TW202035028A - Liquid material dropping device and method - Google Patents

Abstract

To provide a liquid material dripping device and method by which it is possible to easily change the distance between dripping points when performing coating simultaneously at a plurality of positions. A dripping device and a method in which the dripping device is used, said dripping device being provided with a measuring unit for measuring a liquid material, a plunger that moves back and forth in the measuring unit, a nozzle unit provided with a plurality of nozzles that have discharge holes, a supply path for supplying liquid material to the measuring unit, and a switching valve for switching communication between the measuring unit and the nozzle unit and between the measuring unit and the supply path, wherein adjacent nozzles are arranged in the nozzle unit at equidistant intervals, and the nozzles are disposed at an incline such that an angle [Theta] between each nozzle and a vertical line is the same for all nozzles.

Description

Liquid material dropping device

The present invention relates to a liquid material dropping device, and in detail, it relates to a liquid material dropping device capable of simultaneously applying plural points capable of changing the distance between the dropping points.

In the manufacturing steps of the liquid crystal panel, as one of the methods of forming the liquid crystal layer, there is a method called the drop injection method (ODF). This method is a method in which the liquid crystal material is quantitatively dropped on one side of the two substrates to be bonded before bonding, and then bonded in a vacuum.

The dropping of the liquid crystal material onto the substrate 71 is carried out in the following manner, namely, a plurality of liquid crystal material droplets (droplets 72) are arranged in a matrix, so that the liquid crystal material is contained in a rectangular frame formed to block the liquid crystal material Inside the frame of the sealing material 73 (refer to Figure 7). Basically, a dripping device is used to drip each drop, but in order to increase the processing speed, it is also possible to drip multiple drops at the same time. For example, as a discharge device that simultaneously discharges a plurality of drops using one device, there are the following devices.

Patent Document 1 discloses a jet dispenser which has a dispenser body that can be connected to a source of liquid material. The dispenser body is provided with a fluid channel, a fluid channel outlet communicating with the fluid channel, and a valve seat arranged near the fluid channel outlet , And has a valve member that can be selectively contacted with the valve seat and movably arranged in the fluid channel, and has a valve driving device that can operatively couple the valve member and selectively move the valve member The valve member can be contacted or separated from the valve seat, and has a spray nozzle adjacent to the channel outlet and combined with the distributor body. The spray nozzle has a nozzle body and a plurality of nozzle outlets arranged on the nozzle body and communicating with the outlet of the fluid channel, When the valve member is in contact with the valve seat, the liquid material in the outlet of the fluid channel is provided with a sufficient amount of movement to enable a plurality of droplets to be ejected simultaneously and rapidly from the plurality of nozzle outlets.

Patent Document 2 discloses a linear nozzle characterized by having a plurality of nozzle units, the nozzle units are arranged with a plurality of nozzles for ejecting ink to the paper, and in the linear nozzle in which the plurality of nozzle units are integrated, each nozzle unit is At least a part of the nozzles have an inclination with respect to the normal direction of the paper, and the inclination is oriented in a direction that causes the ink discharged from the nozzle to fall near the boundary with the adjacent nozzle unit.

[Prior Technical Literature]

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2007-167844

Patent Document 2: Japanese Patent Laid-Open No. 2003-25565

Conventionally, in the case of simultaneous application of multiple drops using a dripping device with multiple nozzles, in order to change the distance between the dripping points or the shape of the coating pattern, it is necessary to exchange the nozzle itself with the nozzles. The exchange itself is difficult. On the other hand, if the nozzle part itself is not exchanged and the drip coating is performed, the quality may be greatly affected. In particular, the liquid crystal droplets are applied in a matrix to accommodate the liquid crystal material in a sealing material formed in a rectangular frame shape to block the liquid crystal material In the case of the inside of the frame, if the distance between the dripping points or the pattern shape cannot be easily changed, when the size of the frame of the sealing material changes, the distance between the sealing material and the liquid crystal drop cannot be properly maintained, which may cause the lamination There is a problem of uneven diffusion of liquid crystal.

