‧連接構件 26‧‧‧Connecting member
27‧‧‧噴嘴塊 27‧‧‧Nozzle block
28‧‧‧噴嘴連接面 28‧‧‧Nozzle connecting surface
29‧‧‧流入流路 29‧‧‧Inflow path
30~33‧‧‧分歧流路A~D 30~33‧‧‧Branch flow path A~D
34~37‧‧‧噴嘴A~D 34~37‧‧‧Nozzle A~D
38~41‧‧‧吐出口A~D 38~41‧‧‧Exit A~D
42‧‧‧噴嘴塊之垂直軸 42‧‧‧Vertical axis of nozzle block
43‧‧‧吐出口中心軸 43‧‧‧Discharge outlet central axis
44‧‧‧飛翔軌跡 44‧‧‧Flying Path
45‧‧‧液滴 45‧‧‧Droplets
46‧‧‧基板(塗佈面) 46‧‧‧Substrate (coating surface)
47‧‧‧分歧流路 47‧‧‧Branch flow path
51‧‧‧塗佈裝置 51‧‧‧Coating device
52‧‧‧X軸驅動裝置 52‧‧‧X axis drive device
53‧‧‧Y軸驅動裝置 53‧‧‧Y-axis drive device
54‧‧‧Z軸驅動裝置 54‧‧‧Z axis drive device
55‧‧‧X移動方向(左右方向) 55‧‧‧X moving direction (left and right direction)
56‧‧‧Y移動方向(前後方向) 56‧‧‧Y moving direction (front and rear direction)
57‧‧‧Z移動方向(上下方向) 57‧‧‧Z moving direction (up and down direction)
58‧‧‧工件台 58‧‧‧Workpiece table
59‧‧‧X軸滑塊 59‧‧‧X axis slider
60‧‧‧Y軸滑塊 60‧‧‧Y-axis slider
61‧‧‧樑 61‧‧‧Liang
62‧‧‧樑支撐構件 62‧‧‧Beam support member
63‧‧‧架台 63‧‧‧ stand
71‧‧‧基板 71‧‧‧Substrate
72‧‧‧液滴 72‧‧‧Droplets
73‧‧‧密封材料 73‧‧‧Sealing material
L1、L2、L1b、L2b、L1c、L2c、La、Lb、Lc‧‧‧距離 L1, L2, L1b, L2b, L1c, L2c, La, Lb, Lc‧‧‧Distance
H、Ha、Hb、Hc‧‧‧高度 H, Ha, Hb, Hc‧‧‧Height
θ、θa、θb、θc、θd‧‧‧角度 θ, θ a , θ b , θ c , θ d ‧‧‧angle
圖1為第1實施形態之滴下裝置之概略側視圖。 Fig. 1 is a schematic side view of the dripping device of the first embodiment.
圖2(a)為於第1實施形態之滴下裝置中使用之噴嘴部之仰視圖,(b)為沿A-A線所作之剖面圖,及(c)為沿B-B線所作之剖面圖。 Figure 2 (a) is a bottom view of the nozzle used in the dripping device of the first embodiment, (b) is a cross-sectional view taken along the line A-A, and (c) is a cross-sectional view taken along the line B-B.
圖3為說明使用第1實施形態之滴下裝置進行滴下時之滴下高度與滴下點間距離之關係之說明圖。(a)為顯示滴下高度Ha時之俯視圖,(b)為顯示滴下高度Hb時之俯視圖,及(c)為顯示滴下高度Hc時之俯視圖。 Fig. 3 is an explanatory diagram for explaining the relationship between the dropping height and the distance between the dropping points when dropping using the dropping device of the first embodiment. (a) is a plan view when the dropping height Ha is displayed, (b) is a plan view when the dropping height Hb is displayed, and (c) is a plan view when the dropping height Hc is displayed.
圖4為第1實施形態之塗佈裝置之概略立體圖。 Fig. 4 is a schematic perspective view of the coating device of the first embodiment.
圖5(a)為第2實施形態之噴嘴部之仰視圖,(b)為沿C-C線所作之剖面圖,及(c)為沿D-D線所作之剖面圖。 Fig. 5 (a) is a bottom view of the nozzle part of the second embodiment, (b) is a cross-sectional view taken along the line C-C, and (c) is a cross-sectional view taken along the line D-D.
