WO2018220909A1 - Method for producing airtight package - Google Patents

Method for producing airtight package Download PDF

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Publication number
WO2018220909A1
WO2018220909A1 PCT/JP2018/006117 JP2018006117W WO2018220909A1 WO 2018220909 A1 WO2018220909 A1 WO 2018220909A1 JP 2018006117 W JP2018006117 W JP 2018006117W WO 2018220909 A1 WO2018220909 A1 WO 2018220909A1
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WO
WIPO (PCT)
Prior art keywords
container
glass
transparent substrate
containers
glass lid
Prior art date
Application number
PCT/JP2018/006117
Other languages
French (fr)
Japanese (ja)
Inventor
浩士 荒川
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020197021808A priority Critical patent/KR102478227B1/en
Priority to CN201880029501.9A priority patent/CN110603235B/en
Publication of WO2018220909A1 publication Critical patent/WO2018220909A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52—Encapsulations
    • H01L33/54—Encapsulations having a particular shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52—Encapsulations
    • H01L33/56—Materials, e.g. epoxy or silicone resin

Definitions

  • the present invention relates to a method for manufacturing an airtight package.
  • an airtight package is used for mounting and sealing elements such as LEDs.
  • Such an airtight package is configured by joining a container in which an element or the like can be arranged and a cover member for sealing the container. It has been studied to seal the elements and the like in an airtight package to suppress contact of moisture and the like with the elements and improve reliability.
  • Patent Document 1 discloses an airtight package in which a container made of glass ceramics and a glass lid are joined via a sealing material.
  • a glass frit made of low-melting glass is used as the sealing material.
  • the container and glass lid which consist of glass ceramics are joined by baking and softening the said sealing material.
  • An object of the present invention is to provide a hermetic package that can enhance the airtightness by allowing the glass lid and the container to be joined by laser light irradiation in a state where the glass lid and the container are securely adhered to the sealing material. It is to provide a manufacturing method.
  • the manufacturing method of an airtight package of the present invention is a method of manufacturing an airtight package in which a container is sealed with a glass lid, the step of preparing a transparent substrate for closely attaching the glass lid, and between the container and the glass lid In a state where the sealing material is arranged, the step of urging the container with the urging member to bring the glass lid into close contact with the transparent substrate, and the state where the glass lid is brought into close contact with the transparent substrate, from the transparent substrate side to the sealing material And a step of irradiating a laser beam to join the container and the glass lid with a sealing material.
  • a method for producing a plurality of hermetic packages wherein each of the containers is independently urged by a plurality of urging members provided for each of the plurality of containers, and the plurality of glass lids are provided. You may make it contact
  • the bottom of the container in a tiltable state by urging the substantially central part of the bottom of the container so that the glass lid is in close contact with the transparent substrate.
  • the container may be urged by providing a receiving member between the bottom of the container and the urging member and urging the receiving member with the urging member. It is preferable that the first surface of the receiving member in contact with the bottom of the container is formed so as to be in close contact with the bottom. A concave portion is formed in the second surface of the receiving member on the biasing member side, and the biasing member is brought into contact with the concave portion and biased, thereby biasing the receiving member and the container with the bottom portion being tiltable. It is preferable that the glass lid is adhered to the transparent substrate.
  • the urging member may have a rod-shaped portion and a spring member connected to the rod-shaped portion.
  • the glass lid and the container in a state where the glass lid and the container are securely adhered to the sealing material, the glass lid and the container can be joined by irradiation with laser light, and the airtight package can be improved.
  • a manufacturing method can be provided.
  • FIG. 1 is a schematic front sectional view of an airtight package according to an embodiment of the present invention.
  • 2A and 2B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment.
  • FIG. 3 is a schematic plan sectional view for explaining the manufacturing method of the hermetic package according to the first embodiment of the present invention.
  • 4A and 4B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment of the present invention.
  • 5A and 5B are schematic front sectional views for explaining the method for manufacturing the hermetic package of the first embodiment of the present invention.
  • 6A and 6B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a modification of the first embodiment.
  • FIGS. 7A and 7B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package according to the second embodiment of the present invention.
  • FIGS. 8A and 8B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a comparative example.
  • FIG. 1 is a schematic front sectional view of an airtight package according to an embodiment of the present invention.
  • the hermetic package 1 includes a container 3 and a glass lid 5 that seals the container 3.
  • the container 3 has a bottom 3a and a frame-like side wall 3b disposed on the bottom 3a.
  • the container 3 is made of, for example, ceramic or glass ceramic.
  • the ceramic include aluminum oxide, aluminum nitride, zirconia, and mullite.
  • the glass ceramic include LTCC (Low Temperature Co-fired Ceramics).
  • LTCC Low Temperature Co-fired Ceramics
  • Specific examples of LTCC include a sintered body of an inorganic powder such as titanium oxide or niobium oxide and a glass powder.
  • the bottom part 3a and the side wall part 3b may be integrally formed. Alternatively, the container 3 may be formed of a separate bottom 3a and side wall 3b.
  • the material of the glass lid 5 can be used as the material of the glass lid 5.
  • the glass include alkali-free glass, borosilicate glass, soda lime glass, and the like.
  • the hermetic package 1 includes a sealing material layer 4 disposed between the side wall 3 b of the container 3 and the glass lid 5.
  • the container 3 and the glass lid 5 are joined by a sealing material layer 4.
  • the sealing material layer 4 is made of a sealing material containing a low-melting glass powder.
  • the low melting point glass powder can soften the sealing material at a lower temperature, and can further suppress the thermal deterioration of the element.
  • the low melting point glass powder for example, Bi 2 O 3 glass powder, SnO—P 2 O 5 glass powder, V 2 O 5 —TeO 2 glass powder or the like can be used.
  • the glass is selected from CuO, Cr 2 O 3 , Fe 2 O 3 , MnO 2 and the like in order to improve the absorption of the laser light. At least one pigment may be included.
  • the sealing material may contain a low expansion refractory filler, a laser light absorbing material and the like in addition to the low melting point glass powder.
  • a low expansion refractory filler include cordierite, willemite, alumina, zirconium phosphate compounds, zircon, zirconia, tin oxide, quartz glass, ⁇ -quartz solid solution, ⁇ -eucryptite, and spodumene.
  • the laser light absorbing material include compounds such as at least one metal selected from Fe, Mn, Cu and the like or an oxide containing the metal.
  • the container 3 and the glass lid 5 of the present embodiment soften the sealing material by irradiation with laser light to form the sealing material layer 4.
  • FIG. 2A and 2B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment.
  • FIG. 3 is a schematic plan cross-sectional view for explaining the manufacturing method of the hermetic package of the first embodiment.
  • 4A and 4B are schematic front sectional views for explaining the method for manufacturing the hermetic package of the first embodiment.
  • the containers 3A to 3C are schematically shown.
  • the plunger 12 mentioned later is shown schematically.
  • a plurality of glass lids 5 are prepared as shown in FIG.
  • the plurality of containers 3A to 3C are ideally all of the same shape.
  • the thickness of the container may be different or the bottom may be inclined due to manufacturing variations or the like.
  • the bottom of the container 3A is inclined, and the thickness of the container 3B is thicker than the thickness of the container 3C.
  • the thickness of a container means the largest dimension of the container along the direction where a side wall part is extended.
  • a sealing material 4A is disposed on each glass lid 5.
  • 4A of sealing materials are arrange
  • the sealing material 4A of the present embodiment is a glass frit containing a laser light absorbing material.
  • the arrangement of the sealing material 4A can be performed, for example, by printing a paste in which the sealing material 4A is mixed with an appropriate organic binder. Next, baking is performed at a temperature of 400 ° C. or higher and 600 ° C. or lower. In addition, you may arrange
  • a first jig 6 having a transparent substrate 7 is prepared.
  • the first jig 6 has a first jig side wall portion 8 a for positioning the glass lid 5.
  • the first jig side wall 8a has a lattice shape in plan view.
  • the lattice-like shape of the first jig side wall 8 a is a shape corresponding to the planar shape of each glass lid 5.
  • the first jig side wall 8 a is provided so as to surround each glass lid 5 when a plurality of glass lids 5 are arranged on the transparent substrate 7. Thereby, a plurality of glass lids 5 can be positioned.
  • the first jig 6 has a second jig side wall portion 8b for positioning each container. Similar to the first jig side wall 8a, the second jig side wall 8b has a lattice shape in plan view. Furthermore, the first jig 6 has a jig fixing portion 6a for fixing a second jig described later. The jig fixing portion 6a is provided so as to surround the transparent substrate 7 in plan view. In addition, the 1st jig
  • each glass lid 5 is disposed on the transparent substrate 7 so as to be surrounded by the first jig side wall 8 a.
  • the containers 3A to 3C are placed on the glass lids 5 with the sealing material 4A interposed therebetween.
  • a second jig 9 is prepared.
  • the second jig 9 includes a jig bottom 9a, a plurality of biasing members arranged so as to penetrate the jig bottom 9a, and a third jig side wall provided on the jig bottom 9a.
  • the urging member is a plunger 12.
  • the plunger 12 includes a main body 13, a rod-like portion 14 protruding from the main body 13, and a spring member that is accommodated in the main body 13 and connected to the rod-like portion 14.
  • the shape of the tip of the rod-shaped portion 14 is not particularly limited, but is substantially hemispherical in the present embodiment.
  • Each plunger 12 is disposed at a position corresponding to the position at which the containers 3A to 3C are disposed in the first jig 6 shown in FIG.
  • the second jig 9 is an example of a jig for urging the containers 3A to 3C toward the glass lid 5 and urging the glass lid 5 toward the transparent substrate 7 side.
