JPH06234197A - Noncontact pressure device for lamination or bonding of electronic circuit board - Google Patents
Noncontact pressure device for lamination or bonding of electronic circuit boardInfo
- Publication number
- JPH06234197A JPH06234197A JP5057655A JP5765593A JPH06234197A JP H06234197 A JPH06234197 A JP H06234197A JP 5057655 A JP5057655 A JP 5057655A JP 5765593 A JP5765593 A JP 5765593A JP H06234197 A JPH06234197 A JP H06234197A
- Authority
- JP
- Japan
- Prior art keywords
- air
- pressure
- compressed air
- pressure device
- outlets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
- B32B37/1009—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using vacuum and fluid pressure
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Fluid Mechanics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Liquid Crystal (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、エレクトロニクスに
おけるデイスプレイ表示の基板またはコンピユータの積
層プリント基板の如き2枚の割れやすいガラスまたはフ
イルム状もしくは樹脂素材の薄板材を瞬時的に貼り合わ
せまたは積層加工する専用の気流膜加圧装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention instantly attaches or laminates two fragile glass or film-like or resin-like thin plate materials such as a display display board in electronics or a laminated printed board of a computer. The present invention relates to an air flow membrane pressurizing device.
【0002】[0002]
【従来技術】本来、前述の如き被加工材を加工する場合
に例えば液晶デイスプレイ素子の基板貼り合わせにおい
て、2枚のガラス基板にシール剤を塗布して重ね、これ
をローラー間の転圧力により貼り合わす、またはプレス
機械の間に挟んで機械的圧力を加えて行うのが通常であ
つた。前述した従来手段が普遍化したに及んでいくつか
の解決すべき問題点が起きている、プレス機など機械
式加圧では被加工材の仕上精度上、限界があるうえ2
つの定盤面における平行線の確度や 定盤間で必須と
なる微細ギヤツプの厚さ調整の仕方も自ら制限をうけて
いることである。従来の加工手段は他面において被加工
材の振動およびシヨツクを回避せねばならないので徐々
に双方加圧面へ印圧してゆく、かような制御上の余分な
ノウハウをも必要とするのである。多数のプリント基板
を貼合加工しなくてはならないコンピユータの積層基板
工程においても同様の問題点を抱えている。とりわけ従
来の平行ないし平面仕上げのレベルは仕上度3μmライ
ンを満たすものの、それをしのぐ高精度ないし高品位の
加工を従来装置の作用により求めるとすれば甚だしく高
コストとなり市場競争力を失う。2. Description of the Related Art Originally, when processing a workpiece as described above, for example, when laminating a liquid crystal display element on a substrate, two glass substrates are coated with a sealant and superposed on each other, and the two are laminated by a rolling force between rollers. It was customary to apply mechanical pressure by mating or sandwiching between press machines. There are some problems to be solved due to the universalization of the above-mentioned conventional means. Mechanical pressurization such as a press machine has a limit in finishing accuracy of a work material, and 2
The accuracy of the parallel lines on the two surface plates and the method of adjusting the thickness of the minute gears, which is essential between the surface plates, are also restricted by themselves. Since the conventional processing means has to avoid vibration and shock of the work material on the other side, the pressure is gradually applied to both pressurizing surfaces, which requires extra control know-how. The same problem is also encountered in the laminated board process of the computer, which requires the bonding process of many printed boards. In particular, although the conventional level of parallel or plane finishing satisfies the finish line of 3 μm, if high precision or high quality machining that surpasses it is required by the action of the conventional device, it will be extremely expensive and lose the market competitiveness.
【0003】[0003]
【発明が解決しようとする課題】本願発明は、従来の技
術水準では多くの困難を伴つた電子素子の基板貼り合わ
せや積層加工において、被加工材に気体膜の圧力を調整
可能に介入させる進歩の専用装置を提供することによ
り、高精度かつ高品位仕上げの材を実施容易に入手する
を目的としている。DISCLOSURE OF THE INVENTION The present invention is an advancement in which the pressure of a gas film can be adjustedly intervened in a work material in substrate bonding or lamination processing of electronic elements, which has many difficulties in the conventional state of the art. The purpose of this is to provide a high-precision and high-quality finishing material easily by implementing the dedicated device of.
