JP2018199600A - Method for manufacturing hermetic package - Google Patents

Abstract

To provide a method for manufacturing a hermetic package in which a glass lid and containers can bonded by laser beam irradiation and airtightness can be increased in a state where the glass lid and the containers are securely brought into contact with a sealing material.SOLUTION: A method for manufacturing a hermetic package in which containers 3A to 3C are sealed by a glass lid 5 comprises: a process of preparing a transparent substrate 7 for bringing the glass lid 5 into contact therewith; a process of energizing the containers 3A to 3C by a plunger 12 (energizing member) in a state where a sealing material 4A is arranged among the containers 3A to 3C and the glass lid 5, and bringing the glass lid 5 into contact with the transparent substrate 7; and a process of irradiating the sealing material 4A with a laser beam L from a transparent substrate 7 side in a state where the glass lid 5 is brought into contact with the transparent substrate 7, and bonding the containers 3A to 3C and the glass lid 5 by the sealing material 4A.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a method for manufacturing an airtight package.

  Conventionally, an airtight package is used for mounting and sealing elements such as LEDs. Such an airtight package is configured by joining a container in which an element or the like can be arranged and a cover member for sealing the container. It has been studied to seal the elements and the like in an airtight package to suppress contact of moisture and the like with the elements and improve reliability.

  Patent Document 1 below discloses an airtight package in which a container made of glass ceramics and a glass lid are joined via a sealing material. In Patent Document 1, a glass frit made of low-melting glass is used as the sealing material. Moreover, in patent document 1, the container and glass lid which consist of glass ceramics are joined by baking and softening the said sealing material.

JP 2014-236202 A

  When an element having low heat resistance is mounted, if the glass frit is baked and softened as in Patent Document 1, the element characteristics may be thermally deteriorated by heating during baking. As a method for solving this problem, a method of softening the glass frit by irradiating the glass frit with laser light and locally heating it can be considered.

  However, since the shapes of the containers actually vary, it has been difficult to ensure that the glass lid and the container are in close contact with the sealing material when the laser beam is irradiated. For this reason, the airtightness of the package may not be sufficiently improved.

  An object of the present invention is to provide a hermetic package that can enhance the airtightness by allowing the glass lid and the container to be joined by laser light irradiation in a state where the glass lid and the container are securely adhered to the sealing material. It is to provide a manufacturing method.

  The manufacturing method of an airtight package of the present invention is a method of manufacturing an airtight package in which a container is sealed with a glass lid, the step of preparing a transparent substrate for closely attaching the glass lid, and between the container and the glass lid In a state where the sealing material is arranged, the step of urging the container with the urging member to bring the glass lid into close contact with the transparent substrate, and the state where the glass lid is brought into close contact with the transparent substrate, from the transparent substrate side to the sealing material And a step of irradiating a laser beam to join the container and the glass lid with a sealing material.

  In the present invention, a method for producing a plurality of hermetic packages, wherein each of the containers is independently urged by a plurality of urging members provided for each of the plurality of containers, and the plurality of glass lids are provided. You may make it contact | adhere to a transparent substrate.

  In the present invention, it is preferable that the glass lid is brought into close contact with the transparent substrate by biasing the bottom of the container in a tiltable state by biasing the substantially central part of the bottom of the container.

  In the present invention, the container may be urged by providing a receiving member between the bottom of the container and the urging member and urging the receiving member with the urging member. It is preferable that the first surface of the receiving member in contact with the bottom of the container is formed so as to be in close contact with the bottom. A concave portion is formed in the second surface of the receiving member on the biasing member side, and the biasing member is brought into contact with the concave portion and biased, thereby biasing the receiving member and the container with the bottom portion being tiltable. It is preferable that the glass lid is adhered to the transparent substrate.

  In the present invention, the urging member may have a rod-shaped portion and a spring member connected to the rod-shaped portion.

  According to the present invention, in a state where the glass lid and the container are securely adhered to the sealing material, the glass lid and the container can be joined by irradiation with laser light, and the airtight package can be improved. A manufacturing method can be provided.

