JPH06234197A - Noncontact pressure device for lamination or bonding of electronic circuit board - Google Patents

Abstract

PURPOSE:To highly accurately bond together two thin plates to produce electronic parts such as display board and laminate printed board for computer by a method wherein jets of compressed air having a high cleanability are delivered into a pressure device employing gaseous film in order to float the laminating materials inserted into the space thereof and to apply to the materials the gaseous film pressure produced by the compressed air. CONSTITUTION:Jets of the compressed air meeting at least the JIS 4 requirements for air cleanability are delivered from a number of air outlets 3 provided in the horizontal members 1 of a pressure device through a separate gaseous pressure circuit Ap-C directly connected to the pressure device employing gaseous, film. The liquid crystal element glass bases L1 and L2 to be laminated together are floated by the air jet and the gaseous film pressure produced in a space 2 of the pressure device so as to be bonded together instantly. Each of the horizontal members has the air outlets 3 arranged dispersely at the central part of its surface confronting the space of the pressure device and densely toward each end thereof, the peripheral wall of the individual air outlets is formed into a conical shape and nozzles are interposed between the air outlets, thereby applying a uniform air pressure to the glass bases.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention instantly attaches or laminates two fragile glass or film-like or resin-like thin plate materials such as a display display board in electronics or a laminated printed board of a computer. The present invention relates to an air flow membrane pressurizing device.

[0002]

2. Description of the Related Art Originally, when processing a workpiece as described above, for example, when laminating a liquid crystal display element on a substrate, two glass substrates are coated with a sealant and superposed on each other, and the two are laminated by a rolling force between rollers. It was customary to apply mechanical pressure by mating or sandwiching between press machines. There are some problems to be solved due to the universalization of the above-mentioned conventional means. Mechanical pressurization such as a press machine has a limit in finishing accuracy of a work material, and 2
The accuracy of the parallel lines on the two surface plates and the method of adjusting the thickness of the minute gears, which is essential between the surface plates, are also restricted by themselves. Since the conventional processing means has to avoid vibration and shock of the work material on the other side, the pressure is gradually applied to both pressurizing surfaces, which requires extra control know-how. The same problem is also encountered in the laminated board process of the computer, which requires the bonding process of many printed boards. In particular, although the conventional level of parallel or plane finishing satisfies the finish line of 3 μm, if high precision or high quality machining that surpasses it is required by the action of the conventional device, it will be extremely expensive and lose the market competitiveness.

[0003]

DISCLOSURE OF THE INVENTION The present invention is an advancement in which the pressure of a gas film can be adjustedly intervened in a work material in substrate bonding or lamination processing of electronic elements, which has many difficulties in the conventional state of the art. The purpose of this is to provide a high-precision and high-quality finishing material easily by implementing the dedicated device of.

[0004]

[Means for Solving the Problem] A pair of horizontal plates having a large number of small conical openings for sucking and ejecting the compressed air of a proper quality to be supplied are opposed to each other while holding a freely adjustable gearup in a clean air zone. A device consisting of
The material to be processed, which is arranged in the gear between the horizontal plates, is subjected to a pressure of a gas film generated around the material to seal and bond the materials, or depending on the structure of a device for laminating.

The device according to the invention operates in a clean space free of dust, while the pipeline of dry cleaning air supplied is directly connected to the device.

[0006]

EXAMPLE An example of the present invention will be described in the manufacture of a liquid crystal display device on a glass substrate. As for the implementation, since this was sorted into two or more processing examples and a test was tried, each case will be described in detail below. In Example 1, two glass substrates (materials to be processed) forming the element are arranged between the upper and lower plates of the device of the present application, and the surface pressure of the air film is applied to both surfaces of the material to bond them simultaneously with instantaneous sealing. It is a basic configuration of a device for ending the operation. It will be described with reference to FIGS. 1 and 2. The side plates 11 'of the devices arranged facing each other are formed in a rectangular shape or a square shape. Both the pressure passage 4 4 compressed air bored inside the board, many of the passage 4 4 for ejecting the compressed air a b in opposed Giyatsupu outlet 3 3 3 ..
・ ・ Provided. Each of the outlets has an opening of the same diameter.
Each case of 4 to 0.6 m / mφ was taken. The side wall of the outlet was formed into a conical shape, and a plurality of nozzle blocks (not shown) were fixed in the hole (outlet 3 in FIG. 2). A gear (not shown) having a small circumference is formed between the block (not shown) and the opening hole. Therefore, the compressed air a b is the outlet 3 3 3 ...
-Then, it is ejected with a slight inclination and applies a pressure of an air film that spreads to the surface of the material to be processed (action described later). Since the hole diameters of the outlets are configured to be the same, the air pressure of the outlets 3 3 ... In the vicinity of the center of the gear surface of the horizontal plate 11 'and the outlets 33 3 near the left and right ends of the plate. .. It becomes necessary to balance the unevenness and decrease in the air pressure of .., and in the operation of the present invention, a rough flow occurs in the central portion of the horizontal plate 11 ',
The amount of jet air is adjusted so that the peripheral portion, that is, the left and right surfaces, has a dense flow (FIG. 2). Even if the outlet diameter of the central portion is made smaller than that of the peripheral portion instead of the configuration of FIG. 2, the decrease in the air pressure at the outlet can be covered. Supply circuit Ap-C of compressed air a b of the device 1 1 'is possible and quantitative adjustment of the predetermined cleaning value to be introduced shown in FIG.