As in Patent Document 2, if a configuration that deforms the shape of the nozzle itself is adopted, the discharge conditions are different among the nozzles, and there is a problem that high-precision coating of the amount and position cannot be performed.

Therefore, the object of the present invention is to provide a liquid material dropping device that can easily change the distance between the dropping points when multiple dots are simultaneously coated.

The present invention of the dripping device is provided with a metering section for measuring liquid materials, a plunger that reciprocally moves in the metering section, a nozzle section with a plurality of nozzles with discharge ports, a supply flow path for supplying liquid materials to the metering section, and a countermeasure A switching valve for switching the communication between the nozzle portion and the metering portion and the supply flow path is characterized in that the nozzle portion is arranged in such a manner that the interval between one nozzle and the adjacent nozzle is the same, and The above-mentioned nozzles are arranged obliquely in the same way as the angle θ formed by one nozzle and the vertical line.

In the above-mentioned dropping device, it may be characterized in that: the nozzle includes n ² (n is a natural number of 2 or more) nozzles, and in addition, it may be characterized in that: in the nozzle portion, the nozzle The nozzle is arranged in such a manner that the discharge port faces the outer side with respect to the vertical direction center of the nozzle portion, or the nozzle portion is arranged such that the discharge port of the nozzle faces the inner side with respect to the vertical direction center of the nozzle portion, Configure the above nozzles.

In the above-mentioned dripping device, it may be characterized in that: the nozzle portion is provided with a nozzle block, and the nozzle block is formed with an inflow channel and a communication channel between the inflow channel and the discharge port. For the branch flow path, install the above nozzle in the nozzle block.

The present invention of the coating device is characterized by comprising: the above-mentioned dripping device; a work stage on which a substrate is placed; an XYZ driving device that relatively moves the dripping device and the work stage; and a control section having a memory device.

In the above-mentioned coating device, it may also be characterized in that: a plurality of the above-mentioned dripping devices are provided, the number of nozzles of one dripping device, the interval between nozzles, or the angle θ of nozzles, is the interval or the angle between nozzles of other dripping devices θ is different, or it may be characterized in that a plurality of the above-mentioned dripping devices are provided, and the number of nozzles of all the dripping devices, the interval between nozzles, and the angle θ of the nozzles are the same.

The present invention of the dripping method is a dripping method using the above-mentioned coating device, and is characterized in that the vertical distance between the workpiece table and the dripping device is adjusted based on an input value, thereby adjusting the distance between the dripping points of the droplets discharged from the nozzle (L1, L2) Adjust to drop the liquid material on the workpiece while keeping the vertical distance between the workpiece table and the dripping device constant, while the dripping device and the workpiece table are relatively moved in the horizontal direction.

In the above-mentioned dropping method, it may also be characterized in that: a plurality of correlation patterns between the vertical distance between the workpiece stage and the dropping device and the distance between the dropping points (L1, L2) of the droplet are stored in the memory device of the control unit , The above input value is the selected value of the above correlation model.

The present invention of the dripping method from other viewpoints is a dripping method using a coating device. The coating device is characterized by having a plurality of the above-mentioned dripping devices, the number of nozzles of all the dripping devices, the interval between the nozzles and the angle of the nozzles The θ is the same, and the dropping method is characterized in that all the dropping devices of the plurality of dropping devices are used to perform the same dropping and coating, thereby performing multi-sided cutting. Here, it can also be characterized by: the above-mentioned workpiece It is a liquid crystal panel substrate, and the liquid material is liquid crystal.

According to the present invention, when multiple dots are simultaneously coated, the distance between the dripping points can be easily changed.