It is typical front sectional drawing of the airtight package of one Embodiment of this invention. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of 1st Embodiment. It is typical plane sectional drawing for demonstrating the manufacturing method of the airtight package of the 1st Embodiment of this invention. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of the 1st Embodiment of this invention. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of the 1st Embodiment of this invention. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of the modification of 1st Embodiment. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of the 2nd Embodiment of this invention. (A) And (b) is typical front sectional drawing for demonstrating the manufacturing method of the airtight package of a comparative example.

  Hereinafter, preferred embodiments will be described. However, the following embodiments are merely examples, and the present invention is not limited to the following embodiments. Moreover, in each drawing, the member which has the substantially the same function may be referred with the same code | symbol.

(Airtight package)
FIG. 1 is a schematic front sectional view of an airtight package according to an embodiment of the present invention. As shown in FIG. 1, the hermetic package 1 includes a container 3 and a glass lid 5 that seals the container 3. The container 3 has a bottom 3a and a frame-like side wall 3b disposed on the bottom 3a.

  The container 3 is made of, for example, ceramic or glass ceramic. Examples of the ceramic include aluminum oxide, aluminum nitride, zirconia, and mullite. Examples of the glass ceramic include LTCC (Low Temperature Co-fired Ceramics). Specific examples of LTCC include a sintered body of an inorganic powder such as titanium oxide or niobium oxide and a glass powder. The bottom part 3a and the side wall part 3b may be integrally formed. Alternatively, the container 3 may be formed of a separate bottom 3a and side wall 3b.

  Various materials can be used for the material of the glass lid 5. Examples of the glass include alkali-free glass, borosilicate glass, soda lime glass, and the like.

  The hermetic package 1 includes a sealing material layer 4 disposed between the side wall 3 b of the container 3 and the glass lid 5. The container 3 and the glass lid 5 are joined by a sealing material layer 4.

The sealing material layer 4 is made of a sealing material containing a low-melting glass powder. The low melting point glass powder can soften the sealing material at a lower temperature, and can further suppress the thermal deterioration of the element. As the low-melting glass powder, for example, Bi ₂ O ₃ glass powder, SnO—P ₂ O ₅ glass powder, V ₂ O ₅ —TeO ₂ glass powder, or the like can be used. As will be described later, when softening the sealing material by laser light irradiation, the glass is selected from CuO, Cr ₂ O ₃ , Fe ₂ O ₃ , MnO _{2 and the} like in order to improve the absorption of the laser light. At least one pigment may be included. Further, the sealing material may contain a low expansion refractory filler, a laser light absorbing material and the like in addition to the low melting point glass powder. Examples of the low expansion refractory filler include cordierite, willemite, alumina, zirconium phosphate compounds, zircon, zirconia, tin oxide, quartz glass, β-quartz solid solution, β-eucryptite, and spodumene. Examples of the laser light absorbing material include compounds such as at least one metal selected from Fe, Mn, Cu and the like or an oxide containing the metal. As will be described later, the container 3 and the glass lid 5 of the present embodiment soften the sealing material by irradiation with laser light to form the sealing material layer 4.

(Production method)
(First embodiment)
2A and 2B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. FIG. 3 is a schematic plan cross-sectional view for explaining the manufacturing method of the hermetic package of the first embodiment. 4A and 4B are schematic front sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. In addition, in Fig.4 (a), the containers 3A-3C are shown schematically. In FIG.4 (b), the plunger 12 mentioned later is shown schematically.

  As shown in FIG. 2A, a plurality of glass lids 5 are prepared. On the other hand, a plurality of containers 3A to 3C shown in FIG. It is desirable that the plurality of containers 3A to 3C have ideally the same shape. However, in reality, the thickness of the container may be different or the bottom may be inclined due to manufacturing variations or the like. In the present embodiment, the bottom of the container 3A is inclined, and the thickness of the container 3B is thicker than the thickness of the container 3C. In addition, in this specification, the thickness of a container means the largest dimension of the container along the direction where a side wall part extends.