圖6(a)為第3實施形態之噴嘴部之仰視圖,及(b)為沿E-E線所作之剖面圖。 Fig. 6(a) is a bottom view of the nozzle part of the third embodiment, and (b) is a cross-sectional view taken along the line E-E.
圖7為說明於液晶面板之製造步驟中將液體滴下於基板時之狀態之說明圖。 FIG. 7 is an explanatory diagram illustrating the state when the liquid is dropped on the substrate in the manufacturing step of the liquid crystal panel.
以下,對用以實施本發明之形態例進行說明。 Hereinafter, a description will be given of a form example for implementing the present invention.
第1實施形態之滴下裝置1具備自噴嘴部6之鉛垂方向中心等
間隔配置之4個噴嘴4,且藉由調節噴嘴4與基板46之距離,可調節降落於基板46之4個滴下點之距離。該滴下裝置1係安裝於具有XYZ驅動裝置(52、53、54)之塗佈裝置51,一面相對於載置有塗佈對象物之工件台進行相對移動一面進行塗佈作業。
The
以下,對滴下裝置1及塗佈裝置51之構成及動作進行詳細說明。
Hereinafter, the configuration and operation of the
圖1為顯示第1實施形態之滴下裝置1之概略側視圖。
Fig. 1 is a schematic side view showing a
第1實施形態之滴下裝置1係柱塞式滴下裝置,其具備:管狀之計量部2;柱塞3,其內接於計量部2;噴嘴部6,其具有複數個噴嘴4;切換閥7,其切換計量部2與噴嘴部6、及計量部2與供給流路15之連通;及側視L字形之本體9,其內置有柱塞驅動裝置。
The
計量部2係於內部具有圓柱狀之空間即計量孔,柱塞3能滑動自如地插入計量孔。
The
柱塞3係於端部具有大徑部8之棒狀構件,與大徑部8相反側之端部係朝計量部2內插入。柱塞3係藉由柱塞驅動構件10把持大徑部8之附近,且藉由使柱塞驅動構件10移動之柱塞驅動裝置而可朝符號11方向移動。藉由使柱塞3密接滑動於計量部2之內壁,可朝計量部2內吸入液體19,或自計量部2推出液體19。
The
切換閥7具備與供給流路15連通之流路A12、與計量部2連通之流路B13、及與噴嘴部6連通之流路C14,且可選擇性地對連通供給流路15與計量部2之第一位置、或連通計量部2與噴嘴部6之第二位置進行切換。其中,切換閥7既可作為旋轉閥
而構成,也可作為滑閥而構成。再者,較佳為,流路B13及流路C14係配置為與柱塞移動方向(符號11)為相同方向。這是為了於吐出時無浪費地向液體19傳遞柱塞3所產生之力。
The switching
供給流路15係與用以供給貯存於容器17之液體19之液體配管18連通之流路,且內設於延伸構件16。延伸構件16係固設於本體9,以使供給流路15與流路A12氣密性地連通。於供給流路15與液體配管18之間設置有氣泡除去機構20。作為氣泡除去機構20,例如,可使用具有連通於液體材料供給部側之第1流路、連通於計量部側之第2流路、及連通第1流路與第2流路且寬度較第1流路寬之本體,且第1流路之排出口配置於較第2流路之吸入口上方之位置之機構(參照申請人之專利第4898778號)。再者,也可不設置氣泡除去機構20。
The
於貯存液體19之容器17連接有供給用以壓送液體19之作動氣體之作動氣體供給配管23。
An actuating
本體9係安裝於基座板25,於該基座板25之上部安裝有固定容器17之容器支撐構件24。基座板25係安裝於用以與後述之XYZ驅動裝置(52、53、54)或固定支架等連接之連接構件26。
The
於圖2,分別顯示於第1實施形態之滴下裝置中使用之噴嘴部6之仰視圖,暨沿A-A線所作之剖面圖及沿B-B線所作之剖面圖。
Fig. 2 shows a bottom view of the
