TWI712453B - Application apparatus and application method - Google Patents

Application apparatus and application method Download PDF

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TWI712453B
TWI712453B TW108110074A TW108110074A TWI712453B TW I712453 B TWI712453 B TW I712453B TW 108110074 A TW108110074 A TW 108110074A TW 108110074 A TW108110074 A TW 108110074A TW I712453 B TWI712453 B TW I712453B
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forming liquid
film forming
flow path
coating device
upper mold
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TW108110074A
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Chinese (zh)
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TW202003116A (en
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吉秀人
山本章仁
前川恒広
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日商埃納科技股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C7/00Apparatus specially designed for applying liquid or other fluent material to the inside of hollow work
    • B05C7/04Apparatus specially designed for applying liquid or other fluent material to the inside of hollow work the liquid or other fluent material flowing or being moved through the work; the work being filled with liquid or other fluent material and emptied
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • B05C1/027Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0413Heating with air
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

An objective of this invention is to provides an application apparatus capable of efficiently and quickly applying film-forming liquid on the edge-surface of a through hole and edge-surface of an out peripheral of a work, wherein a film formation liquid flow path connecting to the edge-surface of the hole is formed by under mold holding the work, and an upper mold covering the work, and the work, the upper mold having a guiding path guiding the film formation liquid into the film formation liquid flow path, a releasing path for releasing the film formation liquid from the film formation liquid flow path, and a connecting flow path for connecting the formation liquid flow path, and allowing the film formation liquid flow guided from the guiding path flows through the film formation liquid path and the connecting flow path, and released from the releasing path, so as to form the connecting path.

Description

塗布裝置及塗布方法 Coating device and coating method

本發明係關於塗布裝置以及塗布方法,更具體地係關於用以在印刷配線基板等基板、板狀樹脂成型品、玻璃成形品等產品上形成之穿透孔的孔端面、外周邊緣端面上塗布膜形成液之塗布裝置以及塗布方法。 The present invention relates to a coating device and a coating method, and more specifically to a hole end surface and an outer peripheral edge end surface of a through hole formed in a substrate such as a printed wiring board, a plate-shaped resin molded product, a glass molded product, etc. Film forming liquid coating device and coating method.

一般地,使用利用了玻璃環氧材料、合成材料、紙苯酚材料等的印刷配線基板作為電子部件之安裝用基板。玻璃環氧材料係於層疊了玻璃纖維布之材料上含浸環氧樹脂之材料。合成材料係於表面使用玻璃布、芯材使用纖維素紙、無紡布之材料。紙苯酚材料係於牛皮紙上含浸了苯酚樹脂之材料。 Generally, printed wiring boards using glass epoxy materials, synthetic materials, paper phenol materials, etc. are used as substrates for mounting electronic components. Glass epoxy material is a material in which epoxy resin is impregnated on a material laminated with glass fiber cloth. Synthetic materials use glass cloth on the surface, cellulose paper and non-woven fabric for the core material. The paper phenol material is made of kraft paper impregnated with phenol resin.

對這些環氧玻璃材料、合成材料、紙苯酚材料施以切斷加工時,會在切斷部產生由環氧樹脂或者玻璃纖維等構成之細小塵埃。這些細小塵埃成為引起基板線路接觸不良、品質低下等原因。因此較佳為在製造印刷配線基板時除去基板切斷時所產生之塵埃。When these epoxy glass materials, synthetic materials, and paper phenol materials are cut, fine dust composed of epoxy resin or glass fiber will be generated in the cut part. These fine dusts become the cause of poor substrate circuit contact and poor quality. Therefore, it is preferable to remove dust generated when the substrate is cut when the printed wiring board is manufactured.

另外,即使暫時從印刷配線基板之切斷部端面去掉了塵埃,由於印刷配線基板之端面部分很脆,故仍然有於除去後之使用中崩壞而產生更多塵埃的可能。 In addition, even if dust is temporarily removed from the end surface of the cut portion of the printed wiring board, since the end surface of the printed wiring board is very fragile, there is still a possibility that it will collapse during use after removal and generate more dust.

於是本發明之申請人提案了藉由於包含基板端面之周向邊緣部塗布膜形成液,形成膜,從而能夠防止端面部分崩壞之塗布裝置以及塗布方法(專利文獻1)。 Therefore, the applicant of the present invention proposes a coating device and a coating method that can prevent the end surface from being broken by applying a film forming liquid to the peripheral edge portion including the end surface of the substrate to form a film (Patent Document 1).

於專利文獻1記載之塗布裝置中,藉由使能夠夾著基板端部之對向配置的一對塗布滾輪沿著基板周向邊緣移動,從而於包含基板端面之周向邊緣部塗布膜形成液。 In the coating device described in Patent Document 1, a pair of coating rollers that can sandwich the end of the substrate are moved along the peripheral edge of the substrate to apply the film forming liquid to the peripheral edge of the substrate. .

進一步本發明之申請人還提案了一種藉由噴墨方式除了為基板周向邊緣部端面外,還能夠為基板內形成之孔的端面也塗布膜形成液之塗布裝置以及塗布方法,(專利文獻2)。 Furthermore, the applicant of the present invention has also proposed a coating device and a coating method that can coat the end surface of the hole formed in the substrate with the film forming liquid by the inkjet method in addition to the end surface of the peripheral edge of the substrate, (Patent Document 2).

此外也有對板狀樹脂成型品、玻璃成型品等產品之孔端面、外周邊緣端面形成塗膜之需求。 In addition, there is also a demand for forming a coating film on the hole end surface and the outer peripheral edge end surface of the plate-shaped resin molded product, glass molded product, etc.

然而利用上述塗布滾輪之方式以及噴墨方式之情形時,使前述塗布滾輪或者噴墨部沿著產品周向邊緣移動需要時間,故發生不能充分應對大量需要處理之產品的狀況。 However, in the case of the aforementioned coating roller method and the inkjet method, it takes time to move the aforementioned coating roller or the inkjet portion along the peripheral edge of the product, so that the situation cannot adequately cope with a large number of products that need to be processed.

專利文獻1 特開2015-3303號公報 Patent Document 1 JP 2015-3303 No.

專利文獻2 特開2018-008210號公報 Patent Document 2 JP 2018-008210 A

(解決課題之手段及發明之功效) (Means to solve the problem and the effect of the invention)

有鑒於上述課題,本發明之目的在於提供一種塗布裝置以及塗布方法,其能夠效率良好且快速地於產品上形成之穿透孔之端面、外周邊緣端面塗布膜形成液。 In view of the above-mentioned problems, the object of the present invention is to provide a coating device and a coating method that can efficiently and quickly coat the end surface of the through hole and the peripheral edge end surface of the product with the film forming liquid.

為了實現上述目的,本發明涉及之塗布裝置(1)係於產品上形成之孔端面塗布膜形成液之塗布裝置,其中,藉由載置前述產品之下模、覆蓋前述產品之上模以及前述產品,形成與前述孔端面相接之膜形成液流路;前述上模具備將前述膜形成液導入至前述膜形成液流路之導入路、將前述膜形成液從前述膜形成液流路排出之排出路以及連接前述膜形成液流路之間之連接流路;以使從前述導入路導入之膜形成液不間斷地流經前述膜形成液流路以及前述連接流路,從前述排出路排出的方式形成前述連接流路。 In order to achieve the above-mentioned object, the coating device (1) of the present invention is a coating device for coating a film forming liquid on the hole end surface formed on a product, wherein the lower product mold is placed, the upper product mold is covered, and the product Product, forming a film forming liquid flow path in contact with the end face of the hole; the upper mold is equipped with an introduction path for introducing the film forming liquid into the film forming liquid flow path, and discharging the film forming liquid from the film forming liquid flow path The discharge path and the connection flow path connecting the aforementioned membrane forming liquid flow path; so that the membrane forming liquid introduced from the aforementioned introduction path flows continuously through the aforementioned membrane forming liquid flow path and the aforementioned connection flow path from the aforementioned discharge path The way of discharge forms the aforementioned connection flow path.

根據上述塗布裝置(1),從前述導入路導入之前述膜形成液藉由前述連接流路,通過全部膜形成液流路,從前述排出路排出,故藉由膜形成液於前述產品之孔端面上不間斷地流動,能夠確實地、快速地塗布膜形成液。 According to the above coating device (1), the film forming liquid introduced from the introduction path passes through the entire film forming liquid flow path through the connection flow path, and is discharged from the discharge path, so that the film forming liquid enters the hole of the product The end surface flows uninterruptedly, and the film forming liquid can be applied reliably and quickly.

另外,由於於前述產品上表面覆蓋前述上模、下表面覆蓋前述下模,故能夠防止於前述穿透孔之周向邊緣之上表面以及下表面塗布膜形成液。 In addition, since the upper surface of the product is covered with the upper mold and the lower surface is covered with the lower mold, it is possible to prevent the film forming liquid from being applied to the upper surface and the lower surface of the peripheral edge of the penetration hole.

此外,還能夠確實地、快速地於板狀樹脂成型品、玻璃成型品等大型產品之孔端面塗布膜形成液。 In addition, it is possible to reliably and quickly apply the film forming liquid to the hole end surfaces of large products such as plate-shaped resin molded products and glass molded products.

另外本發明涉及之塗布裝置(2),其中,於上述塗布裝置(1)中,還具備包圍前述產品之外周邊緣端面之殼體,藉由前述下模、前述殼體、前述上模,以形成與前述產品之外周邊緣端面相接之膜形成液流路的方式構成。 In addition, the coating device (2) of the present invention, wherein, in the coating device (1), a casing surrounding the outer peripheral edge of the product is further provided, and the lower mold, the casing, and the upper mold are used to It is constructed to form a liquid flow path in contact with the outer peripheral edge of the aforementioned product.

根據前述塗布裝置(2),藉由構造簡單、製造成本低廉之裝置,不僅能夠於產品之孔端面,還能夠於產品之外周邊緣端面確實地、快速地塗布膜形成液。 According to the aforementioned coating device (2), with a simple structure and low manufacturing cost, the film forming liquid can be applied not only to the hole end surface of the product, but also to the outer peripheral edge end surface of the product, reliably and quickly.

另外,本發明涉及之塗布裝置(3),其中,於上述塗布裝置(1)或者(2)中,前述上模、於內部具備作為前述導入路、前述排出路以及作為前述連接流路之隧道型連接流路而構成。 In addition, the coating device (3) of the present invention, wherein, in the coating device (1) or (2), the upper mold is provided with a tunnel as the introduction path, the discharge path, and the connection flow path. It is constructed by connecting flow paths.

根據上述塗布裝置(3),由前述導入路所導入之前述膜形成液形成為藉由前述隧道型連接流路,通過全部膜形成液流路,從前述排出路排出,從而藉由膜形成液之不間斷的流動,能夠確實地、快速地於前述產品之孔端面或者前述產品之孔端面以及外周邊緣端面上塗布膜形成液。 According to the coating device (3), the film forming liquid introduced from the introduction path is formed by the tunnel-type connection flow path, passes through all the film forming liquid flow paths, and is discharged from the discharge path, so that the film forming liquid The uninterrupted flow can reliably and quickly apply the film-forming liquid on the hole end surface of the product or the hole end surface and the peripheral edge end surface of the product.

