JP2023005724A - Manufacturing method of assembly, and manufacturing apparatus of assembly - Google Patents

Abstract

To enhance adhesion between a sealing material and each substrate in manufacturing an assembly by irradiating the sealing material positioned between substrates with a laser beam.SOLUTION: A joining process in a production method of an assembly includes a supporting step for holding a laminate on a support device and a pressing step for pressing the laminate. A press member of the support device is a circular transparent glass plate. A seal member of the support device is composed so as to circularly enclose the laminate between the press member and a base member. In the pressing step, air pressure in a housing space is reduced by an air pressure regulator to adhere the press member to the seal member and to press the laminate using the press member.SELECTED DRAWING: Figure 4

Description

The present invention relates to a method and apparatus for manufacturing a bonded body by bonding substrates.

As is well known, LED devices and other electronic devices are housed in hermetic packages to prevent deterioration. The airtight package is configured as a bonded body by bonding, for example, a first substrate, which is a base material, and a second substrate, which is a glass substrate.

For example, in Patent Document 1, a sealing material (bonding material) is interposed between a first substrate which is a base material (member to be bonded) and a second substrate made of a glass member, and the sealing material is heated. is disclosed.

In this manufacturing method, a laminate is prepared by disposing a sealing material between a first substrate and a second substrate, this laminate is mounted on a jig, and lamination is performed by adjusting the air pressure inside the jig. press the body. Further, while the laminate is pressed, the sealing material is irradiated with a laser beam to form a joint portion from the sealing material, thereby manufacturing a joined body (see paragraphs 0036 to 0046 of the same document).

The jig used in this manufacturing method includes a jig body that supports the laminate and a jig body lid that presses the laminate. As shown in FIG. 23 (equivalent to FIG. 3 of the same document), the jig body 101 includes a recess 102 that accommodates the laminate LM, and a biasing member that is arranged in the recess 102 and on which the laminate LM is placed. a unit 103;

Further, as shown in FIG. 23, the jig body 101 has a sealing member (packing material) 104 at the tip (upper end) of the peripheral wall (see paragraph 0041 of the same document). The seal member 104 is configured in a quadrangular shape in plan view so as to surround the biasing portion 103 and the laminate LM according to the shape of the peripheral wall portion of the jig body 101 .

The jig main body cover is formed in a rectangular shape according to the shapes of the jig main body 101 and the sealing member 104 (see FIG. 4 of the same document). The jig body cover is placed on the seal member 104 when attached to the jig body 101 .

In the method for manufacturing a joined body according to Patent Document 1, the gas in the recess 102 is discharged by a pump, and the air pressure in the recess 102 is lowered to bring the jig body lid into close contact with the seal member 104 and to The laminate body LM can be pressed by bending the main body cover.

Japanese Unexamined Patent Application Publication No. 2021-31306

In the above-described conventional bonded body manufacturing method, the seal member 104 is formed in a square shape, and the jig main body lid is also formed in a square shape, so that the following problems may occur.

That is, as shown in FIG. 23, the distance D1 from the center position P1 of one side of the sealing member 104 arranged in a square shape to the center O of the laminate LM and the stacking distance from the position P2 of the corner of the sealing member 104 It differs from the distance D2 to the center O of the body LM. Mainly due to the difference between the distances D1 and D2, there is a possibility that the pressing force of the jig main body cover against the laminated body LM may vary. This variation in pressing force becomes more pronounced as the size of the laminate LM increases.

As described above, when the pressing force of the laminated body by the lid for the jig main body varies, the sealing material located between the first substrate and the second substrate does not adhere sufficiently to each substrate. occurs, resulting in poor bonding.

The present invention has been made in view of the above circumstances. The technical task is to improve

The present invention is intended to solve the above problems, and manufactures a joined body comprising a first substrate, a second substrate, and a sealing layer that joins the first substrate and the second substrate. a lamination step of interposing a sealing material between the first substrate and the second substrate, and forming a laminate by laminating the first substrate and the second substrate; a bonding step of forming the sealing layer by irradiating the sealing material in the laminate with a laser beam, wherein the bonding step comprises a supporting step of mounting the laminate on a support device; and a laser irradiation step of irradiating the sealing material with the laser beam. The supporting device includes a pressing member that presses the laminate and a base member that supports the pressing member a seal member disposed between the pressing member and the base member; a space for accommodating the stack formed between the pressing member and the base member; and air pressure adjustment in the accommodation space. and an air pressure adjusting device, wherein the pressing member is a transparent glass plate configured in a circular shape, and the sealing member surrounds the laminate in a circular shape between the pressing member and the base member. In the pressing step, the air pressure in the housing space is lowered by the air pressure adjusting device, so that the pressing member is brought into close contact with the sealing member, and the stack is pressed by the pressing member. It is characterized by

According to this configuration, the pressing member is a circular transparent glass plate, and the sealing member positioned between the base member and the pressing member is configured to surround the laminate in a circular shape, so that in the pressing step, Variation in the force with which the pressing member presses the laminate can be minimized. This makes it possible to improve the adhesion of the sealing material in the laminate to each substrate.

