CN203344495U

CN203344495U - Multi-array integrated droplet deposition apparatus

Info

Publication number: CN203344495U
Application number: CN2013204374118U
Authority: CN
Inventors: 不公告发明人
Original assignee: 郑贺
Current assignee: Beijing run LIAN Microelectronics Technology Development Co., Ltd.
Priority date: 2013-07-22
Filing date: 2013-07-22
Publication date: 2013-12-18
Anticipated expiration: 2023-07-22

Abstract

The utility model discloses a multi-array integrated droplet deposition apparatus, comprising a nozzle, an elastic wall, a PZT driver and a nozzle plate. The nozzle is provided with an ink groove and a plurality of diversion channels, the right side of the nozzle is provided with an ink filling mouth of the ink groove, and each diversion channel has two ports, wherein one port is communicated with the ink groove and performs as an ink inlet, and the other port is communicated with the bottom of the nozzle and performs as an ink outlet; the nozzle plate is connected with the bottom of the nozzle, and the ink outlets at the bottom of the nozzle is corresponding to the injection holes of the nozzle; and the back side of the elastic wall is provided with a plurality of metal strips, the PZT driver has a plurality of driving units, the front side of the elastic wall performs as the bottom of the ink groove and is sealingly connected with the back side of the nozzle, and the metal strips of the elastic wall are corresponding to the ink groove, the back side of the elastic wall is connected with the bottom surface of the PZT driver, and the metal strips of the elastic wall are corresponding to the driving units of the PZT driver. The provided ink chamber structure is simple, and ink chamber sealing and deformation transmission problems are solved.

Description

The integrated droplet deposition apparatus of a kind of many arrays

Technical field

The utility model relates to the integrated droplet deposition apparatus of a kind of many arrays, is particularly useful for the ink discharge device of ink-jet printer.

Background technology

In these years, computer is come into people's work and is lived and gradually come into fashion.Along with answering land used to deepen continuously, everybody no longer be satisfied with can only be on screen the mode of display document and picture, and more wish to see the effect be printed on paper, so printer starts fast sale on market, get up.Printer in the market is mainly piezoelectric inkjet printer.

Piezo inkjet technology is that many little piezoelectric ceramics are placed near the print-head nozzle of ink-jet printer, utilizes its under the voltage effect, the principle of deformation can occur, in time voltage be added to it above.Piezoelectric ceramics produces the flexible prepared Chinese ink ejection made in nozzle thereupon, on the output medium surface, forms pattern.The ink jet-print head cost compare of making by piezo inkjet technology is high, so, in order to reduce user's use cost, generally all printing head and print cartridge are made to the structure of separating, while changing ink, needn't change printhead.Because size and occupation mode that the structure of printhead more rationally can effectively be regulated ink droplet by controlling voltage, thereby obtain higher printing precision and printing effect.It is strong to the control ability of ink droplet, easily realizes high-precision printing.

Present most of shower nozzle is the D31 of the piezoelectric ceramics that utilizes, D33 characteristic, but the inefficient problem during ubiquity inkjet printing.

The utility model content

For the technical problem existed in prior art, the purpose of this utility model is to provide a kind of silica-based integrated droplet deposition apparatus of many arrays.The utility model is to utilize electrode piezoelectric ceramics in multilayer as driver, to take silicon as substrate, by chemical etching, forms semi-enclosed black chamber, and the elastic wall formed with PPS film and stainless steel foil seals the black chamber of complete.Utilize the deformation of the D32 direction of PZT, the ink in black chamber is extruded in elastic wall generation deformation.

The fundamental diagram of this device as shown in Figure 1, operation principle is: use the interior electrode piezoelectric ceramics PZT of multilayer as driver, when we apply a high voltage to PZT, PZT will bend on (single armed beam) take length direction on axial direction, produces deformation.We are placed on the top of a silicon through semi-enclosed groove of lithography formation to PZT, and whole groove seals with elastic wall.Fill with ink in groove, the deformation of PZT will make to be squeezed in silica-based groove, then ink is extruded by the opening in bottom (spray orifice), forms ink dot, thereby completes ink jet process.Ink is an ejection little from pressure, so ink inlet opening has the connected pressure ratio spray orifice of ink feed tank large.

