WO2015186743A1

WO2015186743A1 - Liquid material dropping device and method

Info

Publication number: WO2015186743A1
Application number: PCT/JP2015/066051
Authority: WO
Inventors: 生島　和正
Original assignee: 武蔵エンジニアリング株式会社
Priority date: 2014-06-06
Filing date: 2015-06-03
Publication date: 2015-12-10
Also published as: TW201607613A; CN106461989B; HK1231567A1; TWI717320B; JP2015230458A; TW202035028A; JP6389379B2; TWI718061B; KR102328887B1; KR20170015289A; CN106461989A

Abstract

Problem: To provide a liquid material dripping device and method by which it is possible to easily change the distance between dripping points when performing coating simultaneously at a plurality of positions. Solution: a dripping device and a method in which the dripping device is used, said dripping device being provided with a measuring unit (2) for measuring a liquid material, a plunger (3) that moves back and forth in the measuring unit (2), a nozzle unit (6) provided with a plurality of nozzles (4) that have discharge holes (5), a supply path (15) for supplying liquid material to the measuring unit (2), and a switching valve (7) for switching communication between the measuring unit (2) and the nozzle unit (6) and between the measuring unit (2) and the supply path (15), wherein adjacent nozzles (4) are arranged in the nozzle unit (6) at equidistant intervals, and the nozzles are disposed at an incline such that an angle θ between each nozzle and a vertical line is the same for all nozzles.

Description

Liquid material dropping apparatus and method

The present invention relates to an apparatus and method for dropping a liquid material, and more particularly, to an apparatus and method for dropping a liquid material capable of simultaneously applying a plurality of points at which the distance between dropping points can be changed.

As a method for forming a liquid crystal layer in a manufacturing process of a liquid crystal panel, there is a method called a drop injection method (ODF). This method is a method in which a liquid crystal material is quantitatively dropped onto one of two substrates to be bonded before bonding, and then bonded in a vacuum.
When the liquid crystal material is dropped onto the substrate 71, a plurality of liquid crystal material droplets (droplets 72) are arranged in a matrix so as to fit within the frame of the sealing material 73 formed in a rectangular frame shape to block the liquid crystal material. (See FIG. 7). Although it is basic to drop one drop at a time by one dropping device, dropping a plurality of drops at the same time is also performed to improve the processing speed. For example, there is the following apparatus as an ejection apparatus that ejects a plurality of droplets simultaneously with one apparatus.

Patent Document 1 has a dispenser body connectable to a liquid material source, the dispenser body has a fluid channel, a fluid channel outlet in communication with the fluid channel, and a valve seat provided near the fluid channel outlet, A valve member movably provided in the fluid channel for selective contact with the valve seat and operatively coupled to the valve member for selectively moving the valve member into contact with the valve seat; A nozzle drive coupled to the dispenser body adjacent to the channel outlet, the jet nozzle being provided on the nozzle body, the fluid channel outlet; A plurality of nozzle outlets in communication with each other, and the valve member has a momentum sufficient to rapidly eject a plurality of droplets simultaneously from the plurality of nozzle outlets when contacting the valve seat. Providing the liquid material, jetting dispenser is disclosed.

Patent Document 2 has a plurality of head units in which a plurality of nozzles that eject ink toward a sheet are arranged, and in a line head in which the plurality of head units are integrated, at least a part of each head unit. A line head is disclosed, wherein the nozzle has an inclination with respect to the normal direction of the paper and has an inclination in a direction in which ink ejected from the nozzle lands near a boundary with an adjacent head unit. .

JP 2007-167844 A JP 2003-25565 A

Conventionally, when applying a plurality of drops simultaneously using a dropping device having a plurality of nozzles, in order to change the distance between the dropping points and the application pattern shape, it is necessary to replace the nozzle part itself where the nozzles are disposed. However, it was difficult to replace the nozzle part itself. On the other hand, when the drop coating is performed without replacing the nozzle part itself, the quality may be greatly affected. In particular, when applying liquid crystal droplets in a matrix shape so as to fit within the frame of the sealing material formed in a rectangular frame shape to block the liquid crystal material, the distance between the dropping points and the pattern shape cannot be easily changed. When the size of the frame of the material is changed, the distance between the sealing material and the liquid crystal droplets cannot be properly maintained, and there is a problem that the spread of the liquid crystal becomes uneven when bonded.

