CN102173238A - Vacuum imprinting device, vacuum compressing device and manufacturing method of layered optical component - Google Patents

Vacuum imprinting device, vacuum compressing device and manufacturing method of layered optical component Download PDF

Info

Publication number
CN102173238A
CN102173238A CN2011100509802A CN201110050980A CN102173238A CN 102173238 A CN102173238 A CN 102173238A CN 2011100509802 A CN2011100509802 A CN 2011100509802A CN 201110050980 A CN201110050980 A CN 201110050980A CN 102173238 A CN102173238 A CN 102173238A
Authority
CN
China
Prior art keywords
microscope carrier
vacuum
line
optics glue
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100509802A
Other languages
Chinese (zh)
Inventor
刘荣井
黄建森
赵文魁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AU Optronics Corp
Original Assignee
AU Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to TW099146582 priority Critical
Priority to TW99146582 priority
Application filed by AU Optronics Corp filed Critical AU Optronics Corp
Publication of CN102173238A publication Critical patent/CN102173238A/en
Pending legal-status Critical Current

Links

Abstract

The invention discloses a vacuum imprinting device, a vacuum compressing device and a manufacturing method of a layered optical component, wherein, the vacuum imprinting device and the vacuum compressing device respectively comprise a vacuum chamber, a downloading platform, an uploading platform and a curing device. The uploading platform which is opposed to the downloading platform is equipped inside the vacuum chamber and moving towards the downloading platform so as to apply imprinting or flatting operations. The curing device is used for curing an optical glue layer in order to form an optical layer. The manufacturing method comprises the steps of respectively applying the vacuum imprinting device and the vacuum compressing device on a base plate to form a plurality of optical layers and then shaping layered optical components. By applying devices in vacuum conditions so as to form optical glue layers, a bubble phenomenon generated in the layered structure of the optical layers after the optical layers are cured is effectively prevented in the invention.

