JPH06235896A - Contactless pressure sticking method - Google Patents

Abstract

PURPOSE:To pressurize and stick materials to be worked to each other by floating the materials to be worked with the clean air to be ejected from gaseous film generators as the materials to be worked for sticking two sheets of thin-sheet materials consisting of glass, plastics, etc., and interposing the pressure of the gaseous films generated by the air. CONSTITUTION:The air of at least JIS >=4 cleanliness supplied from another gas pressure circuit Ap-C directly connected to the gaseous film generators is ejected from gaseous flow outlets 14 of the gaseous film generators 1, 2. The gaseous films 13, 13 are generated between both by the air pressure ejected between the liquid crystal display element 1 and the device 1, 2, by which the liquid crystal display element L is floated. The element L is pressurized by the pressure of the compressed air ejected from the gaseous film generators 1, 2 simultaneously with floating and, therefore, two sheets of glass substrates L1, L2 of the element L is stuck to each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for display display in electronics, such as two fragile or flexible thin plate materials, which use a gas film to add a delicate atmospheric pressure pattern to the plate material or the like instantaneously. The present invention relates to a non-contact gas pressure type bonding means for bonding.

[0002]

2. Description of the Related Art Originally, in order to bond materials to be processed as described above, two sheet-shaped materials are coated with a sealing agent and overlapped with each other, and they are bonded by a rolling force between rollers or sandwiched between press machines. It was usually done by applying mechanical pressure. However, it cannot be expected to secure the bonding accuracy by the roller rotation pressure.Since one pressing means must avoid the vibration and shock of the work material on the pressure surface and the pressure receiving surface, the pressure is gradually applied to both pressure surfaces. It was necessary to add such extra control know-how.

In addition, unless the degree of parallelism on both the pressure-applying surface and the pressure-receiving surface is ensured with high accuracy, serious problems will occur in the finish and reliability of the workpiece. The level of technology for parallel or plane finishing in the conventional means has been improved, and the finish is 3 μm.
If high-quality bonding that satisfies the line but surpasses it is required at the conventional level, the cost will be extremely high and the market competitiveness will be lost. In particular, the advent of a severe bonding means involving a work material such as glass which is difficult to handle is a long-awaited one in the field, and a solution to such a problem is demanded worldwide.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to easily and easily disclose a high-precision and high-quality finishing means for laminating a plurality of members, which has many difficulties in the prior art. The new means of applying gas film pressure not only avoids mechanical vibrations and shocks in machining, but also allows adjustment of gas pressure itself to increase the application range and finish of the material. I will try to achieve it.

[0005]

According to the present invention, a clean compressed air is sent from a gas pressure circuit directly connected to a device, in which a material to be processed is placed between two gas film generators facing each other with a certain gear gap. Is ejected from the outlet of the device to cause a gas film between the devices, and the pressure causes the work materials between the devices to be bonded with high accuracy (uniformity) and high quality (delicate surface pressure formation). It provides a method configuration for introduction.

[0006]

EXAMPLE An example of the present invention will be described in the manufacture of a liquid crystal display device on a glass substrate. FIG. 5 is a widely known manufacturing pattern of a liquid crystal element, and the steps to which the method invention of the present application is applied, that is, the substrate bonding x and the heating, pressing and curing y in the figure are shown in the pattern.

A known structure of the liquid crystal element L will be briefly described with reference to FIG. In the device, a flat glass substrate L ₁ L ₂ is provided with metal X electrodes and Y electrodes, a dielectric layer is applied, and then a magnesium oxide layer (not shown) is applied to form the substrate L ₁ It is formed by printing the sealant 15 on L ₂ , and the two substrates are sealed so as to face each other so that the respective XY electrodes intersect. As is well known, a glass-based spherical granular spacer is enclosed in all of the pair of display portions.

Due to such an essential structure, the first condition is that the liquid crystal element has high precision and high quality. The deviation of the spacer is based on within ± 0.1 to ± 0.5 μm, and the light emission under the applied voltage is 10 to 500 fL luminance,
It requires 0.1 to 1.6 fm / w efficiency.

The method of carrying out the method of the present invention will be described in detail with reference to FIGS. 1 to 3. In FIG. 1, a predetermined compressed air is supplied from a gas pressure circuit Ap-C directly connected to the device 12 to a passage 4 of the device.
I am sending to 5. Now, the gas film generator 1 in the vertical direction
2 are arranged opposite to each other and both devices 1 2
The width of the gear is adjusted to the optimum interval for the desired bonding. The device 12 ejects the compressed gas that has passed through the gas pressure passage 45 from the outlets 14 14 14 ... And the outlets 14 14 14 ...
2 has a large number of holes in the peripheral portion of the board, which is a large number of openings in the board, and the number of holes near the center of the board is small (Fig. 2). A dense flow is formed in the peripheral portion, and a rough rough flow is formed in the vicinity of the central portion to make the gas pressure uniform. Further, the side surface of the hole has a conical shape, and a slightly inclined jet flow is emitted from the gear cap surface of the device 12 to make the surface pressure on the work material effective.

The gas pressure circuit Ap-C is an atmospheric pressure generator having a normal construction, but a compressed gas is caused by its power source S and the discharged gas is cooled by a cooler 6, and once the accumulated pressure in the tank 7 is approximately 4 to 10 kg. It is stored keeping f / cm ² . The discharge gas is used as an oil mist separator 8
After removing the oil and atomized particles in the gas through the micro mist separator 8 ', a dryer 9 was used to remove the water content to obtain a dry air stream.

