JPH0813537B2 - Floating / laminating device for liquid crystal substrate layer formed by generating air film - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a means for laminating a variety of liquid crystal display substrates, particularly in the electronic field where high precision finishing is required. The present invention relates to an apparatus for obtaining a laminated body in a single step when a pair of fragile work materials such as glass is instantly levitated through a gas film pressure generated in the apparatus of the present application in the lamination.

[0002]

2. Description of the Related Art 1) Originally, in the case of processing the above-mentioned work material, in a substrate of a liquid crystal display element, two glass substrates were coated with a sealant and overlapped with each other, and this was applied by a rolling force between rollers. It was usual to carry out by laminating or sandwiching between press machines and applying mechanical pressure. There are some problems to be solved due to the universalization of such conventional means. There is a limit in the finishing accuracy of the work material with mechanical pressure such as a press machine, and there are two surface plates. He also limits the accuracy of parallel lines and the method of adjusting the thickness of the minute gears, which is essential between platens. Since the conventional processing means has to avoid vibration and shock of the work piece on the other side, the pressure is gradually applied to both pressurizing surfaces, which requires extra control know-how. Although the level of parallel or flat finish in the past satisfies the finish line of 3 μm, if high precision or high quality machining that surpasses it is required by the action of the conventional device, it will be extremely expensive and lose the market competitiveness. 2)
By the way, prior to the present application, it must be noted that there is a document of a means for laminating a polyurethane coating on the surface of a glass material or a heating device for satisfactorily sealing the joining of plastic materials. In the above, there is an ideological difference different from the purpose of simply crimping or laminating. In brief, the quality and quantity of air film calculated from the inside of the gear of the device of the present application are strictly blown, and the effect of pressure equalization becomes great in stacking, and therefore it is not necessary to further define additional steps. In order to generate the calculated air film (compressed gas), the hole diameters at the multiple outlets of the air perforated in the upper and lower plates were set to the same 0.4 to 0.6 m / mφ limit. If the diameter is the same, in order to prevent pressure unevenness in the gap, in the concept of the present application, the ejection amount near the center of the board is configured to be a rougher flow than the surrounding area (see below), and in addition, the wall surface of the hole is conical. Moreover, the nozzle block is provided (see below, 0006), and the following procedure (c) is also introduced. (C) The air flow rate inside the device is set to a fixed value, and in this case, the gap width (upper and lower discs) is selected as an optimum interval in view of the relationship with the internal pressure (post-mentioned 0013).

[0003]

DISCLOSURE OF THE INVENTION The present invention provides an advanced dedicated device for adjusting the pressure of a gas film in a work material so that the pressure of a gas film can be adjusted in a process of laminating a liquid crystal substrate, which has many difficulties in the prior art. By providing it, it is intended to easily obtain a substrate layer with a uniform surface pressure and high precision finish.

[0004]

[Means for solving the problem] A pair of upper and lower horizontal plates having a large number of small conical openings for sucking and ejecting compressed air of a proper quality to be supplied are made to face each other by holding adjustable gears in a clean air zone. The device is constituted by a device for laminating the above-mentioned materials to be processed, which are arranged in the gears between the horizontal plates, by applying a pressure of a gas film generated around the materials.

The device according to the present invention operates in a clean space free of dust, while the pipeline of dry, clean air supplied is directly connected to the device.

[0006]

EXAMPLE An example of the present invention will be described in the manufacture of a liquid crystal display device on a glass substrate. As for the implementation, since this was sorted into two or more processing examples and a test was tried, each case will be described in detail below. In Example 1, two glass substrates (workpieces) forming the element are arranged between the upper and lower plates of the device of the present application, and the surface pressure of the air film is applied to both sides of the material to instantaneously seal and laminate. Is a basic configuration of a device for terminating. It will be described with reference to FIGS. 1 and 2. The side plates 11 'of the devices arranged facing each other are formed in a rectangular shape or a square shape. Compressed air pressure passage 4 drilled inside the board
4 and compressed air a from the passage 44 into the opposing gear
A large number of outlets 3 3 3 ... For ejecting b are provided. Each of the outlets had the same diameter, and 0.4 to 0.6 m / mφ was used. The side wall of the outlet was formed into a conical shape, and a plurality of nozzle blocks (not shown) were fixedly installed in the hole (outlet 3 in FIG. 2). A gear (not shown) having a small circumference is formed between the block (not shown) and the opening hole.
Therefore, the compressed air a b from the outlet 3 3 3 ..., gives the pressure of the air layer extending to the plane of the slightly inclined to have erupted non workpiece (action to be described later). Since the hole diameters of the outlets are configured to be the same, the air pressure of the outlets 3 33 ... In the vicinity of the center of the gear surface of the horizontal plate 11 'and the outlets 333 near the left and right ends of the plate. .. It is necessary to balance the unevenness and decrease of the air pressure of .. In the operation of the present invention, the jet air amount is adjusted so that the central part of the horizontal plate 11 'has a rough flow and its peripheral parts, that is, the left and right surfaces, have a dense flow. (Fig. 2). Even if the outlet diameter of the central portion is made smaller than that of the peripheral portion instead of the configuration of FIG. 2, the decrease in the air pressure at the outlet can be covered. The device 1 1 'is possible and quantitative adjustment of the predetermined cleaning value of introducing compressed air a b supply circuit A
p-C is shown in FIG.

