KR20170015289A - Liquid material dropping device and method - Google Patents

Abstract

[PROBLEMS] To provide a liquid material dripping device and method in which the distance between dropping points can be easily changed when performing simultaneous application of a plurality of points.
A metering section 2 for metering a liquid material, a plunger 3 reciprocating in the metering section 2 and a nozzle section 6 including a plurality of nozzles 4 having a discharge port 5 A supply passage 15 for supplying the liquid material to the metering section 2 and a switch for switching the communication between the metering section 2 and the nozzle section 6 and between the metering section 2 and the supply flow passage 15 In the dripping device including the valve (7), the nozzle (4) is arranged in the nozzle part (6) such that the distance between one nozzle and adjacent nozzles is the same, and one nozzle and a vertical line The present invention also provides a dripping device in which the nozzles are inclined so that the constituent angles &thetas; are all the same, and a method using the device.

Description

TECHNICAL FIELD [0001] The present invention relates to a liquid material dispensing apparatus and method,

The present invention relates to a liquid material dispensing apparatus and method, and more particularly, to a liquid material dispensing apparatus and method capable of performing simultaneous dispensing at a plurality of points capable of changing the distance between dispensing points.

As one of the methods of forming the liquid crystal layer in the manufacturing process of the liquid crystal panel, there is a method called drop injection (ODF). This method is a method in which a liquid crystal material is dropwise added to one side of two substrates to be bonded before joining, and then bonded in vacuum.

Small droplets (liquid droplets 72) of the liquid crystal material enter the frame of the sealing member 73 formed in a rectangular frame shape for blocking the liquid crystal material adhering the liquid crystal material to the substrate 71 (See Fig. 7). It is basically to drop one drop by one dropping device, but it is also possible to drop plural droplets at the same time in order to improve the processing speed. For example, there is the following apparatus as a discharge apparatus which discharges a plurality of droplets simultaneously from one apparatus.

Patent Document 1 discloses a dispenser comprising a dispenser body connectable to a liquid material source, the dispenser body having a fluid channel, a fluid channel outlet communicating with the fluid channel, and a valve seat disposed near the fluid channel outlet, And a valve drive device operatively coupled to the valve member and operable to selectively move the valve member into and out of contact with the valve seat, And a plurality of nozzle outlets communicating with the outlet of the fluid channel, wherein the valve member is provided on the nozzle body, and when the valve member is in contact with the valve seat, A sufficient amount of motion sufficient for simultaneously ejecting a plurality of droplets from the plurality of nozzle outlets at the same time Disclosed is a jetting dispenser which imparts to a liquid material within a null outlet.

Patent Document 2 discloses a line head in which a plurality of head units each having a plurality of nozzles for ejecting ink toward the paper are arranged and in which the plurality of head units are integrated, A line head having an inclination with respect to a normal direction and having an inclination in a direction in which ink ejected from the nozzle is landed toward a boundary with an adjacent head unit.

Patent Document 1: JP-A-2007-167844 Patent Document 2: Japanese Patent Application Laid-Open No. 2003-25565

Conventionally, in the case of simultaneous application of a plurality of droplets by using a dripping apparatus having a plurality of nozzles, it is necessary to replace the nozzle unit itself in which the nozzles are installed in order to change the distance between dropping points and the shape of the coated pattern, It was difficult to swap wealth itself. On the other hand, if the droplet application is performed without replacing the nozzle part itself, there is a case that the quality is greatly affected. Particularly, when liquid crystal droplets are applied in a matrix form so as to enter the frame of the sealing member formed in the shape of a rectangular frame for blocking the liquid crystal material, if the distance between the dropping points and the pattern shape do not easily change, The distance between the sealing member and the liquid crystal droplet can not be appropriately maintained, and there is a problem in that unevenness occurs in the widening of the liquid crystal at the time of bonding.

If a configuration for deforming the shape of the nozzle itself is adopted as in Patent Document 2, there is a problem that dispensing conditions are different between the respective nozzles, and high-precision coating can not be performed with respect to the amount and position.

Accordingly, an object of the present invention is to provide a liquid material dripping apparatus and method which can easily change the distance between dropping points when performing simultaneous application of a plurality of points.