Then, fine airborne solids such as dust and dust were separated by the prefilter 10 and the air filter 10 ', and the pressure was adjusted to a clean gas pressure.

In the above embodiment, cleaning of compressed air is an essential element. Now, in order to keep the cleanliness class JIS4 or higher, the above-mentioned device 12 is arranged inside the clean room. The clean gas from the gas pressure circuit Ap-C directly connected to the device 12 is always sent as stable compressed air by the pressure reducing valve V, while the compressed air is added via the heat exchanger 11 when necessary (described later). It was heated and raised to the temperature required for the uniqueness of the work material. The air after heating is controlled by the control valve 121.
2, the amount of air was limited to an appropriate amount for obtaining the gas film 13 13, and the gas film 13 13 was fed into the above-mentioned device 12.

[0013]

[Floating action of liquid crystal display element L] In FIG.
When the liquid crystal element L is arranged between the gas film generating devices 12 and excessive and sparse compressed air is jetted from the multiple compressed air outlets 14 (FIG. 2) of the device with a slight inclination, the upper and lower devices 12 are connected. The element L floats in the gearbox of the device as a homogeneous gas film 13 13 is formed.

[0014]

[Laminating action of the element L] The glass substrates L ₁ L ₂ of the levitated element L receive a uniform surface pressure. Sealing material 15 at the same time
Substrate L ₁ L ₂ is instantly bonded because it is subjected to the adhesive action of 15.

Here, it is obvious that the present invention can be applied to the case where the glass material of the above-mentioned embodiment is replaced with a plastic film. That is, two film substrates are temporarily fixed, inserted between the devices, pressurized with a gas film as described above, and the film is pulled out from the other outlet.

The above-mentioned results of the implementation can be evaluated as follows. FIG. 3A shows the substrate L ₁ after the bonding.
The actual measurement value of the surface pressure distribution of L ₂ is shown as a dimension. The distribution was approximately 600 to 800 g / cm ^{2 over} the entire surface of the substrate, and the compression force was approximately uniform and the surface pressure difference was as high as 1,000 g / cm ² or less.

[0017]

[Comparison with the pasting effect of the conventional method] The surface pressure pattern of FIG. 3-B is an actual measurement of the current mechanical compression means. As apparent at first glance, on the surface, the special strong pressure portion and the flat P portion where almost no pressure is applied are clear. In particular, the pressure-applied portion has a maximum of 5,000 g / cm ² , and the P portion area ratio on the one hand reaches 30%. The effect difference from the uniform pressurizing means according to the present application becomes clear.

By the way, when the method of the present invention is applied in the liquid crystal device manufacturing step y (heating, pressurizing, curing), the heat exchanger 11 (FIG. 1) is attached to the gas pressure circuit Ap-C, and compressed air is supplied. The sealing material 15 is heated to a predetermined temperature and blown out.
Assisted 15 rapid dry solidifications.

[0019]

As already disclosed, the intervening means of the clean gas film of the present invention allows the work piece and the pressing surface to come into contact with each other with high accuracy, and when the pressure change is applied to the work piece, it is optional. Can be adjusted, in other words, fine pressure adjustment can be easily performed, so high-quality quantitative production adapted to the material can be secured. In addition, the progress idea of the present invention affirms even the execution of the following extension idea and retains the basic position in creation, that is, it performs the above-mentioned pressurizing action of the fine adjustment, for example, a rolling mill. This is in the case of subsequent generation in which the thickness of the thin metal plate is controlled to a predetermined value.

[Brief description of drawings]

FIG. 1 is a diagram showing a method for laminating a liquid crystal display element, which is an exemplary embodiment of the present invention.

FIG. 2 is a jet flow mode from an opening hole in a dedicated device of the present invention.

3A is a surface pressure distribution pattern diagram in the embodiment of the present invention. FIG. 3B is a surface pressure distribution effect diagram by the conventional means.

FIG. 4 is an explanatory view of a material to be processed-a liquid crystal display element implemented by the present invention.

FIG. 5 is a mass production process pattern diagram of the workpiece shown in FIG.

[Explanation of symbols]

1 2 Gas Film Generating Device 3 Device Gear Tap 4 5 Gas Pressure Passage 13 13 Gas Film 14 Gas Outlet Hole 15 15 Sealing Material L Liquid Crystal Display Element L ₁ L ₂ Element Glass Substrate Ap-C Separately Connected to Device Gas pressure circuit 11 heat exchanger

Claims (4)

[Claims] 1. A pair of gas film generators each having a gas pressure passage and a gas outlet are opposed to each other vertically, and supplied from another gas pressure circuit directly connected to the pair of devices to provide at least a cleanliness class. Compressed air of JIS 4 or higher is jetted from the outlet, and the work material placed between the devices is levitated, and at the same time, the pressure of the air flow film generated between the devices is intervened in the sealing action of the work material. A non-contact pressure bonding method for work materials such as thin plate materials to be bonded to. 2. The non-contact of the work material according to claim 1, wherein the compressed air jetted from each gas outlet of the facing gas film generator is configured to adjust its flow rate. Pressure bonding method. 3. The non-contact additive according to claim 1, wherein the gas flow outlet according to claim 1 is arranged so that a rough flow is provided at a central portion of the pair of devices and a dense flow is provided at a peripheral portion thereof. Pressure bonding method. 4. The non-contact pressure bonding method according to claim 1, wherein the interval between the facing devices of claim 1 can be adjusted.