另外,由於前述上模內部設置有前述導入路、前述排出路以及前述隧道型連接流路,故能夠容易地操作前述上模。 In addition, since the introduction path, the discharge path, and the tunnel-type connection flow path are provided inside the upper mold, the upper mold can be easily operated.

另外,本發明涉及之塗布裝置(4),其中,於前述塗布裝置(1)或者(2)中,前述上模具備覆蓋前述產品之上模基板、與該上模基板連接的作為前述導入路之管型導入路、作為前述排出路之管型排出路以及作為前述連接流路之管型連接流路而構成。 In addition, in the coating device (4) of the present invention, in the coating device (1) or (2), the upper mold is provided with an upper mold substrate covering the product and connected to the upper mold substrate as the introduction path The tubular introduction path, the tubular discharge path as the discharge path, and the tubular connection flow path as the connection flow path.

根據上述塗布裝置(4),膜形成液流經前述管型導入路、前述管型排出路以及前述管型連接流路中,故前述上模內之膜形成液之流動平滑。另外, 藉由於前述上模基板之穿透孔部分插入管之方法、於前述上模基板上黏結或者銅焊管之方法等能夠容易地製造前述上模。 According to the coating device (4) described above, the film forming liquid flows through the tubular introduction path, the tubular discharge path, and the tubular connection flow path, so that the flow of the film forming liquid in the upper mold is smooth. In addition, the upper mold can be easily manufactured by a method of inserting a tube into the through hole of the upper mold substrate, a method of bonding or brazing a pipe on the upper mold substrate, or the like.

另外本發明涉及之塗布裝置(5),其中,於上述塗布裝置(1)或者(2)中,前述上模、於內部具有前述導入路以及前述排出路,進而於與前述產品相向之下表面具備作為前述連接流路之溝型連接流路。 In addition, the present invention relates to a coating device (5), wherein, in the coating device (1) or (2), the upper mold has the introduction path and the discharge path inside, and is further on the lower surface facing the product It is provided with a groove-type connection flow path as the aforementioned connection flow path.

根據上述塗布裝置(5),前述上模之連接流路由前述溝型連接流路構成,該溝型連接流路之形成可以係於前述上模之下表面形成溝即可,從而能夠容易地製造前述上模。 According to the above coating device (5), the connecting flow path of the upper mold is constituted by the groove-shaped connecting flow path, and the groove-shaped connecting flow path can be formed on the lower surface of the upper mold to form a groove, thereby making it easy to manufacture The aforementioned upper mold.

另外,本發明涉及之塗布裝置(6),其中,於上述塗布裝置(1)至(5)之任一項中,前述下模或者前述上模於與前述產品穿透孔相對應之位置具備島狀部,於前述孔端面與前述島狀部之間形成前述膜形成液流路而構成。 In addition, the coating device (6) of the present invention, wherein, in any one of the coating devices (1) to (5), the lower mold or the upper mold is provided at a position corresponding to the product penetration hole The island-shaped portion is configured by forming the film-forming liquid flow path between the hole end surface and the island-shaped portion.

根據上述塗布裝置(6),即使前述穿透孔之寬度很寬,由於沿著前述孔端面形成有具有合適寬度之膜形成液流路,故能夠於前述產品之前述孔端面上確實地、快速地塗布膜形成液。 According to the above coating device (6), even if the width of the penetration hole is very wide, since the film-forming liquid flow path with a suitable width is formed along the end face of the hole, it can be reliably and quickly applied to the end face of the hole of the product. Ground coating film forming liquid.

另外本發明涉及之塗布裝置(7),其中,於上述塗布裝置(1)至(6)之任一項中,於前述上模與前述產品之間、以及前述產品與前述下模之間具備墊圈,以防止前述膜形成液浸入前述產品之上表面以及下表面。 In addition, the coating device (7) of the present invention is provided in any one of the coating devices (1) to (6), between the upper mold and the product, and between the product and the lower mold A gasket to prevent the film forming liquid from immersing into the upper and lower surfaces of the product.

根據上述塗布裝置(7),能夠確實地防止膜形成液浸入前述產品之下表面以及上表面。故能夠有效地防止於基板等前述產品之穿透孔周向邊緣部、外周邊緣部形成不要之塗膜。 According to the coating device (7) described above, it is possible to reliably prevent the film forming liquid from penetrating into the lower surface and the upper surface of the product. Therefore, it can effectively prevent the formation of unnecessary coating film on the peripheral edge and outer peripheral edge of the penetration hole of the aforementioned products such as the substrate.

另外,本發明涉及之塗布裝置(8),其中,於上述塗布裝置(3)、(6)、(7)之任一項中,包括前述隧道型連接流路之前述上模係利用3D印表機而製作者。 In addition, the coating device (8) of the present invention, wherein, in any one of the coating devices (3), (6), (7), the upper mold including the tunnel-type connecting flow path uses 3D printing Table machine and maker.

根據上述塗布裝置(8),能夠利用3D印表機簡單地製造包括前述隧道型連接流路之複雜構造之上模。另外,即使前述隧道型連接流路之位置、數量、形態等不同,也能夠容易地進行對應。 According to the coating device (8) described above, a 3D printer can be used to easily manufacture an upper mold with a complicated structure including the aforementioned tunnel-type connecting flow path. In addition, even if the position, number, form, etc. of the aforementioned tunnel-type connection flow paths are different, it can be easily handled.

另外,本發明涉及之塗布裝置(9),其中,於上述塗布裝置(3)、(6)、(7)之任一項中,包括前述隧道型連接流路之前述上模係由形成有前述隧道型連接流路之上側一半部分之上部板、與形成有前述隧道型連接流路之下側一半部分之下部板黏著在一起而形成者。 In addition, the coating device (9) of the present invention, wherein, in any one of the coating devices (3), (6), (7), the upper mold including the tunnel-type connecting flow path is formed with The upper half of the upper half of the tunnel-type connecting flow path is formed by adhering to the lower half of the lower half of the tunnel-type connecting flow.

根據上述塗布裝置(9),不需要高端技術,而利用身邊有的電動工具,就可以容易地製造包括前述隧道型連接流路之複雜構造的上模。 According to the above-mentioned coating device (9), high-end technology is not required, and an upper mold with a complicated structure including the aforementioned tunnel-type connecting flow path can be easily manufactured by using a power tool available around.

本發明涉及之塗布方法(1),係使用上述(1)至(9)中任一項塗布裝置,對前述產品塗布膜形成液之塗布方法,其中,藉由於前述排出路一側吸引由前述導入路所導入之前述膜形成液,在前述產品之端面塗布膜形成液。 The coating method (1) of the present invention is a method of applying a film-forming liquid to the product using any one of the above-mentioned coating devices (1) to (9), wherein the product is attracted by the side of the discharge path The film forming liquid introduced by the introduction path is applied to the end surface of the product.

根據上述塗布方法(1),由於於塗布裝置內,膜形成液係以減壓狀態被導入的、故能夠有效地防止膜形成液從前述膜形成液流路浸入前述產品上表面以及下表面。故能夠有效地防止於前述產品之穿透孔周向邊緣部、外周邊緣部形成不要的塗膜。 According to the above-mentioned coating method (1), since the film-forming liquid is introduced in a reduced pressure state in the coating device, it is possible to effectively prevent the film-forming liquid from entering the upper and lower surfaces of the product from the film-forming liquid flow path. Therefore, it can effectively prevent the formation of unnecessary coating film on the peripheral edge and outer peripheral edge of the penetration hole of the aforementioned product.

另外,藉由膜形成液之不間斷之流動,能夠於前述產品之各端面塗布膜形成液,故能夠確實地快速地塗布膜形成液。 In addition, due to the uninterrupted flow of the film forming liquid, the film forming liquid can be applied to each end surface of the aforementioned product, so the film forming liquid can be applied quickly and reliably.

另外,本發明涉及之塗布方法(2),係使用上述(1)至(9)中任一項塗布裝置,對前述產品塗布膜形成液之塗布方法,其中,藉由從前述導入路壓入前述膜形成液、從前述排出路排出前述膜形成液,在前述產品之端面塗布膜形成液。 In addition, the coating method (2) of the present invention is a method of applying a film-forming liquid to the product using any one of the coating devices (1) to (9), wherein, by pressing in from the introduction path The film forming liquid is discharged from the discharge path, and the film forming liquid is applied to the end surface of the product.

根據上述塗布方法(2),由於膜形成液係以壓入狀態被送入塗布裝置,故能夠確實地為前述產品之端面塗布前述膜形成液。 According to the above-mentioned coating method (2), since the film forming liquid is fed into the coating device in a press-fit state, the end surface of the product can be reliably coated with the film forming liquid.

另外,本發明涉及之塗布方法(3),其中,於上述塗布方法(1)或者(2)中,於前述產品之端面塗布膜形成液,排出該膜形成液後,還向前述膜形成液流路中導入用以乾燥膜形成液之空氣。 In addition, the coating method (3) of the present invention, wherein, in the above-mentioned coating method (1) or (2), the film forming liquid is applied to the end surface of the product, and after the film forming liquid is discharged, the film forming liquid Air for drying the film forming liquid is introduced into the flow path.

根據上述塗布方法(3),於塗布/排出膜形成液後,能夠快速有效地進行前述膜形成液流路內之前述膜形成液之除去/乾燥。 According to the above-mentioned coating method (3), after coating/discharging the film-forming liquid, the removal/drying of the film-forming liquid in the film-forming liquid flow path can be quickly and efficiently performed.

1、2‧‧‧塗布裝置 1, 2‧‧‧Coating device

10‧‧‧基板 10‧‧‧Substrate

11、12、13、14‧‧‧穿透孔 11、12、13、14‧‧‧Through hole

11a、12a、13a、14a‧‧‧孔端面 11a, 12a, 13a, 14a‧‧‧hole end surface

15‧‧‧外周邊緣部 15‧‧‧Outer peripheral edge

15a‧‧‧外周邊緣端面 15a‧‧‧peripheral edge end face

21、21A、21B‧‧‧上模 21, 21A, 21B‧‧‧Upper mold

21Aa‧‧‧上模基板 21Aa‧‧‧Upper mold substrate

21a‧‧‧上部板 21a‧‧‧Upper plate

21b‧‧‧下部板 21b‧‧‧Lower plate

22‧‧‧下模 22‧‧‧Die

23、23b‧‧‧導入路 23, 23b‧‧‧Introduction

23a‧‧‧管型導入路 23a‧‧‧Tube type introduction path

23c‧‧‧連接孔 23c‧‧‧Connecting hole

24、24b‧‧‧排出路 24, 24b‧‧‧Exhaust path

24a‧‧‧管型排出路 24a‧‧‧Tube type discharge path

25a、25b、25c、25d‧‧‧隧道型連接流路 25a, 25b, 25c, 25d‧‧‧Tunnel type connection flow path

25ab、25bb、25cb、25db‧‧‧連接孔 25ab, 25bb, 25cb, 25db‧‧‧Connecting hole

26a、26b、26c、26d‧‧‧管型連接流路 26a, 26b, 26c, 26d‧‧‧Pipe connection flow path

27a、27b、27c、27d‧‧‧溝型連接流路 27a, 27b, 27c, 27d‧‧‧Trench type connection flow path

28‧‧‧殼體 28‧‧‧Shell

28a、31ab、31bb、31cb‧‧‧堤壩 28a, 31ab, 31bb, 31cb‧‧‧ dyke

31a、31b、31c‧‧‧島狀部 31a, 31b, 31c‧‧‧island

32、32A‧‧‧墊圈 32, 32A‧‧‧ Washer

33a、33b、33c‧‧‧島狀部孔 33a, 33b, 33c‧‧‧Island hole

33aa、33ba、33ca‧‧‧凹部 33aa, 33ba, 33ca‧‧‧recess

40、50‧‧‧塗布系統 40、50‧‧‧Coating system

41、51‧‧‧膜形成液罐 41、51‧‧‧Film forming liquid tank

42‧‧‧吸氣部 42‧‧‧Suction part

43、53‧‧‧三通旋塞 43、53‧‧‧Three-way cock

44‧‧‧捕集罐 44‧‧‧Capture Tank

45‧‧‧吸引裝置 45‧‧‧Attracting device

46a、46b、46c、46d、46e:軟管 46a, 46b, 46c, 46d, 46e: hose

47:塗布頭 47: Coating head

47a:導入側 47a: Import side

47b:排出側 47b: discharge side

52:加壓裝置 52: pressure device

54:排液罐 54: drain tank

55:送氣部 55: Aspiration Department

56a、56b、56c、56d、56e、56f:軟管 56a, 56b, 56c, 56d, 56e, 56f: hose

A至D、F、H至J、L至O、Q至T:膜形成液流路 A to D, F, H to J, L to O, Q to T: Film forming liquid flow path

E、G、K、P:連接流路 E, G, K, P: connecting flow path

P1、P2、P3:位置P1, P2, P3: position

第1圖係顯示本發明涉及之作為塗布對象之產品之一例的電子部件安裝用之印刷配線基板的側視圖。 Fig. 1 is a side view showing a printed wiring board for mounting electronic components, which is an example of a product to be coated according to the present invention.