The present invention relating to a dripping device includes a metering section for metering a liquid material, a plunger reciprocating in the metering section, a nozzle section including a plurality of nozzles having a discharge port, And a switching valve for switching communication between the metering section, the nozzle section, and the metering section and the supply passage, wherein the nozzle section is provided with a plurality of nozzles, The nozzles are arranged so that the angle formed by one of the nozzles and the vertical line becomes equal to each other.

In the above dripping device, the nozzle may be characterized in that the nozzle is composed of n ² (n is a natural number of 2 or more) nozzles. In addition, the discharge port of the nozzle may be arranged in the vertical direction center of the nozzle portion The nozzle may be arranged so as to face the outside of the nozzle or the nozzle may be arranged such that the discharge port of the nozzle faces inward with respect to the center in the vertical direction of the nozzle.

In the above dripping device, the nozzle section may include a nozzle block having one inflow channel and an inflow channel and a branch channel communicating with the ejection port, and the nozzle may be mounted on the nozzle block.

The present invention relating to a coating apparatus is characterized by including the above-described dropping device, a workpiece table on which a substrate is mounted, an XYZ drive device for relatively moving the dropping device and the workpiece table, and a control section having a storage device.

In the coating device, it is also possible to include a plurality of the dripping devices, and the number of nozzles of one loading device, the interval of the nozzles, or the angle of the nozzle is different from the interval of the nozzles of the other dripping devices or the angle of the nozzle Or a plurality of the dropping devices, and the number of nozzles of all the dropping devices, the intervals of the nozzles, and the angle of the nozzle may be the same.

The present invention relating to a dripping method is a dripping method using the application device, wherein a vertical distance between the workpiece table and the dripping device is adjusted on the basis of an input value so that dropping point distances L1, L2 And the liquid material is dropped onto a workpiece while the dripping device and the workpiece table are moved relative to each other in a horizontal direction while the vertical distance between the workpiece table and the dripping device is kept constant.

In the above dripping method, the storage device of the control unit stores a plurality of correlation patterns of the vertical distance between the workpiece table and the dripping device and the dropping point distances (L1, L2) of the droplets, And may be a selection value of a relation pattern.

The present invention relating to a dripping method from another viewpoint is a dripping method using a coating apparatus comprising a plurality of the dripping apparatuses and having the same number of nozzles of all the dripping apparatuses, The same dropping application is performed in all of the plurality of dropping apparatuses to perform plural number cutting. Here, the workpiece may be a liquid crystal panel substrate, and the liquid material may be liquid crystal.

According to the present invention, it is possible to easily change the distance between dropping points when performing simultaneous application of a plurality of points.

1 is a schematic side view of a dumping apparatus according to the first embodiment.
Fig. 2 (a) is a bottom view of the nozzle unit used in the loading apparatus according to the first embodiment, Fig. 2 (b) is a sectional view taken along the line AA, and Fig. 2 (c) is a sectional view taken along the line BB.
3 is an explanatory diagram for explaining the relationship between the dropping height and the dropping point distance when the dropping device according to the first embodiment is used. Fig. 3 (a) shows the dropping height Ha, Fig. 3 (b) shows the dropping height Hb, and Fig. 3 (c) shows the dropping height Hc.
4 is a schematic perspective view of a coating device according to the first embodiment.
FIG. 5A is a bottom view of the nozzle unit according to the second embodiment, FIG. 5B is a cross-sectional view taken along the line CC, and FIG.
6 (a) is a bottom view of the nozzle portion according to the third embodiment, and Fig. 6 (b) is a sectional view taken along the line EE.
7 is an explanatory view for explaining a state when a liquid is dropped onto a substrate in a manufacturing process of a liquid crystal panel.

Hereinafter, a form example for carrying out the present invention will be described.

≪ First Embodiment >

The dripping apparatus 1 according to the first embodiment includes four nozzles 4 arranged equidistantly from the center in the vertical direction of the nozzle unit 6. The distance between the nozzle 4 and the substrate 46 The distance of the four dropping points to be landed on the substrate 46 can be adjusted. The dripping device 1 is mounted on a coating device 51 including XYZ driving devices 52, 53 and 54 and performs a coating operation while moving relative to a workpiece table on which an object to be coated is mounted.

Hereinafter, the configurations and operations of the dropping device 1 and the application device 51 will be described in detail.

<Dropping device>

Fig. 1 shows a schematic side view of a dumping device 1 according to the first embodiment.