【0004】[0004]
【問題を解決するための手段】供給される適質清浄の圧
縮エアーを吸い込んで噴出する多数の小円錐状開口をも
つ一対の横盤をクリーンのエアゾーンにおいて調整自由
なギヤップを保持せしめ対峙させて成る装置であつて、
横盤間のギヤツプに配置した上述の被加工材の、その周
囲に起きる気体膜の圧力をして材をシーリングし貼り合
わせ、ないし積層作用する装置の構成に依らしめる。[Means for Solving the Problem] A pair of horizontal plates having a large number of small conical openings for sucking and ejecting the compressed air of a proper quality to be supplied are opposed to each other while holding a freely adjustable gearup in a clean air zone. A device consisting of
The material to be processed, which is arranged in the gear between the horizontal plates, is subjected to a pressure of a gas film generated around the material to seal and bond the materials, or depending on the structure of a device for laminating.
【0005】本願発明に係る前記装置は塵芥皆無のクリ
ーン空間下で稼働するのであり、一方、供給する乾燥し
た清浄化エアーのパイプラインは装置に直結される。The device according to the invention operates in a clean space free of dust, while the pipeline of dry cleaning air supplied is directly connected to the device.
【0006】[0006]
【実施例】本発明の実施例をガラス基板の液晶デイスプ
レイ素子の製造において述べる。実施は、これを2以上
の加工例に仕分けしてテストを試みたので以下に各場合
を詳述する。実施例1は前記素子を形成する2枚のガラ
ス基板(被加工材)を本願装置の上下盤のあいだに配置
して該材の両面に空気膜の面圧を加え瞬時的シーリング
と同時に貼り合わせ作用を終了させる装置の基本的構成
である。図1および図2に従い述べる。対向して配設し
た装置の横盤1 1′を長方もしくは正方形に構成し
た。いずれも盤面の内部で穿設した圧縮エアーの圧力通
路4 4と、該通路4 4から対向ギヤツプ内に圧縮エ
アーa bを噴出するための多数の出口3 3 3・・
・・を設けた。前記出口の各々を同一径の開口とし0.
4ないし0.6m/mφの各場合を採つた。出口の側壁
を円錐状に構成しその穴中に複数の非図示のノズルブロ
ツクを固設した(図2の出口3)。非図示のブロツクと
開口穴間には僅少周のギヤツプ(非図示)が形成され
る。それ故、圧縮エアーa bは出口3 3 3・・・
・から、やや傾斜して噴出しており被加工材の面に対し
広がる空気膜の圧力を与える(後記する作用)。前記出
口の穴径を同一寸法に構成したので、横盤1 1′のギ
ヤツプ面中央付近での前記出口3 3 3・・・・のエ
アー圧力と、盤の左右端付近の出口33 3・・・・の
エアー圧力のむらや低下をバランスさせる必要が生じ本
発明の作用では横盤1 1′の中央部において粗流に、
その周辺部すなわち左右面は密流となるよう噴出エアー
量が調節される(図2)。図2の構成に代えて中央部の
出口径を周辺部のそれよりも小に構成しても出口のエア
ー圧力低下はカバーできる。装置1 1′が導入する所
定清浄値のかつ量的調整可能の圧縮エアーa bの供給
回路Ap−Cは図5で示した。EXAMPLE An example of the present invention will be described in the manufacture of a liquid crystal display device on a glass substrate. As for the implementation, since this was sorted into two or more processing examples and a test was tried, each case will be described in detail below. In Example 1, two glass substrates (materials to be processed) forming the element are arranged between the upper and lower plates of the device of the present application, and the surface pressure of the air film is applied to both surfaces of the material to bond them simultaneously with instantaneous sealing. It is a basic configuration of a device for ending the operation. It will be described with reference to FIGS. 1 and 2. The side plates 11 'of the devices arranged facing each other are formed in a rectangular shape or a square shape. Both the pressure passage 4 4 compressed air bored inside the board, many of the passage 4 4 for ejecting the compressed air a b in opposed Giyatsupu outlet 3 3 3 ..