When a configuration in which the shape of the nozzle itself is deformed as in Patent Document 2, the discharge conditions differ between the nozzles, and there is a problem that high-precision coating cannot be performed with respect to the amount and position.

Therefore, an object of the present invention is to provide a liquid material dropping device and method that can easily change the distance between the dropping points when simultaneously applying a plurality of points.

The present invention relating to a dropping device includes a metering unit that measures a liquid material, a plunger that reciprocates in the metering unit, a nozzle unit that includes a plurality of nozzles having discharge ports, and a supply channel that supplies the liquid material to the metering unit. In the dropping device comprising a metering unit, a nozzle unit, and a switching valve for switching the communication between the metering unit and the supply flow path, the nozzle unit is configured so that the interval between one nozzle and an adjacent nozzle is the same. The nozzles are arranged, and the nozzles are arranged so as to be inclined so that the angle θ formed by one nozzle and the vertical line is the same.
In the above dropping apparatus, the nozzle may be composed of n ² (n is a natural number of 2 or more) nozzles. In addition to this, the nozzle part has an outlet of the nozzle in the nozzle part. The nozzle is arranged so as to face the outside with respect to the center in the vertical direction, or the nozzle is arranged in the nozzle portion so that the discharge port of the nozzle faces the inside with respect to the center in the vertical direction of the nozzle portion. It may be characterized by that.
In the dropping device, the nozzle portion includes a nozzle block in which a single inflow channel and a branch channel that communicates with the inflow channel and the discharge port are formed, and the nozzle is mounted on the nozzle block. It may be a feature.

The present invention relating to a coating apparatus includes the above-described dropping device, a work table on which a substrate is placed, an XYZ driving device that relatively moves the dropping device and the work table, and a control unit having a storage device. It is characterized by that.
The coating apparatus may include a plurality of the dropping devices, wherein the number of nozzles of one dropping device, the nozzle interval, or the nozzle angle θ is different from the nozzle interval or nozzle angle θ of another dropping device. Alternatively, a plurality of the dropping devices may be provided, and the number of nozzles, the nozzle interval, and the nozzle angle θ of all the dropping devices may be the same.

The present invention relating to a dropping method is a dropping method using the above-described coating apparatus, and by adjusting a vertical distance between the work table and the dropping apparatus based on an input value, droplets discharged from the nozzle While adjusting the distance (L1, L2) between the dropping points and keeping the vertical distance between the work table and the dropping device constant, the liquid material is moved while moving the dropping device and the work table relative to each other in the horizontal direction. It is characterized by dripping in
In the dropping method, a plurality of correlation patterns between the vertical distances of the work table and the dropping device and the distances (L1, L2) between the dropping points of the droplets are stored in the storage device of the control unit. The value may be a selection value of the correlation pattern.
The present invention relating to a dropping method from another viewpoint uses a coating apparatus including a plurality of the dropping apparatuses, wherein the number of nozzles, the interval between the nozzles, and the nozzle angle θ of all the dropping apparatuses are the same. It is a dripping method, Comprising: Multi-chamfering is performed by performing the same dripping application | coating with all the said some dripping apparatus. Here, the workpiece may be a liquid crystal panel substrate, and the liquid material may be liquid crystal.

According to the present invention, it is possible to easily change the distance between the dropping points when performing simultaneous application at a plurality of points.