第1實施形態之噴嘴部6具備剖面為五邊形之噴嘴塊27、及配置於噴嘴塊27之下面即噴嘴連接面28之4個噴嘴4而構成。該噴嘴部6係可裝卸自如地裝設於本體9之下面。
The
以下為方便說明,稱4個噴嘴4為噴嘴A~D(34~37),稱4個噴嘴之吐出口5為吐出口A~D(38~41)。
For the convenience of explanation, the four
於噴嘴塊27之內部形成有與滴下裝置1之流路C14連通之流入流路29、及自流入流路29朝噴嘴A~D(34~37)分歧之分歧流路A~D(30~33)。
Inside the
噴嘴塊27之斜面即下面被劃分成4個區塊,分別於一個區塊內安裝一個噴嘴4(符號34~37)。第1實施形態中,如圖2所示,藉由使4個相同大小之方形平面以下面之中心為頂點之配置,形成噴嘴連接面28。亦即,自底面觀察時,噴嘴塊27係正方形。噴嘴塊27之下面之區塊數,不限於例示之區塊數,例如可設定2~16等任意之複數個區塊,但較佳為,區塊數之數量為n2(n為2以上之自然數)。較佳為,噴嘴塊27之下面之區塊數與噴嘴4之數量係設定為相同。
The inclined surface of the
安裝於斜面之各噴嘴4,係以自底面觀察時構成為正方形之方式等間隔地配置。亦即,噴嘴A34、噴嘴B35、噴嘴C36及噴嘴D37配置為矩陣狀。無論選擇哪個噴嘴4,一個噴嘴4與相鄰之其他噴嘴4之間隔皆相同。
The
此外,各噴嘴4具有一個吐出口,吐出口中心軸43係以相對於噴嘴連接面28成為垂直之方式安裝。第1實施形態中,噴嘴連接面28之各面相對於噴嘴塊27之垂直軸42分別傾斜既定之角度,因此吐出口A~D(38~41)分別相對於噴嘴塊27之鉛垂方向中心朝向外側。噴嘴連接面28之各面之傾斜角度係均等。亦即,圖2所示之θa、θb、θc、θd係設為全部相同(θa=θb=θc=θd)。換言之,一個噴嘴4與垂直線構成之角度θ(例如為5~60度),無論選擇哪一
個噴嘴4皆相同。
In addition, each
此外,吐出口A~D(38~41)係配置為朝向噴嘴塊27之各個角。亦即,配置為使吐出口A~D(38~41)位於底面28之對角線上(參照圖2(a))。藉此,連結自吐出口A~D(38~41)吐出之4個液滴45而形成之四角形,係成為與噴嘴塊27之噴嘴A~D(34~37)之配置為相似形狀之四角形。較佳為,分歧流路A~D(30~33)係形成為與噴嘴A~D(34~37)之各中心軸(吐出口中心軸43)同軸,以使液體19之吐出能圓滑地進行。
In addition, the discharge ports A to D (38 to 41) are arranged to face each corner of the
<吐出動作> <Spit Action>
對以上說明之滴下裝置1之吐出動作,概述如下。(1)準備(初期填充步驟)
The discharge operation of the
首先,於不將柱塞3插入計量部2內之狀態下,將液體19填充至計量部2之上端。然後將柱塞3插入計量部2內,且固定於柱塞驅動構件10。接著,藉由切換閥7連通計量部2與噴嘴部6,使柱塞3自吐出口5朝噴嘴部6之方向(進出方向)移動至吐出液體19為止。
First, in a state where the
(2)吐出步驟 (2) Spit out step
藉由切換閥7連通計量部2與噴嘴部6,且使柱塞3朝進出方向高速移動,藉此自4個吐出口5飛射吐出相同量之液體19。
The
(3)吸引步驟 (3) Attraction step
藉由切換閥7連通供給流路15與計量部2,使柱塞3朝與進出方向相反之方向(後退方向)移動,將液體19朝計量部2內吸引。
The switching
藉由反覆地進行上述(2)及(3)之步驟,而可進行連續定量吐出之塗佈作業。再者,上述(2)及(3)之步驟,無論哪一者先開始都可 以。 By repeating the steps (2) and (3) above, the coating operation of continuous quantitative discharge can be performed. Furthermore, the steps (2) and (3) above, no matter which one starts first Take.