  Next, as shown in FIG. 2A, the sealing material 4 </ b> A is disposed on each glass lid 5. 4A of sealing materials are arrange | positioned in the part joined to the container of the glass cover 5. As shown in FIG. The sealing material 4A of the present embodiment is a glass frit containing a laser light absorbing material. The arrangement of the sealing material 4A can be performed, for example, by printing a paste in which the sealing material 4A is mixed with an appropriate organic binder. Next, baking is performed at a temperature of 400 ° C. or higher and 600 ° C. or lower. In addition, you may arrange | position 4 A of sealing materials on the side wall part of a container.

  Next, as shown in FIG. 2B, a first jig 6 having a transparent substrate 7 is prepared. The first jig 6 has a first jig side wall portion 8 a for positioning the glass lid 5. As shown in FIG. 3, the first jig side wall 8a has a lattice shape in plan view. The lattice-like shape of the first jig side wall 8 a is a shape corresponding to the planar shape of each glass lid 5. The first jig side wall 8 a is provided so as to surround each glass lid 5 when a plurality of glass lids 5 are arranged on the transparent substrate 7. Thereby, a plurality of glass lids 5 can be positioned.

  Returning to FIG. 2B, the first jig 6 has a second jig side wall portion 8b for positioning each container. Similar to the first jig side wall 8a, the second jig side wall 8b has a lattice shape in plan view. Furthermore, the first jig 6 has a jig fixing portion 6a for fixing a second jig described later. The jig fixing portion 6a is provided so as to surround the transparent substrate 7 in plan view. In addition, the 1st jig | tool 6 should just have the transparent substrate 7, and the structure of the 1st jig | tool 6 is not specifically limited.

  Next, as shown in FIGS. 2B and 3, the glass lids 5 are arranged on the transparent substrate 7 so as to be surrounded by the first jig side wall 8 a. Next, as illustrated in FIG. 4A, the containers 3 </ b> A to 3 </ b> C are placed on each glass lid 5 with the sealing material 4 </ b> A interposed therebetween.

  On the other hand, as shown in FIG. 4B, a second jig 9 is prepared. The second jig 9 includes a jig bottom 9a, a plurality of biasing members arranged so as to penetrate the jig bottom 9a, and a third jig side wall provided on the jig bottom 9a. Part 9b. In the present embodiment, the urging member is a plunger 12.

  The plunger 12 has a main body 13, a rod-like portion 14 protruding from the main body 13, and a spring member that is accommodated in the main body 13 and connected to the rod-like portion 14. The shape of the tip of the rod-shaped portion 14 is not particularly limited, but is substantially hemispherical in the present embodiment. Each plunger 12 is arrange | positioned in the position corresponding to the position where containers 3A-3C are arrange | positioned in the 1st jig | tool 6 shown to Fig.4 (a). The second jig 9 is an example of a jig for urging the containers 3A to 3C toward the glass lid 5 and urging the glass lid 5 toward the transparent substrate 7 side. The configuration of 9 is not particularly limited.

  5A and 5B are schematic front cross-sectional views for explaining the method for manufacturing the hermetic package of the first embodiment. In FIGS. 5A and 5B, the containers 3A to 3C and the plunger 12 are schematically shown.

  Next, as shown in FIG. 5 (a), the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is a container. The 2nd jig | tool 9 is arrange | positioned so that each may contact | connect the bottom part of 3A-3C. Although the position in the bottom part of container 3A-3C which each rod-shaped part 14 contacts is not specifically limited, In this embodiment, it contacts the approximate center part of a bottom part. Next, the first jig 6 and the second jig 9 are fixed. In this embodiment, although the 1st jig | tool 6 and the 2nd jig | tool 9 are fixed with a screw, the said fixing method is not limited to this.