It is a schematic side view of the dripping apparatus which concerns on 1st Embodiment. (A) A bottom view of a nozzle portion used in the dropping device according to the first embodiment, (b) AA sectional view and (c) BB sectional view. It is explanatory drawing explaining the relationship between the dropping height when performing dripping using the dripping apparatus which concerns on 1st Embodiment, and the distance between dropping points. (A) is a drop height Ha, (b) is a drop height Hb, (c) is a plan view when the drop height Hc. It is a schematic perspective view of the coating device which concerns on 1st Embodiment. (A) Bottom view of nozzle portion according to second embodiment, (b) CC sectional view and (c) DD sectional view. (A) It is a bottom view of the nozzle part which concerns on 3rd Embodiment, and (b) It is EE sectional drawing. It is explanatory drawing explaining a state when a liquid is dripped at a board | substrate in the manufacturing process of a liquid crystal panel.

Below, the form example for implementing this invention is demonstrated.
<< First Embodiment >>
The dropping device 1 according to the first embodiment includes four nozzles 4 arranged at equal intervals from the center in the vertical direction of the nozzle unit 6, and the substrate 46 is adjusted by adjusting the distance between the nozzle 4 and the substrate 46. It is possible to adjust the distance between the four dripping points that land on. The dropping device 1 is attached to a coating device 51 including an XYZ driving device (52, 53, 54), and performs a coating operation while relatively moving with respect to a work table on which a coating target is placed.
Below, the structure and operation | movement of the dripping apparatus 1 and the coating device 51 are demonstrated in detail.

<Drip device>
In FIG. 1, the schematic side view of the dripping apparatus 1 which concerns on 1st Embodiment is shown.
The dropping device 1 of the first embodiment includes a tube-shaped measuring unit 2, a plunger 3 inscribed in the measuring unit 2, a nozzle unit 6 having a plurality of nozzles 4, a measuring unit 2, a nozzle unit 6, and a measuring unit 2. The plunger-type dropping device includes a switching valve 7 for switching the communication of the supply flow path 15 and an L-shaped main body 9 having a built-in plunger driving device.
The measuring part 2 has a measuring hole which is a cylindrical space inside, and a plunger 3 is slidably inserted into the measuring hole.
The plunger 3 is a rod-shaped member having a large-diameter portion 8 at the end, and an end opposite to the large-diameter portion 8 is inserted into the measuring unit 2. The plunger 3 is gripped by the plunger driving member 10 in the immediate vicinity of the large diameter portion 8 and can be moved in the direction of reference numeral 11 by a plunger driving device that moves the plunger driving member 10. When the plunger 3 slides in close contact with the inner wall of the measuring unit 2, the liquid 19 can be sucked into the measuring unit 2 and the liquid 19 can be pushed out from the measuring unit 2.

The switching valve 7 includes a flow path A12 that communicates with the supply flow path 15, a flow path B13 that communicates with the measuring section 2, and a flow path C14 that communicates with the nozzle section 6. The first position for communication or the second position for communication between the measuring unit 2 and the nozzle unit 6 can be selectively switched. Here, the switching valve 7 may be configured as a rotary valve or a slide valve. In addition, it is preferable to arrange | position so that the flow path B13 and the flow path C14 may become the same direction as a plunger moving direction (code | symbol 11). This is to transmit the force by the plunger 3 to the liquid 19 without waste during discharge.

The supply channel 15 is a channel that communicates with a liquid pipe 18 for supplying the liquid 19 stored in the container 17, and is provided in the extending member 16. The extending member 16 is fixed to the main body 9 so that the supply channel 15 and the channel A12 communicate with each other in an airtight manner. A bubble removing mechanism 20 is provided between the supply channel 15 and the liquid pipe 18. As the bubble removal mechanism 20, for example, a first flow path communicating with the liquid material supply unit side, a second flow path communicating with the measuring unit side, a first flow path, and a second flow path are provided. A mechanism having a main body wider than the first flow channel and having a discharge port of the first flow channel disposed above the suction port of the second flow channel (Patent No. 4898778) can be used. The bubble removing mechanism 20 need not be provided.
A working gas supply pipe 23 that supplies a working gas for pumping the liquid 19 is connected to the container 17 that stores the liquid 19.
The main body 9 is attached to a base plate 25, and a container support member 24 that fixes the container 17 is attached to the upper part of the same base plate 25. The base plate 25 is attached to a connecting member 26 for connecting to an XYZ driving device (52, 53, 54), a fixed stand, etc., which will be described later.