圖3為顯示說明使用第1實施形態之滴下裝置1進行滴下時之噴嘴部6之高度(H)與滴下點間距離(L)之關係之說明圖。圖3中,上側之圖顯示自側面觀察時之圖,下側之圖顯示自上面觀察基板46時之俯視圖。再者,圖3僅對噴嘴部6簡略描述。
Fig. 3 is an explanatory diagram illustrating the relationship between the height (H) of the
自噴嘴4之吐出口5排出之液滴45,由於噴嘴4傾斜既定之角度,因此一面描繪拋物線狀之飛翔軌跡44,一面到達作為塗佈面即基板46。由於離噴嘴部6之中心等間隔配置之4個噴嘴4呈放射狀均等地傾斜,因此塗佈於基板46之液滴45成為配置於正方形之角部之矩形圖案。亦即,如圖3下側所示,縱向之滴下點距離(L1)與橫向之滴下點距離(L2)相同(L1=L2)。
Since the droplet 45 discharged from the
此外,由於噴嘴4傾斜既定之角度而描繪拋物線狀之飛翔軌跡44,因此藉由改變噴嘴部6(吐出口5)與基板46之間的距離(換言之,噴嘴部6之高度(H)),即可改變縱向及橫向之滴下點間距離(L1、L2)。
In addition, since the
在此,以描繪於中央之(b)為基準。(b)之情況中,於自基板46至吐出口5之距離為Hb時,縱向之滴下點距離為L1b,橫向之滴下點距離為L2b。若如(a)般降低噴嘴部6,由於液滴45於呈抛物線狀擴展之前到達基板46,因此與(b)之情況比較,滴下點間距離變短(La<Lb)。
Here, the (b) drawn in the center is used as a reference. In the case of (b), when the distance from the substrate 46 to the
另一方面,若如(c)般昇高噴嘴部6,液滴45於呈抛物線狀擴展之後到達基板46,因此與(b)之情況比較,滴下點間距離變長(Lc>Lb)。
On the other hand, if the
如此,由於各噴嘴4傾斜既定之角度,因此只要改變噴嘴部6之高度(H),即可改變縱向及橫向之滴下點間距離(L1、L2)。
In this way, since each
與噴嘴4之傾斜(θ)、噴嘴部6之高度(H)、暨縱向及橫向之滴下點間距離(L1、L2)之關係,可藉由預先之實驗製作成表或曲線圖,且預先記憶於控制部(未圖示)之記憶裝置。藉由此種構成,可基於顯示於顯示裝置(未圖示)之表或曲線圖,藉由變更設定即可容易實現希望之縱向及橫向之滴下點間距離(L1、L2)。根據發明者之實驗,例如將噴嘴4傾斜10度時,若自高度15mm進行吐出,則滴下點間距離(L1、L2)各為7.5mm,若自高度10mm進行吐出,則滴下點間距離(L1、L2)各為6.5mm,若自高度20mm進行吐出,則滴下點間距離(L1、L2)各為8.5mm。
The relationship with the inclination (θ) of the
於圖4顯示具備第1實施形態之滴下裝置1之塗佈裝置51之概略立體圖。
FIG. 4 shows a schematic perspective view of a coating device 51 equipped with the
實施形態之塗佈裝置51主要包括:Z軸驅動裝置54,其可使滴下裝置1朝上下方向(符號57)移動;X軸驅動裝置52,其安裝有Z軸驅動裝置54,可朝左右方向(符號55)移動;Y軸驅動裝置53,其可使設置有X軸驅動裝置52之樑61朝前後方向(符號56)移動;工件台58,其載置基板46;架台63,其配置有上述各驅動裝置(52、53、54)及工件台58;及未圖示之控制部。該塗佈裝置51可實施以下之滴下方法:藉由使控制部基於用戶之輸入值,對工件台58與滴下裝置1之垂直距離進行調節,而調節自各噴嘴4吐出之液滴之滴下點間距離(L1、L2),將工件台58與滴下裝置1之垂直距離保持為一定後,一面使滴下裝置1及工件台58於水平方向相對移動
一面滴下液體材料。其中,滴下於工件上之滴下點,係藉由m1列×m2行之行列所設定,且較佳為,將m1及m2之任一者皆設定為噴嘴數n之倍數(自然數)。
The coating device 51 of the embodiment mainly includes: a Z-
於X軸驅動裝置52設置有夾隔X軸驅動裝置52之X軸滑塊59,可使Z軸驅動裝置54及滴下裝置1移動。並且,於Y軸驅動裝置53之內側分別設置有Y滑塊60,於其上設置有X軸驅動裝置52之樑61係被支撐於樑支撐構件62上而移動。藉由如上述般構成XYZ驅動裝置,可使滴下裝置1相對於基板46相對地移動。本發明中較佳為採用以下之機構作為XYZ驅動裝置,即,藉由調節垂直方向(Z方向)之吐出口位置,對滴下點間距離(L1、L2)進行調節,因而可高精度地進行Z方向之定位。作為此種XYZ驅動裝置,可使用滾珠螺桿與馬達之組合機構、使用線性馬達之機構,利用皮帶或鍊條等傳達動力之機構等。
The X-axis driving device 52 is provided with an
再者,本實施形態中,將驅動裝置作為所謂高架型而構成,但只要為能使滴下裝置1與基板46(工件台58)相對移動者,則可為任何之構成。例如,也可為於工件台58之下部設置X軸驅動裝置52及Y軸驅動裝置53而構成。
In addition, in the present embodiment, the driving device is configured as a so-called overhead type, but any configuration may be adopted as long as it is capable of relatively moving the