The loading device 1 of the first embodiment is provided with a tubular metering section 2, a plunger 3 in contact with the metering section 2, a nozzle section 6 having a plurality of nozzles 4, A switching valve 7 for switching the communication between the metering section 2 and the nozzle section 6 and between the metering section 2 and the supply flow passage 15 and an L- 9). &Lt; / RTI &gt;

The metering section 2 has a metering hole, which is a cylindrical space, inside the metering hole, and the plunger 3 is slidably inserted into the metering hole.

The plunger 3 is a rod-like member having a large-diameter portion 8 at an end thereof and an end portion opposite to the large-diameter portion 8 is inserted into the metering portion 2. [ The plunger 3 is held in the vicinity of the large-diameter portion 8 by the plunger drive member 10 and is moved in the direction of the reference numeral 11 by the plunger drive device for moving the plunger drive member 10 And is movable. The plunger 3 is brought into close contact with the inner wall of the metering section 2 so that the liquid 19 can be sucked into the metering section 2 or the liquid 19 can be extruded from the metering section 2. [

The switching valve 7 is provided with a flow passage A 12 communicating with the supply flow passage 15, a flow passage B 13 communicating with the metering section 2, a flow passage C 14 communicating with the nozzle section 6, It is possible to selectively switch the first position for communicating the supply passage 15 and the metering section 2 or the second position for communicating the metering section 2 and the nozzle section 6. [ Here, the switching valve 7 may be a rotary valve or a slide valve. It is preferable that the flow path B 13 and the flow path C 14 are disposed so as to be in the same direction as the plunger moving direction (reference numeral 11). This is to transmit the force by the plunger 3 to the liquid 19 without wasting it at the time of discharging.

The supply flow path 15 is a flow path communicating with the liquid pipe 18 for supplying the liquid 19 stored in the container 17 and is provided inside the extension member 16. The extension member 16 is fixed to the main body 9 so that the supply flow path 15 and the flow path A 12 are in airtight communication. A bubble removing mechanism (mechanism) 20 is provided between the supply passage 15 and the liquid pipe 18. As the bubbling mechanism 20, for example, there are a first flow path communicating with the liquid material supply portion side, a second flow path communicating with the metering portion side, and a second flow path communicating with the first flow path and the second flow path, A mechanism (see Japanese Patent No. 4898778 for the applicant) in which the discharge port of the first flow path is provided at a position above the suction port of the second flow path can be used. The bubble removing mechanism 20 may not be provided.

The container 17 for storing the liquid 19 is connected to an operating gas supply pipe 23 for supplying an operating body for pressurizing the liquid 19. [

The main body 9 is mounted on a base plate 25 and a container supporting member 24 for fixing the container 17 is mounted on the base plate 25. The base plate 25 is mounted on a connecting member 26 for connecting with the XYZ driving apparatuses 52, 53, 54 and a stationary stand or the like to be described later.

<Nozzle part>

Fig. 2 shows a bottom view, a section A-A, and a section B-B, respectively, of the nozzle unit 6 used in the loading apparatus according to the first embodiment.

The nozzle unit 6 of the first embodiment has a nozzle block 27 having a five-sided cross section and four nozzles 4 provided on the nozzle connecting surface 28 which is the bottom surface of the nozzle block 27 . The nozzle unit 6 is detachably mounted on the lower surface of the main body 9. [

Hereinafter, for convenience of explanation, the four nozzles 4 are referred to as nozzles A to D (34 to 37), and the discharge ports 5 of four nozzles are referred to as discharge ports A to D (38 to 41).

The nozzle block 27 is provided with an inflow channel 29 communicating with the flow channel C 14 of the dropping device 1 and a branch flow channel A branching from the inflow channel 29 to the nozzles A to D D 30 to 33 are formed.

The bottom surface of the nozzle block 27, which is the inclined surface, is divided into four sections, and one nozzle 4 is mounted in one section (reference numerals 34 to 37). In the first embodiment, as shown in Fig. 2, the nozzle connecting surface 28 is formed by arranging four equally sized rectangular planes whose vertices are the centers of the lower surfaces. That is, the nozzle block 27 is square when viewed from the bottom surface. Dividing the number of the lower face of the nozzle block 27 is not limited to the number of compartments of illustration, for example, it is possible to set any of a plurality of compartments, such as 2-16, but the number of compartments will be ² n (n is 2 Or more natural number). It is preferable that the number of the lower surface of the nozzle block 27 and the number of the nozzles 4 are the same.