  • the configuration of 9 is not particularly limited.
  • FIGS. 5A and 5B are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. 5 (a) and 5 (b) schematically show the containers 3A to 3C and the plunger 12.
  • the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is a container.
  • the second jig 9 is disposed so as to be in contact with the bottoms of 3A to 3C.
  • the position at the bottom of the containers 3A to 3C with which each rod-like portion 14 contacts is not particularly limited, but in the present embodiment, it contacts the substantially central portion of the bottom.
  • the first jig 6 and the second jig 9 are fixed. In this embodiment, although the 1st jig
  • the length of the portion of the rod-shaped portion 14 of each plunger 12 protruding from the main body 13 is fixed between the first jig 6 and the second jig 9. It is longer than the distance between each main body 13 and the containers 3A to 3C.
  • the first jig 6 and the second jig 9 are fixed as shown in FIG. 5A, the rod-like portion 14 of each plunger 12 is separated from the main body by the bottom of the containers 3A to 3C. 13 is pushed in.
  • each of the containers 3A to 3C is independently energized by each plunger 12 provided for each of the containers 3A to 3C, and each glass lid 5 is brought into close contact with the transparent substrate 7.
  • each plunger 12 contracts according to the thickness of the containers 3A to 3C and the shape of the bottom, and each plunger 12 biases the containers 3A to 3C. Accordingly, each glass lid 5 can be securely adhered to the transparent substrate 7 even when the containers 3A to 3C have different thicknesses or the bottom is inclined.
  • the containers 3A to 3C are urged toward the glass lids 5 by the plungers 12 in a state where the glass lids 5 are in close contact with the transparent substrate 7. Therefore, the glass lid 5 and the containers 3A to 3C can be more securely adhered to the sealing material 4A.
  • the sealing material 4A is irradiated with the laser light L from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7.
  • the sealing material 4A is softened and the glass lids 5 and the containers 3A to 3C are joined.
  • the sealing material layer 4 shown in FIG. 1 is formed, and a plurality of hermetic packages can be obtained.
  • the containers 3A to 3C and the glass lids 5 can be more reliably brought into close contact with the sealing material 4A, and the containers 3A to 3C and the glass lids 5 can be joined by irradiation with the laser beam L. Therefore, the airtightness of each airtight package can be effectively increased, and the reliability can be effectively increased. In addition, a plurality of hermetic packages can be obtained at the same time, and productivity can be improved.
  • FIG. 8A and 8 (b) are schematic front sectional views for explaining a method of manufacturing a hermetic package of a comparative example.
  • a second jig 109 is prepared. Similar to the second jig of the present embodiment, the second jig 109 has a jig bottom 9a and a third jig side wall 9b, but does not have an urging member.
  • a stage 109c is provided on the jig bottom 9a. On the stage 109c, the same 1st jig
  • the containers 3A to 3C in which the sealing material 4A is arranged on the side wall are placed on the stage 109c.
  • the glass lids 5 are placed on the containers 3A to 3C with the sealing material 4A interposed therebetween.
  • a first jig 106 having a transparent substrate 7 shown in FIG. 8B is prepared.
  • the first jig 106 is configured in the same manner as the first jig of the present embodiment except that the first jig side wall 8a and the second jig side wall 8b are not provided.
  • the containers 3 A to 3 C and the glass lids 5 are irradiated by irradiating the sealing material 4 A with laser light L in a state where the glass lids 5 are pressed by the transparent substrate 7. And join.
  • the thickness of the container 3C is thinner than the container 3B, it is difficult to bring the glass lid 5 on the container 3C and the transparent substrate 7 into close contact. Since the bottom of the container 3A is tilted, the glass lid 5 on the container 3A is tilted when the container 3A is disposed on the stage 109c from the bottom side. Therefore, it is difficult to sufficiently adhere the glass lid 5 and the transparent substrate 7 on the container 3A. Therefore, it is difficult to ensure that the glass lid 5 and the containers 3A and 3C are in close contact with the sealing material 4A, and the airtightness of the airtight package may not be sufficiently increased.
  • the containers 3A to 3C are moved by the plungers 12 with the sealing material 4A disposed between the containers 3A to 3C and the glass lids 5, respectively.
  • 3C is energized to have each glass lid 5 adhere to the transparent substrate 7.
  • each glass lid 5 and containers 3A to 3C are irradiated by laser light L in a state where each glass lid 5 and containers 3A to 3C are securely adhered to the sealing material 4A. 3C can be joined. Therefore, an airtight package having high airtightness can be obtained.
  • the bottoms of the containers 3A to 3C are biased in a tiltable state by biasing the substantially central part of the bottoms of the containers 3A to 3C. Therefore, the glass lid 5 can be more closely adhered to the transparent substrate 7, and the glass lid 5 and the containers 3A to 3C can be more securely adhered to the sealing material 4A.
  • 5A and 5B show an example in which the container 3A is urged by one plunger 12, but the container 3A may be urged by a plurality of plungers 12.
  • the uniformity in the in-plane direction of the force applied to the bottom of the container 3A can be improved.
  • the containers 3B and 3C are urged by the plurality of plungers 12.
  • the containers 3A to 3C and the glass lids 5 can be more closely adhered to the sealing material 4A.
  • the tip of the rod-shaped portion 14 of the plunger 12 has a curved surface shape such as a substantially hemisphere as in the present embodiment.
  • the rod-like portion 14 can be suitably brought into contact with the bottom portion, and can be biased more reliably. Therefore, the glass lid 5 and the container 3A can be more reliably adhered to the sealing material 4A.
  • the urging member is the plunger 12 having a spring member, but the urging member is not limited to this.
  • the biasing member may be, for example, a pneumatic plunger, or a spring member.
  • the manufacturing method of this embodiment is a method of manufacturing a plurality of hermetic packages
  • the present invention can also be applied as a method of manufacturing one hermetic package.
  • the glass lid 5 and the container 3A are securely adhered to the sealing material 4A, and the glass is irradiated by the laser light L.
  • the lid 5 and the container 3A can be joined. Therefore, an airtight package having high airtightness can be obtained.
  • the glass lid 5 since the glass lid 5 is disposed on the transparent substrate 7, the glass lid 5 can be more closely attached to the transparent substrate 7. Therefore, the glass lid 5 and the containers 3A to 3C can be joined by the irradiation of the laser beam L in a state where the glass lid 5 and the containers 3A to 3C are more securely adhered to the sealing member 4A. Note that the step of arranging the glass lid 5 on the transparent substrate 7 is not necessarily required.
  • FIGS. 6A and 6B are schematic front sectional views for explaining a method for manufacturing an airtight package of a modification of the first embodiment.
  • a second jig 39 having a plurality of plungers 12 shown in FIG. 6A is prepared.
  • the second jig 39 is the same as the first jig except that the second jig side wall part 8b in the first embodiment is provided on the jig bottom part 9a via the support members 9c and 9d. It is configured in the same manner as the second jig of the embodiment.
  • containers 3A to 3C in which sealing members 4A are arranged on the side wall portions are prepared.
  • the containers 3A to 3C are arranged so as to be supported by the second jig side wall portion 8b and the rod-like portion 14 of each plunger 12.
  • the glass lids 5 are placed on the containers 3A to 3C with the sealing material 4A interposed therebetween.
  • the spring member of each plunger 12 contracts due to the weight of the containers 3A to 3C and each glass lid 5.
  • the glass lid 5 on the container 3B is farthest from the jig bottom 9a. Since the bottom of the container 3A is tilted, the container 3A and the lid 5 on the container 3A are tilted.
  • a first jig 36 having a transparent substrate 7 shown in FIG. 6B is prepared.
  • the first jig 36 is the first jig of the first embodiment except that it does not have the first jig side wall 8a and the second jig side wall 8b shown in FIG. It is comprised similarly to a jig
  • each glass lid 5 is pressed by the transparent substrate 7.
  • the transparent substrate 7 first presses the glass lid 5 on the container 3B.
  • the spring member of the plunger 12 contracts, and the transparent substrate 7 and the glass lid 5 move to the plunger 12 side.
  • the transparent substrate 7 also contacts the glass lid 5 on the container 3A and the glass lid 5 on the container 3C, and the transparent substrate 7 presses each glass lid 5 on the containers 3A to 3C.
  • each plunger 12 is contracted by the force with which the transparent substrate 7 presses each glass lid 5, and the containers 3A to 3C are urged toward the glass lid 5 by the restoring force of the spring member, and each glass lid 5 is urged toward the transparent substrate 7. Thereby, each glass lid 5 is brought into close contact with the transparent substrate 7.
  • the glass lid 5 on the container 3A is arranged to be inclined with respect to the transparent substrate 7, the glass on the container 3A and the container 3A is placed so that the glass lid 5 is in close contact with the transparent substrate 7 by the biasing.
  • the lid 5 rotates. Thereby, the glass lid 5 on the container 3 ⁇ / b> A is also in close contact with the transparent substrate 7.
  • the containers 3A to 3C and the glass lids 5 are joined by irradiating the sealing material 4A with the laser light L in a state where the glass lids 5 are in close contact with the transparent substrate 7.
  • the glass lid 5 and the containers 3A to 3C can be joined by irradiation with the laser light L in a state where the glass lid 5 and the containers 3A to 3C are securely adhered to the sealing material 4A.
  • each glass lid 5 when the glass lid 5 is provided on the transparent substrate 7, each glass lid 5 can be more easily brought into close contact with the transparent substrate 7.
  • Each glass lid 5 and containers 3A to 3C can be more easily adhered to 4A.
  • FIGS. 7A and 7B are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the second embodiment.