The material L to be processed will be briefly described below.
The liquid crystal display element L that was bonded was a glass substrate L ₁
L ₂ . Spencer group M ₁ M ₁ · enclosed on the entire surface of the substrate
... Laminated sealing material 5 5 Temporary sealing material M ₂ M ₂
Others (X electrode, Y electrode (not shown), dielectric layer, etc.)
The condition is to finish more strictly. In particular, the Spencer M ₁ M ₁ ... Is generally a granular glass system having a diameter of 5 μm to 10 μm, but the deviation is ± 0.1 μm.
Must be ~ ± 0.5 μm.

The inventor heats the substrate L ₁ L ₂ of the liquid crystal element
When the adhesive is cured, the compressed air described above is applied to the horizontal plate 1 of the device.
Before leading to 1 ', heating was performed via a heat exchanger (attached to the Ap-C circuit of Fig. 5 described later) to enhance the sealing action of the sealing material 55. However, depending on the material to be processed, additional heating temperature may be added. The required spare heater board H ₂ H ₂ (FIG. 1) was placed horizontally across the device.

A gas film pressurizing device 11 'according to the present invention
The action of will be described. The horizontal plate 1 facing the top and bottom shown in FIG.
1'forms the above-mentioned device together with the gear member 22. The device was arranged in a clean room and the gap width was adjusted to the optimum interval for desired bonding. Gas pressure passage 4
4 passed through the compressed air a b outlet group 3 3 3 -
The air is injected in a large number of gradients from ... and the compressed air becomes a dense flow in the left and right peripheral parts of the gear cap surfaces of the upper and lower plates, that is, a large flow rate, and a small rough flow with a small flow rate near its center. Since it gushes out, the pressure distribution, which is less likely to occur in the periphery, can be corrected and the air pressure in the gear can be made uniform.

[0010] compressed air a b of the as described above is fed from the pneumatic circuit Ap-C of the normal means (Fig. 5). Since the present invention requires the clean and dry compressed air without dust to function in the apparatus, the description of the circuit Ap-C will be added. Compressed air is generated by the power source S in FIG. 5, and the discharged air is cooled by the cooler c, and once in the tank d, the accumulated pressure is approximately 4 to 10 kg · f / cm.
^It keeps ² and is stored. The discharged air is made into a dry air stream in which the oil content and atomized particles in the air are removed through an oil mist separator e and a micro mist separator h, and then the water content is removed by a dryer f. Fine particles in the air, such as dust and dust, are separated by the pre-filter g and the air filter i, and at the same time, a gas flow and a pressure of at least JIS level JIS4 are output. While the pressure reducing valve j constantly sends stable compressed air, the compressed air is heated in the necessary process through the heat exchanger H ₁ described above to raise the temperature to the temperature required for the individual work material. In this way, compressed air is supplied to the control valve V V
In order to obtain the gas film δ δ (FIG. 1) in the apparatus, the amount of air is appropriately limited to a proper amount a b .

[0011]

[Floating action of the liquid crystal display element L] The liquid crystal element L is arranged between the gears 2 2 of the gas film pressurizing device 1 1 ′ of the present invention, and excessive and sparse from the air flow outlet 3 3 3 ... Of the device. When the compressed air of (3) is jetted, a gas film δ δ having a required pressure is generated in the gear, so that the element L floats.

[0012]

[Laminating action of the element L] The glass substrate L ₁ L ₂ levitated in the gear 22 receives the air pressure of the film and at the same time obtains the adhesive action of the sealing material 55, so that the substrate L ₁ L ₂ is instantaneously It is pasted.

[0013]

[Measurement of the above action]

(1) Experiment of gas film internal pressure δ δ and gear adjustment range When the air flow in the device was set to a fixed value of 32 l / min, the gear was changed as shown in (1) in the table below. A homogeneous pressure of (2) was obtained. (2) The gas film thickness can be controlled in the range of 1 μm to 50 μm. (3) The sticking effect was measured by a tactile sensor. The tactile sensor (pressure component) that brings in the pressure applied between the glass substrates L _{1 and} L ₂ described above. Then, the electric resistance value at each intersection was taken into a connection computer, and the surface pressure distribution was observed from the screen (not shown). FIG. 3 schematically shows the positional relationship between the sensor sheet and the main parts of the device at the time of the above-mentioned measurement (the designated reference numerals are explained at the end).