The support device includes a support member that supports the laminate within the accommodation space, the support member has an accommodation portion that accommodates the laminate, and the support step includes: accommodating the first substrate; The second substrate may be accommodated in the accommodation portion such that a portion of the second substrate in the thickness direction protrudes from the accommodation portion toward the pressing member. Here, the accommodating portion may be a concave portion capable of accommodating the laminate, and is not particularly limited as long as it is in a form capable of positioning the laminate. The space may be used as the accommodation section.

A glass substrate is used as the second substrate constituting the laminate, and a part of the second substrate in the thickness direction protrudes from the accommodating portion of the support member. It is possible to reliably contact the substrate and effectively press the laminate.

In addition, since the second substrate is housed in the housing portion other than the portion protruding from the housing portion as described above, the second substrate can be engaged with the housing portion without positional deviation in the supporting step and the pressing step. will be stopped. Thereby, the sealing material of the laminate can be accurately irradiated with the laser beam.

A dimension by which a portion of the second substrate in the thickness direction protrudes from the accommodating portion may be 0.05 to 0.95 times the thickness dimension of the second substrate.

In this method, the air pressure in the housing space is preferably 100-95,000 Pa, more preferably 1,000-85,000 Pa.

The thickness of the pressing member may be 3-10 mm. Also, the Young's modulus of the pressing member is preferably 50 to 80 GPa, more preferably 60 to 70 GPa. As a result, in the pressing step, the pressing member can appropriately press the layered product with moderate deflection.

In the supporting step, the accommodation space may be filled with dry air. As a result, the inside of the cavity formed in the manufactured bonded body can be made to have less moisture, and deterioration in the performance of electronic elements such as LED elements in the hermetic package can be avoided.

Furthermore, it is preferable that the first substrate is a highly thermally conductive substrate and the second substrate is a glass substrate.

The present invention is intended to solve the above problems, and manufactures a joined body comprising a first substrate, a second substrate, and a sealing layer that joins the first substrate and the second substrate. A device, wherein a sealing material is interposed between the first substrate and the second substrate, and a support for supporting a laminate constructed by overlapping the first substrate and the second substrate. and a laser irradiation device that forms the sealing layer by irradiating the sealing material in the laminate with a laser beam, wherein the support device includes a pressing member that presses the laminate; a base member that supports the pressing member; a sealing member that is arranged between the pressing member and the base member; and an accommodation space for the stacked body that is formed between the pressing member and the base member; an air pressure adjustment device that adjusts the air pressure in the housing space, wherein the pressing member is a transparent glass plate configured in a circular shape, and the sealing member is provided between the pressing member and the base member, The stack is configured to surround the stack in a circle, and the pressing member is brought into close contact with the sealing member by reducing the pressure in the housing space with the pressure adjusting device, and the stack is pressed by the pressing member. It is characterized by being configured to be pressed.

According to this configuration, the pressing member is a circular transparent glass plate, and the sealing member positioned between the base member and the pressing member is configured to surround the laminate in a circular shape, so that the pressing member is laminated. It is possible to minimize variations in the force that presses the body. This makes it possible to improve the adhesion of the sealing material in the laminate to each substrate.

ADVANTAGE OF THE INVENTION According to this invention, when manufacturing a joined body by irradiating a laser beam to the sealing material interposed between the board|substrates, the adhesiveness of a sealing material and each board|substrate can be improved.

FIG. 4 is a plan view of a joined body; FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1; It is a bottom view of a second substrate. FIG. 3 is a cross-sectional view showing a bonded body manufacturing apparatus; It is a top view which shows a part of support apparatus. FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG. 5; It is a top view of a support member. 4 is a plan view of a pressing member; FIG. It is a top view of a frame. FIG. 5 is a cross-sectional view showing how the support member is attached to the base member; FIG. 4 is a plan view showing a method of attaching the support member to the base member; FIG. 12 is a cross-sectional view along the XII-XII arrow line of FIG. 11; 4 is a flow chart showing a method for manufacturing a joined body; It is sectional drawing which shows a lamination process. It is a flow chart which shows a joining process. It is sectional drawing which shows a support process. It is sectional drawing which shows a support process. FIG. 10 is a plan view showing a bonded body manufacturing apparatus according to a second embodiment; It is a top view of a support member. FIG. 5 is a cross-sectional view showing how the support member is attached to the base member; It is sectional drawing which shows a support process. It is sectional drawing which shows a support process. FIG. 3 is a plan view showing a part of a conventional bonded body manufacturing apparatus;

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated, referring drawings. 1 to 17 show a first embodiment of a method and apparatus for manufacturing a joined body according to the present invention.

1 and 2 exemplify a hermetic package as a joint produced by the present invention. The joined body 1 includes a first substrate 2 as a base material, a second substrate 3 superimposed on the first substrate 2, a plurality of sealing layers 4 for joining the first substrate 2 and the second substrate 3, a device 5 housed between the first substrate 2 and the second substrate 3 and inside the sealing layer 4 .

The first substrate 2 has, for example, a rectangular shape, but is not limited to this shape. The first substrate 2 has a first main surface 2a on which the element 5 is installed and a second main surface 2b located on the opposite side of the first main surface 2a. The first main surface 2a may have a recess that can accommodate the element 5 .

The first substrate 2 is composed of a highly thermally conductive substrate such as a silicon substrate, but is not limited thereto, and may be composed of other metal substrates, ceramic substrates, semiconductor substrates, and other various substrates. The thickness of the first substrate 2 is within the range of 0.1 to 5.0 mm, but is not limited to this range.