The technical solution of the utility model is:

The integrated droplet deposition apparatus of a kind of many arrays is characterized in that comprising: nozzle, elastic wall, PZT driver, nozzle plate; Wherein, have an ink container and many guiding gutters on nozzle, the nozzle front is provided with the ink filling port of ink container, and each guiding gutter has two-port, and a port and this ink container conducting are as the entrance of ink, and the other end and nozzle bottom conducting are as the outlet of ink; Described nozzle plate is connected with nozzle bottom, and the ink outlet of nozzle bottom is corresponding with the spray orifice of nozzle plate; The back side of described elastic wall has many strip metals bar, described PZT driver has a plurality of driver elements, the front of described elastic wall is corresponding with ink container with the bonding jumper of the connection of nozzle sealing backside and elastic wall as the end of ink container, and the back side of described elastic wall is corresponding with the driver element of PZT with the bonding jumper of the connection of PZT driver bottom surface and elastic wall.

Further, also comprise an ink gun cover plate be connected with the back side of described elastic wall; Described ink gun cover plate is provided with the saturating cutting a of fixing described PZT driver one mobile terminal and is communicated with the saturating cutting b moved for holding another mobile terminal of described PZT with this groove a, and groove a and groove b form a convex slot.

Further, described ink container is rectangular channel; Described PZT driver is parallel with the length direction of ink container.

Further, described PZT driver is electrode PZT driver in multilayer, and the driver element of described PZT driver becomes comb shape to arrange along PZT driver width.

Further, described elastic wall is the composite bed that comprises a metal level and a macromolecule membrane.

Further, the outer surface of described nozzle plate applies one deck and is no more than the non-wetting coating of 1 micron.

Further, the spray orifice of described nozzle plate is pyramidal structure.

Further, described nozzle is silica-based nozzle.

Further, between many described guiding gutters, be arranged in parallel and perpendicular to the side of described ink container.

Compared with prior art, effect of the present utility model is:

Utilize the deformation of the D32 direction of PZT pottery, be different from other D31, the deformation of D33.The China ink cavity configuration is simple, utilizes mature technology to reduce cost.The utilization of elastic wall has solved the sealing in black chamber and the problem that deformation is transmitted.

The accompanying drawing explanation

The structure principle chart that Fig. 1 is this device;

Fig. 2 is the elastic wall sectional view;

Fig. 3 is the elastic wall that is prepared with the island bar;

Fig. 4 is the utility model device explosion figure;

Fig. 5 is the constitutional diagram after this device assembling;

Wherein: 1--nozzle plate, the silica-based nozzle of 2---, 3--cover plate, 4--soft board and piezoelectric ceramic actuator, 5--stainless steel substrates, 6--film.

The specific embodiment

A kind of silica-based industrial nozzle consists of the following components

1, the formation of silica-based ink container.

The silicon chip that will be not 500 microns through polishing thickness, be commonly called as " workprint ", by precision gas cutting machine cut growth square silicon wafer, and 3 microns of machining accuracy tolerances.First by wet method or dry etching (Britain STS etching machine), on an end of this silicon chip, process rectangular ink filling port.Form 180 become 90 degree with the ink filling port length direction and equally distributed square grooves that are arranged in parallel (being guiding gutter) by scribing machine or lithography again, square groove is two end openings, an opening is positioned at an end of silicon chip, outlet as ink, another opening UNICOM ink filling port, as the entrance of ink.