[0014]

[Second Embodiment] The means of the present invention for pressure-bonding, which can be completed only once in the first embodiment, has a plurality of processes (connection of two or more actions of the device).
It goes without saying that the above can also be applied to.
The inventor conducted an experiment by arranging the devices in parallel so as to correspond to various aspects of the material to be processed and transferring the pressurization by the gas film in a connected manner (on a plurality of processings). The material was sequentially processed from the first processing to the final processing for composite processing.

[0015]

[Embodiment 3] Further, the following known means is used in the device 1 of the present invention.
When it is added to 1 ', the gear cap member 22 of the present invention which mechanically adjusts is unnecessary, and the gear cap size can be adjusted. In this alternative experiment, a distance sensor (not shown) was fixedly installed on the left and right ends of the gear surface of the horizontal plate 1 of the apparatus, and a servo motor and a hydraulic machine (not shown) mounted at the rear of the apparatus 1 ′ were operated to obtain the required gear length. Could be predicted.

It is obvious that the present invention can be applied to the case where the glass material described above is replaced with a plastics film. That is, two of the film substrates are temporarily fixed, placed in the gear of the apparatus, the membrane pressure is applied as described above, and the film is pulled out from the outlet.

The above-mentioned results of the implementation can be evaluated as follows.

FIG. 4A shows the measured values of the surface pressure distribution of the substrates L ₁ L ₂ after bonding, which are dimensioned. The distribution was about 600 to 800 g / cm ^{2 on} the entire surface of the substrate, and the compression force was almost uniform and the difference in surface pressure was as high as 1,000 g / cm ² or less.

[0018]

[Comparison with the pasting effect]

FIG. 4B is a surface pressure pattern obtained by actually measuring the current mechanical compression means. As apparent at first glance, on the surface, a special strong pressure part and a flat P with almost no pressure applied.
The part is clear. In particular, the pressure-applied portion has a maximum of 5,000 g / cm ² , and the P portion area ratio on the one hand is 30
%. The effect difference from the uniform pressurizing means according to the device configuration and operation of the present application becomes clear.

[0019]

As described above, according to the jetting of compressed air on the lateral plate surface and the intervening means of the film pressure according to the structure of the present invention, as described above.
Allowing the gas film pressure to come into contact with the surface of the work piece with high precision, in other words, it is very easy to carry out a homogeneous output as an average value of pressures at many points on the work piece surface. , Such a uniform pressure ratio is 1 in comparison with the conventional test.
It is equivalent to 00 times. Since the flow rate of the compressed air can be adjusted as a change in the surface pressure on the material, a high-quality quantitative production adapted to the material is ensured.

[Brief description of drawings]

FIG. 1 is an explanatory view of an apparatus according to the present invention

[Fig. 2] Arrangement diagram of compressed air outlets formed on the upper and lower horizontal boards of the device.

[Fig. 3] Diagram for measuring the pressure distribution acting on the surface of the work material

4A is a surface pressure distribution pattern diagram according to the present invention. FIG. 4B is a surface pressure distribution diagram of conventional means.

FIG. 5 is a pneumatic circuit diagram directly connected to the device of the present invention.

[Explanation of symbols]

1 1'Horizontal board that constitutes the device 2 2 Gear trap member of the device 3 3 3 Multiple outlets of compressed air 4 4 Compressed air passage δ δ Air flow film pressure in the gear a b Compressed air L ₁ L ₂ Workpiece inserted (Glass element) Sen. S Sensor sheet P Pressure gauge flow Flowmeter 6 Positioning bar

Claims (3)

[Claims] 1. A pressure passage for selectively guiding clean compressed air that has been dried or stored to a predetermined temperature to allow passage of the inside thereof, and a large number of branches branched from the passage to eject compressed air from the inside. A device in which a pair of horizontal boards formed by forming outlets are opposed to each other through a narrow gear cup, and the two boards are rectangular or square. Contact pressure bonding device. 2. A plurality of outlet surfaces of compressed air according to claim 1 form an intervening gap space, and the thickness dimension of the gear gap and the gas film pressure value of the air generated in the gear gap can be adjusted. The non-contact pressure bonding device according to claim 1. 3. A gas film pressurizing device comprising a pair of horizontal boards equipped with a compressed air pressure passage and a plurality of outlets through which the air is jetted, wherein the number of the multiple outlets drilled is the center of the horizontal board. 2. The non-contact pressure bonding device for a work material according to claim 1, wherein the parts are rough numbers and the peripheral parts of the board are densely arranged.