The nozzles 4 mounted on the inclined surfaces are arranged at equal intervals so as to form a square when viewed from the bottom. That is, the nozzle A 34, the nozzle B 35, the nozzle C 36 and the nozzle D 37 are arranged in a matrix. The interval between one nozzle 4 and another adjacent nozzle 4 is the same regardless of which nozzle 4 is selected.

Each of the nozzles 4 has one discharge port, and the discharge port central axis 43 is mounted so as to be perpendicular to the nozzle connection surface 28. Since the respective surfaces of the nozzle connecting surface 28 are inclined at predetermined angles with respect to the vertical axis 42 of the nozzle block 27 in the first embodiment, the discharge ports A to D (38 to 41) Of the vertical direction. The inclination angles of the respective surfaces of the nozzle connecting surface 28 are equal. That is, θa, θb, θc, and θd shown in FIG. 2 are all equal (θa = θb = θc = θd). In other words, the angle θ (for example, 5 to 60 degrees) constituted by one nozzle 4 and the vertical line becomes the same regardless of which nozzle 4 is selected.

Further, the discharge ports A to D (38 to 41) are arranged so as to face the respective corners of the nozzle block 27. That is, the discharge ports A to D (38 to 41) are arranged on the diagonal line of the bottom surface 28 (see Fig. 2 (c)). Therefore, the quadrangle formed by connecting the four droplets 45 discharged from the discharge ports A to D (38 to 41) is formed by arranging the nozzles A to D (34 to 37) of the nozzle block 27 and the arrangement of the nozzles A to D ). The branching flow paths A to D 30 to 33 are formed so as to be coaxial with the respective central axes of the nozzles A to D (34 to 37) (the discharge port central axis 43) so that the discharge of the liquid 19 can be performed smoothly. .

<Discharge Operation>

The outline of the discharging operation in the loading device 1 described above is as follows.

(1) Preparation (initial charging step)

First, the liquid 19 is filled up to the upper end of the metering section 2 without inserting the plunger 3 into the metering section 2. Then, the plunger 3 is inserted into the metering portion 2 and fixed to the plunger driving member 10. Then, The metering portion 2 and the nozzle portion 6 are communicated with each other by the switching valve 7 and the plunger 3 is pushed out of the nozzle portion 6 until the liquid 19 comes out from the discharge port 5. [ (Advancing direction).

(2) Discharge process

The metering section 2 and the nozzle section 6 are communicated by the switching valve 7 and the plunger 3 is moved at a high speed in the advancing direction so that the same amount of liquid 19 is discharged from the four discharge ports 5, (Flying).

(3) Suction process

The liquid supply port 15 and the metering section 2 are communicated with the switching valve 7 to move the plunger 3 in the direction opposite to the advancing direction ).

By repeating the above steps (2) and (3), the coating operation by the continuous fixed amount discharge can be performed. The steps (2) and (3) may be either of the first or second step.

<Adjustment of the dropping point distance>

3 is an explanatory diagram for explaining the relationship between the height H of the nozzle unit 6 and the dropping point distance L when the dripping apparatus 1 according to the first embodiment is used for dropping. 3, the upper drawing shows the plan view when viewed from the side, and the lower drawing shows the plan view when the substrate 46 is viewed from the upper surface. 3, only the nozzle unit 6 is illustrated in a simplified manner.

The droplet 45 discharged from the discharge port 5 of the nozzle 4 reaches the substrate 46 as the coated surface while drawing the parabolic emergency trajectory 44 because the nozzle 4 is inclined at a predetermined angle. Since the four nozzles 4 arranged at regular intervals from the center of the nozzle portion 6 are equally inclined radially, the droplets 45 applied to the substrate 46 are arranged in a rectangular shape . That is, as shown in the lower side of Fig. 3, the dropping point distance L1 in the vertical direction becomes equal to the dropping point distance L2 in the horizontal direction (L1 = L2).

The distance between the nozzle portion 6 (the ejection port 5) and the substrate 46 (in other words, the distance between the nozzle portion 6 and the substrate 46) is small because the nozzle 4 is inclined by a predetermined angle to draw the parabolic- (Height H) of the load-point distances L1, L2 in the longitudinal direction and the lateral direction can be changed.