The thermal conductivity of the first substrate 2 may be higher than that of the second substrate 3 . The thermal conductivity of the first substrate 2 at 20° C. is preferably 10 to 500 W/m·K, more preferably 30 to 300 W/m·K, still more preferably 70 to 250 W/m·K, particularly preferably 100 to 300 W/m·K. 200 W/m·K, but not limited to this range.

The second substrate 3 is composed of, for example, a rectangular transparent glass substrate, but is not limited to this shape. The second substrate 3 has a first major surface 3a and a second major surface 3b located on the opposite side of the first major surface 3a.

As the glass forming the second substrate 3, for example, non-alkali glass, borosilicate glass, soda lime glass, quartz glass, crystallized glass having a low coefficient of thermal expansion, or the like can be used. Although the thickness of the second substrate 3 is not particularly limited, a thickness within a range of 0.01 to 2.0 mm is used, for example. The thermal conductivity of the second substrate 3 at 20° C. is preferably 0.5 to 5 W/m·K, but is not limited to this range.

A plurality of sealing layers 4 are formed on the joined body 1 in a predetermined arrangement pattern. The sealing layer 4 is formed by interposing a plurality of sealing materials between the first substrate 2 and the second substrate 3, irradiating the sealing materials with laser light, and softening and flowing them by heating.

3 shows a bottom view of the second substrate 3 before being bonded to the first substrate 2. FIG. When the sealing material is interposed between the first substrate 2 and the second substrate 3, the sealing material 6 may be adhered to the first main surface 3a of the second substrate 3 in advance, for example. Alternatively, the sealing material may be fixed to the first substrate 2 in advance, or a sheet-like sealing material may be interposed between the first substrate 2 and the second substrate 3 .

Various materials can be used as the sealing material. Among them, from the viewpoint of increasing the sealing strength, it is preferable to use a composite material (glass frit) containing bismuth-based glass powder and refractory filler powder. Not only bismuth-based glass, but also glass powder such as silver phosphate-based glass and tellurium-based glass can be used as the sealing material.

Various materials can be used as the refractory filler powder. It is preferably composed of one or two or more selected materials.

As shown in FIG. 1, the sealing layer 4 is formed in the shape of a closed curve so as to join the space in which the element 5 is accommodated. In the present invention, the term "closed curve" means not only a shape composed only of curved lines, but also a shape composed of a combination of curved lines and straight lines, and a shape composed only of straight lines (for example, quadrilateral and other polygonal shapes). including.

The thickness of the sealing layer 4 is preferably 1 μm to 20 μm, more preferably 3 to 8 μm. The width W of the sealing layer 4 is preferably 50-2000 μm, more preferably 100-1000 μm.

The element 5 is mounted on the first major surface 2 a of the first substrate 2 . Further, the element 5 is arranged in a space (cavity) defined by the first main surface 2 a of the first substrate 2 , the first main surface 3 a of the second substrate 3 and the sealing layer 4 . As the element 5, various elements such as a light emitting element such as a deep ultraviolet LED (Light Emitting Diode), a MEMS (Micro Electro Mechanical Systems) element, a CCD (Charge Coupled Device) element, and the like can be used.

4 to 12 show the manufacturing apparatus 7 for the joined body 1. FIG. As shown in FIG. 4, the manufacturing apparatus 7 includes a support device 8 for supporting a laminate LM formed by laminating a first substrate 2 and a second substrate 3 with a sealing material 6 interposed therebetween; and a laser irradiation device 9 for forming the sealing layer 4 by irradiating the sealing material 6 of the LM with the laser light L.

As shown in FIGS. 4 to 9, the support device 8 includes a support member 10 that supports the laminate LM, a pressing member 11 that presses the laminate LM, a base member 12 that supports the pressing member 11, and a support member. 10 to the base member 12; a frame 14 to fix the pressing member 11 to the base member 12; a sealing member 15 arranged between the pressing member 11 and the base member 12; and the base member 12 , an accommodation space 16 for the laminated body LM, and an air pressure adjustment device 17 for adjusting the air pressure in the accommodation space 16 .

The support member 10 is arranged in the accommodation space 16 together with the laminate LM. The support member 10 is configured by a circular plate member made of metal (such as stainless steel), for example (see FIG. 7). The material and shape of the support member 10 are not limited to those of this embodiment. The support member 10 has a first surface 10a and a second surface 10b opposite the first surface 10a. The first surface 10a has an accommodation portion 18 that accommodates the laminate LM. In the present embodiment, the accommodation portion 18 is configured by a concave portion capable of accommodating the laminate LM, but the configuration of the accommodation portion 18 is not particularly limited as long as it can position the laminate LM. A plurality of positioning protrusions may be provided on the first surface 10a of the , and the space inside the protrusions may be used as the housing portion 18 .

As shown in FIG. 8, the pressing member 11 is, for example, a circular transparent glass plate. The thickness of the pressing member 11 is preferably 3 to 10 mm, for example. The Young's modulus of the pressing member 11 is preferably 50-80 GPa, more preferably 60-70 GPa. As a result, in the pressing step, which will be described later, the pressing member can suitably press the laminated body with moderate bending. The pressing member 11 has a first surface 11 a that contacts the seal member 15 and the laminate LM, and a second surface 11 b that contacts the frame 14 .

