TWI708407B - Manufacturing method of hermetic package - Google Patents

Abstract

The present invention provides a method for manufacturing an airtight package, which can join the glass cover and the container by irradiating the laser light in a state where the glass cover and the container are firmly sealed to the sealing material, thereby improving the airtightness.

The method for manufacturing the hermetic package of the present invention is characterized in that it is a method of manufacturing the hermetic package in which the containers 3A to 3C are sealed with a glass lid 5, and includes the following steps: preparing a transparent substrate 7 for tightly contacting the glass lid 5 ; In the state where the sealing material 4A is arranged between the container 3A~3C and the glass cover 5, the plunger 12 (forcing member) applies force to the container 3A~3C so that the glass cover 5 is in close contact with the transparent substrate 7 And in the state where the glass cover 5 is in close contact with the transparent substrate 7 from the transparent substrate 7 side to the sealing material 4A, laser light L is irradiated, and the containers 3A to 3C and the glass cover 5 are joined by the sealing material 4A.

Description

Manufacturing method of hermetic package

The present invention relates to a method for manufacturing an airtight package.

Previously, in order to mount and seal components such as LEDs, airtight packages were used. Such an airtight device is formed by joining a container capable of arranging components and the like with a cover member for sealing the container. It has been studied to improve reliability by sealing components and the like in an airtight package to suppress contact with components such as moisture. Patent Document 1 below discloses an airtight package in which a container made of glass ceramic and a glass lid are joined via a sealing material. In Patent Document 1, as the above-mentioned sealing material, a glass frit containing low melting point glass is used. In addition, in Patent Document 1, by firing the above-mentioned sealing material to soften it, a container made of glass ceramic and a glass lid are joined. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2014-236202

[Problem to be Solved by the Invention] When a device with low heat resistance is mounted, if the glass frit is fired as in Patent Document 1 to soften it, the heating during firing may cause thermal degradation of the device characteristics. As a solution to this problem, a method of softening the glass frit by irradiating the glass frit with laser light and locally heating is considered. However, since the shape of the container is actually uneven, it is difficult to ensure that the glass lid and the container are in a state in which the sealing material is securely sealed when irradiating laser light. Therefore, there are cases where the airtightness of the package cannot be sufficiently improved. The object of the present invention is to provide a method for manufacturing an airtight package, which can join the glass cover and the container by irradiating the laser light in a state where the glass cover and the container are firmly attached to the sealing material, thereby improving the gas Tightness. [Technical Means to Solve the Problem] The manufacturing method of the hermetic package of the present invention is characterized in that it is a method of manufacturing the hermetic package in which the container is sealed with a glass lid, and has the following steps: prepare the transparent glass lid to be sealed tightly Substrate; In the state where the sealing material is arranged between the container and the glass lid, the urging member applies force to the container to make the glass lid adhere to the transparent substrate; and in the state that the glass lid adheres to the transparent substrate The transparent substrate irradiates the sealing material with laser light so that the container and the glass cover are joined by the sealing material. Alternatively, the present invention is a method of manufacturing a plurality of airtight packages, and a plurality of force applying members are provided for each of the plurality of containers to independently force each of the containers to make a plurality of glass lids Adhere to the transparent substrate. In the present invention, it is preferable to apply a force to the substantially central portion of the bottom of the container, and to force the bottom of the container in a state where it can be tilted, so that the glass cover is in close contact with the transparent substrate. In the present invention, it is also possible to provide a receiving member between the bottom of the container and the force applying member, and force the container by applying force to the receiving member by the force applying member. Preferably, it is formed in such a manner that the first surface of the receiving member in contact with the bottom of the container and the bottom are in close contact. Preferably, a concave portion is formed on the second surface of the urging member side of the receiving member. By contacting the urging member to the concave portion and applying force, the receiving member and the container are urged in a state where the bottom can be inclined to make the glass The cover is in close contact with the transparent substrate. In the present invention, the urging member may have a rod-shaped portion and a spring member connected to the rod-shaped portion. [Effects of the Invention] According to the present invention, it is possible to provide a method for manufacturing a hermetic package, which can join the glass cover and the container by irradiating the laser light in a state where the glass cover and the container are firmly sealed to the sealing material , Which can improve air tightness.