・ ・ Provided. Each of the outlets has an opening of the same diameter.
Each case of 4 to 0.6 m / mφ was taken. The side wall of the outlet was formed into a conical shape, and a plurality of nozzle blocks (not shown) were fixed in the hole (outlet 3 in FIG. 2). A gear (not shown) having a small circumference is formed between the block (not shown) and the opening hole. Therefore, the compressed air a b is the outlet 3 3 3 ...
-Then, it is ejected with a slight inclination and applies a pressure of an air film that spreads to the surface of the material to be processed (action described later). Since the hole diameters of the outlets are configured to be the same, the air pressure of the outlets 3 3 ... In the vicinity of the center of the gear surface of the horizontal plate 11 'and the outlets 33 3 near the left and right ends of the plate. .. It becomes necessary to balance the unevenness and decrease in the air pressure of .., and in the operation of the present invention, a rough flow occurs in the central portion of the horizontal plate 11 ',
The amount of jet air is adjusted so that the peripheral portion, that is, the left and right surfaces, has a dense flow (FIG. 2). Even if the outlet diameter of the central portion is made smaller than that of the peripheral portion instead of the configuration of FIG. 2, the decrease in the air pressure at the outlet can be covered. Supply circuit Ap-C of compressed air a b of the device 1 1 'is possible and quantitative adjustment of the predetermined cleaning value to be introduced shown in FIG.
【0007】ここで被加工材Lに関し簡単に述べると、
貼合実施した液晶デイスプレイ素子Lはガラス基板L1
L2。基板の全面に封入されるスペンサー群M1M1・
・・・。貼り合わせシール材5 5 仮封止材M2M2
その他(非図示のX電極、Y電極。誘電体の層など)
により厳密に仕上げることが条件である。とくにスペン
サーM1M1・・・・は5μmないし10μmの径の粒
状のガラス系が一般的でありしかし偏差は±0.1μm
〜±0.5μmでなければならない。The material L to be processed will be briefly described below.
The liquid crystal display element L that was bonded was a glass substrate L 1
L 2 . Spencer group M 1 M 1 · enclosed on the entire surface of the substrate
... Laminated sealing material 5 5 Temporary sealing material M 2 M 2
Others (X electrode, Y electrode (not shown), dielectric layer, etc.)
The condition is to finish more strictly. In particular, the Spencer M 1 M 1 ... Is generally a granular glass system having a diameter of 5 μm to 10 μm, but the deviation is ± 0.1 μm.
Must be ~ ± 0.5 μm.
【0008】発明者は液晶素子の基盤L1L2を加熱・
接着硬化するに際し前述の圧縮エアーを装置の横盤1
1′に導く前に熱交換器(後記する図5のAp−C回路
に取付)を介し加温してシール材5 5のシーリング作
用を高めたが被加工の材質如何により加温度の追加に必
要となる予備のヒーター盤H2H2(図1)を装置と一
体的に横架した。The inventor heats the substrate L 1 L 2 of the liquid crystal element
When the adhesive is cured, the compressed air described above is applied to the horizontal plate 1 of the device.
Before leading to 1 ', heating was performed via a heat exchanger (attached to the Ap-C circuit of Fig. 5 described later) to enhance the sealing action of the sealing material 55. However, depending on the material to be processed, additional heating temperature may be added. The required spare heater board H 2 H 2 (FIG. 1) was placed horizontally across the device.