  • the same processes as those of the first embodiment are performed up to the process shown in FIG.
  • each receiving member 25 is arranged on the bottoms of the containers 3A to 3C, respectively.
  • Each receiving member 25 has a first surface 25a located on the container 3A to 3C side, and a second surface 25b facing the first surface 25a.
  • Each first surface 25a is provided in close contact with the bottom of each of the containers 3A to 3C.
  • a recess 25c is provided on the second surface 25b of each receiving member 25.
  • Each concave portion 25c is provided at a position where the rod-like portion 14 of each plunger 12 contacts when the containers 3A to 3C are urged.
  • the shape of the recess 25 c is not particularly limited, but in the present embodiment, the shape corresponds to the shape of the tip of the rod-like portion 14. More specifically, the shape of the recess 25c is substantially hemispherical.
  • the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is
  • tool 9 is arrange
  • the first jig 6 and the second jig 9 are fixed.
  • each plunger 12 is brought into contact with the concave portion 25c of each receiving member 25 and biased, thereby biasing each receiving member 25 and the containers 3A to 3C in a state in which the bottom portion can be tilted, thereby making the glass lid 5 transparent.
  • the receiving members 25 are provided between the bottoms of the containers 3A to 3C and the plungers 12, and the containers 3A to 3C are biased by biasing the receiving members 25.
  • the force applied to the bottom of ⁇ 3C can be dispersed. Since the first surface 25a of each receiving member 25 is in close contact with the bottom of the containers 3A to 3C, the force applied to the bottom can be effectively dispersed. Therefore, the containers 3A to 3C are hardly damaged.
  • the shape of the concave portion 25c of the receiving member 25 is a shape corresponding to the shape of the tip of the rod-shaped portion 14 of the plunger 12, the contact area between the rod-shaped portion 14 and the receiving member 25 can be increased.
  • the bottom can be tilted more reliably.
  • the force applied to the bottom of the containers 3A to 3C can be further dispersed.
  • the receiving member 25 does not have to be provided with the recess 25c. Even in this case, the force applied to the bottoms of the containers 3A to 3C by the plungers 12 can be dispersed.
  • laser light L is irradiated from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7.
  • the glass lid 5 and the containers 3A to 3C can be joined by irradiation with the laser light L in a state where the glass lid 5 and the containers 3A to 3C are securely adhered to the sealing material 4A. . Therefore, an airtight package having high airtightness can be obtained.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laser Beam Processing (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

Provided is a method for producing an airtight package with which it is possible to join a glass lid and a container by irradiating laser light in a state in which the glass lid and the container are securely adhered by a sealing material, and with which it is possible to increase the airtightness. A method for producing an airtight package in which containers 3A-3C are sealed by glass lids 5, said method being characterized in comprising a step for preparing a transparent substrate 7 for adhering the glass lid 5, a step for urging the containers 3A-3C using a plunger 12 (urging member) and adhering the glass lids 5 to the transparent substrates 7 once a sealing material 4A has been disposed between the containers 3A-3C and the glass lids 5, and a step for irradiating the sealing material 4A with laser light L from the transparent substrate 7 side once the glass lid 5 has adhered to the transparent substrate 7 and joining the containers 3A-3C and the glass lids 5 using the sealing material 4A .

Description

気密パッケージの製造方法Airtight package manufacturing method
　本発明は、気密パッケージの製造方法に関する。 The present invention relates to a method for manufacturing an airtight package.
　従来、ＬＥＤ等の素子を搭載して封止するため等に、気密パッケージが用いられている。このような気密パッケージは、素子等を配置することができる容器と、容器を封止するためのカバー部材が接合されることにより構成されている。気密パッケージに素子等を封止することにより、素子等に水分等が接触することを抑制し、信頼性を高めることが検討されている。 Conventionally, an airtight package is used for mounting and sealing elements such as LEDs. Such an airtight package is configured by joining a container in which an element or the like can be arranged and a cover member for sealing the container. It has been studied to seal the elements and the like in an airtight package to suppress contact of moisture and the like with the elements and improve reliability.
　下記の特許文献１には、ガラスセラミックスからなる容器と、ガラス蓋が、封着材料を介して接合されてなる気密パッケージが開示されている。特許文献１では、上記封着材料として、低融点ガラスからなるガラスフリットが用いられている。また、特許文献１では、上記封着材料を焼成して、軟化させることにより、ガラスセラミックスからなる容器とガラス蓋が接合されている。 The following Patent Document 1 discloses an airtight package in which a container made of glass ceramics and a glass lid are joined via a sealing material. In Patent Document 1, a glass frit made of low-melting glass is used as the sealing material. Moreover, in patent document 1, the container and glass lid which consist of glass ceramics are joined by baking and softening the said sealing material.
特開２０１４－２３６２０２号公報JP 2014-236202 A
　耐熱性の低い素子が搭載される場合、特許文献１のようにガラスフリットを焼成して軟化させると、焼成の際の加熱により素子特性が熱劣化するおそれがある。これを解消する方法として、ガラスフリットにレーザー光を照射し、局所的に加熱することでガラスフリットを軟化する方法が考えられる。 When an element with low heat resistance is mounted, if the glass frit is baked and softened as in Patent Document 1, the element characteristics may be thermally deteriorated due to heating during baking. As a method for solving this problem, a method of softening the glass frit by irradiating the glass frit with laser light and locally heating it can be considered.
　しかしながら、容器の形状には実際にはばらつきがあるため、レーザー光の照射の際、封着材料にガラス蓋及び容器を確実に密着させた状態とすることは困難であった。そのため、パッケージの気密性を十分に高められないことがあった。 However, since the shape of the container actually varies, it has been difficult to ensure that the glass lid and the container are in close contact with the sealing material when the laser beam is irradiated. For this reason, the airtightness of the package may not be sufficiently improved.
　本発明の目的は、封着材料にガラス蓋及び容器を確実に密着させた状態で、レーザー光の照射によりガラス蓋及び容器を接合することができ、気密性を高めることができる、気密パッケージの製造方法を提供することにある。 An object of the present invention is to provide a hermetic package that can enhance the airtightness by allowing the glass lid and the container to be joined by laser light irradiation in a state where the glass lid and the container are securely adhered to the sealing material. It is to provide a manufacturing method.
　本発明の気密パッケージの製造方法は、容器をガラス蓋で封止した気密パッケージを製造する方法であって、ガラス蓋を密着させるための透明基板を用意する工程と、容器とガラス蓋の間に封着材料を配置した状態で、付勢部材によって容器を付勢してガラス蓋を透明基板に密着させる工程と、ガラス蓋を透明基板に密着させた状態で、透明基板側から封着材料にレーザー光を照射して、封着材料で容器とガラス蓋を接合する工程とを備えることを特徴とする。 The manufacturing method of an airtight package of the present invention is a method of manufacturing an airtight package in which a container is sealed with a glass lid, the step of preparing a transparent substrate for closely attaching the glass lid, and between the container and the glass lid In a state where the sealing material is arranged, the step of urging the container with the urging member to bring the glass lid into close contact with the transparent substrate, and the state where the glass lid is brought into close contact with the transparent substrate, from the transparent substrate side to the sealing material And a step of irradiating a laser beam to join the container and the glass lid with a sealing material.
　本発明においては、複数の気密パッケージを製造する方法であって、複数の容器のそれぞれに対して設けられた複数の付勢部材によって容器のそれぞれを独立して付勢し、複数のガラス蓋を透明基板に密着させてもよい。 In the present invention, a method for producing a plurality of hermetic packages, wherein each of the containers is independently urged by a plurality of urging members provided for each of the plurality of containers, and the plurality of glass lids are provided. You may make it contact | adhere to a transparent substrate.
　本発明においては、容器の底部の略中央部を付勢することにより、容器の底部を傾斜可能な状態で付勢してガラス蓋を透明基板に密着させることが好ましい。 In the present invention, it is preferable to urge the bottom of the container in a tiltable state by urging the substantially central part of the bottom of the container so that the glass lid is in close contact with the transparent substrate.
　本発明においては、容器の底部と付勢部材との間に受け部材を設け、受け部材を付勢部材で付勢することにより容器を付勢してもよい。容器の底部と接する受け部材の第１の面が、底部と密着するように形成されていることが好ましい。受け部材の付勢部材側の第２の面に凹部が形成されており、凹部に付勢部材を接触させて付勢することにより、底部が傾斜可能な状態で受け部材及び容器を付勢してガラス蓋を透明基板に密着させることが好ましい。 In the present invention, the container may be urged by providing a receiving member between the bottom of the container and the urging member and urging the receiving member with the urging member. It is preferable that the first surface of the receiving member in contact with the bottom of the container is formed so as to be in close contact with the bottom. A concave portion is formed in the second surface of the receiving member on the biasing member side, and the biasing member is brought into contact with the concave portion and biased, thereby biasing the receiving member and the container with the bottom portion being tiltable. It is preferable that the glass lid is adhered to the transparent substrate.
　本発明においては、付勢部材が、棒状部と、棒状部に接続されたバネ部材とを有していてもよい。 In the present invention, the urging member may have a rod-shaped portion and a spring member connected to the rod-shaped portion.
　本発明によれば、封着材料にガラス蓋及び容器を確実に密着させた状態で、レーザー光の照射によりガラス蓋及び容器を接合することができ、気密性を高めることができる、気密パッケージの製造方法を提供することができる。 According to the present invention, in a state where the glass lid and the container are securely adhered to the sealing material, the glass lid and the container can be joined by irradiation with laser light, and the airtight package can be improved. A manufacturing method can be provided.