<Nozzle part>
FIG. 2 shows a bottom view, an AA sectional view, and a BB sectional view of the nozzle unit 6 used in the dropping device according to the first embodiment.
The nozzle unit 6 of the first embodiment includes a nozzle block 27 having a pentagonal cross section and four nozzles 4 disposed on a nozzle connection surface 28 that is a lower surface of the nozzle block 27. The nozzle portion 6 is detachably attached to the lower surface of the main body 9.
Hereinafter, for convenience of explanation, the four nozzles 4 are referred to as nozzles A to D (34 to 37), and the discharge ports 5 of the four nozzles are referred to as discharge ports A to D (38 to 41).
Inside the nozzle block 27, there are an inflow channel 29 communicating with the channel C14 of the dropping device 1, and branch channels A to D (30 to 30) that branch from the inflow channel 29 to the nozzles A to D (34 to 37). 33) is formed.
The lower surface, which is the slope of the nozzle block 27, is divided into four sections, and one nozzle 4 is attached to each section (reference numerals 34 to 37). In the first embodiment, as shown in FIG. 2, the nozzle connection surface 28 is formed by arranging four rectangular planes having the same size so that the center of the lower surface is the apex. That is, the nozzle block 27 is square when viewed from the bottom. The number of partitions on the lower surface of the nozzle block 27 is not limited to the illustrated number of partitions, and an arbitrary plurality of partitions such as 2 to 16 can be set. For example, the number of partitions is n ² (n is 2 or more). Is a natural number). The number of sections on the lower surface of the nozzle block 27 and the number of nozzles 4 are preferably the same.

The nozzles 4 attached to the slope are arranged at equal intervals so as to form a square when viewed from the bottom. That is, nozzle A34, nozzle B35, nozzle C36 and nozzle D37 are arranged in a matrix. The interval between one nozzle 4 and another adjacent nozzle 4 is the same regardless of which nozzle 4 is selected.
Each nozzle 4 has one discharge port, and is attached so that the discharge port central axis 43 is perpendicular to the nozzle connection surface 28. In the first embodiment, each surface of the nozzle connection surface 28 is inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27, so that the discharge ports A to D (38 to 41) It will face outward with respect to the vertical center. The angle of inclination of each surface of the nozzle connection surface 28 is uniform. That is, θa, θb, θc, and θd shown in FIG. 2 are all the same (θa = θb = θc = θd). In other words, the angle θ (for example, 5 to 60 degrees) formed by one nozzle 4 and a vertical line is the same regardless of which nozzle 4 is selected.

Further, the discharge ports A to D (38 to 41) are arranged so as to face each corner of the nozzle block 27. That is, the discharge ports A to D (38 to 41) are arranged on the diagonal line of the bottom surface 28 (see FIG. 2C). Accordingly, the quadrangle formed by connecting the four droplets 45 discharged from the discharge ports A to D (38 to 41) is a quadrangle similar to the arrangement of the nozzles A to D (34 to 37) of the nozzle block 27. It becomes. The branch channels A to D (30 to 33) are coaxial with the central axes (discharge port central axes 43) of the nozzles A to D (34 to 37) so that the liquid 19 can be smoothly discharged. It is preferable to form.