Here, (b) drawn at the center is used as a reference. (b), when the distance from the substrate 46 to the discharge port 5 is Hb, the dropping point distance in the vertical direction is L1b and the dropping point distance in the horizontal direction is L2b. the droplet 45 reaches the substrate 46 before it spreads on the parabolic curve, so that the dropping point distance becomes shorter as compared with the case of (b) (La < Lb).

On the other hand, when the nozzle unit 6 is elevated as shown in (c), since the droplet 45 extends on the parabolic line and then reaches the substrate 46, the dropping point distance becomes longer as compared with the case of (b) Lb).

As described above, since the nozzles 4 are inclined at a predetermined angle, the dropping point distances L1 and L2 in the vertical direction and the horizontal direction can be changed only by changing the height H of the nozzle portion 6.

The relationship between the inclination of the nozzle 4, the height H of the nozzle unit 6 and the dropping point distances L1 and L2 in the vertical direction and the horizontal direction is set as a table or a graph in accordance with a preliminary experiment, (Not shown). In this way, it is possible to easily realize desired drop-in point distances L1 and L2 in the desired vertical and horizontal directions based on the table or graph displayed on the display device (not shown). According to the experiment of the inventor, for example, when the nozzle 4 is inclined by 10 degrees and the discharge is performed from the height of 15 mm, the dropping point distances L1 and L2 are 7.5 mm each, and when discharging is performed from the height 10 mm When the distances L1 and L2 between the dropping points were 6.5 mm and 20 mm, respectively, the dropping point distances L1 and L2 were 8.5 mm respectively.

<Coating device>

Fig. 4 shows a schematic perspective view of a coating device 51 including the dripping device 1 according to the first embodiment.

The application device 51 of the embodiment is provided with a Z axis driving device 54 for moving the loading device 1 in the up and down direction (reference numeral 57) and a Z axis driving device 54, (Reference numeral 55), a Y-axis driving device 52 for moving the beam 61 on which the X-axis driving device 52 is installed in the forward and backward direction (reference numeral 56) A work table 58 on which the substrate 46 is mounted, a mount 63 on which the respective drive mechanisms 52, 53 and 54 and the work table 58 are mounted, And a control unit that does not include the control unit. The coating device 51 adjusts the vertical distance between the work table 58 and the loading device 1 on the basis of the input value of the user so that the dropping point distance L1 of the droplet discharged from each nozzle 4 And the liquid material is dropped while relatively moving the dropping device 1 and the work table 58 in the horizontal direction while adjusting the vertical distance between the work table 58 and the loading device 1 The dropping method can be carried out. Here, the dropping point to be dropped on the workpiece is set by a matrix of m1 row.times.m2 columns, and preferably both m1 and m2 are a multiple (natural number) of the number of nozzles n.

The X-axis driving device 52 is provided with an X-axis slider 59 for holding the Z-axis driving device 54 and the loading device 1. A Y-slider 60 is provided on the inside of the Y-axis driving device 53 and a beam 61 on which the X-axis driving device 52 is mounted is held on the beam supporting member 62 Move. By configuring the XYZ drive apparatus as described above, the dropping apparatus 1 can be relatively moved with respect to the substrate 46. In the present invention, since the dropping point distances (L1, L2) are adjusted by adjusting the position of the discharge port in the vertical direction (Z direction), it is preferable to adopt a mechanism capable of positioning in the Z direction with high precision in the XYZ drive apparatus Do. As such an XYZ driving apparatus, a combination mechanism of a ball screw and a motor, a mechanism using a linear motor, a mechanism for transmitting power to a belt, a chain, or the like can be used.

In this embodiment, the driving device is constructed as a so-called gantry type. However, any structure may be employed as long as it can relatively move the dropping device 1 and the substrate 46 (workpiece table 58) do. For example, the X-axis driving device 52 and the Y-axis driving device 53 may be provided below the work table 58. [

In the first embodiment, a configuration in which four dumping devices 1 are installed is exemplified, but the number of dumping devices 1 is not limited to this, but may be one, two, three, or the like.