図１は、本発明の一実施形態の気密パッケージの模式的正面断面図である。FIG. 1 is a schematic front sectional view of an airtight package according to an embodiment of the present invention. 図２（ａ）及び（ｂ）は、第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。2A and 2B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. 図３は、本発明の第１の実施形態の気密パッケージの製造方法を説明するための模式的平面断面図である。FIG. 3 is a schematic plan sectional view for explaining the manufacturing method of the hermetic package according to the first embodiment of the present invention. 図４（ａ）及び（ｂ）は、本発明の第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。4A and 4B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment of the present invention. 図５（ａ）及び（ｂ）は、本発明の第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。5A and 5B are schematic front sectional views for explaining the method for manufacturing the hermetic package of the first embodiment of the present invention. 図６（ａ）及び（ｂ）は、第１の実施形態の変形例の気密パッケージの製造方法を説明するための模式的正面断面図である。6A and 6B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a modification of the first embodiment. 図７（ａ）及び（ｂ）は、本発明の第２の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。7A and 7B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package according to the second embodiment of the present invention. 図８（ａ）及び（ｂ）は、比較例の気密パッケージの製造方法を説明するための模式的正面断面図である。FIGS. 8A and 8B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a comparative example.
　以下、好ましい実施形態について説明する。但し、以下の実施形態は単なる例示であり、本発明は以下の実施形態に限定されるものではない。また、各図面において、実質的に同一の機能を有する部材は同一の符号で参照する場合がある。 Hereinafter, preferred embodiments will be described. However, the following embodiments are merely examples, and the present invention is not limited to the following embodiments. Moreover, in each drawing, the member which has the substantially the same function may be referred with the same code | symbol.
　（気密パッケージ）
　図１は、本発明の一実施形態の気密パッケージの模式的正面断面図である。図１に示すように、気密パッケージ１は、容器３及び容器３を封止しているガラス蓋５とを備える。容器３は、底部３ａ及び底部３ａ上に配置された枠状の側壁部３ｂを有する。 (Airtight package)
FIG. 1 is a schematic front sectional view of an airtight package according to an embodiment of the present invention. As shown in FIG. 1, the hermetic package 1 includes a container 3 and a glass lid 5 that seals the container 3. The container 3 has a bottom 3a and a frame-like side wall 3b disposed on the bottom 3a.
　容器３は、例えば、セラミック、ガラスセラミック等から構成される。セラミックとしては、例えば、酸化アルミニウム、窒化アルミニウム、ジルコニア、ムライト等が挙げられる。ガラスセラミックとしては、ＬＴＣＣ（Ｌｏｗ　Ｔｅｍｐｅｒａｔｕｒｅ　Ｃｏ－ｆｉｒｅｄ　Ｃｅｒａｍｉｃｓ）等が挙げられる。ＬＴＣＣの具体的な例としては、酸化チタンや酸化ニオブ等の無機粉末とガラス粉末との焼結体等が挙げられる。底部３ａ及び側壁部３ｂは一体で形成されていてもよい。あるいは、容器３は、別体の底部３ａと側壁部３ｂとで形成されていてもよい。 The container 3 is made of, for example, ceramic or glass ceramic. Examples of the ceramic include aluminum oxide, aluminum nitride, zirconia, and mullite. Examples of the glass ceramic include LTCC (Low Temperature Co-fired Ceramics). Specific examples of LTCC include a sintered body of an inorganic powder such as titanium oxide or niobium oxide and a glass powder. The bottom part 3a and the side wall part 3b may be integrally formed. Alternatively, the container 3 may be formed of a separate bottom 3a and side wall 3b.
　ガラス蓋５の材料には、種々のガラスを用いることができる。ガラスとしては、例えば、無アルカリガラス、ホウケイ酸ガラス、ソーダ石灰ガラス等が挙げられる。 Various materials can be used as the material of the glass lid 5. Examples of the glass include alkali-free glass, borosilicate glass, soda lime glass, and the like.
　気密パッケージ１は、容器３の側壁部３ｂとガラス蓋５との間に配置された封着材料層４を備える。容器３とガラス蓋５とは、封着材料層４により接合されている。 The hermetic package 1 includes a sealing material layer 4 disposed between the side wall 3 b of the container 3 and the glass lid 5. The container 3 and the glass lid 5 are joined by a sealing material layer 4.
　封着材料層４は、低融点ガラス粉末を含む封着材料からなる。低融点ガラス粉末は、より低温で封着材料を軟化させることができ、素子の熱劣化をより一層抑制することができる。低融点ガラス粉末としては、例えば、Ｂｉ２Ｏ３系ガラス粉末や、ＳｎＯ－Ｐ２Ｏ５系ガラス粉末、Ｖ２Ｏ５－ＴｅＯ２系ガラス粉末等を用いることができる。後述するように、レーザー光の照射により封着材料を軟化させる際に、レーザー光の吸収を向上させるために、ガラス中にＣｕＯ、Ｃｒ２Ｏ３、Ｆｅ２Ｏ３、ＭｎＯ２等から選ばれる少なくとも１種の顔料が含まれていてもよい。また、封着材料は、上記の低融点ガラス粉末の他に、低膨張耐火性フィラーや、レーザー光吸収材等が含まれていてもよい。低膨張耐火性フィラーとしては、例えば、コーディエライト、ウイレマイト、アルミナ、リン酸ジルコニウム系化合物、ジルコン、ジルコニア、酸化スズ、石英ガラス、β－石英固溶体、β－ユークリプタイト、スポジュメンが挙げられる。また、レーザー光吸収材としては、例えば、Ｆｅ、Ｍｎ、Ｃｕ等から選ばれる少なくとも１種の金属または該金属を含む酸化物等の化合物が挙げられる。本実施形態の容器３とガラス蓋５とは、後述するように、レーザー光の照射により封着材料を軟化させて封着材料層４を形成している。 The sealing material layer 4 is made of a sealing material containing a low-melting glass powder. The low melting point glass powder can soften the sealing material at a lower temperature, and can further suppress the thermal deterioration of the element. As the low melting point glass powder, for example, Bi 2 O 3 glass powder, SnO—P 2 O 5 glass powder, V 2 O 5 —TeO 2 glass powder or the like can be used. As will be described later, when softening the sealing material by laser light irradiation, the glass is selected from CuO, Cr 2 O 3 , Fe 2 O 3 , MnO 2 and the like in order to improve the absorption of the laser light. At least one pigment may be included. Further, the sealing material may contain a low expansion refractory filler, a laser light absorbing material and the like in addition to the low melting point glass powder. Examples of the low expansion refractory filler include cordierite, willemite, alumina, zirconium phosphate compounds, zircon, zirconia, tin oxide, quartz glass, β-quartz solid solution, β-eucryptite, and spodumene. Examples of the laser light absorbing material include compounds such as at least one metal selected from Fe, Mn, Cu and the like or an oxide containing the metal. As will be described later, the container 3 and the glass lid 5 of the present embodiment soften the sealing material by irradiation with laser light to form the sealing material layer 4.
　（製造方法）
　（第１の実施形態）
　図２（ａ）及び（ｂ）は、第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。図３は、第１の実施形態の気密パッケージの製造方法を説明するための模式的平面断面図である。図４（ａ）及び（ｂ）は、第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。なお、図４（ａ）においては、容器３Ａ～３Ｃを略図的に示している。図４（ｂ）においては、後述するプランジャ１２を略図的に示している。 (Production method)
(First embodiment)
2A and 2B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. FIG. 3 is a schematic plan cross-sectional view for explaining the manufacturing method of the hermetic package of the first embodiment. 4A and 4B are schematic front sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. In FIG. 4A, the containers 3A to 3C are schematically shown. In FIG.4 (b), the plunger 12 mentioned later is shown schematically.
　図２（ａ）に示すように、複数のガラス蓋５を用意する。一方で、図４（ａ）に示す複数の容器３Ａ～３Ｃも用意する。複数の容器３Ａ～３Ｃは、理想的には全て同じ形状であることが望ましい。しかしながら、実際には、製造ばらつき等により、容器の厚みが異なる場合や底部が傾いた状態となる場合がある。本実施形態では、容器３Ａの底部は傾いており、容器３Ｂの厚みは容器３Ｃの厚みより厚い。なお、本明細書において容器の厚みとは、側壁部が延びる方向に沿う容器の最大寸法をいう。 A plurality of glass lids 5 are prepared as shown in FIG. On the other hand, a plurality of containers 3A to 3C shown in FIG. The plurality of containers 3A to 3C are ideally all of the same shape. However, in reality, the thickness of the container may be different or the bottom may be inclined due to manufacturing variations or the like. In the present embodiment, the bottom of the container 3A is inclined, and the thickness of the container 3B is thicker than the thickness of the container 3C. In addition, in this specification, the thickness of a container means the largest dimension of the container along the direction where a side wall part is extended.
　次に、図２（ａ）に示すように、各ガラス蓋５上に封着材料４Ａを配置する。封着材料４Ａは、ガラス蓋５の、容器に接合される部分に配置する。本実施形態の封着材料４Ａは、レーザー光吸収材を含有するガラスフリットである。封着材料４Ａの配置は、例えば、封着材料４Ａと適宜の有機バインダとを混合したペーストを印刷することにより行うことができる。次に、４００℃以上、６００℃以下の温度で焼成を行う。なお、封着材料４Ａは、容器の側壁部上に配置してもよい。 Next, as shown in FIG. 2A, a sealing material 4A is disposed on each glass lid 5. 4A of sealing materials are arrange | positioned in the part joined to the container of the glass cover 5. As shown in FIG. The sealing material 4A of the present embodiment is a glass frit containing a laser light absorbing material. The arrangement of the sealing material 4A can be performed, for example, by printing a paste in which the sealing material 4A is mixed with an appropriate organic binder. Next, baking is performed at a temperature of 400 ° C. or higher and 600 ° C. or lower. In addition, you may arrange | position 4 A of sealing materials on the side wall part of a container.