第2圖係顯示實施方式涉及之塗布裝置之基本構成的側視圖,顯示了於印刷配線基板之孔端面塗布膜形成液之情形。 Fig. 2 is a side view showing the basic configuration of the coating device according to the embodiment, and shows a state in which the film forming liquid is applied to the hole end surface of the printed wiring board.

第3圖係顯示實施方式涉及之塗布裝置之基本構成的側視圖,顯示了於印刷配線基板之孔端面以及外周邊緣端面塗布膜形成液之情形。 Fig. 3 is a side view showing the basic configuration of the coating device according to the embodiment, and shows how the film forming liquid is applied to the hole end surface and the outer peripheral edge end surface of the printed wiring board.

第4圖係分開顯示實施方式涉及之塗布裝置之上模以及下模的側視圖,(a)表示上模、(b)表示下模。 Fig. 4 is a side view separately showing the upper mold and the lower mold of the coating device according to the embodiment, (a) shows the upper mold and (b) shows the lower mold.

第5圖係顯示於實施方式涉及之第4圖所示之塗布裝置上配置第1圖所示之印刷配線基板,以第3圖所示之狀態,於印刷配線基板之孔端面以及外周邊緣端面塗布膜形成液時之膜形成液之流動的側視圖。 Fig. 5 shows that the printed wiring board shown in Fig. 1 is placed on the coating device shown in Fig. 4 related to the embodiment, in the state shown in Fig. 3, on the hole end surface and outer peripheral edge end surface of the printed wiring board A side view of the flow of the film forming liquid when the film forming liquid is applied.

第6圖係於第3圖之X-X線的剖面圖。 Figure 6 is a cross-sectional view taken along line X-X in Figure 3.

第7圖係於第3圖之Y-Y線的剖面圖。 Figure 7 is a cross-sectional view taken along line Y-Y in Figure 3.

第8圖係顯示藉由機械加工製造實施方式涉及之塗布裝置之上模的方法的側視圖,(a)表示上模上半部分之仰視圖,(b)表示看下半部分之俯視圖。 Figure 8 is a side view showing the method of manufacturing the upper mold of the coating device according to the embodiment by mechanical processing, (a) shows a bottom view of the upper half of the upper mold, and (b) shows a top view of the lower half.

第9圖係顯示具備實施方式涉及之塗布裝置之管型連接流路之上模的側視圖。 Fig. 9 is a side view showing the upper mold of the tubular connecting flow path equipped with the coating device according to the embodiment.

第10圖係從下方看具備實施方式涉及之塗布裝置之溝型連接流路之上模的側視圖。 Fig. 10 is a side view of the upper mold provided with the trench-shaped connection flow path of the coating device according to the embodiment viewed from below.

第11圖係顯示於實施方式涉及之塗布裝置上使用墊圈之實例的側視圖,(a)表示於上模和基板之間使用之墊圈、(b)表示於基板和下模之間使用之墊圈。 Figure 11 is a side view showing an example of using a gasket on the coating device according to the embodiment, (a) shows the gasket used between the upper mold and the substrate, and (b) shows the gasket used between the substrate and the lower mold .

第12圖係顯示利用了實施方式涉及之塗布裝置之吸引式塗布系統之一實例的系統構成圖。 Fig. 12 is a system configuration diagram showing an example of a suction coating system using the coating device according to the embodiment.

第13圖係顯示利用了實施方式涉及之塗布裝置之壓入式塗布系統之一實例的系統構成圖。 Figure 13 is a system configuration diagram showing an example of a press-in coating system using the coating device according to the embodiment.

第14圖係顯示於實施方式涉及之塗布裝置上所配置之基板上連續塗布膜形成液之實例的側面圖。 Fig. 14 is a side view showing an example of continuous coating of the film forming liquid on the substrate arranged on the coating device according to the embodiment.

以下基於圖示說明本發明實施方式涉及之塗布裝置以及塗布方法。 The coating device and coating method according to the embodiment of the present invention will be described below based on the drawings.

第1圖係顯示本發明涉及之作為塗布對象之產品之一例的電子部件安裝用之印刷配線基板(以下記為基板)的側視圖。 Fig. 1 is a side view showing a printed wiring board for electronic component mounting (hereinafter referred to as a board) as an example of a product to be coated according to the present invention.

基板10上形成有4個穿透孔11、12、13、14,於這些穿透孔11、12、13、14的各自端面11a、12a、13a、14a上塗布膜形成液。另外,也有於基板10之外部周向邊緣部15之端面15a塗布膜形成液的情形。 Four through holes 11, 12, 13, 14 are formed on the substrate 10, and a film forming liquid is applied to the respective end surfaces 11a, 12a, 13a, and 14a of the through holes 11, 12, 13, 14. In addition, there are cases where the film forming liquid is applied to the end surface 15 a of the outer peripheral edge portion 15 of the substrate 10.

第2圖係顯示實施方式涉及之塗布裝置1之基本構成的側視圖,顯示了於基板10之穿透孔端面塗布膜形成液的情形。 FIG. 2 is a side view showing the basic configuration of the coating device 1 according to the embodiment, and shows a state in which the film forming liquid is applied to the end surface of the through hole of the substrate 10.

塗布裝置1包括覆蓋基板10之上模21和載置基板10之下模22,藉由上模21、基板10以及下模22,形成用以於基板10之孔端面11a、12a、13a、14a(第1圖)上流動膜形成液之膜形成液流路F,H至J、L至O、Q至T(第5圖)而構成。 The coating device 1 includes an upper mold 21 for covering the substrate 10 and a lower mold 22 for placing the substrate 10. The upper mold 21, the substrate 10, and the lower mold 22 are used to form the hole end faces 11a, 12a, 13a, 14a of the substrate 10 (Fig. 1) The film forming liquid flow paths F, H to J, L to O, and Q to T (Fig. 5) of the up-flowing film forming liquid are constructed.

另外關於上模21,為了便於理解其內部構造地進行圖示,而假定為透明體予以顯示。 In addition, the upper mold 21 is illustrated in order to facilitate understanding of its internal structure, and is assumed to be displayed as a transparent body.

上模21具備將膜形成液導入膜形成液流路F、H至J、L至O、Q至T之導入路23、以及排出膜形成液之排出路24、作為連接膜形成液流路F、H至J、L至O、Q至T間之連接流路之隧道型連接流路25b、25c、25d,從導入路23導入之膜形成液通過膜形成液流路F、H至J、L至O,Q至T以及隧道型連接流路25b、25c、25d,作為一連續流動,從排出路24排出而構成。 The upper mold 21 is provided with an introduction path 23 for introducing the film forming liquid into the film forming liquid flow paths F, H to J, L to O, and Q to T, and a discharge path 24 for discharging the film forming liquid, as a connecting film forming liquid flow path F , H to J, L to O, Q to T between the tunnel-type connecting flow paths 25b, 25c, 25d, the film forming liquid introduced from the introduction path 23 passes through the film forming liquid flow paths F, H to J, The L to O, Q to T, and tunnel-type connecting flow paths 25b, 25c, and 25d are configured as a continuous flow and discharged from the discharge path 24.

另外於與導入路23、排出路24連接之外部,安裝有用以連接導入或者排出膜形成液之管等的連接管(未圖示)。 In addition, to the outside connected to the introduction path 23 and the discharge path 24, a connecting pipe (not shown) for connecting a pipe for introducing or discharging the film forming liquid is installed.

第3圖係顯示實施方式涉及之塗布裝置2之基本構成的側視圖。 Fig. 3 is a side view showing the basic structure of the coating device 2 according to the embodiment.

塗布裝置2用於於基板10之孔端面11a至14a(第1圖)以及外周邊緣端面15a(第1圖)上塗布膜形成液之情形。與塗布裝置1相比,塗布裝置2之下模22上表面還形成有與包圍基板10外周邊緣端面15a之基板10相同厚度之殼體28。故塗布裝置2為藉由上模21、下模22、基板10,形成用以於基板10之外周邊緣端面15a上流動膜形成液之膜形成液流路A至D(第5圖)而構成。 The coating device 2 is used for coating the film forming liquid on the hole end faces 11a to 14a (Figure 1) of the substrate 10 and the peripheral edge end face 15a (Figure 1). Compared with the coating device 1, the upper surface of the lower mold 22 of the coating device 2 is also formed with a casing 28 having the same thickness as the substrate 10 surrounding the outer peripheral edge 15 a of the substrate 10. Therefore, the coating device 2 is constructed by forming the film forming liquid channels A to D (FIG. 5) for flowing the film forming liquid on the outer peripheral edge end surface 15a of the substrate 10 by the upper mold 21, the lower mold 22, and the substrate 10 .

於第2圖、第3圖所示之側視圖中,因藉由上模21、下模22、基板10之穿透孔11、12、13、14所形成之膜形成液流路A至D、F、H至J、L至O、Q至T位於上模21之下部,故未圖示。 In the side views shown in Figs. 2 and 3, the liquid flow paths A to D are formed by the film formed by the through holes 11, 12, 13, and 14 of the upper mold 21, the lower mold 22, and the substrate 10 , F, H to J, L to O, Q to T are located at the lower part of the upper mold 21, so they are not shown.

以塗布裝置2為對象,就實施方式涉及之膜形成液之塗布結構進行說明。 Taking the coating device 2 as an object, the coating structure of the film forming liquid according to the embodiment will be described.