In a configuration in which a plurality of dumping devices 1 are provided, there are cases where both the dumping device 1 of the same kind and the dumping device 1 of a different kind are combined. In the case where a plurality of the same dumping apparatuses 1 are provided, it is possible to cope with so-called multi-sided dicing, in which a plurality of panels are manufactured in the substrate 46. In the case where different types of dripping apparatuses 1 are combined (for example, in the case where the nozzle unit 6 in which the inclination angle of the nozzle 4 is changed for each of the dripping apparatuses 1) is provided, It is possible to more variously adjust the dropping point distances L1 and L2 as compared with the device 1. [

According to the coating device 51 of the first embodiment described above, it is possible to easily change the distances L1 and L2 between the dropping points when performing application of several tens or more of multiple points simultaneously. The coating apparatus 51 always keeps the distance between the sealing member formed in a rectangular frame shape and the liquid crystal droplet appropriately in order to block the liquid crystal material in the drop injection method (ODF) .

&Lt; Embodiment 2 &gt;

5 is a bottom view, a C-C sectional view and a D-D sectional view of the nozzle unit 6 used in the loading apparatus 1 according to the second embodiment, respectively. Hereinafter, the same portions as those of the first embodiment (portions other than the nozzle portion 6) are not described, and only different portions will be described.

The nozzle unit 6 of the second embodiment differs from the first embodiment in that the respective nozzles are provided such that the respective ejection openings 38 to 41 of the four nozzles 34 to 37 are directed to the inside (toward the center side of the nozzle unit 6) , Which is different from the first embodiment.

Four planes constituting the nozzle connecting surface 28 are formed on the vertical axis 42 of the nozzle block 27 so that the center of the nozzle portion 6 becomes the innermost portion when viewed from the bottom surface As shown in Fig. That is, the discharge ports A to D (38 to 41) of the nozzles A to D (34 to 37) viewed from the bottom face each face the vertical axis 42 of the nozzle block 27.

The nozzle block 27 is provided with an inflow channel 29 communicating with the flow channel C 14 of the dropping device 1 and a branch flow channel A branching from the inflow channel 29 to the nozzles A to D D 30 to 33 are formed in the same manner as in the first embodiment. However, this embodiment is different from the first embodiment in that branching flow paths A to D (30 to 33) are formed so as to be folded halfway. That is, the branching flow paths A to D (30 to 33) are formed such that a flow path is formed in a direction to radiate from the vertical axis 42 in the upstream portion communicating with the inflow passage 29, A flow path coaxial with the discharge port central axis 43 of the nozzles A to D (34 to 37) is formed, and the upstream portion and the downstream portion are connected through the bent portion.

Also in the second embodiment, by adjusting the distance between the nozzle and the substrate, it is possible to adjust the distances L1 and L2 of four dropping points landed on the substrate. The second embodiment is suitable for a scene in which the dropping point distances L1 and L2 are adjusted in a narrower range than in the first embodiment because the respective ejection openings 38 to 41 of the four nozzles 34 to 37 are directed inward. Do.

&Lt; Third Embodiment &gt;

6 is a bottom view and a sectional view taken along the line E-E of the nozzle unit 6 used in the loading apparatus 1 according to the third embodiment. Hereinafter, the same portions as those of the first embodiment (portions other than the nozzle portion 6) are not described, and only different portions will be described.

The nozzle unit 6 of the third embodiment is common to that of the first embodiment in that the nozzles 4 having a square number are arranged in a matrix form. However, the number of the nozzles 4 is nine in the first embodiment, It is different. In the nozzle unit 6 of the third embodiment, the nozzle connecting surface 28, which is the lower surface of the nozzle block 27, is partitioned into nine, and one nozzle 4 is mounted in one partition. The nine compartments constituting the nozzle connecting surface 28 are formed in a quadrangular plane of the same size, and the center of the lower surface is arranged as a vertex. Here, the central section is horizontally arranged. The eight sections other than the center are inclined at a predetermined angle with respect to the vertical axis 42 of the nozzle block 27 such that the discharge port 5 of the nozzle 4 faces outward. This angle is equalized so that the droplets 45 to be applied are arranged at the center of an angle or a side of a square.

The nozzle block 27 is square when viewed from the bottom. The eight nozzles 4 other than the center are disposed at the center or the vertex of the side in the square when viewed from a bottom surface slightly smaller than the nozzle block 27. [ At the intersection of the diagonal lines of this square, the nozzle 4 at the center is arranged. That is, the distances of the adjacent nozzles 4 in the horizontal direction are equal.