Description

The manufacture method of vacuum imprinting apparatus, vacuum pressing-combining device and stratiform optical module
Technical field
The present invention relates to a kind of manufacture method of stratiform optical module and imprinting apparatus, the press fit device of use thereof, particularly utilize the stratiform optical assembly manufacturing method of vacuum technology and vacuum imprinting apparatus, the vacuum pressing-combining device of use thereof.
Background technology
The stratiform optical module of prior art is to form the multilayer optical layer to make on a substrate, and this multilayer optical layer utilizes optical cement to solidify to form in regular turn, wherein, can utilize the template impressing pattern according to need on the optical layers.In the technology of prior art, this stratiform optical module is made formation respectively in regular turn via operations such as coating, roll extrusion, curing under atmospheric environment.In rolling step; operation manually need with template or diaphragm with the contraposition of fitting of optics glue-line; carry out roll extrusion with rolling wheel again, this easily causes applying precision deficiency, applying and roll extrusion easily to introduce bubble, roll extrusion wayward pressing gap and solidifies the preceding transfer board that needs and easily cause the variation of optical cement layer thickness.In addition, in rolling step that adopt to use template forming in the optical layers flow process, this template behind the optics curable adhesive layer, the artificial demoulding of still needing, but, be easy to generate the instable problem of technology because artificial stripping operation exists bigger uncertain factor.
Summary of the invention
Technical problem to be solved by this invention provides a kind of vacuum imprinting apparatus, utilizes the characteristic of vacuum environment and machine precision positioning, solidifies the bubble phenomenon that the back produces with the gauge and the inhibition of effective control optical layers between each optical layers.
To achieve these goals, the invention provides a kind of vacuum imprinting apparatus, comprise a vacuum chamber, once a microscope carrier and a solidification equipment on the microscope carrier.This time microscope carrier is arranged in this vacuum chamber, and in order to carry a substrate, it is provided with an optics glue-line.Should go up microscope carrier and be arranged in this vacuum chamber with respect to this time microscope carrier, in order to carry a template, microscope carrier can move so that this template impresses a pattern on this optics glue-line towards this time microscope carrier on this.This solidification equipment in order to the optics glue-line that solidifies this impression to form an optical layers on this substrate.By this, this vacuum imprinting apparatus is introduced the possibility in space when utilizing vacuum to suppress this template to impress this optics glue-line, and can be steadily and accurately control should go up microscope carrier and pressed down, make that optical layer thickness after this curings is even and do not have bubble.
Another object of the present invention is to provide a kind of vacuum pressing-combining device, also utilize the characteristic of vacuum environment and machine precision positioning, solidify the bubble phenomenon that the back produces between optical layers and diaphragm with the gauge and the inhibition of effective control optical layers.
To achieve these goals, the invention provides a kind of vacuum pressing-combining device, comprise a vacuum chamber, once a microscope carrier and a solidification equipment on the microscope carrier.This time microscope carrier is arranged in this vacuum chamber, in order to carry a substrate, is formed with one first optical layers on it, and this first optical layers is provided with an optics glue-line.Should go up microscope carrier and be arranged in this vacuum chamber with respect to this time microscope carrier, in order to carry a diaphragm, microscope carrier can move so that this diaphragm is tiled on this optics glue-line towards this time microscope carrier on this.This solidification equipment is in order to solidify this optics glue-line to form one second optical layers on this first optical layers.By this, this vacuum pressing-combining device is introduced the possibility in space when also utilizing vacuum to suppress this diaphragm to be tiled on this optics glue-line, and can be steadily and accurately control should go up microscope carrier and pressed down, make that second optical layer thickness after this curings is even and do not have bubble.
Another purpose of the present invention is to provide a kind of manufacture method, utilize vacuum imprinting apparatus of the present invention and vacuum pressing-combining device to make a stratiform optical module, so this manufacture method is also utilized the characteristic of vacuum environment and machine precision positioning, with the gauge of each optical layers of this stratiform optical module of effective control and suppress to solidify the bubble phenomenon that the back produces in the layer structure of this stratiform optical module.
To achieve these goals, the invention provides a kind of manufacture method of stratiform optical module, utilize vacuum imprinting apparatus of the present invention and vacuum pressing-combining device to make a stratiform optical module, this vacuum imprinting apparatus comprises one first vacuum chamber, one first time microscope carrier, microscope carrier and one first solidification equipment on one first, this vacuum pressing-combining device comprises one second vacuum chamber, one second time microscope carrier, microscope carrier and one second solidification equipment on one second, microscope carrier is arranged in this first vacuum chamber on this first time microscope carrier and this first, and microscope carrier is arranged in this second vacuum chamber on this second time microscope carrier and this second; Other further specifies, and sees also above stated specification, repeats no more.This manufacture method comprises: prepare a substrate, be positioned on this first time microscope carrier; Coating one first optics glue-line on this substrate; Prepare a template, be fixed in this on first on the microscope carrier; This first vacuum chamber is vacuumized; Make this on first microscope carrier move so that this template impresses a pattern on this first optics glue-line towards this first time microscope carrier; Utilize this first solidification equipment to solidify the first optics glue-line of this impression to form one first optical layers on this substrate; Take out this substrate and this first optical layers; Place this substrate and this first optical layers on this second time microscope carrier; Coating one second optics glue-line on this first optical layers; Prepare a diaphragm, be fixed in this on second on the microscope carrier; This second vacuum chamber is vacuumized; Make this on first microscope carrier move so that this diaphragm is tiled on this second optics glue-line towards this second time microscope carrier; And utilize this second solidification equipment to solidify this second optics glue-line forming one second optical layers on this first optical layers, and then form this stratiform optical module.By this; this substrate of this stratiform optical module, this first optical layers, this second optical layers and this diaphragm can be accurately positioned; the thickness of this first optical layers and this second optical layers can accurately be controlled, and also can fit tightly between this first optical layers, this second optical layers and this diaphragm.
Technique effect of the present invention is: the present invention forms the optics glue-line in vacuum environment, solidify the bubble phenomenon that the back produces with effective inhibition in the layer structure that this optical layers forms, and adopt facility to promote craft precision, the present invention gets rid of manually-operated unstability, so can effectively solve prior art problems.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the schematic diagram of vacuum imprinting apparatus according to a preferred embodiment of the present invention;
Fig. 2 be among Fig. 1 the vacuum imprinting apparatus in the schematic diagram of another state;
Fig. 3 is the schematic diagram that is oppositely arranged the position of last microscope carrier, axis servomotor and gap sensing apparatus;