<Discharge operation>
The outline of the discharging operation in the dropping apparatus 1 described above is as follows.
(1) Preparation (initial filling process)
First, the liquid 19 is filled up to the upper end of the measuring unit 2 without inserting the plunger 3 into the measuring unit 2. Next, the plunger 3 is inserted into the measuring unit 2 and fixed to the plunger driving member 10. Next, the metering unit 2 and the nozzle unit 6 are communicated by the switching valve 7, and the plunger 3 is moved in the direction of the nozzle unit 6 (the advance direction) until the liquid 19 comes out from the discharge port 5.
(2) Discharge process The metering unit 2 and the nozzle unit 6 are communicated by the switching valve 7 and the plunger 3 is moved at high speed in the advancing direction, so that the same amount of liquid 19 is ejected from the four discharge ports 5.
(3) Suction process The supply flow path 15 and the metering unit 2 are communicated by the switching valve 7, the plunger 3 is moved in the direction opposite to the advancing direction (retracting direction), and the liquid 19 is sucked into the metering unit 2. To do.
By repeating the steps (2) and (3), a coating operation by continuous quantitative discharge can be performed. Note that either of the steps (2) and (3) may be performed first.

<Adjustment of distance between dropping points>
FIG. 3 is an explanatory diagram for explaining the relationship between the height (H) of the nozzle portion 6 and the distance (L) between the dropping points when dropping is performed using the dropping device 1 according to the first embodiment. In FIG. 3, the upper diagram shows a plan view when the substrate 46 is viewed from the upper surface when the upper diagram is viewed from the side surface. In FIG. 3, only the nozzle portion 6 is illustrated in a simplified manner.
The droplet 45 discharged from the discharge port 5 of the nozzle 4 reaches the substrate 46 as the coating surface while drawing a parabolic flight locus 44 because the nozzle 4 is inclined at a predetermined angle. Since the four nozzles 4 arranged at equal intervals from the center of the nozzle part 6 are inclined evenly radially, the droplet 45 applied to the substrate 46 has a rectangular shape as arranged at the corners of the square. It becomes a pattern. That is, as shown in the lower side of FIG. 3, the vertical dropping point distance (L1) and the horizontal dropping point distance (L2) are the same (L1 = L2).

Further, in order to draw a parabolic flight trajectory 44 when the nozzle 4 is inclined at a predetermined angle, the distance between the nozzle portion 6 (discharge port 5) and the substrate 46 (in other words, the height of the nozzle portion 6 (H By changing)), the distances (L1, L2) between the dropping points in the vertical direction and the horizontal direction can be changed.
Here, the case of (b) drawn in the center is used as a reference. In the case of (b), when the distance from the substrate 46 to the discharge port 5 is Hb, the vertical dropping point distance is L1b, and the horizontal dropping point distance is L2b. When the nozzle portion 6 is lowered as shown in (a), since the droplet 45 reaches the substrate 46 before spreading in a parabolic shape, the distance between the dropping points is shorter than in the case of (b) (La <Lb). .
On the other hand, when the nozzle portion 6 is raised as shown in (c), since the droplet 45 reaches the substrate 46 after spreading in a parabolic shape, the distance between the dropping points becomes longer than in the case of (b) (Lc> Lb).
As described above, since each nozzle 4 is inclined at a predetermined angle, the distance (L1, L2) between the dropping points in the vertical direction and the horizontal direction can be changed only by changing the height (H) of the nozzle portion 6. it can.

The relationship between the inclination (θ) of the nozzle 4, the height (H) of the nozzle portion 6, and the distances (L 1, L 2) between the dropping points in the vertical direction and the horizontal direction is made into a table or a graph by a prior experiment, and the control unit ( It may be stored in a storage device (not shown). By doing in this way, based on the table | surface and graph displayed on the display apparatus (not shown), the desired distance between the drop points (L1, L2) in the vertical direction and the horizontal direction can be easily realized by changing the setting. Is possible. According to the inventor's experiment, for example, when the nozzle 4 is tilted by 10 degrees, when discharging is performed from a height of 15 mm, the distance between the dropping points (L1, L2) is 7.5 mm, and when discharging is performed from a height of 10 mm, the dropping is performed. When the distance between the points (L1, L2) was 6.5 mm each and the height was 20 mm, the distance between the dropping points (L1, L2) was 8.5 mm each.