1: Dripping device

2: Metrology Department

3: plunger

4: nozzle

5: Spit out

6: Nozzle

7: Switching valve

8: Large diameter part

9: body

10: Plunger drive member

11: Plunger movement direction

12: Flow Path A

13: Flow Path B

14: Flow path C

15: supply flow path

16: Extension member

17: container

18: Liquid piping

19: Liquid

20: Bubble removal mechanism

21: Liquid flow

22: Flow of Gas

23: Actuating gas supply piping

24: Container support member

25: Base plate

26: Connection member

27: Nozzle block

28: Nozzle connection surface

29: Inflow path

30~33: Branch flow path A~D

34~37: Nozzle A~D

38~41: spit out A~D

42: Vertical axis of nozzle block

43: spit out center axis

44: Flying Trajectory

45: droplets

46: Substrate (coated surface)

47: branch flow

51: Coating device

52: X-axis drive device

53: Y-axis drive device

54: Z-axis drive device

55: X movement direction (left and right direction)

56: Y moving direction (front and back direction)

57: Z moving direction (up and down direction)

58: Workpiece table

59: X-axis slider

60: Y-axis slider

61: beam

62: beam support member

63: stand

71: substrate

72: droplet

73: Sealing material

L1, L2, L1b, L2b, L1c, L2c, La, Lb, Lc: distance

H, Ha, Hb, Hc: height

θ, θ _a , θ _b , θ _c , θ _d : angle

Fig. 1 is a schematic side view of the dripping device of the first embodiment.

Figure 2 (a) is a bottom view of the nozzle used in the dripping device of the first embodiment, (b) is a cross-sectional view taken along the line A-A, and (c) is a cross-sectional view taken along the line B-B.

Fig. 3 is an explanatory diagram for explaining the relationship between the dropping height and the distance between the dropping points when dropping using the dropping device of the first embodiment. (a) is a plan view when the dropping height Ha is displayed, (b) is a plan view when the dropping height Hb is displayed, and (c) is a plan view when the dropping height Hc is displayed.

Fig. 4 is a schematic perspective view of the coating device of the first embodiment.

Fig. 5 (a) is a bottom view of the nozzle part of the second embodiment, (b) is a cross-sectional view taken along the line C-C, and (c) is a cross-sectional view taken along the line D-D.

Fig. 6(a) is a bottom view of the nozzle part of the third embodiment, and (b) is a cross-sectional view taken along the line E-E.

FIG. 7 is an explanatory diagram illustrating the state when the liquid is dropped on the substrate in the manufacturing step of the liquid crystal panel.

Hereinafter, a description will be given of a form example for implementing the present invention.

"First Embodiment"

The dripping device 1 of the first embodiment is provided with the center in the vertical direction from the nozzle portion 6, etc. The four nozzles 4 are arranged at intervals, and by adjusting the distance between the nozzle 4 and the substrate 46, the distance of the four dropping points on the substrate 46 can be adjusted. The dropping device 1 is installed in a coating device 51 having XYZ driving devices (52, 53, 54), and performs coating operations while moving relative to a work table on which a coating target is placed.

Hereinafter, the configuration and operation of the dripping device 1 and the coating device 51 will be described in detail.

<Dripping device>

Fig. 1 is a schematic side view showing a dropping device 1 of the first embodiment.

The dripping device 1 of the first embodiment is a plunger type dripping device, which includes: a tube-shaped metering section 2; a plunger 3 internally connected to the metering section 2; a nozzle section 6 having a plurality of nozzles 4; and a switching valve 7 , It switches the communication between the metering section 2 and the nozzle section 6, and the metering section 2 and the supply flow path 15; and the side-view L-shaped body 9, which has a built-in plunger drive device.

The metering part 2 has a cylindrical space inside, that is, a metering hole, and the plunger 3 can be slidably inserted into the metering hole.