【0009】茲で本発明に係る気体膜加圧装置1 1′
の作用を述べる。図1で示した上下に対向の横盤1
1′はギヤツプ部材2 2と共に上述装置を形成してい
る。装置をクリーンルーム内で配設しギヤツプ幅を所望
の貼り合わせに最適当の間隔に調節した。気体圧通路4
4を通過した圧縮エアーa bは出口群3 3 3・
・・・から多数に傾斜して噴射されておりかつ、圧縮エ
アーは上下盤のギヤツプ面の左右周辺部分で密流とな
り、すなわち大なる流量であり、その中央付近では小流
量の荒い粗流となつて噴出しているので周辺で生じ勝ち
の弱い加圧分布を補正できギヤツプ内の気圧を均一化で
きる。A gas film pressurizing device 11 'according to the present invention
The action of will be described. The horizontal plate 1 facing the top and bottom shown in FIG.
1'forms the above-mentioned device together with the gear member 22. The device was arranged in a clean room and the gap width was adjusted to the optimum interval for desired bonding. Gas pressure passage 4
4 passed through the compressed air a b outlet group 3 3 3 -
The air is injected in a large number of gradients from ... and the compressed air becomes a dense flow in the left and right peripheral parts of the gear cap surfaces of the upper and lower plates, that is, a large flow rate, and a small rough flow with a small flow rate near its center. Since it gushes out, the pressure distribution, which is less likely to occur in the periphery, can be corrected and the air pressure in the gear can be made uniform.
【0010】既述の如く前記の圧縮エアーa bは通常
手段の空気圧回路Ap−C(図5)から送入されてい
る。本発明は塵芥皆無の清浄かつ乾燥された圧縮エアー
の装置内作用を不可欠とするので回路Ap−Cについて
説明を付加することとした。図5の動力源Sにより圧縮
エアーを起こしその吐出エアーをクーラcで冷却し、一
旦タンクdにおいて、溜圧ほぼ4〜10kg・f/cm
2を保つて貯溜されている。その吐出エアーをオイルミ
ストのセパレータeとマイクロミストのセパレータhを
介して該エアー内のオイル分、霧状粒分を除去したのち
ドライヤーfにより含有水分を除いた乾燥気流としてい
る。プレフイルタgとエアーフイルタiにより微細のエ
アー中固形物たるチリ、ほこり類を分離したうえ少なく
とも清浄度JIS4以上の気体流と圧力を出力してい
る。 減圧弁jによって常に安定的圧縮エアーを送る一
方、必要工程において上述した熱交換器H1を介しこの
圧縮エアーを加温し被加工材の個有に要求さる温度まで
高めている。かくの如くして圧縮エアーを制御弁V V
で装置内の気体膜δ δ(図1)を得るに適切のエアー
量a bに量的限流して供給している。[0010] compressed air a b of the as described above is fed from the pneumatic circuit Ap-C of the normal means (Fig. 5). Since the present invention requires the clean and dry compressed air without dust to function in the apparatus, the description of the circuit Ap-C will be added. Compressed air is generated by the power source S in FIG. 5, and the discharged air is cooled by the cooler c, and once in the tank d, the accumulated pressure is approximately 4 to 10 kg · f / cm.
It keeps 2 and is stored. The discharged air is made into a dry air stream in which the oil content and atomized particles in the air are removed through an oil mist separator e and a micro mist separator h, and then the water content is removed by a dryer f. Fine particles in the air, such as dust and dust, are separated by the pre-filter g and the air filter i, and at the same time, a gas flow and a pressure of at least JIS level JIS4 are output. While the pressure reducing valve j constantly sends stable compressed air, the compressed air is heated in the necessary process through the heat exchanger H 1 described above to raise the temperature to the temperature required for the individual work material. In this way, compressed air is supplied to the control valve V V
In order to obtain the gas film δ δ (FIG. 1) in the apparatus, the amount of air is appropriately limited to a proper amount a b .