　次に、図２（ｂ）に示すように、透明基板７を有する第１の治具６を用意する。第１の治具６は、ガラス蓋５の位置決めをするための第１の治具側壁部８ａを有する。図３に示すように、第１の治具側壁部８ａは、平面視において格子状の形状を有する。第１の治具側壁部８ａの上記格子状の形状は、各ガラス蓋５の平面形状に対応した形状である。第１の治具側壁部８ａは、複数のガラス蓋５を透明基板７上に配置した際に、各ガラス蓋５を囲むように設けられている。これにより、複数のガラス蓋５の位置決めをすることができる。 Next, as shown in FIG. 2B, a first jig 6 having a transparent substrate 7 is prepared. The first jig 6 has a first jig side wall portion 8 a for positioning the glass lid 5. As shown in FIG. 3, the first jig side wall 8a has a lattice shape in plan view. The lattice-like shape of the first jig side wall 8 a is a shape corresponding to the planar shape of each glass lid 5. The first jig side wall 8 a is provided so as to surround each glass lid 5 when a plurality of glass lids 5 are arranged on the transparent substrate 7. Thereby, a plurality of glass lids 5 can be positioned.
　図２（ｂ）に戻り、第１の治具６は、各容器の位置決めをするための第２の治具側壁部８ｂを有する。第２の治具側壁部８ｂは、第１の治具側壁部８ａと同様に、平面視において格子状の形状を有する。さらに、第１の治具６は、後述する第２の治具を固定するための治具固定部６ａを有する。治具固定部６ａは、平面視において、透明基板７を囲むように設けられている。なお、第１の治具６は透明基板７を有していればよく、第１の治具６の構成は特に限定されない。 2B, the first jig 6 has a second jig side wall portion 8b for positioning each container. Similar to the first jig side wall 8a, the second jig side wall 8b has a lattice shape in plan view. Furthermore, the first jig 6 has a jig fixing portion 6a for fixing a second jig described later. The jig fixing portion 6a is provided so as to surround the transparent substrate 7 in plan view. In addition, the 1st jig | tool 6 should just have the transparent substrate 7, and the structure of the 1st jig | tool 6 is not specifically limited.
　次に、図２（ｂ）及び図３に示すように、第１の治具側壁部８ａに囲まれるように、各ガラス蓋５を透明基板７上に配置する。次に、図４（ａ）に示すように、各ガラス蓋５の上に、封着材料４Ａを介在させて容器３Ａ～３Ｃを載せる。 Next, as shown in FIGS. 2B and 3, each glass lid 5 is disposed on the transparent substrate 7 so as to be surrounded by the first jig side wall 8 a. Next, as shown in FIG. 4A, the containers 3A to 3C are placed on the glass lids 5 with the sealing material 4A interposed therebetween.
　一方で、図４（ｂ）に示すように、第２の治具９を用意する。第２の治具９は、治具底部９ａと、治具底部９ａを貫通するように配置されている複数の付勢部材と、治具底部９ａ上に設けられている第３の治具側壁部９ｂとを有する。本実施形態においては、上記付勢部材はプランジャ１２である。 On the other hand, as shown in FIG. 4B, a second jig 9 is prepared. The second jig 9 includes a jig bottom 9a, a plurality of biasing members arranged so as to penetrate the jig bottom 9a, and a third jig side wall provided on the jig bottom 9a. Part 9b. In the present embodiment, the urging member is a plunger 12.
　プランジャ１２は、本体１３と、本体１３から突出している棒状部１４と、本体１３内収容されており、かつ棒状部１４に接続されたバネ部材とを有する。棒状部１４の先端の形状は、特に限定されないが、本実施形態では略半球状である。各プランジャ１２は、図４（ａ）に示す、第１の治具６において容器３Ａ～３Ｃが配置された位置に対応する位置に配置されている。なお、第２の治具９は、容器３Ａ～３Ｃをガラス蓋５側に付勢し、ガラス蓋５を透明基板７側に付勢するための治具の一例であり、第２の治具９の構成は特に限定されない。 The plunger 12 includes a main body 13, a rod-like portion 14 protruding from the main body 13, and a spring member that is accommodated in the main body 13 and connected to the rod-like portion 14. The shape of the tip of the rod-shaped portion 14 is not particularly limited, but is substantially hemispherical in the present embodiment. Each plunger 12 is disposed at a position corresponding to the position at which the containers 3A to 3C are disposed in the first jig 6 shown in FIG. The second jig 9 is an example of a jig for urging the containers 3A to 3C toward the glass lid 5 and urging the glass lid 5 toward the transparent substrate 7 side. The configuration of 9 is not particularly limited.
　図５（ａ）及び（ｂ）は、第１の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。なお、図５（ａ）及び（ｂ）においては、容器３Ａ～３Ｃ及びプランジャ１２を略図的に示している。 FIGS. 5A and 5B are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the first embodiment. 5 (a) and 5 (b) schematically show the containers 3A to 3C and the plunger 12.
　次に、図５（ａ）に示すように、第１の治具６の治具固定部６ａ上に第３の治具側壁部９ｂが接するように、かつ各プランジャ１２の棒状部１４が容器３Ａ～３Ｃの底部にそれぞれ接するように、第２の治具９を配置する。各棒状部１４が接触する容器３Ａ～３Ｃの底部における位置は特に限定されないが、本実施形態においては、底部の略中央部に接触する。次に、第１の治具６と第２の治具９とを固定する。本実施形態では、螺子により第１の治具６と第２の治具９とを固定するが、上記固定の方法はこれに限定されない。 Next, as shown in FIG. 5 (a), the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is a container. The second jig 9 is disposed so as to be in contact with the bottoms of 3A to 3C. The position at the bottom of the containers 3A to 3C with which each rod-like portion 14 contacts is not particularly limited, but in the present embodiment, it contacts the substantially central portion of the bottom. Next, the first jig 6 and the second jig 9 are fixed. In this embodiment, although the 1st jig | tool 6 and the 2nd jig | tool 9 are fixed with a screw, the said fixing method is not limited to this.
　ここで、図４（ｂ）に示した工程において、各プランジャ１２の棒状部１４における本体１３から突出している部分の長さは、第１の治具６と第２の治具９とが固定されたときの各本体１３と容器３Ａ～３Ｃとの距離よりも長い。これにより、図５（ａ）に示すように第１の治具６と第２の治具９とが固定されたとき、各プランジャ１２の棒状部１４は、容器３Ａ～３Ｃの底部により、本体１３内に押し込まれている。このとき、各プランジャ１２のバネ部材が収縮しており、バネ部材の復元力により、各プランジャ１２は容器３Ａ～３Ｃを各ガラス蓋５側に付勢し、各ガラス蓋５を透明基板７側に付勢する。このように、容器３Ａ～３Ｃのそれぞれに対して設けられた各プランジャ１２によって容器３Ａ～３Ｃのそれぞれを独立して付勢し、各ガラス蓋５を透明基板７に密着させる。 Here, in the process shown in FIG. 4B, the length of the portion of the rod-shaped portion 14 of each plunger 12 protruding from the main body 13 is fixed between the first jig 6 and the second jig 9. It is longer than the distance between each main body 13 and the containers 3A to 3C. As a result, when the first jig 6 and the second jig 9 are fixed as shown in FIG. 5A, the rod-like portion 14 of each plunger 12 is separated from the main body by the bottom of the containers 3A to 3C. 13 is pushed in. At this time, the spring members of the plungers 12 are contracted, and the plungers 12 urge the containers 3A to 3C toward the glass lids 5 by the restoring force of the spring members, and the glass lids 5 are moved toward the transparent substrate 7 side. Energize to. In this way, each of the containers 3A to 3C is independently energized by each plunger 12 provided for each of the containers 3A to 3C, and each glass lid 5 is brought into close contact with the transparent substrate 7.
　本実施形態では、容器３Ａ～３Ｃの厚みや底部の形状に応じて各プランジャ１２のバネ部材が収縮し、各プランジャ１２が容器３Ａ～３Ｃを付勢する。それによって、容器３Ａ～３Ｃの厚みが異なる場合や底部が傾いている場合においても、各ガラス蓋５を透明基板７に確実に密着させることができる。 In this embodiment, the spring member of each plunger 12 contracts according to the thickness of the containers 3A to 3C and the shape of the bottom, and each plunger 12 biases the containers 3A to 3C. Accordingly, each glass lid 5 can be securely adhered to the transparent substrate 7 even when the containers 3A to 3C have different thicknesses or the bottom is inclined.
　このとき、各ガラス蓋５が透明基板７に密着した状態において、各プランジャ１２によって容器３Ａ～３Ｃが各ガラス蓋５側に付勢されている。よって、封着材料４Ａに、ガラス蓋５及び容器３Ａ～３Ｃをより確実に密着させることができる。 At this time, the containers 3A to 3C are urged toward the glass lids 5 by the plungers 12 in a state where the glass lids 5 are in close contact with the transparent substrate 7. Therefore, the glass lid 5 and the containers 3A to 3C can be more securely adhered to the sealing material 4A.