The base member 12 is made of metal (for example, stainless steel), but may be made of other materials. The base member 12 has a wall portion 19 and a bottom portion 20 for forming the accommodation space 16 .

FIG. 5 shows a plan view of the base member 12 to which the support member 10 is fixed by the fixing mechanism 13. FIG. The wall portion 19 of the base member 12 is configured in a cylindrical shape, but is not limited to this shape. A support seat portion 21 to which the seal member 15 is attached is formed in the inner halfway portion of the wall portion 19 . The support seat portion 21 is a surface facing the pressing member 11 attached to the base member 12 . The support seat portion 21 is formed with an annular groove portion 21a in plan view to which the sealing member 15 is attached.

As shown in FIGS. 4 and 5, the wall portion 19 has an end surface 19a (upper surface), inner peripheral surfaces 19b and 19c, and an outer peripheral surface 19d.

The frame 14 is fixed to the end surface 19 a of the wall portion 19 via the fixing member 22 . The fixing member 22 is configured by, for example, a bolt or a screw member, and has a head portion 22a and a shaft portion 22b. The end face 19a is formed with a plurality of screw holes 23 with which the shaft portion 22b of the fixing member 22 is engaged.

The inner peripheral surfaces 19b and 19c of the wall portion 19 are composed of a first inner peripheral surface 19b functioning as a guide surface for guiding the pressing member 11 to the support seat portion 21 and a second inner peripheral surface 19c through which the support member 10 can be inserted. including. The diameter of the first inner peripheral surface 19 b is larger than the diameter of the pressing member 11 . The diameter of the second inner peripheral surface 19 c is larger than the diameter of the support member 10 .

A bottom portion 20 of the base member 12 is formed inside the cylindrical wall portion 19 . The bottom portion 20 is configured by a circular surface in plan view.

As shown in FIGS. 4 to 6, the fixing mechanism 13 includes an elastic member 24 that supports the support member 10, a fixing member 25 that fixes the support member 10 to the base member 12, and a fixing member 25 that is formed on and fixed to the support member 10. An insertion hole 26 through which a part of the member 25 can be inserted, an engaging recess 27 formed in the supporting member 10 and engaging a part of the fixing member 25, and an engaging recess 27 formed in the supporting member 10 and engaging the fixing member 25. and a guide groove 28 for relatively moving between the insertion hole 26 and the locking recess 27 .

A resilient member 24 is attached to the bottom portion 20 of the base member 12 . A plurality of elastic members 24 are arranged on the bottom portion 20 . The elastic member 24 is composed of, for example, a compression coil spring, but is not limited to this, and may be composed of other springs, rubber, or other materials. A plurality of mounting recesses 29 that accommodate portions of the elastic members 24 are formed in the bottom portion 20 . One end of the elastic member 24 is inserted into the mounting recess 29 and the other end protrudes from the bottom 20 . This elastic member 24 has a function of urging the support member 10 by its elastic restoring force.

The fixing member 25 is configured by, for example, a bolt or a screw member, and has a head portion 25a and a shaft portion 25b. The head portion 25a has a dimension (diameter) larger than the diameter of the shaft portion 25b. The shaft portion 25 b has a male thread portion 30 . The shaft portion 25 b is fixed to the bottom portion 20 of the base member 12 . The bottom portion 20 of the base member 12 is formed with a threaded hole 31 into which the shaft portion 25b is fitted.

As shown in FIG. 7, the insertion hole 26 is configured in a circular shape in plan view, but is not limited to this shape. The insertion hole 26 has a diameter larger than the size (diameter) of the head portion 25a so that the head portion 25a and the shaft portion 25b of the fixing member 25 can be inserted.

The locking recess 27 has a side wall surface 27a into which the head 25a of the fixing member 25 can be inserted, and a bottom surface 27b that locks the head 25a. The side wall surface 27a has a circular shape in plan view, but is not limited to this shape. The side wall surface 27a has a diameter larger than the size of the head 25a of the fixing member 25 so as not to contact the head 25a. Bottom surface 27b is configured to contact head 25a.

The guide groove 28 penetrates the support member 10 in its thickness direction so that the shaft portion 25b of the fixing member 25 is inserted therethrough. The guide groove 28 is formed between the insertion hole 26 of the fixing member 25 and the bottom surface 27b of the locking recess 27 so that the shaft portion 25b of the fixing member 25 can move relatively between the insertion hole 26 and the locking recess 27. It is connected. Specifically, one end of the guide groove 28 communicates with the inner peripheral surface of the insertion hole 26 . The other end of the guide groove 28 is positioned at the center of the bottom surface 27 b of the locking recess 27 .

The guide groove 28 is configured in an arc shape or a straight line shape in plan view. The guide groove 28 allows the shaft portion 25b of the fixing member 25 to move relatively between the insertion hole 26 and the locking recess 27 by rotating the support member 10 around its center.