Hereinafter, preferred embodiments will be described. However, the following embodiments are only examples, and the present invention is not limited to the following embodiments. In addition, in each drawing, there are cases where members having substantially the same function refer to the same symbol. (Hermetically sealed device) Fig. 1 is a schematic front sectional view of an airtight device according to an embodiment of the present invention. As shown in FIG. 1, the hermetic package 1 includes a container 3 and a glass lid 5 that seals the container 3. The container 3 has a bottom 3a and a frame-shaped side wall 3b arranged on the bottom 3a. The container 3 is made of ceramics, glass ceramics, etc., for example. Examples of ceramics include alumina, aluminum nitride, zirconia, and mullite. Examples of glass ceramics include LTCC (Low Temperature Co-fired Ceramics). As a specific example of LTCC, a sintered body of inorganic powder such as titanium oxide or niobium oxide and glass powder can be cited. The bottom part 3a and the side wall part 3b may be integrally formed. Alternatively, the container 3 can also be formed by the bottom 3a and the side wall 3b of an independent individual. As the material of the glass cover 5, various glasses can be used. Examples of glass include alkali-free glass, borosilicate glass, soda lime glass, and the like. The hermetic package 1 includes a sealing material layer 4 arranged between the side wall portion 3 b of the container 3 and the glass lid 5. The container 3 and the glass lid 5 are joined by the sealing material layer 4. The sealing material layer 4 is composed of a sealing material containing low-melting glass powder. The low-melting glass powder can soften the sealing material at a lower temperature, and can further suppress the thermal degradation of the component. As the low melting point glass powder, for example, Bi ₂ O ₃ based glass powder, SnO-P ₂ O ₅ based glass powder, V ₂ O ₅ -TeO ₂ based glass powder, etc. can be used. As described below, in order to increase the absorption of laser light when the sealing material is softened by irradiating laser light, at least one selected from CuO, Cr ₂ O ₃ , Fe ₂ O ₃ , MnO ₂ and the like can also be included in the glass pigment. In addition, the sealing material may include a low-expansion refractory filler, a laser light absorbing material, or the like in addition to the above-mentioned low-melting glass powder. As low-expansion refractory fillers, for example, cordierite, willemite, alumina, zirconium phosphate compounds, zircon, zirconia, tin oxide, quartz glass, β-quartz solid solution, β-eusia Stone, spodumene. In addition, as the laser light absorbing material, for example, at least one metal selected from Fe, Mn, Cu, and the like, or a compound containing the metal such as oxide. As described below, the container 3 and the glass cover 5 of this embodiment are irradiated with laser light to soften the sealing material to form the sealing material layer 4. (Manufacturing method) (First embodiment) Figs. 2(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. Fig. 3 is a schematic plan cross-sectional view for explaining the manufacturing method of the hermetic package of the first embodiment. 4(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. Furthermore, in Fig. 4(a), the containers 3A to 3C are schematically shown. In Fig. 4(b), the following plunger 12 is schematically shown. A plurality of glass covers 5 are prepared as shown in Fig. 2(a). On the other hand, a plurality of containers 3A to 3C shown in Fig. 4(a) are also prepared. It is preferable that the plural containers 3A to 3C all have the same shape. However, in reality, due to uneven manufacturing, the thickness of the container may be different or the bottom may be inclined. In this embodiment, the bottom of the container 3A is inclined, and the thickness of the container 3B is thicker than the thickness of the container 3C. Furthermore, in this specification, the so-called thickness of the container refers to the maximum dimension of the container along the direction in which the side wall extends. Next, as shown in FIG. 2(a), a sealing material 4A is arranged on each glass cover 5. The sealing material 4A is arranged on the part of the glass cover 5 that is joined to the container. The sealing material 4A of this embodiment is a glass frit containing a laser light absorbing material. The arrangement of the sealing material 4A can be performed, for example, by printing a paste obtained by mixing the sealing material 4A with a suitable organic binder. Next, firing is performed at a temperature above 400°C and below 600°C. Furthermore, the sealing material 4A can also be arranged on the side wall of the container. Next, as shown in FIG. 2(b), a first jig 6 having a transparent substrate 7 is prepared. The first jig 6 has a first jig side wall portion 8a for positioning the glass cover 5. As shown in FIG. 3, the first jig side wall portion 8a has a lattice-like shape in a plan view. The above-mentioned grid-like shape of the first jig side wall portion 8a corresponds to the shape of the planar shape of each glass cover 5. The first jig side wall portion 8a is provided so as to surround each glass cover 5 when the plurality of glass covers 5 are arranged on the transparent substrate 7. Thereby, a plurality of glass covers 5 can be positioned. Returning to Fig. 2(b), the first jig 6 has a second jig side wall portion 8b for positioning each container. The second jig side wall portion 8b has a lattice-like shape in a plan view similarly to the first jig side wall portion 8a. Furthermore, the first jig 6 has a jig fixing portion 6a for fixing a second jig described below. The jig fixing portion 6a is provided to surround the transparent substrate 7 in a plan view. In addition, as long as the first jig 6 has a transparent substrate 7, the structure of