塗布裝置2中形成有膜形成液沿基板10之端面中塗布膜形成液之端面、即外周邊緣部15之端面15a以及穿透孔11、12、13、14之端面11a、12a、13a、14a流動之膜形成液流路A至D、F、H至J、L至O、Q至T(第5圖)。藉由於膜形成液流路A至D、F、H至J、L至O、Q至T上流動膜形成液,能夠於基板10之各端面塗布膜形成液。由於基板10之上表面由上模21覆蓋,下表面由下模22覆蓋,故基板10之上表面以及下表面不會被塗布膜形成液。 The coating device 2 is formed with the end surface of the film forming liquid applied to the film forming liquid along the end surface of the substrate 10, that is, the end surface 15a of the outer peripheral edge portion 15 and the end surfaces 11a, 12a, 13a, 14a of the penetration holes 11, 12, 13, 14 The flowing film-forming liquid flow path A to D, F, H to J, L to O, Q to T (Figure 5). By flowing the film forming liquid on the film forming liquid channels A to D, F, H to J, L to O, and Q to T, the film forming liquid can be applied to each end surface of the substrate 10. Since the upper surface of the substrate 10 is covered by the upper mold 21 and the lower surface is covered by the lower mold 22, the upper and lower surfaces of the substrate 10 will not be coated with the film forming liquid.

另外膜形成液由導入路23導入後,膜形成液之流體分別流經膜形成液流路A至D、F、H至J、L至O、Q至T以及連接流路E、G、K、P(第5圖),直至由排出路24排出,形成不間斷流動。換言之,自導入路23起至排出路24止,藉由膜形成液流路A至D、F、H至J、L至O、Q至T以及連接流路E、G、K、P,形成為一筆就可以畫出之流路。 In addition, after the film-forming liquid is introduced through the introduction path 23, the fluid of the film-forming liquid flows through the film-forming liquid flow paths A to D, F, H to J, L to O, Q to T, and the connecting flow paths E, G, K. , P (Figure 5) until it is discharged from the discharge path 24, forming an uninterrupted flow. In other words, from the introduction path 23 to the discharge path 24, the film forming liquid flow paths A to D, F, H to J, L to O, Q to T and the connecting flow paths E, G, K, and P form The flow path can be drawn in one stroke.

第4圖係將塗布裝置2分為上模21以及下模22進行顯示之側視圖,(a)表示上模21、(b)表示下模22。 Fig. 4 is a side view showing the coating device 2 divided into an upper mold 21 and a lower mold 22, and (a) shows the upper mold 21 and (b) shows the lower mold 22.

下模22上形成有用以形成膜形成液流路A至D(第5圖)之殼體28,所述膜形成液流路A至D用以為基板10之外周邊緣端面15a塗布膜形成液。 The lower mold 22 is formed with a housing 28 for forming film forming liquid flow paths A to D (FIG. 5) for coating the outer peripheral edge end surface 15 a of the substrate 10 with the film forming liquid.

另外,下模22上形成有島狀部31a、31b、31c,所述島狀部31a、31b、31c用以在寬度為寬的穿透孔12、13、14之孔端面12a、13a、14a確實地塗布膜形成液;於這些島狀部31a、31b、31c上設有分別控制膜形成液流動之堤壩31ab、31bb、31cb。 In addition, the lower mold 22 is formed with islands 31a, 31b, and 31c. The islands 31a, 31b, and 31c are used to confirm the hole end faces 12a, 13a, and 14a of the wide penetration holes 12, 13, 14 The film forming liquid is applied to the ground; these island portions 31a, 31b, and 31c are provided with dams 31ab, 31bb, and 31cb that control the flow of the film forming liquid, respectively.

於島狀部31a、31b、31c以及和這些島狀部31a、31b、31c相對應之穿透孔12、13、14之孔端面12a、13a、14a之間形成有間隙,藉由這些間隙形成膜形成液流路H至J、L至O、Q至T(第5圖)。 A gap is formed between the island-shaped portions 31a, 31b, 31c and the hole end surfaces 12a, 13a, 14a of the penetration holes 12, 13, 14 corresponding to these island-shaped portions 31a, 31b, 31c, and these gaps are formed Film forming liquid flow paths H to J, L to O, and Q to T (Figure 5).

塗布裝置2中,於下模22上形成有殼體28,於殼體28之內側設置有基板10。基板10置於下模22之狀態時,第4圖(a)所示之上模21載置於基板10之上表面,基板10夾在下模22上表面和上模21下表面之間被固定。 In the coating device 2, a housing 28 is formed on the lower mold 22, and a substrate 10 is provided inside the housing 28. When the substrate 10 is placed in the lower mold 22, the upper mold 21 shown in Fig. 4(a) is placed on the upper surface of the substrate 10, and the substrate 10 is clamped between the upper surface of the lower mold 22 and the lower surface of the upper mold 21 to be fixed .

另外,第4圖顯示了島狀部31a、31b、31c形成於下模22之實例,但島狀部31a、31b、31c還可以形成於上模21。 In addition, FIG. 4 shows an example in which the island-shaped portions 31a, 31b, and 31c are formed on the lower mold 22, but the island-shaped portions 31a, 31b, and 31c may also be formed on the upper mold 21.

作為上模21、下模22之構成材料,可以例舉如ABS樹脂、丙烯酸樹脂、聚碳酸酯、聚丙烯樹脂等,其中最佳為ABS樹脂。ABS樹脂具有耐藥性、機械性能、耐熱性、加工性、成形性等優異的優點。另外製造上模21時,作為利用3D印表機時的素材也係較佳的。 As the constituent material of the upper mold 21 and the lower mold 22, for example, ABS resin, acrylic resin, polycarbonate, polypropylene resin, etc. can be cited, and among them, ABS resin is most preferred. ABS resin has excellent advantages such as chemical resistance, mechanical properties, heat resistance, processability, and moldability. In addition, when manufacturing the upper mold 21, it is also preferable as a material when using a 3D printer.

第5圖係顯示於塗布裝置2上設置基板10、於基板10之各端面塗布膜形成液時所形成之不間斷流路的側視圖。塗布裝置2之情形下,膜形成液由導入路23(第4圖)導入,按照符號A、B、C、…、T之順序流經膜形成液流路A至D、F、H至J、L至O、Q至T以及連接流路E、G、K、P,從排出路24(第4圖)排出。 FIG. 5 is a side view showing the uninterrupted flow path formed when the substrate 10 is set on the coating device 2 and the film forming liquid is applied to each end surface of the substrate 10. In the case of the coating device 2, the film forming liquid is introduced from the introduction path 23 (Figure 4) and flows through the film forming liquid channels A to D, F, H to J in the order of symbols A, B, C, ..., T , L to O, Q to T, and connecting flow paths E, G, K, and P are discharged from the discharge path 24 (FIG. 4).

以虛線表示之4支連接流路E、G、K、P由設於上模21之隧道型連接流路25a、25b、25c、25d(第4圖)形成。 The four connecting flow paths E, G, K, and P shown by broken lines are formed by tunnel-type connecting flow paths 25a, 25b, 25c, 25d (FIG. 4) provided in the upper mold 21.

藉由隧道型連接流路25a(連接流路E),導入路23與膜形成液流路F連接,藉由隧道型連接流路25b(連接流路G),膜形成液流路F與膜形成液流路H連接,藉由隧道型連接流路25c(連接流路K),膜形成液流路J與膜形成液流路L連接,藉由隧道型連接流路25d(連接流路P),膜形成液流路O與膜形成液流路Q連接。 The introduction path 23 is connected to the membrane forming liquid flow path F by the tunnel-type connecting flow path 25a (connection flow path E), and the membrane forming liquid flow path F is connected to the membrane by the tunnel type connecting flow path 25b (connection flow path G). The formation liquid flow path H is connected by the tunnel type connection flow path 25c (connection flow path K), the membrane forming liquid flow path J is connected to the membrane formation liquid flow path L, and the tunnel type connection flow path 25d (connection flow path P ), the film forming liquid channel O is connected to the film forming liquid channel Q.

藉由這些連接流路E、G、K、P之形成,由上模21、下模22與基板10的穿透孔12、13、14以及殼體28構成之膜形成液流路A至D、F、H至J、L至O、Q至T以及連接流路E、G、K、P上生成不間斷之膜形成液之流動,從而於基板10各端面塗布膜形成液。 By the formation of these connecting flow paths E, G, K, P, the film forming liquid flow paths A to D constituted by the upper mold 21, the lower mold 22, the through holes 12, 13, and 14 of the substrate 10, and the housing 28 , F, H to J, L to O, Q to T and the connecting flow paths E, G, K, P generate an uninterrupted flow of the film forming liquid, thereby coating the film forming liquid on each end surface of the substrate 10.

基板10之情形,穿透孔11寬度窄,與此相對穿透孔12、13、14寬度為寬。如穿透孔11那樣,在其寬度為窄之情形,膜形成液從長度方向之一方向另一方流動,從而能夠容易地於孔端面11a上塗布膜形成液。但如穿透孔12、13、14那樣寬度為寬之情形,在使膜形成液從長度方向之一方向另一方流動時,相對於中心部之流動,兩側部分之流動容易滯留,從而有不能確實地於兩側之端面塗布膜形成液之可能。 In the case of the substrate 10, the width of the through hole 11 is narrow, while the width of the through holes 12, 13, and 14 are wide. Like the through hole 11, when the width is narrow, the film forming liquid flows from one of the longitudinal directions to the other, so that the film forming liquid can be easily applied to the hole end surface 11a. However, when the width of the penetration holes 12, 13, and 14 are wide, when the film forming liquid flows from one of the longitudinal directions to the other, the flow on both sides tends to stay with respect to the flow of the center portion, which causes There is a possibility that the film-forming liquid cannot be applied to the end surfaces of both sides reliably.

故關於寬度為寬之穿透孔12、13、14,為了使膜形成液沿各端面12a、13a、14a流動,而於塗布裝置2之下模22上形成島狀部31a、31b、31c(第4圖(b))以及堤壩31ab、31bb、31cb。堤壩31ab、31bb、31cb與基板10各穿透孔12、13、14之端面12a、13a、14a相接,遮斷膜形成液之流動而構成。 Therefore, with regard to the wide penetration holes 12, 13, and 14, in order to make the film forming liquid flow along the respective end surfaces 12a, 13a, and 14a, islands 31a, 31b, and 31c are formed on the lower mold 22 of the coating device 2 ( Figure 4(b)) and dams 31ab, 31bb, and 31cb. The dams 31ab, 31bb, and 31cb are in contact with the end faces 12a, 13a, and 14a of the through holes 12, 13, and 14 of the substrate 10, and are configured to block the flow of the film forming liquid.

如此,藉由形成島狀部31a、31b、31c以及堤壩部31ab、31bb、31cb,能夠於各穿透孔12、13、14之端面12a、13a、14a與島狀部31a、31b、31c之間,形成膜形成液流路H至J、L至O、Q至T。 In this way, by forming the island-shaped portions 31a, 31b, 31c and the dam portions 31ab, 31bb, 31cb, it is possible to connect the end faces 12a, 13a, 14a of the through holes 12, 13, 14 and the island-shaped portions 31a, 31b, 31c. In the meantime, film forming liquid flow paths H to J, L to O, and Q to T are formed.

故於各穿透孔12、13、14,膜形成液於各島狀部31a、31b、31c和端面12b、13b、14b之間,繞島狀部31a、31b、31c一周順暢流動,為各穿透孔12、13、14之端面12a、13a、14a,確實地提供膜形成液。 Therefore, in each of the through holes 12, 13, 14, the film forming liquid flows smoothly around the islands 31a, 31b, 31c between the islands 31a, 31b, 31c and the end faces 12b, 13b, 14b. The end faces 12a, 13a, and 14a of the holes 12, 13, and 14 are penetrated to reliably supply the film forming liquid.