第1實施形態中,例示了設置4台滴下裝置1之構成,但設置台數不限於該等,也可為1台,亦可為2台、3台等之複數台。
In the first embodiment, the configuration in which four
於設置複數台之滴下裝置1之構成中,具有設定為全部相同種類之滴下裝置1之情況、及組合不同種類之滴下裝置1之情況。於設置複數台相同之滴下裝置1之情況,可對應於在基板46內製作複數之面板之所謂多面裁切。於組合不同種類之滴下裝置1之情況
(例如,於設置按每個滴下裝置1改變噴嘴4之傾斜角度等之噴嘴部6之情況),與一種類之滴下裝置1比較,可更多種多樣地調整滴下點間距離(L1、L2)。
In the configuration where a plurality of
根據以上說明之第1實施形態之塗佈裝置51,於進行數十個以上之多點同時塗佈時,可容易變更滴下點間之距離(L1、L2)。尤其是於滴下注入法(ODF)中,塗佈裝置51藉由適宜地保持為了攔阻液晶材料而形成為矩形框狀之密封材料與液晶滴之距離,而可使液晶之擴散始終保持均勻。 According to the coating device 51 of the first embodiment described above, it is possible to easily change the distance (L1, L2) between the dripping points when applying dozens or more of multiple dots simultaneously. Especially in the drop injection method (ODF), the coating device 51 appropriately maintains the distance between the sealing material formed in a rectangular frame shape in order to block the liquid crystal material and the liquid crystal drop, so that the diffusion of the liquid crystal can always be kept uniform.
圖5分別顯示於第2實施形態之滴下裝置1中使用之噴嘴部6之仰視圖、沿C-C線所作之剖面圖及沿D-D線所作之剖面圖。以下之說明中,對與第1實施形態相同之部分(噴嘴部6以外之部分),省略說明,只對不同之部分進行說明。
Fig. 5 shows a bottom view, a cross-sectional view along the line C-C, and a cross-sectional view along the line D-D of the
第2實施形態之噴嘴部6係以使4個噴嘴(34~37)之各吐出口(38~41)朝向內側(噴嘴部6之中心側)之方式配置各噴嘴,於此點上,與第1實施形態相異。
In the
第2實施形態中,構成噴嘴連接面28之4個平面,係以使噴嘴部6之中心於仰視時成為最裡面部之方式,相對於噴嘴塊27之垂直軸42傾斜既定之角度。亦即,從底面觀察時之噴嘴A~D(34~37)之吐出口A~D(38~41)成為分別朝向噴嘴塊27之垂直軸42。
In the second embodiment, the four planes constituting the
於噴嘴塊27之內部形成有與滴下裝置1之流路C14連通之流入流路29、及自流入流路29朝噴嘴A~D(34~37)分歧之分歧流路A~D(30~33)之點,與第1實施形態相同。然而,於分歧流路A~D(30~33)在途中被彎曲形成之點,與第1實施形態相異。亦即,
分歧流路A~D(30~33)在與流入流路29連通之上游部分朝自垂直軸42放射之方向形成有流路,且於與噴嘴A~D(34~37)連通之下游部分形成有與噴嘴A~D(34~37)之吐出口中心軸43同軸之流路,上游部分及下游部分經由彎曲部而連接。
Inside the
第2實施形態中,也藉由調節噴嘴與基板之距離,而可調節降落於基板之4個滴下點之距離(L1、L2)。由於第2實施形態係將4個噴嘴(34~37)之各吐出口(38~41)朝向內側,因此適合於在較第1實施形態狹窄之範圍內調節滴下點間距離(L1、L2)之情況。 In the second embodiment, by adjusting the distance between the nozzle and the substrate, the distance (L1, L2) of the four dropping points on the substrate can be adjusted. Since the second embodiment has the outlets (38-41) of the four nozzles (34-37) facing inward, it is suitable for adjusting the distance between the dripping points (L1, L2) in a narrower range than the first embodiment The situation.