　次に、図５（ｂ）に示すように、各ガラス蓋５を透明基板７に密着させた状態で、透明基板７側から封着材料４Ａにレーザー光Ｌを照射する。これにより、封着材料４Ａを軟化させ、各ガラス蓋５と容器３Ａ～３Ｃとを接合する。このとき、図１に示した封着材料層４が形成され、複数の気密パッケージを得ることができる。 Next, as shown in FIG. 5B, the sealing material 4A is irradiated with the laser light L from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7. As a result, the sealing material 4A is softened and the glass lids 5 and the containers 3A to 3C are joined. At this time, the sealing material layer 4 shown in FIG. 1 is formed, and a plurality of hermetic packages can be obtained.
　本実施形態においては、封着材料４Ａに容器３Ａ～３Ｃ及び各ガラス蓋５をより確実に密着させて、容器３Ａ～３Ｃ及び各ガラス蓋５をレーザー光Ｌの照射により接合することができる。よって、各気密パッケージの気密性を効果的に高めることができ、信頼性を効果的に高めることができる。加えて、複数の気密パッケージを同時に得ることができ、生産性を高めることができる。 In the present embodiment, the containers 3A to 3C and the glass lids 5 can be more reliably brought into close contact with the sealing material 4A, and the containers 3A to 3C and the glass lids 5 can be joined by irradiation with the laser beam L. Therefore, the airtightness of each airtight package can be effectively increased, and the reliability can be effectively increased. In addition, a plurality of hermetic packages can be obtained at the same time, and productivity can be improved.
　以下において、本実施形態と比較例とを比較することにより、本実施形態の効果をより詳細に説明する。 Hereinafter, the effect of the present embodiment will be described in more detail by comparing the present embodiment with a comparative example.
　図８（ａ）及び（ｂ）は、比較例の気密パッケージの製造方法を説明するための模式的正面断面図である。比較例においては、図８（ａ）に示すように、第２の治具１０９を用意する。第２の治具１０９は、本実施形態の第２の治具と同様に、治具底部９ａ及び第３の治具側壁部９ｂを有するが、付勢部材を有しない。比較例の第２の治具１０９においては、治具底部９ａ上にステージ１０９ｃが設けられている。ステージ１０９ｃ上には、本実施形態における第１の治具と同様の第１の治具側壁部８ａ及び第２の治具側壁部８ｂが設けられている。 8 (a) and 8 (b) are schematic front sectional views for explaining a method of manufacturing a hermetic package of a comparative example. In the comparative example, as shown in FIG. 8A, a second jig 109 is prepared. Similar to the second jig of the present embodiment, the second jig 109 has a jig bottom 9a and a third jig side wall 9b, but does not have an urging member. In the second jig 109 of the comparative example, a stage 109c is provided on the jig bottom 9a. On the stage 109c, the same 1st jig | tool side wall part 8a and the 2nd jig | tool side wall part 8b similar to the 1st jig | tool in this embodiment are provided.
　次に、ステージ１０９ｃ上に、側壁部上に封着材料４Ａを配置した容器３Ａ～３Ｃを載置する。次に、容器３Ａ～３Ｃ上に、封着材料４Ａを介在させてそれぞれガラス蓋５を載せる。 Next, the containers 3A to 3C in which the sealing material 4A is arranged on the side wall are placed on the stage 109c. Next, the glass lids 5 are placed on the containers 3A to 3C with the sealing material 4A interposed therebetween.
　一方で、図８（ｂ）に示す、透明基板７を有する第１の治具１０６を用意する。第１の治具１０６は、第１の治具側壁部８ａ及び第２の治具側壁部８ｂを有しない点以外においては、本実施形態の第１の治具と同様に構成されている。次に、図８（ｂ）に示すように、透明基板７により各ガラス蓋５を押圧した状態で、封着材料４Ａにレーザー光Ｌを照射することにより、容器３Ａ～３Ｃと各ガラス蓋５とを接合する。 Meanwhile, a first jig 106 having a transparent substrate 7 shown in FIG. 8B is prepared. The first jig 106 is configured in the same manner as the first jig of the present embodiment except that the first jig side wall 8a and the second jig side wall 8b are not provided. Next, as shown in FIG. 8 (b), the containers 3 A to 3 C and the glass lids 5 are irradiated by irradiating the sealing material 4 A with laser light L in a state where the glass lids 5 are pressed by the transparent substrate 7. And join.
　比較例においては、図８（ｂ）に示すように、容器３Ｂより容器３Ｃの厚みが薄いため、容器３Ｃ上のガラス蓋５と透明基板７とを密着させることは困難である。容器３Ａの底部は傾いているため、ステージ１０９ｃ上に底部側から配置された状態においては、容器３Ａ上のガラス蓋５は傾いた状態となる。そのため、容器３Ａ上のガラス蓋５と透明基板７とを十分に密着させることは困難である。よって、封着材料４Ａに各ガラス蓋５及び容器３Ａ，３Ｃを確実に密着させることは困難であり、気密パッケージの気密性を十分に高くできないことがある。 In the comparative example, as shown in FIG. 8B, since the thickness of the container 3C is thinner than the container 3B, it is difficult to bring the glass lid 5 on the container 3C and the transparent substrate 7 into close contact. Since the bottom of the container 3A is tilted, the glass lid 5 on the container 3A is tilted when the container 3A is disposed on the stage 109c from the bottom side. Therefore, it is difficult to sufficiently adhere the glass lid 5 and the transparent substrate 7 on the container 3A. Therefore, it is difficult to ensure that the glass lid 5 and the containers 3A and 3C are in close contact with the sealing material 4A, and the airtightness of the airtight package may not be sufficiently increased.
　これに対して、本実施形態においては、図５（ａ）に示すように、容器３Ａ～３Ｃと各ガラス蓋５の間に封着材料４Ａを配置した状態で、各プランジャ１２によって容器３Ａ～３Ｃを付勢して、各ガラス蓋５を透明基板７に密着させる工程を有する。それによって、図５（ｂ）に示すように、封着材料４Ａに各ガラス蓋５及び容器３Ａ～３Ｃを確実に密着させた状態で、レーザー光Ｌの照射により各ガラス蓋５及び容器３Ａ～３Ｃを接合することができる。よって、気密性が高い気密パッケージを得ることができる。 On the other hand, in the present embodiment, as shown in FIG. 5 (a), the containers 3A to 3C are moved by the plungers 12 with the sealing material 4A disposed between the containers 3A to 3C and the glass lids 5, respectively. 3C is energized to have each glass lid 5 adhere to the transparent substrate 7. As a result, as shown in FIG. 5 (b), each glass lid 5 and containers 3A to 3C are irradiated by laser light L in a state where each glass lid 5 and containers 3A to 3C are securely adhered to the sealing material 4A. 3C can be joined. Therefore, an airtight package having high airtightness can be obtained.
　なお、本実施形態では、容器３Ａ～３Ｃの底部の略中央部を付勢することにより、容器３Ａ～３Ｃの底部を傾斜可能な状態で付勢する。よって、ガラス蓋５を透明基板７により一層確実に密着させることができ、封着材料４Ａに各ガラス蓋５及び容器３Ａ～３Ｃをより一層確実に密着させることができる。 In this embodiment, the bottoms of the containers 3A to 3C are biased in a tiltable state by biasing the substantially central part of the bottoms of the containers 3A to 3C. Therefore, the glass lid 5 can be more closely adhered to the transparent substrate 7, and the glass lid 5 and the containers 3A to 3C can be more securely adhered to the sealing material 4A.
　図５（ａ）及び（ｂ）においては、容器３Ａを１つのプランジャ１２により付勢する例を示したが、容器３Ａを複数のプランジャ１２により付勢してもよい。この場合には、容器３Ａの底部に加えられる力の、面内方向における均一性を高めることができる。容器３Ｂ及び容器３Ｃを複数のプランジャ１２により付勢した場合においても同様である。それによって、封着材料４Ａに容器３Ａ～３Ｃ及び各ガラス蓋５を、より一層確実に密着させることができる。 5A and 5B show an example in which the container 3A is urged by one plunger 12, but the container 3A may be urged by a plurality of plungers 12. In this case, the uniformity in the in-plane direction of the force applied to the bottom of the container 3A can be improved. The same applies to the case where the containers 3B and 3C are urged by the plurality of plungers 12. As a result, the containers 3A to 3C and the glass lids 5 can be more closely adhered to the sealing material 4A.
　プランジャ１２の棒状部１４の先端は、本実施形態のように、略半球等の曲面形状であることが好ましい。それによって、容器３Ａのように底部が傾斜している場合においても、底部に棒状部１４を好適に接触させることができ、より確実に付勢することができる。よって、封着材料４Ａにガラス蓋５及び容器３Ａをより確実に密着させることができる。 It is preferable that the tip of the rod-shaped portion 14 of the plunger 12 has a curved surface shape such as a substantially hemisphere as in the present embodiment. Thereby, even when the bottom portion is inclined as in the case of the container 3A, the rod-like portion 14 can be suitably brought into contact with the bottom portion, and can be biased more reliably. Therefore, the glass lid 5 and the container 3A can be more reliably adhered to the sealing material 4A.
　第２の治具９においては、付勢部材はバネ部材を有するプランジャ１２であるが、付勢部材はこれに限定されない。付勢部材は、例えば、空圧式のプランジャであってもよく、あるいはバネ部材等であってもよい。 In the second jig 9, the urging member is the plunger 12 having a spring member, but the urging member is not limited to this. The biasing member may be, for example, a pneumatic plunger, or a spring member.