As shown in FIG. 9, the frame 14 is a plate-like member having an annular shape in plan view. The frame 14 is fixed to the end face 19 a of the wall portion 19 of the base member 12 by the fixing member 22 . The frame 14 includes an insertion hole 32 through which the shaft portion 22b of the fixing member 22 is inserted, an engaging recess 33 that accommodates the head portion 22a of the fixing member 22, a tubular portion 34, and an opening portion 35.

As shown in FIGS. 4 and 9, the insertion hole 32 and the locking recess 33 are formed concentrically in plan view. A plurality of insertion holes 32 and locking recesses 33 are formed in the frame 14 . The cylindrical portion 34 is configured in a cylindrical shape so as to correspond to the shape of the wall portion 19 of the base member 12 . The diameter of the inner peripheral surface of the tubular portion 34 is larger than the diameter of the outer peripheral surface 19 d of the wall portion 19 of the base member 12 . The opening 35 is circular in plan view. The diameter of the opening 35 is smaller than the diameter of the pressing member 11 .

The seal member 15 is composed of an elastic member such as rubber (for example, an O-ring). As shown in FIGS. 4 and 5 , the seal member 15 is arranged in an annular groove 21 a formed in the support seat 21 of the base member 12 . The seal member 15 seals the accommodation space 16 by being in close contact with the pressing member 11 .

As shown in FIG. 8 , the sealing member 15 is configured to circularly surround the laminate LM between the pressing member 11 and the base member 12 . The diameter of the circular shape of the sealing member 15 is smaller than the diameter of the pressing member 11 and larger than the diameter of the supporting member 10 .

The accommodation space 16 for the laminate LM is a space formed by the pressing member 11 , the base member 12 , and the sealing member 15 . The housing space 16 becomes airtight by bringing the pressing member 11 into close contact with the sealing member 15 attached to the support seat portion 21 of the base member 12 . The accommodation space 16 can accommodate the laminate LM, the support member 10 and the fixing mechanism 13 .

As shown in FIG. 4 , the atmospheric pressure adjustment device 17 is formed in the base member 12 and includes a channel 36 for discharging the gas in the housing space 16, a pipe 37 connected to the channel 36, and a pipe 37 It mainly includes a regulating valve 38 and a pump 39 provided in the middle of the . The flow path 36 includes a suction port 36 a formed in the bottom portion 20 of the base member 12 and an exhaust port 36 b formed in the outer surface of the base member 12 . The atmospheric pressure adjusting device 17 sucks the air in the housing space 16 with the pump 39 to lower the pressure in the housing space 16 and make the housing space 16 have a negative pressure with respect to the atmosphere.

As the laser irradiation device 9, a device that emits a semiconductor laser is preferably used, but is not limited to this, and a device that emits various lasers such as a YAG laser, a green laser, and an ultrashort pulse laser may be used. .

A method for fixing the support member 10 to the base member 12 by the fixing mechanism 13 will be described below. First, as shown in FIG. 10, with the shaft portion 25b of the fixing member 25 attached to the screw hole 31 of the base member 12, the support member 10 is brought close to the base member 12 from above. Thereafter, while lowering the support member 10, the head portion 25a and the shaft portion 25b of the fixing member 25 are inserted through the insertion hole 26 as shown in FIGS. In this case, the upper end of the elastic member 24 attached to the base member 12 contacts the second surface 10b of the support member 10. As shown in FIG.

Thereafter, the support member 10 is pressed against the elastic member 24 so that the head portion 25a of the fixing member 25 protrudes from the first surface 10a of the support member 10 as shown in FIG. The elastic member 24 contracts while being elastically deformed. As a result, the elastic member 24 generates an elastic restoring force that resists the force that presses the support member 10 .

Next, while maintaining the protruding state of the head portion 25a, the support member 10 is rotated counterclockwise in plan view as indicated by the arrow in FIG. As a result, the shaft portion 25b that has been inserted through the insertion hole 26 relatively moves toward the locking recess portion 27 through the guide groove 28. As shown in FIG. As indicated by the two-dot chain line in FIG. 12 , the head portion 25 a of the fixing member 25 relatively moved toward the engaging recess 27 by the guide groove 28 is positioned above the engaging recess 27 .

After that, when the force pressing the support member 10 against the elastic member 24 is released, the support member 10 is pushed up by the biasing force of the elastic member 24 . As a result, the head portion 25 a of the fixing member 25 enters the locking recess 27 . The locking recess 27 is locked to the fixing member 25 by contacting the bottom surface 27b with the head 25a. In this state, it is desirable that the elastic member 24 does not return to its free length and that the elastic restoring force continues to urge the support member 10 .

The force with which the elastic member 24 biases the support member 10 can be adjusted by rotating the fixing member 25 around the axis and changing the position of the head 25a in the axial direction. To enable this position adjustment, the end of the shaft portion 25b of the fixing member 25 should not be positioned at the bottom of the screw hole 31 formed in the base member 12, but should be positioned in the middle of the screw hole 31. is preferred.

When the support member 10 is removed from the base member 12, the support member 10 is pressed against the elastic member 24 to contract the elastic member 24, and the head portion 25a of the fixing member 25 is supported so as to protrude from the locking recess 27. Move member 10 downward. After that, the support member 10 is rotated clockwise in plan view. Thereby, the shaft portion 25 b of the fixing member 25 is engaged with the guide groove 28 . After that, the supporting member 10 and the fixing member 25 are moved relative to each other, so that the shaft portion 25b is arranged in the insertion hole 26. As shown in FIG.