  Here, in the process shown in FIG. 4B, the length of the portion of the rod-shaped portion 14 of each plunger 12 protruding from the main body 13 is fixed between the first jig 6 and the second jig 9. It is longer than the distance between each main body 13 and the containers 3A to 3C. Thereby, when the 1st jig | tool 6 and the 2nd jig | tool 9 are fixed as shown to Fig.5 (a), the rod-shaped part 14 of each plunger 12 is a main body by the bottom part of the containers 3A-3C. 13 is pushed in. At this time, the spring member of each plunger 12 is contracted, and each plunger 12 urges the containers 3A to 3C toward the respective glass lids 5 by the restoring force of the spring members, and each glass lid 5 is moved toward the transparent substrate 7 side. Energize to. In this way, each of the containers 3 </ b> A to 3 </ b> C is independently energized by each plunger 12 provided for each of the containers 3 </ b> A to 3 </ b> C, and each glass lid 5 is brought into close contact with the transparent substrate 7.

  In the present embodiment, the spring member of each plunger 12 contracts according to the thickness of the containers 3A to 3C and the shape of the bottom, and each plunger 12 biases the containers 3A to 3C. Thereby, even when the thicknesses of the containers 3 </ b> A to 3 </ b> C are different or the bottom is tilted, each glass lid 5 can be reliably adhered to the transparent substrate 7.

  At this time, in a state where each glass lid 5 is in close contact with the transparent substrate 7, the containers 3 </ b> A to 3 </ b> C are urged toward the respective glass lids 5 by the respective plungers 12. Therefore, the glass lid 5 and the containers 3A to 3C can be more reliably adhered to the sealing material 4A.

  Next, as shown in FIG. 5B, the sealing material 4 </ b> A is irradiated with laser light L from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7. Thereby, the sealing material 4A is softened, and each glass lid 5 and the containers 3A to 3C are joined. At this time, the sealing material layer 4 shown in FIG. 1 is formed, and a plurality of hermetic packages can be obtained.

  In this embodiment, the containers 3 </ b> A to 3 </ b> C and the glass lids 5 can be more reliably brought into close contact with the sealing material 4 </ b> A, and the containers 3 </ b> A to 3 </ b> C and the glass lids 5 can be joined by irradiation with the laser beam L. Therefore, the airtightness of each airtight package can be effectively increased, and the reliability can be effectively increased. In addition, a plurality of hermetic packages can be obtained at the same time, and productivity can be improved.

  Hereinafter, the effects of the present embodiment will be described in more detail by comparing the present embodiment with a comparative example.

  FIGS. 8A and 8B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a comparative example. In the comparative example, as shown in FIG. 8A, a second jig 109 is prepared. Similar to the second jig of the present embodiment, the second jig 109 has a jig bottom 9a and a third jig side wall 9b, but does not have an urging member. In the second jig 109 of the comparative example, a stage 109c is provided on the jig bottom 9a. On the stage 109c, the same 1st jig | tool side wall part 8a and the 2nd jig | tool side wall part 8b similar to the 1st jig | tool in this embodiment are provided.

  Next, the containers 3A to 3C in which the sealing material 4A is arranged on the side wall portion are placed on the stage 109c. Next, the glass lid 5 is placed on each of the containers 3A to 3C with the sealing material 4A interposed therebetween.

  On the other hand, a first jig 106 having a transparent substrate 7 shown in FIG. 8B is prepared. The first jig 106 is configured in the same manner as the first jig of the present embodiment except that the first jig side wall 8a and the second jig side wall 8b are not provided. Next, as illustrated in FIG. 8B, the containers 3 </ b> A to 3 </ b> C and the glass lids 5 are irradiated by irradiating the sealing material 4 </ b> A with the laser light L in a state where the glass lids 5 are pressed by the transparent substrate 7. And join.

  In the comparative example, as shown in FIG. 8B, since the thickness of the container 3C is thinner than the container 3B, it is difficult to bring the glass lid 5 on the container 3C and the transparent substrate 7 into close contact. Since the bottom of the container 3A is tilted, the glass lid 5 on the container 3A is tilted when the container 3A is disposed on the stage 109c from the bottom side. Therefore, it is difficult to sufficiently adhere the glass lid 5 and the transparent substrate 7 on the container 3A. Therefore, it is difficult to ensure that the glass lid 5 and the containers 3A and 3C are in close contact with the sealing material 4A, and the airtightness of the airtight package may not be sufficiently increased.