Fig. 4 is the schematic diagram that is oppositely arranged the position of thimble, template and holder;
Fig. 5 is the schematic diagram of the optical layers self-template demoulding;
Fig. 6 is the vacuum pressing-combining schematic representation of apparatus according to another preferred embodiment of the present invention;
Fig. 7 is installed on the schematic diagram of another state for vacuum pressing-combining among Fig. 6;
Fig. 8 is the schematic diagram of instrument;
Fig. 9 is the flow chart of the manufacture method of stratiform optical module according to a preferred embodiment of the present invention;
Figure 10 is the schematic diagram of stratiform optical module.
Wherein, Reference numeral
1 vacuum imprinting apparatus, 4 stratiform optical modules
5 vacuum pressing-combining devices, 12,52 vacuum chambers
14, microscope carrier on 54 times microscope carriers 16,56
18,58 solidification equipments, 20 templates
22 holders, 24 magnet
26,68 axis servomotors, 28,70 gap sensing apparatus
30 thimbles, 32 blowning installations
42 substrates, 44,46 optics glue-lines
45 first optical layers, 47 second optical layers
60 diaphragms, 62 magnet
64 fixed heads, 66 instruments
72 heaters, 122,522 base plates
124,524 cover bodies, 162 centers of gravity
182,582 ultraviolet lamps, 222 chutes
262 angles, 322 nozzles
562 passages, 662 supports
664 fixed parts, 666 vacuum cups
S100~S124 implementation step
The specific embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and operation principle are done concrete description:
See also Fig. 1 and Fig. 2, Fig. 1 is the schematic diagram of vacuum imprinting apparatus 1 according to a preferred embodiment of the present invention, Fig. 2 be among Fig. 1 vacuum imprinting apparatus 1 in the schematic diagram of another state.Vacuum imprinting apparatus 1 comprises a vacuum chamber 12, once a microscope carrier 16 and a solidification equipment 18 on the microscope carrier 14.Vacuum chamber 12 mainly is made up of a base plate 122 and a cover body 124, and cover body 124 can separate with respect to base plate 122, inserts operation for object; When base plate 122 and cover body 124 closures, as shown in Figure 2, can carry out vacuum pumping to vacuum chamber 12, wherein air extractor is a prior art, not elsewhere specified reaching illustrates in the drawings.Following microscope carrier 14 is arranged in the vacuum chamber 12, on the base plate 122, in order to carry a substrate 42, it is provided with an optics glue-line 44.Last microscope carrier 16 is arranged in the vacuum chamber 12 with respect to following microscope carrier 14, and in order to carry a template 20, last microscope carrier 16 can move so that template 20 impresses a pattern on optics glue-line 44 towards following microscope carrier 14.Solidification equipment 18 in order to the optics glue-line 44 of solidified imprinting to form an optical layers on substrate 42.
Furthermore, vacuum imprinting apparatus 1 comprises a plurality of L shaped holders 22, is arranged on the microscope carrier 16 to form a chute 222, and template 20 can slip in the chute 222 and be held part 22 clampings.In practice, template 20 can be a nickel plate, and vacuum imprinting apparatus 1 also can comprise a plurality of magnet 24 at this moment, is arranged at movably in the microscope carrier 16, in order to adsorb template 20 on last microscope carrier 16; By this, when magnet 24 when down microscope carrier 14 moves, but magnet 24 magnetic templates 20 on last microscope carrier 16, and when magnet 24 when descending microscope carrier 14 to move, can remove magnetic effect, so that template 20 is removed from last microscope carrier 16 to template 20.Supplementary notes be, aforementioned L shaped holder 22 can be selected a use with magnet 24, the present invention is not exceeded to use simultaneously.
Vacuum imprinting apparatus 1 comprises three axis servomotors 26 and (please consults Fig. 3 simultaneously, in Fig. 1 and Fig. 2, only illustrate wherein two axis servomotors 26), pass cover body 124 and be connected with last microscope carrier 16, axis servomotor 26 can move with respect to following microscope carrier 14 to drive microscope carrier 16 in independent separately control.This three axis servomotor 26 can be controlled the flatness of uploading 14 of platform 16 and following microscope carriers, also promptly controls the flatness of 20 of substrate 42 and templates, so that the thickness of optics glue-line 44 is even.In present embodiment, vacuum imprinting apparatus 1 comprises three gap sensing apparatus 28 (please consult Fig. 3 simultaneously, in Fig. 1 and Fig. 2, only illustrate wherein two gap sensing apparatus 28), and corresponding axis servomotor 26 is arranged at down microscope carrier 14, in order to control moving of microscope carrier 16.But the distance of 14 of microscope carrier 16 and following microscope carriers on gap sensing apparatus 28 sensings, with the action of feedback control axis servomotor 26, and then the thickness of control optics glue-line 44.In present embodiment, sensing apparatus 28 direct corresponding axis servomotors 26 in gap are provided with the directly motion of correspondence control axis servomotor 26, simplify control, but the present invention are not as limit; And the present invention is not exceeded to drive the mobile of microscope carrier 16 so that a plurality of axis servomotors 26 to be set yet.
In addition, axis servomotor 26 moves and on average is supported for principle with respect to the position that is provided with of last microscope carrier 16 to consider effective control of going up microscope carrier 16, for example shown in the schematic diagram that is oppositely arranged the position of the last microscope carrier 16 of Fig. 3, axis servomotor 26 and gap sensing apparatus 28, the outline position of wherein representing microscope carrier 16 with rectangle frame, great circle is represented the position of axis servomotor 26, small circle is represented gap sensing apparatus 28, and cross mark is represented the position of microscope carrier 16 centers of gravity 162.The position of axis servomotor 26 to the connection of center of gravity 162 forms three angles 262 about equally, and the position of axis servomotor 26 to the distance of center of gravity 162 also is more or less the same.Sensing apparatus 28 axis servomotors 26 near correspondence in gap are provided with, to simplify feedback control complexity.But the present invention is not still exceeded with aforementioned set-up mode.
Please get back to Fig. 1 and Fig. 2.In present embodiment, optics glue-line 44 is a UV glue, so solidification equipment 18 comprises a ultraviolet lamp 182, in order to irradiating ultraviolet light in optics glue-line 44 to solidify to form this optical layers.Again, in present embodiment, following microscope carrier 14 is transparent, and ultraviolet lamp 182 is arranged at down microscope carrier 14 belows, with irradiating ultraviolet light directly and equably in optics glue-line 44.But the present invention can cooperate different optics glue-line characteristics to adopt different solidification equipments to realize the curing of optics glue-line all not as limit certainly in the practice.
In present embodiment, vacuum imprinting apparatus 1 comprises binomial pin 30, and run through microscope carrier 16 and be provided with, when being used to this optical layers demoulding, bending template 20.Thimble 30 can be driven by a pneumatic cylinder, the outline position of template 20 is wherein represented in the position is set can consults shown in Fig. 4 of thimble 30 relative templates 20 with rectangle, four dashed rectangle are represented the position of holder 22, small circle is represented the position of thimble 30, and it roughly is positioned in the middle of the holder 22.When this optical layers (promptly first optical layers 45) hereinafter demoulding, last microscope carrier 16 moves up, and make thimble 30 go up relatively that microscope carrier 16 is outstanding can bending templates 20, as shown in Figure 5, this helps this optical layers demoulding.