the first jig 6 is not particularly limited. Next, as shown in FIG. 2(b) and FIG. 3, each glass cover 5 is arranged on the transparent substrate 7 so as to be surrounded by the first jig side wall portion 8a. Next, as shown in FIG. 4(a), the sealing material 4A is interposed on each glass cover 5, and then the containers 3A to 3C are mounted. On the other hand, the second jig 9 is prepared as shown in FIG. 4(b). The second jig 9 has a jig bottom 9a, a plurality of urging members arranged to penetrate the jig bottom 9a, and a third jig side wall portion 9b provided on the jig bottom 9a. In this embodiment, the urging member is the plunger 12. The plunger 12 has a main body 13, a rod-shaped portion 14 protruding from the main body 13, and a spring member received in the main body 13 and connected to the rod-shaped portion 14. The shape of the front end of the rod-shaped portion 14 is not particularly limited, but is substantially hemispherical in this embodiment. Each plunger 12 is arranged at a position corresponding to the position where the containers 3A to 3C are arranged in the first jig 6 shown in FIG. 4(a). Furthermore, the second jig 9 is an example of a jig for urging the container 3A to 3C to the glass cover 5 side and urging the glass cover 5 to the transparent substrate 7 side. The second jig 9 has no configuration Specially limited. 5(a) and (b) are schematic front sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. In addition, in FIGS. 5 (a) and (b), the containers 3A to 3C and the plunger 12 are schematically shown. Next, as shown in Fig. 5(a), the third jig side wall portion 9b is connected to the jig fixing portion 6a of the first jig 6, and the rod-shaped portion 14 of each plunger 12 is connected to the container 3A~ The second fixture 9 is arranged at the bottom of the 3C. The position where each rod-shaped portion 14 contacts the bottom of the containers 3A to 3C is not particularly limited, and in this embodiment, it contacts the substantially central portion of the bottom. Next, fix the first jig 6 and the second jig 9. In this embodiment, the first jig 6 and the second jig 9 are fixed by screws, but the above-mentioned fixing method is not limited to this. Here, in the step shown in FIG. 4(b), the length of the portion protruding from the body 13 in the rod-shaped portion 14 of each plunger 12 is longer than when the first jig 6 and the second jig 9 are fixed The distance between each main body 13 and the containers 3A to 3C is long. Thereby, when the first jig 6 and the second jig 9 are fixed as shown in FIG. 5(a), the rod-shaped portion 14 of each plunger 12 is pressed into the main body 13 by the bottoms of the containers 3A to 3C. At this time, the spring member of each plunger 12 is contracted. By the restoring force of the spring member, each plunger 12 urges the containers 3A to 3C to the glass cover 5 side, and urges the glass cover 5 to the transparent substrate 7 side. force. In this way, each of the containers 3A to 3C is independently urged by the plungers 12 provided for each of the containers 3A to 3C, so that each of the glass covers 5 is in close contact with the transparent substrate 7. In this embodiment, the spring member of each plunger 12 contracts according to the thickness of the containers 3A to 3C or the shape of the bottom, and each plunger 12 urges the containers 3A to 3C. With this, even when the thickness of the containers 3A to 3C is different or when the bottom is inclined, each glass cover 5 can be reliably brought into close contact with the transparent substrate 7. At this time, in a state where each glass cover 5 is in close contact with the transparent substrate 7, each plunger 12 urges the containers 3A to 3C to the glass cover 5 side. As a result, the glass lid 5 and the containers 3A to 3C can be brought into close contact with the sealing material 4A more reliably. Next, as shown in FIG. 5(b), the laser light L is irradiated to the sealing material 4A from the transparent substrate 7 side with each glass cover 5 in close contact with the transparent substrate 7. Thereby, the sealing material 4A is softened, and each glass cover 5 and the container 3A-3C are joined. At this time, the sealing material layer 4 shown in FIG. 1 is formed, and a plurality of hermetic packages can be obtained. In the present embodiment, the containers 3A to 3C and each glass cover 5 can be more securely adhered to the sealing material 4A, and the containers 3A to 3C and each glass cover 5 are joined by irradiating the laser light L. Thus, the airtightness of each airtight device can be effectively improved, and the reliability can be effectively improved. In addition, a plurality of hermetic packages can be obtained at the same time, and productivity can be improved. Hereinafter, by comparing the present embodiment with a comparative example, the effect of the present embodiment will be described in more detail. 8(a) and (b) are schematic front cross-sectional views for explaining the method of manufacturing the hermetic package of the comparative example. In the comparative example, the second jig 109 is prepared as shown in FIG. 8(a). The second jig 109 has a jig bottom portion 9a and a third jig side wall portion 9b like the second jig of the present embodiment, but does not have an urging member. In the second jig 109 of the comparative example, a stage 109c is provided on the jig bottom 9a. A first jig side wall portion 8a and a second jig side wall portion 8b that are the same as the first jig in this embodiment are provided on the stage 109c. Next, the containers 3A to 3C in which the sealing material 4A is arranged on the side wall portion are placed on the stage 109c. Next, the sealing material 4A is interposed on the containers 3A to 3C, and the glass covers 5 are respectively mounted. On the other hand, the first jig 106 having the transparent substrate 7 shown