<Coating device>
In FIG. 4, the schematic perspective view of the coating device 51 provided with the dripping apparatus 1 which concerns on 1st Embodiment is shown.
The coating apparatus 51 of the embodiment is provided with a Z-axis driving device 54 that allows the dropping device 1 to move in the vertical direction (reference numeral 57) and a Z-axis driving apparatus 54, and is movable in the left-right direction (reference numeral 55). X-axis driving device 52, Y-axis driving device 53 that enables beam 61 provided with X-axis driving device 52 to move in the front-rear direction (reference numeral 56), work table 58 on which substrate 46 is placed, and each of the drives It is mainly composed of a gantry 63 on which the devices (52, 53, 54) and the work table 58 are disposed, and a control unit (not shown). In the coating device 51, the control unit adjusts the vertical distance between the work table 58 and the dropping device 1 based on the input value of the user, whereby the distance between the dropping points of the droplets discharged from each nozzle 4 (L 1, L2) is adjusted, and the dropping method of dropping the liquid material is performed while moving the dropping device 1 and the work table 58 relatively in the horizontal direction while keeping the vertical distance between the work table 58 and the dropping device 1 constant. Is possible. Here, the dropping points to be dropped onto the workpiece are set by a matrix of m1 rows × m2 columns, and preferably both m1 and m2 are multiples (natural numbers) of the number of nozzles n.

The X-axis drive device 52 is provided with an X-axis slider 59 so as to sandwich this, and the Z-axis drive device 54 and the dropping device 1 can be moved. In addition, Y sliders 60 are provided inside the Y axis driving device 53, and the beam 61 on which the X axis driving device 52 is provided is supported by the beam support member 62 and moves. By configuring the XYZ driving device as described above, the dropping device 1 can be moved relative to the substrate 46. In the present invention, the distance between the drop points (L1, L2) is adjusted by adjusting the discharge port position in the vertical direction (Z direction), so that a mechanism capable of positioning in the Z direction with high accuracy is driven by XYZ. It is preferable to employ in the apparatus. As such an XYZ driving device, a combination mechanism of a ball screw and a motor, a mechanism using a linear motor, a mechanism for transmitting power by a belt, a chain, or the like can be used.
In the present embodiment, the drive device is configured as a so-called gantry type. However, any configuration may be used as long as the dropping device 1 and the substrate 46 (work table 58) can be relatively moved. . For example, an X-axis drive device 52 and a Y-axis drive device 53 may be provided below the work table 58.

In 1st Embodiment, although the structure which provides four dripping apparatuses 1 is illustrated, the number of installation is not limited to this, One may be sufficient and it may be two or more, such as three, Also good.
In the configuration in which a plurality of dropping devices 1 are provided, there are a case where all the dropping devices 1 are the same type and a case where different types of dropping devices 1 are combined. In the case where a plurality of the same dropping devices 1 are provided, it is possible to cope with so-called multi-chamfering in which a plurality of panels are manufactured in the substrate 46. When different types of dropping devices 1 are combined (for example, when the nozzle unit 6 in which the inclination angle of the nozzle 4 is changed for each dropping device 1 is provided), compared with one type of dropping device 1, the distance between the dropping points The distances (L1, L2) can be adjusted more variously.

According to the coating apparatus 51 of the first embodiment described above, it is possible to easily change the distances (L1, L2) between the dropping points when performing dozens or more of multi-point simultaneous coating. The coating device 51 always keeps the liquid crystal spread uniformly by keeping the distance between the sealing material formed in the rectangular frame shape and the liquid crystal droplets in order to block the liquid crystal material, particularly in the dropping injection method (ODF). It is possible to.