  On the other hand, in this embodiment, as shown to Fig.5 (a), in the state which has arrange | positioned sealing material 4A between container 3A-3C and each glass cover 5, container 3A- 3C is energized to have each glass lid 5 adhere to the transparent substrate 7. Thereby, as shown in FIG. 5 (b), each glass lid 5 and containers 3A to 3A are irradiated by laser light L in a state where the glass lid 5 and containers 3A to 3C are securely adhered to the sealing material 4A. 3C can be joined. Therefore, an airtight package having high airtightness can be obtained.

  In the present embodiment, the bottoms of the containers 3A to 3C are biased in a tiltable state by biasing the substantially central part of the bottoms of the containers 3A to 3C. Therefore, the glass lid 5 can be more closely adhered to the transparent substrate 7, and the glass lid 5 and the containers 3A to 3C can be more securely adhered to the sealing material 4A.

  In FIGS. 5A and 5B, an example in which the container 3 </ b> A is urged by one plunger 12 is shown, but the container 3 </ b> A may be urged by a plurality of plungers 12. In this case, the uniformity in the in-plane direction of the force applied to the bottom of the container 3A can be improved. The same applies to the case where the containers 3B and 3C are urged by the plurality of plungers 12. As a result, the containers 3A to 3C and the glass lids 5 can be more closely adhered to the sealing material 4A.

  The tip of the rod-like portion 14 of the plunger 12 is preferably a curved surface shape such as a substantially hemisphere as in this embodiment. Thereby, even when the bottom portion is inclined as in the case of the container 3A, the rod-like portion 14 can be suitably brought into contact with the bottom portion, and can be biased more reliably. Therefore, the glass lid 5 and the container 3A can be more reliably adhered to the sealing material 4A.

  In the second jig 9, the urging member is the plunger 12 having a spring member, but the urging member is not limited to this. The biasing member may be, for example, a pneumatic plunger, or a spring member.

  In addition, although the manufacturing method of this embodiment is a method of manufacturing a plurality of hermetic packages, the present invention can also be applied as a method of manufacturing one hermetic package. In this case, as in the present embodiment, even when the bottom of the container 3A is inclined, the glass lid 5 and the container 3A are securely adhered to the sealing material 4A, and the glass is irradiated by the laser light L. The lid 5 and the container 3A can be joined. Therefore, an airtight package having high airtightness can be obtained.

  In this embodiment, since it has the process of arrange | positioning the glass lid | cover 5 on the transparent substrate 7, the glass lid | cover 5 can be stuck more reliably with the transparent substrate 7. FIG. Therefore, the glass lid 5 and the containers 3A to 3C can be joined by irradiation with the laser light L in a state where the glass lid 5 and the containers 3A to 3C are more securely adhered to the sealing member 4A. Note that the step of arranging the glass lid 5 on the transparent substrate 7 is not necessarily required.

  6A and 6B are schematic front cross-sectional views for explaining a method for manufacturing an airtight package of a modification of the first embodiment.

  In this modification, a second jig 39 having a plurality of plungers 12 shown in FIG. 6A is prepared. The second jig 39 is the same as the first jig except that the second jig side wall part 8b in the first embodiment is provided on the jig bottom part 9a via the support members 9c and 9d. It is configured in the same manner as the second jig of the embodiment. On the other hand, the containers 3A to 3C in which the sealing member 4A is arranged on the side wall portion are prepared.

  Next, as shown to Fig.6 (a), the containers 3A-3C are arrange | positioned so that it may be supported by the 2nd jig | tool side wall part 8b and the rod-shaped part 14 of each plunger 12. FIG. Next, the glass lid 5 is placed on each of the containers 3A to 3C with the sealing material 4A interposed therebetween. At this time, the spring members of the plungers 12 are contracted due to the weights of the containers 3A to 3C and the glass lids 5.