in FIG. 8(b) is prepared. The first jig 106 is configured in the same manner as the first jig of this embodiment, except that it does not have the first jig side wall portion 8a and the second jig side wall portion 8b. Next, as shown in 8(b), the sealing material 4A is irradiated with laser light L in a state where each glass cover 5 is pressed by the transparent substrate 7, thereby joining the containers 3A to 3C and each glass cover 5. In the comparative example, as shown in FIG. 8(b), the thickness of the container 3C is thinner than that of the container 3B, so it is difficult to make the glass cover 5 on the container 3C and the transparent substrate 7 closely contact. Since the bottom of the container 3A is inclined, the glass cover 5 on the container 3A is in an inclined state in a state where it is arranged on the stage 109c from the bottom side. Therefore, it is difficult to sufficiently closely contact the glass cover 5 and the transparent substrate 7 on the container 3A. As a result, it is difficult to make each glass lid 5 and the containers 3A and 3C firmly adhere to the sealing material 4A, and there are cases where the airtightness of the hermetic package cannot be sufficiently improved. On the other hand, in this embodiment, there are the following steps: as shown in FIG. 5(a), in a state where the sealing material 4A is arranged between the containers 3A to 3C and each glass lid 5, each The plunger 12 urges the containers 3A to 3C to bring each glass cover 5 into close contact with the transparent substrate 7. As a result, as shown in FIG. 5(b), each glass cover 5 and the containers 3A to 3C can be reliably sealed to the sealing material 4A by irradiating the laser light L to remove each glass cover 5 and The containers 3A to 3C are joined. As a result, an airtight package with high airtightness can be obtained. Furthermore, in this embodiment, by urging the substantially central portion of the bottoms of the containers 3A to 3C, the bottoms of the containers 3A to 3C are energized in a tiltable state. Thereby, the glass cover 5 can be made to adhere to the transparent substrate 7 more reliably, and each glass cover 5 and the containers 3A-3C can be made to adhere to the sealing material 4A more reliably. In FIGS. 5(a) and (b), an example is shown in which one plunger 12 applies force to the container 3A, but a plurality of plungers 12 may also apply force to the container 3A. In this case, the uniformity of the force applied to the bottom of the container 3A in the in-plane direction can be improved. The same applies when the container 3B and the container 3C are urged by a plurality of plungers 12. Thereby, the containers 3A to 3C and the respective glass lids 5 can be brought into closer contact with the sealing material 4A. The front end of the rod-shaped portion 14 of the plunger 12 preferably has a curved shape such as a substantially hemisphere as in the present embodiment. Thereby, even when the bottom is inclined like the container 3A, the rod-shaped portion 14 can be made to better contact the bottom, and force can be applied more reliably. Thereby, the glass cover 5 and the container 3A can be made to adhere to the sealing material 4A more reliably. In the second jig 9, the urging member is the plunger 12 having a spring member, but the urging member is not limited to this. The urging member may be, for example, a pneumatic plunger or a spring member. Furthermore, the manufacturing method of this embodiment is a method of manufacturing a plurality of hermetic packages, but the present invention can also be used as a method of manufacturing one hermetic package. In this case, as in the present embodiment, even when the bottom of the container 3A is inclined, etc., it is possible to irradiate the laser light with the glass lid 5 and the container 3A firmly in contact with the sealing material 4A. L and the glass lid 5 and the container 3A are joined. As a result, an airtight package with high airtightness can be obtained. In this embodiment, since there is a step of arranging the glass cover 5 on the transparent substrate 7, the glass cover 5 can be brought into close contact with the transparent substrate 7 more reliably. As a result, the glass cover 5 and the containers 3A to 3C can be joined by irradiating the laser light L in a state where the glass cover 5 and the containers 3A to 3C are more securely attached to the sealing member 4A. Furthermore, the step of disposing the glass cover 5 on the transparent substrate 7 may not necessarily be included. Fig. 6 (a) and (b) are schematic front cross-sectional views for explaining the method of manufacturing the hermetic package according to the modification of the first embodiment. In this modified example, a second jig 39 having a plurality of plungers 12 as shown in FIG. 6(a) is prepared. The second jig 39 has the same structure as the second jig of the first embodiment, except that the second jig side wall portion 8b of the first embodiment is provided on the jig bottom 9a via the supporting members 9c and 9d. . On the other hand, containers 3A to 3C in which the sealing member 4A is arranged on the side wall are prepared. Next, as shown in FIG. 6(a), the containers 3A to 3C are arranged so as to be supported by the second jig side wall portion 8b and the rod-shaped portion 14 of each plunger 12. Next, the sealing material 4A is interposed on the containers 3A to 3C, and the glass covers 5 are respectively mounted. At this time, the spring member of each plunger 12 is contracted by the weight of the containers 3A to 3C and each glass cover 5. Furthermore, in this modification, the glass cover 5 on the container 3B among the glass covers 5 on the containers 3A to 3C is farthest from the bottom 9a of the jig. The bottom of the container 3A is inclined, so the container 3A and the lid 5 on the container 3A are arranged inclined. On the other