Please get back to Fig. 1 and Fig. 2.In present embodiment, vacuum imprinting apparatus 1 comprises a blowning installation 32, is arranged at down microscope carrier 14 sides, when being used to this optical layers demoulding, utilizes nozzle 322 to blow towards template 20 and this optical layers.This blowning installation 32 can be arranged at cover body 124 outsides, helps the setting of blowning installation 32; But the present invention is not as limit.Supplementary notes be, in Fig. 1 and Fig. 2, only illustrate the nozzle 322 and the part pipeline of blowning installation 32, simplify to draw, its device (comprising source of the gas) is a prior art, does not give unnecessary details in addition.In addition, in present embodiment, these optical layers self-template 20 demouldings adopt thimble 30 and blowning installation 32 to assist simultaneously, as shown in Figure 5; But the present invention is not as limit.
See also Fig. 6 and Fig. 7, Fig. 6 is the schematic diagram according to the vacuum pressing-combining device 5 of another preferred embodiment of the present invention, Fig. 7 be among Fig. 6 vacuum pressing-combining device 5 in the schematic diagram of another state.Vacuum pressing-combining device 5 comprises a vacuum chamber 52, once a microscope carrier 56 and a solidification equipment 58 on the microscope carrier 54.Vacuum chamber 52 mainly is made up of a base plate 522 and a cover body 524, and cover body 524 can separate with respect to base plate 522, inserts operation for object; When base plate 522 and cover body 524 closures, as shown in Figure 7, can carry out vacuum pumping to vacuum chamber 52, wherein air extractor is a prior art, not elsewhere specified reaching illustrates in figure.Following microscope carrier 54 is arranged in the vacuum chamber 12, on the base plate 522, in order to carry this substrate 42, is formed with one first optical layers, 45, the first optical layers 45 on it and is provided with an optics glue-line 46.Last microscope carrier 56 is arranged in the vacuum chamber 52 with respect to following microscope carrier 54, and in order to carry a diaphragm 60, last microscope carrier 56 can move so that diaphragm 60 is tiled on the optics glue-line 46 towards following microscope carrier 54.Solidification equipment 58 is in order to solidify optics glue-line 46 to form one second optical layers on first optical layers 45.What remark additionally is that this substrate 42 and first optical layers 45 that upward forms thereof can be utilizes vacuum imprinting apparatus 1 to make formation, also can take from the semi-finished product of other stratiform optics component process making.
Furthermore, vacuum pressing-combining device 5 comprises two magnet 62 and two fixed heads 64, and magnet 62 is arranged in the microscope carrier 56, and fixed head 64 corresponding magnet 62 are adsorbed on the microscope carrier 56, in order to fixing diaphragm 60.In present embodiment, diaphragm 60 is a PET film, but the present invention is as limit, and other flexible film also can; Fixed head 64 can be iron plate or other has the tablet of magnetic.In addition; in present embodiment; last microscope carrier 56 comprises a plurality of passages 562; in order to passage 562 is bled with vacuum suction diaphragm 60 on last microscope carrier 56; make diaphragm 60 flatly to be positioned over easilier on the microscope carrier 56; and, make that diaphragm 60 is easy to break away from from last microscope carrier 56 in order to passage 562 is ventilated to go up microscope carrier 56 separating protective film 60 certainly.
In present embodiment, vacuum pressing-combining device 5 comprises an instrument 66, is attached on the microscope carrier 56 in order to auxiliary protection film 60.See also Fig. 8, it is the schematic diagram of instrument 66.Instrument 66 comprises a support 662, two fixed parts 664 and at least one vacuum cup 666 is set on each fixed part 664.When using, earlier fixed head 64 is placed vacuum cup 666 other, again diaphragm 60 smooth placing on fixed head 64 and the vacuum cup 666 and by vacuum cup 666 are held.Instrument 66 is stretched in the vacuum chamber 52, and with microscope carrier 56 in the diaphragm 60 smooth contacts, magnet 62 promptly adsorbs fixed head 64, again vacuum cup 666 is discharged vacuum, promptly finish the operation that diaphragm 60 is attached at microscope carrier 56; This moment, instrument 66 was extensible vacuum chamber 52.
Please get back to Fig. 6 and Fig. 7.Vacuum pressing-combining device 5 comprises three axis servomotors 68, passes cover body 524 and is connected with last microscope carrier 56, and axis servomotor 68 can move with respect to following microscope carrier 54 to drive microscope carrier 56 in independent separately control.In present embodiment, vacuum pressing-combining device 5 comprises three gap sensing apparatus 70, and corresponding axis servomotor 68 is arranged at down microscope carrier 54, in order to control moving of microscope carrier 56.About other explanation of axis servomotor 68 and gap sensing apparatus 70, can directly consult other explanation of aforementioned relevant axis servomotor 26 and gap sensing apparatus 28, do not repeat them here.
In present embodiment, optics glue-line 46 is a UV glue, so solidification equipment 58 comprises a ultraviolet lamp 582, in order to irradiating ultraviolet light in optics glue-line 46 to solidify to form this second optical layers.Again, in present embodiment, last microscope carrier 56 is transparent, and ultraviolet lamp 582 is arranged at microscope carrier 56 tops, and irradiating ultraviolet light is in optics glue-line 46 equably, but the present invention is not all as limit.Aforementioned also have suitablely in this about solidification equipment 18, do not give unnecessary details in addition.
In present embodiment, following microscope carrier also comprises a heater 72, and for example heating rod in order to heating optics glue-line 46, can increase the flowability of optics glue-line 46, helps diaphragm 60 and is tiled on the optics glue-line 46.What remark additionally is when diaphragm 60 has an alignment structure when go up on its surface, when 56 times voltage protection films 60 of last microscope carrier are on optics glue-line 46, also can impress this alignment structure simultaneously on optics glue-line 46.
See also Fig. 9, it is the flow chart of the manufacture method of stratiform optical module according to a preferred embodiment of the present invention.This manufacture method utilizes vacuum imprinting apparatus 1 and vacuum pressing-combining device 5 to make a stratiform optical module 4 (seeing also Figure 10), and wherein vacuum imprinting apparatus 1 and vacuum pressing-combining device 5 repeat no more as described above.This manufacture method is at first prepared a substrate 42, is positioned on the following microscope carrier 14 of vacuum imprinting apparatus 1, shown in step S100.This manufacture method is contained in coating one optics glue-line 44 on the substrate 42, shown in step S102; Wherein, in practice, optics glue-line 44 can be coated earlier on the substrate 42, substrate 42 is positioned over down on the microscope carrier 14 in the lump together with optics glue-line 44 again.This manufacture method is also prepared template 20, is fixed on the last microscope carrier 16 of vacuum imprinting apparatus 1, shown in step S104.Step S100 successively is not limited to order shown in Figure 9 to the enforcement of step S104; After finishing abovementioned steps, the state of vacuum imprinting apparatus 1 can be consulted Fig. 1.
This manufacture method then vacuumizes with base plate 122 driving fits the cover body 124 of vacuum imprinting apparatus 1 with the vacuum chamber 12 to vacuum imprinting apparatus 1, shown in step S106; The last microscope carrier 16 of vacuum imprinting apparatus 1 is moved so that template 20 impresses a pattern on optics glue-line 44, shown in step S108 towards following microscope carrier 14.This pattern promptly is used for forming surface geometry on the optics glue-line 44, and for example zigzag, taper, wavy or the like are to reach required optical effect.After finishing abovementioned steps, the state of vacuum imprinting apparatus 1 can be consulted Fig. 2.This manufacture method then utilizes the optics glue-line 44 of solidification equipment 18 solidified imprintings of vacuum imprinting apparatus 1 to form one first optical layers 45, shown in step S110.In the practice, before step S110 implements, can be earlier with vacuum chamber 12 vacuum breakers, 14 modes with vacuum suction of following microscope carrier hold substrate 42, the relative position that this can be avoided first optical layers 45 to introduce too much residual stress and can be maintained first optical layers 45 and substrate 42.After curing was finished, cover body 124 rose, and is beneficial to take out substrate 42 and first optical layers 45 formed thereon, shown in step S112.