2, elastic wall

Macromolecular material (as: PPS the metal forming of 40 micron thickness (as: stainless steel foil SU304) with 6 micron thickness, PEEK, PI etc.) form composite by the heating pressing mode, as shown in Figure 2, process by metal etch, forming a surrounding is metal edge frame, it is 50 microns that there are 180 width centre, and 3 millimeters of length do not have to connect with surrounding and parallel bonding jumper, as shown in Figure 3, the Film laminated by macromolecular material together.Elastic wall plays the effect of the black chamber of sealing and vibrating diaphragm, and the stainless steel on elastic wall " island bar " is to produce flow-disturbing while preventing liquid droplets.

3, the cover plate of ink gun

The function of cover plate is to strengthen the structural strength of ink gun, is convenient to install the PZT driver.It is 30 millimeters that cover plate is of a size of length, and width is 10 millimeters, and thickness is 500 microns.Process with a PZT profile consistent quarter saturating shape more bigger than PZT size by wet method or dry etching in the middle of cover plate.

4, PZT driver

By the tape casting, folded 20 layers of electrode, fill ceramic slurry between every layer, and making thickness through high temperature is 500 micron thick, and electrode PZT driver in the multilayer obtained, be divided into the needed size of fritter to the bulk pottery with precision gas cutting machine.Along the width cutting of PZT pottery, PZT is processed into to comb shape with scribing machine, is processed into exactly 50 microns of 180 (unit) width, 1 millimeter of length, the shape that bottom is connected, 90 microns, each driver element interval.By vacuum evaporation, interior electrode be connected with external electrode and be drawn out to the upper surface of PZT, make PZT+,-utmost point is at grade.After hyperpolarization is processed, PZT just can produce deformation.

5, drive chip and FPC band

Drive IC is 1 micron of a live width, has the Digital Analog Hybrid Circuits of 40V high-pressure process.The IC upside-down mounting is with FPC is soft, and soft have two kinds of specifications with the live width on FPC and distance between centers of tracks.A kind of is the inside lead of IC, and live width and distance between centers of tracks are respectively outer leads for mono-kind of 1mil., and live width and distance between centers of tracks are 2mil and 3.55mail.

6, nozzle plate

The base material of NOZZLE PLATE can have multiple choices, metal forming, as: SU304, nickel plate.Macromolecule material film, as PI, PPS, PEEK etc.The processing of nozzle substantially all adopts laser to be used as manufacturing process.But the nozzle version of processing unlike material needs different laser instruments, and the processing metal paper tinsel will use femto-second laser, so not again nozzle bore around have and process rear residual slag.Processing macro-molecular material need to be used excimer laser, go processing by little energy multiple-pulse, and macromolecular material will use gum, so just can process high-quality nozzle.In Shi， hole, working nozzle hole, be generally tapered, the bore dia of incidence surface is large, and the bore dia of exiting surface is little, and we often say that the diameter of spray orifice is commonly referred to as the hole of exiting surface.The very important part of nozzle version is that the nozzle plate outer surface has applied one deck and is no more than the non-wetting coating of 1 micron, and it plays very important effect to the quality of printing.

The profile of nozzle, can be various tapers.

7, assembling

The processing dimension of the part of industrial inkjet head is the prerequisite that ensures quality, and the assembling of industrial inkjet head is the most important ring of whole production link.The assembled relation explosive view of this device as shown in Figure 4.

Assembling is divided into several parts:

1., the drive IC upside-down mounting is to FPC.

IC produces from flow factory, be through the circuit performance test, and encapsulation factory processing au bump, attenuate, scribing, just can become an independent IC after burst.IC encapsulates factory by specialty, and IC is arranged on FPC.

2., FPC and PZT's is connected.

The live width of the outer lead of FPC, the size of distance between centers of tracks just with the consistent size of PZT, by ACF glue, in the specific time, temperature, press to PZT to the soft band of IC with hot press under pressure upper, makes each driver element of each output pin and the PZT that becomes comb shape of IC realize being electrically connected to.

3., the assembling of ink jet device.

To there be silicon chip and the elastic wall of black groove bonding, and make stainless steel strip and the corresponding installation of black groove.