Next, the support member 10 is lifted so that the head portion 25a of the fixing member 25 passes through the insertion hole 26 from the first surface 10a side toward the second surface 10b side. The support member 10 is thereby removed from the base member 12 .

As described above, the fixing mechanism 13 allows the support member 10 to be easily attached to or removed from the base member 12 . Further, by adjusting the position of the fixing member 25 with respect to the screw hole 31, it is possible to adjust the fixing position of the support member 10 according to the thickness of the laminate LM.

A method of manufacturing the joined body 1 using the manufacturing apparatus 7 having the above configuration will be described below with reference to FIGS. 13 to 17. FIG. As shown in FIG. 13, the method includes a lamination step S1 and a bonding step S2.

As shown in FIG. 14, in the lamination step S1, first, the first substrate 2 and the second substrate 3 are placed so that the first main surface 2a of the first substrate 2 and the first main surface 3a of the second substrate 3 face each other. The substrate 3 is overlaid. In addition, the element 5 is installed in advance on the first main surface 2 a of the first substrate 2 . The laminate LM is formed by laminating the first substrate 2 and the second substrate 3 such that the element 5 is positioned inside the sealing material 6 .

As shown in FIG. 15, the joining step S2 includes a supporting step S21, a pressing step S22, and a laser irradiation step S23.

In the supporting step S21, the laminate LM formed in the laminating step S1 is mounted on the supporting device 8. As shown in FIG. That is, as shown in FIG. 16 , first, the laminate LM is accommodated in the accommodation portion 18 of the support member 10 attached to the base member 12 by the fixing mechanism 13 .

As shown in FIG. 17 , the thickness dimension TLM of the laminate LM is preferably larger than the depth dimension D of the accommodating portion 18 . The laminated body LM is accommodated in the accommodating portion 18 so that a portion of the second substrate 3 in the thickness direction protrudes from the accommodating portion 18 toward the pressing member 11 . The dimension PD1 at which a portion of the second substrate 3 in the thickness direction protrudes from the concave portion is 0.05 to 0.95 times the thickness dimension T of the second substrate 3 (0.05T≦PD1≦0.95T). It is preferable that

Next, the pressing member 11 is placed on the sealing member 15 attached to the support seat portion 21 of the base member 12 . As a result, the first surface 11 a of the pressing member 11 comes into contact with the sealing member 15 . In this case, it is preferable that the pressing member 11, the sealing member 15, and the laminate LM are arranged concentrically. Also, in this state, the first surface 11a of the pressing member 11 may come into contact with the second main surface 3b of the second substrate 3 in the laminate LM.

After that, the frame 14 is placed on the end face 19 a of the wall portion 19 of the base member 12 , and the frame 14 is fixed to the wall portion 19 by the fixing member 22 . That is, the insertion hole 32 of the frame body 14 is aligned with the screw hole 23 of the wall portion 19 of the base member 12, the shaft portion 22b of the fixing member 22 is inserted through the insertion hole 32 and then engaged with the screw hole 23, and the fixing member is mounted. Tighten 22. In this state, the frame 14 sandwiches the pressing member 11 together with the sealing member 15 . Further, the opening 35 of the frame 14 exposes a part of the second surface 11 b of the pressing member 11 toward the laser irradiation device 9 . This completes the attachment of the laminate LM to the supporting device 8 . As a result, the laminated body LM is housed in the housing space 16 together with the support member 10 .

In addition, in the supporting step S21, the accommodation space 16 may be filled with, for example, dry air. Dry air is a gas from which moisture has been removed by drying, and means a gas that does not generate water even if the pressure fluctuates. As the dry air, for example, a dried gas in the environment where the manufacturing apparatus 7 is arranged, high-purity nitrogen gas, or the like can be used.

For example, it is preferable that the storage space 16 is filled with the supporting device 8 in a working space filled with dry air and performing the supporting step S21 in the working space. As a result, the dry air fills not only the accommodation space 16 but also the space inside the sealing material 6 (accommodation space of the element 5) between the first substrate 2 and the second substrate 3 in the laminate LM. will be

In the subsequent pressing step S22, the gas in the housing space 16 is sucked by the pump 39 through the flow path 36 of the air pressure adjusting device 17 and discharged to the outside. As a result, the air pressure in the accommodation space 16 is lowered to become a negative pressure with respect to the atmosphere. Due to the action of this negative pressure, the first surface 11a of the pressing member 11 is brought into close contact with the sealing member 15 and presses the second substrate 3 of the laminate LM. In addition, in the pressing step S22, the pressure in the accommodation space 16 can be adjusted by operating the adjustment valve . The atmospheric pressure of the housing space 16 is preferably 100-95,000 Pa, more preferably 1,000-85,000 Pa.

In the pressing step S<b>22 , it is preferable that the pressing member 11 bends so as to press the laminate LM due to the action of the negative pressure against the atmosphere in the housing space 16 .