  In the present modification, among the glass lids 5 on the containers 3A to 3C, the glass lid 5 on the container 3B is farthest from the jig bottom portion 9a. Since the bottom of the container 3A is tilted, the container 3A and the lid 5 on the container 3A are tilted.

  On the other hand, a first jig 36 having a transparent substrate 7 shown in FIG. 6B is prepared. The first jig 36 is the first jig of the first embodiment except that it does not have the first jig side wall 8a and the second jig side wall 8b shown in FIG. It is comprised similarly to a jig | tool. Next, as shown in FIG. 6B, each glass lid 5 is pressed by the transparent substrate 7. At this time, the transparent substrate 7 first presses the glass lid 5 on the container 3B. Thereby, the spring member of the plunger 12 contracts, and the transparent substrate 7 and the glass lid 5 move to the plunger 12 side. By this movement, the transparent substrate 7 also contacts the glass lid 5 on the container 3A and the glass lid 5 on the container 3C, and the transparent substrate 7 presses each glass lid 5 on the containers 3A to 3C.

  The spring member of each plunger 12 is contracted by the force with which the transparent substrate 7 presses each glass lid 5, and the containers 3 </ b> A to 3 </ b> C are urged toward the glass lid 5 by the restoring force of the spring member, and each glass lid 5 is urged toward the transparent substrate 7. Thereby, each glass lid 5 is brought into close contact with the transparent substrate 7. Although the glass lid 5 on the container 3A is arranged to be inclined with respect to the transparent substrate 7, the glass on the container 3A and the container 3A is placed so that the glass lid 5 is in close contact with the transparent substrate 7 by the biasing. The lid 5 rotates. Thereby, the glass lid 5 on the container 3 </ b> A is also in close contact with the transparent substrate 7.

  Next, the containers 3 </ b> A to 3 </ b> C and the glass lids 5 are joined by irradiating the sealing material 4 </ b> A with the laser light L in a state where the glass lids 5 are in close contact with the transparent substrate 7.

  Also in this modification, each glass lid 5 and containers 3A to 3C can be joined by irradiation with laser light L in a state where the glass lid 5 and containers 3A to 3C are securely adhered to the sealing material 4A. . However, as in the first embodiment, when the glass lid 5 is provided on the transparent substrate 7, each glass lid 5 can be more easily brought into close contact with the transparent substrate 7. Each glass lid 5 and containers 3A to 3C can be more closely attached to 4A.

(Second Embodiment)
FIGS. 7A and 7B are schematic front cross-sectional views for explaining the manufacturing method of the hermetic package of the second embodiment. In the manufacturing method of this embodiment, the same processes as those of the first embodiment are performed up to the process shown in FIG.

  Next, as shown to Fig.7 (a), each receiving member 25 is each arrange | positioned at the bottom part of containers 3A-3C. Each receiving member 25 has a first surface 25a located on the container 3A to 3C side, and a second surface 25b facing the first surface 25a. Each first surface 25a is provided in close contact with the bottoms of the containers 3A to 3C.

  The second surface 25b of each receiving member 25 is provided with a recess 25c. Each recessed part 25c is provided in the position where the rod-shaped part 14 of each plunger 12 contacts, respectively, when energizing container 3A-3C. The shape of the recess 25 c is not particularly limited, but in the present embodiment, the shape corresponds to the shape of the tip of the rod-like portion 14. More specifically, the shape of the recess 25c is substantially hemispherical.

  Next, as shown in FIG. 7B, the third jig side wall part 9b is in contact with the jig fixing part 6a of the first jig 6, and the rod-like part 14 of each plunger 12 is The 2nd jig | tool 9 is arrange | positioned so that it may contact with the recessed part 25c of the receiving member 25, respectively. Next, the first jig 6 and the second jig 9 are fixed. Accordingly, each plunger 12 is brought into contact with the concave portion 25c of each receiving member 25 and biased, thereby biasing each receiving member 25 and the containers 3A to 3C in a state where the bottom portion can be tilted, thereby making the glass lid 5 transparent. Adhere to the substrate 7.