hand, the first jig 36 having the transparent substrate 7 shown in FIG. 6(b) is prepared. The first jig 36 has the same structure as the first jig of the first embodiment except that it does not have the first jig side wall portion 8a and the second jig side wall portion 8b shown in FIG. 5(b). Next, as shown in FIG. 6(b), each glass cover 5 is pressed by the transparent substrate 7. At this time, the transparent substrate 7 first presses the glass cover 5 on the container 3B. Thereby, the spring member of the plunger 12 contracts, and the transparent substrate 7 and the glass cover 5 move to the plunger 12 side. By this movement, the transparent substrate 7 also contacts the glass cover 5 on the container 3A and the glass cover 5 on the container 3C, so that the transparent substrate 7 presses the glass covers 5 on the containers 3A to 3C. The force of the transparent substrate 7 pressing each glass cover 5 causes the spring member of each plunger 12 to contract, and the restoring force of the spring member urges the containers 3A to 3C to the glass cover 5 side, and the glass The cover 5 urges the transparent substrate 7 side. Thereby, each glass cover 5 is brought into close contact with the transparent substrate 7. Furthermore, the glass cover 5 on the container 3A is arranged obliquely with respect to the transparent substrate 7, but the aforementioned force causes the glass cover 5 on the container 3A and the container 3A to rotate in such a way that the glass cover 5 is in close contact with the transparent substrate 7 . Thereby, the glass cover 5 on the container 3A is also in close contact with the transparent substrate 7. Next, by irradiating the sealing material 4A with laser light L in a state where each glass cover 5 is in close contact with the transparent substrate 7, the containers 3A to 3C and each glass cover 5 are joined. In this modified example, each glass cover 5 and the containers 3A to 3C may be joined by irradiating the laser light L in a state where the glass cover 5 and the containers 3A to 3C are firmly attached to the sealing material 4A. However, when there is a step of arranging the glass cover 5 on the transparent substrate 7 as in the first embodiment, the glass covers 5 can be more easily adhered to the transparent substrate 7, and the glass covers 5 and the container 3A can be made ~3C is more easily adhered to the sealing material 4A. (Second Embodiment) Figs. 7(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the second embodiment. In the manufacturing method of this embodiment, the same steps as in the first embodiment are performed before the steps shown in FIG. 4(b). Next, as shown in FIG. 7(a), the receiving members 25 are respectively arranged on the bottoms of the containers 3A to 3C. Each receiving member 25 has a first surface 25a on the side of the containers 3A to 3C, and a second surface 25b facing the first surface 25a. Each first surface 25a is provided so as to be in close contact with the bottom of the containers 3A to 3C, respectively. The second surface 25b of each receiving member 25 is provided with a recessed portion 25c, respectively. Each recessed portion 25c is provided at a position where the rod-shaped portion 14 of each plunger 12 contacts when a force is applied to the containers 3A to 3C. The shape of the recessed portion 25c is not particularly limited. In the present embodiment, it is a shape corresponding to the shape of the front end of the rod-shaped portion 14. More specifically, the shape of the recessed portion 25c is substantially hemispherical. Next, as shown in Figure 7(b), the third jig side wall portion 9b is connected to the jig fixing portion 6a of the first jig 6, and the rod-shaped portion 14 of each plunger 12 is in contact with each receiving The second jig 9 is arranged in the manner of the recess 25c of the member 25. Next, fix the first jig 6 and the second jig 9. Thereby, each plunger 12 is brought into contact with the concave portion 25c of each receiving member 25 and urged, and the receiving member 25 and the containers 3A to 3C are urged in a state where the bottom can be tilted, so that the glass lid 5 is brought into close contact On the transparent substrate 7. In this embodiment, the receiving members 25 are provided between the bottom of the containers 3A to 3C and the plungers 12, and the containers 3A to 3C are urged by urging the receiving members 25, so that it can be applied to The force at the bottom of the containers 3A to 3C is dispersed. Furthermore, since the first surface 25a of each receiving member 25 is in close contact with the bottom of the containers 3A to 3C, the force applied to the bottom can be effectively dispersed. Thus, the containers 3A to 3C are not easily damaged. Since the shape of the concave portion 25c of the receiving member 25 corresponds to the shape of the front end of the rod-shaped portion 14 of the plunger 12, the contact area between the rod-shaped portion 14 and the receiving member 25 can be increased. Thereby, when a force is applied to the containers 3A to 3C, the bottom can be more reliably brought into a state where the bottom can be inclined. Furthermore, the force applied to the bottom of the containers 3A to 3C can be further dispersed. Furthermore, the receiving member 25 may not be provided with the recess 25c. In this case, the force applied to the bottom of the containers 3A to 3C can also be dispersed by the plungers 12. Next, the laser light L is irradiated from the transparent substrate 7 side with each glass cover 5 in close contact with the transparent substrate 7. In this embodiment, each glass cover 5 and the containers 3A to 3C may be joined by irradiating the laser light L in a state where the glass cover 5 and the containers 3A to 3C are firmly attached to the sealing material 4A. As a result, an airtight package with high airtightness can be obtained.