The material L to be processed will be briefly described below.
The liquid crystal display element L is a glass substrate L ₁ L ₂ . Spencer group M ₁ M ₁ . ． ． . The condition is that the laminated sealing material 5 5 temporary sealing material M ₂ M _{2 and} others (X electrodes, Y electrodes (not shown), dielectric layers, etc.) are used for strict finishing. Especially Spencer M ₁ M ₁
... is generally a granular glass system having a diameter of 5 μm to 10 μm, but the deviation is ± 0.1 μm to ± 0.5 μ
must be m.

The inventor heats the substrate L ₁ L ₂ of the liquid crystal element
When the adhesive is cured, the compressed air described above is applied to the side plate 1
Before leading to 1 ', heating was performed via a heat exchanger (attached to the Ap-C circuit in Fig. 5 to be described later) to enhance the sealing action of the sealing material 55, but it is necessary to add heating temperature depending on the substrate material. A spare heater panel H ₂ H ₂ (FIG. 1) can be mounted horizontally along with the device.

The operation of the laminating apparatus 11 'according to the invention will be described below. The upper and lower horizontal plates 11 'shown in FIG. 1 together with the gear members 22 form the above-mentioned device. The device was arranged in a clean room and the gap width was adjusted to an optimum interval according to the purpose. Compressed air a b passing through the gas pressure passage 4 4 are injected inclined number from the outlet group 3 3 3 ... and compressed air becomes dense flow at right and left periphery portions of Giyappu surfaces of the upper and lower plate That is, the flow rate is large, and a rough rough flow with a small flow rate is ejected in the vicinity of the center, so that the pressure distribution, which is unlikely to occur in the periphery, can be corrected and the air pressure in the gear can be made uniform.

[0010] compressed air a b of the as described above is fed from the pneumatic circuit Ap-C of the normal means (Fig. 5). Since the present invention requires the clean and dry compressed air without dust to function in the apparatus, the description of the circuit Ap-C will be added. Compressed air is generated by the power source S in FIG. 5, and the discharged air is cooled by the cooler c, and once in the tank d, the accumulated pressure is approximately 4 to 10 kg · f / cm.
^It keeps ² and is stored. The discharged air is made into a dry air stream in which the oil content and atomized particles in the air are removed through an oil mist separator e and a micro mist separator h, and then the water content is removed by a dryer f. Fine particles in the air, such as dust and dust, are separated by the pre-filter g and the air filter i, and at the same time, a gas flow and a pressure of at least JIS level JIS4 are output. While the compressed air is constantly sent by the pressure reducing valve j, the compressed air is heated through the heat exchanger H ₁ described above in a necessary process. Gas membrane [delta] [delta] as to in the apparatus the compressed air in the control valve V V and the thus supplies flowing quantitative limit to correct the air amount a b to obtain (Figure 1).

[0011]

[Floating action of the liquid crystal display element L] The liquid crystal element L is arranged between the gears 22 of the device 1 1'according to the present invention.
When excessive and sparse compressed air is jetted from the air flow jet port 3 3 3 ... Of the apparatus, a gas film δ δ having a required pressure is generated in the gear, so that the element L floats.

[0012]

[Lamination action of the element L] The glass substrate L ₁ L ₂ floating in the gear 22 receives the air pressure of the film and at the same time obtains the adhesive action of the sealing material 55, so that the substrates L ₁ L ₂ are instantly laminated. To be done.