In the third embodiment, although the configuration of the nozzle part 6 by a nozzle (4) of nine, the number of the nozzle 4 is not limited to this, n ^2, the nozzle unit by the (n is a natural number of 2 or more) of nozzle (6). That is, for example, by setting the number of nozzles 4 to a square of 2 or more (i.e., 4, 9, 16, 25, 36 ...), dropping point distances L1, It can be adjusted evenly.

Also in the third embodiment, by adjusting the distance between the nozzle and the substrate, it is possible to adjust the distances L1 and L2 of nine dropping points landed on the substrate. In the third embodiment, since the dropping can be performed at the same time, productivity can be improved as compared with the first embodiment.

The present invention relates to a plunger driving device and a plunger driving device which are provided with a plunger driving device and a plunger driving device. The liquid is discharged to the outside of the container through the liquid supply port and the liquid is discharged from the container to the liquid supply port. The flow of the gas 22 the working gas supply pipe 24 the container supporting member 25 the base plate 26 the connecting member 27 the nozzle block 28 the nozzle connecting surface 29 the inlet flow path 30 the inlet flow path, 35: nozzle A, 35: nozzle B, 36: nozzle C, 37: nozzle D, 38: discharge port A, 39: discharge port A, The spraying device is provided with a plurality of nozzles for ejecting droplets of the droplets from the droplets ejected from the droplet ejecting head to the droplet ejecting head. , 52: X-axis driving device, 53: Y-axis driving device, 54: Z axis A workpiece table; 59: an X-axis slider; 60: a Y-axis slider; and 60: a Y-axis slider, 61: beam, 62: beam supporting member, 63: mount, 71: substrate, 72: droplet, 73:

Claims (12)

A metering unit for metering the liquid material; A plunger reciprocating in the metering unit; A nozzle unit including a plurality of nozzles having discharge ports; A supply passage for supplying the liquid material to the metering section; And a switching valve for switching communication between the metering section, the nozzle section, and the metering section and the supply passage,
Wherein the nozzles are disposed such that the intervals between one nozzle and adjacent nozzles are equal to each other and the nozzles are inclined so that the angles?
Loading device. The method according to claim 1,
Wherein the nozzle comprises n ² nozzles (n is a natural number of 2 or more) nozzles. 3. The method of claim 2,
Wherein the nozzle is disposed in the nozzle unit so that the ejection port of the nozzle faces outward with respect to the center in the vertical direction of the nozzle unit. 3. The method of claim 2,
Wherein the nozzle is disposed in the nozzle unit so that the discharge port of the nozzle faces inward with respect to the center in the vertical direction of the nozzle unit. 5. The method according to any one of claims 1 to 4,
Wherein the nozzle section includes a nozzle block having one inflow channel and a branch channel communicating with the inflow channel and the ejection port, and the nozzle is mounted to the nozzle block. The loading device according to claim 1,
A workpiece table on which a substrate is mounted;
An XYZ driving device for relatively moving the loading device and the work table; And
And a control unit having a storage device
Application device. The method according to claim 6,
Wherein a plurality of the dripping devices are included, and the number of nozzles, the interval of the nozzles, or the angle? Of the nozzles of one dripping device are different from the intervals of the nozzles of the other dripping devices or the angle? Of the nozzles. The method according to claim 6,
Wherein a plurality of the dripping devices are included, and the number of nozzles of all the dripping devices, the intervals of the nozzles, and the angle of the nozzle are the same. A dripping method using the application device according to any one of claims 6 to 8,
And adjusting a vertical distance between the work table and the dripping device based on an input value to adjust a dropping point distance (L1, L2) of a droplet discharged from the nozzle, The liquid material is dropped onto a workpiece while relatively moving the loading table and the work table in a horizontal direction,
Loading method. 10. The method of claim 9,
The storage device of the control unit stores a plurality of correlation patterns of vertical distances between the workpiece table and the dripping device and dropping point distances (L1, L2)
Wherein the input value is a selection value of the correlation pattern. As a dropping method using the application device of claim 8,
Wherein the same dropping application is performed in all of the plurality of dropping apparatuses to perform plural number cutting,
Loading method. 12. The method of claim 11,
Wherein the workpiece is a liquid crystal panel substrate, and the liquid material is liquid crystal.

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