【0011】[0011]
【液晶デイスプレイ素子Lの浮上作用】本発明の気体膜
加圧装置1 1′のギヤツプ2 2間で液晶素子Lを配
置し、装置のエアー流噴出口3 3 3・・・・から過
および疎の圧縮エアーを噴出さすと、ギヤツプ内で所要
圧力を有する気体膜δ δが生ずるので前記素子Lは浮
上する。[Floating action of the liquid crystal display element L] The liquid crystal element L is arranged between the gears 2 2 of the gas film pressurizing device 1 1 ′ of the present invention, and excessive and sparse from the air flow outlet 3 3 3 ... Of the device. When the compressed air of (3) is jetted, a gas film δ δ having a required pressure is generated in the gear, so that the element L floats.
【0012】[0012]
【前記素子Lの貼合作用】ギヤツプ2 2内で浮上した
ガラス基板L1L2は膜の気圧力を受けると同時にシー
ル材5 5の接着作用を得るので基板L1L2は瞬時的
に貼合される。[Laminating action of the element L] The glass substrate L 1 L 2 levitated in the gear 22 receives the air pressure of the film and at the same time obtains the adhesive action of the sealing material 55, so that the substrate L 1 L 2 is instantaneously It is pasted.
【0013】[0013]
(1)気体膜のギヤツプ内圧力δ δと、ギヤツプ調整
幅の実験 装置内のエアー流量を固定値32l/分とした場合のギ
ヤツプを次表内の(1)の如くに変化させたところ夫々
の均質圧力(2)を得た。 (2)気体膜厚さは1μmから50μm範囲について制
御が可能となる。 (3)貼合効果の測定は触覚センサに依り求めた。 上述のガラス基板L1L2間への加圧力を、持込んだ触
覚センサ(圧力分 て各々交点の電気抵抗値を、接続コンピユータに取りこ
み、その画面から面圧力分布の出来ばえを見た(非図
示)。図3は前記測定時のセンサ・シートと装置要部の
位置関係を簡明に示している(指示した符号は末尾で説
明した)。(1) Experiment of gas film internal pressure δ δ and gear adjustment range When the air flow in the device was set to a fixed value of 32 l / min, the gear was changed as shown in (1) in the table below. A homogeneous pressure of (2) was obtained. (2) The gas film thickness can be controlled in the range of 1 μm to 50 μm. (3) The sticking effect was measured by a tactile sensor. The tactile sensor (pressure component) that brings in the pressure applied between the glass substrates L 1 and L 2 described above. Then, the electric resistance value at each intersection was taken into a connection computer, and the surface pressure distribution was observed from the screen (not shown). FIG. 3 schematically shows the positional relationship between the sensor sheet and the main parts of the device at the time of the above-mentioned measurement (the designated reference numerals are explained at the end).
【0014】[0014]
【実施例2】実施1の一回限度で終了できる加圧貼合の
本願手段は、複数の加工(装置の2回以上作用の連結)
においても当然に適用できることは述べるまでもない。
発明者は色んな被加工材の態様に応ずるべく装置を並列
し気体膜での加圧を接続的に、(複数加工上を)移行さ
せて実験した。材は最初加工から終了加工までを順次に
移送して複合加工させた。[Second Embodiment] The means of the present invention for pressure-bonding, which can be completed only once in the first embodiment, has a plurality of processes (connection of two or more actions of the device).
It goes without saying that the above can also be applied to.
The inventor conducted an experiment by arranging the devices in parallel so as to correspond to various aspects of the material to be processed and transferring the pressurization by the gas film in a connected manner (on a plurality of processings). The material was sequentially processed from the first processing to the final processing for composite processing.
【0015】[0015]
【実施例3】また以下の公知手段を本願発明の装置1
1′に付加した場合には機械的にアジヤストする本願の
ギヤツプ部材2 2を不必要としてギヤツプ寸法を調節
できる。この代替実験では装置の横盤1のギヤツプ面の
左右端部に距離センサ(非図示)を固設し装置1′後方
で取付けた非図示のサーボモーターと油圧マシンを作動
させたところ所要ギヤツプ長を予測できた。[Embodiment 3] Further, the following known means is used in the device 1 of the present invention.