The plunger 3 is a rod-shaped member having a large-diameter portion 8 at its end, and the end on the opposite side of the large-diameter portion 8 is inserted into the measuring portion 2. The plunger 3 is gripped by the plunger driving member 10 in the vicinity of the large-diameter portion 8 and can be moved in the direction of reference numeral 11 by a plunger driving device that moves the plunger driving member 10. By sliding the plunger 3 in close contact with the inner wall of the metering portion 2, the liquid 19 can be sucked into the metering portion 2 or pushed out from the metering portion 2.

The switching valve 7 includes a flow path A12 communicating with the supply flow path 15, a flow path B13 communicating with the metering section 2, and a flow path C14 communicating with the nozzle section 6, and can selectively communicate with the supply flow path 15 and the metering section. The first position of 2 or the second position of the connecting metering portion 2 and the nozzle portion 6 are switched. Among them, the switching valve 7 can be used as a rotary valve The structure can also be configured as a spool valve. Furthermore, it is preferable that the flow path B13 and the flow path C14 are arranged in the same direction as the plunger movement direction (symbol 11). This is to transmit the force generated by the plunger 3 to the liquid 19 without waste.

The supply flow path 15 is a flow path communicating with the liquid pipe 18 for supplying the liquid 19 stored in the container 17, and is provided in the extension member 16. The extension member 16 is fixed to the body 9 so that the supply flow path 15 and the flow path A12 communicate airtightly. A bubble removing mechanism 20 is provided between the supply channel 15 and the liquid pipe 18. As the bubble removing mechanism 20, for example, a first flow path communicating with the liquid material supply part, a second flow path communicating with the measuring part side, and a first flow path communicating with a second flow path having a width larger than the first flow path can be used. 1. A body with a wide flow path, and the discharge port of the first flow path is arranged above the suction port of the second flow path (refer to the applicant's patent No. 4898778). Furthermore, the bubble removing mechanism 20 may not be provided.

An actuating gas supply pipe 23 for supplying actuating gas for pressure-feeding the liquid 19 is connected to the container 17 storing the liquid 19.

The main body 9 is mounted on a base plate 25, and a container support member 24 for fixing the container 17 is mounted on the upper part of the base plate 25. The base plate 25 is installed on the connecting member 26 for connecting with the XYZ driving device (52, 53, 54) or the fixing bracket described later.

<Nozzle part>

Fig. 2 shows a bottom view of the nozzle part 6 used in the dropping device of the first embodiment, a cross-sectional view taken along the line A-A and a cross-sectional view taken along the line B-B, respectively.

The nozzle section 6 of the first embodiment is configured to include a nozzle block 27 having a pentagonal cross section, and four nozzles 4 arranged on the lower surface of the nozzle block 27, that is, the nozzle connecting surface 28. The nozzle portion 6 is detachably installed on the bottom of the main body 9.

For the convenience of explanation, the four nozzles 4 are called nozzles A~D (34~37), and the outlet 5 of the 4 nozzles is called outlet A~D (38~41).

Inside the nozzle block 27 are formed an inflow channel 29 communicating with the channel C14 of the dripping device 1, and a branching channel A~D (30~D) branching from the inflow channel 29 to the nozzles A~D (34~37) 33).

The inclined surface of the nozzle block 27, that is, the lower surface is divided into 4 blocks, and one nozzle 4 (symbols 34 to 37) is installed in each block. In the first embodiment, as shown in FIG. 2, the nozzle connecting surface 28 is formed by arranging four square planes of the same size with the center of the lower surface as the apex. That is, when viewed from the bottom surface, the nozzle block 27 is square. The number of blocks below the nozzle block 27 is not limited to the number of blocks illustrated. For example, any number of blocks from 2 to 16 can be set, but preferably, the number of blocks is n ² (n is 2 or more) The natural number). Preferably, the number of blocks under the nozzle block 27 and the number of nozzles 4 are set to be the same.

The nozzles 4 installed on the inclined surface are arranged at equal intervals so as to be square when viewed from the bottom surface. That is, the nozzle A34, the nozzle B35, the nozzle C36, and the nozzle D37 are arranged in a matrix. No matter which nozzle 4 is selected, the interval between one nozzle 4 and other adjacent nozzles 4 is the same.