Furthermore, step S104 can comprise template 20 is slipped in the chute 222 that holder 22 forms, to reach the purpose that is fixed in microscope carrier 16.Again, 1 design of vacuum imprinting apparatus has the magnetic effect, so step S104 can comprise magnet 24 is moved towards following microscope carrier 14, by magnet 24 template 20 is adsorbed on the microscope carrier 16.Other explanation about holder 22 and magnet 24 sees also preamble, repeats no more.
In addition, 1 design of vacuum imprinting apparatus has the axis servomotor 26 that can independently control, to drive moving of microscope carrier 16, so step S108 can comprise independent control axis servomotor 26, moves towards following microscope carrier 14 to drive microscope carrier 16.Again, vacuum imprinting apparatus 1 is provided with gap sensing apparatus 28, so step S108 can be independent control axis servomotor 26, move towards following microscope carrier 14 to drive microscope carrier 16, so that template 20 contact optical glue-lines 44, and according to the feedback signal of gap sensing apparatus 28, the stop position of the last microscope carrier 16 that control is moved is so that template 20 these patterns of impression also can accurately be controlled the thickness of optics glue-line 44 on optics glue-line 44.Other explanation about axis servomotor 26 and gap sensing apparatus 28 sees also preamble, repeats no more.
In addition, in present embodiment, solidification equipment 18 comprises ultraviolet lamp 182, so step S110 can be vacuum chamber 12 vacuum breakers, and utilize the ultraviolet lamp 182 that is arranged at down microscope carrier 14 belows towards the optics glue-line 44 of last microscope carrier 16 irradiating ultraviolet light, so that the optics glue-line 44 of impression solidify to form first optical layers 45 in impression.Other sees also preamble about other explanation of solidification equipment 18, repeats no more.
In step S112, in before vacuum chamber 12 takes out substrate 42, first optical layers 45 needs self-template 20 demouldings, 1 design of vacuum imprinting apparatus has thimble 30 and blowning installation 32 again, with the auxiliary demoulding, so step S112 comprises microscope carrier 16 is moved away from following microscope carrier 14, make thimble 30 protrude in microscope carrier 16 simultaneously, with bending template 20, and utilize blowning installation 32 to blow towards the template 20 and first optical layers 45 simultaneously, its schematic diagram can be consulted Fig. 5.Other sees also preamble about other explanation of thimble 30 and blowning installation 32, repeats no more.
Then, this manufacture method will utilize vacuum pressing-combining device 5 to carry out another optical layers forming process on substrate 42, be described as follows.This manufacture method is then placed substrate 42 and first optical layers 45 formed thereon on the following microscope carrier 54 of vacuum pressing-combining device 5, shown in step S114.This manufacture method is contained in coating one optics glue-line 46 on first optical layers 45, shown in step S116; Wherein, in practice, optics glue-line 46 can be coated earlier on first optical layers 45, and the substrate 42 that will have first optical layers 45 again is positioned over down on the microscope carrier 54 in the lump together with optics glue-line 46.This manufacture method is also prepared diaphragm 60, is fixed on the last microscope carrier 56 of vacuum pressing-combining device 5, shown in step S118.Step S114 successively is not limited to order shown in Figure 9 to the enforcement of step S118; After finishing abovementioned steps, the state of vacuum pressing-combining device 5 can be consulted Fig. 6.
This manufacture method then vacuumizes with base plate 522 driving fits the cover body 524 of vacuum pressing-combining device 5 with the vacuum chamber 52 to vacuum pressing-combining device 5, shown in step S120; The last microscope carrier 56 of vacuum pressing-combining device 5 is moved so that diaphragm 60 is tiled on the optics glue-line 46, shown in step S122 towards following microscope carrier 54.After finishing abovementioned steps, the state of vacuum pressing-combining device 5 can be consulted Fig. 7.The optics glue-line 46 that this manufacture method is then utilized the solidification equipment 58 of vacuum pressing-combining device 5 to solidify to be driven plain to be forming one second optical layers 47, and then forms stratiform optical module 4, as step S124.In the practice, before step S124 implements, can be earlier with vacuum chamber 52 vacuum breakers, 54 modes with vacuum suction of following microscope carrier hold substrate 42, the relative position that this can be avoided second optical layers 47 to introduce too much residual stress and can be maintained second optical layers 47 and substrate 42.After curing was finished, cover body 524 rose, and is beneficial to take out substrate 42 and first optical layers 45 and second optical layers 47 formed thereon, as shown in figure 10.
Furthermore, step S118 can comprise by fixed head 64 corresponding magnet 62 and is adsorbed on the microscope carrier 56, with fixing diaphragm 60 on last microscope carrier 56.When tool using 66 enforcement diaphragms 60 are fixed in microscope carrier 56; step S118 can be fixed head 64 is arranged at vacuum cup 666 sides; diaphragm 60 is tiled on the instrument 66; utilize vacuum cup 666 absorption diaphragms 60; instrument 66 is stretched in the vacuum chamber 52, diaphragm 60 is attached on the microscope carrier 56, and fixed head 64 is adsorbed on the microscope carrier 56 with fixing diaphragm 60 by magnet 62; discharge the vacuum of vacuum cup 666, and shift out instrument 66.Wherein, can more smoothly be attached at microscope carrier 56 for making diaphragm 60, step S118 can comprise passage 562 is bled with vacuum suction diaphragm 60 on last microscope carrier 56.Other explanation about instrument 66 and passage 562 sees also preamble, repeats no more.
Identical with vacuum imprinting apparatus 1, vacuum pressing-combining device 5 also designs the axis servomotor 68 that can independently control, so step S116 can comprise independent control axis servomotor 68, moves towards following microscope carrier 54 to drive microscope carrier 56.Similarly; vacuum pressing-combining device 5 is provided with gap sensing apparatus 70; so step S116 can be independent control axis servomotor 68; move towards following microscope carrier 54 to drive microscope carrier 56; so that diaphragm 60 is contacted with on the optics glue-line 46; and according to the feedback signal of gap sensing apparatus 70, the stop position of the last microscope carrier 56 that control is moved is so that diaphragm 60 concora crush also can accurately be controlled the thickness of optics glue-line 46 on optics glue-line 46.Other explanation about axis servomotor 68 and gap sensing apparatus 70 sees also preamble, repeats no more.
In addition, in present embodiment, solidification equipment 58 comprises ultraviolet lamp 582, so step S124 can be vacuum chamber 52 vacuum breakers, and utilize the ultraviolet lamp 582 that is arranged at microscope carrier 56 tops towards descending microscope carrier 54 irradiating ultraviolet light in optics glue-line 46, so that optics glue-line 46 solidify to form second optical layers 47.Other sees also preamble about other explanation of solidification equipment 58, repeats no more.
In addition, in present embodiment, following microscope carrier 56 is provided with heater 72, utilizes heater 72 with heating optics glue-line 46 so step S116 can comprise, and can increase the flowability of optics glue-line 46, helps diaphragm 60 and is tiled on the optics glue-line 46.Other explanation about heater 72 sees also preamble, repeats no more.Again, when diaphragm 60 has an alignment structure when go up on its surface, step S116 can comprise and utilizes diaphragm 60 these alignment structures of impression on optics glue-line 46.Other explanation about this alignment structure sees also preamble, repeats no more.
In sum, the present invention builds and puts the environment that vacuum is made, and to utilize vacuum characteristic the optics glue-line is suppressed in the bubble phenomenon of the optical layers of solidifying back formation, and adopts the facility operation to promote craft precision, get rid of manually-operated unstability, with the problem of effective solution prior art.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.