如此,藉由膜形成液流路A至D,能夠確實地為基板10之外周邊緣端面15a提供膜形成液,藉由膜形成液流路F,能夠確實地為透孔11之端面11a提供膜形成液,藉由膜形成液流路H、I、J能夠確實地為透孔12之端面12a提供膜形成液,藉由膜形成液流路L、M、N、O能夠 確實地為透孔13之端面13a提供膜形成液,藉由流路Q、R、S、T能夠確實地為透孔14之端面14a提供膜形成液。 In this way, the film forming liquid channels A to D can reliably provide the film forming liquid to the outer peripheral edge end surface 15a of the substrate 10, and the film forming liquid channel F can reliably provide the film to the end surface 11a of the through hole 11 The forming liquid can be reliably supplied to the end surface 12a of the through hole 12 by the film forming liquid channels H, I, J, and the film forming liquid channel L, M, N, O can be reliably provided as through holes The end surface 13a of 13 is supplied with the film forming liquid, and the end surface 14a of the through hole 14 can be reliably supplied with the film forming liquid through the flow paths Q, R, S, and T.

另外,島狀部31a、31b、31c除了如上所述於下模22或者上模21上一體地形成之外,還可以係將成形為各自形狀之部件黏著在下模22或者上模21之指定位置而形成。 In addition, the islands 31a, 31b, and 31c are not only integrally formed on the lower mold 22 or the upper mold 21 as described above, but also can be formed by adhering parts formed into respective shapes to the lower mold 22 or the upper mold 21 at designated positions And formed.

另外,堤壩31ab、31bb、31cb也可以如上所述不是一體地作為島狀部31a、31b、31c之一部分形成於島狀部31a、31b、31c上,而係將塊狀之非一體部件作為堤壩31ab、31bb、31cb而形成。 In addition, the dams 31ab, 31bb, and 31cb may not be integrally formed on the island-shaped portions 31a, 31b, 31c as part of the island-shaped portions 31a, 31b, and 31c as described above, but a block-shaped non-integrated member may be used as the dam. 31ab, 31bb, and 31cb are formed.

根據基板不同有不需要於外周邊緣部15之端面15a塗布膜形成液之情形。在這種情形下,可以省略流路A至D,不需要殼體28,而能夠利用塗布裝置1。 Depending on the substrate, it may not be necessary to apply the film forming liquid to the end surface 15a of the outer peripheral edge portion 15. In this case, the flow paths A to D can be omitted, the housing 28 is not required, and the coating device 1 can be used.

第6圖顯示於第3圖X-X線之剖面圖,第7圖顯示於第3圖Y-Y線之剖面圖。第6圖、第7圖中顯示了利用後述之墊圈32、33(第11圖)之情形。 Figure 6 is a cross-sectional view taken along line X-X in Figure 3, and Figure 7 is a cross-sectional view taken along line Y-Y in Figure 3. Figures 6 and 7 show the use of washers 32 and 33 (Figure 11) described later.

第6圖顯示了藉由上述上模21之隧道型連接流路25a(連接流路E)。膜形成液流路D與膜形成液流路F相連接之情形。 Fig. 6 shows the tunnel-type connection flow path 25a (connection flow path E) through the upper mold 21 described above. When the film-forming liquid flow path D and the film-forming liquid flow path F are connected.

第7圖顯示了於基板10之外周邊緣端面15a與殼體28之間形成間隙,形成膜形成液流路B之情形,還顯示了於島狀部31a與基板10之孔端面12a之間形成間隙、形成膜形成液流路H、J之情形。 Figure 7 shows the formation of a gap between the outer peripheral edge end surface 15a of the substrate 10 and the housing 28 to form a film forming liquid flow path B. It also shows the formation between the island portion 31a and the hole end surface 12a of the substrate 10 In the case of gaps and film forming liquid channels H and J.

作為具備隧道型連接流路25a、25b、25c、25d之上模21之製造方法,有如上所述利用3D印表機之方法。利用3D印表機製造上模21時,準備上模21之三維CAD資料,使3D印表機讀入,提供ABS樹脂等 作為素材進行造型。故利用3D印表機之情形時,即使為具備隧道型連接流路25a、25b、25c、25d之上模21,也能夠容易製造。 As a method of manufacturing the upper mold 21 provided with the tunnel-type connecting flow paths 25a, 25b, 25c, and 25d, there is a method using a 3D printer as described above. When using a 3D printer to manufacture the upper mold 21, prepare the 3D CAD data of the upper mold 21, read it in by the 3D printer, and provide ABS resin as the material for modeling. Therefore, in the case of using a 3D printer, even if the upper mold 21 is provided with tunnel-type connection flow paths 25a, 25b, 25c, 25d, it can be easily manufactured.

只是隧道型連接流路25a、25b、25c、25d有直徑為1mm左右很小的情形,故為了使膜形成液之流動順暢,較佳為盡可能平滑地加工隧道型連接流路25a、25b、25c、25之內面。為此較佳為於由層壓引起的高低差異小的高精細條件下進行造型。 Only the tunnel-type connecting flow paths 25a, 25b, 25c, 25d may have a small diameter of about 1 mm. Therefore, in order to smooth the flow of the film forming liquid, it is preferable to process the tunnel-type connecting flow paths 25a, 25b, and 25a as smoothly as possible. 25c, 25 inside. For this reason, it is preferable to perform modeling under high-definition conditions with small height differences caused by lamination.

另外,在其他實施方式中,關於具備隧道型連接流路25a、25b、25c、25d之上模21,還可以由機械加工進行製造。 In addition, in other embodiments, the upper mold 21 provided with the tunnel-type connection flow paths 25a, 25b, 25c, and 25d can also be manufactured by machining.

第8圖係顯示通過機械加工製造實施方式涉及之塗布裝置之上模21的側視圖,(a)表示上模之上半部分,(b)表示上模之下半部分。 Fig. 8 shows a side view of the upper mold 21 of the coating device according to the embodiment manufactured by machining, (a) shows the upper half of the upper mold, and (b) shows the lower half of the upper mold.

第8圖中顯示了於隧道型連接流路25a、25b、25c、25d之水準部之中心線,將上下切斷之平面,(a)係上模21之上半部分之上部板21a的仰視圖,(b)係上模下半部分之下部板21b的俯視圖。將第8圖(a)所示之上部板21a顛倒過來,與下部板21b重合形成隧道型連接流路25a、25b、25c、25d。 Figure 8 shows the center line of the horizontal part of the tunnel-type connecting flow paths 25a, 25b, 25c, 25d, the plane cut from the top and bottom, (a) is the bottom view of the upper part of the upper mold 21 and the upper plate 21a Figure (b) is a plan view of the lower plate 21b of the lower half of the upper mold. The upper plate 21a shown in Fig. 8(a) is turned upside down and overlaps with the lower plate 21b to form tunnel-type connection flow paths 25a, 25b, 25c, and 25d.

上部板21a、下部板21b於上模21之隧道型連接流路25a、25b、25c、25之水準部中心線,被上下切斷。故於上部板21a、下部板21b之表面上,隧道型連接流路25a、25b、25c、25d之水準部之剖面成為半圓形、角形等凹形。即凹形的溝狀。 The upper plate 21a and the lower plate 21b are cut up and down at the center line of the level part of the tunnel-shaped connection flow path 25a, 25b, 25c, 25 of the upper mold 21. Therefore, on the surfaces of the upper plate 21a and the lower plate 21b, the cross-sections of the leveling portions of the tunnel-type connecting flow passages 25a, 25b, 25c, and 25d become semicircular, angular, and other concave shapes. That is, concave groove shape.

像這種半圓形等凹形溝狀部,不必利用高度機械裝置,藉由利用木板加工機、滾邊機等電動工具就可以容易地形成。 Concave groove-shaped parts such as semi-circular shapes can be easily formed by using electric tools such as wood processing machines and hemming machines without using highly mechanical devices.

另外關於隧道型連接流路25a、25b、25c、25d中縱方向之流路以及導入路23、排出路24,可以由鑽孔機開孔而形成。 In addition, in the tunnel-type connecting flow passages 25a, 25b, 25c, and 25d, the longitudinal flow passages, the introduction passage 23, and the discharge passage 24 can be formed by drilling holes.

由此,上部板21a、下部板21b可以藉由身邊有的電動工具等機械加工而容易地製造。藉由使所製造之上部板21a和下部板21b面對面黏著,可以容易地製造具備隧道型連接流路25a、25b、25c、25d之上模21。 Thereby, the upper plate 21a and the lower plate 21b can be easily manufactured by machining with an electric tool or the like in the vicinity. By adhering the manufactured upper plate 21a and the lower plate 21b face to face, it is possible to easily manufacture the upper mold 21 provided with the tunnel-type connecting flow paths 25a, 25b, 25c, and 25d.

具備隧道型連接流路25a、25b、25c、25d之上模21除了利用3D印表機之方法外,還可以像這樣藉由機械加工之方法容易地製造。 The upper mold 21 equipped with tunnel-type connecting flow paths 25a, 25b, 25c, and 25d can be easily manufactured by mechanical processing in addition to a 3D printer method.

第9圖係顯示實施方式涉及之塗布裝置之另外的上模21A的側視圖。上模21A包括覆蓋基板10之上模基板21Aa、作為設置於上模基板21Aa上之導入路之管型導入路23a、作為排出路之管型排出路24a以及作為連接流路之管型連接流路26a、26b、26c、26d而構成。 Fig. 9 is a side view showing another upper mold 21A of the coating device according to the embodiment. The upper mold 21A includes an upper mold substrate 21Aa covering the substrate 10, a tubular introduction path 23a as an introduction path provided on the upper mold substrate 21Aa, a tubular discharge path 24a as a discharge path, and a tubular connection flow path as a connection flow path. Roads 26a, 26b, 26c, and 26d are formed.

這些管型導入路23a、管型排出路24a以及管型連接流路26a、26b、26c、26d由鋁、鋼、不銹鋼等金屬、ABS樹脂、丙烯酸樹脂等樹脂的管形成。這些管型導入路23a、管型排出路24a以及管型連接流路26a、26b、26c、26d與上模基板21Aa,當兩者為金屬時藉由銅焊接合、當兩者為樹脂時,藉由黏著劑黏著接合。上模基板21Aa和管型導入路23a、管型排出路24a以及管型連接流路26a、26b、26c、26d接合時,較佳為於上模基板21Aa形成之穿透孔上插入管型導入路23a、管型排出路24a以及管型連接流路26a、26b、26c、26d而接合。 These tubular introduction passage 23a, tubular discharge passage 24a, and tubular connection flow passages 26a, 26b, 26c, and 26d are formed of pipes made of metal such as aluminum, steel, stainless steel, and resin such as ABS resin and acrylic resin. These tubular introduction passages 23a, tubular discharge passages 24a, and tubular connection flow passages 26a, 26b, 26c, 26d and upper mold substrate 21Aa are joined by brazing when they are metal, and when they are resin, Adhesive bonding with adhesive. When the upper mold base 21Aa is joined to the tubular introduction path 23a, the tubular discharge path 24a, and the tubular connection flow paths 26a, 26b, 26c, 26d, it is preferable to insert a tubular introduction into the through hole formed in the upper mold base 21Aa The path 23a, the tubular discharge path 24a, and the tubular connection flow paths 26a, 26b, 26c, and 26d are joined.