<< Second Embodiment >>
FIG. 5 shows a bottom view, a CC sectional view, and a DD sectional view of the nozzle unit 6 used in the dropping device 1 according to the second embodiment. In the following, description of the same parts as those in the first embodiment (parts other than the nozzle part 6) will be omitted, and only different parts will be described.
The nozzle unit 6 of the second embodiment is such that the nozzles are arranged so that the discharge ports (38 to 41) of the four nozzles (34 to 37) face inward (center side of the nozzle unit 6). This is different from the first embodiment.
In the second embodiment, the four planes constituting the nozzle connection surface 28 are inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27 so that the center of the nozzle portion 6 is the innermost portion in the bottom view. . That is, each of the discharge ports A to D (38 to 41) of the nozzles A to D (34 to 37) when viewed from the bottom surface is directed to the vertical axis 42 of the nozzle block 27.
Inside the nozzle block 27, there are an inflow channel 29 communicating with the channel C14 of the dropping device 1, and branch channels A to D (30 to 30) that branch from the inflow channel 29 to the nozzles A to D (34 to 37). 33) is the same as in the first embodiment. However, it differs from the first embodiment in that the branch flow paths A to D (30 to 33) are formed to be bent in the middle. That is, the branch channels A to D (30 to 33) are formed in the direction radiating from the vertical shaft 42 in the upstream portion communicating with the inflow channel 29, and communicate with the nozzles A to D (34 to 37). In the downstream portion, a flow path coaxial with the discharge port central axis 43 of the nozzles A to D (34 to 37) is formed, and the upstream portion and the downstream portion are connected via a bent portion.

Also in the second embodiment, by adjusting the distance between the nozzle and the substrate, it is possible to adjust the distances (L1, L2) of the four dropping points that land on the substrate. In the second embodiment, since the discharge ports (38-41) of the four nozzles (34-37) face inward, the distance between the drop points (L1, L2) is set in a narrower range than in the first embodiment. Suitable for adjusting scenes.

<< Third Embodiment >>
FIG. 6 shows a bottom view and an EE cross-sectional view of the nozzle unit 6 used in the dropping apparatus 1 according to the third embodiment. In the following, description of the same parts as those in the first embodiment (parts other than the nozzle part 6) is omitted, and only different parts will be described.
The nozzle portion 6 of the third embodiment is the same as the first embodiment in that the square nozzles 4 are arranged in a matrix, but is different from the first embodiment in that the number of nozzles 4 is nine. It ’s different. In the nozzle portion 6 of the third embodiment, nine nozzle connection surfaces 28 which are the lower surfaces of the nozzle blocks 27 are partitioned into one, and one nozzle 4 is attached to each partition. The nine sections constituting the nozzle connection surface 28 are rectangular planes of the same size, and are arranged so that the center of the lower surface is the apex. Here, the central section is arranged horizontally. The eight sections other than the center are inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27 so that the discharge port 5 of the nozzle 4 faces outward. This angle is uniform so that the liquid droplet 45 to be applied is arranged at a square corner or a midpoint of the side.

The nozzle block 27 is square when viewed from the bottom. The eight nozzles 4 other than the center are arranged at the center or apex of the side of the square in a bottom view that is slightly smaller than the nozzle block 27. The nozzle 4 in the center is arranged at the intersection of the square diagonal lines. That is, the distance between the nozzles 4 adjacent in the horizontal direction is equal.
In the third embodiment, the nozzle unit 6 is configured by nine nozzles 4, but the number of nozzles 4 is not limited to this, and the nozzle unit 6 is configured by n ² (n is a natural number of 2 or more) nozzles. It is possible. That is, for example, by setting the number of nozzles 4 to a square of 2 or more (that is, 4, 9, 16, 25, 36...), The distance between dropping points (L1) is maintained while maintaining a matrix-like dropping pattern. , L2) can be adjusted equally.

Also in the third embodiment, by adjusting the distance between the nozzle and the substrate, it is possible to adjust the distances (L1, L2) of the nine dropping points that land on the substrate. In the third embodiment, nine drops can be performed simultaneously, so that the productivity can be increased as compared with the first embodiment.