Claims (37)

1. a vacuum imprinting apparatus is characterized in that, comprises:
One vacuum chamber;
Once microscope carrier is arranged in this vacuum chamber, and in order to carry a substrate, it is provided with an optics glue-line;
Microscope carrier on one is arranged in this vacuum chamber with respect to this time microscope carrier, and in order to carry a template, microscope carrier can move so that this template impresses a pattern on this optics glue-line towards this time microscope carrier on this; And
One solidification equipment, in order to the optics glue-line that solidifies this impression to form an optical layers on this substrate.
2. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a plurality of L shaped holders, is arranged on this on microscope carrier to form a chute, in order to this template of clamping.
3. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a magnet, is arranged at movably on this in microscope carrier, in order to adsorb this template on microscope carrier on this.
4. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises three axis servomotors, is connected with microscope carrier on this, and microscope carrier moves with respect to this time microscope carrier in order to drive upward.
5. vacuum imprinting apparatus as claimed in claim 4 is characterized in that, also comprises three gap sensing apparatus, to should being arranged at this time microscope carrier by three axis servomotors, in order to control moving of microscope carrier on this.
6. vacuum imprinting apparatus as claimed in claim 1 is characterized in that this solidification equipment comprises a ultraviolet lamp, in order to irradiating ultraviolet light in this optics glue-line to solidify to form this optical layers.
7. vacuum imprinting apparatus as claimed in claim 6 is characterized in that, this time microscope carrier is transparent, and this ultraviolet lamp is arranged at this time microscope carrier below.
8. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a thimble, runs through microscope carrier setting on this, in order to this template of bending.
9. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a blowning installation, is arranged at by this time microscope carrier, in order to blow towards this template and this optical layers.
10. a vacuum pressing-combining device is characterized in that, comprises:
One vacuum chamber;
Once microscope carrier is arranged in this vacuum chamber, in order to carry a substrate, is formed with one first optical layers on it, and this first optical layers is provided with an optics glue-line;
Microscope carrier on one is arranged in this vacuum chamber with respect to this time microscope carrier, and in order to carry a diaphragm, microscope carrier can move so that this diaphragm is tiled on this optics glue-line towards this time microscope carrier on this; And
One solidification equipment is in order to solidify this optics glue-line to form one second optical layers on this first optical layers.
11. vacuum pressing-combining device as claimed in claim 10 is characterized in that, also comprises two magnet and two fixed heads, this magnet is arranged on this in microscope carrier, and this fixed head is to should magnet being adsorbed on this on microscope carrier, in order to fix this diaphragm.
12. vacuum pressing-combining device as claimed in claim 11 is characterized in that, also comprises an instrument, this instrument comprises two vacuum cups, adsorbs this diaphragm in order to utilize this vacuum cup, stretches in this vacuum chamber to fix this diaphragm on microscope carrier on this again.
13. vacuum pressing-combining device as claimed in claim 11; it is characterized in that; should go up microscope carrier and comprise a plurality of passages, in order to this passage being bled with this diaphragm of vacuum suction on microscope carrier this on, and in order to this passage ventilation with certainly upward microscope carrier separated this diaphragm.
14. vacuum pressing-combining device as claimed in claim 10 is characterized in that, also comprises three axis servomotors, is connected with microscope carrier on this, microscope carrier moves with respect to this time microscope carrier in order to drive upward.
15. vacuum pressing-combining device as claimed in claim 14 is characterized in that, also comprises three gap sensing apparatus, to should being arranged at this time microscope carrier by three axis servomotors, in order to control moving of microscope carrier on this.
16. vacuum pressing-combining device as claimed in claim 10 is characterized in that this solidification equipment comprises a ultraviolet lamp, in order to irradiating ultraviolet light in this optics glue-line to solidify to form this second optical layers.
17. vacuum pressing-combining device as claimed in claim 16 is characterized in that, microscope carrier is transparent on this, and this ultraviolet lamp is arranged at microscope carrier top on this.
18. vacuum pressing-combining device as claimed in claim 10 is characterized in that this time microscope carrier also comprises a heater, in order to heat this optics glue-line.
19. vacuum pressing-combining device as claimed in claim 10 is characterized in that this diaphragm has an alignment structure, in order to impress this alignment structure on this optics glue-line.
20. manufacture method, utilize a vacuum imprinting apparatus and a vacuum pressing-combining device to make a stratiform optical module, it is characterized in that, this vacuum imprinting apparatus comprises one first vacuum chamber, one first time microscope carrier, microscope carrier and one first solidification equipment on one first, this vacuum pressing-combining device comprises one second vacuum chamber, one second time microscope carrier, microscope carrier and one second solidification equipment on one second, microscope carrier is arranged in this first vacuum chamber on this first time microscope carrier and this first, microscope carrier is arranged in this second vacuum chamber on this second time microscope carrier and this second, and this manufacture method comprises the following step:
A prepares a substrate, is positioned on this first time microscope carrier;
B is coated with one first optics glue-line on this substrate;
C prepares a template, is fixed in this on first on the microscope carrier;
D vacuumizes this first vacuum chamber;
E make this on first microscope carrier move so that this template impresses a pattern on this first optics glue-line towards this first time microscope carrier;
F utilizes this first solidification equipment to solidify the first optics glue-line of this impression to form one first optical layers on this substrate;
G takes out this substrate and this first optical layers;
H places this substrate and this first optical layers on this second time microscope carrier;
I is coated with one second optics glue-line on this first optical layers;
J prepares a diaphragm, is fixed in this on second on the microscope carrier;
K vacuumizes this second vacuum chamber;
L make this on first microscope carrier move so that this diaphragm is tiled on this second optics glue-line towards this second time microscope carrier; And
M utilizes this second solidification equipment to solidify this second optics glue-line forming one second optical layers on this first optical layers, and then forms this stratiform optical module.
21. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a plurality of L shaped holders, is arranged on this first time microscope carrier to form a chute, and step c also comprises the following step: this template is slipped in this chute.
22. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus comprises a magnet, is arranged at this movably on first in the microscope carrier, and step c is implemented by the following step:
This magnet is moved towards this first time microscope carrier; And
By this magnet this template is adsorbed in this on first on the microscope carrier.
23. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus comprises three axis servomotors, with this on first microscope carrier be connected, step e also comprises the following step:
Independent this three axis servomotor of control, with drive this on first microscope carrier move towards this first time microscope carrier.
24. manufacture method as claimed in claim 23 is characterized in that, this vacuum imprinting apparatus also comprises three gap sensing apparatus, and to being arranged at this first time microscope carrier by three axis servomotors, step e is implemented by the following step:
Independent this three axis servomotor of control, with drive this on first microscope carrier move towards this first time microscope carrier so that this template contacts this first optics glue-line; And
According to the feedback signal of this three gaps sensing apparatus, control that this moves first on the stop position of microscope carrier so that this template impresses this pattern on this first optics glue-line.
25. manufacture method as claimed in claim 20 is characterized in that, this first solidification equipment comprises a ultraviolet lamp, and step f is implemented by the following step:
To this first vacuum chamber vacuum breaker; And
Utilize the first optics glue-line of this ultraviolet lamp irradiating ultraviolet light, so that the first optics glue-line of this impression solidify to form this first optical layers in this impression.
26. manufacture method as claimed in claim 25, it is characterized in that this first time microscope carrier is transparent, this ultraviolet lamp is arranged at this first time microscope carrier below, in step f, this ultraviolet lamp from this first time microscope carrier below towards this on first microscope carrier shine this ultraviolet light.
27. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a thimble, runs through this microscope carrier setting on first, and step g also comprises the following step:
Make this on first microscope carrier move away from this first time microscope carrier, make this thimble protrude in this microscope carrier on first simultaneously, with this template of bending.
28. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a blowning installation, is arranged at by this first time microscope carrier, and step g also comprises the following step:
Make this on first microscope carrier move away from this first time microscope carrier, utilize this blowning installation to blow simultaneously towards this template and this first optical layers.
29. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device also comprises two magnet and two fixed heads, and this magnet is arranged at this on second in the microscope carrier, and step j is implemented by the following step:
By this fixed head to should magnet being adsorbed in this on second on the microscope carrier, to fix this diaphragm in this on second on the microscope carrier.
30. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device also comprises an instrument, this instrument comprises two vacuum cups, this vacuum pressing-combining device also comprises two magnet and two fixed heads, and this magnet is arranged at this on second in the microscope carrier, and step j is implemented by the following step:
This two fixed head is arranged at by this two vacuum cup;
This diaphragm is tiled on this instrument;
Utilize this vacuum cup to adsorb this diaphragm;
This instrument is stretched in this second vacuum chamber;
Make this diaphragm be attached at this on second on the microscope carrier, and make this fixed head be adsorbed in this on second on the microscope carrier by this magnet;
Discharge this vacuum cup; And
Shift out this instrument.
31. manufacture method as claimed in claim 30 is characterized in that, this on second microscope carrier comprise a plurality of passages, step j also comprises the following step:
This passage is bled with this diaphragm of vacuum suction in this on second on the microscope carrier.
32. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device comprises three axis servomotors, with this on second microscope carrier be connected, step l also comprises the following step:
Independent this three axis servomotor of control, with drive this on second microscope carrier move towards this second time microscope carrier.
33. manufacture method as claimed in claim 32 is characterized in that, this vacuum pressing-combining device also comprises three gap sensing apparatus, and to being arranged at this second time microscope carrier by three axis servomotors, step l is implemented by the following step:
Independent this three axis servomotor of control, with drive this on second microscope carrier move towards this second time microscope carrier so that this diaphragm is contacted with on this second optics glue-line; And
According to the feedback signal of this three gaps sensing apparatus, control that this moves second on the stop position of microscope carrier so that this diaphragm concora crush is on this second optics glue-line.
34. manufacture method as claimed in claim 20 is characterized in that, this second solidification equipment comprises a ultraviolet lamp, and step m is implemented by the following step:
To this second vacuum chamber vacuum breaker; And
Utilize this ultraviolet lamp irradiating ultraviolet light in this second optics glue-line, so that this second optics glue-line solidify to form this second optical layers.
35. manufacture method as claimed in claim 34, it is characterized in that, this on second microscope carrier be transparent, this ultraviolet lamp is arranged at this microscope carrier top on second, in step m, this ultraviolet lamp the microscope carrier top shines this ultraviolet light towards this second time microscope carrier from this on second.
36. manufacture method as claimed in claim 20 is characterized in that, this second time microscope carrier also comprises a heater, and step l also comprises the following step:
Utilize this heater to heat this second optics glue-line.
37. manufacture method as claimed in claim 20 is characterized in that, this diaphragm has an alignment structure, and step l also comprises the following step:
Utilize this diaphragm to impress this alignment structure on this second optics glue-line.
CN2011100509802A 2010-12-29 2011-02-25 Vacuum imprinting device, vacuum compressing device and manufacturing method of layered optical component Pending CN102173238A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW099146582 2010-12-29
TW99146582 2010-12-29