When it is added to 1 ', the gear cap member 22 of the present invention which mechanically adjusts is unnecessary, and the gear cap size can be adjusted. In this alternative experiment, a distance sensor (not shown) was fixedly installed on the left and right ends of the gear surface of the horizontal plate 1 of the apparatus, and a servo motor and a hydraulic machine (not shown) mounted at the rear of the apparatus 1 ′ were operated to obtain the required gear length. Could be predicted.
【0016】さて上述実施したガラス材をプラスチツク
ス・フイルムに代えた場合も本発明を適用しうることは
明かである。すなわちフイルム基板の2つを仮止めして
装置のギヤツプ内に配置し上述同様に膜加圧し、他方出
口からフイルムを引出すのである。It is obvious that the present invention can be applied to the case where the glass material described above is replaced with a plastics film. That is, two of the film substrates are temporarily fixed, placed in the gear of the apparatus, the membrane pressure is applied as described above, and the film is pulled out from the outlet.
【0017】さて上述した実施結果を以下の如くに評価
しうる。The above-mentioned results of the implementation can be evaluated as follows.
【図4】Aは貼り合わせ後における前記基板L1L2の
面圧力分布の実測値をデイメンシヨン化して示してい
る。基盤の全面でほぼ600〜800g/cm2の分
布、ほぼ均一の圧縮力であつて面圧力の差の、もつとも
高い部分でも1,000g以下/cm2となつた。FIG. 4A shows the measured values of the surface pressure distribution of the substrates L 1 L 2 after bonding, which are dimensioned. The distribution was about 600 to 800 g / cm 2 on the entire surface of the substrate, and the compression force was almost uniform and the difference in surface pressure was as high as 1,000 g / cm 2 or less.
【0018】[0018]
【図4】Bの面圧パターンは現状の機械的圧縮手段を実
測したものである。一見して明かなとおり面上、特別の
強い加圧部分と、圧力が殆んど加わつていない平坦のP
部分が鮮明である。特に圧力の加わつた部分では最大
5,000g/cm2となり一方のP部分面積率は30
%にも及ぶ。本願の装置構成および作用に係る均等加圧
手段との効果差が明かとなる。FIG. 4B is a surface pressure pattern obtained by actually measuring the current mechanical compression means. As apparent at first glance, on the surface, a special strong pressure part and a flat P with almost no pressure applied.
The part is clear. In particular, the pressure-applied portion has a maximum of 5,000 g / cm 2 , and the P portion area ratio on the one hand is 30
%. The effect difference from the uniform pressurizing means according to the device configuration and operation of the present application becomes clear.
【0019】[0019]
【発明の効果】すでに開示した如く本願構成に係る圧縮
エアーの横盤面噴出と、その膜圧の介在手段によれば
気体膜圧力が被加工材の面に高精度に接触するを許容
し換言すれば少くとも被加工材面の多数点における圧力
の平均値として均質の出力をきわめて実施容易に発揮し
ているのであり、かような均圧率はテスト上、従来比1
00倍に相当している。圧縮エアーの流量調整を前記
材への面圧変化として作用させうるので材に適応した高
品位の量的生産を確保している。As described above, according to the jetting of compressed air on the lateral plate surface and the intervening means of the film pressure according to the structure of the present invention, as described above.
Allowing the gas film pressure to come into contact with the surface of the work piece with high precision, in other words, it is very easy to carry out a homogeneous output as an average value of pressures at many points on the work piece surface. , Such a uniform pressure ratio is 1 in comparison with the conventional test.
It is equivalent to 00 times. Since the flow rate of the compressed air can be adjusted as a change in the surface pressure on the material, a high-quality quantitative production adapted to the material is ensured.
【図1】 本発明に係る装置説明図FIG. 1 is an explanatory view of an apparatus according to the present invention
【図2】 装置の上下横架盤に多数穿設した圧縮エアー
の出口配列図[Fig. 2] Arrangement diagram of compressed air outlets formed on the upper and lower horizontal boards of the device.