4., PZT is installed to elastic wall

Bonding with glue and elastic wall the bottom surface of PZT, corresponding each stainless steel strip of each driver element.

5., silica-based cover plate is installed.

Cover plate is a framework that silicon is done, and comprises groove a and groove b, inside PZT is placed on, shield, strengthen the intensity of black groove, be convenient to install nozzle plate.With glue, cover plate is bonded on the back substrate of ink entrance of black groove, become after the two is bonding by " nozzle device ".

6., gluing nozzle plate.

First, by the glue of the coated on bottom side of shower nozzle installing plate 3 micron thick, the port out of ink of the Kong Yumo groove on nozzle plate, heating presses together.

So far, then install ink and shell, a silica-based piezoelectric ink jet head has completed.Device constitutional diagram after assembling as shown in Figure 5.

This device is on a semi-enclosed groove, and length direction is installed PZT driver parallel with groove, and nozzle bore is on the bottom surface of the black groove vertical with PZT driver element length direction.PZT deformation direction is perpendicular to the direction of black slot length and carries out along black well width direction simultaneously.

Elastic wall, be the composite of metal and macromolecule membrane, is a formation face that belongs to black groove.

Electrode piezoelectricity notice pottery in multilayer is processed into to the PZT driver of comb shape, only fixes an end, fix on the cover board, the other end can move along with deformation, take the PZT stiff end as the center of circle to the deformation of ink container direction.

Claims

1. the integrated droplet deposition apparatus of array more than a kind, is characterized in that comprising: nozzle, elastic wall, PZT driver, nozzle plate; Wherein, have an ink container and many guiding gutters on nozzle, the nozzle front is provided with the ink filling port of ink container, and each guiding gutter has two-port, and a port and this ink container conducting are as the entrance of ink, and the other end and nozzle bottom conducting are as the outlet of ink; Described nozzle plate is connected with nozzle bottom, and the ink outlet of nozzle bottom is corresponding with the spray orifice of nozzle plate; The back side of described elastic wall has many strip metals bar, described PZT driver has a plurality of driver elements, the front of described elastic wall is corresponding with ink container with the bonding jumper of the connection of nozzle sealing backside and elastic wall as the end of ink container, and the back side of described elastic wall is corresponding with the driver element of PZT with the bonding jumper of the connection of PZT driver bottom surface and elastic wall.

2. the integrated droplet deposition apparatus of many arrays as claimed in claim 1, characterized by further comprising an ink gun cover plate be connected with the back side of described elastic wall; Described ink gun cover plate is provided with the saturating cutting a of fixing described PZT driver one mobile terminal and is communicated with the saturating cutting b moved for holding another mobile terminal of described PZT with this groove a, and groove a and groove b form a convex slot.

3. the integrated droplet deposition apparatus of many arrays as claimed in claim 1 or 2, is characterized in that described ink container is rectangular channel; Described PZT driver is parallel with the length direction of ink container.

4. the integrated droplet deposition apparatus of many arrays as claimed in claim 3, is characterized in that described PZT driver is electrode PZT driver in multilayer, and the driver element of described PZT driver becomes comb shape to arrange along PZT driver width.

5. the integrated droplet deposition apparatus of many arrays as claimed in claim 3, is characterized in that described elastic wall is the composite bed that comprises a metal level and a macromolecule membrane.

6. the integrated droplet deposition apparatus of many arrays as claimed in claim 1, is characterized in that outer surface coating one deck of described nozzle plate is no more than the non-wetting coating of 1 micron.

7. the integrated droplet deposition apparatus of many arrays as described as claim 1 or 6, the spray orifice that it is characterized in that described nozzle plate is pyramidal structure.

8. the integrated droplet deposition apparatus of many arrays as claimed in claim 1, is characterized in that described nozzle is silica-based nozzle.

9. the integrated droplet deposition apparatus of many arrays as claimed in claim 1, is characterized in that between many described guiding gutters being arranged in parallel and perpendicular to the side of described ink container.