Publications (1)

Publication Number Publication Date
CN102173238A true CN102173238A (en) 2011-09-07

Family

ID=44516568

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2011100509802A Pending CN102173238A (en) 2010-12-29 2011-02-25 Vacuum imprinting device, vacuum compressing device and manufacturing method of layered optical component
CN201110434308.3A Active CN102765240B (en) 2010-12-29 2011-12-15 Vacuum imprinting apparatus, vacuum press-bonding apparatus, and manufacturing method for laminated optical device

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201110434308.3A Active CN102765240B (en) 2010-12-29 2011-12-15 Vacuum imprinting apparatus, vacuum press-bonding apparatus, and manufacturing method for laminated optical device

Country Status (2)

Country Link
CN (2) CN102173238A (en)
TW (1) TWI461283B (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103373094A (en) * 2012-04-11 2013-10-30 得利环球有限公司 Micro-contact printing equipment and method
TWI453127B (en) * 2011-12-16 2014-09-21
CN104339813A (en) * 2013-07-26 2015-02-11 盟立自动化股份有限公司 Vacuum attachment equipment and attaching method
CN105093707A (en) * 2015-08-19 2015-11-25 武汉华星光电技术有限公司 Liquid crystal panel cell forming device and method
CN105711228A (en) * 2011-12-30 2016-06-29 盐城三笑餐饮有限公司 Substrate attaching method and attaching unit
CN106200262A (en) * 2016-08-31 2016-12-07 苏州天仁微纳智能科技有限公司 Vacuum negative pressure nanometer press printing method
CN106573264A (en) * 2014-08-12 2017-04-19 图林根卡拉陶瓷有限公司 Device and process for coating objects
CN106864058A (en) * 2015-12-11 2017-06-20 佳能株式会社 The method of imprinting apparatus and impressing local field
WO2019109437A1 (en) * 2017-12-08 2019-06-13 武汉华星光电半导体显示技术有限公司 Device for laminating protective film, and laminating method
CN111016094A (en) * 2019-12-28 2020-04-17 吉丽雄 Modular demolding equipment based on image recognition and working method thereof
CN111594517A (en) * 2020-05-26 2020-08-28 中国飞机强度研究所 Vacuum strain gauge pasting and pressing device and method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6412317B2 (en) * 2013-04-24 2018-10-24 キヤノン株式会社 Imprint method, imprint apparatus, and article manufacturing method
CN104588274A (en) * 2013-10-30 2015-05-06 鸿富锦精密工业(深圳)有限公司 Film forming device, and film forming method
TWI549870B (en) * 2014-06-05 2016-09-21 中勤實業股份有限公司 A substrate carrier and a transmission device for the same