第10圖係顯示實施方式涉及之塗布裝置上的、另外之上模21B的側視圖。第10圖中,顯示了從下表面看上模21B的側視圖。 Fig. 10 shows a side view of another upper mold 21B on the coating device according to the embodiment. Fig. 10 shows a side view of the upper mold 21B viewed from the lower surface.

上模21B於內部具備導入路23b,排出路24b,在與上模21B之基板10相向之下表面形成有作為連接流路之溝型連接流路27a、27b、27c、27d而構成。連接流路與上模21之隧道型連接流路、上模21A之管型連接流路不同,為設置於上模21B下表面之溝型連接流路27a、27b、27c、27d。溝型連接流路27a、27b、27c、27c之剖面形狀為半圓形、角形等與膜形成液之流動相對應之形狀。 The upper mold 21B is provided with an introduction path 23b and a discharge path 24b inside, and groove-shaped connection flow paths 27a, 27b, 27c, and 27d are formed as connection flow paths on the lower surface of the substrate 10 of the upper mold 21B. The connection flow path is different from the tunnel type connection flow path of the upper mold 21 and the pipe type connection flow path of the upper mold 21A, and is a groove type connection flow path 27a, 27b, 27c, 27d provided on the lower surface of the upper mold 21B. The cross-sectional shape of the groove-shaped connection flow passages 27a, 27b, 27c, and 27c is a shape corresponding to the flow of the film forming liquid, such as a semicircle or an angle.

上模21B之情形時,連接流路形成於溝型連接流路27a、27b、27c、27d與基板10的上表面之間。另外,使用墊圈(第11圖)時,形成於溝型連接流路27a、27b、27c、27d與墊圈的上表面之間。 In the case of the upper mold 21B, the connection flow paths are formed between the groove-type connection flow paths 27a, 27b, 27c, 27d and the upper surface of the substrate 10. In addition, when a gasket (Fig. 11) is used, it is formed between the groove-shaped connection flow paths 27a, 27b, 27c, 27d and the upper surface of the gasket.

如上模21B那樣,於上模21B上形成之連接流路為溝型連接流路27a、27b、27c、27d時,只要於上模21B下表面形成剖面形狀為半圓形、角形等的溝即可。由於溝可以藉由銑床等容易地加工,故上模21B的製造很容易。 As with the upper mold 21B, when the connecting flow paths formed on the upper mold 21B are groove-shaped connecting flow paths 27a, 27b, 27c, 27d, as long as the bottom surface of the upper mold 21B is formed with a groove having a semicircular or angular cross-sectional shape. can. Since the groove can be easily processed by a milling machine or the like, the manufacture of the upper mold 21B is easy.

第11圖(a)(b)係顯示實施方式涉及之塗布裝置中使用之墊圈之實例的側視圖,(a)表示上模與基板之間使用之墊圈,(b)表示基板與下模之間使用之墊圈。 Figure 11 (a) (b) is a side view showing an example of the gasket used in the coating device according to the embodiment, (a) shows the gasket used between the upper mold and the substrate, and (b) shows the difference between the substrate and the lower mold Washers used between.

如第11圖(a)所示,於上模21之下表面所使用之墊圈32上除了通向導入路23之連接孔23c、通向排出路24之連接孔24c外,還形成有與隧道型連接流路25a、25b、25c、25d相對應之連接孔25aa、25ab、25ba、25bb、25ca、25cb、25da、25db。 As shown in Figure 11(a), the gasket 32 used on the lower surface of the upper mold 21 is formed with a tunnel in addition to the connecting hole 23c leading to the introduction path 23 and the connecting hole 24c leading to the discharge path 24 Connection holes 25aa, 25ab, 25ba, 25bb, 25ca, 25cb, 25da, 25db corresponding to the type connection flow paths 25a, 25b, 25c, 25d.

另外,如第11圖(b)所示,於下模22上表面使用之墊圈32A上形成有與第4圖(b)所示之島狀部31a、31b、31c相對應之島狀部孔33a、 33b、33c。島狀部孔33a、33b、33c形成為分別與下模22之島狀部31a、31b、31c相同尺寸、相同形狀。換言之,下模22之島狀部31a、31b、31c與墊圈32A之島狀部孔33a、33b、33c為恰好相嵌關係。墊圈32A之島狀部孔33a、33b、33c上還形成有與堤壩31ab、31bb、31cb(第4圖(b))相對應之凹部33aa、33ba、33ca。 In addition, as shown in Fig. 11(b), the gasket 32A used on the upper surface of the lower mold 22 is formed with island-shaped portion holes corresponding to the island-shaped portions 31a, 31b, and 31c shown in Fig. 4(b) 33a, 33b, 33c. The island-shaped portion holes 33a, 33b, and 33c are formed to have the same size and shape as the island-shaped portions 31a, 31b, and 31c of the lower mold 22, respectively. In other words, the island-shaped portions 31a, 31b, and 31c of the lower mold 22 and the island-shaped portion holes 33a, 33b, and 33c of the gasket 32A are in an exactly fitting relationship. The island holes 33a, 33b, and 33c of the gasket 32A are further formed with recesses 33aa, 33ba, and 33ca corresponding to the dams 31ab, 31bb, and 31cb (Figure 4(b)).

關於墊圈32,顯示了與第3、4圖等所示之上模21之關係,墊圈32與第9圖所示之上模21A以及第10圖所示之上模21B之關係與上模21之情形相同。即、關於上模21A以及上模21B也可以同樣地使用墊圈32。 Regarding the gasket 32, the relationship with the upper mold 21 shown in Figs. 3 and 4 is shown. The relationship between the gasket 32 and the upper mold 21A shown in Fig. 9 and the upper mold 21B shown in Fig. 10 is related to the upper mold 21 The situation is the same. That is, the gasket 32 can be used in the same manner for the upper mold 21A and the upper mold 21B.

另外於下模22上表面所使用之墊圈32A也可以與不同上模21、21A、21B中任一種共通使用。 In addition, the gasket 32A used on the upper surface of the lower mold 22 can also be used in common with any of the different upper molds 21, 21A, and 21B.

墊圈32、32A可以採用天然橡膠、樹脂系合成樹脂等片材而形成。 The gaskets 32 and 32A can be formed using sheets such as natural rubber or resin-based synthetic resin.

於基板10之外周邊緣端面15a上不塗布膜形成液之塗布裝置1之情形、以及於基板10之外周邊緣端面15a上塗布膜形成液之塗布裝置2之情形的任一種情形下,都較佳為於基板10與上模21之間,下模22與基板10之間配置墊圈32、32A。 The coating device 1 that does not apply the film forming liquid on the outer peripheral edge end surface 15a of the substrate 10 and the application device 2 that applies the film forming liquid on the outer peripheral edge end surface 15a of the substrate 10 are both preferable. In order to arrange gaskets 32 and 32A between the substrate 10 and the upper mold 21 and between the lower mold 22 and the substrate 10.

墊圈32、32A可以防止膜形成液浸入基板10的上表面或者下表面。 The gaskets 32 and 32A can prevent the film forming liquid from penetrating the upper surface or the lower surface of the substrate 10.

將基板10置於塗布裝置1或者塗布裝置2時,按照下模22、墊圈32A、基板10以及墊圈32、上模21之順序放置後,使各自之間不產生錯位而緊緊地固定上模21與下模22之間。該固定有用螺栓固定外周部之方法、以彈簧夾子、手鉗固定之方法等,包括其他方法可以適宜地進行選擇。 When the substrate 10 is placed in the coating device 1 or the coating device 2, the lower mold 22, the gasket 32A, the substrate 10, the gasket 32, and the upper mold 21 are placed in the order, and the upper mold is tightly fixed without misalignment between them. Between 21 and the lower mold 22. The method of fixing the outer periphery with bolts, the method of fixing with spring clips, hand pliers, etc., including other methods, can be appropriately selected.

第12圖顯示利用塗布裝置2構成塗布系統之一個實例的系統構成圖。 Fig. 12 shows a system configuration diagram of an example of a coating system constructed by the coating device 2.

塗布系統40採用吸引方式,塗布系統40包括塗布裝置2、膜形成液罐41、吸氣部42、三通旋塞43、捕集罐44、吸引裝置45等而構成。 The coating system 40 adopts a suction method, and the coating system 40 includes a coating device 2, a film forming liquid tank 41, a suction portion 42, a three-way cock 43, a collection tank 44, a suction device 45, and the like.

膜形成液罐41與三通旋塞43之間由軟管46a連接,吸氣部42與三通旋塞43之間,三通旋塞43與塗布裝置2之間,塗布裝置2與捕集罐44之間,捕集罐44與吸引裝置45之間同樣地,分別由軟管46b、46c、46d、46e連接。 The film forming liquid tank 41 and the three-way cock 43 are connected by a hose 46a, between the suction portion 42 and the three-way cock 43, between the three-way cock 43 and the coating device 2, and between the coating device 2 and the catch tank 44 Meanwhile, the collection tank 44 and the suction device 45 are similarly connected by hoses 46b, 46c, 46d, and 46e.

吸引裝置45由真空泵構成。 The suction device 45 is composed of a vacuum pump.

由塗布裝置2之導入路23導入之膜形成液被吸引裝置45吸引而導入塗布裝置2內,對塗布裝置2內收納之基板10之各端面塗布膜形成液。 The film forming liquid introduced from the introduction path 23 of the coating device 2 is sucked by the suction device 45 and introduced into the coating device 2, and the film forming liquid is applied to each end surface of the substrate 10 contained in the coating device 2.

膜形成液罐41中保存有膜形成液。吸氣部42為大氣吸入部,具備淨化空氣用之濾膜(未圖示)。三通旋塞43用以切換輸送給塗布裝置2之膜形成液和空氣,捕集罐44具備氣液分離功能,用以使膜形成液流入吸引裝置45而吸收膜形成液。 The film forming liquid tank 41 stores a film forming liquid. The air suction part 42 is an air suction part and is provided with a filter membrane (not shown) for purifying air. The three-way cock 43 is used to switch the film forming liquid and air supplied to the coating device 2, and the trap tank 44 has a gas-liquid separation function to allow the film forming liquid to flow into the suction device 45 to absorb the film forming liquid.

為塗布裝置2中收納之基板10各端面塗布膜形成液時,吸引裝置45運轉,將三通旋塞43置於吸氣部42一側,從而吸出系內塵埃等。接著,將三通旋塞43切換到膜形成液罐41一側,將被吸引裝置45吸引之膜形成液導入塗布裝置2內,使其流過塗布裝置2內各流路,由此為基板10之各端面塗布膜形成液。 When the film forming liquid is applied to each end surface of the substrate 10 contained in the coating device 2, the suction device 45 is operated, and the three-way cock 43 is placed on the side of the suction portion 42 to suck out dust and the like in the system. Next, the three-way cock 43 is switched to the side of the film forming liquid tank 41, and the film forming liquid sucked by the suction device 45 is introduced into the coating device 2 and allowed to flow through each flow path in the coating device 2, thereby forming the substrate 10 Coating film forming liquid on each end surface.