1‧‧‧Air-sealed packaging 3‧‧‧Container 3a‧‧‧Bottom 3A‧‧‧Container 3b‧‧‧Side wall 3B‧‧‧Container 3C‧‧‧Container 4‧‧‧Sealing material layer 4A‧‧‧ Sealing material 5‧‧‧Glass cover 6‧‧‧The first fixture 6a‧‧‧The fixture fixing part 7‧‧‧Transparent substrate 8a‧‧‧The first fixture side wall 8b‧‧‧The second fixture side wall Part 9‧‧‧Second fixture 9a‧‧‧Jig bottom 9b‧‧‧3rd fixture side wall 9c, 9d‧‧Support member 12‧‧‧Plunger 13‧‧‧Body 14‧‧‧Bar Shape part 25‧‧‧Receiving member 25a‧‧‧First surface 25b‧‧‧Second surface 25c‧‧‧Concave 36‧‧‧First jig 39‧‧‧Second jig 106‧‧‧First jig 109‧‧‧Second fixture 109c‧‧‧Carrier L‧‧‧Laser

Fig. 1 is a schematic front cross-sectional view of an airtight device according to an embodiment of the present invention. 2(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. Fig. 3 is a schematic plan cross-sectional view for explaining the manufacturing method of the hermetic package according to the first embodiment of the present invention. 4(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package according to the first embodiment of the present invention. 5(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package according to the first embodiment of the present invention. Fig. 6 (a) and (b) are schematic front cross-sectional views for explaining the method of manufacturing the hermetic package according to the modification of the first embodiment. 7(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package according to the second embodiment of the present invention. 8(a) and (b) are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the comparative example.