【図3】 被加工材の面に作用する圧力分布の測定要領
図[Fig. 3] Diagram for measuring the pressure distribution acting on the surface of the work material
【図4】 A 本発明による面圧分布パターン図 B 従来手段の面圧分布図4A is a surface pressure distribution pattern diagram according to the present invention. FIG. 4B is a surface pressure distribution diagram of conventional means.
【図5】 本発明装置に直結される空気圧回路図FIG. 5 is a pneumatic circuit diagram directly connected to the device of the present invention.
1 1′ 装置を構成する横架盤 2 2 装置のギヤツプ部材 3 3 3 圧縮エアーの多数出口 4 4 圧縮エアー通路 δ δ ギヤツプ内の気流膜圧力 a b 圧縮エアー L1L2 挿入した被加工材(ガラス素子) Sen.S センサ・シート P 圧力計 flow 流量計 6 位置決めバー1 1'Horizontal board that constitutes the device 2 2 Gear trap member of the device 3 3 3 Multiple outlets of compressed air 4 4 Compressed air passage δ δ Air flow film pressure in the gear a b Compressed air L 1 L 2 Workpiece inserted (Glass element) Sen. S Sensor sheet P Pressure gauge flow Flowmeter 6 Positioning bar
Claims (3)
ーを選択的に誘導して、その内部の通過を許容する気圧
通路と、 該通路から分岐して圧縮エアーをその内部から噴出させ
る多数出口を穿設して成る一対の横架盤を、ある狭小ギ
ヤツプを介して上下間で対峙させた装置であつて前記双
方の盤を長方形または正方状に構成した基盤等、被加工
材の非接触加圧貼合装置。1. A pressure passage for selectively guiding clean compressed air that has been dried or stored to a predetermined temperature to allow passage of the inside thereof, and a large number of branches branched from the passage to eject compressed air from the inside. A device in which a pair of horizontal boards formed by forming outlets are opposed to each other through a narrow gear cup, and the two boards are rectangular or square. Contact pressure bonding device.
が介在ギヤツプ空間を形成しており、前述ギヤツプの厚
さ寸法およびギヤツプ内で生ずる前述エアーの気体膜圧
力値を調整可能に構成したことを特徴とする請求項1記
載の非接触加圧貼合装置。2. A plurality of outlet surfaces of compressed air according to claim 1 form an intervening gap space, and the thickness dimension of the gear gap and the gas film pressure value of the air generated in the gear gap can be adjusted. The non-contact pressure bonding device according to claim 1.
る多数出口を具備する一対横架盤から成る気体膜加圧装
置であつて、 前記、多数出口の穿設数を横架盤の中央部において粗数
とし、盤の周辺部において密に配列したことを特徴とす
る請求項1記載の被加工材の非接触加圧貼合装置。3. A gas film pressurizing device comprising a pair of horizontal boards equipped with a compressed air pressure passage and a plurality of outlets through which the air is jetted, wherein the number of the multiple outlets drilled is the center of the horizontal board. 2. The non-contact pressure bonding device for a work material according to claim 1, wherein the parts are rough numbers and the peripheral parts of the board are densely arranged.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5057655A JPH0813537B2 (en) | 1993-02-08 | 1993-02-08 | Floating / laminating device for liquid crystal substrate layer formed by generating air film |
KR1019940002641A KR0143348B1 (en) | 1993-02-08 | 1994-02-08 | Non-contact pressure device for lamination or bonding of electronic circuit board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5057655A JPH0813537B2 (en) | 1993-02-08 | 1993-02-08 | Floating / laminating device for liquid crystal substrate layer formed by generating air film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06234197A true JPH06234197A (en) | 1994-08-23 |
JPH0813537B2 JPH0813537B2 (en) | 1996-02-14 |
Family
ID=13061924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5057655A Expired - Lifetime JPH0813537B2 (en) | 1993-02-08 | 1993-02-08 | Floating / laminating device for liquid crystal substrate layer formed by generating air film |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH0813537B2 (en) |