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW434495B (en) * 1999-03-31 2001-05-16 Lin Gu Chin Image servo positioning and path-tracking control system
CN1503600A (en) * 2002-11-27 2004-06-09 铼宝科技股份有限公司 Apparatus and method for packaging plane display device
CN1800975A (en) * 2005-11-28 2006-07-12 中国科学院光电技术研究所 Stepped and repeated illuminating and nano-imprinting device
CN101323152A (en) * 2008-06-20 2008-12-17 艾逖恩机电(深圳)有限公司 Thimble module and method for separating wafer and blue tape using the module
CN101336018A (en) * 2007-06-27 2008-12-31 东莞彩显有机发光科技有限公司 Packaged solderless method and apparatus of organic electroluminescent device
CN201317149Y (en) * 2008-12-17 2009-09-30 李锦泉 Two-patch lining device
WO2010016588A1 (en) * 2008-08-08 2010-02-11 旭硝子株式会社 Board holding device, board holding method, and method of manufacturing laminated glass
CN101765497A (en) * 2007-07-30 2010-06-30 旭硝子株式会社 Curable resin composition, transparent laminate using the same, and method for producing the transparent laminate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI322754B (en) * 2006-05-18 2010-04-01 Molecular Imprints Inc Method for expelling gas positioned between a substrate and a mold
US7500431B2 (en) * 2006-01-12 2009-03-10 Tsai-Wei Wu System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure
TWI274654B (en) * 2006-01-26 2007-03-01 Apticon Inc Tape-to-roll forming method for surface microstructure of light sensitive resin layer and optical film manufactured according to the method
CN100449336C (en) * 2006-02-28 2009-01-07 佳能株式会社 Optical element and method of manufacturing optical element
CN101403855A (en) * 2008-11-07 2009-04-08 南京大学 Ultraviolet/hot pressing curing type nano-printing method and stamping press
TWI395655B (en) * 2009-01-16 2013-05-11 Chenming Mold Ind Corp Microstructure forming device and method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW434495B (en) * 1999-03-31 2001-05-16 Lin Gu Chin Image servo positioning and path-tracking control system
CN1503600A (en) * 2002-11-27 2004-06-09 铼宝科技股份有限公司 Apparatus and method for packaging plane display device
CN1800975A (en) * 2005-11-28 2006-07-12 中国科学院光电技术研究所 Stepped and repeated illuminating and nano-imprinting device
CN101336018A (en) * 2007-06-27 2008-12-31 东莞彩显有机发光科技有限公司 Packaged solderless method and apparatus of organic electroluminescent device
CN101765497A (en) * 2007-07-30 2010-06-30 旭硝子株式会社 Curable resin composition, transparent laminate using the same, and method for producing the transparent laminate
CN101323152A (en) * 2008-06-20 2008-12-17 艾逖恩机电(深圳)有限公司 Thimble module and method for separating wafer and blue tape using the module
WO2010016588A1 (en) * 2008-08-08 2010-02-11 旭硝子株式会社 Board holding device, board holding method, and method of manufacturing laminated glass
CN201317149Y (en) * 2008-12-17 2009-09-30 李锦泉 Two-patch lining device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453127B (en) * 2011-12-16 2014-09-21
CN105711228B (en) * 2011-12-30 2018-10-16 盐城三笑餐饮有限公司 Method for bonding substrate and fitting unit
CN105711228A (en) * 2011-12-30 2016-06-29 盐城三笑餐饮有限公司 Substrate attaching method and attaching unit
CN103373094A (en) * 2012-04-11 2013-10-30 得利环球有限公司 Micro-contact printing equipment and method
CN104339813A (en) * 2013-07-26 2015-02-11 盟立自动化股份有限公司 Vacuum attachment equipment and attaching method
CN106573264B (en) * 2014-08-12 2019-07-16 图林根卡拉陶瓷有限公司 Device and method for coating of objects
CN106573264A (en) * 2014-08-12 2017-04-19 图林根卡拉陶瓷有限公司 Device and process for coating objects
CN105093707A (en) * 2015-08-19 2015-11-25 武汉华星光电技术有限公司 Liquid crystal panel cell forming device and method
CN106864058A (en) * 2015-12-11 2017-06-20 佳能株式会社 The method of imprinting apparatus and impressing local field
CN106864058B (en) * 2015-12-11 2019-09-10 佳能株式会社 The method of imprinting apparatus and coining local field
CN106200262A (en) * 2016-08-31 2016-12-07 苏州天仁微纳智能科技有限公司 Vacuum negative pressure nanometer press printing method
WO2019109437A1 (en) * 2017-12-08 2019-06-13 武汉华星光电半导体显示技术有限公司 Device for laminating protective film, and laminating method
CN111016094A (en) * 2019-12-28 2020-04-17 吉丽雄 Modular demolding equipment based on image recognition and working method thereof
CN111594517A (en) * 2020-05-26 2020-08-28 中国飞机强度研究所 Vacuum strain gauge pasting and pressing device and method

Also Published As

Publication number Publication date
CN102765240A (en) 2012-11-07
TWI461283B (en) 2014-11-21
TW201226161A (en) 2012-07-01
CN102765240B (en) 2015-06-10

Similar Documents

Publication Publication Date Title
CN102173238A (en) Vacuum imprinting device, vacuum compressing device and manufacturing method of layered optical component
CN1890604B (en) Device and method for large area lithography
JP6021606B2 (en) Imprint apparatus, article manufacturing method using the same, and imprint method
JP5787691B2 (en) Imprint apparatus and article manufacturing method using the same
JP5744590B2 (en) Imprint method, mold, and manufacturing method of article using them
CN101770937A (en) Resin cladding method and resin cladding device
CN102371748B (en) Roll mold, method for fabricating the same and method for fabricating thin film pattern using the same
EP2930006B1 (en) Roller-type pressurization device, imprinter, and roller-type pressurization method
EP2815868B1 (en) Imprint device and imprint method
CN105584030A (en) Imprint method, imprint apparatus, mold, and product manufacturing method
JPWO2005120810A1 (en) Nanoimprint system
CN103257524A (en) Impressing apparatus and impressing method
CN105936124A (en) Imprinting device
KR100841172B1 (en) Nanoimprinting apparatus for imprinting pattern using composite process in vacuum chamber
KR101679560B1 (en) Imprinting Apparatus
KR20170067665A (en) Apparatus and method for imprinting
TWI654134B (en) Method and device for embossing a nano structure
CN101930168B (en) Vacuum forming apparatus and method for vacuum forming of substrate
KR100755233B1 (en) Imprinting lithography apparatus
KR20160004551A (en) Apparatus for large area print processing
KR20170077869A (en) Roll to roll imprint apparatus for micro polymer stencil Continuous fabrication and method of micro polymer stencil continuous fabrication by using the same
WO2014013563A1 (en) Imprinting device
KR101957493B1 (en) Equipment for fabricating micro-pattern of high aspect ratio and control method thereof
KR101299919B1 (en) Nano-imprinting apparatus and nano-imprinting method for using the same
CN209813364U (en) Micro-nano hot stamping equipment based on elastic template

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20110907