In addition, each nozzle 4 has one discharge port, and the discharge port central axis 43 is installed so as to be perpendicular to the nozzle connecting surface 28. In the first embodiment, each surface of the nozzle connecting surface 28 is inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27, so the discharge ports A to D (38 to 41) are oriented with respect to the vertical center of the nozzle block 27. Outside. The inclination angle of each surface of the nozzle connecting surface 28 is equal. That is, θa, θb, θc, and θd shown in FIG. 2 are all the same (θa=θb=θc=θd). In other words, the angle θ formed by a nozzle 4 and the vertical line (for example, 5-60 degrees), no matter which one is selected All nozzles 4 are the same.

In addition, the discharge ports A to D (38 to 41) are arranged to face each corner of the nozzle block 27. That is, it is arranged so that the discharge ports A to D (38 to 41) are located on the diagonal of the bottom surface 28 (refer to FIG. 2(a)). By this, the quadrangular shape formed by connecting the 4 droplets 45 discharged from the discharge ports A~D (38~41) is a quadrangular shape similar to the arrangement of the nozzles A~D (34~37) of the nozzle block 27 . Preferably, the branch flow paths A to D (30 to 33) are formed to be coaxial with the center axes (discharge outlet center axis 43) of the nozzles A to D (34 to 37), so that the liquid 19 can be discharged smoothly get on.

<Spit Action>

The discharge operation of the dripping device 1 described above is summarized as follows.

(1) Preparation (initial filling step)

First, in a state where the plunger 3 is not inserted into the measuring part 2, the liquid 19 is filled to the upper end of the measuring part 2. Then the plunger 3 is inserted into the metering part 2 and fixed to the plunger driving member 10. Next, the switching valve 7 communicates the metering section 2 and the nozzle section 6 so that the plunger 3 is moved from the discharge port 5 toward the nozzle section 6 (in and out direction) until the liquid 19 is discharged.

(2) Spit out step

The metering part 2 and the nozzle part 6 are connected by the switching valve 7 and the plunger 3 is moved at a high speed in the in-out direction, whereby the same amount of liquid 19 is ejected from the four ejection ports 5 by flying.

(3) Attraction step

The switching valve 7 communicates the supply flow path 15 with the metering section 2, and the plunger 3 is moved in the direction opposite to the in-and-out direction (backward direction), and the liquid 19 is sucked into the metering section 2.

By repeating the steps (2) and (3) above, the coating operation of continuous quantitative discharge can be performed. Furthermore, the steps (2) and (3) above, no matter which one starts first Take.

<Adjustment of the distance between dripping points>

Fig. 3 is an explanatory diagram illustrating the relationship between the height (H) of the nozzle portion 6 and the distance (L) between the dropping points when the dropping device 1 of the first embodiment is used for dropping. In FIG. 3, the upper side figure shows a view when viewed from the side, and the lower side figure shows a top view when the substrate 46 is viewed from above. Furthermore, FIG. 3 only briefly describes the nozzle portion 6.

Since the droplet 45 discharged from the discharge port 5 of the nozzle 4 is inclined at a predetermined angle, it draws a parabolic flying trajectory 44 while reaching the substrate 46 as the coating surface. Since the four nozzles 4 arranged at equal intervals from the center of the nozzle portion 6 are evenly inclined radially, the droplets 45 applied on the substrate 46 have a rectangular pattern arranged at the corners of the square. That is, as shown on the lower side of FIG. 3, the vertical dropping point distance (L1) and the horizontal dropping point distance (L2) are the same (L1=L2).

In addition, since the nozzle 4 is inclined at a predetermined angle to draw a parabolic flight path 44, by changing the distance between the nozzle portion 6 (discharge port 5) and the substrate 46 (in other words, the height (H) of the nozzle portion 6), The distance between the vertical and horizontal drop points (L1, L2) can be changed.