[0013]

[Measurement of the above action] (1) Pressure δ in the gas film gap
Experiment of δ and gear adjustment range. When the air flow rate in the apparatus was set to a fixed value of 32 l / min and the gears were changed as shown in (1) of the following table, respective homogeneous pressures (2) were obtained. (2) The gas film thickness can be controlled in the range of 1 μm to 50 μm. (3) The stacking effect was measured by a tactile sensor. The tactile sensor (pressure component) that brings in the pressure applied between the glass substrates L _{1 and} L ₂ described above. Then, the electric resistance value at each intersection was taken into a connection computer, and the surface pressure distribution was observed from the screen (not shown). FIG. 3 schematically shows the positional relationship between the sensor sheet and the main parts of the device at the time of the above-mentioned measurement (the designated reference numerals are explained at the end).

[0014]

Second Embodiment Needless to say, the basic means of the present invention, which can be completed only once in the first embodiment, can be naturally applied to a plurality of parallel processes (connection of two or more actions of the apparatus). During the parallel processing, the material can be sequentially processed from the first processing to the final processing to be combined.

[0015]

[Embodiment 3] Further, the following known means is used in the device 1
When it is added to 1 ', the gear cap member 22 of the present invention which mechanically adjusts is unnecessary, and the gear cap size can be adjusted. In this alternative experiment, distance sensors (not shown) were fixedly installed on the left and right ends of the gear surface of the horizontal plate 1 of the device, and a servo motor and a hydraulic machine (not shown) mounted at the rear of the device 1 ′ were operated, and the required gear length was increased. Could be predicted.

It is obvious that the present invention can be applied to the case where the glass material of the above-mentioned element is replaced by a film shape. That is, two of the film substrates are temporarily fixed, placed in the gear of the apparatus, the membrane pressure is applied as described above, and the film is pulled out from the outlet.

The above-mentioned results of the implementation can be evaluated as follows.

FIG. 4A shows the measured values of the surface pressure distribution of the substrates L ₁ L ₂ after bonding, which are dimensioned. The distribution was about 600 to 800 g / cm ^{2 on} the entire surface of the substrate, the compression force was almost uniform, and the highest difference in surface pressure was 1,000 g / cm ² or less.

[0018]

[Comparison with conventional effects]

FIG. 4B is a surface pressure pattern obtained by actually measuring the current mechanical compression means. As you can see at first glance, on the surface, a special strong pressure part and a flat P with almost no pressure applied.
The part is clear. Especially in the part where pressure is applied
5,000 g / cm ² and one P partial area ratio is 30
%. The effect difference from the uniform surface pressure means relating to the device configuration and operation of the present application becomes clear.

[0019]

EFFECTS OF THE INVENTION In laminating between liquid crystal substrates, the horizontal plate ejection of compressed air and the film pressure intervening means according to the present invention allow the gas film pressure to contact the surface of the work piece with high precision. In other words, at least at most points on the surface of the material to be processed, it is possible to obtain a uniform output extremely easily as a mean value. It corresponds to a ratio of 100 times. Since the flow rate adjustment of the compressed air can act as a change in the surface pressure on the material, a high-quality quantitative production adapted to the substrate is secured.

[Brief description of drawings]

FIG. 1 is an explanatory view of an apparatus according to the present invention

[Fig. 2] Arrangement diagram of compressed air outlets formed on the upper and lower horizontal boards of the device.

[Fig. 3] Diagram for measuring the pressure distribution acting on the surface of the work material

[Figure 4]

FIG. 5 is a pneumatic circuit diagram directly connected to the device of the present invention.

[Explanation of symbols]

1 1'Horizontal board that constitutes the device 2 2 Gear trap member of the device 3 3 3 Multiple outlets for compressed air 4 4 Compressed air passage δ δ Air flow film pressure in the gear a b Compressed air L ₁ L ₂ Workpiece inserted (Glass element) Sen. S Sensor sheet P Pressure gauge flow Flowmeter 6 Positioning bar

Claims (3)

[Claims] 1. A pair of upper and lower parts, each of which has a pressure passage for introducing compressed air for storing heat and has a large number of outlet holes, and jets a compressed air gas branched from the passage into a narrow gear of the apparatus. A device for laminating two element substrates of the same quality consisting of a horizontal board facing each other, wherein compressed gas in the gear is instantaneously levitated on both sides of the substrate to give a surface pressure and the material is laminated at the same time as sealing. The said apparatus characterized by having the structure. 2. The liquid crystal substrate laminating apparatus according to claim 1, wherein all of the peripheral walls of the multiple outlet holes of claim 1 are formed in a conical shape to cause a tilted flow action. 3. The same outlet hole diameter as in claim 2 is used.
A simple structure within the range of 0.4 m / mφ to 0.6 m / mφ, and with such restrictions, the internal injection amount near the center of the horizontal board of the device is configured to be coarser than that of the surrounding area. The liquid crystal substrate stacking device according to claim 1 or 2, wherein