  In the present embodiment, the receiving members 25 are provided between the bottoms of the containers 3A to 3C and the plungers 12, and the containers 3A to 3C are biased by biasing the receiving members 25. The force applied to the bottom of ~ 3C can be dispersed. In addition, since the 1st surface 25a of each receiving member 25 is closely_contact | adhered to the bottom part of containers 3A-3C, the force applied to a bottom part can be disperse | distributed effectively. Therefore, the containers 3A to 3C are hardly damaged.

  Since the shape of the concave portion 25 c of the receiving member 25 is a shape corresponding to the shape of the tip of the rod-shaped portion 14 of the plunger 12, the contact area between the rod-shaped portion 14 and the receiving member 25 can be increased. Thereby, when energizing containers 3A-3C, it can be in the state where the bottom part can incline more certainly. Furthermore, the force applied to the bottoms of the containers 3A to 3C can be further dispersed. The receiving member 25 does not have to be provided with the recess 25c. Even in this case, the force applied to the bottoms of the containers 3A to 3C by the plungers 12 can be dispersed.

  Next, laser light L is irradiated from the transparent substrate 7 side in a state where each glass lid 5 is in close contact with the transparent substrate 7.

  Also in this embodiment, each glass lid 5 and containers 3A to 3C can be joined by irradiation with laser light L in a state where the glass lid 5 and containers 3A to 3C are securely adhered to the sealing material 4A. . Therefore, an airtight package having high airtightness can be obtained.

DESCRIPTION OF SYMBOLS 1 ... Airtight package 3, 3A-3C ... Container 3a ... Bottom part 3b ... Side wall part 4 ... Sealing material layer 4A ... Sealing material 5 ... Glass lid 6 ... First jig 6a ... Jig fixing part 7 ... Transparent substrate 8a, 8b ... 1st, 2nd jig side wall part 9 ... 2nd jig 9a ... Jig bottom part 9b ... 3rd jig side wall part 9c, 9d ... Support member 12 ... Plunger 13 ... Main body 14 ... Bar shape Portion 25 ... Receiving members 25a, 25b ... First and second surfaces 25c ... Recess 36 ... First jig 39 ... Second jig 106 ... First jig 109 ... Second jig 109c ... Stage

Claims (7)

A method of manufacturing an airtight package in which a container is sealed with a glass lid,
Preparing a transparent substrate for closely attaching the glass lid;
In a state where a sealing material is disposed between the container and the glass lid, the step of energizing the container with an urging member to closely contact the glass lid with the transparent substrate
Irradiating the sealing material with laser light from the transparent substrate side in a state where the glass lid is in close contact with the transparent substrate, and joining the container and the glass lid with the sealing material. A manufacturing method of an airtight package. A method of manufacturing a plurality of said hermetic packages,
The plurality of urging members provided for each of the plurality of containers independently urge each of the containers, and the plurality of glass lids are in close contact with the transparent substrate. A manufacturing method of an airtight package.   The airtight according to claim 1 or 2, wherein the glass lid is brought into close contact with the transparent substrate by urging the bottom of the container in an inclinable state by urging the substantially central part of the bottom of the container. Package manufacturing method.   The airtight package according to claim 1 or 2, wherein a receiving member is provided between the bottom of the container and the biasing member, and the container is biased by biasing the receiving member with the biasing member. Production method.   The manufacturing method of the airtight package of Claim 4 currently formed so that the 1st surface of the said receiving member which contact | connects the said bottom part of the said container may contact | adhere with the said bottom part.   A recess is formed in the second surface of the receiving member on the biasing member side, and the receiving member is biased by bringing the biasing member into contact with the recess and biasing the receiving member. The manufacturing method of the airtight package of Claim 4 or 5 which urges | biases the said container and adheres the said glass cover to the said transparent substrate.   The manufacturing method of the airtight package as described in any one of Claims 1-6 in which the said biasing member has a rod-shaped part and the spring member connected to the said rod-shaped part.

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