Here, the (b) drawn in the center is used as a reference. In the case of (b), when the distance from the substrate 46 to the discharge port 5 is Hb, the vertical dropping point distance is L1b, and the horizontal dropping point distance is L2b. If the nozzle portion 6 is lowered as in (a), since the droplet 45 reaches the substrate 46 before spreading in a parabolic shape, the distance between the dripping points becomes shorter than in the case of (b) (La<Lb).

On the other hand, if the nozzle portion 6 is raised as in (c), the droplet 45 reaches the substrate 46 after expanding in a parabolic shape. Therefore, the distance between the dripping points becomes longer (Lc>Lb) compared with the case of (b).

In this way, since each nozzle 4 is inclined at a predetermined angle, by changing the height (H) of the nozzle portion 6, the distance between the vertical and horizontal drop points (L1, L2) can be changed.

The relationship between the inclination (θ) of the nozzle 4, the height (H) of the nozzle portion 6, and the distance between the vertical and horizontal dripping points (L1, L2) can be made into a table or graph through preliminary experiments, and A memory device stored in the control unit (not shown). With this configuration, the desired vertical and horizontal distances (L1, L2) between dripping points (L1, L2) can be easily achieved by changing the settings based on the table or graph displayed on the display device (not shown). According to the inventor’s experiment, for example, when the nozzle 4 is tilted 10 degrees, the distance between the dripping points (L1, L2) is 7.5mm each when the nozzle 4 is discharged from a height of 15mm, and if the nozzle 4 is discharged from a height of 10mm, the distance between the dripping points ( Each of L1, L2) is 6.5mm, and if it is discharged from a height of 20mm, the distance between the dripping points (L1, L2) is each 8.5mm.

<Coating Device>

FIG. 4 shows a schematic perspective view of a coating device 51 equipped with the dripping device 1 of the first embodiment.

The coating device 51 of the embodiment mainly includes: a Z-axis drive device 54 that can move the dripping device 1 in the up and down direction (symbol 57); an X-axis drive device 52, which is equipped with a Z-axis drive device 54 that can move in the left-right direction (Symbol 55) movement; Y-axis drive device 53, which can move the beam 61 provided with X-axis drive device 52 in the front-rear direction (symbol 56); work table 58, which carries substrate 46; stand 63, which is equipped with The above-mentioned driving devices (52, 53, 54) and work table 58; and a control unit not shown. The coating device 51 can implement the following dripping method: by making the control unit adjust the vertical distance between the work table 58 and the dripping device 1 based on the input value of the user, and adjust the dripping point of the droplets discharged from each nozzle 4 Distance (L1, L2), after keeping the vertical distance between the work table 58 and the dripping device 1 constant, move the dripping device 1 and the work table 58 in the horizontal direction. Drop the liquid material on one side. Wherein, the dropping point dropped on the workpiece is set by the row of m1 row×m2 row, and it is preferable to set any one of m1 and m2 as a multiple (natural number) of the number of nozzles n.

The X-axis driving device 52 is provided with an X-axis slider 59 sandwiching the X-axis driving device 52, so that the Z-axis driving device 54 and the dripping device 1 can be moved. In addition, Y sliders 60 are respectively provided inside the Y-axis drive device 53, and the beam 61 on which the X-axis drive device 52 is provided is supported by the beam support member 62 to move. By configuring the XYZ driving device as described above, the dripping device 1 can be moved relative to the substrate 46. In the present invention, it is preferable to adopt the following mechanism as the XYZ driving device, that is, by adjusting the position of the discharge port in the vertical direction (Z direction), the distance (L1, L2) between the dripping points can be adjusted, so that the precision Positioning in Z direction. As this type of XYZ driving device, a combination mechanism of a ball screw and a motor, a mechanism using a linear motor, a mechanism that transmits power using a belt or chain, etc. can be used.