DESCRIPTION OF SYMBOLS 1: Dropping device, 2: Metering part, 3: Plunger, 4: Nozzle, 5: Discharge port, 6: Nozzle part, 7: Switching valve, 8: Large diameter part, 9: Main body, 10: Plunger drive member, 11 : Plunger moving direction, 12: Channel A, 13: Channel B, 14: Channel C, 15: Supply channel, 16: Extension member, 17: Container, 18: Liquid piping, 19: Liquid, 20: Bubble removal mechanism, 21: liquid flow, 22: gas flow, 23: working gas supply pipe, 24: container support member, 25: base plate, 26: connection member, 27: nozzle block, 28: nozzle connection surface, 29: Inflow channel, 30: Branch channel A, 31: Branch channel B, 32: Branch channel C, 33: Branch channel D, 34: Nozzle A, 35: Nozzle B, 36: Nozzle C, 37 : Nozzle D, 38: discharge port A, 39: discharge port B, 40: discharge port C, 41: discharge port 42: Vertical axis of nozzle block, 43: Discharge port central axis, 44: Flight trajectory, 45: Droplet, 46: Substrate (application surface), 47: Branch channel, 51: Application device, 52: X-axis drive Device: 53: Y-axis drive device, 54: Z-axis drive device, 55: X movement direction (left-right direction), 56: Y movement direction (front-back direction), 57: Z movement direction (up-down direction), 58: Work table 59: X-axis slider, 60: Y-axis slider, 61: Beam, 62: Beam support member, 63: Base, 71: Substrate, 72: Droplet, 73: Sealing material

Claims

Measuring unit for measuring liquid material, plunger reciprocating in measuring unit, nozzle unit having a plurality of nozzles having discharge ports, supply channel for supplying liquid material to measuring unit, measuring unit, nozzle unit and measuring unit In the dropping device comprising a switching valve for switching the communication between the section and the supply channel,
In the nozzle portion, the nozzles are arranged so that the intervals between one nozzle and adjacent nozzles are the same, and the angle θ formed by one nozzle and the vertical line is the same. A dropping device characterized in that the nozzle is inclined.
The dropping device according to claim 1, wherein the nozzle is composed of n 2 (n is a natural number of 2 or more) nozzles.
3. The dropping device according to claim 2, wherein the nozzle is disposed in the nozzle portion such that the discharge port of the nozzle faces outward with respect to the vertical center of the nozzle portion.
3. The dropping device according to claim 2, wherein the nozzle is disposed in the nozzle portion such that the discharge port of the nozzle faces inward with respect to a vertical center of the nozzle portion.
The nozzle section includes a nozzle block in which an inflow channel and a branch channel that communicates with the inflow channel and the discharge port are formed, and the nozzle is mounted on the nozzle block. The dropping apparatus according to 1, 2, 3 or 4.
A coating apparatus comprising: the dropping device according to claim 1; a work table on which a substrate is placed; an XYZ driving device that relatively moves the dropping device and the work table; and a control unit having a storage device.
7. The apparatus according to claim 6, comprising a plurality of the dropping devices, wherein the number of nozzles, the nozzle interval, or the nozzle angle θ of one dropping device is different from the nozzle interval or nozzle angle θ of another dropping device. Coating device.
The coating apparatus according to claim 6, comprising a plurality of the dropping devices, wherein the number of nozzles, the interval between the nozzles, and the nozzle angle θ of all the dropping devices are the same.
A dripping method using the coating apparatus according to claim 6, 7 or 8,
By adjusting the vertical distance between the work table and the dropping device based on the input value, the distance (L1, L2) between the dropping points of the droplets discharged from the nozzle is adjusted, and the work table and the dropping device are adjusted. A dropping method characterized in that the liquid material is dropped onto the workpiece while the dropping device and the work table are relatively moved in the horizontal direction while keeping the vertical distance to the workpiece constant.
In the storage device of the control unit, a plurality of correlation patterns between the vertical distance of the work table and the dropping device and the distance (L1, L2) between droplet dropping points are stored,
The dripping method according to claim 9, wherein the input value is a selection value of the correlation pattern.
A dripping method using the coating apparatus according to claim 8, wherein multi-chamfering is performed by performing the same dripping application with all of the plurality of dropping apparatuses.
The dripping method according to claim 11, wherein the workpiece is a liquid crystal panel substrate and the liquid material is liquid crystal.