As shown in FIG. 4, in the laser irradiation step S23, the sealing material 6 of the laminate LM is heated by irradiating the sealing material 6 of the laminate LM with the laser light L from the laser irradiation device 9 (heating step). The laser light L is transmitted through the pressing member 11 and the second substrate 3 to irradiate the sealing material 6 . In the bonding step S2, the sealing material 6 is heated by irradiation with the laser light L to a temperature equal to or higher than the softening point of the sealing material 6 or to a temperature at which the sealing material 6 softens and flows. The laser light L is irradiated so as to circulate along the closed curve of the sealing material 6 .

The wavelength of the laser light L is preferably 600-1600 nm. As a laser to be used, a semiconductor laser is preferably used, but not limited to this, various lasers such as a YAG laser, a green laser, and an ultrashort pulse laser may be used.

By being heated by the laser light L, the sealing material 6 softens and flows, and then solidifies. Thereby, the sealing layer 4 that airtightly joins the first substrate 2 and the second substrate 3 is formed. As described above, the joined body 1 including the first substrate 2, the second substrate 3, and the sealing layer 4 is manufactured. The joined body 1 is removed from the support member 10 after the frame 14 and the pressing member 11 are removed from the base member 12 .

According to the manufacturing method and the manufacturing apparatus 7 of the joined body 1 according to the present embodiment described above, the pressing member 11 of the supporting device 8 is formed in a circular shape, and the sealing member 11 is formed between the pressing member 11 and the base member 12. 15 so as to enclose the laminated body LM in a circular shape, compared to the conventional case where the pressing member (jig main body cover) and the sealing member (packing material) are rectangular, Variation in the pressing force of the pressing member 11 against the laminate LM can be reduced as much as possible. As a result, it is possible to reduce defective bonding due to the occurrence of portions where the adhesion between the sealing material 6 and the substrates 2 and 3 in the laminate LM is insufficient.

Figures 18-22 show a second embodiment of the invention. In this embodiment, the configuration of the laminate LM and the configuration of the supporting device 8 of the manufacturing apparatus 7 are different from those of the first embodiment.

As shown in FIG. 18 , the pressing member 11 of the support device 8 has a convex portion 40 that is inserted into the housing portion 18 of the support member 10 . The convex portion 40 is formed on the first surface 11 a of the pressing member 11 . The convex portion 40 is configured in a columnar shape, but is not limited to this shape. A projection dimension PD2 of the convex portion 40 is smaller than a depth dimension D of the accommodating portion 18 (see FIG. 21). The convex portion 40 has a pressing surface 41 that is in surface contact with the second main surface 3b of the second substrate 3 of the laminate LM.

As shown in FIG. 19, the support member 10 of the support device 8 has a housing portion 18 that is circular in plan view. The laminated body LM is formed in a circular shape in plan view so as to be engaged with the accommodating portion 18 (not shown). That is, the first substrate 2 and the second substrate 3 of the laminate LM are configured in a disc shape.

As shown in FIGS. 18 to 22, the fixing mechanism 13 has the same elastic member 24 and fixing member 25 as in the first embodiment, as well as insertion holes 26 and locking recesses 27 formed in the support member 10 . Note that the guide groove 28 in the first embodiment is not formed in the support member 10 according to the present embodiment.

The diameter of the insertion hole 26 is larger than the diameter of the shaft portion 25b of the fixing member 25 and smaller than the diameter of the head portion 25a. Therefore, the insertion hole 26 allows the shaft portion 25b of the fixing member 25 to pass therethrough, but cannot allow the head portion 25a to pass therethrough.

The engaging recess 27 has a circular side wall surface 27a in plan view and a bottom surface 27b for engaging the head portion 25a of the fixing member 25, as in the first embodiment. The locking recess 27 is formed concentrically with the insertion hole 26 in plan view.

The support member 10 according to this embodiment is attached to the base member 12 as follows. First, as shown in FIG. 20 , the support member 10 is placed on the elastic member 24 attached to the base member 12 with the fixing member 25 of the fixing mechanism 13 removed from the screw hole 31 of the base member 12 .

Next, in plan view, the insertion hole 26 of the support member 10 and the screw hole 31 of the base member 12 are aligned with each other, and the shaft portion 25b of the fixing member 25 is inserted through the insertion hole 26 . After that, the shaft portion 25b is engaged with the screw hole 31. As shown in FIG. As a result, the head portion 25a of the fixing member 25 contacts the bottom surface 27b of the locking recess 27 to lock the support member 10. As shown in FIG. As described above, the support member 10 is fixed to the base member 12 by the fixing mechanism 13 .

As shown in FIGS. 18, 21 and 22, the support device 8 comprises an adjustment plate 42 that engages the housing 18. As shown in FIGS. Although one adjustment plate 42 is illustrated in this embodiment, a plurality of adjustment plates 42 may be used. The adjusting plate 42 is composed of, for example, a circular glass plate or metal plate. The adjustment plate 42 adjusts the depth of the housing portion 18 by being placed on the bottom portion of the housing portion 18 . In addition to this usage mode, the adjustment plate 42 may be a transparent glass plate and may be used by overlapping the adjustment plate 42 on the second main surface 3b of the second substrate 3 in the laminate LM accommodated in the accommodation portion 18. good.

The fixing mechanism 13 and the adjusting plate 42 according to this embodiment may be used in the supporting device 8 according to the first embodiment.