In addition, in the present embodiment, the driving device is configured as a so-called overhead type, but any configuration may be adopted as long as it is capable of relatively moving the dripping device 1 and the substrate 46 (work table 58). For example, the X-axis drive device 52 and the Y-axis drive device 53 may be provided under the work table 58.

In the first embodiment, the configuration in which four dripping devices 1 are installed has been exemplified, but the number of installations is not limited to this, and may be one, or two, three, and so on.

In the configuration where a plurality of drip devices 1 are installed, there are cases where all drip devices 1 of the same type are set, and there are cases where drip devices 1 of different types are combined. When a plurality of identical dripping devices 1 are installed, it can correspond to the so-called multi-face cutting in which a plurality of panels are produced in the substrate 46. When combining different types of dripping devices 1 (For example, in the case where the nozzle portion 6 is installed to change the inclination angle of the nozzle 4 for each dripping device 1), compared with the one type of dripping device 1, the distance between the dripping points (L1, L2) ).

According to the coating device 51 of the first embodiment described above, it is possible to easily change the distance (L1, L2) between the dripping points when applying dozens or more of multiple dots simultaneously. Especially in the drop injection method (ODF), the coating device 51 appropriately maintains the distance between the sealing material formed in a rectangular frame shape in order to block the liquid crystal material and the liquid crystal drop, so that the diffusion of the liquid crystal can always be kept uniform.

"Second Embodiment"

Fig. 5 shows a bottom view, a cross-sectional view along the line C-C, and a cross-sectional view along the line D-D of the nozzle portion 6 used in the dripping device 1 of the second embodiment, respectively. In the following description, descriptions of the same parts (parts other than the nozzle portion 6) as those of the first embodiment will be omitted, and only the different parts will be described.

In the nozzle section 6 of the second embodiment, the nozzles are arranged such that the discharge ports (38 to 41) of the four nozzles (34 to 37) face the inner side (the center side of the nozzle section 6). At this point, and The first embodiment is different.

In the second embodiment, the four planes constituting the nozzle connecting surface 28 are inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27 so that the center of the nozzle portion 6 becomes the innermost portion when viewed from the bottom. That is, the discharge ports A to D (38 to 41) of the nozzles A to D (34 to 37) when viewed from the bottom surface become the vertical axis 42 facing the nozzle block 27, respectively.

Inside the nozzle block 27 are formed an inflow channel 29 communicating with the channel C14 of the dripping device 1, and a branching channel A~D (30~D) branching from the inflow channel 29 to the nozzles A~D (34~37) 33) The point is the same as the first embodiment. However, the point where the branch flow paths A to D (30 to 33) are bent on the way is different from the first embodiment. that is, The branch flow paths A~D (30~33) are formed in the upstream part communicating with the inflow flow path 29 in the direction radiating from the vertical axis 42, and in the downstream part communicating with the nozzles A~D (34~37) A flow path coaxial with the center axis 43 of the discharge port of the nozzles A to D (34 to 37) is formed, and the upstream part and the downstream part are connected via a bend.

In the second embodiment, by adjusting the distance between the nozzle and the substrate, the distance (L1, L2) of the four dropping points on the substrate can be adjusted. Since the second embodiment has the outlets (38-41) of the four nozzles (34-37) facing inward, it is suitable for adjusting the distance between the dripping points (L1, L2) in a narrower range than the first embodiment The situation.

"The third embodiment"

Fig. 6 shows a bottom view of the nozzle part 6 used in the dripping device 1 of the third embodiment and a cross-sectional view taken along the line E-E. In the following description, descriptions of the same parts (parts other than the nozzle portion 6) as those of the first embodiment will be omitted, and only the different parts will be described.