圖6分別顯示於第3實施形態之滴下裝置1中使用之噴嘴部6之仰視圖、及沿E-E線所作之剖面圖。以下之說明中,對與第1實施形態相同之部分(噴嘴部6以外之部分),省略說明,只對不同之部分進行說明。
Fig. 6 shows a bottom view of the
第3實施形態之噴嘴部6,係於將平方數之噴嘴4配置成矩陣狀之點與第1實施形態相同,但於噴嘴4之數量為9個之點與第1實施形態相異。第3實施形態之噴嘴部6係將噴嘴塊27之下面即噴嘴連接面28劃分成9個區塊,分別於一個區塊安裝一個噴嘴4。構成噴嘴連接面28之9個區塊,係包含相同大小之方形狀平面,且配置為使下面之中心為頂點。其中,中心之區塊係水平配置。中心以外之8個區塊,係以使噴嘴4之吐出口5朝向外側之方式,相對於噴嘴塊27之垂直軸42傾斜既定之角度。該角度係以使塗佈之液滴45被配置於四角形之角或邊之中點之方式,成為均等。
The
自底面觀察時,噴嘴塊27為正方形。中心以外之8
個噴嘴4,係被配置於較噴嘴塊27小一周之仰視為正方形之邊的中央或頂點。於該正方形之對角線之交點配置有位於中心之噴嘴4。亦即,水平方向鄰接之各噴嘴4之距離相等。
When viewed from the bottom surface, the
第3實施形態中,藉由9個噴嘴4構成噴嘴部6,但噴嘴4之數量不限於該等,可藉由n2(n為2以上之自然數)個噴嘴構成噴嘴部6。亦即,例如,藉由將噴嘴4之數量設定為2以上之平方(即,4、9、16、25、36…),可一面維持矩陣狀之滴下圖案,一面均勻地調整滴下點間距離(L1、L2)。
In the third embodiment, the
第3實施形態中,也藉由調節噴嘴與基板之距離,而可調節降落於基板之9個滴下點之距離(L1、L2)。第3實施形態中,可同時進行9個之滴下,因而相較於第1實施形態,可提高生產性。 In the third embodiment, by adjusting the distance between the nozzle and the substrate, the distance (L1, L2) of the 9 dropping points on the substrate can be adjusted. In the third embodiment, 9 drips can be performed at the same time, and therefore, the productivity can be improved compared to the first embodiment.
6‧‧‧噴嘴部 6‧‧‧Nozzle
27‧‧‧噴嘴塊 27‧‧‧Nozzle block
28‧‧‧噴嘴連接面 28‧‧‧Nozzle connecting surface
29‧‧‧流入流路 29‧‧‧Inflow path
30‧‧‧分歧流路A 30‧‧‧Branch flow path A
31‧‧‧分歧流路B 31‧‧‧Branch flow path B
32‧‧‧分歧流路C 32‧‧‧Branch flow path C
33‧‧‧分歧流路D 33‧‧‧Branch flow path D
34‧‧‧噴嘴A 34‧‧‧Nozzle A
35‧‧‧噴嘴B 35‧‧‧Nozzle B
36‧‧‧噴嘴C 36‧‧‧Nozzle C
37‧‧‧噴嘴D 37‧‧‧Nozzle D
38‧‧‧吐出口A 38‧‧‧Exit A
39‧‧‧吐出口B 39‧‧‧Exit B
40‧‧‧吐出口C 40‧‧‧Exit C
41‧‧‧吐出口D 41‧‧‧Exit D
42‧‧‧噴嘴塊之垂直軸 42‧‧‧Vertical axis of nozzle block
43‧‧‧吐出口中心軸 43‧‧‧Discharge outlet central axis
θa、θb、θc、θd‧‧‧角度 θ a , θ b , θ c , θ d ‧‧‧angle
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