為了根據需要,對基板10各端面提供充分膜形成液而使膜形成液保持一定時間內流動之狀態。還可以代替使膜形成液保持流動之狀態,關閉三通旋塞43,保持膜形成液滯留於各流路之狀態。 In order to provide sufficient film-forming liquid to each end surface of the substrate 10 as required, the film-forming liquid can be kept flowing for a certain period of time. Instead of keeping the membrane forming liquid flowing, the three-way cock 43 can be closed to keep the membrane forming liquid retained in each flow path.

在使膜形成液遍及基板10各端面後,藉由將三通旋塞43切換到吸氣一側,吸引系統內之膜形成液,吸收於捕集罐44中。進而,藉由吸引裝置45持續吸真空,能夠將有可能殘留之不要的膜形成液從塗布裝置2內排出,同時促進基板10之各端面上形成之塗膜的乾燥。但在基板10之各端面上形成之塗膜黏附到各端面需要一定程度時間之情況時,在排出膜形成液後,最好隔一段時間後才再次抽真空。 After the film forming liquid is spread over each end surface of the substrate 10, the three-way cock 43 is switched to the suction side to suck the film forming liquid in the system and absorb it in the trap tank 44. Furthermore, by the suction device 45 continuously sucking the vacuum, the unnecessary film forming liquid that may remain may be discharged from the coating device 2 and the drying of the coating film formed on each end surface of the substrate 10 can be promoted. However, when it takes a certain amount of time for the coating film formed on each end surface of the substrate 10 to adhere to each end surface, it is better to vacuum again after a certain period of time after the film forming liquid is discharged.

由此藉由使塗布系統40動作,能夠將由導入路23導入之膜形成液從排出路24一側排出,從而可以於第1圖所示之基板10的外周邊緣端面15a、孔端面11a、12a、13a、14a塗布膜形成液。 Thus, by operating the coating system 40, the film forming liquid introduced from the introduction path 23 can be discharged from the discharge path 24 side, so that it can be on the outer peripheral edge end surface 15a, hole end surfaces 11a, 12a of the substrate 10 shown in FIG. , 13a, 14a coating film forming liquid.

另外,塗布膜形成液,排出膜形成液後,進一步藉由從吸氣部42導入膜形成液乾燥用空氣,能夠加快所塗布之膜形成液的乾燥。 In addition, after the film forming liquid is applied and the film forming liquid is discharged, the drying of the applied film forming liquid can be accelerated by further introducing air for drying the film forming liquid from the suction portion 42.

第12圖中,僅顯示了連接一個塗布裝置2之情形,但還可以串聯連接多個塗布裝置2,藉由一次處理,可以對多個基板10塗布膜形成液。 In Fig. 12, only one coating device 2 is connected, but a plurality of coating devices 2 may be connected in series, and the film forming liquid can be applied to a plurality of substrates 10 by one process.

第13圖係顯示利用塗布裝置2構成之塗布系統之另一個實例的系統構成圖。 FIG. 13 is a system configuration diagram showing another example of the coating system constructed by the coating device 2.

塗布系統50採用壓入方式,塗布系統50包括塗布裝置2、膜形成液罐51、加壓裝置52、三通旋塞53、排液罐54、送氣部55等而構成。 The coating system 50 adopts a press-fit method, and the coating system 50 includes a coating device 2, a film forming liquid tank 51, a pressurizing device 52, a three-way cock 53, a drain tank 54, an air supply unit 55, and the like.

加壓裝置52與三通旋塞53之間藉由軟管56a連接,三通旋塞53與膜形成液罐51之間、三通旋塞53與送氣部55之間、膜形成液罐51與塗 布裝置2之間、送氣部55與塗布裝置2之間、塗布裝置2與排液罐54之間同樣地分別由軟管56b、56c、56d、56e、56f連接。 The pressurizing device 52 and the three-way cock 53 are connected by a hose 56a, between the three-way cock 53 and the film forming liquid tank 51, between the three-way cock 53 and the air supply unit 55, and the film forming liquid tank 51 and the coating device Between 2, the air supply unit 55 and the coating device 2, and between the coating device 2 and the drain tank 54 are similarly connected by hoses 56b, 56c, 56d, 56e, and 56f, respectively.

從塗布裝置2之導入路23導入之膜形成液被加壓裝置52壓入而導入塗布裝置2內,對塗布裝置2內收納之基板10之各端面塗布膜形成液。 The film forming liquid introduced from the introduction path 23 of the coating device 2 is pressed by the pressurizing device 52 and introduced into the coating device 2, and the film forming liquid is applied to each end surface of the substrate 10 contained in the coating device 2.

膜形成液罐51中保存有膜形成液。加壓裝置52為對膜形成液罐51內進行加壓之裝置,由壓縮機構成,能夠加壓到將膜形成液輸入塗布裝置2之程度。 The film forming liquid tank 51 stores a film forming liquid. The pressurizing device 52 is a device that pressurizes the inside of the film forming liquid tank 51, and is composed of a compressor, and can pressurize to the extent that the film forming liquid is fed into the coating device 2.

加壓裝置52還起到藉由具備空氣淨化用濾膜(未圖示)之送氣部55,將空氣送入塗布裝置2的作用。三通旋塞53用以切換向塗布裝置2導入膜形成液和導入空氣,排液罐54用以儲存從塗布裝置2排出之膜形成液。 The pressurizing device 52 also functions to send air into the coating device 2 by the air supply unit 55 provided with a filter membrane (not shown) for air purification. The three-way cock 53 is used to switch between introducing the film forming liquid into the coating device 2 and introducing air, and the drain tank 54 is used to store the film forming liquid discharged from the coating device 2.

對塗布裝置2中收納之基板10之各端面塗布膜形成液時,加壓裝置52運轉,將三通旋塞53置於送氣部55一側,從而排出系統內之塵埃等。接著將三通旋塞53切換至膜形成液罐51一側,對膜形成液罐51內加壓。將由加壓而被壓出之膜形成液導入塗布裝置2內,通過為塗布裝置2內各流路提供膜形成液而為基板10之各端面塗布膜形成液。 When the film forming liquid is applied to each end surface of the substrate 10 contained in the coating device 2, the pressurizing device 52 is operated, and the three-way cock 53 is placed on the side of the air supply unit 55 to discharge dust and the like in the system. Next, the three-way cock 53 is switched to the side of the film forming liquid tank 51 to pressurize the inside of the film forming liquid tank 51. The film forming liquid extruded by pressure is introduced into the coating device 2, and the film forming liquid is applied to each end surface of the substrate 10 by supplying the film forming liquid to each flow path in the coating device 2.

為了根據需要對基板10各端面充分塗布膜形成液而使膜形成液保持一定時間內流動之狀態。還可以代替使膜形成液保持流動之狀態,關閉三通旋塞53,保持膜形成液滯留於各流路之狀態。 In order to sufficiently apply the film-forming liquid to each end surface of the substrate 10 as needed, the film-forming liquid is kept flowing for a certain period of time. Instead of keeping the membrane forming liquid flowing, the three-way cock 53 can be closed to keep the membrane forming liquid retained in each flow path.

在膜形成液遍及基板10各端面後,藉由將三通旋塞切換到送氣部55一側,向塗布裝置2內各流路送入空氣,排出流路內之膜形成液。進而藉由持續送氣,促進於基板10之各端面上形成之塗膜的乾燥。 After the film forming liquid spreads to each end surface of the substrate 10, the three-way cock is switched to the side of the air supply unit 55, and air is sent to each flow path in the coating device 2 to discharge the film forming liquid in the flow path. Furthermore, by continuous air supply, drying of the coating film formed on each end surface of the substrate 10 is promoted.

作為加壓將膜形成液導入塗布裝置2之方法可以不使用壓縮機而利用管泵。從管泵之上遊一側提供膜形成液,於下游一側與塗布裝置2之導入路23連接,藉由使流經塗布裝置2之各流路之膜形成液從排出路24一側排出,能夠為基板10之各端面塗布膜形成液。 As a method of introducing the film forming liquid into the coating device 2 under pressure, a tube pump can be used without using a compressor. The film forming liquid is supplied from the upstream side of the tube pump and connected to the introduction path 23 of the coating device 2 on the downstream side, and the film forming liquid flowing through each flow path of the coating device 2 is discharged from the discharge path 24 side , The film forming liquid can be applied to each end surface of the substrate 10.

如上所述,利用塗布裝置2,為基板10之各端面塗布膜形成液之方法有多種。較佳為考慮基板10大小、塗布裝置2內流路長度、所處理基板10數量等條件,進行適當地選擇。 As described above, there are various methods for applying the film forming liquid to each end surface of the substrate 10 by using the coating device 2. It is preferable to make an appropriate selection in consideration of conditions such as the size of the substrate 10, the length of the flow path in the coating device 2, and the number of substrates 10 to be processed.

第14圖係顯示對設置於多個塗布裝置2之基板10進行連續處理之實例的側面圖。於位置P1,將設有基板10之塗布裝置2載置到輸送機等的搬運裝置上。接著,將塗布裝置2搬運至位置P2。於位置P2,將塗布頭47之供給側47a與塗布裝置2之連接管23d連接,將塗布頭47之排出側47b與塗布裝置2之連接管24d連接。於塗布頭47之供給側47a上連接膜形成液供給側之軟管46c(第12圖)或者軟管56d(第13圖)。另外,於塗布頭47之排出側47b上連接膜形成液排出側之軟管46d(第12圖)或者軟管56f(第13圖)。 FIG. 14 is a side view showing an example of continuous processing of substrates 10 installed in a plurality of coating devices 2. At position P1, the coating device 2 provided with the substrate 10 is placed on a conveying device such as a conveyor. Next, the coating device 2 is transported to the position P2. At the position P2, the supply side 47a of the coating head 47 is connected to the connecting pipe 23d of the coating device 2, and the discharge side 47b of the coating head 47 is connected to the connecting pipe 24d of the coating device 2. To the supply side 47a of the coating head 47, a hose 46c (Figure 12) or a hose 56d (Figure 13) on the supply side of the film forming liquid is connected. In addition, a hose 46d (FIG. 12) or a hose 56f (FIG. 13) on the discharge side of the film forming liquid is connected to the discharge side 47b of the coating head 47.

以該狀態為基板10各端面塗布膜形成液後,將塗布裝置2移至位置P3,結束膜形成液之塗布。 After applying the film forming liquid to each end surface of the substrate 10 in this state, the coating device 2 is moved to the position P3 to complete the application of the film forming liquid.

藉由重複該操作能夠連續地實施為設於多個塗布裝置2上之基板10端面塗布膜形成液的處理。 By repeating this operation, it is possible to continuously implement the treatment of coating the film forming liquid on the end surface of the substrate 10 provided on the plurality of coating devices 2.

由此除了移動塗布裝置2,塗布膜形成液之外,關於於一個位置進行塗布裝置2組之組裝以及膜形成液之塗布等,藉由塗布裝置2進行塗布膜形成液之方法,較佳為與處理數量、產品形狀、大小、其他的各種條件相配合進行適當的選擇。 Therefore, in addition to moving the coating device 2 and coating the film forming solution, the method of applying the film forming solution by the coating device 2 for the assembly of the coating device 2 sets and the coating of the film forming solution at one position is preferably Make appropriate selections in accordance with the processing quantity, product shape, size, and other various conditions.