　なお、本実施形態の製造方法は複数の気密パッケージを製造する方法であるが、本発明は、１つの気密パッケージを製造する方法としても適用することができる。この場合、本実施形態と同様に、容器３Ａの底部が傾いている場合等においても、封着材料４Ａにガラス蓋５及び容器３Ａを確実に密着させた状態で、レーザー光Ｌの照射によりガラス蓋５及び容器３Ａを接合することができる。よって、気密性が高い気密パッケージを得ることができる。 In addition, although the manufacturing method of this embodiment is a method of manufacturing a plurality of hermetic packages, the present invention can also be applied as a method of manufacturing one hermetic package. In this case, as in the present embodiment, even when the bottom of the container 3A is inclined, the glass lid 5 and the container 3A are securely adhered to the sealing material 4A, and the glass is irradiated by the laser light L. The lid 5 and the container 3A can be joined. Therefore, an airtight package having high airtightness can be obtained.
　本実施形態においては、透明基板７上にガラス蓋５を配置する工程を有するため、ガラス蓋５を透明基板７により一層確実に密着させることができる。よって、封着部材４Ａにガラス蓋５及び容器３Ａ～３Ｃをより確実に密着させた状態で、レーザー光Ｌの照射によりガラス蓋５及び容器３Ａ～３Ｃを接合することができる。なお、透明基板７上にガラス蓋５を配置する工程を必ずしも有しなくともよい。 In the present embodiment, since the glass lid 5 is disposed on the transparent substrate 7, the glass lid 5 can be more closely attached to the transparent substrate 7. Therefore, the glass lid 5 and the containers 3A to 3C can be joined by the irradiation of the laser beam L in a state where the glass lid 5 and the containers 3A to 3C are more securely adhered to the sealing member 4A. Note that the step of arranging the glass lid 5 on the transparent substrate 7 is not necessarily required.
　図６（ａ）及び（ｂ）は、第１の実施形態の変形例の気密パッケージの製造方法を説明するための模式的正面断面図である。 FIGS. 6A and 6B are schematic front sectional views for explaining a method for manufacturing an airtight package of a modification of the first embodiment.
　本変形例においては、図６（ａ）に示す、複数のプランジャ１２を有する第２の治具３９を用意する。第２の治具３９は、治具底部９ａ上に、第１の実施形態における第２の治具側壁部８ｂが支持部材９ｃ，９ｄを介して設けられている点以外においては、第１の実施形態の第２の治具と同様に構成されている。一方で、側壁部上に封着部材４Ａが配置された容器３Ａ～３Ｃを用意する。 In this modification, a second jig 39 having a plurality of plungers 12 shown in FIG. 6A is prepared. The second jig 39 is the same as the first jig except that the second jig side wall part 8b in the first embodiment is provided on the jig bottom part 9a via the support members 9c and 9d. It is configured in the same manner as the second jig of the embodiment. On the other hand, containers 3A to 3C in which sealing members 4A are arranged on the side wall portions are prepared.
　次に、図６（ａ）に示すように、第２の治具側壁部８ｂ及び各プランジャ１２の棒状部１４に支持されるように、容器３Ａ～３Ｃを配置する。次に、容器３Ａ～３Ｃ上に、封着材料４Ａを介在させてそれぞれガラス蓋５を載せる。このとき、容器３Ａ～３Ｃ及び各ガラス蓋５の重量により、各プランジャ１２のバネ部材は収縮している。 Next, as shown in FIG. 6A, the containers 3A to 3C are arranged so as to be supported by the second jig side wall portion 8b and the rod-like portion 14 of each plunger 12. Next, the glass lids 5 are placed on the containers 3A to 3C with the sealing material 4A interposed therebetween. At this time, the spring member of each plunger 12 contracts due to the weight of the containers 3A to 3C and each glass lid 5.
　なお、本変形例においては、容器３Ａ～３Ｃ上のガラス蓋５のうち、容器３Ｂ上のガラス蓋５が治具底部９ａから最も離れている。容器３Ａの底部は傾いているため、容器３Ａ及び容器３Ａ上の蓋部５は傾いて配置されている。 In this modification, among the glass lids 5 on the containers 3A to 3C, the glass lid 5 on the container 3B is farthest from the jig bottom 9a. Since the bottom of the container 3A is tilted, the container 3A and the lid 5 on the container 3A are tilted.
　一方で、図６（ｂ）に示す、透明基板７を有する第１の治具３６を用意する。第１の治具３６は、図５（ｂ）に示した第１の治具側壁部８ａ及び第２の治具側壁部８ｂを有しない点以外においては、第１の実施形態の第１の治具と同様に構成されている。次に、図６（ｂ）に示すように、透明基板７により各ガラス蓋５を押圧する。このとき、透明基板７は、最初に容器３Ｂ上のガラス蓋５を押圧する。これにより、プランジャ１２のバネ部材は収縮し、透明基板７及び上記ガラス蓋５は、プランジャ１２側に移動する。この移動により、透明基板７は容器３Ａ上のガラス蓋５及び容器３Ｃ上のガラス蓋５にも接触し、透明基板７は容器３Ａ～３Ｃ上の各ガラス蓋５を押圧する。 Meanwhile, a first jig 36 having a transparent substrate 7 shown in FIG. 6B is prepared. The first jig 36 is the first jig of the first embodiment except that it does not have the first jig side wall 8a and the second jig side wall 8b shown in FIG. It is comprised similarly to a jig | tool. Next, as shown in FIG. 6B, each glass lid 5 is pressed by the transparent substrate 7. At this time, the transparent substrate 7 first presses the glass lid 5 on the container 3B. Thereby, the spring member of the plunger 12 contracts, and the transparent substrate 7 and the glass lid 5 move to the plunger 12 side. By this movement, the transparent substrate 7 also contacts the glass lid 5 on the container 3A and the glass lid 5 on the container 3C, and the transparent substrate 7 presses each glass lid 5 on the containers 3A to 3C.
　透明基板７が各ガラス蓋５を押圧する力により各プランジャ１２のバネ部材が収縮しており、バネ部材の復元力により、容器３Ａ～３Ｃを各ガラス蓋５側に付勢し、各ガラス蓋５を透明基板７側に付勢する。これにより、各ガラス蓋５を透明基板７に密着させる。なお、容器３Ａ上のガラス蓋５は透明基板７に対して傾いて配置されていたが、上記付勢により、ガラス蓋５が透明基板７に密着するように、容器３Ａ及び容器３Ａ上のガラス蓋５が回転する。これにより、容器３Ａ上のガラス蓋５も透明基板７に密着する。 The spring member of each plunger 12 is contracted by the force with which the transparent substrate 7 presses each glass lid 5, and the containers 3A to 3C are urged toward the glass lid 5 by the restoring force of the spring member, and each glass lid 5 is urged toward the transparent substrate 7. Thereby, each glass lid 5 is brought into close contact with the transparent substrate 7. Although the glass lid 5 on the container 3A is arranged to be inclined with respect to the transparent substrate 7, the glass on the container 3A and the container 3A is placed so that the glass lid 5 is in close contact with the transparent substrate 7 by the biasing. The lid 5 rotates. Thereby, the glass lid 5 on the container 3 </ b> A is also in close contact with the transparent substrate 7.
　次に、各ガラス蓋５を透明基板７に密着させた状態で、封着材料４Ａにレーザー光Ｌを照射することにより、容器３Ａ～３Ｃと各ガラス蓋５とを接合する。 Next, the containers 3A to 3C and the glass lids 5 are joined by irradiating the sealing material 4A with the laser light L in a state where the glass lids 5 are in close contact with the transparent substrate 7.
　本変形例においても、封着材料４Ａに各ガラス蓋５及び容器３Ａ～３Ｃを確実に密着させた状態で、レーザー光Ｌの照射により各ガラス蓋５及び容器３Ａ～３Ｃを接合することができる。もっとも、第１の実施形態のように、透明基板７上にガラス蓋５を配置する工程を有する場合には、各ガラス蓋５を透明基板７により一層容易に密着させることができ、封着材料４Ａに各ガラス蓋５及び容器３Ａ～３Ｃをより一層容易に密着させることができる。 Also in this modification, the glass lid 5 and the containers 3A to 3C can be joined by irradiation with the laser light L in a state where the glass lid 5 and the containers 3A to 3C are securely adhered to the sealing material 4A. . However, as in the first embodiment, when the glass lid 5 is provided on the transparent substrate 7, each glass lid 5 can be more easily brought into close contact with the transparent substrate 7. Each glass lid 5 and containers 3A to 3C can be more easily adhered to 4A.
　（第２の実施形態）
　図７（ａ）及び（ｂ）は、第２の実施形態の気密パッケージの製造方法を説明するための模式的正面断面図である。本実施形態の製造方法においては、図４（ｂ）に示す工程までは、第１の実施形態と同様の工程を行う。 (Second Embodiment)
FIGS. 7A and 7B are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the second embodiment. In the manufacturing method of this embodiment, the same processes as those of the first embodiment are performed up to the process shown in FIG.
　次に、図７（ａ）に示すように、容器３Ａ～３Ｃの底部に、各受け部材２５をそれぞれ配置する。各受け部材２５は、容器３Ａ～３Ｃ側に位置する第１の面２５ａと、第１の面２５ａに対向する第２の面２５ｂとを有する。各第１の面２５ａは、容器３Ａ～３Ｃの底部にそれぞれ密着するように設けられている。 Next, as shown in FIG. 7A, the receiving members 25 are arranged on the bottoms of the containers 3A to 3C, respectively. Each receiving member 25 has a first surface 25a located on the container 3A to 3C side, and a second surface 25b facing the first surface 25a. Each first surface 25a is provided in close contact with the bottom of each of the containers 3A to 3C.