KR (1) | KR0143348B1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1146158A1 (en) * | 2000-04-13 | 2001-10-17 | Inoac Corporation | Fibrous aggregate forming method, fibrous aggregate formed by said method, and fibrous aggregate forming apparatus |
US6652949B2 (en) | 1999-04-15 | 2003-11-25 | Canon Kabushiki Kaisha | Method for producing fiber laminate, fiber laminate produced by the method, liquid reservoir containing the fiber laminate, and liquid-jet head cartridge having the reservoir |
JP2012130964A (en) * | 2010-12-22 | 2012-07-12 | Apro System Co Ltd | Device and method for pressurization for removal of air bubble |
CN112158385A (en) * | 2020-11-16 | 2021-01-01 | 上海稳奇电脑有限公司 | Large-scale display blocking pad pasting device |
CN114104735A (en) * | 2016-09-13 | 2022-03-01 | 康宁股份有限公司 | Apparatus and method for treating glass substrates |
CN114274652A (en) * | 2021-12-29 | 2022-04-05 | 深圳市深科达智能装备股份有限公司 | Attaching device and attaching system |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103625087B (en) * | 2013-12-19 | 2015-12-02 | 上海日进机床有限公司 | The superimposed tool of glass cover-plate lamination and folding method thereof in display device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850597A (en) * | 1981-09-21 | 1983-03-25 | 日本電気株式会社 | Voice storage system |
JPS58187311A (en) * | 1982-04-27 | 1983-11-01 | Taisei Kikai:Kk | Heat sealer |
JPS5964354A (en) * | 1982-07-19 | 1984-04-12 | サン−ゴバン・ビトラ−ジユ | Method and device for coating glass material with plastic protective film |
-
1993
- 1993-02-08 JP JP5057655A patent/JPH0813537B2/en not_active Expired - Lifetime
-
1994
- 1994-02-08 KR KR1019940002641A patent/KR0143348B1/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850597A (en) * | 1981-09-21 | 1983-03-25 | 日本電気株式会社 | Voice storage system |
JPS58187311A (en) * | 1982-04-27 | 1983-11-01 | Taisei Kikai:Kk | Heat sealer |
JPS5964354A (en) * | 1982-07-19 | 1984-04-12 | サン−ゴバン・ビトラ−ジユ | Method and device for coating glass material with plastic protective film |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6652949B2 (en) | 1999-04-15 | 2003-11-25 | Canon Kabushiki Kaisha | Method for producing fiber laminate, fiber laminate produced by the method, liquid reservoir containing the fiber laminate, and liquid-jet head cartridge having the reservoir |
EP1146158A1 (en) * | 2000-04-13 | 2001-10-17 | Inoac Corporation | Fibrous aggregate forming method, fibrous aggregate formed by said method, and fibrous aggregate forming apparatus |
US6641763B2 (en) | 2000-04-13 | 2003-11-04 | Inoac Corporation | Fibrous aggregate forming method |
JP2012130964A (en) * | 2010-12-22 | 2012-07-12 | Apro System Co Ltd | Device and method for pressurization for removal of air bubble |
CN114104735A (en) * | 2016-09-13 | 2022-03-01 | 康宁股份有限公司 | Apparatus and method for treating glass substrates |
CN112158385A (en) * | 2020-11-16 | 2021-01-01 | 上海稳奇电脑有限公司 | Large-scale display blocking pad pasting device |
CN114274652A (en) * | 2021-12-29 | 2022-04-05 | 深圳市深科达智能装备股份有限公司 | Attaching device and attaching system |
Also Published As
Publication number | Publication date |
---|---|
KR940020143A (en) | 1994-09-15 |
KR0143348B1 (en) | 1998-07-15 |
JPH0813537B2 (en) | 1996-02-14 |
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