3A: Container

3B: Container

3C: Container

4A: Sealing material

5: Glass cover

6: The first fixture

6a: Fixture part

7: Transparent substrate

8a: The side wall of the first jig

8b: The side wall of the second jig

9: The second fixture

9a: bottom of fixture

9b: The side wall of the third jig

12: Plunger

13: body

14: Rod

L: Laser light

Claims (6)

A method for manufacturing an airtight package, which is a method of manufacturing an airtight package that uses a glass lid to seal a container, and includes the following steps: preparing a transparent substrate for tightly contacting the glass lid; In the state where the sealing material is arranged between the container, the urging member urges the container to make the glass cover adhere to the transparent substrate; and in the state where the glass cover is adhered to the transparent substrate from the transparent substrate side The sealing material is irradiated with laser light, and the container and the glass cover are joined by the sealing material; and the bottom of the container can be tilted by applying force to the substantially central part of the bottom of the container In this state, a force is applied to make the glass cover closely adhere to the transparent substrate. For example, the manufacturing method of the hermetic package of claim 1, which is a method of manufacturing a plurality of the above-mentioned hermetic packages, and by providing a plurality of the above-mentioned urging members for each of the above-mentioned containers, each of the above-mentioned containers The force is applied independently, and a plurality of the glass covers are in close contact with the transparent substrate. The method for manufacturing an airtight package of claim 1 or 2, wherein a receiving member is provided between the bottom of the container and the force applying member, and the container is forced by the force applying member to the receiving member . The method of manufacturing an airtight package according to claim 3, wherein the first surface of the receiving member that is in contact with the bottom of the container is formed so as to be in close contact with the bottom. The method for manufacturing an airtight package according to claim 3, wherein a recess is formed on the second surface of the receiving member on the side of the urging member, and the urging member is brought into contact with the recess and urged, so that the bottom The said receiving member and the said container are urged|biased in the state which can be inclined, and the said glass cover is made to closely contact with the said transparent substrate. The method for manufacturing an airtight package of claim 1 or 2, wherein the force applying member has a rod-shaped portion and a spring member connected to the rod-shaped portion.

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