Differences from the first embodiment in the method for manufacturing a joined body according to the present embodiment will be described below. As shown in FIG. 21, in the method of manufacturing a joined body according to the present embodiment, in the supporting step S21, the adjustment plate 42 is accommodated in the accommodation portion 18 of the support member 10, and then the laminate LM is placed in the accommodation portion 18. accommodate.

As shown in FIG. 22, the depth dimension D of the accommodating portion 18 according to the present embodiment is larger than the thickness dimension TLM of the laminate LM. Therefore, the second substrate 3 of the laminate LM is entirely accommodated in the accommodation portion 18 without protruding from the accommodation portion 18 .

Next, the pressing member 11 is placed on the sealing member 15 attached to the base member 12 . At this time, the convex portion 40 of the pressing member 11 is inserted into the accommodating portion 18 of the supporting member 10 . The pressing surface 41 of the convex portion 40 contacts the second main surface 3b of the second substrate 3 in the laminate LM accommodated in the accommodation portion 18 .

In the pressing step S22, the pressing surface 41 presses the second substrate 3 of the laminate LM. In the subsequent laser irradiation step S<b>23 , the laser light L is transmitted through the convex portion 40 of the pressing member 11 and the second substrate 3 of the laminate LM, and is irradiated onto the sealing material 6 .

Other configurations in this embodiment are the same as those in the first embodiment. In this embodiment, the same reference numerals are given to the same components as in the first embodiment.

In addition, the present invention is not limited to the configuration of the above-described embodiment, nor is it limited to the above-described effects. Various modifications can be made to the present invention without departing from the gist of the present invention.

1 Joined Body 2 First Substrate 3 Second Substrate 4 Sealing Layer 6 Sealing Material 8 Supporting Device 10 Supporting Member 11 Pressing Member 12 Base Member 15 Sealing Member 16 Accommodation Space 17 Atmospheric Pressure Adjustment Device 18 Accommodation Part L Laser Light LM Laminate PD1 Dimension in which part of the thickness direction of the second substrate protrudes from the accommodating portion S1 Lamination step S2 Bonding step S21 Supporting step S22 Pressing step S23 Laser irradiation step

Claims (9)

A method for manufacturing a joined body comprising a first substrate, a second substrate, and a sealing layer that joins the first substrate and the second substrate,
a lamination step of forming a laminate by interposing a sealing material between the first substrate and the second substrate and overlapping the first substrate and the second substrate to form a laminate; a bonding step of forming the sealing layer by irradiating the sealing material with a laser beam,
The bonding step includes a supporting step of mounting the laminate on a support device, a pressing step of pressing the laminate, and a laser irradiation step of irradiating the sealing material with the laser beam,
The support device includes a pressing member that presses the laminate, a base member that supports the pressing member, a seal member disposed between the pressing member and the base member, and the pressing member and the base member. An accommodation space for the laminate formed between and an air pressure adjustment device for adjusting the air pressure in the accommodation space,
The pressing member is a circular transparent glass plate,
The sealing member is configured to circularly surround the laminate between the pressing member and the base member,
In the pressing step, the air pressure in the housing space is reduced by the air pressure adjusting device, thereby bringing the pressing member into close contact with the sealing member and pressing the laminate by the pressing member. manufacturing method. The support device includes a support member that supports the laminate within the accommodation space,
The support member has an accommodation portion that accommodates the laminate,
In the supporting step, the first substrate is accommodated in the accommodating portion, and the second substrate is moved so that a portion of the second substrate in the thickness direction protrudes from the accommodating portion toward the pressing member. 2. The method for manufacturing a joined body according to claim 1, wherein the joined body is accommodated in the accommodating portion. 3. The joined body according to claim 2, wherein a dimension in which a portion of said second substrate in the thickness direction protrudes from said accommodating portion is 0.05 to 0.95 times the thickness dimension of said second substrate. Production method. 4. The method for manufacturing a joined body according to any one of claims 1 to 3, wherein the air pressure in the housing space is 100 to 95,000 Pa. 5. The method for manufacturing a joined body according to claim 1, wherein the pressing member has a thickness of 3 to 10 mm. 6. The method for manufacturing a joined body according to claim 1, wherein the pressing member has a Young's modulus of 50 to 80 GPa. 7. The method of manufacturing a joined body according to claim 1, wherein dry air is filled in said accommodation space in said supporting step. 8. The method of manufacturing a joined body according to claim 1, wherein the first substrate is a high thermal conductive substrate, and the second substrate is a glass substrate. An apparatus for manufacturing a bonded body comprising a first substrate, a second substrate, and a sealing layer bonding the first substrate and the second substrate,
a support device for supporting a laminate formed by interposing a sealing material between the first substrate and the second substrate and stacking the first substrate and the second substrate; and a laser irradiation device that forms the sealing layer by irradiating the sealing material in the body with a laser beam,
The support device includes a pressing member that presses the laminate, a base member that supports the pressing member, a seal member disposed between the pressing member and the base member, and the pressing member and the base member. An accommodation space for the laminate formed between and an air pressure adjustment device for adjusting the air pressure in the accommodation space,
The pressing member is a circular transparent glass plate,
The sealing member is configured to circularly surround the laminate between the pressing member and the base member,
A joined body characterized in that the press member is brought into close contact with the seal member by lowering the air pressure in the housing space by the air pressure adjustment device, and the press member presses the laminate. manufacturing equipment.

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