第14圖顯示了塗布裝置2之連接管23d、24d自上模21(第3圖)上表面突出而形成之情形。因為有導入路23(第3圖)、排出路24(第3圖)之流路的徑小到1mm左右之情形,故較佳為連接管23d、24d具有一定程度之強度。 Fig. 14 shows a state where the connecting pipes 23d and 24d of the coating device 2 protrude from the upper surface of the upper mold 21 (Fig. 3). Since the diameter of the flow path of the introduction path 23 (FIG. 3) and the discharge path 24 (FIG. 3) may be as small as about 1 mm, it is preferable that the connecting pipes 23d and 24d have a certain degree of strength.

關於連接管23d、24d,較佳為將管插入形成於上模21之穿透孔而固定。藉由將連接管23d固定於上模21,能夠確實地連接軟管46c、56d。藉由將連接管24d固定於上模21,能夠確實地連接軟管46d,56f。 Regarding the connecting pipes 23d and 24d, it is preferable to insert the pipes into the through holes formed in the upper mold 21 and fix them. By fixing the connecting pipe 23d to the upper mold 21, the hoses 46c and 56d can be reliably connected. By fixing the connecting pipe 24d to the upper mold 21, the hoses 46d and 56f can be reliably connected.

第12圖至第14圖對利用塗布裝置2構成塗布系統40、50之情形進行了舉例說明,但將第12圖至第14圖中塗布裝置2置換為塗布裝置1,則同樣地可以構成利用了塗布裝置1之塗布系統。 Figures 12 to 14 illustrate the use of the coating device 2 to form the coating systems 40 and 50. However, if the coating device 2 in Figures 12 to 14 is replaced with the coating device 1, the same configuration can be used The coating system of the coating device 1.

以上將第1圖所示之基板10作為產品,對實施方式涉及之塗布裝置以及塗布方法進行了說明。關於產品,其大小、形狀、穿透孔數量、形狀等各種各樣。另外,作為本發明對象之產品上,除了以玻璃環氧材料、合成材料、紙苯酚材料等作為材料而形成之印刷配線基板外,還包括樹脂製、玻璃製、金屬製之板狀成形品等。 In the above, the substrate 10 shown in FIG. 1 is used as a product, and the coating apparatus and coating method according to the embodiment have been described. Regarding products, there are various sizes, shapes, number of penetration holes, and shapes. In addition, the products targeted by the present invention include printed wiring boards formed from glass epoxy materials, synthetic materials, paper phenol materials, etc., as well as resin, glass, and metal plate-shaped molded products, etc. .

另外,小型產品之情況,可以於一組上模與下模之間,藉由墊圈,設置多個產品,針對多個產品,同時塗布膜形成液。 In addition, in the case of small products, multiple products can be placed between a set of upper and lower molds with gaskets, and the film forming solution can be applied to multiple products at the same time.

在利用形成有連接流路之上模的塗布裝置之情形下,能夠快速地確實且容易地為產品之端面塗布膜形成液。上述塗布裝置包括具有連 接流路之上模、由於塗布裝置之構造簡單故可以廉價地製造。因此即使產品種類多也可以容易地對應。 In the case of using a coating device in which the upper mold of the connection flow path is formed, the film forming liquid can be quickly, reliably and easily applied to the end surface of the product. The coating device described above includes an upper mold with a connecting flow path, and can be manufactured inexpensively because of the simple structure of the coating device. Therefore, even if there are many types of products, it can be handled easily.

另外,吸引方式之塗布系統之情況,塗布裝置之各流路內為減壓狀態。故塗布膜形成液時,膜形成液難以從流路向產品上表面、下表面浸入,另外於塗布/排出膜形成液後,向流路內導入空氣,能夠快速且有效地進行流路內之膜形成液之除去、乾燥。 In addition, in the case of the coating system of the suction method, the pressure in each flow path of the coating device is in a reduced pressure state. Therefore, when the film forming liquid is applied, it is difficult for the film forming liquid to penetrate from the flow path to the upper and lower surfaces of the product. In addition, after coating/discharging the film forming liquid, air is introduced into the flow path to quickly and effectively carry out the film in the flow path. Removal and drying of the formed liquid.

[產業上之利用可能性] [Possibility of industrial use]

本發明可以廣泛應用於使用印刷配線基板、金屬基板、包裝基板、玻璃基板等各種基板之電子器械產業等領域。 The present invention can be widely used in the electronic equipment industry and other fields using various substrates such as printed wiring substrates, metal substrates, packaging substrates, and glass substrates.

1‧‧‧塗布裝置 1‧‧‧Coating device

10‧‧‧基板 10‧‧‧Substrate

21‧‧‧上模 21‧‧‧Upper die

22‧‧‧下模 22‧‧‧Die

23‧‧‧導入路 23‧‧‧Introduction

24‧‧‧排出路 24‧‧‧Exhaust Path

25b、25c、25d‧‧‧隧道型連接流路 25b, 25c, 25d‧‧‧Tunnel type connection flow path

Claims (13)

一種塗布裝置,係對產品上所形成之孔端面塗布膜形成液之塗布裝置,其中,藉由載置前述產品之下模、覆蓋前述產品之上模以及前述產品,形成與前述孔端面相接之一筆就可以畫出的膜形成液流路;前述上模具備將前述膜形成液導入至前述膜形成液流路之單一導入路、從前述膜形成液流路排出前述膜形成液之單一排出路以及連接前述膜形成液流路之間之連接流路;以使從前述單一導入路導入之膜形成液不間斷地流經前述膜形成液流路以及前述連接流路,從前述單一排出路排出的方式,形成前述連接流路。 A coating device is a coating device for applying a film forming liquid to the end face of a hole formed on a product, wherein the lower mold of the product, the upper mold of the product, and the product are placed in contact with the end of the hole A film forming liquid flow path that can be drawn with a single stroke; the upper mold is equipped with a single introduction path for introducing the film forming liquid into the film forming liquid flow path, and a single discharge for discharging the film forming liquid from the film forming liquid flow path And the connecting flow path connecting the film forming liquid flow path; so that the film forming liquid introduced from the single introduction path flows through the film forming liquid flow path and the connecting flow path uninterruptedly, from the single discharge path The way of discharge forms the aforementioned connection flow path. 如申請專利範圍第1項所述之塗布裝置,還具備包圍前述產品之外周邊緣端面之殼體,藉由前述下模、前述殼體和前述上模,以形成與前述產品之外周邊緣端面相接之膜形成液流路的方式構成。 The coating device described in the first item of the scope of patent application further includes a shell surrounding the outer peripheral edge end surface of the aforementioned product, and the lower mold, the aforementioned shell, and the aforementioned upper mold are used to form the outer peripheral edge end surface of the aforementioned product. The connected film forms a liquid flow path. 如申請專利範圍第1項或者第2項所述之塗布裝置,其中,前述上模於內部包含前述單一導入路、前述單一排出路以及作為前述連接流路之隧道型連接流路而構成。 According to the coating device described in claim 1 or 2, wherein the upper mold includes the single introduction path, the single discharge path, and the tunnel-type connection flow path as the connection flow path. 如申請專利範圍第1項或者第2項所述之塗布裝置,其中,前述上模包含覆蓋前述產品之上模基板、與前述上模基板連接的作為前述單一導入路之管型導入路、作為前述單一排出路之管型排出路以及作為前述連接流路之管型連接流路而構成。 The coating device described in item 1 or item 2 of the scope of patent application, wherein the upper mold includes a tube-shaped introduction path that covers the upper mold substrate of the product, and is connected to the upper mold substrate as the single introduction path, as The tubular discharge path of the single discharge path and the tubular connection flow path as the connection flow path are constituted. 如申請專利範圍第1項或者第2項所述之塗布裝置,其中,前述上模於內部具備前述單一導入路以及前述單一排出路,進而包含於與前述產品相向之下表面具備作為前述連接流路之溝型連接流路而構成。 The coating device described in claim 1 or 2, wherein the upper mold is provided with the single introduction path and the single discharge path inside, and is further included on the lower surface facing the product as the connecting flow The groove of the road is formed by connecting the flow paths. 如申請專利範圍第1項或者第2項所述之塗布裝置,其中,前述下模或者前述上模,於與前述產品之穿透孔相對應之位置具備島狀部,以於前述孔端面與前述島狀部之間形成前述膜形成液流路的方式而構成。 The coating device described in item 1 or item 2 of the scope of patent application, wherein the lower mold or the upper mold is provided with an island at a position corresponding to the penetration hole of the product, so that the end surface of the hole and It is configured to form the film forming liquid flow path between the island-shaped portions. 如申請專利範圍第1項或者第2項所述之塗布裝置,其中,於前述上模與前述產品之間以及前述產品與前述下模之間,具備墊圈,以防止前述膜形成液浸入前述產品的上表面以及下表面。 The coating device described in item 1 or item 2 of the scope of patent application, wherein a gasket is provided between the upper mold and the product and between the product and the lower mold to prevent the film-forming liquid from immersing into the product The upper surface and the lower surface. 如申請專利範圍第3項所述之塗布裝置,其中,具備前述隧道型連接流路之前述上模係利用3D印表機製造者。 The coating device described in claim 3, wherein the upper mold equipped with the tunnel-type connecting flow path is manufactured by a 3D printer. 如申請專利範圍第3項所述之塗布裝置,其中,具備前述隧道型連接流路之前述上模係將形成有前述隧道型連接流路之上側一半部分之上部板、與形成有前述隧道型連接流路之下側一半部分之下部板黏在一起而形成者。 The coating device described in claim 3, wherein the upper mold system having the tunnel-type connecting flow path is formed with the upper half of the upper half of the tunnel-type connecting flow path and the upper plate formed with the tunnel type It is formed by bonding the lower plate of the lower half of the connecting flow path. 一種塗布方法,係使用申請專利範圍第1項或者第2項所述之塗布裝置,對產品塗布膜形成液之塗布方法,其中,藉由於前述單一排出路一側吸引由前述單一導入路所導入之前述膜形成液,在前述產品之端面塗布膜形成液。 A coating method that uses the coating device described in item 1 or item 2 of the scope of patent application to coat a product with a film forming liquid, wherein the suction is introduced by the single introduction path due to one side of the single discharge path. The aforementioned film-forming liquid is applied to the end surface of the aforementioned product. 一種塗布方法,係使用申請專利範圍第1項或者第2項所述之塗布裝置,對產品塗布膜形成液之塗布方法,其中,藉由從前述單一 導入路壓入前述膜形成液,從前述單一排出路排出前述膜形成液,在前述產品之端面塗布膜形成液。 A coating method that uses the coating device described in item 1 or item 2 of the scope of the patent application to coat a product with a film forming liquid, wherein The film forming liquid is pressed into the introduction path, the film forming liquid is discharged from the single discharge path, and the film forming liquid is applied to the end surface of the product. 如申請專利範圍第10項所述之塗布方法,其中,於前述產品之端面塗布膜形成液、排出所述膜形成液後,還向前述膜形成液流路導入用以乾燥膜形成液之空氣。 The coating method described in claim 10, wherein after coating the film forming liquid on the end surface of the aforementioned product and discharging the film forming liquid, air for drying the film forming liquid is also introduced into the aforementioned film forming liquid flow path . 如申請專利範圍第11項所述之塗布方法,其中,於前述產品之端面塗布膜形成液、排出所述膜形成液後,還向前述膜形成液流路導入用以乾燥膜形成液之空氣。 The coating method described in item 11 of the scope of the patent application, wherein the film forming liquid is applied to the end surface of the aforementioned product and the film forming liquid is discharged, and then air for drying the film forming liquid is introduced into the film forming liquid flow path .
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