The nozzle section 6 of the third embodiment is the same as the first embodiment in that the square number of nozzles 4 are arranged in a matrix, but is different from the first embodiment in that the number of nozzles 4 is nine. The nozzle portion 6 of the third embodiment divides the lower surface of the nozzle block 27, that is, the nozzle connecting surface 28, into 9 blocks, and one nozzle 4 is installed in each block. The 9 blocks constituting the nozzle connecting surface 28 contain square-shaped planes of the same size and are arranged such that the center of the lower surface is the vertex. Among them, the central block is arranged horizontally. The 8 blocks outside the center are inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27 in such a way that the outlet 5 of the nozzle 4 faces the outside. This angle is made equal in such a way that the applied droplets 45 are arranged at the corners or the midpoints of the sides of the quadrangle.

When viewed from the bottom surface, the nozzle block 27 is square. 8 outside the center Each nozzle 4 is arranged at the center or vertex of the side of a square that is one week smaller than the nozzle block 27. The nozzle 4 in the center is arranged at the intersection of the diagonals of the square. That is, the distances of the adjacent nozzles 4 in the horizontal direction are equal.

In the third embodiment, the nozzle section 6 is composed of nine nozzles 4, but the number of nozzles 4 is not limited to these, and the nozzle section 6 may be composed of n ² (n is a natural number of 2 or more) nozzles. That is, for example, by setting the number of nozzles 4 to the square of 2 or more (ie, 4, 9, 16, 25, 36...), it is possible to maintain a matrix-like dripping pattern while uniformly adjusting the distance between dripping points. (L1, L2).

In the third embodiment, by adjusting the distance between the nozzle and the substrate, the distance (L1, L2) of the 9 dropping points on the substrate can be adjusted. In the third embodiment, 9 drips can be performed at the same time, and therefore, the productivity can be improved compared to the first embodiment.

6: Nozzle

27: Nozzle block

28: Nozzle connection surface

29: Inflow path

30: branch flow path A

31: Branch flow path B

32: branch flow path C

33: branch flow path D

34: Nozzle A

35: Nozzle B

36: Nozzle C

37: Nozzle D

38: Spit Out A

39: Spit Out B

40: spit out C

41: Spit Out D

42: Vertical axis of nozzle block

43: spit out center axis

θ _a , θ _b , θ _c , θ _d : angle

Claims (6)

A dripping device is provided with a metering section for measuring liquid material, a plunger that reciprocally moves in the metering section, a nozzle section with a plurality of nozzles with discharge ports, a supply flow path for supplying liquid material to the metering section, and a pair of A switching valve for switching the communication between the nozzle part and the metering part and the supply flow path; characterized in that: In the nozzle section, a plurality of dots can be simultaneously coated in a matrix, and the distance between one nozzle and the adjacent nozzle is the same, the nozzles are arranged in a matrix when viewed from the bottom, and The plurality of nozzles arranged outside the center of the matrix-like arrangement have the same angle θ formed by the center axis of the outlets and the vertical axis passing through the center of the matrix-like arrangement, and the outlets are opposite It is arranged obliquely in such a way that the above-mentioned vertical axes all face the outside or the inside. The dripping device of claim 1, wherein the nozzles are arranged in a matrix in a rectangular frame when viewed from the bottom surface. The dropping device according to claim 2, wherein the nozzle portion is composed of n ² (n is a natural number of 2 or more) nozzles. Such as the dripping device of claim 3, wherein the nozzle is composed of an even number of nozzles, All of the above-mentioned nozzles are arranged obliquely within a square frame when viewed from the bottom surface. Such as the dripping device of claim 3, wherein the nozzle is composed of an odd number of nozzles, The nozzles outside the center are arranged obliquely within a square frame when viewed from the bottom, A nozzle located in the center is arranged in a square frame when viewed from the bottom The intersection of the angles. The dripping device of any one of claims 1 to 5, wherein the nozzle portion is provided with a nozzle block, and the nozzle block is formed with an inflow flow path and a branch flow path communicating the inflow flow path and the discharge port, and The nozzle is attached to the nozzle block.

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