　各受け部材２５の第２の面２５ｂには、凹部２５ｃがそれぞれ設けられている。各凹部２５ｃは、容器３Ａ～３Ｃを付勢する際に、各プランジャ１２の棒状部１４が接触する位置にそれぞれ設けられている。凹部２５ｃの形状は、特に限定されないが、本実施形態では、棒状部１４の先端の形状に対応した形状である。より具体的には、凹部２５ｃの形状は略半球状である。 A recess 25c is provided on the second surface 25b of each receiving member 25. Each concave portion 25c is provided at a position where the rod-like portion 14 of each plunger 12 contacts when the containers 3A to 3C are urged. The shape of the recess 25 c is not particularly limited, but in the present embodiment, the shape corresponds to the shape of the tip of the rod-like portion 14. More specifically, the shape of the recess 25c is substantially hemispherical.
　次に、図７（ｂ）に示すように、第１の治具６の治具固定部６ａ上に第３の治具側壁部９ｂが接するように、かつ各プランジャ１２の棒状部１４が各受け部材２５の凹部２５ｃにそれぞれ接触するように、第２の治具９を配置する。次に、第１の治具６と第２の治具９とを固定する。これにより、各受け部材２５の凹部２５ｃに各プランジャ１２を接触させて付勢することによって、底部が傾斜可能な状態で各受け部材２５及び容器３Ａ～３Ｃを付勢してガラス蓋５を透明基板７に密着させる。 Next, as shown in FIG. 7B, the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is The 2nd jig | tool 9 is arrange | positioned so that it may contact with the recessed part 25c of the receiving member 25, respectively. Next, the first jig 6 and the second jig 9 are fixed. Thereby, each plunger 12 is brought into contact with the concave portion 25c of each receiving member 25 and biased, thereby biasing each receiving member 25 and the containers 3A to 3C in a state in which the bottom portion can be tilted, thereby making the glass lid 5 transparent. Adhere to the substrate 7.
　本実施形態では、容器３Ａ～３Ｃの底部と各プランジャ１２との間に各受け部材２５を設け、各受け部材２５を付勢することにより容器３Ａ～３Ｃを付勢しているため、容器３Ａ～３Ｃの底部に加えられる力を分散させることができる。なお、各受け部材２５の第１の面２５ａが容器３Ａ～３Ｃの底部に密着しているため、底部に加えられる力を効果的に分散させることができる。よって、容器３Ａ～３Ｃが破損し難い。 In the present embodiment, the receiving members 25 are provided between the bottoms of the containers 3A to 3C and the plungers 12, and the containers 3A to 3C are biased by biasing the receiving members 25. The force applied to the bottom of ~ 3C can be dispersed. Since the first surface 25a of each receiving member 25 is in close contact with the bottom of the containers 3A to 3C, the force applied to the bottom can be effectively dispersed. Therefore, the containers 3A to 3C are hardly damaged.
　受け部材２５の凹部２５ｃの形状が、プランジャ１２の棒状部１４の先端の形状に対応した形状であるため、棒状部１４と受け部材２５との接触面積を大きくすることができる。それによって、容器３Ａ～３Ｃを付勢するに際し、より一層確実に底部が傾斜可能な状態とすることができる。さらに、容器３Ａ～３Ｃの底部に加えられる力をより一層分散させることができる。なお、受け部材２５には、凹部２５ｃは設けられていなくともよい。この場合においても、各プランジャ１２により容器３Ａ～３Ｃの底部に加えられる力を分散させることができる。 Since the shape of the concave portion 25c of the receiving member 25 is a shape corresponding to the shape of the tip of the rod-shaped portion 14 of the plunger 12, the contact area between the rod-shaped portion 14 and the receiving member 25 can be increased. Thus, when the containers 3A to 3C are urged, the bottom can be tilted more reliably. Furthermore, the force applied to the bottom of the containers 3A to 3C can be further dispersed. The receiving member 25 does not have to be provided with the recess 25c. Even in this case, the force applied to the bottoms of the containers 3A to 3C by the plungers 12 can be dispersed.
　次に、各ガラス蓋５を透明基板７に密着させた状態で、透明基板７側からレーザー光Ｌを照射する。 Next, laser light L is irradiated from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7.
　本実施形態においても、封着材料４Ａに各ガラス蓋５及び容器３Ａ～３Ｃを確実に密着させた状態で、レーザー光Ｌの照射により各ガラス蓋５及び容器３Ａ～３Ｃを接合することができる。よって、気密性が高い気密パッケージを得ることができる。 Also in the present embodiment, the glass lid 5 and the containers 3A to 3C can be joined by irradiation with the laser light L in a state where the glass lid 5 and the containers 3A to 3C are securely adhered to the sealing material 4A. . Therefore, an airtight package having high airtightness can be obtained.
１…気密パッケージ
３，３Ａ～３Ｃ…容器
３ａ…底部
３ｂ…側壁部
４…封着材料層
４Ａ…封着材料
５…ガラス蓋
６…第１の治具
６ａ…治具固定部
７…透明基板
８ａ，８ｂ…第１，第２の治具側壁部
９…第２の治具
９ａ…治具底部
９ｂ…第３の治具側壁部
９ｃ，９ｄ…支持部材
１２…プランジャ
１３…本体
１４…棒状部
２５…受け部材
２５ａ，２５ｂ…第１，第２の面
２５ｃ…凹部
３６…第１の治具
３９…第２の治具
１０６…第１の治具
１０９…第２の治具
１０９ｃ…ステージ DESCRIPTION OF SYMBOLS 1 ... Airtight package 3, 3A-3C ... Container 3a ... Bottom part 3b ... Side wall part 4 ... Sealing material layer 4A ... Sealing material 5 ... Glass cover 6 ... First jig 6a ... Jig fixing part 7 ... Transparent substrate 8a, 8b ... first and second jig side walls 9 ... second jig 9a ... jig bottom 9b ... third jig side walls 9c, 9d ... support member 12 ... plunger 13 ... main body 14 ... rod-shaped Portion 25 ... Receiving members 25a, 25b ... First and second surfaces 25c ... Recess 36 ... First jig 39 ... Second jig 106 ... First jig 109 ... Second jig 109c ... Stage

Claims (7)

  1. 　容器をガラス蓋で封止した気密パッケージを製造する方法であって、
    　前記ガラス蓋を密着させるための透明基板を用意する工程と、
    　前記容器と前記ガラス蓋の間に封着材料を配置した状態で、付勢部材によって前記容器を付勢して前記ガラス蓋を前記透明基板に密着させる工程と、
    　前記ガラス蓋を前記透明基板に密着させた状態で、前記透明基板側から前記封着材料にレーザー光を照射して、前記封着材料で前記容器と前記ガラス蓋を接合する工程とを備える、気密パッケージの製造方法。     A method of manufacturing an airtight package in which a container is sealed with a glass lid,
    Preparing a transparent substrate for closely attaching the glass lid;
    In a state where a sealing material is disposed between the container and the glass lid, the step of urging the container with an urging member to closely adhere the glass lid to the transparent substrate;
    Irradiating the sealing material with laser light from the transparent substrate side in a state where the glass lid is in close contact with the transparent substrate, and joining the container and the glass lid with the sealing material. A manufacturing method of an airtight package.
  2. 　複数の前記気密パッケージを製造する方法であって、
    　複数の前記容器のそれぞれに対して設けられた複数の前記付勢部材によって前記容器のそれぞれを独立して付勢し、複数の前記ガラス蓋を前記透明基板に密着させる、請求項１に記載の気密パッケージの製造方法。     A method of manufacturing a plurality of said hermetic packages,
    The plurality of urging members provided for each of the plurality of containers independently urge each of the containers, and the plurality of glass lids are in close contact with the transparent substrate. A manufacturing method of an airtight package.
  3. 　前記容器の底部の略中央部を付勢することにより、前記容器の前記底部を傾斜可能な状態で付勢して前記ガラス蓋を前記透明基板に密着させる、請求項１または２に記載の気密パッケージの製造方法。 The airtight according to claim 1 or 2, wherein the glass lid is brought into close contact with the transparent substrate by urging the bottom of the container in an inclinable state by urging the substantially central part of the bottom of the container. Package manufacturing method.
  4. 　前記容器の底部と前記付勢部材との間に受け部材を設け、前記受け部材を前記付勢部材で付勢することにより前記容器を付勢する、請求項１または２に記載の気密パッケージの製造方法。 The airtight package according to claim 1 or 2, wherein a receiving member is provided between the bottom of the container and the biasing member, and the container is biased by biasing the receiving member with the biasing member. Production method.
  5. 　前記容器の前記底部と接する前記受け部材の第１の面が、前記底部と密着するように形成されている、請求項４に記載の気密パッケージの製造方法。 The method for manufacturing an airtight package according to claim 4, wherein the first surface of the receiving member in contact with the bottom portion of the container is formed so as to be in close contact with the bottom portion.
  6. 　前記受け部材の前記付勢部材側の第２の面に凹部が形成されており、前記凹部に前記付勢部材を接触させて付勢することにより、前記底部が傾斜可能な状態で前記受け部材及び前記容器を付勢して前記ガラス蓋を前記透明基板に密着させる、請求項４または５に記載の気密パッケージの製造方法。 A recess is formed in the second surface of the receiving member on the biasing member side, and the receiving member is biased by bringing the biasing member into contact with the recess and biasing the receiving member. The manufacturing method of the airtight package of Claim 4 or 5 which urges | biases the said container and adheres the said glass cover to the said transparent substrate.
  7. 　前記付勢部材が、棒状部と、前記棒状部に接続されたバネ部材とを有する、請求項１～６のいずれか一項に記載の気密パッケージの製造方法。 The method for manufacturing an airtight package according to any one of claims 1 to 6, wherein the biasing member includes a rod-shaped portion and a spring member connected to the rod-shaped portion.
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